CN106568518A - Humidity sensitive flexible pipe-based integrated temperature, humidity and pressure flexible sensor and manufacture method therefor - Google Patents
Humidity sensitive flexible pipe-based integrated temperature, humidity and pressure flexible sensor and manufacture method therefor Download PDFInfo
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- CN106568518A CN106568518A CN201610941049.6A CN201610941049A CN106568518A CN 106568518 A CN106568518 A CN 106568518A CN 201610941049 A CN201610941049 A CN 201610941049A CN 106568518 A CN106568518 A CN 106568518A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
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Abstract
The invention provides a humidity sensitive flexible pipe-based integrated temperature, humidity and pressure flexible sensor and a manufacture method therefor. The sensor comprises a humidity sensitive polymer flexible pipe substrate, a capacitor type humidity sensor, a temperature sensor and a piezoresistive type pressure sensor; the capacitor type humidity sensor, the temperature sensor and the piezoresistive type pressure sensor are arranged on the humidity sensitive polymer flexible pipe substrate; the capacitor type humidity sensor consists of net-shaped electrodes, the humidity sensitive polymer flexible pipe substrate is used as a capacitance medium for the capacitor type humidity sensor, the temperature sensor is a thermocouple consisting of a platinum electrode and a platinum and rhodium electrode, part of the platinum and rhodium electrode covers part of the platinum electrode, the piezoresistive type pressure sensor consists of platinum filaments, and the platinum filaments surrounds an outer side face of the humidity sensitive polymer flexible pipe substrate. The resistive type humidity sensor having the net-shaped electrodes is simple in structure and high in precision, contact area between a humidity sensitive polymer medium and air is increased, moisture absorption can be facilitated, the thin film thermocouple is simple in structure and high in measurement precision, and change of pressure in a plurality of directions can be effectively detected.
Description
Technical field
The present invention relates to sensor technical field, specifically, is related to a kind of one kind of utilization MEMS technology making based on wet
Integrated flexible sensor of photosensitive polymerization thing flexible pipe substrate temperature, humidity and pressure and preparation method thereof.
Background technology
Internet of Things has boundless prospect as the focus of generation information technology.Sensor technology is Internet of Things
The basis of realization.Current sensor is mostly split type sensor, that is, need individually to install measurement temperature, pressure and wet
The sensor of degree, therefore install that the area needed for product is big, high cost, it is particularly disadvantageous in strict to dimensional requirement installed in some
Occasion.Therefore integrated transducer is the inexorable trend of future development.It is integrated to refer to one（It is multiple）Function phase is same（Phase
Together）Sensor or integrated circuit be integrated in the middle of a module, feature richness, miniaturization, device miniaturization have been reached
The characteristics of.
Flexible wearable equipment is increasingly popularized in the life of people, is needed using flexible material as substrate.Traditional
Integrated sensor, is mostly based on hard planar substrate, by sensor production on a silicon or glass planar, this biography
Sensor is compatible very poor with flexible substrates.And the sensor of flexible base material is produced at present, it is mostly by flexible substrates
It is affixed in planar substrate, peels off after then making sensor on substrate and then from planar substrates, makes based on flexible substrates
Sensor, but the flexible sensor for making in this way can not have big bending, it is impossible to save very big space,
Therefore some little spaces be cannot be used for.Need the occasion of backing material large deformation.And programmable ultraviolet photolithographic technology is utilized, justifying
Directly graphical on pipe to make sensor, the flexible sensor of making can bend, and large deformation, and volume very little occur, can
In being widely used in various occasions, the development of wearable device is promoted.
Traditional piezoresistive pressure sensor primary structure is maximum on plane silicon thin film with plating or the method for spreading
The position of strain forms resistance to improve sensitivity.The actual measurement of the pressure drag of these sensors be film edge strain；This
It is outer also to adopt metal strain plate, the change of pressure is detected using the strain effect of metal.But this kind of piezoresistive transducer is
Increase output signal and be arranged by the way of bridge, and generally require to be etched below thin film to increase strain rate
Go out a cavity, therefore increase process complexity and technology difficulty, and this sensor can only detect the pressure in a direction
Power.And new platinum wire ring around pressure sensor structure simply also without opening cavity, process is simple and it is detectable reverse,
Stretching, bending and the change of multiple directions power, can be widely applied to multiple fields and occasion.
