CN109709644A - A kind of 2 × 4 thermo-optical switch of racetrack micro-loop based on the preparation of SOI material - Google Patents
A kind of 2 × 4 thermo-optical switch of racetrack micro-loop based on the preparation of SOI material Download PDFInfo
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- CN109709644A CN109709644A CN201910113184.5A CN201910113184A CN109709644A CN 109709644 A CN109709644 A CN 109709644A CN 201910113184 A CN201910113184 A CN 201910113184A CN 109709644 A CN109709644 A CN 109709644A
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 17
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Abstract
The invention discloses a kind of 2 × 4 thermo-optical switch of racetrack micro-loop based on the preparation of SOI material, the thermode including the straight wave guide and the waveguide of racetrack micro-loop and top layer that are prepared based on SOI material；Wherein the waveguide of racetrack micro-loop is made of closure runway curved waveguide and short straight wave guide, and coupled zone is constituted between the racetrack micro-loop waveguide and straight wave guide, and cross section uses multimode waveguide intersection construction between straight wave guide.The digital electric signal of the top thermode load acts on being switched fast for lower realization optical channel.Switching while multiple-input and multiple-output optical signal may be implemented in the present invention, can be applied to array of photoswitch, optical routing, optical logic gate design, unit component working condition detection in integrated optical circuit.
Description
Technical field
The invention belongs to technical field of photo communication, and in particular to a kind of racetrack micro-loop 2 × 4 based on the preparation of SOI material
Thermo-optical switch.
Background technique
It is also higher and higher for information transmission, the requirement of processing with the sharply development of optical communication technique.Integrated, damage
Consume small, functional diversities, strong antijamming capability pursues a goal at fiber waveguide device developer's.Which type of material is selected to set
Meter waveguide device is not only related to the performance parameter of device, also concerning cost of manufacture, Machinability Evaluation, etc. compatible with existing system
Problem.
SOI (Silicon on Insulator, the silicon on insulator) benefits from refractive index big between silicon and silica
Difference, so that optical signal can be very good to be limited in silicon, and silicon has and polymer is with the thermo-optical coeffecient of magnitude, is suitable for doing very much
Waveguide material.SOI also has that bending loss is small, manufacture craft is mature, manufacturing cost is cheap, can be compatible with CMOS technology etc. excellent
Gesture is conducive to for waveguide device being miniaturized, is used for large-scale integrated.
Photoswitch is the indispensable optical device in optical information system, and effect is to optical transmission line or Integrated Light
Optical signal in the system of road carries out optical path switching or logical operation.Can be applied to the pretection switch system of optical-fiber network, light source control,
Optical routing, logic optical path, optical multiplexing system, the test of optical device, optical sensor system etc..On SOI plus thermode is assisted, can be changed
Become the temperature for closing on waveguide, and then change the effective refractive index of waveguide internal schema, realizes the change of light amplitude, phase, be hot light
The basis of switch.Based on SOI thermo-optical switch have Insertion Loss is small, high reliablity, cheap, production is simple, with integrated simultaneous of silicon
The advantages such as capacitive is good, become one of the important selection in photoswitch development process.
Wave-guide optical switch array common at present is usually cascaded by 1 × 2 or 2 × 2 optical switch element structures, and
Construct more complicated switching network, it is necessary to using the switch of more multichannel as basic unit.2 × 4 proved at present
Photoswitch is nearly all that two 1 × 2 photoswitch combinations or are utilized multimode interference principle, constructs 2 × 4 photoswitches, but these sides
Case can make the size of device double, or need longer device length (hundred microns or more), be not appropriate for doing array of photoswitch,
Network.In not adding unit device dimension, design multiple-input and multiple-output optical switch element has very big practical significance.
Summary of the invention
To solve the above problems, the invention discloses a kind of hot light of racetrack micro-loop 2 × 4 based on the preparation of SOI material to open
It closes, for the switch unit that extensive array of photoswitch provides the foundation, has more alternative paths than existing 2 × 2 switch；
It is also suitable for solving in cascaded switch array, is limited to processing error, the switching voltage of switches at different levels is made to be difficult to determining ask
Topic.
