CN109609888A - A kind of plasma spray coating yttria coating preparation method for preventing boundary from falling off - Google Patents
A kind of plasma spray coating yttria coating preparation method for preventing boundary from falling off Download PDFInfo
- Publication number
- CN109609888A CN109609888A CN201811440874.3A CN201811440874A CN109609888A CN 109609888 A CN109609888 A CN 109609888A CN 201811440874 A CN201811440874 A CN 201811440874A CN 109609888 A CN109609888 A CN 109609888A
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- China
- Prior art keywords
- coating
- yttria
- boundary
- preparation
- falling
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
- C23C4/134—Plasma spraying
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/01—Selective coating, e.g. pattern coating, without pre-treatment of the material to be coated
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/02—Pretreatment of the material to be coated, e.g. for coating on selected surface areas
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
- C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
- C23C4/11—Oxides
Abstract
The present invention relates to a kind of plasma spray coating yttria coating preparation method for preventing boundary from falling off, which is prepared using atmospheric plasma spraying equipment.The preparation method comprises the following steps: the piece surface of required spraying is integrally carried out blasting treatment by (1)；(2) part boundary is covered with exterior domain；(3) hard anodized coating treatment is carried out to part boundary areas；(4) preparation of atmosphere plasma yttria coating is carried out to part overall region.The yttria coating that this method obtains has very excellent performance indicator with high rigidity, high compactness, high tensile, corrosion-resistant and reactance voltage, and also there is good binding force on yttria coating boundary, will not fall off phenomenon.
Description
Technical field
The present invention relates to a kind of thermal sprayings to prepare field of ceramic coatings, especially there is high rigidity and high drawing force coating to want
The coatings art preparation method asked.
Background technique
With the continuous development of semiconductor equipment, the corrosion resistance of the aluminum components in etch chamber is required increasingly
It is high.Traditional aluminum components are next corrosion-resistant in aluminum component surface one layer of anode film of formation by the way of anodic oxidation,
But its corrosion resistance has been unable to meet the requirement of sophisticated semiconductor equipment, the service life reduction of aluminum components, and replacement frequency is got over
Come it is higher, currently, many enterprises use enhances its anticorrosive wear-resistant performance on aluminum substrate by the way of spraying yttrium oxide, and with
Use on the machine the extension of time, coating surface is not in big problem, but often falls off, shells at coating boundaries
From, corrosion situations such as, lead to problems such as part overall surface face and scrap or rebuild, serious waste cost impact produce.
Before yttria coating borderline region spray coating, progress hard anodizing horizon preparation first be can effectively avoid
This problem, hard anodizing horizon have higher hardness, better corrosion resistance and binding force compared to aluminium base, exist first
Part boundary areas, which prepares anodic oxide coating, can be enhanced borderline region resistance to corrosion and binding force, then in anodic oxide coating
Upper preparation yttria coating, can play more excellent performance, prepare yttria coating using air plasma spraying, on the one hand
The reason is that because the compactness of the yttria coating prepared by the way of thermal spraying is more preferable, it is more preferable with the binding force of matrix.Separately
On the one hand it is in etch chamber, is al atomic ratio of the etching gas when corroding aluminum components, in traditional aluminum oxide coating layer
Yttrium atom is light, and the resistance to physics corrosivity of yttrium oxide is more preferable；The activity of yttrium oxide is bigger than the activity of yttrium oxide, is easier to and etching gas
Reaction, yttrium fluoride obtained is less susceptible to evaporate than aluminum fluoride, therefore the chemical corrosion resistance of yttrium oxide is more preferable than aluminium oxide.
Summary of the invention
The purpose of the present invention is what is be achieved through the following technical solutions:
A kind of plasma spray coating yttria coating preparation method for preventing boundary from falling off, the coating production include with
Lower step:
(1) piece surface of required spraying is integrally subjected to blasting treatment；
(2) part boundary is covered with exterior domain；
(3) hard anodized coating treatment is carried out to part boundary areas；
(4) preparation of atmosphere plasma yttria coating is carried out to part overall region.
Blasting treatment described in step (1), selects white fused alumina sand material to carry out sandblasting, and equipment is automatic sand blasting or spray manually
Sand, blasting pressure 30-50psi, roughness is between 3.75-7.5 μm after sandblasting.
Step (3) hard anodizing horizon, is prepared, film thickness makes after 50-90 μm, preparation at the 5mm of boundary
With pure water sealing of hole 3-6 hours.
Step (4) the yttria coating preparation technology parameter is as follows: argon flow is 50-120nplm, and hydrogen flowing quantity is
5-15nplm, spray distance 130-180mm, electric current are 450-510A, and carrier gas flux is 2-5.5slpm, and powder feeding rate is 30-
70g/min, spray gun movement speed 1100-1600mm/sec.