Comparative maturity is studied in current temperature sensor, the thermocouple made with platinum and platinum rhodium, stable performance structure
Simply, and can be with high temperature resistant.
Wet sensory material for preparing humidity sensor mainly has ceramics, porous silicon and high molecular polymer.Macromolecule electricity
After solution material moisture absorption, the presence of hydrone dipole moment makes its dielectric constant be greatly improved.Also due to high molecular polymerization
Thing possesses preferably flexible and mechanical performance, is commonly used to prepare flexible humidity sensor.Wetness sensitive polymer is also in itself a kind of property
The good wet sensory material of energy, by the use of wetness sensitive polymer flexible pipe substrate itself as the capacitor dielectric of humidity sensor, makes structure more
Plus it is simple, save space.
The content of the invention
Deficiency of the present invention for the integrated warm and humid pressure sensor of current plane formula, there is provided a kind of based on the integrated of wet sensitive flexible pipe
Temperature and humidity pressure flexible sensor and preparation method thereof, in higher sensitivity feature simple with processing technology, it is possible to use flexible pipe should
For multiple complicated fields.
The present invention is achieved by the following technical solutions：
According to an aspect of the present invention, there is provided a kind of integrated temperature and humidity pressure flexible sensor based on wet sensitive flexible pipe, including：
Wetness sensitive polymer flexible pipe substrate, and capacitance type humidity sensor, the temperature being arranged on the wetness sensitive polymer flexible pipe substrate
Sensor and piezoresistive pressure sensor；Wherein：
The capacitance type humidity sensor is made up of and using wetness sensitive polymer flexible pipe substrate as capacitor dielectric mesh electrode,
The mesh electrode is symmetrically distributed on the side wall of wetness sensitive polymer flexible pipe substrate, forms the upper and lower of capacitance type humidity sensor
Pole plate；
The temperature sensor is the thermocouple being made up of platinum electrode and platinum rhodium electrode, and a part of platinum rhodium electrode covers one
Part platinum electrode is constituting the hot junction of thermocouple；Platinum electrode and platinum rhodium electrode sputter at the side wall of wetness sensitive polymer flexible pipe substrate
On, for the change of monitoring temperature；
The piezoresistive pressure sensor is made up of platinum filament, and the platinum filament is looped around the outside of wetness sensitive polymer flexible pipe substrate
On face, for detecting stretching, bending, the change of the multiple directions power of torsion of wetness sensitive polymer flexible pipe substrate.
Preferably, the wetness sensitive polymer flexible pipe substrate adopts wetness sensitive polymer material, the wetness sensitive polymer to include simultaneously
It is not limited to the capacitor type polymeric material of polyimides, polyacetylene benzene, cellulose acetate.
It is highly preferred that it is that 1-3 millimeters, length are that the external diameter of the wetness sensitive polymer flexible pipe substrate is 2-4 millimeters, internal diameter
20-30 millimeters, less size can apply to more more accurate occasions.
Preferably, two of the mesh electrode symmetrical upper and lower pole plates are wrapped in the outer of wetness sensitive polymer flexible pipe substrate
On wall, and between upper and lower pole plate leaving gap preventing short-circuit between plates.
It is highly preferred that the material of the mesh electrode is one kind of platinum, silver and copper.
Preferably, the thermocouple：Platinum electrode and platinum rhodium electrode are two pieces of symmetrical T font thin film metal layers, two pieces of T words
The afterbody of type thin film metal layer is stacked together to form the hot junction of thermocouple, and except area is 0.01-0.1 square microns
Hot junction outside, two pieces of T font thin film metal layers of remainder mutually insulate.
Preferably, the platinum filament makes platinum loop be wound on wetness sensitive polymer by sputtering platinum on wetness sensitive polymer flexible pipe substrate
On flexible pipe substrate side wall, to form piezoresistive pressure sensor；
When wetness sensitive polymer flexible pipe substrate is subject to the effect of external force to produce bend tension torsional deflection, platinum filament occurs simultaneously
Deformation, the resistance for causing platinum filament changes, so as to realize detecting the pressure change of multiple directions and torsion.
Preferably, the mesh electrode of the humidity sensor is located at by platinum electrode respectively with the platinum filament of the pressure transducer
The thermocouple constituted with platinum rhodium electrode, the i.e. both sides of temperature sensor, to prevent from being short-circuited between each sensor.
