CN106425831A - Full-automatic sapphire grinding machine - Google Patents
Full-automatic sapphire grinding machine Download PDFInfo
- Publication number
- CN106425831A CN106425831A CN201610790170.3A CN201610790170A CN106425831A CN 106425831 A CN106425831 A CN 106425831A CN 201610790170 A CN201610790170 A CN 201610790170A CN 106425831 A CN106425831 A CN 106425831A
- Authority
- CN
- China
- Prior art keywords
- area
- full
- grinding machine
- grinding
- automatic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
- B08B3/022—Cleaning travelling work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/02—Frames; Beds; Carriages
Abstract
The invention belongs to the field of sapphire single crystal grinding, and particularly relates to a full-automatic sapphire grinding machine. The full-automatic sapphire grinding machine comprises a rack, an X-direction beam and a control system, wherein the rack is provided with an operation table, and the X-direction beam is in sliding connection with the rack in the Y direction. The operation table comprises a raw material area, a positioning grinding area, a cleaning area, a waste liquid area, a detection area, a waste area and a finished product area, wherein the waste liquid area is arranged under the positioning grinding area and the cleaning area. The control system is electrically connected to a drive mechanism and a transmission mechanism. To achieve the automatic function, the rack and the X-direction beam are both provided with sliding rails, synchronous belts, drive motors and other devices, the X-direction beam can move front and back on the rack along the Y axis, and a Z-direction liquid filling gun and a Z-direction mechanical arm can move front and back on the X-direction beam along the X axis. Compared with the prior art, grinding, cleaning, detecting and other procedures related to the grinding technology are thoroughly fused, and automatic and continuous production becomes possible through usage of the mechanical arm.
Description
Technical field
The invention belongs to the field of milling of sapphire single-crystal, particularly to the full-automatic sapphire grinding machine of one.
Background technology
Sapphire main application：The optical grade crystal plate shape sapphire more than 162mm for the Aero-Space large scale diameter
Photoelectricity window；Sapphire Substrate 80%LED is used；Large scale high-quality sapphire military project window and device, horse during sapphire window
High-speed rectifier cover, the preferred material of photoelectricity window, sapphire window and the optical lens that conspicuous number is more than 2.
Wafer cutting damage layer and improvement that the grinding purpose of sapphire substrate process causes when being and remove section are brilliant
The flatness of piece, wafer grinding is progressive process from coarse to fine, and wafer and abrasive material carry out relative mechanical under pressure
Motion reaches predetermined thickness and the excellent surface can being polished therewith.
With the development of LED product high performance, Sapphire Substrate processing preparation the series of process step of process, as
Section, grinding, grinding and polishing etc., all can produce surface/sub-surface damage layer at substrate surface, reduce the luminous work(of substrate
The important performance indexes such as rate, serviceability and life-span, therefore, it is necessary to carry out standard to sapphire substrate surface/sub-surface damage layer
True detection, and remove it during following process, the optimization for each step working process parameter provides reference frame.
With the development of industry, applying of automation also gets more and more in sapphire processing, and people taste
Automation is incorporated into grinding technics, CN104924197A automatic two-lap lapping machine by examination；CN05415166A sapphire
Grinder is all well to attempt, but does not arrange the grinding in sapphire process of lapping, cleaning, inspection etc. not yet at present
The trial being integrated.
Content of the invention
The present invention is to apply in sapphire process of lapping, attempts by a series of flow processs such as grinding, cleaning, inspections certainly
Dynamicization.
A kind of full-automatic sapphire grinding machine, including be provided with the frame of operating desk 1 and frame 2Y to the X being slidably connected to
Crossbeam 3 and control system, described operating desk 1 include raw material district the 4th, position milling zone the 5th, cleaning area the 6th, be positioned at positioning milling zone 5 and
Waste immediately below cleaning area 6, inspection area the 7th, garbage area 8 and finished product district 9, described X is provided with Z-direction liquid feeding rifle 10 to crossbeam 3
With Z-direction manipulator 11, described positioning milling zone the 5th, Z-direction liquid feeding rifle 10 and Z-direction manipulator 11 be provided with drive mechanism and transmission mechanism,
Described control system is all electrically connected at drive mechanism and transmission mechanism.In order to realize automatic function, frame and X are on crossbeam 3
It is equipped with the devices such as slide rail, Timing Belt, driving motor so that X can move forward and backward along Y-axis to crossbeam 3 in frame 2, and Z-direction adds
Liquid rifle 10 and Z-direction manipulator 11 can move forward and backward along X-axis to crossbeam 3 at X.
