CN109655630A - A kind of Two-Dimensional Heat temperature difference type air velocity transducer and its environment method of self compensation - Google Patents
A kind of Two-Dimensional Heat temperature difference type air velocity transducer and its environment method of self compensation Download PDFInfo
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- CN109655630A CN109655630A CN201910099583.0A CN201910099583A CN109655630A CN 109655630 A CN109655630 A CN 109655630A CN 201910099583 A CN201910099583 A CN 201910099583A CN 109655630 A CN109655630 A CN 109655630A
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- 238000000034 method Methods 0.000 title claims abstract description 20
- 238000010438 heat treatment Methods 0.000 claims abstract description 52
- 238000000605 extraction Methods 0.000 claims abstract description 44
- 239000000758 substrate Substances 0.000 claims abstract description 42
- 238000001514 detection method Methods 0.000 claims abstract description 10
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 45
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 36
- 229910052697 platinum Inorganic materials 0.000 claims description 18
- 238000004804 winding Methods 0.000 claims description 12
- 229910017083 AlN Inorganic materials 0.000 claims description 11
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 claims description 11
- 239000002002 slurry Substances 0.000 claims description 8
- 230000005611 electricity Effects 0.000 claims description 7
- 238000003466 welding Methods 0.000 claims description 6
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- 229910052751 metal Inorganic materials 0.000 claims description 3
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- 238000005245 sintering Methods 0.000 claims 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 abstract description 5
- 239000010408 film Substances 0.000 description 22
- 239000000919 ceramic Substances 0.000 description 15
- 238000004544 sputter deposition Methods 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 239000004411 aluminium Substances 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000011161 development Methods 0.000 description 3
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- 229910052757 nitrogen Inorganic materials 0.000 description 2
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- 238000001552 radio frequency sputter deposition Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000013475 authorization Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/006—Details of instruments used for thermal compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/02—Housings
- G01P1/026—Housings for speed measuring devices, e.g. pulse generator
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
- G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
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- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Aviation & Aerospace Engineering (AREA)
- Thermistors And Varistors (AREA)
Abstract
A kind of Two-Dimensional Heat temperature difference type air velocity transducer and its environment method of self compensation, belong to air velocity transducer field, solve the problems, such as that the detection rates of existing aluminum-nitride-based hot temperature difference type air velocity transducer are lower.Sensor: being equipped with heat-conducting medium layer on the substrate of lower thermal conductivity, and heating electrode, four temperature sensing electrodes and two environment temperature self compensation electrodes are arranged on heat-conducting medium layer.The center of heat-conducting medium layer is arranged in rectangular heating electrode body, four fan-shaped temperature sensing electrode bodies are separately positioned on the surrounding of heating electrode body, and two environment temperature self compensation electrode bodies are separately positioned on opposite two edge of heat-conducting medium layer.Each electrode body is respectively provided with there are two extraction electrode.Environment method of self compensation: determining ambient temperature value according to the resistance value of two environment temperature self compensation electrodes, according to the variation of ambient temperature value, adjusts the electric voltage frequency at heating electrode both ends, keeps the temperature field of the air velocity transducer constant.
Description
Technical field
The present invention relates to a kind of air velocity transducer, in particular to a kind of Two-Dimensional Heat temperature difference type air velocity transducer and its environment are certainly
Compensation method.
Background technique
Air velocity transducer is widely used in wind-power electricity generation, mine ventilation, the control of solar power generation wind direction and gas stream
The fields such as amount monitoring.In recent years, with the continuous development of MEMS technology, hot temperature difference type air velocity transducer also achieves new breakthrough
And development.
Authorization Notice No. is that the Chinese invention patent of 102998479 B of CN discloses a kind of aluminum-nitride-based integrated array knot
The two-D wind speed wind direction sensor of structure belongs to hot temperature difference type air velocity transducer.The sensor solves integrated calorimetric flow sensor
Air velocity transducer is using silicon-based substrate complex process, development cost is higher, the sensor speed of response is slow and bad mechanical property lacks
Point.