In order to achieve the above objectives, technical scheme is as follows:
A kind of 2 × 4 thermo-optical switch of racetrack micro-loop based on the preparation of SOI material, including SiO2Covering, SiO2It is equipped with inside covering
Horizontally disposed ducting layer, SiO2Plane is equipped with thermode on covering, and the ducting layer is by two lateral straight wave guides, a longitudinal direction
Straight wave guide, a racetrack micro-loop waveguide are constituted, and the transverse direction straight wave guide intersects with longitudinal straight wave guide, lateral two straight wave guides
Left end is input terminal, and the two-port of remaining two-port and longitudinal straight wave guide is output end；The racetrack micro-loop waveguide includes
The closed loop configuration that four short straight wave guides and four a quarter disc waveguides are formed, three straight wave guides have with racetrack micro-loop
Coupling regime, and the micro-loop of coupling regime is short straight wave guide；The pattern and racetrack micro-loop waveguide pattern one of the thermode
It causes, the thermode is located at right above the waveguide of racetrack micro-loop；Made among thermode and racetrack micro-loop waveguide by silica
For buffer layer, the thermode both ends apply variation voltage to realize the switching function of different optical output ports.
As a preferred technical solution of the present invention: the racetrack micro-loop waveguide is coupled with two lateral straight wave guides
Length is identical, spacing is identical, to form the symmetry of two input ports, i.e. two-port has identical thermo-optical switch performance.
As a preferred technical solution of the present invention: in the racetrack micro-loop waveguide, with lateral straight wave guide and longitudinal direction
The short waveguide length coupled between straight wave guide is different, and longitudinal coupling length is greater than lateral coupling length, so that top thermode
Two parallel output ends have larger spacing, facilitate processing.
As a preferred technical solution of the present invention: longitudinal coupling spacing is greater than lateral coupling spacing, with
Obtain maximum extinction ratio.
As a preferred technical solution of the present invention: the transversal waveguides and longitudinal waveguide cross section using multistage,
Gradual change multimode waveguide design, to reduce the crosstalk of different channel optical signals.
As a preferred technical solution of the present invention: two the lateral straight wave guides, a longitudinal direction that the ducting layer includes
Straight wave guide, a racetrack micro-loop waveguide, are all made of SOI material and are prepared, and all waveguides are stripe shape and sectional dimension phase
Together.
The beneficial effects of the present invention are:
The present invention provides a kind of 2 × 4 thermo-optical switch of racetrack micro-loop based on the preparation of SOI material, intersect structure by three waveguides
Six input and output ports are built, the mode that racetrack micro-loop is coupled with straight wave guide is carried out energy exchange, changed by means of thermode
The resonance wavelength for becoming runway micro-loop and straight wave guide, realizes the switching of optical signal optical path, to realize 2 × 4 switching functions.
The present invention is more suitable for doing complicated switch arrays compared to common 1 × 2 based on MZI or micro-loop, 2 × 2 switch units
Column.Its most important advantage is on the basis of unit component size constancy, increases two selectable output ports, makes to design
Optical switching network is more flexible, diversified, can preferably apply in switch arrays, waveguide device state-detection, optical routing, logic
In optical path.
The present invention can be used as detection device, be embedded in integrated waveguide device network, such as cascade optical switching network:
In multistage cascaded optical switch link, due to processing error, do not ensure that the corresponding switching voltage of all switches is all identical,
Therefore it is difficult to determine the working condition of switches at different levels, and can introduces and damage outside after switches at different levels plus by the way of test lead
When consumption, especially multi-stage cascade, multiple test leads can introduce biggish loss.After the present invention is embedded in photoswitches at different levels, just
Under normal operation wavelength, with waveguide optical signal resonance does not occur for micro-loop, on optical transport almost without influence；When needing to detect previous stage light
When the switching voltage of switch, the resonance wavelength of micro-loop can be changed by the thermode on micro-loop runway, make in link optical signal from
The switching voltage detection of switches at different levels is realized in detection port output.
