CN109735803A - A kind of TiSiYN multicomponent complex gradient cutter coat and preparation method thereof - Google Patents
A kind of TiSiYN multicomponent complex gradient cutter coat and preparation method thereof Download PDFInfo
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Abstract
A kind of TiSiYN multicomponent complex gradient cutter coat and preparation method thereof, it is related to cutter coat field, the cutter includes the CrN binder course, TiSiN-TiSiYN gradient layer, TiSiYN functional layer for being sequentially deposited to tool matrix surface, the CrN binder course with a thickness of 0.1-1um；The TiSiN-TiSiYN gradient layer is different Y content laminated construction, the Y content increases as coating stack increases, each lamination includes the sub- coating of TiSiN and the sub- coating of TiSiYN, each laminated thickness is 0.1-0.5um, the lamination number of plies is 1-5 layers, and TiSiN-TiSiYN Thickness of Gradient Layer is 0.1-2.5um；The TiSiYN functional layer is with a thickness of 0.5-2um；The overall thickness of the TiSiYN multicomponent complex gradient cutter coat is 1-5um, and Y element, which is added, in the present invention in TiSiN coating can improve TiSiN coating structure, effectively improve the binding force and wearability of coating.
Description
Technical field
The present invention relates to cutter coat fields, and in particular to a kind of TiSiYN multicomponent complex gradient cutter coat and its system
Preparation Method.
Background technique
One layer of hard is coated in tool surface using chemical vapor deposition (CVD) or physical vapour deposition (PVD) (PVD) method to apply
Layer is a kind of economical and practical effective way for improving material surface property.Hard coat is important as one of mechanical function film
Branch especially accounts for leading position using very extensively in machine tools in metal cutting.Hard coat can improve material
The surface property of material reduces the friction and wear with workpiece, effectively improves material surface hardness, toughness, wearability and high temperature
Stability increases substantially the service life of coating product.
TiSiN coating has good chemical stability, high thermohardening, good inoxidizability, high film/base junction
Resultant force and excellent wearability, are most wide one of the tool surfaces hard coats of current application range, are suitble to various dry cuttings
Occasion simultaneously gradually substitutes CrN coating.With the fast development of high-speed cutting, TiSiN coating is gradually difficult to meet modern cutter
The requirement of high-speed cutting, the research for TiSiN base multi-element coating were obtaining extensive concern both at home and abroad in recent years, were passing through
It is to promote TiSiN properties of coating to have efficacious prescriptions that doping microelement, which optimizes TiSiN coating structure and performance,
Method.
Heat-resisting quantity and inoxidizability are to measure the important indicator in the service life that coated cutting tool cuts difficult-to-machine material.
In process, point of a knife and chip contact part are the highest places of heat.It easily causes when the temperature is excessively high: 1) tool matrix
Softening causes material hardness to decline, and part doped chemical is precipitated；2) coating failure reduces the protective capability to cutter, aggravation
Tool Wear Process；3) when rapidoprint element is active, oxidationization easily occurs with cutter material or cutting tool coating material
Learn reaction.
With the development of high speed machining and all kinds of high-performance difficult-to-machine materials, metal cutting tool performance is proposed
Increasingly higher demands do not require nothing more than its wear-resisting, impact resistance with higher, more require its high temperature resistant with higher,
Antioxygenic property, to meet higher and higher requirement of engineering.To be adapted to want the harshness of coating performance under the conditions of high-speed cutting
It asks, it is necessary to design and prepare a kind of cutter with high temperature resistant, the nano-composite coating of antioxygenic property.
Summary of the invention
A kind of compound ladder of TiSiYN multicomponent is provided it is an object of the invention to avoid shortcoming in the prior art
Cutter coat is spent, which is added Y element in TiSiN coating can improve TiSiN coating structure, effectively improve painting
The binding force and wearability of layer.
Another object of the present invention is to avoid shortcoming in the prior art and to provide a kind of TiSiYN multicomponent multiple
The preparation method of gradient cutter coating is closed, the preparation method is easy to operate, and it is low in cost, it is easy application.