However, this aluminum-nitride-based hot temperature difference type air velocity transducer using the aluminium nitride ceramics material of high heat conductance because being made
Increase the longitudinal heat conduction losses of itself, and then causes its detection rates lower.
Summary of the invention
The present invention is to solve the problems, such as that the detection rates of existing aluminum-nitride-based hot temperature difference type air velocity transducer are lower, is proposed
A kind of Two-Dimensional Heat temperature difference type air velocity transducer and its environment method of self compensation.
Two-Dimensional Heat temperature difference type air velocity transducer of the present invention includes substrate 1, heating 2, four temperature sensing electricity of electrode
Slot 4 and two environment temperature self compensation electrodes 5 is thermally isolated in pole 3, four；
Substrate 1 is made by octagon and using low thermal conductivity material, and heat-conducting medium layer 6 is equipped on the top surface of substrate 1,
Heating 2, four temperature sensing electrodes 3 of electrode and two environment temperature self compensation electrodes 5 are arranged on heat-conducting medium layer 6；
Heating electrode 2 includes heating electrode body 2-1 and two extraction electrode 2-2, and heating electrode body 2-1 is square plate
Around helical structure, the center of heat-conducting medium layer 6 is set, and two extraction electrode 2-2 are respectively from heating electrode body 2-1's
First external connection end and the second external connection end draw and extend to the edge of heat-conducting medium layer 6；
Each temperature sensing electrode 3 includes temperature sensing electrode body 3-1 and two extraction electrode 3-2, temperature sensing
Electrode body 3-1 includes two snakelike winding structures, and two snakelike winding structures are axisymmetricly arranged to sector structure, two snakes
First external connection end of shape winding structure interconnects, and two extraction electrode 3-2 are respectively from the second external connection end of two snakelike winding structures
Draw and extend to the edge of heat-conducting medium layer 6；
For four temperature sensing electrodes 3, the small end of four temperature sensing electrode body 3-1 respectively with heating electrode body
The four edges of 2-1 are oppositely arranged, and four are thermally isolated slot 4 and are separately positioned on four temperature sensing electrode body 3-1 and heating electrode
Between ontology 2-1, the notch that slot 4 is each thermally isolated is respectively positioned on the top surface of heat-conducting medium layer 6, and slot bottom is respectively positioned in substrate 1；
Each environment temperature self compensation electrode 5 includes environment temperature self compensation electrode body 5-1 and two extraction electrodes
5-2, two extraction electrode 5-2 the first external connection end and the second external connection end through environment temperature self compensation electrode body 5-1 are drawn simultaneously
Extend to the edge of heat-conducting medium layer 6；
For two environment temperature self compensation electrodes 5, two environment temperature self compensation electrode body 5-1 are located at thermally conductive
Opposite two edge of dielectric layer 6.
As preferably, the eight sides of heat-conducting medium layer 6 include that four long sides and four short sides, short side replace with long side
It arranges and is encircled into octagon；
One end of the separate counter electrode ontology of each extraction electrode is its external connection end；
The external connection end of two extraction electrode 2-1 of electrode is heated respectively close to opposite two long side of heat-conducting medium layer 6,
For two environment temperature self compensation electrode body 5-1 respectively close to another two long sides of heat-conducting medium layer 6, each environment temperature is self-complementary
The two sides that the corresponding two extraction electrode 5-2 of electrode body 5-1 are located at environment temperature self compensation electrode body 5-1 are repaid,
And it is parallel with the long side of side where environment temperature self compensation electrode body 5-1；
The external connection end of two extraction electrode 3-2 of each temperature sensing electrode 3 is respectively positioned on corresponding temperature detection electrode ontology
The same side of 3-1, the external connection end of the extraction electrode 3-2 of four temperature sensing electrodes 3 are short close to four of heat-conducting medium layer 6 respectively
Side.
