CN109592413A - A kind of carrying device and diced system - Google Patents
A kind of carrying device and diced system Download PDFInfo
- Publication number
- CN109592413A CN109592413A CN201811579701.XA CN201811579701A CN109592413A CN 109592413 A CN109592413 A CN 109592413A CN 201811579701 A CN201811579701 A CN 201811579701A CN 109592413 A CN109592413 A CN 109592413A
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- China
- Prior art keywords
- transport object
- sensor
- carrying device
- handling module
- transporter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
Abstract
The invention discloses a kind of carrying device and diced system, carrying device includes board and transporter, and transporter is located at the end of board, is configured as conveying to transport object；Sensor is located on transporter, is configured as induction to transport object；Each to corresponding at least two sensors of transport object.The present invention makes every piece to correspond at least two sensors to transport object, and sensor is distributed in the both ends to transport object, it is slightly put partially to transport object in this way, it will be arrived by sensor sensing, the grasping movement for avoiding next transporter treats the damage of transport object, to save the cost to transport object, while downtime when transport object is damaged also is avoided, and then improve the working efficiency cut to transport object.
Description
Technical field
The present invention relates to field of display technology more particularly to a kind of carrying devices and diced system.
Background technique
In mechanical processing process, plate cutting usual way has hand cut, semi auto cutting machine cutting and numerical control cutting
Cutting mill cutting.Hand cut is flexible and convenient, but hand cut is of poor quality, scale error is big, waste of material is big, following process work
Amount is big, while working condition is severe, and production efficiency is low.Copying cutting machine in semi auto cutting machine, the quality for cutting workpiece is preferable,
Since it uses cutting die, it is not suitable for single-piece, small lot and big work piece cut.Although other type semi auto cutting machine drops
Low labor intensity of workers, but its function is simple, is only suitable for the part cutting of some relatively regular shapes.Numerical control cutting is relatively manual
For semi-automatic cutting mode, efficiency, cut quality, work strong with mitigating operator with can effectively improving plate cutting
Degree.Especially display panel field, glass substrate are the basic element of character for constituting liquid crystal display device, in recent years, since plate is aobvious
The development for showing industry, it is increasing for the production requirement of glass substrate.In the production process of glass substrate, in order to be expired
The glass substrate required enough, it is often necessary to glass substrate be cut according to corresponding size on biggish glass substrate.
It needs to transport glass substrate before cutting to position to be cut.
Existing carrying device cannot identify that glass substrate puts inclined situation, and glass substrate is caused to be damaged.
Summary of the invention
Technical problem to be solved by the invention is to provide one kind avoid a kind of impaired carrying device of glass substrate and
Diced system.
The invention discloses a kind of carrying devices, comprising: board；Transporter is configured as positioned at the end of the board
Conveying is to transport object；Sensor is located on the transporter, is configured as induction to transport object；It is each corresponding extremely to transport object
Few two sensors.
Optionally, the transporter includes handling module, and the sensor is arranged in the handling module, the crawl
It is described to transport object that module is configured as crawl；It is each described to the corresponding sensor of transport object include first sensor and
Second sensor, the first sensor and the second sensor respectively correspond the both ends to transport object and are arranged.
Optionally, the handling module includes adsorption structure, is configured as grabbing by way of absorption to transport object.
Optionally, the adsorption structure includes suction nozzle and suction pipe, and the suction nozzle is connected with the suction pipe, the suction nozzle and institute
The inside for stating suction pipe communicates.
Optionally, the sensor is respectively provided in each handling module.
Optionally, the handling module includes fixture, is configured as grabbing by way of clamping described to transport object.
Optionally, the fixture includes maxilla, lower jaw and cushion, and the cushion is arranged in the maxilla and lower jaw phase
Pair face on, the maxilla matches described to transport object to clamp with the lower jaw.
Optionally, the cushion is made of rubber material.
The invention also discloses a kind of carrying devices, are applied to glass substrate, comprising: board；Transporter is located at the machine
The end of platform is configured as conveying glass substrate；Sensor is located on the transporter, is configured as induction glass substrate；Often
Corresponding two sensors of a glass substrate；The transporter includes handling module, and the sensor is arranged in the crawl
In module, the handling module is configured as crawl glass substrate；The corresponding sensor of each glass substrate includes
First sensor and second sensor, the first sensor and the second sensor respectively correspond the two of the glass substrate
End setting；The handling module includes adsorption structure, and the adsorption structure includes suction nozzle and suction pipe, the suction nozzle and the suction pipe
Connection, the suction nozzle are communicated with the inside of the suction pipe；The adsorption structure is configured as grabbing glass by way of absorption
Substrate.
The invention also discloses a kind of diced systems, and including cutter device and as above the arbitrarily described carrying device, described
Cutter device and the carrying device are arranged side by side, and the transporter of the cutter device and the carrying device is staggered relatively, described
Carrying device is transported to the cutter device progress cutting operation to transport object for described by transporter.
This programme makes each to corresponding at least two sensors of transport object, and sensor is distributed in the both ends to transport object,
It slightly puts, will be arrived by sensor sensing partially to transport object in this way, the grasping movement for avoiding next transporter, which is treated, removes
The damage of object is sent, to save the cost to transport object, while also avoiding downtime when transport object is damaged, and then improve
Working efficiency to transport object cutting.
