CN114057383A - Quartz ring fire polishing device and method - Google Patents

Quartz ring fire polishing device and method Download PDF

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Publication number
CN114057383A
CN114057383A CN202111191925.5A CN202111191925A CN114057383A CN 114057383 A CN114057383 A CN 114057383A CN 202111191925 A CN202111191925 A CN 202111191925A CN 114057383 A CN114057383 A CN 114057383A
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CN
China
Prior art keywords
quartz ring
welding gun
clamping mechanism
quartz
fire polishing
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Pending
Application number
CN202111191925.5A
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Chinese (zh)
Inventor
汪俊
郑明山
杨军
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Zhejiang Fuleide Quartz Technology Co ltd
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Zhejiang Fuleide Quartz Technology Co ltd
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Application filed by Zhejiang Fuleide Quartz Technology Co ltd filed Critical Zhejiang Fuleide Quartz Technology Co ltd
Priority to CN202111191925.5A priority Critical patent/CN114057383A/en
Publication of CN114057383A publication Critical patent/CN114057383A/en
Pending legal-status Critical Current

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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B29/00Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins
    • C03B29/04Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins in a continuous way
    • C03B29/06Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins in a continuous way with horizontal displacement of the products
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

The invention discloses a quartz ring fire polishing device and a method, comprising the following steps: the clamping mechanism is used for clamping one end of the quartz tube and enabling the quartz tube to rotate along the axis; the lifting mechanism is arranged at one end of the quartz tube, which is far away from the clamping mechanism, and is used for lifting the quartz tube and ensuring that the quartz tube extends along the axial direction; the mechanism is arranged between the clamping mechanism and the lifting mechanism in a sliding mode, and a first hole for the quartz tube to pass through is formed in the mechanism. The invention ensures that the quartz tube extends along a straight line; the quartz tube is effective; the pressure control speed at the two ends in the hole is monitored, so that the product is prevented from being damaged, and the high efficiency is ensured; adapting to quartz tubes of different tube diameters and lengths; the operation is simple and the effect is stable.