The present invention adopts wetness sensitive polymer flexible pipe as substrate, and as the capacitor dielectric of capacitance type humidity sensor, it is wet
Photosensitive polymerization thing material itself has the characteristic of moisture absorption, so as to substantially change the dielectric constant of medium, makes capacitance variation bigger；Together
When can effectively reduce make humidity sensor volume and process complexity；Wetness sensitive polymer flexible pipe can additionally be utilized
Small volume, flexible advantage application Various Complex occasion.
The electrode of capacitance type humidity sensor of the present invention is mesh electrode, and mesh electrode can effectively increase wet sensitive
The contact area of polymer capacitor dielectric and external environment, so as to increase hygroscopicity.
According to a further aspect in the invention, there is provided a kind of preparation of the integrated temperature and humidity pressure flexible sensor based on wet sensitive flexible pipe
Method, methods described by wetness sensitive polymer flexible pipe substrate through multiple curved surface whirl coating, rotation photoetching, sputtering technology, from
And formed based on the integrated temperature and humidity pressure flexible sensor of wetness sensitive polymer flexible pipe substrate；
Methods described comprises the steps：
The first step, on wetness sensitive polymer flexible pipe substrate photoresist is sprayed, by programmable EUV lithographic apparatus and used
Rotation photoetching technique, is patterned to the mesh electrode of humidity sensor, sputters chromium adhesion layer, and copper, platinum or silver electrode layer go
Except photoresist, the upper bottom crown of moisture sensor mesh electrode is formed；
Second step, on the wetness sensitive polymer flexible pipe substrate of the moisture sensor mesh electrode that completes spray photoresist with
Cover netted electrode layer, general rotation photoetching technique, using different mask plates respectively to the platinum of thermocouple, and pressure sensing
The platinum filament of device is patterned, sputtered titanium tack coat, platinum electrode layer；Then photoresist is removed, the platinum filament of pressure transducer is formed
And the platinum electrode of thermocouple；
3rd step, spray photoresist on the wetness sensitive polymer flexible pipe substrate processed through first two steps and cover and make
The platinum electrode of thermocouple, graphical platinum rhodium electrode, after development, sputtered titanium tack coat, platinum rhodium electrode layer finally remove photoresist,
Form the platinum rhodium electrode of thermocouple；
So far, obtain based on the integrated temperature and humidity pressure flexible sensor of wet sensitive flexible pipe.
Compared with prior art, the present invention has following beneficial effect：
By the present invention in that with wet sensory material wetness sensitive polymer flexible pipe as substrate, can be used as capacitance type humidity sensor
Capacitor dielectric, effectively reduce the volume and process complexity for making humidity sensor；Around the platinum filament resistance pressure type pressure of flexible pipe
Force transducer is used to detect the change of the multiple directions power such as pipe stretching, bending, torsion.Additionally, processing technology of the present invention is simple,
Sensitivity is higher, it is possible to use flexible pipe is applied to the field of multiple complexity.
Description of the drawings
The detailed description by reading non-limiting example made with reference to the following drawings, the further feature of the present invention,
Objects and advantages will become more apparent upon：
Fig. 1 is the structure front view of one embodiment of the present invention；
In figure：PI flexible pipes substrate 1, mesh electrode 2, platinum electrode 3, platinum rhodium electrode 4, platinum filament 5；
Fig. 2 is the perspective view of one embodiment of the present invention；
Fig. 3 is the right view of one embodiment of the present invention；
Fig. 4 is the top view of one embodiment of the present invention.
Specific embodiment
Embodiments of the invention are elaborated below, the present embodiment is carried out under premised on technical solution of the present invention
Implement, give detailed embodiment and specific operating process, but protection scope of the present invention is not limited to two of subordinate
Embodiment.
