CN111393016A - Automatic fire polishing processing device - Google Patents
Automatic fire polishing processing device Download PDFInfo
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- CN111393016A CN111393016A CN201911342175.XA CN201911342175A CN111393016A CN 111393016 A CN111393016 A CN 111393016A CN 201911342175 A CN201911342175 A CN 201911342175A CN 111393016 A CN111393016 A CN 111393016A
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- lifting
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B29/00—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins
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- Organic Chemistry (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The invention discloses an automatic fire polishing processing device, which comprises a rack for supporting the whole device, and an automatic rotary lifting mechanism for controlling the lifting and rotating actions of a product, wherein the automatic rotary lifting mechanism is arranged in the rack; the product tooling jig is used for supporting and positioning a product and is arranged on the automatic rotary lifting mechanism; the welding gun assembly is used for automatic fire polishing operation of products and is arranged on the table top of the rack; the power distribution cabinet and the upper computer provide electric control guarantee for the whole device. The automatic fire polishing device disclosed by the invention realizes the automatic fire polishing of the quartz ring, is simple to operate, high in efficiency and uniform in polishing quality, and also reduces the manual operation steps and the labor cost.
Description
Technical Field
The invention relates to the field of quartz glass processing, in particular to an automatic fire polishing processing device.
Background
With the rapid development of the chip industry, the market demand is increased rapidly, and the semiconductor equipment industry is developed rapidly. The quartz glass product belongs to the consumable parts commonly used for semiconductor equipment, and the demand is increasing. The quartz glass adopts high-purity silica sand as a raw material, has high purity after molding, and can also be used as an important auxiliary material for processing semiconductor materials. The quartz glass belongs to special glass, quartz product processing is not only mechanical cold processing, but also fire processing requiring high-temperature welding gun heating and shaping, and two processes are common in the fire processing process: welding and fire polishing. Fire polishing belongs to an important process in the field of quartz glass fire processing technology, and has strict technological requirements. The existing quartz glass fire polishing process is basically operated manually, the processing quality stability is poor, the efficiency is low, and the labor cost is high.
For example, the "polishing process of quartz macrocycle with notch" disclosed in the Chinese patent literature, the publication No. CN110052899A, includes the following steps: A. polishing the outer diameter; B. cleaning; C. the axis of the large quartz ring is kept to be horizontally placed on a workbench, so that the notch position of the large quartz ring is positioned at the middle point of a quarter of a circular arc with the highest point of the large quartz ring as an end point; D. slowly pushing the quartz macrocycle into an annealing furnace for heating, stopping heating when the temperature of the annealing furnace rises to 950 ℃, and dragging out the quartz macrocycle; E. carrying out high-temperature polishing on the half circumference of the upper part of the quartz large ring in a flame spraying mode; F. pushing the quartz large ring into an annealing furnace for annealing; G. checking stress, rotating the quartz large ring by 180 degrees along the axis, and polishing the unpolished part of the quartz large ring at high temperature in a flame spraying manner; H. pushing the quartz large ring into the annealing furnace again for annealing; I. and (5) inspecting a finished product. The process disclosed by the invention is basically operated manually, the processing quality stability is poor, the efficiency is low, and the labor cost is high.
Disclosure of Invention
The invention aims to overcome the problems that the existing fire polishing process of quartz glass is basically manually operated, the processing quality is poor, the efficiency is low and the labor cost is high, and provides an automatic fire polishing processing device, which realizes the automatic fire polishing of products, has simple operation, high efficiency and uniform polishing quality, reduces manual operation steps and lowers the labor cost.
In order to achieve the purpose, the invention adopts the following technical scheme:
an automatic fire polishing processing device comprises a frame for supporting the whole device, and an automatic rotary lifting mechanism for controlling the lifting and rotary actions of a product, wherein the automatic rotary lifting mechanism is arranged in the frame; the product tooling jig is used for supporting and positioning a product and is arranged on the automatic rotary lifting mechanism; the welding gun assembly is used for automatic fire polishing operation of products and is arranged on the table top of the rack; the power distribution cabinet and the upper computer provide electric control guarantee for the whole device.