Further, described positioning milling zone 5 includes grinding mechanism 12 and drainage mechanism 13, if described cleaning area 6 includes
Dry sets valvular rinse bath 14 and vibrating motor, and waste includes two grooves, and the grinding that described positioning milling zone 5 produces is given up
Liquid is discharged in two cell bodies of waste by valve respectively by the waste liquid that cleans of drainage mechanism 13 and described cleaning area 6.It
So arranging drainage mechanism 13, one is the cleaning in order to keep table top, and two is to reclaim lapping liquid, it is to avoid cause too much
Environmental pollution.Rinse bath 14 generally rectangle, its size should be able to cover the thin lens etc. of disk, thickness, in order to keep away
The frictionally damage that No clean process is brought by vibration, the inwall of rinse bath 14 should select smooth, elastomeric material.Waste includes two
Individual cell body, being being separately recovered of lapping liquid and cleaning fluid for convenience, if mixed, can additionally increase work during recovery
Amount.
Further, described grinding mechanism 12 includes main frame, abrasive disk, sun gear, erratic star wheel and correction wheel.Main frame uses
Frequency control motor drives, and configures high-power deceleration system, and soft start, soft stop are stopped, smooth running.Sun gear can be with both forward and reverse directions
Rotating, erratic star wheel sense of rotation can change, and workpiece had both revolved round the sun in carrier and the wandering star of rotation moves.
Further, described Z-direction liquid feeding rifle 10 is disposed with liquid storage box, electronic topping-up pump and liquid-feeding tube from top to bottom.
The liquid inlet of electronic topping-up pump is connected with liquid storage box, liquid-feeding tube respectively with liquid outlet, and the use of electronic topping-up pump makes liquid feeding
Speed, quantity are effectively controlled.
Further, described Z-direction manipulator 11 includes a shell, a pedestal, and one is arranged at the machinery on pedestal
Hand extensible member and the finger parts being connected with described manipulator extensible member, described finger parts include two clamping limbs
And a spring being arranged between described clamping limb madial wall.The position that clamping limb contacts with holder is provided with elastic component, is
Avoid because clamping causes secondary damage to holder.
Further, described shell is provided with high intensity and converges light source and large area diffused light source.Sapphire crystal table
The damage detecting method on face/Asia surface has X-ray diffraction method, angle polishing method, cross-sectional transmission electron microscope method etc., these
Method is presently required the large-scale testing instruments of cooperation and can use, and is not appropriate for grinding the inspection in stage herein, after grinding
Also want glossing, grind the inspection in stage comparatively speaking can more simply, the present invention select at specific light source
Under help, operating personnel by naked eyes carry out to workpiece damaging, the inspection of cut etc..
Further, described inspection area 7 is provided with vacuum WAND.Vacuum WAND why is selected to be to when operation, keep away
Exempt from customs examination work piece surface causes stains.
Further, it is provided with touch-screen 15 between described garbage area 8 and finished product district 9.Here touch-screen and control system
System is synchronization so that operating personnel can realize execute-in-place and long-range operation.
Compared with prior art, the present invention has the advantages that：
(1) for sapphire automation mechanized operation, a kind of new thinking is provided；
(2) flow processs such as the grinding related to grinding technics, cleaning, inspection are thoroughly merged, the use of manipulator
Automatic continuous is produced be possibly realized；
(3) setting of waste, improves the environmental protection efficiency of equipment, the recovery of waste liquid, reduces the cost that equipment runs.