The purpose of the present invention is achieved through the following technical solutions: providing a kind of TiSiYN multicomponent complex gradient cutter painting
Layer, CrN binder course, TiSiN-TiSiYN gradient layer, TiSiYN functional layer including being sequentially deposited to tool matrix surface are described
CrN binder course with a thickness of 0.1-1um；The TiSiN-TiSiYN gradient layer is different Y content laminated construction, the Y content
Increase as coating stack increases, each lamination includes the sub- coating of TiSiN and the sub- coating of TiSiYN, and each laminated thickness is
0.1-0.5um, the lamination number of plies are 1-5 layers, and TiSiN-TiSiYN Thickness of Gradient Layer is 0.1-2.5um；The TiSiYN functional layer
With a thickness of 0.5-2um；The overall thickness of the TiSiYN multicomponent complex gradient cutter coat is 1-5um.
Wherein, the CrN binder course is with atomic percentage, the N of Cr and 35%-65% including 35%-65%.
Wherein, the sub- coating of TiSiN in the TiSiN-TiSiYN gradient layer is with atomic percentage, including 35%-
The Si of the N of 50% Ti, 35%-50%, 0.1%-10%.
Wherein, the sub- coating of TiSiYN in the TiSiN-TiSiYN gradient layer is with atomic percentage, including 35%-
The Si of the Y of the N of 50% Ti, 35%-50%, 0.1%-5%, 0.1%-10%.
Wherein, the TiSiYN functional layer is with atomic percentage, the N of the Ti including 35%-50%, 35%-50%,
The Si of the Y of 0.1%-5%, 0.1%-10%.
In addition, also providing a kind of preparation method of TiSiYN multicomponent complex gradient cutter coat, comprising the following steps:
S1: ultrasonic cleaning is carried out to tool matrix and removes surface moisture, then sets the uniform clamping of tool matrix in coating
Furnace is incorporated on standby pivoted frame, adjusting pivoted frame revolution speed is 2-10rpm, and pivoted frame rotational velocity is 4-16rpm, and vacuum chamber is evacuated to background
Vacuum 0.01Pa is warming up to 350-550 DEG C hereinafter, opening simultaneously heater；
S2: aura cleaning and Cr ion bombardment are carried out to the surface of tool matrix, with activated matrix surface；
S3: CrN binder course is prepared on the surface of tool matrix, the material of the CrN binder course is CrN, with a thickness of 0.1-1um；
S4: preparing the laminated construction TiSiN-TiSiYN gradient layer of different Y contents on the surface of the CrN binder course, each folded
For layer with a thickness of 0.1-0.5um, the lamination number of plies is 1-5 layers, and TiSiN-TiSiYN Thickness of Gradient Layer is 0.1-2.5um；
S5: TiSiYN functional layer is prepared in the TiSiN-TiSiYN gradient layer surface, with a thickness of 0.5-2um.
Wherein, in step s 2, when carrying out aura cleaning and cr ion bombardment, being passed through gas is Ar gas, furnace chamber vacuum degree
For 0.01-1Pa, matrix adds back bias voltage 300-800V, carries out aura and cleans 15-30min；Then substrate negative voltage is adjusted to 50-
300V opens Cr target, and adjustment target current is 100-350A, with Cr high-energy ionic bombardment matrix 1-10min with activated matrix table
Face.
Wherein, in step s3, the condition of the CrN binder course is prepared are as follows: target Cr, being passed through gas is N2, adjustment
Plating film pressure is 2-5Pa, and tool matrix negative bias voltage is 50-400V, target current 100-400A.
Wherein, in step s 4, the condition of the sub- coating of TiSiN of the TiSiN-TiSiYN gradient layer is prepared are as follows: target
For TiSi and Ti, being passed through gas is N2, and adjustment plating film pressure is 2-5Pa, and adjustment tool matrix negative bias voltage is 30-200V, arc
Ource electric current is 200-400A；Prepare the condition of the sub- coating of TiSiYN of the TiSiN-TiSiYN gradient layer are as follows: target TiSiY
And Ti, being passed through gas is N2, and adjustment plating film pressure is 2-5Pa, and adjustment tool matrix negative bias voltage is 30-200V, arc ource electric current
For 200-400A.