In the technical scheme, the rack provides a firm supporting platform for the whole device, when a product is subjected to automatic fire polishing, the product is fixed by using a product tooling jig, then the product tooling jig is installed on an automatic rotary lifting mechanism, the automatic rotary lifting mechanism is used for controlling the lifting and rotary motion of the product, so that the product starts fire polishing operation at a specified position, and finally, the product is subjected to fire polishing operation by using a welding gun assembly; the automatic fire polishing device is simple, convenient and fast to operate and high in efficiency, automatic fire polishing operation of products is achieved, manual operation steps are reduced, labor cost is reduced, and compared with manual fire polishing, the automatic fire polishing device can control products more accurately, and polishing quality of the products is higher; in addition, the scheme of programmable control by using the upper computer is convenient for test operation and processing, the control method has high accuracy and wide application range, and can provide processing guarantee for the fire polishing of the inner diameter and the outer diameter of the quartz ring product.
Preferably, the automatic rotary lifting mechanism comprises a lifting main shaft and a lifting device rack for supporting, and the lifting main shaft is connected with the product tooling jig; the lifting device frame is internally provided with a lifting structure for realizing the lifting motion of the lifting main shaft and a rotary structure for realizing the rotary motion of the lifting main shaft.
The lifting structure and the rotary structure control lifting main shaft to move up and down and rotate, the lifting main shaft is connected with the product tool jig, and when the lifting main shaft moves up and down or rotates, the product tool jig is driven to move up and down or rotate, so that the lifting motion and the rotating motion of the product are realized, and the product is conveniently arranged at a designated position and subjected to fire polishing.
Preferably, the lifting structure comprises a supporting plate, a lifting motor, a lifting screw rod, a synchronous belt and a lifting rotary supporting box body, wherein the lifting motor, the lifting screw rod, the synchronous belt and the lifting rotary supporting box body are arranged on the supporting plate, the synchronous belt is used for transmitting power in the lifting motor to the lifting screw rod, and the lifting rotary supporting box body is internally connected with the lifting screw rod.
When the lifting spindle carries out lifting motion, the lifting motor is started, the power of the lifting motor is transmitted to the lifting screw rod through the synchronous belt, so that the lifting rotary supporting box body is driven to carry out lifting motion, the lifting spindle is driven to carry out lifting motion, and the product tool jig mounted on the lifting spindle is convenient to carry out height adjustment.
Preferably, the rotary structure comprises a rotary motor arranged on the lifting rotary supporting box body, and a gear transmission mechanism used for transmitting power to the lifting spindle is arranged in the rotary motor.
When the lifting spindle performs rotary motion, the rotary motor is started, power is transmitted to the lifting spindle through the gear transmission mechanism inside the rotary motor, so that the lifting spindle is driven, the rotary motion of the lifting spindle is realized, a product tooling jig fixed on the lifting spindle is driven to perform rotary motion with adjustable speed, a product can perform rotary motion at required speed, fire polishing operation is performed, and polishing quality is improved.
Preferably, a lifting slide rail is arranged on the inner side wall of the lifting device rack, and a lifting slide groove matched with the lifting slide rail is arranged outside the lifting rotary supporting box body.
The lifting slide rail and the lifting slide groove are arranged to guide the lifting rotary supporting box body, so that inconvenience caused by deviation of the lifting rotary supporting box body in lifting motion is effectively prevented.
Preferably, the product tooling jig is of a double-layer structure, the double-layer structure comprises a tooling base and a jaw base, the tooling base is used for being connected with the lifting spindle, the jaw base is used for bearing a product, the tooling base is arranged on the lower layer, the jaw base is arranged on the upper layer, and a matched jaw is arranged on the jaw base.
