CN109752120A - Micro-resonator, exciting/pick-up circuit and the pressure sensor of pressure drag pick-up - Google Patents
Micro-resonator, exciting/pick-up circuit and the pressure sensor of pressure drag pick-up Download PDFInfo
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- CN109752120A CN109752120A CN201910056907.2A CN201910056907A CN109752120A CN 109752120 A CN109752120 A CN 109752120A CN 201910056907 A CN201910056907 A CN 201910056907A CN 109752120 A CN109752120 A CN 109752120A
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Abstract
The disclosure provides a kind of micro-resonator of pressure drag pick-up, exciting/pick-up circuit and pressure sensor, and the micro-resonator of the pressure drag pick-up includes: anchor point structure and the movable structure that is set on anchor point structure；The movable structure, comprising: H-shaped girder construction, pick-up end, driving electrodes and varistor；Wherein, strip groove is respectively arranged on the both ends of two single-beams, the strip groove extends to pick-up end, and pick-up end is divided into resonance signal detection section-ground section-resonance signal and detects section three-stage structure, the junction of single-beam and resonance signal detection section is arranged in varistor.Micro-resonator, exciting/pick-up circuit and the pressure sensor for the pressure drag pick-up that the disclosure provides use pressure drag pick-up mode, improve the output signal strength of resonator.
Description
Technical field
This disclosure relates to MEMS micro-sensor technologies field more particularly to a kind of micro-resonator of pressure drag pick-up, exciting/pick up
Shake circuit and pressure sensor.
Background technique
Micro-resonator refers to a kind of micro-structure for the generation resonance frequency produced by MEMS (MEMS), has
Small in size, light weight, compact-sized, high resolution, precision be high, convenient for data transmission process and storage the advantages that, answer extensively
With on time reference, signal filtering and various sensors.Micro-resonator is movable structure, is by additional electricity at work
The modes such as field force or magnetic field force vibrate resonator, then the resonance frequency of resonator is detected by certain specific pick-up modes
Rate.
With micro-resonator for main sensing element, realized with resonator natural resonance characteristic with measured changing rule
Sensor is called resonant transducer.Resonant transducer itself exports (quasi- digital signal) as periodic signal, as long as with letter
Single digital circuit is the digital signal that can be exchanged into easily with microprocessor interface；Simultaneously because the repetition of resonant sensitive element
Property, resolving power and stability etc. are very good, and the synthesis precision of resonant transducer is generally higher.
Wherein, resonance pressure sensor is using resonator as sensing element, by detection resonator intrinsic frequency with outer
The variation of boundary's pressure to measure a kind of device or device of pressure indirectly.Sensor output is frequency signal, long distance transmission
Its precision will not be reduced, can easily be communicated with host computer without AD conversion.Resonance type pressure sensor has good line
Property degree, resolution ratio, stability and high precision, be widely used in aerospace, Industry Control/calibration, weather monitoring etc. weight
Want field.
However, in implementing the present disclosure, present inventor's discovery, there may be anti-interference abilities for micro-resonator
The technical issues of difference, output signal strength is weak, is easy to produce exciting voltage and Non-Linear Vibration.
Disclosure
(1) technical problems to be solved
Based on above-mentioned technical problem, the disclosure provides a kind of micro-resonator of pressure drag pick-up, exciting/pick-up circuit and pressure
Sensor, to alleviate micro-resonator poor anti jamming capability in the prior art, output signal strength is weak, is easy to produce exciting voltage
And the technical issues of Non-Linear Vibration.
(2) technical solution
According to one aspect of the disclosure, a kind of micro-resonator of pressure drag pick-up is provided, comprising: anchor point structure；And it sets
The movable structure being placed on the anchor point structure, comprising: H-shaped girder construction；Pick-up end is set to the end of the H-shaped girder construction
Portion, and connect respectively with two single-beams of H-shaped girder construction one end, it is divided into: ground section and resonance signal detection section；Two drives
Moving electrode is separately positioned on the two sides of the H-shaped girder construction；And varistor, the side of single-beam along the H-shaped girder construction
To being formed in the H-shaped girder construction；Wherein, it is respectively arranged with strip groove on the both ends of two single-beams, the bar shaped is recessed
Slot extends to the pick-up end, and the pick-up end is divided into resonance signal detection section-ground section-resonance signal and detects three sections of section knots
The junction of the single-beam and resonance signal detection section is arranged in structure, the varistor.