Wherein, in step s 5, the condition of the TiSiYN functional layer is prepared are as follows: target TiSiY, being passed through gas is
N2, adjustment plating film pressure are 2-5Pa, and adjustment tool matrix negative bias voltage is 30-200V, and arc ource electric current is 200-400A.
Compared with the existing technology, the beneficial effect of TiSiYN multicomponent complex gradient cutter coat of the invention include with
Under:
1) binding force of prime coat and matrix can be improved using CrN as prime coat, while having better adaptation with TiSiYN coating
Property, be effectively reduced because apply interlayer materials mismatch and caused by internal stress increase problem.
2) it by two kinds of TiSiY, Cr targets of control, realizes transformation of the CrN to TiSiYN gradient coating, Y content is made to exist
It is incrementally increased from inside to outside in TiSiYN gradient layer, Y content increases with the increase of coating layer thickness, avoids because Y content is unexpected
Increase increases coating internal stress, effectively increases the binding force of coating.
3) in TiSIYN coated cutting tool process, part adulterates Si element and forms SiO2It is covered on above coating, hinders
The contact of coating with air and heat is stopped；The presence of Y increases the binding force of cutter oxide layer and cutter coat simultaneously, improves
Duration of surface protection oxide layer, Y203It is distributed in crystal boundary, prevent oxygen element enters coating and coating element
Precipitation.Si/Y element increases the antioxygenic property of coating by different modes simultaneously.
Compared with the existing technology, preparation method of the invention the utility model has the advantages that the preparation method is easy to operate, it is at low cost
It is honest and clean, it is easy application.
Detailed description of the invention
Invention is described further using attached drawing, but the embodiments in the accompanying drawings do not constitute any limitation to the present invention,
For those of ordinary skill in the art, without creative efforts, it can also be obtained according to the following drawings
Its attached drawing.
Fig. 1 is the structural schematic diagram of cutter coat of the invention；
Fig. 2 is TiSiYN multicomponent complex gradient cutter coat sectional view prepared by the present invention；
In figure, 1-TiSiYN functional layer, 2-TiSiN-TiSiYN gradient layer, 3-CrN binder course, 4- tool matrix.
Specific embodiment
Specific implementation of the invention is described further below in conjunction with drawings and examples, but the invention is not limited to
This.
Embodiment 1:
S1) cleaning of progress aura and Cr ion bombardment: being passed through gas is Ar gas, and furnace chamber vacuum degree is 0.5Pa, and tool matrix 4 adds
Back bias voltage is 300V, carries out a length of 15min when aura cleaning, then adjusts 4 negative bias of tool matrix and is depressed into 200V, opens Cr target,
Adjustment target current is 200 A, with Cr high-energy ionic bombardment 4 duration of tool matrix, 5 min with activated matrix surface；
S2) preparation CrN binder course 3: target Cr, being passed through gas is N2, and adjustment plating film pressure is 3Pa, and tool matrix 4 adds negative
Bias-voltage is 200 V, target current 400A;
S3) prepare the sub- coating of TiSiN of TiSiN-TiSiYN gradient layer 2: target is TiSi and Ti, and being passed through gas is N2, adjustment
Plating film pressure is 5Pa, and adjustment 4 negative bias voltage of tool matrix is 200V, and arc ource electric current is 400A；
S4) prepare the sub- coating of TiSiYN of TiSiN-TiSiYN gradient layer 2: target is TiSiY and Ti, and being passed through gas is N2, is adjusted
Whole plating film pressure is 5Pa, and adjustment 4 negative bias voltage of tool matrix is 200V, and arc ource electric current is 200A, after completing a period, then is handed over
For progress；
S5 the condition of TiSiYN functional layer 1) is prepared are as follows: target TiSiY, being passed through gas is N2, and adjustment plating film pressure is 2Pa,
Adjustment 4 negative bias voltage of tool matrix is 100V, and arc ource electric current is 250A.
For the structural schematic diagram of prepared coating as shown in Figure 1, total coating thickness is 5um, coating cross sections are as shown in Fig. 2,
It can be seen that Y element, which is added, in the cutter coat in TiSiN coating can improve TiSiN coating structure, the combination of coating is effectively improved
Power and wearability.