The product tool jig is used for fixing a product, wherein the product is a quartz ring, when the quartz ring is fixed, the quartz ring is placed on the clamping jaw, the clamping jaw plays a role in supporting and positioning the quartz ring, then the clamping seat base is placed on the tool base, the product can move along with the automatic rotary lifting mechanism, and therefore fire polishing is conducted on the specified positions of the inner diameter and the outer diameter of the product.
Preferably, a positioning structure is arranged at the matching position of the tool base and the jaw base, and the positioning structure comprises a base male die arranged on the tool base and a base female die arranged on the jaw base.
The positioning structure ensures that the tool base after installation is concentric with the jaw base, and when the tool base is used, the base female die is matched with the base male die, so that the clamp base and the tool base are accurately and quickly positioned.
Preferably, the welding gun assembly comprises a welding gun bracket arranged on the table surface of the rack and an automatic ignition welding gun clamped on the welding gun bracket.
The automatic ignition welding gun is used for carrying out automatic fire polishing operation on a product, the welding gun support is arranged on the table top of the rack, and the welding gun support provides a freely adjustable clamping mechanism for the automatic ignition welding gun.
Preferably, the product tool jig is made of high-purity graphite.
The arrangement of the high-purity graphite material ensures that the device can not cause secondary pollution to quartz products during working.
Therefore, the invention has the following beneficial effects:
(1) the automatic fire polishing of the product is realized, the operation is simple, the efficiency is high, the polishing quality is uniform, the manual operation steps are reduced, and the labor cost is reduced;
(2) the product tooling jig is arranged, so that the product is convenient to support and position;
(3) the automatic rotary lifting mechanism is arranged, so that the fire polishing position of the product can be conveniently adjusted;
(4) the base male die and the base female die are respectively arranged, so that the tool base and the jaw base can be accurately and quickly positioned;
(5) the product tool jig is made of high-purity graphite, and cannot generate secondary pollution to quartz products.
Drawings
FIG. 1 is a schematic view of an automatic fire polishing apparatus;
FIG. 2 is a schematic structural view of an automatic rotary lifting mechanism;
FIG. 3 is a partial cross-sectional view of the automatic swing lift mechanism;
FIG. 4 is a schematic structural view of a product tooling fixture;
in the figure: 1. the automatic welding machine comprises a power distribution cabinet 2, an upper computer 3, a product tooling jig 301, a tooling base 302, a jaw base 303, a jaw 304, a base male die 305, a base female die 4, a welding gun assembly 5, an automatic ignition welding gun 6, a welding gun support 7, a product 8, an automatic rotary lifting mechanism 801, a lifting device frame 802, a support plate 803, a lifting screw rod 804, a synchronous belt 805, a lifting motor 806, a lifting rotary support box 807, a rotary motor 808, a lifting spindle 809, a lifting structure 810, a lifting slide rail 811, a lifting slide groove 9 and a frame.
Detailed Description
The invention is further described with reference to the following detailed description and accompanying drawings.
Example 1:
in embodiment 1 shown in fig. 1, an automatic fire polishing processing device comprises a frame 9 for supporting the whole device, an automatic rotary lifting mechanism 8 for controlling the lifting and rotating actions of a product 7, wherein the automatic rotary lifting mechanism 8 is installed in the frame, the automatic rotary lifting mechanism 8 comprises a lifting spindle 808 and a lifting device frame 801, a lifting structure 809 for controlling the lifting action of the lifting spindle 808 and a rotating mechanism for controlling the rotating action of the lifting spindle 808 are arranged in the lifting device frame 801, the lifting structure 809 comprises a lifting motor 805, and the rotating structure comprises a rotating motor 807; the product tooling fixture 3 is used for supporting and positioning a product, the product tooling fixture 3 is installed on the automatic rotary lifting mechanism 8, the product tooling fixture 3 is of a double-layer structure, the lower layer is a fixture base 301, the upper layer is a jaw base 302, a matched jaw 303 is arranged on the jaw base 302, and the jaw 303 is used for fixing the product 7; the welding gun assembly 4 is used for automatic product fire polishing operation, the welding gun assembly 4 comprises a welding gun support 6 and an automatic ignition welding gun 5, the automatic ignition welding gun 5 is clamped on the welding gun support 6, the welding gun support 6 is arranged on the table top of the rack, and the welding gun support 6 provides a multi-freedom adjustable clamping mechanism for the automatic ignition welding gun 5; and install switch board 1 in one side of frame, install host computer 2 on switch board 1, switch board 1 and host computer 2 provide the automatically controlled control guarantee for whole device.