Description

Quartz ring fire polishing device and method
Technical Field
The invention relates to the technical field of quartz processing, in particular to a quartz ring fire polishing device and a quartz ring fire polishing method.
Background
With the rapid development of the IC industry, the semiconductor device manufacturing industry is becoming mature, and the demand for quartz glass products as important component products in semiconductor devices is increasing. Because the quartz glass has a series of characteristics of high hardness, high purity, low thermal expansion coefficient, electric insulation and the like, the processing technology of the quartz glass is very strict. Quartz products often need to be improved in surface quality through fire polishing, in the prior art, a welding gun is manually held, flame sprayed by the welding gun carries out fire polishing on the surfaces of the products, manual operation is time-consuming and labor-consuming, efficiency is low, batch production of the products is not facilitated, high requirements are put forward for personnel skill level, and the problems of inconsistent light transmittance and surface roughness and even product deformation caused by uneven polishing of polished surfaces of the products easily occur, so that the product quality is influenced; in the prior art, polishing is also performed through a mechanical device, but because ring products have more surfaces to be polished, including upper and lower surfaces and inner and outer surfaces, multi-step polishing is usually required, the processing efficiency is low, and the polishing effect is poor.
For example, a "quartz ring fire polishing apparatus" disclosed in chinese patent document, whose application number CN201922162598.5, includes an operation table frame, which includes a support and an operation table assembly, the operation table assembly is disposed on the support, the operation table assembly includes a stage and a polishing gun rack, the quartz ring to be processed is fixed on the stage, the polishing gun rack is disposed on one side of the stage; the bottom end of the polishing gun rack is fixed on the objective table, the top end of the polishing gun rack is provided with a polishing gun head, and a jet orifice of the polishing gun head faces to the table surface of the objective table; the objective table is arranged on a rotating table, and the rotating table is driven by a motor to rotate and then drives the objective table to rotate. The quartz ring is supported by the object stage through the support column, and the support column and the quartz ring are easy to slide relatively during rotation, so that fixation is influenced, and the product quality is influenced; the inner surface and the lower surface of the product can not be polished, manual supplementary polishing or turnover polishing is needed for secondary polishing, and the processing efficiency is low.
Disclosure of Invention
The quartz ring fire polishing device and the quartz ring fire polishing method are simple to operate, high in machining efficiency and stable and good in polishing effect.
In order to achieve the purpose, the invention adopts the following technical scheme:
a quartz ring fire polishing apparatus comprising:
the rotating platform is used for driving the quartz ring to coaxially rotate, and coaxial circular arc-shaped through holes are formed in the rotating platform;
the clamping mechanisms are used for coaxially fixing the quartz ring on the rotating table, and are provided with sliding blocks which are arranged on the rotating table in a sliding manner along the radial direction;
the upper welding gun is used for carrying out fire polishing on the upper surface and the inner and outer surfaces of the quartz ring;
and the lower welding gun is arranged below the rotary table and used for carrying out fire polishing on the lower surface of the quartz ring through the through hole.
The invention is characterized in that a plurality of gun mouths are arranged on an upper welding gun and respectively aligned with the upper surface and the inner and outer surfaces of a quartz ring, and a lower welding gun mouth is aligned with the lower surface of the quartz ring, wherein flame sprayed by the lower welding gun passes through an arc-shaped through hole of a rotating table and acts on the lower surface of the quartz ring, and when the rotating table drives the quartz ring to rotate, the whole surface of the quartz ring is polished at one time; the plurality of clamping mechanisms are arranged along the circumferential direction, preferably, four clamping mechanisms are uniformly distributed on the rotating table at intervals of 90 degrees, stability and reliability are realized, the sliding blocks are used for fixing the quartz rings, and the radial positions of the sliding blocks are adjusted to adapt to the quartz rings with different diameters and sizes.
Preferably, the sliding block is provided with a supporting surface for supporting the bottom surface of the quartz ring and an arc surface for being attached to the inner surface of the quartz ring.
The supporting surface is limited in the vertical direction of the quartz ring, the arc surface is used for being abutted against the inner wall of the quartz ring, the quartz ring is tensioned through the fixed sliding block, and the horizontal direction of the quartz ring is limited.
Preferably, the clamping mechanism further comprises a fixed block, and an adjusting bolt used for adjusting the radial position of the sliding block is connected between the sliding block and the fixed block in a threaded manner.
One of the adjusting modes of the sliding block is to adjust the distance between the sliding block and the fixed block by manually rotating a bolt and tighten the bolt to tension the quartz ring.
Preferably, the clamping mechanism further comprises a slide block driving device for driving the slide block to slide.
Another adjustment method of the slide block is driving by a driving device, for example, a cylinder with high precision is used for driving, and the position of the slide block is automatically controlled.
Preferably, the clamping mechanism comprises a static clamping mechanism and a movable clamping mechanism, the static clamping mechanism is fixedly arranged on the rotating platform, and the movable clamping mechanism is connected with the through hole in a sliding mode.
