CN109734296A - Quartz stove tube automatic polishing machine and polishing method - Google Patents
Quartz stove tube automatic polishing machine and polishing method Download PDFInfo
- Publication number
- CN109734296A CN109734296A CN201910149596.4A CN201910149596A CN109734296A CN 109734296 A CN109734296 A CN 109734296A CN 201910149596 A CN201910149596 A CN 201910149596A CN 109734296 A CN109734296 A CN 109734296A
- Authority
- CN
- China
- Prior art keywords
- stove tube
- quartz stove
- flame
- flame gun
- guide rail
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010453 quartz Substances 0.000 title claims abstract description 63
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 63
- 238000005498 polishing Methods 0.000 title claims abstract description 31
- 238000000034 method Methods 0.000 title claims description 10
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 5
- 239000001301 oxygen Substances 0.000 claims description 6
- 229910052760 oxygen Inorganic materials 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 239000000686 essence Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
Landscapes
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Abstract
A kind of Quartz stove tube automatic polishing machine, the polishing machine include Quartz stove tube；Board is the pedestal of entire polishing machine；First guide rail is mounted on board upper surface；Second guide rail is mounted on board side surface；Flame gun rack, for installing flame rifle, the flame gun rack is mounted on the first guide rail by sliding block, and flame gun rack is located on the axis of Quartz stove tube, flame rifle is moved along the first guide rail, flame polish is carried out to Quartz stove tube inner surface；Outer flame gun rack, for installing outer flame gun, the outer flame gun rack is mounted on the second guide rail by sliding block, and outer flame gun is moved along the second guide rail, carries out flame polish to Quartz stove tube outer surface；Turntable clamps Quartz stove tube by the fixture of turntable, while under the driving of turntable motor, so that Quartz stove tube makees axial rotary motion.
Description
Technical field
The invention belongs to semiconductor processing technology field, in particular to a kind of Quartz stove tube automatic polishing machine and polishing side
Method.
Background technique
In 8 inches or more integrated circuit silicon chip diffusion silicon wafer processing procedures, need Quartz stove tube as reaction cavity as anti-
Answer environment.And existing processing technology is to do flame throwing to Quartz stove tube inner and outer surfaces with hydrogen-oxygen gas flame simultaneously by two workers
Light processing, to reach surfaces externally and internally smoothness requirements.Two worker's hands of this process requirement cooperate by flame polish rifle, to stone
English boiler tube surfaces externally and internally does polishing treatment, not only has higher requirement (needing to cultivate 1-2), but also worker to the technical ability of worker
Labor intensity it is very big, it is difficult to ensure that product processing consistency.
Summary of the invention
The embodiment of the invention provides a kind of Quartz stove tube automatic polishing machines.
One of embodiment of the present invention, a kind of Quartz stove tube automatic polishing machine, the polishing machine include
Quartz stove tube；
Board is the pedestal of entire polishing machine；
First guide rail is mounted on board upper surface,
Second guide rail is mounted on board side surface,
Flame gun rack, for installing flame rifle, the flame gun rack is mounted on the first guide rail by sliding block, and
And flame gun rack is located on the axis of Quartz stove tube, flame rifle is moved along the first guide rail, to Quartz stove tube
Inner surface carries out flame polish
Outer flame gun rack, for installing outer flame gun, the outer flame gun rack is mounted on the second guide rail by sliding block, is made
Obtaining outer flame gun can move along the second guide rail, carry out flame polish to Quartz stove tube outer surface；
Turntable clamps Quartz stove tube by the fixture of turntable, while under the driving of turntable motor, so that Quartz stove tube is made
Axial rotary motion；
Box is controlled, board side is mounted on, controls the controller in box for controlling Quartz stove tube, inside and outside flame gun rack
Movement so that inside and outside flame gun carries out controllable flame polish processing to Quartz stove tube.
By practice have shown that, the embodiment of the present invention meet very well Quartz stove tube flame polish automation technolo processing want
It asks, greatly increases the production efficiency and quality of production controlled level.