In the technical scheme, when the product is subjected to automatic fire polishing operation, the product is firstly placed on a clamping jaw 303 of a product tooling jig 3, a clamping jaw base 302 is fixed on a tooling base 301, the tooling base 301 is installed on an automatic rotary lifting mechanism 8, the center of the product is overlapped and aligned with the center of a lifting spindle 808, a corresponding processing program is started by taking an upper computer 2, the whole device can fully automatically operate according to the processing program, namely the lifting spindle 808 is driven by a lifting motor 805 to ascend to a designated position, then the lifting spindle 808 starts to perform rotary motion under the drive of a rotary motor 807 to drive the product to perform rotary motion, and meanwhile, an automatic ignition welding gun 5 is started to aim at the designated positions of the inner diameter and the outer diameter of the product to perform fire polishing; after the program operation is finished, the upper computer 2 controls the automatic ignition welding gun 5 to stop firing, the lifting spindle 808 stops driving the product to rotate and descend to the original position, the claw base 302 is manually moved down and the product 7 is exchanged, the program is started through the upper computer 2 again, the automatic fire polishing operation is repeatedly carried out, the product is taken down after the polishing is finished, and the automatic fire polishing of the product 7 is finished.
In addition, the product is a quartz ring, the product tool jig 3 is made of high-purity graphite, and the arrangement of the high-purity graphite enables the device not to cause secondary pollution to the quartz product during operation.
Example 2:
as shown in fig. 2 and 3, the embodiment 2 is basically the same as the embodiment 1, except that: the lifting structure 809 further comprises a supporting plate 802, a synchronous belt 804 and a lifting screw 803, a lifting motor 805 is mounted on the supporting plate 802, the lifting motor 805 is connected with the lower end of the lifting screw 803 through the synchronous belt 804, the lifting motor 805 transmits power to the lifting screw 803 through the synchronous belt 804, the upper end of the lifting screw 803 is connected with a lifting spindle 808, a lifting rotary supporting box 806 is further arranged on the automatic rotary lifting mechanism 8, the interior of the lifting rotary supporting box 806 is connected with the lifting screw 803 through a screw shaft sleeve, and therefore the lifting screw 803 can drive the whole lifting rotary supporting box 806 to do lifting movement; the rotary structure comprises a rotary motor 807 and a gear transmission mechanism, wherein the rotary motor 807 transmits power to a lifting spindle 808 through the gear transmission mechanism, so that the spindle and a product tool jig 3 are driven to perform rotary motion, and the rotary motion of a quartz circular ring product is realized.
Furthermore, a lifting slide rail 810 is arranged on the inner side wall of the lifting device rack 801, a lifting slide groove 811 matched with the lifting slide rail 810 is arranged outside the lifting rotary supporting box body 806, the lifting rotary supporting box body 806 can move up and down, and the lifting slide rail 810 and the lifting slide groove 811 are used for guiding, so that the polishing quality is effectively prevented from being influenced by the deviation of the lifting rotary supporting box body from the original movement direction.
Example 3:
as shown in fig. 4, the embodiment 3 is basically the same as the embodiment 1, except that: the tool base comprises a base male die 304, a base female die 305 is arranged on the lower portion of a jaw base 302, the jaw base 302 and the tool base 301 can be quickly positioned after the base male die 304 is matched with the base female die 305, the tool base 301 and the jaw base 302 are concentric, a jaw 303 is arranged on the upper portion of the jaw base 302, the jaw 303 can be replaced according to different outer diameters of products, and a positioning supporting effect is provided for the products.