In some embodiments of the present disclosure, in which: the pick-up end includes two, and two pick-up ends are respectively set
At the both ends of the H-shaped girder construction；The varistor includes four, and four varistors are respectively formed in described in two
On single-beam.
In some embodiments of the present disclosure, the varistor is by Deep Reaction ion etching technology along the single-beam
Direction formation is etched on single-beam.
According to another aspect of the disclosure, a kind of micro-resonator exciting/pick-up circuit of pressure drag pick-up is also provided, is wrapped
It includes: the opposite exchange driving electricity of the micro-resonator of pressure drag pick-up, bias DC voltage source and the both direction that the disclosure provides
Potential source；Wherein, two driving electrodes are connect with bias DC voltage source, and two driving electrodes are also respectively with two
A contrary AC drive voltage source connection, the direction of motion of two single-beams of the H-shaped girder construction are identical；One
On a pick-up end: electric current is along its flow direction successively by resonance signal detection section, the varistor and institute
Ground section is stated, power cathode is returned, the electric signal on the varistor is detected into section by the resonance signal and is drawn.
According to another aspect of the disclosure, a kind of micro- resonance pressure sensor of pressure drag pick-up is also provided, comprising: SOI
Layer, be divided into from the bottom to top: substrate layer is provided with pressure sensitive film；Buried oxide layer is used to form disclosure offer
Pressure drag pick-up micro-resonator anchor point structure, and be fixedly connected with the pressure sensitive film；And device layer, it is used for shape
At the movable structure of the micro-resonator of the pressure drag pick-up of disclosure offer, and it is connect with the buried oxide layer；And glass cover-plate,
It fastens on the soi layer, for realizing the Vacuum Package of the micro-resonator of the pressure drag pick-up.
In some embodiments of the present disclosure, the movable structure includes at least two.
In some embodiments of the present disclosure, the device layer further include: electrode is separated into multiple portions by isolation channel
Point；The ground section, the resonance signal detection section and the driving electrodes pass through respectively connecting structure for electrical equipment from it is different
Electrode connects one by one.
In some embodiments of the present disclosure, in which: the electrode is arranged in Fang Huan；The movable structure includes two；
Two movable structures are oppositely arranged on the diagonal line of party's ring, one of pick-up end point of each movable structure
It is not connect diagonally with two of party ring.
In some embodiments of the present disclosure, the outer sheath of the electrode is equipped with bonding frame, and the glass cover-plate fastens
On the bonding frame.
In some embodiments of the present disclosure, in which: correspond on the glass cover-plate and be provided at the annular distance of the Fang Huan
Cavity；It is provided with getter in the cavity, for absorbing the gas generated in the movable structure bonding.
(3) beneficial effect
It can be seen from the above technical proposal that micro-resonator, the exciting/pick-up circuit of the pressure drag pick-up that the disclosure provides
And pressure sensor one of has the advantages that or in which a part:
(1) pressure drag pick-up mode is used, the output signal strength of resonator is improved；
(2) in such a way that resonator beam is vibrated in the same direction, the exciting voltage of resonator is reduced；
(3) it is driven using Opposed crossing voltage, reduces the Non-Linear Vibration of resonator；
(4) the multi-resmator formula sensor based on resonator production, process complexity bottom can characterize temperature parameter, can
To effectively improve sensor temperature self compensation, the synthesis precision of sensor is improved.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the micro-resonator for the pressure drag pick-up that the embodiment of the present disclosure provides.
Fig. 2 is the micro-resonator exciting/pick-up circuit schematic diagram for the pressure drag pick-up that the embodiment of the present disclosure provides.
Fig. 3 is the structural schematic diagram of the micro- resonance pressure sensor for the pressure drag pick-up that the embodiment of the present disclosure provides.
[embodiment of the present disclosure main element symbol description in attached drawing]
100- anchor point structure；
200- movable structure；
210-H beam structure；
211- strip groove；
220- pick-up end；
221- ground section；
222- resonance signal detects section；
230- driving electrodes；
240- varistor；
300-SOI layers；
310- device layer；
311- electrode；
312- isolation channel；
313- connecting structure for electrical equipment；
314- is bonded frame；
320- buried oxide layer；
330- substrate layer；
331- pressure sensitive film；
400- glass cover-plate；
410- cavity；
420- getter.
Specific embodiment
Micro-resonator, exciting/pick-up circuit and the pressure sensor for the pressure drag pick-up that the disclosure provides use pressure drag pick-up
Mode improves the output signal strength of resonator；Resonator beam is vibrated in the same direction, reduces the exciting voltage of resonator；And it adopts
It is driven with Opposed crossing voltage, reduces the Non-Linear Vibration of resonator；Based on the resonator production multi-resmator formula sensor,
Process complexity bottom can characterize temperature parameter, can effectively improve sensor temperature self compensation, improve the comprehensive essence of sensor
Degree.