As preferably, substrate 1 is made of aluminium oxide ceramics, and heat-conducting medium layer 6 is realized using aluminium nitride film, is added
2, four temperature sensing electrodes 3 of thermode and two environment temperature self compensation electrodes 5 are metal film electrode.
As preferably, heating 2, four temperature sensing electrodes 3 of electrode and two environment temperature self compensation electrodes 5 are
Platinum film.
As preferably, heating the width self-heating electrode body 2-1 of each extraction electrode 2-2 of electrode 2 to thermally conductive
6 edge direction of dielectric layer uniformly increases.
As preferably, the external connection end of each extraction electrode is via pad 7, and the through-hole of via pad 7 is circular hole,
The through-hole also sequentially passes through heat-conducting medium layer 6 and substrate 1.
As preferably, one end of lead is starched from the bottom side of substrate 1, the through-hole extraction of via through holes pad 7 using platinum
The mode and via pad 7 for being sintered welding are connected；Postwelding, cured platinum slurry covering via pad 7.
As preferably, substrate 1 with a thickness of 0.1-0.15mm, heat-conducting medium layer 6 with a thickness of 0.1-10 μm, heating
The thickness of electrode 2, temperature sensing electrode 3 and environment temperature self compensation electrode 5 is 50-500nm, heating electrode body 2-1's
Line width is 40-100 μm, and the line width of temperature sensing electrode body 3-1 and environment temperature self compensation electrode body 5-1 are 10-50 μ
M, the groove depth that slot 4 is thermally isolated is 0.1-0.15mm, and groove width is 20-50 μm, and the aperture of via pad 7 is 50-100 μm.
The environment method of self compensation of Two-Dimensional Heat temperature difference type air velocity transducer of the present invention includes:
Step 1: determining ambient temperature value according to the resistance value of two environment temperature self compensation electrodes 5；
Step 2: adjusting the electric voltage frequency at heating 2 both ends of electrode according to the variation of ambient temperature value, pass the wind speed
The temperature field of sensor is constant.
As preferably, step 1 determines ambient temperature value according to the resistance value of two environment temperature self compensation electrodes 5
Concrete mode are as follows:
When the resistance value of two environment temperature self compensation electrodes 5 is equal, by the electricity of any environment temperature self-compensation electrode 5
Resistance value is as ambient temperature value；
When the resistance value of two environment temperature self compensation electrodes 5 is not equal, by lesser environment temperature self compensation electrode 5
Resistance value is as ambient temperature value.
Two-Dimensional Heat temperature difference type air velocity transducer of the present invention, substrate is made of low thermal conductivity material, in substrate
Top surface on be equipped with heat-conducting medium layer.This compound substrate with heat-conducting medium layer not only improves laterally quickly passing for temperature
Longitudinal heat conduction losses are led and reduced, can effectively promote the thermal response rates of the air velocity transducer, and then improve institute
State the wind speed and direction detection rates of air velocity transducer.
Under the action of environment method of self compensation of the present invention, Two-Dimensional Heat temperature difference type wind speed sensing of the present invention
Device can be realized environment self compensation, and then promote the environment resistant temperature interference ability of itself.
Detailed description of the invention
It will hereinafter come based on the embodiments and with reference to the accompanying drawings to Two-Dimensional Heat temperature difference type air velocity transducer of the present invention
And its environment method of self compensation is described in more detail, in which:
Fig. 1 is the planar structure schematic diagram of Two-Dimensional Heat temperature difference type air velocity transducer described in embodiment；
Fig. 2 is the sectional view of Two-Dimensional Heat temperature difference type air velocity transducer described in embodiment；
Fig. 3 is the structural schematic diagram that electrode is heated described in embodiment, wherein a is the line width for heating electrode body；
Fig. 4 is the structural schematic diagram of temperature sensing electrode described in embodiment, wherein b is temperature sensing electrode body
Line width；
Fig. 5 is the structural schematic diagram of environment temperature self compensation electrode described in embodiment, wherein c is that environment temperature is self-complementary
Repay the line width of electrode body.