Also, manufacture craft of the present invention can be compatible with COMS phase, and with fast response time, transmission loss is low, small power consumption
Potential characteristics and advantages.
Detailed description of the invention
Fig. 1 is three dimensional structure diagram of the invention.
Fig. 2 is waveguide overlooking structure diagram of the invention.
Fig. 3 is thermode partial sectional schematic view of the present invention.
Fig. 4 be the present invention without outer working modulus when each port output spectrum (by from Inport A it is incident for).
Fig. 5 be the corresponding frequency spectrum of on-state and off-state of the present invention (with incident from Inport A, Outport2 with
For Outport4 output).
Fig. 6 is switching time delay response characteristic of the present invention.
Fig. 7 is applied power of the present invention and waveguide temperature variation relation figure.
Specific embodiment
With reference to the accompanying drawings and detailed description, the present invention is furture elucidated, it should be understood that following specific embodiments are only
For illustrating the present invention rather than limiting the scope of the invention.It should be noted that word " preceding " used in the following description,
" rear ", "left", "right", "up" and "down" refer to that the direction in attached drawing, word "inner" and "outside" refer respectively to direction or remote
Direction from geometric center of specific component.
As depicted in figs. 1 and 2, the present invention devise it is a kind of based on SOI material preparation the hot light of racetrack micro-loop 2 × 4 open
It closes, ducting layer is to be embedded in SiO2In bar shaped Si waveguide, including three straight wave guides 1 and a racetrack micro-loop waveguide 2,3,
Wherein the waveguide of racetrack micro-loop includes four short straight wave guides 2 and four a quarter disc waveguides 3, straight wave guide 1-1,1-2,1-
3 six ports be 2 × 4 thermo-optical switch input port (Inport A, Inport B) and output port (Outport1,
Outport2, Outport 3, Outport 4).Described straight wave guide 1-1,1-2,1-3 respectively with straight wave guide 2-2,2-4,2-3 structure
At coupled zone 6-1,6-3, the 6-2 for having spacing, straight wave guide 1-1,1-2 and straight wave guide 1-3 cross section use gradual change multimode wave
Guide structure reduces interchannel crosstalk.As shown in Fig. 2, be endless metal thermode 5 right above racetrack micro-loop waveguide, can by
Thermode both ends apply voltage, change electrode temperature.The sectional view of electrode section is as shown in figure 3, among ducting layer and thermode 5
For SiO2Buffer layer 7.
The photoswitch principle of structure of the invention is: when the length of racetrack micro-loop waveguide is equal to incident wavelength integral multiple,
Resonance can occur for straight wave guide and the waveguide of racetrack micro-loop under the wavelength, and the light in straight wave guide can be coupled into micro-loop, equally
Light in racetrack micro-loop waveguide can also be coupled into straight wave guide.Under structure of the invention, the incident light of resonance wavelength, from
Inport A(or InportB) enter straight wave guide, by coupled zone 6-1(or coupled zone 6-3) racetrack micro-loop wave can be entered
Lead, and because coupled zone 6-2 presence, the light in racetrack micro-loop waveguide can enter in straight wave guide 1-3, and from port
Outport 4(or Outport 1) output；And the incident light of non-resonant wavelengths, enter from Inport A(or InportB) straight
Waveguide, in coupled zone 6-1(or coupled zone 6-3) not with racetrack micro-loop wave guide resonance, after crossing waveguide, directly from
Outport 2(or Outport 3) output.By applying voltage to thermode both ends, the temperature of thermode can be changed, to change
The temperature for becoming the waveguide of racetrack micro-loop, that is, change the effective refractive index of waveguide internal schema, resonance wavelength made to shift, and can incite somebody to action
Non-resonant wavelength when no applied voltage becomes resonance wavelength, completes the switching of optical path, realizes the function of photoswitch.
It can be realized the function to verify the present invention, spy enumerates verifying example and is illustrated.