Detailed description of the invention
The following detailed description is read with reference to the accompanying drawings, above-mentioned and other mesh of exemplary embodiment of the invention
, feature and advantage will become prone to understand.In the accompanying drawings, if showing by way of example rather than limitation of the invention
Dry embodiment, in which:
The structural schematic diagram of polishing machine in Fig. 1 embodiment of the present invention.
1 --- polishing machine platform, 2 --- guide rail, 3 --- flame gun rack, 4 --- outer flame gun rack, 5 --- control box,
6 --- Quartz stove tube.
Specific embodiment
According to one or more embodiment, as shown in Figure 1, a kind of Quartz stove tube automatic polishing machine, the polishing machine include
Quartz stove tube；Board is the pedestal of entire polishing machine；First guide rail is mounted on board upper surface；Second guide rail, is mounted on machine
Platform side surface；Flame gun rack, for installing flame rifle, the flame gun rack is mounted on the first guide rail by sliding block,
And flame gun rack is located on the axis of Quartz stove tube, and flame rifle is moved along the first guide rail, to quartzy furnace
Pipe internal surface carries out flame polish；Outer flame gun rack, for installing outer flame gun, the outer flame gun rack is mounted on by sliding block
On second guide rail, outer flame gun is moved along the second guide rail, flame polish is carried out to Quartz stove tube outer surface；Turn
Platform clamps Quartz stove tube by the fixture of turntable, while under the driving of turntable motor, so that Quartz stove tube makees axial rotation
Movement；Box is controlled, board side is mounted on, controls the controller in box for controlling Quartz stove tube, the fortune of inside and outside flame gun rack
It is dynamic, so that inside and outside flame gun carries out controllable flame polish processing to Quartz stove tube.
According to one or more embodiment, a kind of Quartz stove tube automatic polishing method, using the quartz of previous embodiment
Boiler tube polishing machine.The method that controller polishes Quartz stove tube is hydrogen-oxygen air valve, the hydrogen for controlling inside and outside flame gun respectively
Oxygen channel；By Quartz stove tube clamping on the turntable of automatic polishing machine, control turntable motor makes Quartz stove tube make rotation fortune
It is dynamic；After the igniting of inside and outside flame gun, under the control of the controller, flame gun is moved from trend direction initialization, in Quartz stove tube
Do flame polish processing in outer surface.
The embodiment of the present invention is established under lathe working principle, using the support frame of inside and outside flame gun, hydrogen-oxygen air valve
Door, hydrogen-oxygen feed channel and controller.Polishing machine platform is as Quartz stove tube clamping equipment, by Quartz stove tube clamping in automatic polishing machine
It makes rotating motion on turntable.After flame gun igniting, rifle is polished under the control of the controller and is transported along guide rail from trend a direction
It is dynamic, flame polish processing is done to Quartz stove tube surfaces externally and internally.
It is worth noting that although foregoing teachings are by reference to several essences that detailed description of the preferred embodimentsthe present invention has been described creates
Mind and principle, it should be appreciated that, the invention is not limited to the specific embodiments disclosed, the division also unawareness to various aspects
Taste these aspect in feature cannot combine, it is this divide merely to statement convenience.The present invention is directed to cover appended power
Included various modifications and equivalent arrangements in the spirit and scope that benefit requires.
Claims (2)
1. a kind of Quartz stove tube automatic polishing machine, which is characterized in that the polishing machine includes
Quartz stove tube；
Board is the pedestal of entire polishing machine；
First guide rail is mounted on board upper surface；
Second guide rail is mounted on board side surface；
Flame gun rack, for installing flame rifle, the flame gun rack is mounted on the first guide rail by sliding block, and interior
Flame gun rack is located on the axis of Quartz stove tube, and flame rifle is moved along the first guide rail, to table in Quartz stove tube
Face carries out flame polish；
Outer flame gun rack, for installing outer flame gun, the outer flame gun rack is mounted on the second guide rail by sliding block, so that outside
Flame gun can be moved along the second guide rail, carry out flame polish to Quartz stove tube outer surface；
Turntable clamps Quartz stove tube by the fixture of turntable, while under the driving of turntable motor, so that Quartz stove tube is made axially
Rotary motion；
Box is controlled, board side is mounted on, controls the controller in box for controlling Quartz stove tube, the fortune of inside and outside flame gun rack
It is dynamic, so that inside and outside flame gun carries out controllable flame polish processing to Quartz stove tube.