Furthermore, three base male molds 304 are arranged, three base female molds 305 are arranged, and planes are determined by the three points, so that the clamping seat base can be ensured to be parallel to the tool base 301, and the polishing quality is improved; in addition, the number of the clamping claws 303 is three, so that the product can be better supported and positioned.
Example 4:
the embodiment 4 is basically the same as the embodiment 1, except that: the automatic fire polishing processing device is of a double-station structure, namely two sets of automatic rotary lifting mechanisms 8 are assembled in the rack, two sets of welding gun assemblies 4 are mounted on the table surface of the rack, the two sets of automatic rotary lifting mechanisms can work independently and can also cooperate through upper computer programming, automatic fire polishing operation can be carried out on two products 7, and working efficiency is effectively improved.
It should be noted that as used in the foregoing description, the terms "front," "back," "left," "right," "upper" and "lower" refer to directions in the drawings, and the terms "inner" and "outer" refer to directions toward and away from, respectively, the geometric center of a particular component.
The above examples are merely illustrative of the present invention and are not intended to limit the scope of the present invention. Various other modifications and changes may be made by those skilled in the art based on the above-described technical solutions and concepts, and all such modifications and changes should fall within the scope of the claims of the present invention.
Claims (9)
1. An automatic fire polishing processing device is characterized by comprising,
a frame (9) for supporting the whole device,
the automatic rotary lifting mechanism (8) is used for controlling the lifting and the rotary motion of the product (7), and the automatic rotary lifting mechanism (8) is arranged in the rack (9);
the product tooling fixture (3) is used for supporting and positioning a product, and the product tooling fixture (3) is installed on the automatic rotary lifting mechanism (8);
the welding gun assembly (4) is used for automatic fire polishing operation of products, and the welding gun assembly (4) is installed on the table top of the rack (9);
the device comprises a power distribution cabinet (1) and an upper computer (2) which provide electric control guarantee for the whole device.
2. The automatic fire polishing processing device as claimed in claim 1, wherein the automatic rotary lifting mechanism (8) comprises a lifting spindle (808) and a lifting device frame (801) for supporting, and the lifting spindle (808) is connected with the product tooling fixture (3); a lifting structure (809) for realizing the lifting motion of a lifting main shaft (808) and a rotary structure for realizing the rotary motion of the lifting main shaft (808) are arranged in the lifting device rack (801).
3. The automatic fire polishing processing device as claimed in claim 2, wherein the lifting structure (809) comprises a support plate (802), a lifting motor (805) mounted on the support plate (802), a lifting screw rod (803), a synchronous belt (804) for transmitting power in the lifting motor (805) to the lifting screw rod (803), and a lifting rotary support box body (806), and the interior of the lifting rotary support box body (806) is connected with the lifting screw rod (803).
4. The automatic fire polishing processing device as claimed in claim 3, wherein the rotary structure comprises a rotary motor (807) mounted on the lifting rotary supporting box body (806), and a gear transmission mechanism for transmitting power to the lifting spindle (808) is arranged in the rotary motor (807).
5. The automatic fire polishing processing device as claimed in claim 3, wherein a lifting slide rail (810) is arranged on the inner side wall of the lifting device frame (801), and a lifting slide groove (811) matched with the lifting slide rail (810) is arranged outside the lifting rotary supporting box body (806).
6. The automatic fire polishing processing device as claimed in claim 1, wherein the product tooling fixture (3) is arranged in a double-layer structure, the double-layer structure comprises a tooling base (301) connected with a lifting spindle (808) and a jaw base (302) used for bearing a product, the tooling base (301) is arranged at a lower layer, the jaw base (302) is arranged at an upper layer, and a matched jaw (303) is arranged on the jaw base (302).
7. The automatic fire polishing processing device as claimed in claim 6, wherein a positioning structure is arranged at the matching position of the tool base (301) and the jaw base (302), and the positioning structure comprises a base male die (304) arranged on the tool base (301) and a base female die (305) arranged on the jaw base (302).