Embodiment 2:
S1) cleaning of progress aura and Cr ion bombardment: being passed through gas is Ar gas, and furnace chamber vacuum degree is 0.8Pa, and tool matrix 4 adds
Back bias voltage is 200V, carries out a length of 10min when aura cleaning；Then adjustment 4 negative bias of tool matrix is depressed into 200V, opens Cr target,
Adjustment target current is 200 A, with Cr high-energy ionic bombardment 4 duration of tool matrix, 10 min with activated matrix surface；
S2) preparation CrN binder course 3: target Cr, being passed through gas is N2, and adjustment plating film pressure is 5Pa, and tool matrix 4 adds negative
Bias-voltage is 300 V, target current 200A;
S3) prepare the sub- coating of TiSiN of TiSiN-TiSiYN gradient layer 2: target is TiSi and Ti, and being passed through gas is N2, adjustment
Plating film pressure is 4Pa, and adjustment 4 negative bias voltage of tool matrix is 200V, and arc ource electric current is 400A；
S4) prepare the sub- coating of TiSiYN of TiSiN-TiSiYN gradient layer 2: target is TiSiY and Ti, and being passed through gas is N2, is adjusted
Whole plating film pressure is 4Pa, and adjustment 4 negative bias voltage of tool matrix is 200V, and arc ource electric current is 400A, after completing a period, then is handed over
For progress.
S5 the condition of TiSiYN functional layer 1) is prepared are as follows: target TiSiY, being passed through gas is N2, and adjustment plating film pressure is
2Pa, adjustment 4 negative bias voltage of tool matrix are 150V, and arc ource electric current is 300A.
For the structural schematic diagram of prepared coating as shown in Figure 1, total coating thickness is 3um, coating cross sections are as shown in Fig. 2,
It can be seen that Y element, which is added, in the cutter coat in TiSiN coating can improve TiSiN coating structure, the combination of coating is effectively improved
Power and wearability.
Embodiment 3:
S1) cleaning of progress aura and Cr ion bombardment: being passed through gas is Ar gas, and furnace chamber vacuum degree is 1Pa, and tool matrix 4 adds negative
Bias is 200V, a length of 12min when carrying out aura cleaning: and then adjustment 4 negative bias of tool matrix is depressed into 200V, opens Cr target, adjusts
Whole target current is 200 A, with Cr high-energy ionic bombardment 4 duration of tool matrix, 15 min with activated matrix surface；
S2) preparation CrN binder course 3: target Cr, being passed through gas is N2, and adjustment plating film pressure is 3Pa, and tool matrix 4 adds negative
Bias-voltage is 250 V, target current 200A;
S3) prepare the sub- coating of TiSiN of TiSiN-TiSiYN gradient layer 2: target is TiSi and Ti, and being passed through gas is N2, adjustment
Plating film pressure is 3Pa, and adjustment 4 negative bias voltage of tool matrix is 200V, and arc ource electric current is 200A；
S4) prepare the sub- coating of TiSiYN of TiSiN-TiSiYN gradient layer 2: target is TiSiY and Ti, and being passed through gas is N2, is adjusted
Whole plating film pressure is 3Pa, and adjustment 4 negative bias voltage of tool matrix is 200V, and arc ource electric current is 200A, after completing a period, then is handed over
For progress.
S5 the condition of TiSiYN functional layer 1) is prepared are as follows: target TiSiY, being passed through gas is N2, and adjustment plating film pressure is
3Pa, adjustment 4 negative bias voltage of tool matrix are 150V, and arc ource electric current is 200A.
For the structural schematic diagram of prepared coating as shown in Figure 1, total coating thickness is 1um, coating cross sections are as shown in Fig. 2,
It can be seen that Y element, which is added, in the cutter coat in TiSiN coating can improve TiSiN coating structure, the combination of coating is effectively improved
Power and wearability.
