CN109735803B - TiSiYN multi-component composite gradient cutter coating and preparation method thereof - Google Patents
TiSiYN multi-component composite gradient cutter coating and preparation method thereof Download PDFInfo
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Abstract
A TiSiYN multi-component composite gradient cutter coating and a preparation method thereof relate to the field of cutter coatings, and the cutter comprises a CrN binding layer, a TiSiN-TiSiYN gradient layer and a TiSiYN functional layer which are sequentially deposited on the surface of a cutter substrate, wherein the thickness of the CrN binding layer is 0.1-1 um; the TiSiN-TiSiYN gradient layer is of a laminated structure with different Y contents, the Y content is increased along with the increase of the laminated layers of the coating, each laminated layer comprises a TiSiN sub coating and a TiSiYN sub coating, the thickness of each laminated layer is 0.1-0.5um, the number of laminated layers is 1-5, and the thickness of the TiSiN-TiSiYN gradient layer is 0.1-2.5 um; the thickness of the TiSiYN functional layer is 0.5-2 um; the total thickness of the TiSiYN multi-component composite gradient cutter coating is 1-5um, and the TiSiN coating structure can be improved by adding Y element in the TiSiN coating, so that the binding force and the wear resistance of the coating are effectively improved.
Description
Technical Field
The invention relates to the field of cutter coatings, in particular to a TiSiYN multi-component composite gradient cutter coating and a preparation method thereof.
Background
The application of a hard coating on the surface of a cutting tool by Chemical Vapor Deposition (CVD) or Physical Vapor Deposition (PVD) is an effective and economical way to improve the surface properties of materials. Hard coatings, as an important branch of mechanically functional films, are used in a wide range of mechanical machining tools, and are particularly predominant in metal cutting. The hard coating can improve the surface performance of the material, reduce the friction and the abrasion with a workpiece, effectively improve the surface hardness, the toughness, the wear resistance and the high-temperature stability of the material, and greatly prolong the service life of a coating product.
The TiSiN coating has good chemical stability, high hot hardness, good oxidation resistance, high film/base bonding force and excellent wear resistance, is one of tool surface hard coatings with the widest application range at present, is suitable for various dry cutting fields and gradually replaces a CrN coating. With the rapid development of high-speed cutting, the TiSiN coating is gradually difficult to meet the requirements of modern cutters on high-speed cutting, the research on the TiSiN-based multi-component coating is widely concerned at home and abroad in recent years, and the optimization of the structure and the performance of the TiSiN coating by doping trace elements is an effective method for improving the comprehensive performance of the TiSiN coating.
The high temperature resistance and the oxidation resistance are important indexes for measuring the service life of the coated cutter for cutting difficult-to-machine materials. The contact part of the tool tip and the chip is the place with the highest heat during the machining process. When the temperature is too high, the following problems are easily caused: 1) the hardness of the material is reduced due to the softening of the cutter substrate, and part of doped elements are separated out; 2) the coating is invalid, the protection capability to the cutter is reduced, and the abrasion process of the cutter is aggravated; 3) when the elements of the processing material are active, the processing material is easy to generate oxidation chemical reaction with the cutter material or the cutter coating material.
With the development of high-speed processing technology and various high-performance difficult-to-process materials, higher and higher requirements are put forward on the performance of metal cutting tools, so that the metal cutting tools are required to have higher wear resistance and impact resistance, and higher high-temperature resistance and oxidation resistance so as to meet higher and higher engineering requirements. In order to meet the severe requirements on the performance of the coating under the high-speed cutting condition, a cutter with a nano composite coating with high temperature resistance and oxidation resistance needs to be designed and prepared.
Disclosure of Invention
The invention aims to avoid the defects in the prior art and provide the TiSiYN multi-component composite gradient cutter coating, the cutter coating adds Y element into the TiSiN coating to improve the TiSiN coating structure and effectively improve the binding force and the wear resistance of the coating.
The invention also aims to avoid the defects in the prior art and provide the preparation method of the TiSiYN multi-component composite gradient cutter coating, which has the advantages of simple operation, low cost and easy application and popularization.