2. a kind of Quartz stove tube automatic polishing method, which is characterized in that use Quartz stove tube automatic polishing, which includes
Quartz stove tube；
Board is the pedestal of entire polishing machine；
First guide rail is mounted on board upper surface；
Second guide rail is mounted on board side surface；
Flame gun rack, for installing flame rifle, the flame gun rack is mounted on the first guide rail by sliding block, and interior
Flame gun rack is located on the axis of Quartz stove tube, and flame rifle is moved along the first guide rail, to table in Quartz stove tube
Face carries out flame polish；
Outer flame gun rack, for installing outer flame gun, the outer flame gun rack is mounted on the second guide rail by sliding block, so that outside
Flame gun can be moved along the second guide rail, carry out flame polish to Quartz stove tube outer surface；
Turntable clamps Quartz stove tube by the fixture of turntable, while under the driving of turntable motor, so that Quartz stove tube is made axially
Rotary motion；
Box is controlled, board side is mounted on, controls the controller in box for controlling Quartz stove tube, the fortune of inside and outside flame gun rack
It is dynamic,
The method that controller polishes Quartz stove tube is,
Hydrogen-oxygen air valve, the hydrogen-oxygen feed channel of inside and outside flame gun are controlled respectively；
By Quartz stove tube clamping on the turntable of automatic polishing machine, control turntable motor makes Quartz stove tube rotate；
After the igniting of inside and outside flame gun, under the control of the controller, flame gun is moved from trend direction initialization, in Quartz stove tube
Do flame polish processing in outer surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910149596.4A CN109734296B (en) | 2019-02-28 | 2019-02-28 | Automatic polishing machine and polishing method for quartz furnace tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910149596.4A CN109734296B (en) | 2019-02-28 | 2019-02-28 | Automatic polishing machine and polishing method for quartz furnace tube |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109734296A true CN109734296A (en) | 2019-05-10 |
| CN109734296B CN109734296B (en) | 2023-12-26 |
Family
ID=66368826
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910149596.4A Active CN109734296B (en) | 2019-02-28 | 2019-02-28 | Automatic polishing machine and polishing method for quartz furnace tube |
Country Status (1)
| Country | Link |
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| CN (1) | CN109734296B (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110117154A (en) * | 2019-06-09 | 2019-08-13 | 上海强华实业股份有限公司 | A kind of quartz welding torch and jet pipe production method |
| CN111393016A (en) * | 2019-12-23 | 2020-07-10 | 杭州大和热磁电子有限公司 | Automatic fire polishing processing device |
| CN112010543A (en) * | 2020-09-16 | 2020-12-01 | 久智光电子材料科技有限公司 | Blast burner and polishing device in quartz tube |
| CN112456773A (en) * | 2020-12-22 | 2021-03-09 | 苏州博莱特石英有限公司 | Tubular quartz product processing equipment |
| CN114206790A (en) * | 2019-08-02 | 2022-03-18 | 信越石英株式会社 | Flame grinding device and method for grinding end part of quartz glass tube by flame |
| CN115070590A (en) * | 2022-07-12 | 2022-09-20 | 上海强华实业股份有限公司 | Polishing method of quartz cavity |
| CN115818941A (en) * | 2022-11-04 | 2023-03-21 | 杭州大和热磁电子有限公司 | Fine sintering method of quartz rod |