For the purposes, technical schemes and advantages of the disclosure are more clearly understood, below in conjunction with specific embodiment, and reference
The disclosure is further described in attached drawing.
According to one aspect of the disclosure, a kind of micro-resonator of pressure drag pick-up is provided, as shown in Figure 1, comprising: anchor point knot
Structure 100 and the movable structure 200 being set on anchor point structure；The movable structure 200 includes: H-shaped girder construction 210, pick-up
Hold 220, two driving electrodes 230 and varistor 240；Pick-up end 220 is set to the end of H-shaped girder construction 210, and respectively
It is connect with two single-beams of 210 one end of H-shaped girder construction, pick-up end 220, which is divided, is: ground section 221 and resonance signal detection section 222；
Two driving electrodes 230 are separately positioned on the two sides of H-shaped girder construction 210；The single-beam along H-shaped girder construction 210 of varistor 240
Direction is formed in H-shaped girder construction 210；Wherein, it is respectively arranged with strip groove 211 on the both ends of two single-beams, the bar shaped is recessed
Slot 211 extends to pick-up end 220, and pick-up end 220 is divided and detects the detection of section 222- ground section 221- resonance signal for resonance signal
The junction of single-beam and resonance signal detection section 222, the embodiment of the present disclosure is arranged in 222 three-stage structures of section, varistor 240
The micro-resonator of the pressure drag pick-up of offer improves the output signal strength of resonator using pressure drag pick-up mode.
In some embodiments of the present disclosure, as shown in Figure 1, in which: pick-up end 220 includes two, two pick-up ends 220
It is separately positioned on the both ends of H-shaped girder construction 210；Varistor 240 includes four, and four varistors 240 are respectively formed in two
On root single-beam.
In some embodiments of the present disclosure, varistor 240 is by Deep Reaction ion etching technology along the side of single-beam
It is formed to being etched on single-beam.
According to another aspect of the disclosure, a kind of micro-resonator exciting/pick-up circuit of pressure drag pick-up is also provided, is such as schemed
Shown in 2, comprising: micro-resonator, bias DC voltage source and the both direction phase for the pressure drag pick-up that the embodiment of the present disclosure provides
Anti- AC drive voltage source；Wherein, two driving electrodes 230 are connect with bias DC voltage source, and two driving electrodes
230 also opposite with both direction AC drive voltage source connections respectively, the direction of motion of two single-beams of H-shaped girder construction 210
It is identical；On a pick-up end 220: electric current successively passes through resonance signal detection section 222, varistor 240 along its flow direction
And ground section 221, power cathode is returned, the electric signal on varistor 240 is detected into section 222 by resonance signal and is drawn.
In some embodiments of the present disclosure, resonator generates simple resonance point using Electrostatic Excitation resonator, utilizes pressure drag
Pick up the resonance frequency of resonator.Its exciting/pick-up principle is as follows: applying in the driving electrodes 230 of 210 two sides of H-shaped girder construction
DC offset voltage VDCAnd apply AC drive voltage V respectivelyACWith-VAC.Two single-beams of H-shaped girder construction 210 are in electrostatic
Under power effect, the direction of motion is identical, drives resonance beam vibration.At pick-up end 220, ground section 221 is grounded, and resonance signal detects section
222 are introduced by way of series resistance on electric signal to varistor 240, on two single-beams of 210 one end of H-shaped girder construction
Varistor 240 by resonance signal detect section 222 electric signal is introduced on instrument amplifier, pass through detection varistor
The voltage signal change frequency at 240 both ends picks up the resonance frequency for arriving resonator, in such a way that resonator beam is vibrated in the same direction,
It can reduce the exciting voltage of resonator；It is driven simultaneously using Opposed crossing voltage, reduces the Non-Linear Vibration of resonator.