Specific embodiment
Below in conjunction with attached drawing to Two-Dimensional Heat temperature difference type air velocity transducer of the present invention and its environment method of self compensation
It is described further.
Embodiment: the present embodiment is explained in detail below with reference to Fig. 1 to Fig. 5.
Two-Dimensional Heat temperature difference type air velocity transducer described in the present embodiment includes substrate 1, heating 2, four temperature sensings of electrode
3, four, electrode are thermally isolated slot 4 and two environment temperature self compensation electrodes 5；
Substrate 1 is made by octagon and using low thermal conductivity material, and heat-conducting medium layer 6 is equipped on the top surface of substrate 1,
Heating 2, four temperature sensing electrodes 3 of electrode and two environment temperature self compensation electrodes 5 are arranged on heat-conducting medium layer 6；
Heating electrode 2 includes heating electrode body 2-1 and two extraction electrode 2-2, and heating electrode body 2-1 is square plate
Around helical structure, the center of heat-conducting medium layer 6 is set, and two extraction electrode 2-2 are respectively from heating electrode body 2-1's
First external connection end and the second external connection end draw and extend to the edge of heat-conducting medium layer 6；
Each temperature sensing electrode 3 includes temperature sensing electrode body 3-1 and two extraction electrode 3-2, temperature sensing
Electrode body 3-1 includes two snakelike winding structures, and two snakelike winding structures are axisymmetricly arranged to sector structure, two snakes
First external connection end of shape winding structure interconnects, and two extraction electrode 3-2 are respectively from the second external connection end of two snakelike winding structures
Draw and extend to the edge of heat-conducting medium layer 6；
For four temperature sensing electrodes 3, the small end of four temperature sensing electrode body 3-1 respectively with heating electrode body
The four edges of 2-1 are oppositely arranged, and four are thermally isolated slot 4 and are separately positioned on four temperature sensing electrode body 3-1 and heating electrode
Between ontology 2-1, the notch that slot 4 is each thermally isolated is respectively positioned on the top surface of heat-conducting medium layer 6, and slot bottom is respectively positioned in substrate 1；
Each environment temperature self compensation electrode 5 includes environment temperature self compensation electrode body 5-1 and two extraction electrodes
5-2, two extraction electrode 5-2 the first external connection end and the second external connection end through environment temperature self compensation electrode body 5-1 are drawn simultaneously
Extend to the edge of heat-conducting medium layer 6；
For two environment temperature self compensation electrodes 5, two environment temperature self compensation electrode body 5-1 are located at thermally conductive
Opposite two edge of dielectric layer 6.
The eight sides of the heat-conducting medium layer 6 of the present embodiment include that four long sides and four short sides, short side replace cloth with long side
It sets and is encircled into octagon；
One end of the separate counter electrode ontology of each extraction electrode is its external connection end；
The external connection end of two extraction electrode 2-1 of electrode is heated respectively close to opposite two long side of heat-conducting medium layer 6,
For two environment temperature self compensation electrode body 5-1 respectively close to another two long sides of heat-conducting medium layer 6, each environment temperature is self-complementary
The two sides that the corresponding two extraction electrode 5-2 of electrode body 5-1 are located at environment temperature self compensation electrode body 5-1 are repaid,
And it is parallel with the long side of side where environment temperature self compensation electrode body 5-1；
The external connection end of two extraction electrode 3-2 of each temperature sensing electrode 3 is respectively positioned on corresponding temperature detection electrode ontology
The same side of 3-1, the external connection end of the extraction electrode 3-2 of four temperature sensing electrodes 3 are short close to four of heat-conducting medium layer 6 respectively
Side.