The purpose of the invention is realized by the following technical scheme: providing a TiSiYN multi-component composite gradient cutter coating, which comprises a CrN bonding layer, a TiSiN-TiSiYN gradient layer and a TiSiYN functional layer which are sequentially deposited on the surface of a cutter substrate, wherein the thickness of the CrN bonding layer is 0.1-1 um; the TiSiN-TiSiYN gradient layer is of a laminated structure with different Y contents, the Y content is increased along with the increase of the laminated layers of the coating, each laminated layer comprises a TiSiN sub coating and a TiSiYN sub coating, the thickness of each laminated layer is 0.1-0.5um, the number of laminated layers is 1-5, and the thickness of the TiSiN-TiSiYN gradient layer is 0.1-2.5 um; the thickness of the TiSiYN functional layer is 0.5-2 um; the total thickness of the TiSiYN multi-component composite gradient cutter coating is 1-5 um.
Wherein the CrN bonding layer comprises 35-65% of Cr and 35-65% of N in atomic percentage.
Wherein the TiSiN sub coating in the TiSiN-TiSiYN gradient layer comprises 35-50% of Ti, 35-50% of N and 0.1-10% of Si in atomic percentage.
Wherein the TiSiYN sub-coating in the TiSiN-TiSiYN gradient layer comprises 35-50% of Ti, 35-50% of N, 0.1-5% of Y and 0.1-10% of Si in atomic percentage.
The TiSiYN functional layer comprises, by atomic percentage, 35% -50% of Ti, 35% -50% of N,0.1% -5% of Y and 0.1% -10% of Si.
In addition, also provides a preparation method of the TiSiYN multi-component composite gradient cutter coating, which comprises the following steps:
s1, carrying out ultrasonic cleaning on the cutter substrate and removing surface moisture, then uniformly clamping the cutter substrate on a coating equipment rotating frame, merging the cutter substrate into a furnace, adjusting the revolution speed of the rotating frame to be 2-10rpm, the rotation speed of the rotating frame to be 4-16rpm, pumping the vacuum chamber to the background vacuum of below 0.01Pa, and simultaneously opening a heater to heat to 350-;
s2, performing glow cleaning and Cr ion bombardment on the surface of the cutter substrate to activate the surface of the substrate;
s3, preparing a CrN bonding layer on the surface of the cutter substrate, wherein the CrN bonding layer is made of CrN and has the thickness of 0.1-1 um;
s4, preparing TiSiN-TiSiYN gradient layers with different Y contents on the surface of the CrN bonding layer, wherein the thickness of each lamination layer is 0.1-0.5um, the number of lamination layers is 1-5, and the thickness of the TiSiN-TiSiYN gradient layer is 0.1-2.5 um;
s5, preparing a TiSiYN functional layer on the surface of the TiSiN-TiSiYN gradient layer, wherein the thickness of the TiSiYN functional layer is 0.5-2 um.
Wherein, in the step S2, when the glow cleaning and the cr ion bombardment are carried out, Ar gas is introduced, the vacuum degree of the furnace chamber is 0.01-1 Pa, the negative bias voltage of the matrix is 300-800V, and the glow cleaning is carried out for 15-30 min; then, the negative bias of the substrate is adjusted to 50-300V, the Cr target is opened, the target current is adjusted to be 100-350A, and the substrate is bombarded by Cr ions for 1-10min to activate the surface of the substrate.
Wherein, in step S3, the conditions for preparing the CrN bonding layer are: the target material is Cr, the introduced gas is N2, the coating pressure is adjusted to be 2-5Pa, the negative bias voltage of the cutter substrate is 50-400V, and the target material current is 100-400A.
In step S4, the conditions for preparing the TiSiN sub-coating of the TiSiN-TiSiYN gradient layer are as follows: the target material is TiSi and Ti, the introduced gas is N2, the coating pressure is adjusted to be 2-5Pa, the negative bias voltage of the cutter substrate is adjusted to be 30-200V, and the arc source current is 200-400A; the TiSiYN sub-coating of the TiSiN-TiSiYN gradient layer is prepared under the following conditions: the target material is TiSiY and Ti, the introduced gas is N2, the coating pressure is adjusted to be 2-5Pa, the negative bias voltage of the cutter substrate is adjusted to be 30-200V, and the arc source current is 200-400A.