Brief description
Fig. 1：The structural representation of the present invention；
In figure：1st, operating desk；3rd, X is to crossbeam；4th, raw material district；5th, milling zone is positioned；6th, cleaning area；7th, inspection area；8th, give up
Material district；9th, finished product district；10th, Z-direction liquid feeding rifle；11st, Z-direction manipulator；12nd, grinding mechanism；13rd, drainage mechanism；14th, rinse bath；15、
Touch-screen.
Detailed description of the invention
Embodiment one
Make an explanation in conjunction with Fig. 1, shown in Fig. 1, be suitable for the raw material of including but not limited to disk or lens shape.
A kind of full-automatic sapphire grinding machine, including be provided with the frame of operating desk 1 and frame 2Y to the X being slidably connected to
Crossbeam 3 and control system, described operating desk 1 includes being provided with the raw material district of eight slots and the 4th, positions milling zone and the 5th, be provided with eight
The 6th, the cleaning area of rinse bath 14 is positioned at the waste positioning immediately below milling zone 5 and cleaning area 6 and is positioned at the cabinet under operating desk 1
In, it not shown in figure, is provided with six inspection area the 7th, garbage areas 8 checking grooves and finished product district 9, described X is provided with Z to crossbeam 3
To liquid feeding rifle 10 and Z-direction manipulator 11, described positioning milling zone the 5th, Z-direction liquid feeding rifle 10 and Z-direction manipulator 11 are provided with drive mechanism
And transmission mechanism, described control system is all electrically connected at drive mechanism and transmission mechanism.
Described positioning milling zone 5 includes grinding mechanism 12 and drainage mechanism 13, and drainage mechanism 13 shown in Fig. 1 is grid grating,
Described cleaning area 6 includes that eight set valvular rinse bath 14 and vibrating motor is positioned at the cabinet under operating desk 1, do not show in figure
Going out, waste includes two grooves, and the grinding waste liquid that described positioning milling zone 5 produces passes through drainage mechanism 13 and described cleaning area 6
Clean waste liquid be discharged to respectively in two cell bodies of waste by valve.
Described grinding mechanism 12 includes main frame, abrasive disk, sun gear, erratic star wheel and correction wheel.Here grinding mechanism 12
Using single-sided lapping machine structure common at present, the operating surface of grinding mechanism 12 is parallel with operating desk 1.
Described Z-direction liquid feeding rifle 10 is disposed with liquid storage box, electronic topping-up pump and liquid-feeding tube from top to bottom.
Described Z-direction manipulator 11 includes a shell, a pedestal, the manipulator extensible member that is arranged on pedestal
And the finger parts being connected with described manipulator extensible member, described finger parts include two clamping limb fleshes one setting
Spring between described clamping limb madial wall.Manipulator extensible member includes a Z-direction motor, Z-direction driven by motor manipulator
Z axis moves up and down.The use of spring makes clamping limb increase with the active force of holder, and the big I of holder
Adjust.
Being provided with high intensity on described shell and converging light source and large area diffused light source, described inspection area 7 is provided with vacuum and inhales
Pen.Inspection groove is arranged to through hole, can arrange light source under inspection area 7 in corresponding cabinet, when the light source on shell is not enough to inspection
When testing damage, the light source in cabinet can be opened.
It is provided with touch-screen 15 between described garbage area 8 and finished product district 9.
During use, Z-direction manipulator 11 grips raw material from raw material district 4, is sent to position milling zone 5, and Z-direction liquid feeding rifle 10 adds and grinds
Mill liquid, grinding mechanism is ground, and grinds after finishing, and workpiece is sent to cleaning area 6 by Z-direction manipulator 11, and vibrating motor starts,
Cleaning workpiece, cleans and is sent to inspection area 7 by Z-direction manipulator 11 after finishing, and starts light source, assists vacuum WAND if desired,
Carry out naked eyes detection to workpiece, qualified is sent to finished product district 9 by Z-direction manipulator 11, underproof logical according to assay
Cross Z-direction manipulator 11 and be sent to positioning milling zone 5 or garbage area.