The substrate 1 of the present embodiment uses purity to be made of 99% aluminium oxide ceramics, and heat-conducting medium layer 6 uses aluminum nitride thin
Film is realized, heats 2, four temperature sensing electrodes 3 of electrode and two environment temperature self compensation electrodes 5 are metal film electrode.
2, four temperature sensing electrodes 3 of heating electrode of the present embodiment and two environment temperature self compensation electrodes 5 are platinum
Film.
The width self-heating electrode body 2-1 of each extraction electrode 2-2 of the heating electrode 2 of the present embodiment is to heat-conducting medium
6 edge direction of layer uniformly increase.
The external connection end of each extraction electrode of the present embodiment is via pad 7, and the through-hole of via pad 7 is circular hole, should
Through-hole also sequentially passes through heat-conducting medium layer 6 and substrate 1.
One end of lead is sintered the side welded using platinum slurry from the bottom side of substrate 1, the through-hole extraction of via through holes pad 7
Formula and via pad 7 are connected；Postwelding, cured platinum slurry covering via pad 7.
The substrate 1 of the present embodiment with a thickness of 0.1-0.15mm, heat-conducting medium layer 6 with a thickness of 0.1-10 μm, heating electricity
The thickness of pole 2, temperature sensing electrode 3 and environment temperature self compensation electrode 5 is 50-500nm, heats the line of electrode body 2-1
Width is 40-100 μm, and the line width of temperature sensing electrode body 3-1 and environment temperature self compensation electrode body 5-1 are 10-50 μm,
The groove depth that slot 4 is thermally isolated is 0.1-0.15mm, and groove width is 20-50 μm, and the aperture of via pad 7 is 50-100 μm.
Two-Dimensional Heat temperature difference type air velocity transducer described in the present embodiment also has the advantages that
1, heating electrode body 2-1 is rectangular wound spiral construct, rectangular in being centrally formed for the air velocity transducer
Temperature field is conducive to temperature and spreads around.It is distributed in the temperature sensing electrode body 3-1 shape of heating electrode body 2-1 surrounding
At fan-shaped temperature diffusion field, be conducive to the formation of symmetrical temperature field.Heat the width of each extraction electrode 2-2 of electrode 2 certainly
Heating electrode body 2-1 uniformly increases to 6 edge direction of heat-conducting medium layer, reduces extraction electrode 2-2 to temperature profile effect.
2, four fan-shaped regions that four temperature sensing electrode body 3-1 are formed just cover heating electrode body 2-1's
Four temperature diffusion fields are conducive to improve thermal field exchange area and efficiency, improve wind speed and direction sensitivity and detection accuracy.
3, one end of lead is from the bottom side of substrate 1, the through-hole extraction of via through holes pad 7, and is sintered welding using platinum slurry
Mode and via pad 7 are connected；Postwelding, cured platinum slurry covering via pad 7.This welding method both plays welding lead
Effect plays fixed function to lead again, improves reliability.At the same time, the surface of the air velocity transducer without lead and
The distribution of reinforcement protrusion is welded, the influence to air-flow is reduced, reduces sealing-in interference problem.
The wind speed and direction testing principle of Two-Dimensional Heat temperature difference type air velocity transducer described in the present embodiment is the prior art, herein
It repeats no more.