According to another aspect of the disclosure, a kind of micro- resonance pressure sensor of pressure drag pick-up is also provided, such as Fig. 3 institute
Show, comprising: soi layer 300 and glass cover-plate 400；Soi layer is divided into from the bottom to top: substrate layer 330, buried oxide layer 320
And device layer 310；Pressure sensitive film 331 is provided on substrate layer 330；Buried oxide layer 320 is used to form the embodiment of the present disclosure and mentions
The anchor point structure 100 of the micro-resonator of the pressure drag pick-up of confession, and be fixedly connected with pressure sensitive film 331；Device layer 310 is used for shape
At the movable structure 200 of the micro-resonator of the pressure drag pick-up of embodiment of the present disclosure offer, and it is connect with buried oxide layer 320；Glass cover
Plate 400 is fastened on soi layer 300, for realizing the Vacuum Package of the micro-resonator of the pressure drag pick-up, when pressure acts on pressure
When sensitive membrane 331, thus pressure sensitive film 331 generates stress and is transmitted to resonator, and resonant frequency is caused to change, thus
The size that can be used for perceiving ambient pressure, the multi-resmator formula pressure sensor of the micro-resonator production based on the pressure drag pick-up,
Process complexity bottom can characterize temperature parameter, can effectively improve sensor temperature self compensation, improve the comprehensive essence of sensor
Degree.
In some embodiments of the present disclosure, as shown in figure 3, movable structure 200 includes at least two.
In some embodiments of the present disclosure, as shown in figure 3, device layer 310 further includes electrode 311, electrode 311 by every
Multiple portions are separated into from slot 312；Ground section 221, resonance signal detection section 222 and driving electrodes 230 are respectively by electrical
Connection structure 313 connects one by one from different electrodes.
In some embodiments of the present disclosure, as shown in Figure 3, in which: electrode 311 is arranged in Fang Huan；Movable structure 200 wraps
Include two；Two movable structures 200 are oppositely arranged on the diagonal line of party's ring, and one of them of each movable structure 200 is picked up
Vibration end 220 is diagonally connect with two of party ring respectively.
In some embodiments of the present disclosure, as shown in figure 3, the outer sheath of electrode 311 is equipped with bonding frame 314, glass
Cover board 400 is fastened on bonding frame 314.
In some embodiments of the present disclosure, as shown in Figure 3, in which: set at the annular distance of counterparty's ring on glass cover-plate 400
It is equipped with cavity 410；Getter 420 is provided in cavity 410, for absorbing the gas generated in the bonding of movable structure 200.
According to above description, the micro- resonance for the pressure drag pick-up that those skilled in the art should provide the embodiment of the present disclosure
Device, exciting/pick-up circuit and pressure sensor have clear understanding.
In conclusion micro-resonator, exciting/pick-up circuit and the pressure sensor of the pressure drag pick-up that the disclosure provides, it will
Varistor is produced on micro-resonator, and the resonance frequency size of resonator, base are measured by the variation of detection varistor
It is big and stable in the pressure sensor output signal of the resonator design, help to improve the pressure output precision of sensor.
It should be noted that the above-mentioned definition to each element and method be not limited in mentioning in embodiment it is various specific
Structure, shape or mode, those of ordinary skill in the art simply can be changed or be replaced to it, such as:
(1) resonance type pressure sensor based on the resonator can use one or more；
(2) one or more can be used when in use for the varistor of pick-up；
(3) formation such as other types etching, wet etching, laser processing, sandblasting can be used in the production of varistor；
(4) resonator driving electrodes can be omitted and be vibrated using electromagnetic exciting principle driving resonator；
(5) driving of comb teeth capacitor can be used in resonator driving method；
(6) other kinds of resonant transducer, such as resonance type accelerometer can be made based on the resonator.
It should also be noted that, the direction term mentioned in embodiment, for example, "upper", "lower", "front", "rear", " left side ",
" right side " etc. is only the direction with reference to attached drawing, not is used to limit the protection scope of the disclosure.Through attached drawing, identical element by
Same or similar appended drawing reference indicates.When may cause understanding of this disclosure and cause to obscure, conventional structure will be omitted
Or construction.
And the shape and size of each component do not reflect actual size and ratio in figure, and only illustrate the embodiment of the present disclosure
Content.In addition, in the claims, any reference symbol between parentheses should not be configured to the limit to claim
System.
Similarly, it should be understood that in order to simplify the disclosure and help to understand one or more of each open aspect,
Above in the description of the exemplary embodiment of the disclosure, each feature of the disclosure is grouped together into single implementation sometimes
In example, figure or descriptions thereof.However, the disclosed method should not be interpreted as reflecting the following intention: i.e. required to protect
The disclosure of shield requires features more more than feature expressly recited in each claim.More precisely, such as front
Claims reflect as, open aspect is all features less than single embodiment disclosed above.Therefore,
Thus the claims for following specific embodiment are expressly incorporated in the specific embodiment, wherein each claim itself
All as the separate embodiments of the disclosure.