| CN117383812A (en) * | 2023-12-13 | 2024-01-12 | 上海强华实业股份有限公司 | Automatic flame polishing device and system for quartz small tubes |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06166529A (en) * | 1992-11-30 | 1994-06-14 | Nippon Telegr & Teleph Corp <Ntt> | Preparation of jacket pipe |
| JP2012166996A (en) * | 2011-02-16 | 2012-09-06 | Fukui Shinetsu Sekiei:Kk | Apparatus and method for flame-processing of ring-shaped quartz glass tool |
| CN204385054U (en) * | 2014-12-16 | 2015-06-10 | 四川元通玻璃仪器有限公司 | A kind of burnishing device of glasswork |
| CN205275454U (en) * | 2016-01-12 | 2016-06-01 | 中建材衢州金格兰石英有限公司 | Automatic flame polish device of quartz glass stick |
| CN107619179A (en) * | 2017-10-18 | 2018-01-23 | 上海强华实业有限公司 | A kind of quartz plate flame polishing device |
| CN108996898A (en) * | 2018-06-25 | 2018-12-14 | 芜湖万辰电光源科技股份有限公司 | A kind of fire polishing machine and its application method for the polishing of glass outer surface |
| CN209636110U (en) * | 2019-02-28 | 2019-11-15 | 上海强华实业股份有限公司 | Quartz stove tube automatic polishing machine |
-
2019
- 2019-02-28 CN CN201910149596.4A patent/CN109734296B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06166529A (en) * | 1992-11-30 | 1994-06-14 | Nippon Telegr & Teleph Corp <Ntt> | Preparation of jacket pipe |
| JP2012166996A (en) * | 2011-02-16 | 2012-09-06 | Fukui Shinetsu Sekiei:Kk | Apparatus and method for flame-processing of ring-shaped quartz glass tool |
| CN204385054U (en) * | 2014-12-16 | 2015-06-10 | 四川元通玻璃仪器有限公司 | A kind of burnishing device of glasswork |
| CN205275454U (en) * | 2016-01-12 | 2016-06-01 | 中建材衢州金格兰石英有限公司 | Automatic flame polish device of quartz glass stick |
| CN107619179A (en) * | 2017-10-18 | 2018-01-23 | 上海强华实业有限公司 | A kind of quartz plate flame polishing device |
| CN108996898A (en) * | 2018-06-25 | 2018-12-14 | 芜湖万辰电光源科技股份有限公司 | A kind of fire polishing machine and its application method for the polishing of glass outer surface |
| CN209636110U (en) * | 2019-02-28 | 2019-11-15 | 上海强华实业股份有限公司 | Quartz stove tube automatic polishing machine |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110117154A (en) * | 2019-06-09 | 2019-08-13 | 上海强华实业股份有限公司 | A kind of quartz welding torch and jet pipe production method |
| CN114206790A (en) * | 2019-08-02 | 2022-03-18 | 信越石英株式会社 | Flame grinding device and method for grinding end part of quartz glass tube by flame |
| CN111393016A (en) * | 2019-12-23 | 2020-07-10 | 杭州大和热磁电子有限公司 | Automatic fire polishing processing device |
| CN112010543A (en) * | 2020-09-16 | 2020-12-01 | 久智光电子材料科技有限公司 | Blast burner and polishing device in quartz tube |
| CN112456773A (en) * | 2020-12-22 | 2021-03-09 | 苏州博莱特石英有限公司 | Tubular quartz product processing equipment |
| CN115070590A (en) * | 2022-07-12 | 2022-09-20 | 上海强华实业股份有限公司 | Polishing method of quartz cavity |
| CN115818941A (en) * | 2022-11-04 | 2023-03-21 | 杭州大和热磁电子有限公司 | Fine sintering method of quartz rod |
| CN117383812A (en) * | 2023-12-13 | 2024-01-12 | 上海强华实业股份有限公司 | Automatic flame polishing device and system for quartz small tubes |
| CN117383812B (en) * | 2023-12-13 | 2024-03-08 | 上海强华实业股份有限公司 | Automatic flame polishing device and system for quartz small tubes |
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| Publication number | Publication date |
|---|---|
| CN109734296B (en) | 2023-12-26 |
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