The preparation process of Two-Dimensional Heat temperature difference type air velocity transducer described in the present embodiment is as follows:
Step 1: aluminium oxide ceramics substrate is cleaned and is toasted；
Step 2: aluminium nitride heat-conducting medium film is sputtered on the aluminium oxide ceramics substrate after step 1 baking；
Step 3: the aluminium oxide ceramics substrate of step 2 sputtering aluminium nitride heat-conducting medium film is carried out at nitridation or oxidation
Reason；
Step 4: one layer of positivity light is formed in step 3 nitridation or oxidation nitridation or oxidation nitridation aluminium heat-conducting medium film
Photoresist；
Step 5: production plate-making mold, the plate-making mold are heating 2, four temperature sensing electrodes 3 of electrode and two rings
The mask of the opposite pattern of the formed sensor electrode surface structure of border temperature self-compensation electrode 5, using plate-making mold to step
Anti- version exposure and imaging is carried out on rapid four positive photoresists formed, obtains the aluminium oxide ceramics substrate for having photoetching agent pattern；
Step 6: will have the aluminium oxide ceramics substrate of photoetching agent pattern in step 5, metallization film forming is formed to have and be covered
The aluminium oxide ceramics substrate of lid platinum film pattern；
Step 7: carrying out flexible mechanical removing for the aluminium oxide ceramics substrate with covering platinum film pattern in step 6,
Aluminium nitride dielectric film surface on aluminium oxide ceramics substrate leaves the platinum film sensors electrode with plate-making pattern face reverse
Patterning；
Step 8: the periphery heating electrode body 2-1 and through-hole in the platinum film sensors electrode pattern structure of step 7
Laser ablation is carried out on the aluminium oxide ceramics substrate at the center of pad 7, etching forms the through-hole that slot 4 and via pad 7 is thermally isolated；
Step 9: platinum filament lead passes through welding plate hole from pad is drawn, and platinum filament lead draws in aluminium oxide ceramics substrate back
Out, the pad covering platinum slurry solder and protective mulch of aluminium oxide ceramics substrate face, after solidification, Two-Dimensional Heat temperature difference type wind speed is passed
Sensor manufacture is completed.
To the aluminium oxide ceramics substrate after step 1 baking, using magnetron RF sputtering system method, in argon gas and nitrogen 2:1 ratio
Example keeps carrying out sputtering aluminium nitride film under pressure 0.5-1.2Pa environment, obtains aluminium nitride heat-conducting medium film.
In step 2, keep carrying out radio-frequency sputtering aluminium nitride under pressure 0.5-1.2Pa environment in argon gas and nitrogen 2:1 ratio
Film, radio-frequency sputtering process:
Sputter temperature 25 DEG C and 200 DEG C of room temperature alternately, i.e., in 25 DEG C of magnetron RF sputtering system aluminium nitride films of room temperature
2h is heated to 200 DEG C, then radio-frequency sputtering aluminium nitride film 2h, 25 DEG C of room temperature to be cooled to, is carrying out plated film radio-frequency sputtering nitridation
Aluminium film；
It repeats above-mentioned radio-frequency sputtering process 2-3 times, can obtain with the apparent nitride multilayer aluminium film of crystal boundary.
The environment method of self compensation of Two-Dimensional Heat temperature difference type air velocity transducer described in the present embodiment includes:
Step 1: determining ambient temperature value according to the resistance value of two environment temperature self compensation electrodes 5；
Step 2: adjusting the electric voltage frequency at heating 2 both ends of electrode according to the variation of ambient temperature value, pass the wind speed
The temperature field of sensor is constant.
Step 1 determines the concrete mode of ambient temperature value according to the resistance value of two environment temperature self compensation electrodes 5 are as follows:
When the resistance value of two environment temperature self compensation electrodes 5 is equal, by the electricity of any environment temperature self-compensation electrode 5
Resistance value is as ambient temperature value；
When the resistance value of two environment temperature self compensation electrodes 5 is not equal, by lesser environment temperature self compensation electrode 5
Resistance value is as ambient temperature value.
When the flowing of air velocity transducer surface airless, the resistance value of two environment temperature self compensation electrodes 5 is equal
And it is unchanged, at this time using the resistance value of any environment temperature self-compensation electrode 5 as ambient temperature value.When variation of ambient temperature or
When person's external air flow is radial and normal to two environment temperature self compensation 5 directions of electrode, two environment temperature self compensation electrodes 5
Resistance value change simultaneously, but it is still equal, at this time using the resistance value of any environment temperature self-compensation electrode 5 as environment temperature
Angle value.When the resistance value of two environment temperature self compensation electrodes 5 is not equal, illustrate external air flow direction with two environment temperatures certainly
At an angle, side is air-flow input direction to the radial direction of compensating electrode 5 where resistance value smaller, at this time by lesser ring
The resistance value of border temperature self-compensation electrode 5 is as ambient temperature value.