Embodiment 1
As Figure 1-Figure 4, a kind of integrated temperature and humidity pressure flexible sensor based on wet sensitive flexible pipe, by PI flexible pipes substrate 1, net
The humidity sensor of shape electrode 2 and the composition of PI flexible pipes substrate 1, the thermocouple of platinum electrode 3 and the composition of platinum rhodium electrode 4, platinum filament 5 are constituted
Pressure transducer composition；Wherein：
Using PI flexible pipes substrate 1 as capacitor dielectric, the mesh electrode is symmetrically distributed in PI flexible pipes to the humidity sensor
On the side wall of substrate 1, the upper and lower pole plate of capacitance type humidity sensor is formed；
The platinum electrode 3 and platinum rhodium electrode 4 are sputtered on the side wall of PI flexible pipes substrate 1, for the change of monitoring temperature, and
A part of platinum rhodium electrode 4 covers a part of platinum electrode 3 to constitute the hot junction of thermocouple；
The platinum filament 5 is looped around on the lateral surface of PI flexible pipes substrate 1, when PI flexible pipes substrate 1 is subject to the effect of external force to produce
During bend tension torsional deflection, platinum filament 5 deforms simultaneously, and the resistance for causing platinum filament 5 changes, multiple so as to realize detection
Direction and the pressure change of torsion.
As one preferred embodiment, a diameter of 3 microns of the PI flexible pipes substrate 1.
As one preferred embodiment, the mesh of the mesh electrode 2 it is a length of 100 microns, a width of 50 microns, between mesh
Spacing be 70 microns；The mesh electrode 2 can be effectively increased the contact area of PI flexible pipes substrate 1 and external environment, so as to
Increase hygroscopicity.
As one preferred embodiment, the platinum electrode 3 and platinum rhodium electrode 4 are two pieces of symmetrical T font film metals
Layer, the afterbody of two pieces of T font thin film metal layers is stacked together to form the hot junction of thermocouple, and except area is 0.01-
Outside the hot junction of 0.1 square micron, two pieces of T font thin film metal layers of remainder mutually insulate.
Further, the thickness of the platinum electrode 3 is 1 micron；The thickness of the platinum rhodium electrode 4 is 1 micron.
As one preferred embodiment, a width of 70 microns of the platinum filament 5, at intervals of 50 microns, totally 50 circle.
The present embodiment, as substrate, can have by using PI flexible pipes as the capacitor dielectric of capacitance type humidity sensor
The reduction of effect makes the volume and process complexity of humidity sensor；Compared to traditional plane pressure transducer, around soft
The platinum filament pressure drag type pressure capsule of pipe is used to detect the change of the multiple directions power such as pipe stretching, bending, torsion.Additionally, this
Embodiment processing technology is simple, and sensitivity is higher, it is possible to use flexible pipe is applied to the field of multiple complexity.
Embodiment 2
A kind of preparation method of the integrated temperature and humidity pressure flexible sensor based on wet sensitive flexible pipe, methods described includes following step
Suddenly：
The first step, on PI flexible pipe substrates spray 1-3 microns photoresist, by may be programmed EUV lithographic apparatus, use
Rotation photoetching technique is patterned to the mesh electrode of humidity sensor, sputters 30-50 nanometer chromium adhesion layers, 1 micron of thickness
Copper electrode layer, removes photoresist, forms the upper bottom crown of moisture sensor mesh electrode；
Second step, spraying photoresist cover netted electrode layer, and general rotation photoetching technique is distinguished using different mask plates
Platinum to thermocouple, and the platinum filament of pressure transducer is patterned, sputter 30 nanometers titanium tack coat and 1 micron
Platinum electrode layer, then removes photoresist, forms the platinum filament of pressure transducer and the platinum electrode of thermocouple；
3rd step, spraying photoresist cover the platinum electrode of the thermocouple made, and graphical platinum rhodium electrode is sputtered after development
30 nanometers of titanium tack coat, 1 micron of platinum rhodium electrode layer, finally remove photoresist, form the platinum rhodium electrode of thermocouple.
Above example on the basis of technological process is simple, by PI flexible pipe substrates make temperature and humidity pressure flexible sensing
Device, makes that the structure of sensor is simpler, and volume is less, is applied to more complicated occasions.
The resistance type humidity sensor of mesh electrode of the present invention has simple structure, the high advantage of certainty of measurement, netted electricity
Pole makes wetness sensitive polymer medium be conducive to moisture absorption more greatly with air contact area；Film thermocouple simple structure, certainty of measurement is high；
The annular platinum filament simple structure made using rotation photoetching technique, can effectively detect the change of multiple directions pressure.
It is pointed out that above-described embodiment can also be changed using two embodiments that micro-processing method is the present invention
Become species, the size of metal structure and the species of polymer, be not limited solely to the description of examples detailed above, be capable of achieving the present invention
Purpose.