Because the quartz ring is contacted with the sliding block, the contact surface on the quartz ring is blocked and cannot be polished, the local position needs to be manually supplemented and polished, the quartz ring is driven to rotate for a certain angle by rotating the movable clamping mechanism, the blocked part is exposed, and the subsequent polishing of the part is facilitated.
Preferably, the upper welding gun and the lower welding gun are movably arranged on the welding gun adjusting frame, the welding gun adjusting frame comprises a pressing plate, a supporting plate, a guide pillar, a clamping sleeve, a sliding plate and a fixing plate, the pressing plate and the supporting plate are detachably connected to form a space for fixing the upper welding gun or the lower welding gun, the supporting plate is fixedly connected with the clamping sleeve, the guide pillar is arranged in the clamping sleeve in a sliding mode, the guide pillar is fixedly connected with the sliding plate, and the sliding plate is arranged on the fixing plate in a sliding mode.
Go up welder and lower welder and stretch out and draw back adjustable between clamp plate and backup pad, press from both sides the cover and can follow the guide arm lift, rotation regulation height and angle, slide adjustment horizontal displacement on the fixed plate guarantees that welder can aim at not unidimensional product.
A quartz ring fire polishing method comprises the following steps:
placing a quartz ring product on a sliding block, attaching the bottom surface of the quartz ring to a supporting surface, and adjusting the radial position of the sliding block to ensure that the arc surface is abutted and fixed with the inner surface of the quartz ring;
and adjusting the positions of an upper welding gun and a lower welding gun, wherein the muzzle of the upper welding gun is aligned to the upper surface, the inner surface and the outer surface of the quartz ring, the muzzle of the lower welding gun is aligned to the lower surface of the quartz ring, the rotating table is started to rotate at a constant speed, a welding gun switch is started, and the upper surface, the lower surface, the inner surface and the outer surface of the quartz ring are simultaneously subjected to fire polishing.
The efficiency of product fire polishing has been improved in the rotation at the uniform velocity while, and product fire polishing face is heated more evenly, and product fire polishing face can obtain better assurance in the aspect of luminousness and roughness etc..
Preferably, the method further comprises a step c, the sliding block of the static clamping mechanism is released from the abutting state with the inner wall of the quartz ring and still keeps fit, the movable clamping mechanism is driven to slide along the through hole, so that the quartz ring is driven to rotate by less than 90 degrees, after the sliding block of the static clamping mechanism abuts against the inner wall of the quartz ring again, the quartz ring is kept still, the movable clamping mechanism returns to the original position and abuts against the quartz ring, and finally the step b is repeated again.
After the static clamping mechanism is released from the abutting state with the quartz ring, the movable clamping mechanism still keeps the acting force with the quartz ring, so that the quartz ring is driven to rotate for a certain angle.
Therefore, the invention has the following beneficial effects: (1) the polishing quality is improved by the rotating table rotating at a constant speed; (2) the whole surface of the quartz ring is polished at one time by arranging the through hole and the movable clamping mechanism, so that the efficiency is high; (3) the sliding block is suitable for quartz rings with different sizes; (4) simple structure and convenient operation.
Drawings
Fig. 1 is a schematic structural diagram of embodiment 1 of the present invention.
Fig. 2 is a partial structural schematic diagram of embodiment 1 of the present invention.
Fig. 3 is a partial structural schematic diagram of embodiment 2 of the present invention.
FIG. 4 is a plan view of a turntable according to example 2 of the present invention.
Detailed Description
The invention is further described with reference to the following detailed description and accompanying drawings.
Example 1
As shown in fig. 1, a quartz ring fire polishing apparatus includes:
the support 7 is formed by welding a plurality of square pipes, the bottom of the support 7 is provided with an adjusting foot 71, the top of the support 7 is fixed with an installation plate 72, the center of the bottom of the installation plate 72 is fixed with a first motor 12, and the output end of the first motor 12 is connected with the rotating platform 1;
the rotating platform 1 is rotatably arranged above the support 7 and used for driving the quartz ring 8 to coaxially rotate, a plurality of circular arc-shaped through holes 11 are formed in the rotating platform 1, the circle centers of the through holes 11 correspond to the circle center of the rotating platform 1 and are superposed, and the width of each through hole 11 is larger than that of the quartz ring 8 and is arranged corresponding to the quartz ring;
four clamping mechanisms, as shown in fig. 2, the clamping mechanisms are uniformly distributed on the rotating platform 1 at intervals of 90 ° and are used for coaxially fixing the quartz ring on the rotating platform 1, each clamping mechanism comprises a sliding block 21, a fixed block 22, an adjusting bolt 23 and a sliding rail 24, the sliding rail 24 extends along a radial direction and is fixed on the rotating platform 1 through a bolt, one end of the sliding rail 24 close to the outer side is provided with the fixed block 22, the sliding block 21 is arranged on the inner side of the fixed block 22 and is arranged on the sliding rail 24 in a sliding manner, the adjusting bolt 23 for adjusting the radial position of the sliding block 21 is connected between the sliding block 21 and the fixed block 22 in a threaded manner, and the sliding block 21 is provided with a supporting surface 211 for supporting the bottom surface of the quartz ring and an arc surface 212 for fitting with the inner surface of the quartz ring;
the upper welding gun 3 is provided with a plurality of gun mouths which respectively face the upper surface and the inner and outer surfaces of the quartz ring and are used for carrying out fire polishing on the upper surface and the inner and outer surfaces of the quartz ring, and each gun mouth can be independently opened and closed;
the lower welding gun 4 is arranged below the rotating table 1 and used for performing fire polishing on the lower surface of the quartz ring through the through hole 11;