Depending on the electric voltage frequency at heating 2 both ends of electrode is by ambient temperature value, ring is demarcated especially by environment temperature experiment
Border temperature change influences size to wind speed and direction error, obtains environment temperature and wind speed and direction relation curve, wind speed can be realized
Self-compensating function improves wind speed and direction detection accuracy.
Although describing the present invention herein with reference to specific embodiment, it should be understood that, these realities
Applying example only is the example of principles and applications.It should therefore be understood that can be permitted exemplary embodiment
More modifications, and can be designed that other arrangements, without departing from spirit of the invention as defined in the appended claims and
Range.It should be understood that different appurtenances can be combined by being different from mode described in original claim
It is required that and feature described herein.It will also be appreciated that the feature in conjunction with described in separate embodiments can be used at it
In his embodiment.
Claims (10)
1. a kind of Two-Dimensional Heat temperature difference type air velocity transducer, which is characterized in that the air velocity transducer includes substrate (1), heating electricity
Pole (2), four temperature sensing electrodes (3), four slot (4) and two environment temperature self compensation electrodes (5) is thermally isolated；
Substrate (1) is made by octagon and using low thermal conductivity material, and heat-conducting medium layer is equipped on the top surface of substrate (1)
(6), electrode (2), four temperature sensing electrodes (3) and two environment temperature self compensation electrodes (5) are heated and is arranged at thermally conductive Jie
On matter layer (6)；
Heating electrode (2) includes heating electrode body (2-1) and two extraction electrodes (2-2), and heating electrode body (2-1) is side
Shape wound spiral construct, setting is in the center of heat-conducting medium layer (6), and two extraction electrodes (2-2) are respectively from heating electrode
The first external connection end and the second external connection end of ontology (2-1) draw and extend to the edge of heat-conducting medium layer (6)；
Each temperature sensing electrode (3) includes temperature sensing electrode body (3-1) and two extraction electrodes (3-2), and temperature is visited
Surveying electrode body (3-1) includes two snakelike winding structures, and two snakelike winding structures are axisymmetricly arranged to sector structure, and two
First external connection end of a snakelike winding structure interconnects, and two extraction electrodes (3-2) are respectively from the second of two snakelike winding structures
External connection end draws and extends to the edge of heat-conducting medium layer (6)；
For four temperature sensing electrodes (3), the small end of four temperature sensing electrode bodies (3-1) respectively with heating electrode body
The four edges of (2-1) are oppositely arranged, and four are thermally isolated slot (4) and are separately positioned on four temperature sensing electrode bodies (3-1) and add
Between thermode ontology (2-1), the notch that slot (4) is each thermally isolated is respectively positioned on the top surface of heat-conducting medium layer (6), the equal position of slot bottom
In substrate (1)；
Each environment temperature self compensation electrode (5) includes environment temperature self compensation electrode body (5-1) and two extraction electrodes
(5-2), first external connection end and second external connection end of two extraction electrodes (5-2) through environment temperature self compensation electrode body (5-1)
Draw and extend to the edge of heat-conducting medium layer (6)；
For two environment temperature self compensation electrodes (5), two environment temperature self compensation electrode bodies (5-1) are located at thermally conductive
Opposite two edge of dielectric layer (6).