In step S5, the conditions for preparing the TiSiYN functional layer are as follows: the target material is TiSiY, the introduced gas is N2, the coating pressure is adjusted to be 2-5Pa, the negative bias voltage of the cutter substrate is adjusted to be 30-200V, and the arc source current is 200-400A.
Compared with the prior art, the TiSiYN multi-component composite gradient cutter coating has the beneficial effects that:
1) the CrN is used as the priming coat, so that the binding force between the priming coat and the substrate can be improved, and the coating has better adaptability with the TiSiYN coating, and the problem of internal stress increase caused by mismatching of materials between the coatings is effectively reduced.
2) The conversion from CrN to TiSiYN gradient coating is realized by controlling two TiSiY and Cr target materials, so that the content of Y is gradually increased from inside to outside in the TiSiYN gradient layer, the content of Y is increased along with the increase of the thickness of the coating, the increase of the internal stress of the coating caused by the sudden increase of the content of Y is avoided, and the binding force of the coating is effectively improved.
3) In the TiSIYN coating cutter processing process, Si element is partially doped to form SiO2Covering the coating layer to prevent the coating layer from contacting with air and heat; meanwhile, the existence of Y increases the binding force between the cutter oxide layer and the cutter coating, and improves the duration of the surface protective oxide layer, and Y203Distributed in the grain boundary, prevents oxygen from entering the coating and prevents the coating elements from being separated out. The Si/Y element simultaneously increases the oxidation resistance of the coating in different modes.
Compared with the prior art, the preparation method has the beneficial effects that: the preparation method is simple to operate, low in cost and easy to apply and popularize.
Drawings
The invention is further illustrated by means of the attached drawings, but the embodiments in the drawings do not constitute any limitation to the invention, and for a person skilled in the art, other drawings can be derived on the basis of the following drawings without inventive effort.
FIG. 1 is a schematic structural view of a tool coating of the present invention;
FIG. 2 is a sectional view of a TiSiYN multicomponent composite gradient tool coating prepared according to the present invention;
in the figure, a 1-TiSiYN functional layer, a 2-TiSiN-TiSiYN gradient layer, a 3-CrN binding layer and a 4-cutter base body are arranged.
Detailed Description
The following description will further explain embodiments of the present invention by referring to the drawings and examples, but the present invention is not limited thereto.
Example 1:
s1) performing glow cleaning and Cr ion bombardment: introducing Ar gas, wherein the vacuum degree of the furnace chamber is 0.5Pa, the negative bias voltage applied to the cutter substrate 4 is 300V, the glow cleaning time is 15min, then the negative bias voltage of the cutter substrate 4 is adjusted to 200V, a Cr target is started, the target current is adjusted to 200A, and the cutter substrate is bombarded with Cr ions at high energy for 5min to activate the surface of the substrate;
s2) preparing a CrN bonding layer 3: the target material is Cr, the introduced gas is N2, the coating pressure is adjusted to be 3Pa, the negative bias voltage applied to the cutter substrate 4 is 200V, and the target material current is 400A;
s3) preparing TiSiN subcoating of TiSiN-TiSiYN gradient layer 2: the target material is TiSi and Ti, the introduced gas is N2, the coating pressure is adjusted to be 5Pa, the negative bias voltage of the cutter substrate 4 is adjusted to be 200V, and the arc source current is 400A;
s4) preparing TiSiYN subcoating of TiSiN-TiSiYN gradient layer 2: the target materials are TiSiY and Ti, the introduced gas is N2, the coating pressure is adjusted to be 5Pa, the negative bias voltage of the cutter substrate 4 is adjusted to be 200V, the arc source current is 200A, and the operation is carried out alternately after one cycle is finished;
s5) conditions for preparing TiSiYN functional layer 1 were: the target material is TiSiY, the introduced gas is N2, the coating pressure is adjusted to be 2Pa, the negative bias voltage of the cutter substrate 4 is adjusted to be 100V, and the arc source current is 250A.
The structural schematic diagram of the prepared coating is shown in figure 1, the total thickness of the coating is 5um, and the cross section of the coating is shown in figure 2, so that the cutter coating can improve the TiSiN coating structure by adding Y element into the TiSiN coating, and effectively improve the binding force and the wear resistance of the coating.