the welding gun adjusting frame 6 is characterized in that the welding gun adjusting frame 6 comprises a pressure plate 61, a support plate 62, a guide post 63, a jacket 64, a sliding plate 65 and a fixing plate 66, the pressure plate 61 is connected with the support plate 62 through a bolt to form a space for fixing the upper welding gun 3 or the lower welding gun 4, the support plate 62 is fixedly connected with the jacket 64 through a bolt, the guide post 63 is arranged in the jacket 64 in a sliding mode, the guide post 63 is fixedly connected with the sliding plate 65, the sliding plate 65 is arranged on the fixing plate 66 in a sliding mode, and the fixing plate 66 is transversely arranged on two sides of the support 7.
The clamping mechanism further comprises a slider drive device for driving the slider 21 to slide.
The clamping mechanism comprises a static clamping mechanism 2 and a movable clamping mechanism 5, the static clamping mechanism 2 is fixedly arranged on the rotating platform 1, and the movable clamping mechanism 5 is connected with the through hole 11 in a sliding mode.
The upper welding gun 3 and the lower welding gun 4 are movably arranged on the welding gun adjusting frame 6, the welding gun adjusting frame 6 comprises a pressing plate 61, a supporting plate 62, a guide post 63, a clamping sleeve 64, a sliding plate 65 and a fixing plate 66, the pressing plate 61 and the supporting plate 62 are detachably connected and form a space for fixing the upper welding gun 3 or the lower welding gun 4, the supporting plate 62 is fixedly connected with the clamping sleeve 64, the guide post 63 is slidably arranged in the clamping sleeve 64, the guide post 63 is fixedly connected with the sliding plate 65, and the sliding plate 65 is slidably arranged on the fixing plate 66.
Example 2
As shown in fig. 3 and 4, a quartz ring fire polishing apparatus has a structure substantially the same as that of embodiment 1, and is characterized in that four clamping mechanisms include three static clamping mechanisms 2 and one dynamic clamping mechanism 5, the static clamping mechanisms 2 are the same as the clamping mechanisms of embodiment 1 and are fixed on a rotating table 1, through holes 11 are arranged in a manner of crossing with the clamping mechanisms along the length direction, a protruding block 52 is arranged at the bottom of a slide rail of the dynamic clamping mechanism 5, the dynamic clamping mechanism 5 is arranged in one through hole in a sliding manner along the circumferential direction through the protruding block 52, and an anti-slip layer is arranged on an arc surface 212 of the dynamic clamping mechanism. The second motor 51 is fixed at the center of the rotating platform 1, the second motor 51 drives the movable clamping mechanism 5 to rotate, and the second motor 51 is a stepping motor. As shown in fig. 4, each clamping mechanism is provided with an air cylinder 25 for driving the sliding block 21 to slide. The cylinder 25, the first motor and the second motor 51 are all connected to the controller.
The clamping mechanisms can also be arranged into a pair of static clamping mechanisms and a pair of dynamic clamping mechanisms, and each pair of clamping mechanisms are oppositely arranged.
Example 3
A quartz ring fire polishing method comprises the following steps:
a. placing a quartz ring product on the sliding block, attaching the bottom surface of the quartz ring to the supporting surface, slightly screwing the adjusting bolt 23 to adjust the radial position of the sliding block, abutting and fixing the arc surface to the inner surface of the quartz ring, and tensioning the quartz ring;
b. adjusting the positions of an upper welding gun and a lower welding gun, wherein the muzzle of the upper welding gun is aligned with the upper surface, the inner surface and the outer surface of the quartz ring, the muzzle of the lower welding gun is aligned with the lower surface of the quartz ring, starting a first motor to drive a rotating table to rotate at a constant speed, starting a welding gun switch, and performing fire polishing on the upper surface, the lower surface, the inner surface and the outer surface of the quartz ring at the same time;
c. and loosening the adjusting bolt, taking down the quartz ring, and manually polishing the part in contact with the sliding block.
Example 4
A quartz ring fire polishing method comprises the following steps:
a. placing a quartz ring product on a sliding block, attaching the bottom surface of the quartz ring to a supporting surface, driving four cylinders to adjust the radial position of the sliding block, enabling the arc surface to be abutted and fixed with the inner surface of the quartz ring, and tensioning the quartz ring;
b. adjusting the positions of an upper welding gun and a lower welding gun, wherein the muzzle of the upper welding gun is aligned with the upper surface, the inner surface and the outer surface of the quartz ring, the muzzle of the lower welding gun is aligned with the lower surface of the quartz ring, starting a first motor to drive a rotating table to rotate at a constant speed, starting a welding gun switch, and performing fire polishing on the upper surface, the lower surface, the inner surface and the outer surface of the quartz ring at the same time;
c. and c, retracting the cylinder of the static clamping mechanism to enable the sliding block to be in a state of being released from abutting with the inner wall of the quartz ring and still keep fit, driving the movable clamping mechanism to slide along the through hole by the second motor, driving the quartz ring to rotate less than 90 degrees, pushing the sliding block out of the abutting state with the inner wall of the quartz ring again by the cylinder of the static clamping mechanism, keeping the quartz ring still, retracting the cylinder of the movable clamping mechanism to rotate back to the original position and pushing the sliding block to abut with the quartz ring again, repeating the step b, and closing the gun mouth of the upper welding gun aligned to the upper surface and the inner surface to avoid excessive polishing.
Move fixture and rotate and utilize static friction to drive the quartz ring and rotate certain angle, will be exposed by the part that static fixture blockked, move fixture and return the part that self blockked the quartz ring after the normal position and expose, convenient follow-up polishes this part, and turned angle can be adjusted according to being sheltered from the area, guarantees that the quartz ring is circumferential and is obtained even polishing.