Particular embodiments described above has carried out further in detail the purpose of the disclosure, technical scheme and beneficial effects
Describe in detail it is bright, it is all it should be understood that be not limited to the disclosure the foregoing is merely the specific embodiment of the disclosure
Within the spirit and principle of the disclosure, that is done any is repaired.
Claims (10)
1. a kind of micro-resonator of pressure drag pick-up, comprising:
Anchor point structure；And
The movable structure being set on the anchor point structure, comprising:
H-shaped girder construction；
Pick-up end is set to the end of the H-shaped girder construction, and connect respectively with two single-beams of H-shaped girder construction one end,
It is divided into: ground section and resonance signal detection section；
Two driving electrodes are separately positioned on the two sides of the H-shaped girder construction；And
Varistor, the direction of single-beam is formed in the H-shaped girder construction along the H-shaped girder construction；
Wherein, it is respectively arranged with strip groove on the both ends of two single-beams, which extends to the pick-up end, will
The pick-up end is divided into resonance signal detection section-ground section-resonance signal detection section three-stage structure, and the varistor setting exists
The junction of the single-beam and resonance signal detection section.
2. the micro-resonator of pressure drag pick-up according to claim 1, in which:
The pick-up end includes two, and two pick-up ends are separately positioned on the both ends of the H-shaped girder construction；
The varistor includes four, and four varistors are respectively formed on two single-beams.
3. the micro-resonator of pressure drag pick-up according to claim 1 or 2, the varistor are carved by Deep Reaction ion
Erosion technology etches formation along the direction of the single-beam on single-beam.
4. a kind of micro-resonator exciting/pick-up circuit of pressure drag pick-up, comprising:
The micro-resonator of pressure drag pick-up as described in above-mentioned any one of claims 1 to 3, bias DC voltage source and two
Contrary AC drive voltage source；
Wherein, two driving electrodes are connect with bias DC voltage source, and two driving electrodes are also respectively with two
A contrary AC drive voltage source connection, the direction of motion of two single-beams of the H-shaped girder construction are identical；
On a pick-up end: electric current successively detects section, the pressure-sensitive electricity by the resonance signal along its flow direction
Resistance and the ground section return to power cathode, and the electric signal on the varistor is detected section by the resonance signal
It draws.
5. a kind of micro- resonance pressure sensor of pressure drag pick-up, comprising:
Soi layer is divided into from the bottom to top:
Substrate layer is provided with pressure sensitive film；
Buried oxide layer is used to form the anchor point of the micro-resonator of the pressure drag pick-up as described in above-mentioned any one of claims 1 to 3
Structure, and be fixedly connected with the pressure sensitive film；And
Device layer is used to form the movable of the micro-resonator of the pressure drag pick-up as described in above-mentioned any one of claims 1 to 3
Structure, and connect with the buried oxide layer；And
Glass cover-plate fastens on the soi layer, for realizing the Vacuum Package of the micro-resonator of the pressure drag pick-up.
6. micro- resonance pressure sensor of pressure drag pick-up according to claim 5, the movable structure includes at least two.
7. micro- resonance pressure sensor of pressure drag pick-up according to claim 6, the device layer further include: electrode,
Multiple portions are separated by isolation channel；
The ground section, the resonance signal detection section and the driving electrodes pass through respectively connecting structure for electrical equipment from it is different
Electrode connects one by one.
8. micro- resonance pressure sensor of pressure drag pick-up according to claim 7, in which:
The electrode is arranged in Fang Huan；
The movable structure includes two；
Two movable structures are oppositely arranged on the diagonal line of party's ring, one of pick-up of each movable structure
End is diagonally connect with two of party ring respectively.
9. the outer sheath of micro- resonance pressure sensor of pressure drag pick-up according to claim 8, the electrode is equipped with bonding
Frame, the glass cover-plate are fastened on the bonding frame.
10. micro- resonance pressure sensor of pressure drag pick-up according to claim 9, in which:
It is corresponded on the glass cover-plate and is provided with cavity at the annular distance of the Fang Huan；
It is provided with getter in the cavity, for absorbing the gas generated in the movable structure bonding.
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| CN201910056907.2A CN109752120B (en) | 2019-01-21 | 2019-01-21 | Piezoresistive vibration pickup micro resonator, vibration exciting/vibration pickup circuit and pressure sensor |
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| CN201910056907.2A CN109752120B (en) | 2019-01-21 | 2019-01-21 | Piezoresistive vibration pickup micro resonator, vibration exciting/vibration pickup circuit and pressure sensor |
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