8. The automatic fire polishing processing device according to any one of claims 1 to 7, characterized in that the welding gun assembly (4) comprises a welding gun support (6) arranged on the table surface of the frame (9) and an automatic ignition welding gun (5) clamped on the welding gun support (6).
9. The automatic fire polishing processing device as claimed in any one of claims 1 to 7, wherein the product tooling fixture (3) is made of high-purity graphite.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911342175.XA CN111393016A (en) | 2019-12-23 | 2019-12-23 | Automatic fire polishing processing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911342175.XA CN111393016A (en) | 2019-12-23 | 2019-12-23 | Automatic fire polishing processing device |
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| Publication Number | Publication Date |
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| CN111393016A true CN111393016A (en) | 2020-07-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911342175.XA Pending CN111393016A (en) | 2019-12-23 | 2019-12-23 | Automatic fire polishing processing device |
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| CN (1) | CN111393016A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111958462A (en) * | 2020-09-04 | 2020-11-20 | 青岛微科光电技术有限公司 | Optical cement plate feeding method |
| CN113415984A (en) * | 2021-06-16 | 2021-09-21 | 浙江富乐德石英科技有限公司 | Automatic precision firing device of quartz ring products |
| CN114057383A (en) * | 2021-10-13 | 2022-02-18 | 浙江富乐德石英科技有限公司 | Quartz ring fire polishing device and method |
| CN115490416A (en) * | 2022-08-12 | 2022-12-20 | 杭州大和热磁电子有限公司 | Automatic fire burnishing device of quartz product based on robot |
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| JPH0656448A (en) * | 1992-08-12 | 1994-03-01 | Fujikura Ltd | Production of optical fiber preform |
| DE10354412A1 (en) * | 2003-11-21 | 2005-06-23 | Linde Ag | Burner control for fire polishing of glass (on board) |
| CN109734296A (en) * | 2019-02-28 | 2019-05-10 | 上海强华实业股份有限公司 | Quartz stove tube automatic polishing machine and polishing method |
| CN110127994A (en) * | 2019-06-09 | 2019-08-16 | 上海强华实业股份有限公司 | Quartzy plectane/flange processing device and method |
| CN209636110U (en) * | 2019-02-28 | 2019-11-15 | 上海强华实业股份有限公司 | Quartz stove tube automatic polishing machine |
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2019
- 2019-12-23 CN CN201911342175.XA patent/CN111393016A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0656448A (en) * | 1992-08-12 | 1994-03-01 | Fujikura Ltd | Production of optical fiber preform |
| DE10354412A1 (en) * | 2003-11-21 | 2005-06-23 | Linde Ag | Burner control for fire polishing of glass (on board) |
| CN109734296A (en) * | 2019-02-28 | 2019-05-10 | 上海强华实业股份有限公司 | Quartz stove tube automatic polishing machine and polishing method |
| CN209636110U (en) * | 2019-02-28 | 2019-11-15 | 上海强华实业股份有限公司 | Quartz stove tube automatic polishing machine |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111958462A (en) * | 2020-09-04 | 2020-11-20 | 青岛微科光电技术有限公司 | Optical cement plate feeding method |
| CN113415984A (en) * | 2021-06-16 | 2021-09-21 | 浙江富乐德石英科技有限公司 | Automatic precision firing device of quartz ring products |
| CN114057383A (en) * | 2021-10-13 | 2022-02-18 | 浙江富乐德石英科技有限公司 | Quartz ring fire polishing device and method |
| CN115490416A (en) * | 2022-08-12 | 2022-12-20 | 杭州大和热磁电子有限公司 | Automatic fire burnishing device of quartz product based on robot |
| CN115490416B (en) * | 2022-08-12 | 2023-09-12 | 杭州大和热磁电子有限公司 | Automatic fire polishing device of quartz product based on robot |
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Application publication date: 20200710 |