Claims (8)

1. A quartz ring fire polishing device is characterized by comprising:
the rotating platform (1) is used for driving the quartz ring to coaxially rotate, and coaxial circular arc-shaped through holes (11) are formed in the rotating platform (1);
the clamping mechanisms are used for coaxially fixing the quartz ring on the rotating table (1), sliding blocks (21) are arranged on the clamping mechanisms, and the sliding blocks (21) are arranged on the rotating table (1) in a sliding mode along the radial direction;
the upper welding gun (3) is used for carrying out fire polishing on the upper surface and the inner and outer surfaces of the quartz ring;
and the lower welding gun (4) is arranged below the rotating table (1) and is used for carrying out fire polishing on the lower surface of the quartz ring through the through hole (11).
2. The quartz ring fire polishing device as claimed in claim 1, wherein the slide block (21) is provided with a supporting surface (211) for supporting the bottom surface of the quartz ring and an arc surface (212) for fitting with the inner surface of the quartz ring.
3. The quartz ring fire polishing device as claimed in claim 2, wherein the clamping mechanism (2) further comprises a fixed block (22), and an adjusting bolt (23) for adjusting the radial position of the sliding block (21) is in threaded connection between the sliding block (21) and the fixed block (22).
4. A quartz ring fire polishing apparatus as set forth in claim 2, wherein said holding mechanism further comprises a slider driving means for driving the slider (21) to slide.
5. A quartz ring fire polishing device according to claim 4, characterized in that the clamping mechanism comprises a static clamping mechanism (2) and a dynamic clamping mechanism (5), the static clamping mechanism (2) is fixedly arranged on the rotating platform (1), and the dynamic clamping mechanism (5) is connected with the through hole (11) in a sliding manner.
6. The quartz ring fire polishing device according to claim 1, wherein the upper welding gun (3) and the lower welding gun (4) are movably arranged on a welding gun adjusting frame (6), the welding gun adjusting frame (6) comprises a pressing plate (61), a supporting plate (62), a guide pillar (63), a jacket (64), a sliding plate (65) and a fixing plate (66), the pressing plate (61) and the supporting plate (62) are detachably connected to form a space for fixing the upper welding gun (3) or the lower welding gun (4), the supporting plate (62) is fixedly connected with the jacket (64), the guide pillar (63) is slidably arranged in the jacket (64), the guide pillar (63) is fixedly connected with the sliding plate (65), and the sliding plate (65) is slidably arranged on the fixing plate (66).
7. A method of fire polishing a quartz ring according to any one of claims 1 to 6, comprising the steps of:
placing a quartz ring product on a sliding block (21), attaching the bottom surface of the quartz ring to a supporting surface (211), and adjusting the radial position of the sliding block (21) to enable an arc surface (212) to be abutted and fixed with the inner surface of the quartz ring;
adjusting the positions of an upper welding gun (3) and a lower welding gun (4), wherein the muzzle of the upper welding gun (3) is aligned to the upper surface, the inner surface and the outer surface of the quartz ring, the muzzle of the lower welding gun (4) is aligned to the lower surface of the quartz ring, starting the rotating table to rotate at a constant speed, starting a welding gun switch, and simultaneously performing fire polishing on the upper surface, the lower surface and the inner and outer surfaces of the quartz ring.
8. The quartz ring fire polishing method of claim 7, further comprising:
and c, removing the abutting state of the sliding block (21) of the static clamping mechanism (2) and the inner wall of the quartz ring, keeping the sliding block still attached, driving the movable clamping mechanism (5) to slide along the through hole (11) so as to drive the quartz ring to rotate less than 90 degrees, keeping the quartz ring still after the sliding block (21) of the static clamping mechanism (2) is abutted against the inner wall of the quartz ring again, returning the movable clamping mechanism (5) to the original position and abutting against the quartz ring, and finally repeating the step b again.
CN202111191925.5A 2021-10-13 2021-10-13 Quartz ring fire polishing device and method Pending CN114057383A (en)