Claims (8)
1. a full-automatic sapphire grinding machine, it is characterised in that：Including be provided with frame and frame (2) Y-direction of operating desk (1)
The X being slidably connected is to crossbeam (3) and control system, and described operating desk (1) includes raw material district (4), positioning milling zone (5), cleans
District (6), the waste being positioned at positioning milling zone (5) and cleaning area (6) underface, inspection area (7), garbage area (8) and finished product district
(9), described X is provided with Z-direction liquid feeding rifle (10) and Z-direction manipulator (11) to crossbeam (3), and described positioning milling zone (5), Z-direction add
Liquid rifle (10) and Z-direction manipulator (11) are provided with drive mechanism and transmission mechanism, and described control system is all electrically connected at driving machine
Structure and transmission mechanism.
2. the full-automatic sapphire grinding machine of one according to claim 1, it is characterised in that：Described positioning milling zone (5)
Including grinding mechanism (12) and drainage mechanism (13), described cleaning area (6) include several set valvular rinse bath (14) and
Vibrating motor, waste includes two grooves, and the grinding waste liquid that described positioning milling zone (5) produces passes through drainage mechanism (13) and institute
The waste liquid that cleans stating cleaning area (6) is discharged in two cell bodies of waste respectively by valve.
3. the full-automatic sapphire grinding machine of one according to claim 2, it is characterised in that：Described grinding mechanism (12) wraps
Include main frame, abrasive disk, sun gear, erratic star wheel and correction wheel.
4. the full-automatic sapphire grinding machine of one according to claim 1, it is characterised in that：Described Z-direction liquid feeding rifle (10)
It is disposed with liquid storage box, electronic topping-up pump and liquid-feeding tube from top to bottom.
5. the full-automatic sapphire grinding machine of one according to claim 1, it is characterised in that：Described Z-direction manipulator (11)
Including a shell, a pedestal, the manipulator extensible member that is arranged on pedestal and one and described manipulator stretch
The finger parts that parts connect, described finger parts include that two clamping limb fleshes one are arranged between described clamping limb madial wall
Spring.
6. the full-automatic sapphire grinding machine of one according to claim 5, it is characterised in that：On described shell, height is installed
Intensity converges light source and large area diffused light source.
7. the full-automatic sapphire grinding machine of one according to claim 1, it is characterised in that：Described inspection area (7) is provided with
Vacuum WAND.
8. the full-automatic sapphire grinding machine of one according to claim 1, it is characterised in that：Described garbage area (8) with become
It is provided with touch-screen (15) between product district (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610790170.3A CN106425831A (en) | 2016-08-31 | 2016-08-31 | Full-automatic sapphire grinding machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610790170.3A CN106425831A (en) | 2016-08-31 | 2016-08-31 | Full-automatic sapphire grinding machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106425831A true CN106425831A (en) | 2017-02-22 |
Family
ID=58164137
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610790170.3A Pending CN106425831A (en) | 2016-08-31 | 2016-08-31 | Full-automatic sapphire grinding machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106425831A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108381377A (en) * | 2018-04-17 | 2018-08-10 | 东海县太阳光新能源有限公司 | A kind of quartz grinding mill |
| CN108544364A (en) * | 2018-05-24 | 2018-09-18 | 镇江金莱宝光电有限公司 | A kind of sapphire stereo omnibearing formula grinding device |
| CN111796362A (en) * | 2018-08-08 | 2020-10-20 | 杭州富通通信技术股份有限公司 | Grinding equipment for prefabricated tail fiber |
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| CN206105603U (en) * | 2016-08-31 | 2017-04-19 | 天通银厦新材料有限公司 | Full -automatic sapphire grinds machine |
-
2016
- 2016-08-31 CN CN201610790170.3A patent/CN106425831A/en active Pending
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108381377A (en) * | 2018-04-17 | 2018-08-10 | 东海县太阳光新能源有限公司 | A kind of quartz grinding mill |
| CN108544364A (en) * | 2018-05-24 | 2018-09-18 | 镇江金莱宝光电有限公司 | A kind of sapphire stereo omnibearing formula grinding device |
| CN111796362A (en) * | 2018-08-08 | 2020-10-20 | 杭州富通通信技术股份有限公司 | Grinding equipment for prefabricated tail fiber |
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| PB01 | Publication | ||
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Application publication date: 20170222 |