Step (4) the yttria coating powder requires as follows: purity is 99.0% or more, and powder diameter is in 35-53um
Between.
Step (4) the yttria coating performance is as follows: coating layer thickness is at 200-300 μm, and coating roughness is at 2.6-6 μm
Between, hydrochloric acid corrosion resistant time > 2.5 hours, breakdown voltage resistant 4300V, coating binding force > 14MPa, microhardness >
3GPa, coating porosity < 5%.
The beneficial effects of the present invention are:
1. preparing anodic oxide coating before the yttrium oxide borderline region spraying that the present invention selects, yttrium oxide is sprayed compared to aluminium base
Coating has higher hardness, binding force, corrosion resistance and breakdown voltage resistant property, keeps boundary less easy to fall off, service life
It is long.
2. prepare anodic oxide coating before the spraying of yttrium oxide borderline region that the present invention selects, can effectively reduce part due to
Heavy industry caused by the runaway corrosion of boundary scraps quantity, effectively save cost.
Detailed description of the invention
Fig. 1 present embodiment amplifies the SEM photograph of 200 times of yttria coating surface pattern.
Fig. 2 embodiment amplifies the SEM photograph of 1000 times of yttria coating surface pattern.
Fig. 3 embodiment amplifies the SEM photograph of 3000 times of yttria coating surface pattern.
Fig. 4 embodiment amplifies the SEM photograph of 200 times of yttria coating Cross Section Morphology.
Fig. 5 embodiment amplifies the SEM photograph of 1000 times of yttria coating Cross Section Morphology.
Fig. 6 embodiment amplifies the SEM photograph of 3000 times of yttria coating Cross Section Morphology.
Specific embodiment
Below with reference to attached drawing 1-6 and embodiment is illustrated, the present invention is described in more detail.
Firstly, covering part other positions using masking tape, 36# white fused alumina sand material is selected to carry out sandblasting to surface,
Blasting pressure 42psi obtains 5.6 μm of roughness, to pre-treatment is carried out at the part boundary 5mm of required coating, prepares hard sun
Pole oxide layer, current density 1.5A/dm2 prepare 65 μm of film thickness, after preparation use pure water sealing of hole, the sealing of hole time 3.5 hours.Firmly
After the preparation of matter anodic oxide coating, yttria coating preparation, argon flow 90nlpm, hydrogen flowing quantity are carried out to part overall surface
8nlpm, spray distance 150mm, electric current 480A, carrier gas flux 2.8slpm, powder feeding rate are 45g/min, spray gun movement speed
1300mm/sec.230 μm of acquired coating layer thickness, coating porosity 2.7% or so, drawing force 14.3MPa, average microhardness
3.1GPa, corrosion resistance 4.5 hours.
The foregoing is only a preferred embodiment of the present invention, is not intended to restrict the invention, for art technology
For personnel, the present invention can have various modifications and variations.The present invention can be used for semicon industry it is various need to have it is corrosion-resistant
The components of functional coating, but also it is not limited to semiconductor field.All within the spirits and principles of the present invention, made
Any modification, equivalent substitution, improvement and etc. should all be included in the protection scope of the present invention.
Claims (6)
1. a kind of plasma spray coating yttria coating preparation method for preventing boundary from falling off, which is characterized in that coating preparation
Method the following steps are included:
(1) piece surface of required spraying is integrally subjected to blasting treatment；
(2) part boundary is covered with exterior domain；
(3) hard anodized coating treatment is carried out to part boundary areas；
(4) preparation of atmosphere plasma yttria coating is carried out to part overall region.
2. the plasma spray coating yttria coating described in accordance with the claim 1 for preventing boundary from falling off, it is characterised in that: described
Step (1) blasting treatment selects white fused alumina sand material to carry out sandblasting, passes through automatic sand blasting or manual sandblasting, blasting pressure 30-
50psi, roughness is between 3.75-7.5 μm after sandblasting.
3. the plasma spray coating yttria coating described in accordance with the claim 1 for preventing boundary from falling off, it is characterised in that: described
Step (3) hard anodizing horizon, is prepared at the 5mm of boundary, and film thickness uses pure water sealing of hole 3-6 after 50-90 μm, preparation
Hour.
4. the plasma spray coating yttria coating described in accordance with the claim 1 for preventing boundary from falling off, it is characterised in that: described
Step (4) yttria coating preparation technology parameter is as follows: argon flow is 50-120nplm, and hydrogen flowing quantity is 5-15nplm, spray
Distance 130-180mm is applied, electric current is 450-510A, and carrier gas flux is 2-5.5slpm, and powder feeding rate is 30-70g/min, spray gun
Movement speed 1100-1600mm/sec.