Embodiment 4:
S1) cleaning of progress aura and Cr ion bombardment: being passed through gas is Ar gas, and furnace chamber vacuum degree is 0.3Pa, and tool matrix 4 adds
Back bias voltage 200V carries out aura and cleans 12min: and then adjustment 4 negative bias of tool matrix is depressed into 200V, opens Cr target, adjusts target
Electric current is 200 A, with Cr high-energy ionic bombardment 4 duration of tool matrix, 15 min with activated matrix surface；
S2) preparation CrN binder course 3: target Cr, being passed through gas is N2, and adjustment plating film pressure is 3Pa, and tool matrix 4 adds negative
Bias-voltage is 300 V, target current 200A;
S3) prepare the sub- coating of TiSiN of TiSiN-TiSiYN gradient layer 2: target is TiSi and Ti, and being passed through gas is N2, adjustment
Plating film pressure is 2.5Pa, and adjustment 4 negative bias voltage of tool matrix is 200V, and arc ource electric current is 350A；
S4) prepare the sub- coating of TiSiYN of TiSiN-TiSiYN gradient layer 2: target is TiSiY and Ti, and being passed through gas is N2, is adjusted
Whole plating film pressure is 2.5Pa, and adjustment 4 negative bias voltage of tool matrix is 200V, and arc ource electric current is 350A, after completing a period, then
Alternately；
S5 the condition of TiSiYN functional layer 1) is prepared are as follows: target TiSiY, being passed through gas is N2, and adjustment plating film pressure is
2.5Pa, adjustment 4 negative bias voltage of tool matrix are 150V, and arc ource electric current is 350A.
The structural schematic diagram of prepared coating is as shown in Figure 1, total coating thickness is 2.5um, coating cross sections such as 2 institute of attached drawing
Show, it is seen that Y element, which is added, in the cutter coat in TiSiN coating can improve TiSiN coating structure, effectively improve coating
Binding force and wearability.
Finally it should be noted that the above embodiments are merely illustrative of the technical solutions of the present invention, rather than the present invention is protected
The limitation of range is protected, although explaining in detail referring to preferred embodiment to the present invention, those skilled in the art are answered
Work as understanding, it can be with modification or equivalent replacement of the technical solution of the present invention are made, without departing from the reality of technical solution of the present invention
Matter and range.
Claims (10)
1. a kind of TiSiYN multicomponent complex gradient cutter coat, which is characterized in that including being sequentially deposited to tool matrix surface
CrN binder course, TiSiN-TiSiYN gradient layer, TiSiYN functional layer, the CrN binder course with a thickness of 0.1-1um；It is described
TiSiN-TiSiYN gradient layer is different Y content laminated construction, and the Y content increases as coating stack increases, each folded
Layer includes the sub- coating of TiSiN and the sub- coating of TiSiYN, and each laminated thickness is 0.1-0.5um, and the lamination number of plies is 1-5 layers,
TiSiN-TiSiYN Thickness of Gradient Layer is 0.1-2.5um；The TiSiYN functional layer is with a thickness of 0.5-2um；The TiSiYN is more
The overall thickness of constituent element complex gradient cutter coat is 1-5um.
2. a kind of TiSiYN multicomponent complex gradient cutter coat according to claim 1, it is characterised in that: the CrN
Binder course is with atomic percentage, the N of Cr and 35%-65% including 35%-65%.
3. a kind of TiSiYN multicomponent complex gradient cutter coat according to claim 1, it is characterised in that: described
TiSiN coating is in TiSiN-TiSiYN gradient layer with atomic percentage, the N of the Ti including 35%-50%, 35%-50%,
The Si of 0.1%-10%.
4. a kind of TiSiYN multicomponent complex gradient cutter coat according to claim 1, it is characterised in that: described
TiSiYN coating is in TiSiN-TiSiYN gradient layer with atomic percentage, the N of the Ti including 35%-50%, 35%-50%,
The Si of the Y of 0.1%-5%, 0.1%-10%.
5. a kind of TiSiYN multicomponent complex gradient cutter coat according to claim 1, it is characterised in that: described
TiSiYN functional layer is with atomic percentage, the Y of the N of the Ti including 35%-50%, 35%-50%, 0.1%-5%, 0.1%-10%
Si.