2. Two-Dimensional Heat temperature difference type air velocity transducer as described in claim 1, which is characterized in that eight of heat-conducting medium layer (6)
Side includes four long sides and four short sides, and short side and long side are alternately arranged and are encircled into octagon；
One end of the separate counter electrode ontology of each extraction electrode is its external connection end；
The external connection end of two extraction electrodes (2-1) of electrode is heated respectively close to opposite two long side of heat-conducting medium layer (6),
Two environment temperature self compensation electrode bodies (5-1) are respectively close to another two long sides of heat-conducting medium layer (6), each environment temperature
Corresponding two extraction electrodes (5-2) of self compensation electrode body (5-1) are located at the environment temperature self compensation electrode body (5-
1) two sides, and it is parallel with the long side of side where the environment temperature self compensation electrode body (5-1)；
The external connection end of two extraction electrodes (3-2) of each temperature sensing electrode (3) is respectively positioned on corresponding temperature detection electrode ontology
The same side of (3-1), the external connection end of the extraction electrode (3-2) of four temperature sensing electrodes (3) is respectively close to heat-conducting medium layer (6)
Four short sides.
3. Two-Dimensional Heat temperature difference type air velocity transducer as claimed in claim 2, which is characterized in that substrate (1) is made pottery using aluminium oxide
Porcelain is made, and heat-conducting medium layer (6) is realized using aluminium nitride film, heating electrode (2), four temperature sensing electrodes (3) and two
Environment temperature self compensation electrode (5) is metal film electrode.
4. Two-Dimensional Heat temperature difference type air velocity transducer as claimed in claim 3, which is characterized in that heating electrode (2), four temperature
Detection electrode (3) and two environment temperature self compensation electrodes (5) are platinum film.
5. Two-Dimensional Heat temperature difference type air velocity transducer as claimed in claim 4, which is characterized in that each of heating electrode (2) is drawn
The width self-heating electrode body (2-1) of electrode (2-2) to heat-conducting medium layer (6) edge direction uniformly increases out.
6. Two-Dimensional Heat temperature difference type air velocity transducer as claimed in claim 5, which is characterized in that the external connection end of each extraction electrode
It is via pad (7), the through-hole of via pad (7) is circular hole, which also sequentially passes through heat-conducting medium layer (6) and substrate
(1)。
7. Two-Dimensional Heat temperature difference type air velocity transducer as claimed in claim 6, which is characterized in that one end of lead is from substrate (1)
Bottom side, via through holes pad (7) through-hole draw, and using connected with via pad (7) by the way of platinum slurry sintering welding；Weldering
Afterwards, cured platinum slurry covering via pad (7).
8. Two-Dimensional Heat temperature difference type air velocity transducer as claimed in claim 7, which is characterized in that substrate (1) with a thickness of 0.1-
0.15mm, heat-conducting medium layer (6) with a thickness of 0.1-10 μm, heating electrode (2), temperature sensing electrode (3) and environment temperature oneself
The thickness of compensating electrode (5) is 50-500nm, and the line width of heating electrode body (2-1) is 40-100 μm, temperature sensing electrode
The line width of ontology (3-1) and environment temperature self compensation electrode body (5-1) is 10-50 μm, and the groove depth that slot (4) is thermally isolated is
0.1-0.15mm, groove width are 20-50 μm, and the aperture of via pad (7) is 50-100 μm.
9. the environment method of self compensation of Two-Dimensional Heat temperature difference type air velocity transducer described in claim 1, which is characterized in that the ring
Border method of self compensation includes:
Step 1: determining ambient temperature value according to the resistance value of two environment temperature self compensation electrodes (5)；
Step 2: adjusting the electric voltage frequency at heating electrode (2) both ends according to the variation of ambient temperature value, sense the wind speed
The temperature field of device is constant.
10. environment method of self compensation as claimed in claim 9, which is characterized in that step 1 is self-complementary according to two environment temperatures
The resistance value for repaying electrode (5) determines the concrete mode of ambient temperature value are as follows:
When the resistance value of two environment temperature self compensation electrodes (5) is equal, by the electricity of any environment temperature self-compensation electrode (5)
Resistance value is as ambient temperature value；
When the resistance value of two environment temperature self compensation electrodes (5) is not equal, by lesser environment temperature self compensation electrode (5)
Resistance value is as ambient temperature value.
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