Example 2:
s1) performing glow cleaning and Cr ion bombardment: introducing Ar gas, wherein the vacuum degree of the furnace chamber is 0.8Pa, the negative bias voltage of the cutter substrate 4 is 200V, and the glow cleaning time is 10 min; then adjusting the negative bias of the cutter substrate 4 to 200V, starting a Cr target, adjusting the current of the target material to 200A, and bombarding the cutter substrate 4 with Cr ions at high energy for 10min to activate the surface of the substrate;
s2) preparing a CrN bonding layer 3: the target material is Cr, the introduced gas is N2, the coating pressure is adjusted to be 5Pa, the negative bias voltage applied to the cutter substrate 4 is 300V, and the target material current is 200A;
s3) preparing TiSiN subcoating of TiSiN-TiSiYN gradient layer 2: the target material is TiSi and Ti, the introduced gas is N2, the coating pressure is adjusted to be 4Pa, the negative bias voltage of the cutter substrate 4 is adjusted to be 200V, and the arc source current is 400A;
s4) preparing TiSiYN subcoating of TiSiN-TiSiYN gradient layer 2: the target materials are TiSiY and Ti, the introduced gas is N2, the coating pressure is adjusted to be 4Pa, the negative bias voltage of the cutter substrate 4 is adjusted to be 200V, the arc source current is 400A, and the operation is performed alternately after one cycle is finished.
S5) conditions for preparing TiSiYN functional layer 1 were: the target material is TiSiY, the introduced gas is N2, the coating pressure is adjusted to be 2Pa, the negative bias voltage of the cutter substrate 4 is adjusted to be 150V, and the arc source current is 300A.
The structural schematic diagram of the prepared coating is shown in figure 1, the total thickness of the coating is 3um, and the cross section of the coating is shown in figure 2, so that the cutter coating can improve the TiSiN coating structure by adding Y element into the TiSiN coating, and effectively improve the binding force and the wear resistance of the coating.
Example 3:
s1) performing glow cleaning and Cr ion bombardment: introducing Ar gas, wherein the vacuum degree of the furnace chamber is 1Pa, the negative bias voltage of the cutter substrate 4 is 200V, and the glow cleaning time is 12 min: then adjusting the negative bias of the cutter substrate 4 to 200V, starting a Cr target, adjusting the current of the target material to 200A, and bombarding the cutter substrate 4 with Cr ions at high energy for 15min to activate the surface of the substrate;
s2) preparing a CrN bonding layer 3: the target material is Cr, the introduced gas is N2, the coating pressure is adjusted to be 3Pa, the negative bias voltage applied to the cutter substrate 4 is 250V, and the target material current is 200A;
s3) preparing TiSiN subcoating of TiSiN-TiSiYN gradient layer 2: the target material is TiSi and Ti, the introduced gas is N2, the coating pressure is adjusted to be 3Pa, the negative bias voltage of the cutter substrate 4 is adjusted to be 200V, and the arc source current is 200A;
s4) preparing TiSiYN subcoating of TiSiN-TiSiYN gradient layer 2: the target materials are TiSiY and Ti, the introduced gas is N2, the coating pressure is adjusted to be 3Pa, the negative bias voltage of the cutter substrate 4 is adjusted to be 200V, the arc source current is adjusted to be 200A, and the operation is carried out alternately after one cycle is finished.
S5) conditions for preparing TiSiYN functional layer 1 were: the target material is TiSiY, the introduced gas is N2, the coating pressure is adjusted to be 3Pa, the negative bias voltage of the cutter substrate 4 is adjusted to be 150V, and the arc source current is 200A.
The structural schematic diagram of the prepared coating is shown in figure 1, the total thickness of the coating is 1um, and the cross section of the coating is shown in figure 2, so that the cutter coating can improve the TiSiN coating structure by adding Y element into the TiSiN coating, and effectively improve the binding force and the wear resistance of the coating.