This verifying example is that used Finite-Difference Time-Domain Method carries out calculating analysis, the major parameter used in simulation calculation
Have: straight wave guide and racetrack micro-loop waveguide sections width 400nm, width 220nm；The thermo-optical coeffecient of silicon and silica is respectively
1.84×10-4With 1 × 10-5；The waveguide of racetrack micro-loop and upper waveguide, lower waveguide, longitudinal waveguide spacing be respectively 0.1 μm,
0.1 μm, 0.15 μm, silica buffer layer thickness are 1 μm, and the bending radius of disc waveguide 3 is 7.3 in racetrack micro-loop waveguide
μm, runway 2-2,2-4 length is 2 μm, and runway 2-3,2-1 length is 4 μm.
By taking light is from Inport A injection as an example, four port transmission spectrums that output is calculated are as shown in Figure 4.It can see
The switch, which has, out can multiple operation wavelengths, and corresponding free spectral range is 13nm.Fig. 5 shows effect of the invention:
Heavy line and thick dotted line are the transmission spectral line of the corresponding port Outport2 and Outport4 at room temperature, and fine line and choice refreshments line are
Transmission spectrum under power consumption 20mW after corresponding drift；When being injected due to light from Inport A, the loss of Outport1 and Outport3
It is all larger than 20dB, therefore is not provided in Fig. 5.From figure 5 it can be seen that as 2 × 4 switch, when incident light wave is a length of
When 1548nm, light energy will be exported mainly from the port Outport2, and almost noenergy is spread out of for the port Outport4；Apply voltage
Afterwards, the amount of Outport2 output will be reduced sharply, while light energy is exported from the port Outport4.Numerical Simulation Results show,
The extinction ratio of switch state is greater than 15dB, and the crosstalk between output channel is less than -10dB.This example is to be with input port
InportA is entry port, and equally, InportA and InportB have symmetry in structure, when light is incident from InportB
When, by applying voltage on thermode, it can be achieved that light energy switches between output port Outport1 and Outport3；If
Light is inputted from two input ports simultaneously, the function of achievable 2 × 4 thermo-optical switch.
For switching time delay characteristic of the invention as shown in fig. 6, wherein solid line is normalized square wave electrical signal, dotted line is normalizing
The light energy of change changes characteristic, it can be seen that and the rising edge and failing edge of the switch are about 30 μ s and 20 μ s, and response speed is very fast,
It can satisfy requirement of most of photoswitch to switching time delay.
Fig. 7 is corresponding waveguide temperature knots modification under different power consumption, it can be seen that the corresponding waveguide temperature of consumption of electric power
Knots modification is approximately proportional relation, and proportionality coefficient is about 3.05K/mW, and the formant offset of approximately linear can be preferably used for
Switch state control.
To sum up, provided by the invention that 2 × 4 thermo-optical switch of racetrack micro-loop is prepared, it can be achieved that multi input is more based on SOI material
The function that output light path switches simultaneously；As switch unit, there is more optional light end than common 1 × 2,2 × 2 switches
Mouthful, it can preferably be used for switch arrays design, diversified optical link transmission；Due to may be selected for device multi output port, the device
Part can be used in optical link, the detection of device state, at the same also have production it is simple, can it is compatible with COMS phase, size is small, power consumption
Low potential characteristics and advantages.
The technical means disclosed in the embodiments of the present invention is not limited only to technological means disclosed in above embodiment, further includes
Technical solution consisting of any combination of the above technical features.