Advantages of the present invention and micro-processing method are above examples described, it should be understood by those skilled in the art that, not
The present invention also has various improvement and optimization on the premise of departing from spirit and scope of the invention, and these are improved and optimization both falls within and wants
Ask in the scope of the invention of protection, the claimed scope of the invention is defined by appending claims and its equivalent.
Claims (9)
1. a kind of integrated temperature and humidity pressure flexible sensor based on wet sensitive flexible pipe, it is characterised in that include：Wetness sensitive polymer flexible pipe is served as a contrast
Bottom, and it is arranged at the capacitance type humidity sensor on the wetness sensitive polymer flexible pipe substrate, temperature sensor and pressure resistance type pressure
Force transducer；Wherein：
The capacitance type humidity sensor is made up of and using wetness sensitive polymer flexible pipe substrate as capacitor dielectric mesh electrode, described
Mesh electrode is symmetrically distributed on the side wall of wetness sensitive polymer flexible pipe substrate, forms the upper and lower pole plate of capacitance type humidity sensor；
The temperature sensor is the thermocouple being made up of platinum electrode and platinum rhodium electrode, and a part of platinum rhodium electrode covers a part
Platinum electrode is constituting the hot junction of thermocouple；Platinum electrode and platinum rhodium electrode are sputtered on the side wall of wetness sensitive polymer flexible pipe substrate,
For the change of monitoring temperature；
The piezoresistive pressure sensor is made up of platinum filament, and the platinum filament is looped around the outside of the wetness sensitive polymer flexible pipe substrate
On face, for detecting stretching, bending, the change of the multiple directions power of torsion of wetness sensitive polymer flexible pipe substrate.
2. a kind of integrated temperature and humidity pressure flexible sensor based on wet sensitive flexible pipe according to claim 1, it is characterised in that institute
Wetness sensitive polymer flexible pipe substrate is stated using wetness sensitive polymer material, the wetness sensitive polymer is capacitor type polymeric material.
3. a kind of integrated temperature and humidity pressure flexible sensor based on wet sensitive flexible pipe according to claim 2, it is characterised in that institute
The external diameter for stating wetness sensitive polymer flexible pipe substrate is 2-4 millimeters, internal diameter is 1-3 millimeters, length is 20-30 millimeters.
4. a kind of integrated temperature and humidity pressure flexible sensor based on wet sensitive flexible pipe according to claim 1, it is characterised in that institute
Two symmetrical upper and lower pole plates for stating mesh electrode are wrapped on the outer wall of wetness sensitive polymer flexible pipe substrate, and upper and lower pole plate it
Between leaving gap preventing short-circuit between plates.
5. a kind of integrated temperature and humidity pressure flexible sensor based on wet sensitive flexible pipe according to claim 4, it is characterised in that institute
The material for stating mesh electrode is one kind of platinum, silver and copper.
6. a kind of integrated temperature and humidity pressure flexible sensor based on wet sensitive flexible pipe according to claim 1, it is characterised in that institute
State thermocouple：Platinum electrode and platinum rhodium electrode are two pieces of symmetrical T font thin film metal layers, the tail of two pieces of T font thin film metal layers
Portion is stacked together to form the hot junction of thermocouple, and in addition to hot junction of the area for 0.01-0.1 square microns, remaining
Two pieces of partial T font thin film metal layers mutually insulate.
7. a kind of integrated temperature and humidity pressure flexible sensor based on wet sensitive flexible pipe according to claim 1, it is characterised in that institute
Platinum filament is stated by sputtering platinum on wetness sensitive polymer flexible pipe substrate, platinum loop is wound on wetness sensitive polymer flexible pipe substrate side wall, with
Form piezoresistive pressure sensor；
When wetness sensitive polymer flexible pipe substrate is subject to the effect of external force to produce bend tension torsional deflection, platinum filament becomes simultaneously
Shape, the resistance for causing platinum filament changes, so as to realize detecting the pressure change of multiple directions and torsion.
8. a kind of integrated temperature and humidity pressure flexible sensor based on wet sensitive flexible pipe according to any one of claim 1-7, it is special
Levy and be, the mesh electrode of the humidity sensor is located at respectively by platinum electrode and platinum rhodium electricity with the platinum filament of the pressure transducer
The thermocouple of pole composition, the i.e. both sides of temperature sensor, to prevent from being short-circuited between each sensor.