6. a kind of preparation method of TiSiYN multicomponent complex gradient cutter coat described in any one of claim 1 to 5, special
Sign is: the following steps are included:
S1: ultrasonic cleaning is carried out to tool matrix and removes surface moisture, then sets the uniform clamping of tool matrix in coating
Furnace is incorporated on standby pivoted frame, adjusting pivoted frame revolution speed is 2-10rpm, and pivoted frame rotational velocity is 4-16rpm, and vacuum chamber is evacuated to background
Vacuum 0.01Pa is warming up to 350-550 DEG C hereinafter, opening simultaneously heater；
S2: aura cleaning and Cr ion bombardment are carried out to the surface of tool matrix, with activated matrix surface；
S3: CrN binder course is prepared on the surface of tool matrix, the material of the CrN binder course is CrN, with a thickness of 0.1-1um；
S4: preparing the laminated construction TiSiN-TiSiYN gradient layer of different Y contents on the surface of the CrN binder course, each folded
For layer with a thickness of 0.1-0.5um, the lamination number of plies is 1-5 layers, and TiSiN-TiSiYN Thickness of Gradient Layer is 0.1-2.5um；
S5: TiSiYN functional layer is prepared in the TiSiN-TiSiYN gradient layer surface, with a thickness of 0.5-2um.
7. a kind of preparation method of TiSiYN multicomponent complex gradient cutter coat according to claim 6, feature exist
In:
In step s 2, when carrying out aura cleaning and cr ion bombardment, being passed through gas is Ar gas, and furnace chamber vacuum degree is 0.01-
1Pa, matrix add back bias voltage 300-800V, carry out aura and clean 15-30min；Then adjustment substrate negative voltage is opened to 50-300V
Cr target is opened, adjustment target current is 100-350A, with Cr high-energy ionic bombardment matrix 1-10min with activated matrix surface.
8. a kind of preparation method of TiSiYN multicomponent complex gradient cutter coat according to claim 6, feature exist
In: in step s3, prepare the condition of the CrN binder course are as follows: target Cr, being passed through gas is N2, and adjustment plating film pressure is
2-5Pa, tool matrix negative bias voltage are 50-400V, target current 100-400A.
9. a kind of preparation method of TiSiYN multicomponent complex gradient cutter coat according to claim 6, feature exist
In: in step s 4, prepare the condition of the sub- coating of TiSiN of the TiSiN-TiSiYN gradient layer are as follows: and target is TiSi and Ti,
Being passed through gas is N2, and adjustment plating film pressure is 2-5Pa, and adjustment tool matrix negative bias voltage is 30-200V, and arc ource electric current is 200-
400A；Prepare the condition of the sub- coating of TiSiYN of the TiSiN-TiSiYN gradient layer are as follows: target is TiSiY and Ti, is passed through gas
Body is N2, and adjustment plating film pressure is 2-5Pa, and adjustment tool matrix negative bias voltage is 30-200V, and arc ource electric current is 200-400A.
10. a kind of preparation method of TiSiYN multicomponent complex gradient cutter coat according to claim 6, feature exist
In: in step s 5, prepare the condition of the TiSiYN functional layer are as follows: target TiSiY, being passed through gas is N2, adjusts plated film
Pressure is 2-5Pa, and adjustment tool matrix negative bias voltage is 30-200V, and arc ource electric current is 200-400A.
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| CN110373639A (en) * | 2019-07-24 | 2019-10-25 | 艾瑞森表面技术（苏州）股份有限公司 | Cutting element composite coating and preparation method thereof |
| CN114015981A (en) * | 2021-10-28 | 2022-02-08 | 中国科学院宁波材料技术与工程研究所 | Rare earth doped erosion-resistant protective coating and preparation method thereof |
| CN115446359A (en) * | 2022-10-11 | 2022-12-09 | 哈尔滨理工大学 | High-hardness coating hard alloy cutter and machining method thereof |
| CN116121702A (en) * | 2023-03-29 | 2023-05-16 | 纳狮新材料有限公司杭州分公司 | TiSiNiYN coating for enhancing high-temperature wear resistance |
| CN116288179A (en) * | 2023-03-29 | 2023-06-23 | 纳狮新材料有限公司杭州分公司 | TiSiBAgYN coating resistant to high-temperature lubrication |
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| CN116288179A (en) * | 2023-03-29 | 2023-06-23 | 纳狮新材料有限公司杭州分公司 | TiSiBAgYN coating resistant to high-temperature lubrication |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109735803B (en) | 2021-10-15 |
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