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Cited By (5)

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Publication number Priority date Publication date Assignee Title
CN115490416A (en) * 2022-08-12 2022-12-20 杭州大和热磁电子有限公司 Automatic fire burnishing device of quartz product based on robot
CN116443550A (en) * 2023-01-10 2023-07-18 芜湖毅昌科技有限公司 Rotary platform and application thereof in surface treatment of automobile lightweight products
CN117383812A (en) * 2023-12-13 2024-01-12 上海强华实业股份有限公司 Automatic flame polishing device and system for quartz small tubes
CN117564705A (en) * 2023-12-05 2024-02-20 河北长峰机械制造有限公司 Welding repair device for adjusting screw sleeve of crusher
CN118459076A (en) * 2024-07-12 2024-08-09 安徽晶纭先进材料有限责任公司 Quartz ring fire polishing device and method

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CN115490416A (en) * 2022-08-12 2022-12-20 杭州大和热磁电子有限公司 Automatic fire burnishing device of quartz product based on robot
CN115490416B (en) * 2022-08-12 2023-09-12 杭州大和热磁电子有限公司 Automatic fire polishing device of quartz product based on robot
CN116443550A (en) * 2023-01-10 2023-07-18 芜湖毅昌科技有限公司 Rotary platform and application thereof in surface treatment of automobile lightweight products
CN117564705A (en) * 2023-12-05 2024-02-20 河北长峰机械制造有限公司 Welding repair device for adjusting screw sleeve of crusher
CN117564705B (en) * 2023-12-05 2024-05-24 河北长峰机械制造有限公司 Welding repair device for adjusting screw sleeve of crusher
CN117383812A (en) * 2023-12-13 2024-01-12 上海强华实业股份有限公司 Automatic flame polishing device and system for quartz small tubes
CN117383812B (en) * 2023-12-13 2024-03-08 上海强华实业股份有限公司 Automatic flame polishing device and system for quartz small tubes
CN118459076A (en) * 2024-07-12 2024-08-09 安徽晶纭先进材料有限责任公司 Quartz ring fire polishing device and method
CN118459076B (en) * 2024-07-12 2024-09-06 安徽晶纭先进材料有限责任公司 Quartz ring fire polishing device and method

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Application publication date: 20220218

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