9. a kind of preparation of the integrated temperature and humidity pressure flexible sensor based on wet sensitive flexible pipe according to any one of claim 1-8
Method, it is characterised in that methods described comprises the steps：
The first step, on wetness sensitive polymer flexible pipe substrate photoresist is sprayed, by programmable EUV lithographic apparatus and with rotating
Photoetching technique, is patterned to the mesh electrode of humidity sensor, sputters chromium adhesion layer, and copper, platinum or silver electrode layer remove light
Photoresist, forms the upper bottom crown of moisture sensor mesh electrode；
Second step, on the wetness sensitive polymer flexible pipe substrate of the moisture sensor mesh electrode that completes spray photoresist to cover
Mesh electrode layer, general rotation photoetching technique, using different mask plates respectively to the platinum of thermocouple, and pressure transducer
Platinum filament is patterned, sputtered titanium tack coat, platinum electrode layer；Then remove photoresist, formed pressure transducer platinum filament and
The platinum electrode of thermocouple；
3rd step, the thermoelectricity that the covering of spraying photoresist is made on the wetness sensitive polymer flexible pipe substrate processed through first two steps
Even platinum electrode, graphical platinum rhodium electrode, after development, sputtered titanium tack coat, platinum rhodium electrode layer finally remove photoresist, are formed
The platinum rhodium electrode of thermocouple；
So far, obtain based on the integrated temperature and humidity pressure flexible sensor of wet sensitive flexible pipe.
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| CN201610941049.6A CN106568518B (en) | 2016-10-25 | 2016-10-25 | Integrated temperature and humidity pressure flexible sensor based on wet sensitive hose and preparation method thereof |
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| CN201610941049.6A CN106568518B (en) | 2016-10-25 | 2016-10-25 | Integrated temperature and humidity pressure flexible sensor based on wet sensitive hose and preparation method thereof |
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| CN106568518B CN106568518B (en) | 2019-10-08 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111714734A (en) * | 2020-06-20 | 2020-09-29 | 冯孝强 | Medical intelligent atomization device for pediatrics |
| CN112683956A (en) * | 2021-01-13 | 2021-04-20 | 山东交通学院 | Gas humidity detection system based on potential difference |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH088170A (en) * | 1994-06-23 | 1996-01-12 | Fujitsu Ltd | Method of forming polyimide resin film, and device for forming polyimide resin film |
| CN1802552A (en) * | 2003-06-06 | 2006-07-12 | M.B.T.L.有限公司 | Environmental sensor |
| CN1845327A (en) * | 2005-04-07 | 2006-10-11 | 中国科学院电子学研究所 | Single slice integration temperature, humidity, pressure sensor chip based on polymer material |
| WO2014150093A1 (en) * | 2013-03-15 | 2014-09-25 | Robert Bosch Gmbh | Trench based capacitive humidity sensor |
| CN203940940U (en) * | 2014-06-13 | 2014-11-12 | 江苏多维科技有限公司 | A kind of sensor chip for many physical quantities |
-
2016
- 2016-10-25 CN CN201610941049.6A patent/CN106568518B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH088170A (en) * | 1994-06-23 | 1996-01-12 | Fujitsu Ltd | Method of forming polyimide resin film, and device for forming polyimide resin film |
| CN1802552A (en) * | 2003-06-06 | 2006-07-12 | M.B.T.L.有限公司 | Environmental sensor |
| CN1845327A (en) * | 2005-04-07 | 2006-10-11 | 中国科学院电子学研究所 | Single slice integration temperature, humidity, pressure sensor chip based on polymer material |
| WO2014150093A1 (en) * | 2013-03-15 | 2014-09-25 | Robert Bosch Gmbh | Trench based capacitive humidity sensor |
| CN203940940U (en) * | 2014-06-13 | 2014-11-12 | 江苏多维科技有限公司 | A kind of sensor chip for many physical quantities |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111714734A (en) * | 2020-06-20 | 2020-09-29 | 冯孝强 | Medical intelligent atomization device for pediatrics |
| CN112683956A (en) * | 2021-01-13 | 2021-04-20 | 山东交通学院 | Gas humidity detection system based on potential difference |
| CN112683956B (en) * | 2021-01-13 | 2022-08-23 | 山东交通学院 | Gas humidity detection system based on potential difference |
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|---|---|
| CN106568518B (en) | 2019-10-08 |
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