5. the plasma spray coating yttria coating described in accordance with the claim 1 for preventing boundary from falling off, it is characterised in that: described
Step (4) yttria coating powder requires as follows: purity is 99.0% or more, and powder diameter is between 35-53um.
6. the plasma spray coating yttria coating described in accordance with the claim 1 for preventing boundary from falling off, it is characterised in that: described
Step (4) yttria coating performance is as follows: coating layer thickness is at 200-300 μm, and coating roughness is between 2.6-6 μm, resistance to hydrochloric acid
Etching time > 2.5 hours, breakdown voltage resistant 4300V, coating binding force > 14MPa, microhardness > 3GPa, coating porosity
< 5%.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811440874.3A CN109609888A (en) | 2018-11-29 | 2018-11-29 | A kind of plasma spray coating yttria coating preparation method for preventing boundary from falling off |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811440874.3A CN109609888A (en) | 2018-11-29 | 2018-11-29 | A kind of plasma spray coating yttria coating preparation method for preventing boundary from falling off |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109609888A true CN109609888A (en) | 2019-04-12 |
Family
ID=66005896
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| CN201811440874.3A Pending CN109609888A (en) | 2018-11-29 | 2018-11-29 | A kind of plasma spray coating yttria coating preparation method for preventing boundary from falling off |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112490106A (en) * | 2020-11-30 | 2021-03-12 | 合肥微睿光电科技有限公司 | Upper electrode plasma fusion jetting method applied to dry etching process |
| CN113611589A (en) * | 2021-10-08 | 2021-11-05 | 中微半导体设备(上海)股份有限公司 | Component, plasma device, method for forming corrosion-resistant coating and device thereof |
| CN115772043A (en) * | 2021-09-06 | 2023-03-10 | 沈阳富创精密设备股份有限公司 | Preparation method of plasma spraying yttrium oxide coating on ceramic substrate |
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| JP2007227443A (en) * | 2006-02-21 | 2007-09-06 | Hitachi High-Technologies Corp | Plasma etching apparatus and method of forming inner wall in plasma processing chamber |
| WO2011049938A2 (en) * | 2009-10-20 | 2011-04-28 | Saint-Gobain Ceramics & Plastics, Inc. | Microelectronic processing component having a corrosion-resistant layer, microelectronic workpiece processing apparatus incorporating same, and method of forming an article having the corrosion-resistant layer |
| CN103074568A (en) * | 2011-10-26 | 2013-05-01 | 中国科学院微电子研究所 | Preparation method of Y2O3 erosion-resistant ceramic coating |
| CN106460220A (en) * | 2014-02-25 | 2017-02-22 | 赛峰飞机发动机公司 | Protective edge for a blade and method of manufacturing said edge |
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| JP2007227443A (en) * | 2006-02-21 | 2007-09-06 | Hitachi High-Technologies Corp | Plasma etching apparatus and method of forming inner wall in plasma processing chamber |
| WO2011049938A2 (en) * | 2009-10-20 | 2011-04-28 | Saint-Gobain Ceramics & Plastics, Inc. | Microelectronic processing component having a corrosion-resistant layer, microelectronic workpiece processing apparatus incorporating same, and method of forming an article having the corrosion-resistant layer |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112490106A (en) * | 2020-11-30 | 2021-03-12 | 合肥微睿光电科技有限公司 | Upper electrode plasma fusion jetting method applied to dry etching process |
| CN115772043A (en) * | 2021-09-06 | 2023-03-10 | 沈阳富创精密设备股份有限公司 | Preparation method of plasma spraying yttrium oxide coating on ceramic substrate |
| CN113611589A (en) * | 2021-10-08 | 2021-11-05 | 中微半导体设备(上海)股份有限公司 | Component, plasma device, method for forming corrosion-resistant coating and device thereof |
| CN113611589B (en) * | 2021-10-08 | 2021-12-24 | 中微半导体设备(上海)股份有限公司 | Component, plasma device, method for forming corrosion-resistant coating and device thereof |
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| PB01 | Publication | ||
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| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information |
Address after: No.18a-1, Feiyun Road, Hunnan District, Shenyang City, Liaoning Province Applicant after: Shenyang fuchuang precision equipment Co.,Ltd. Address before: No.18a-1, Feiyun Road, Dongling District, Shenyang, Liaoning Province, 110000 Applicant before: Shenyang Fortune Precision Equipment Co.,Ltd. |
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| CB02 | Change of applicant information | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190412 |
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| RJ01 | Rejection of invention patent application after publication |