Example 4:
s1) performing glow cleaning and Cr ion bombardment: introducing Ar gas, wherein the vacuum degree of the furnace chamber is 0.3Pa, and applying negative bias voltage 200V to the cutter substrate 4 to perform glow cleaning for 12 min: then adjusting the negative bias of the cutter substrate 4 to 200V, starting a Cr target, adjusting the current of the target material to 200A, and bombarding the cutter substrate 4 with Cr ions at high energy for 15min to activate the surface of the substrate;
s2) preparing a CrN bonding layer 3: the target material is Cr, the introduced gas is N2, the coating pressure is adjusted to be 3Pa, the negative bias voltage applied to the cutter substrate 4 is 300V, and the target material current is 200A;
s3) preparing TiSiN subcoating of TiSiN-TiSiYN gradient layer 2: the target material is TiSi and Ti, the introduced gas is N2, the coating pressure is adjusted to be 2.5Pa, the negative bias voltage of the cutter substrate 4 is adjusted to be 200V, and the arc source current is 350A;
s4) preparing TiSiYN subcoating of TiSiN-TiSiYN gradient layer 2: the target materials are TiSiY and Ti, the introduced gas is N2, the coating pressure is adjusted to be 2.5Pa, the negative bias voltage of the cutter substrate 4 is adjusted to be 200V, the arc source current is 350A, and the operation is carried out alternately after one cycle is finished;
s5) conditions for preparing TiSiYN functional layer 1 were: the target material is TiSiY, the introduced gas is N2, the coating pressure is adjusted to be 2.5Pa, the negative bias voltage of the cutter substrate 4 is adjusted to be 150V, and the arc source current is 350A.
The structural schematic diagram of the prepared coating is shown in figure 1, the total thickness of the coating is 2.5um, and the cross section of the coating is shown in figure 2, so that the cutter coating can improve the TiSiN coating structure by adding Y element into the TiSiN coating, and effectively improve the binding force and the wear resistance of the coating.
Finally, it should be noted that the above embodiments are only used for illustrating the technical solutions of the present invention, and not for limiting the protection scope of the present invention, although the present invention is described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that modifications or equivalent substitutions can be made on the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention.
Claims (6)
1. The TiSiYN multi-component composite gradient tool coating is characterized by comprising a CrN bonding layer, a TiSiN-TiSiYN gradient layer and a TiSiYN functional layer which are sequentially deposited on the surface of a tool substrate, wherein the thickness of the CrN bonding layer is 0.1-1 mu m; the TiSiN-TiSiYN gradient layer is of a laminated structure with different Y contents, the Y content is increased along with the increase of the laminated layers of the coating, each laminated layer comprises a TiSiN sub coating and a TiSiYN sub coating, the thickness of each laminated layer is 0.1-0.5 mu m, the number of laminated layers is 1-5, and the thickness of the TiSiN-TiSiYN gradient layer is 0.1-2.5 mu m; the thickness of the TiSiYN functional layer is 0.5-2 μm; the total thickness of the TiSiYN multi-component composite gradient cutter coating is 1-5 mu m;
the CrN bonding layer comprises 35-65% of Cr and 35-65% of N in atomic percentage;
the TiSiN coating in the TiSiN-TiSiYN gradient layer comprises 35-50% of Ti, 35-50% of N and 0.1-10% of Si in atomic percentage;
the TiSiYN coating in the TiSiN-TiSiYN gradient layer comprises 35-50% of Ti, 35-50% of N, 0.1-5% of Y and 0.1-10% of Si in atomic percentage;
the TiSiYN functional layer comprises, by atomic percentage, 35% -50% of Ti, 35% -50% of N,0.1% -5% of Y and 0.1% -10% of Si.
2. The method for preparing the TiSiYN multi-component composite gradient cutter coating of claim 1, which is characterized in that: the method comprises the following steps:
s1, carrying out ultrasonic cleaning on the cutter substrate and removing surface moisture, then uniformly clamping the cutter substrate on a coating equipment rotating frame, merging the cutter substrate into a furnace, adjusting the revolution speed of the rotating frame to be 2-10rpm, the rotation speed of the rotating frame to be 4-16rpm, pumping the vacuum chamber to the background vacuum of below 0.01Pa, and simultaneously opening a heater to heat to 350-;
s2, performing glow cleaning and Cr ion bombardment on the surface of the cutter substrate to activate the surface of the substrate;
s3, preparing a CrN bonding layer on the surface of the cutter substrate, wherein the CrN bonding layer is made of CrN and has the thickness of 0.1-1 mu m;
s4, preparing TiSiN-TiSiYN gradient layers with different Y contents on the surface of the CrN bonding layer, wherein the thickness of each lamination layer is 0.1-0.5 mu m, the number of lamination layers is 1-5, and the thickness of the TiSiN-TiSiYN gradient layer is 0.1-2.5 mu m;
s5, preparing a TiSiYN functional layer on the surface of the TiSiN-TiSiYN gradient layer, wherein the thickness of the TiSiYN functional layer is 0.5-2 mu m.