Claims (7)
1. a kind of 2 × 4 thermo-optical switch of racetrack micro-loop based on the preparation of SOI material, it is characterised in that: including SiO2Covering, SiO2
Horizontally disposed ducting layer is equipped with inside covering, the ducting layer is prepared using Si material, SiO2Plane is equipped on covering
Thermode, the ducting layer is made of two lateral straight wave guides, longitudinal straight wave guide, a racetrack micro-loop waveguide, described
Lateral straight wave guide intersects with longitudinal straight wave guide, and laterally the left end of two straight wave guides is input terminal, and remaining two-port and longitudinal direction are straight
The two-port of waveguide is output end；The racetrack micro-loop waveguide includes four short straight wave guides and four a quarter circumferential waves
Lead the closed loop configuration to be formed, three straight wave guides and racetrack micro-loop have a coupling regime, and the micro-loop of coupling regime is short straight
Waveguide；The pattern and racetrack micro-loop waveguide consistent appearance, the thermode of the thermode are being located at the waveguide of racetrack micro-loop just
Top；There is SiO among thermode and racetrack micro-loop waveguide2For buffer layer, it is real that the thermode both ends apply variation voltage
The switching function of existing different optical output ports.
2. a kind of 2 × 4 thermo-optical switch of racetrack micro-loop based on the preparation of SOI material according to claim 1, feature exist
In: each section of short waveguide length coupled between the racetrack micro-loop waveguide and straight wave guide is different, and lateral coupling length is less than vertical
To coupling length.
3. a kind of 2 × 4 thermo-optical switch of racetrack micro-loop based on the preparation of SOI material according to claim 1, feature exist
In: four short straight wave guides in the racetrack micro-loop waveguide, the short straight wave guide length of two transverse directions is identical, and two longitudinal directions are short
Straight wave guide length it is identical, but laterally short straight wave guide length is different with longitudinally short straight wave guide length.
4. a kind of 2 × 4 thermo-optical switch of racetrack micro-loop based on the preparation of SOI material according to claim 1, feature exist
In: described two lateral coupling spacing are identical, to guarantee the symmetry of two input terminals.
5. a kind of 2 × 4 thermo-optical switch of racetrack micro-loop based on the preparation of SOI material according to claim 1, feature exist
In: longitudinal coupling spacing is greater than lateral coupling spacing, with the extinction ratio obtained.
6. a kind of 2 × 4 thermo-optical switch of racetrack micro-loop based on the preparation of SOI material according to claim 1, feature exist
In: the transversal waveguides and longitudinal waveguide cross section use multistage, gradual change multi-mode wave guiding structure, to reduce different channel light letters
Number crosstalk.
7. a kind of 2 × 4 thermo-optical switch of racetrack micro-loop based on the preparation of SOI material according to claim 1, feature exist
In: the ducting layer inner waveguide is stripe shape, and sectional dimension is identical.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910113184.5A CN109709644B (en) | 2019-02-13 | 2019-02-13 | Runway type micro-ring 2 x 4 thermo-optic switch prepared based on SOI material |
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| CN201910113184.5A CN109709644B (en) | 2019-02-13 | 2019-02-13 | Runway type micro-ring 2 x 4 thermo-optic switch prepared based on SOI material |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111103261A (en) * | 2020-01-14 | 2020-05-05 | 东南大学 | Track type micro-ring resonator refractive index sensor based on sub-wavelength grating |
| CN112946826A (en) * | 2020-12-16 | 2021-06-11 | 东南大学 | Thermo-optical switch with polarization rotation function based on SOI material preparation |
| CN113985522A (en) * | 2021-10-22 | 2022-01-28 | 上海交通大学 | Micro-ring optical switch based on silicon-silicon nitride three-dimensional integration |
| CN117269079A (en) * | 2023-11-22 | 2023-12-22 | 天津工业大学 | Runway type micro-ring glucose sensor based on SOI and sensing method thereof |
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| CN108873178A (en) * | 2018-07-02 | 2018-11-23 | 浙江大学 | Based on the switching of the wavelength of micro-ring resonator and Mach-Zehnder modulators without interruption optical router |
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| US20050013523A1 (en) * | 2002-11-14 | 2005-01-20 | Gunther John Edward | Optical add drop multiplexer device |
| CN101548163A (en) * | 2006-12-01 | 2009-09-30 | 3M创新有限公司 | Optical sensing device |
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| CN117269079B (en) * | 2023-11-22 | 2024-02-27 | 天津工业大学 | Runway type micro-ring glucose sensor based on SOI and sensing method thereof |
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