CN109781312B - 一种电容式压力传感器及其制备方法 - Google Patents
一种电容式压力传感器及其制备方法 Download PDFInfo
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- CN109781312B CN109781312B CN201910068807.1A CN201910068807A CN109781312B CN 109781312 B CN109781312 B CN 109781312B CN 201910068807 A CN201910068807 A CN 201910068807A CN 109781312 B CN109781312 B CN 109781312B
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CN110272559A (zh) * | 2019-07-23 | 2019-09-24 | 华南师范大学 | 一种用于电润湿器件的柔性疏水介电膜的制备方法 |
CN110470703B (zh) * | 2019-08-21 | 2022-03-11 | 济南大学 | 一种基于“拱形”结构的电容式湿度传感器及其制备方法和应用 |
CN110579296B (zh) * | 2019-09-30 | 2020-08-04 | 西安交通大学 | 倾斜结构增强的双电层电容式柔性压力传感器及制造方法 |
CN110763375B (zh) * | 2019-11-07 | 2022-04-05 | 南方科技大学 | 一种介电层、离子电容式柔性触觉传感器及其制备方法和应用 |
CN113776709B (zh) * | 2021-08-09 | 2023-10-13 | 济南大学 | 一种双模柔性触觉传感器及其制备方法和应用 |
CN115337011B (zh) * | 2022-10-19 | 2023-01-31 | 季华实验室 | 一种金属包覆的水凝胶电极及其制备方法 |
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US9826625B2 (en) * | 2012-06-11 | 2017-11-21 | Ecole Polytechnique Federale De Lausanne (Epfl) | Stretchable electronic structures formed of thin films integrated with soft heterogeneous substrate |
CN107044891A (zh) * | 2016-08-28 | 2017-08-15 | 美国钛晟科技股份有限公司 | 基于离子膜的电容式压力传感器 |
CN106441073A (zh) * | 2016-09-05 | 2017-02-22 | 西安交通大学 | 一种用于大变形和触觉压力测量的介电柔性传感器 |
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