3. The method for preparing the TiSiYN multi-component composite gradient cutter coating according to claim 2, which is characterized in that:
in step S2, when performing glow cleaning and Cr ion bombardment, introducing Ar gas as gas, wherein the vacuum degree of the furnace chamber is 0.01-1 Pa, and the substrate is subjected to negative bias voltage of 300-800V for glow cleaning for 15-30 min; then, the negative bias of the substrate is adjusted to 50-300V, the Cr target is opened, the target current is adjusted to be 100-350A, and the substrate is bombarded by Cr ions for 1-10min to activate the surface of the substrate.
4. The method for preparing the TiSiYN multi-component composite gradient cutter coating according to claim 2, which is characterized in that: in step S3, the conditions for preparing the CrN bonding layer are: the target material is Cr, the introduced gas is N2, the coating pressure is adjusted to be 2-5Pa, the negative bias voltage of the cutter substrate is 50-400V, and the target material current is 100-400A.
5. The method for preparing the TiSiYN multi-component composite gradient cutter coating according to claim 2, which is characterized in that: in step S4, the conditions for preparing the TiSiN sub-coating of the TiSiN-TiSiYN gradient layer are as follows: the target material is TiSi and Ti, and the introduced gas is N2Adjusting the coating pressure to 2-5Pa, the negative bias voltage of the base body of the cutting tool to 30-200V, and the arc source current to 200-; the TiSiYN sub-coating of the TiSiN-TiSiYN gradient layer is prepared under the following conditions: the target material is TiSiY and Ti, and the introduced gas is N2Adjusting the coating pressure to 2-5Pa, and adjusting the base body of the cutting toolThe negative bias voltage is 30-200V, and the arc source current is 200-400A.
6. The method for preparing the TiSiYN multi-component composite gradient cutter coating according to claim 2, which is characterized in that: in step S5, the conditions for preparing the TiSiYN functional layer are: the target material is TiSiY, and the introduced gas is N2The coating pressure is adjusted to be 2-5Pa, the negative bias voltage of the tool substrate is adjusted to be 30-200V, and the arc source current is adjusted to be 200-400A.
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| CN110373639B (en) * | 2019-07-24 | 2021-04-20 | 艾瑞森表面技术（苏州）股份有限公司 | Composite coating for cutting tool and preparation method thereof |
| CN114015981B (en) * | 2021-10-28 | 2024-02-02 | 中国科学院宁波材料技术与工程研究所 | Rare earth doped erosion-resistant protective coating and preparation method thereof |
| CN115446359A (en) * | 2022-10-11 | 2022-12-09 | 哈尔滨理工大学 | High-hardness coating hard alloy cutter and machining method thereof |
| CN116121702A (en) * | 2023-03-29 | 2023-05-16 | 纳狮新材料有限公司杭州分公司 | TiSiNiYN coating for enhancing high-temperature wear resistance |
| CN116288179A (en) * | 2023-03-29 | 2023-06-23 | 纳狮新材料有限公司杭州分公司 | TiSiBAgYN coating resistant to high-temperature lubrication |
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| US7348074B2 (en) * | 2005-04-01 | 2008-03-25 | Oc Oerlikon Balzers Ag | Multilayer hard coating for tools |
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| CN102449194A (en) * | 2009-06-01 | 2012-05-09 | 山高刀具公司 | Nanolaminated coated cutting tool |
| CN105112858A (en) * | 2015-08-31 | 2015-12-02 | 科汇纳米技术（深圳）有限公司 | Nano composite cutting tool coating of multilayer structure |
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| CN108018528A (en) * | 2017-10-31 | 2018-05-11 | 广东工业大学 | A kind of high-temperature oxidation resistant AlTiYN coatings and preparation method and application |
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