Detailed description of the invention
Included attached drawing is used to provide that a further understanding of the embodiments of the present application, and which constitute one of specification
Point, for illustrating presently filed embodiment, and with verbal description come together to illustrate the principle of the application.Under it should be evident that
Attached drawing in the description of face is only some embodiments of the present application, for those of ordinary skill in the art, is not paying wound
Under the premise of the property made is laborious, it is also possible to obtain other drawings based on these drawings.In the accompanying drawings:
Fig. 1 is illustrative a kind of schematic diagram of carrying device of the invention；
Fig. 2 is illustrative a kind of schematic diagram of the fixture of carrying device of the invention；
Fig. 3 is that one kind of one embodiment of the invention can incude the schematic diagram that inclined carrying device is put to transport object；
Fig. 4 is a kind of schematic diagram of the adsorption structure of carrying device of one embodiment of the invention；
Fig. 5 is the schematic diagram of the fixture of the carrying device with cushion of another embodiment of the present invention；
Fig. 6 is the schematic diagram of diced system of the invention；
Fig. 7 is the schematic diagram of the work step of diced system of the invention.
Wherein, 100, carrying device；110, board；120, transporter；121, handling module；130, sensor；131,
One sensor；132, second sensor；200, adsorption structure；210, suction pipe；220, suction nozzle；300, fixture；310, maxilla；320,
Lower jaw；330, cushion；400, to transport object；410, glass substrate；500, cutter device；600, diced system.
Specific embodiment
It is to be appreciated that term used herein above, disclosed specific structure and function details, it is only for description
Specific embodiment is representative, but the application can be implemented by many alternative forms, be not construed as only
It is limited to the embodiments set forth herein.
In the description of the present application, term " first ", " second " are used for description purposes only, and it is opposite to should not be understood as instruction
Importance, or implicitly indicate the quantity of indicated technical characteristic.As a result, unless otherwise indicated, " first ", " are defined
Two " feature can explicitly or implicitly include one or more of the features；The meaning of " plurality " is two or two
More than.Term " includes " and its any deformation, mean and non-exclusive include, it is understood that there may be or addition is one or more that other are special
Sign, integer, step, operation, unit, component and/or combination thereof.
In addition, "center", " transverse direction ", "upper", "lower", "left", "right", "vertical", "horizontal", "top", "bottom", "inner",
The term of the orientation or positional relationship of the instructions such as "outside" is that orientation or relative positional relationship based on the figure describe, only
Be that the application simplifies description for ease of description, rather than indicate signified device or element must have a particular orientation,
It is constructed and operated in a specific orientation, therefore should not be understood as the limitation to the application.
Furthermore unless specifically defined or limited otherwise, term " installation ", " connected ", " connection " shall be understood in a broad sense, example
Such as it may be fixed connection or may be dismantle connection, or integral connection；It can be mechanical connection, be also possible to be electrically connected
It connects；It can be directly connected, it can also indirectly connected through an intermediary or the connection inside two elements.For ability
For the those of ordinary skill in domain, the concrete meaning of above-mentioned term in this application can be understood as the case may be.
Below with reference to the accompanying drawings the invention will be further described with optional embodiment.
As shown in Figures 3 to 6, the embodiment of the present invention discloses a kind of carrying device 100, including board 110 and transporter
120, transporter 120 is located at the end of board 110, is configured as conveying to transport object 400；Sensor 130 is located at transporter
On 120, induction is configured as to transport object 400；Each to corresponding at least two sensors 130 of transport object 400.
For scheme as shown in Figures 1 and 2, this programme makes every piece to correspond at least two to transport object 400
Sensor 130, and sensor 130 is distributed in the both ends to transport object 400, slightly puts partially to transport object 400 in this way, will be passed
Sensor 130 senses that the grasping movement for avoiding next transporter 120 treats the damage of transport object 400, to save
To the cost of transport object 400, while downtime when transport object 400 is damaged also is avoided, and then improve and cut to transport object 400
Working efficiency.
In one embodiment, transporter 120 includes handling module 121, and sensor 130 is arranged in handling module 121, grabs
Modulus block 121 is configured as crawl to transport object 400；It include each first sensor to the corresponding sensor 130 of transport object 400
131 and second sensor 132, first sensor 131 and second sensor 132 respectively correspond the both ends setting to transport object 400.
Handling module 121 is directly grabbed to transport object 400, and the corresponding both ends to transport object 400 are arranged in sensor 130
In the handling module 121 of position, in this way, the sensor 130 of the end positions to transport object 400, which can cooperate, treats transport object
400 are incuded, and can be incuded to which whether transport object 400 puts partially, to avoid the grasping movement of next handling module 121
The damage for treating transport object 400 saves the cost to transport object 400, at the same also avoid when transport object 400 damage when stop work when
Between, and then improve the working efficiency cut to transport object 400.
In one embodiment, handling module 121 includes adsorption structure 200, be configured as grabbing by way of absorption to
Transport object 400.Handling module 121 is set as the structure with adsorption function, is grabbed by way of absorption to transport object 400,
Because absorption grasping movement be it is partially flexible, transport object 400 will not be treated substantially and damaged, can be to avoid handling module
121 damage during crawl is to transport object 400 to transport object 400, improve conveying efficiency.
In one embodiment, adsorption structure 200 includes suction nozzle 220 and suction pipe 210, and suction nozzle 220 and suction pipe 210 are connected, inhaled
Mouth 220 is communicated with the inside of suction pipe 210.In view of absorption is generated using pressure difference, it is contemplated that transported to transport object 400
Safety in journey can produce big pressure difference so adsorption structure 200 needs to have stronger adsorption capacity, therefore, this
The adsorption structure 200 of scheme by suction nozzle 220 and suction pipe 210 constitute, suction nozzle 220 and suction pipe 210 connect, suction nozzle 220 and suction pipe
210 inside communicates, and suction nozzle 220 is on the surface acted directly on to transport object 400, suction pipe 210 by suction nozzle 220 with wait transport
Gas exhaustion between object 400, to manufacture suction nozzle 220 and to the pressure difference between transport object 400, because adsorption structure 200 can
Control, so absorption pressure is controllable, then can guarantee the stability of absorption, the conveying safety for treating transport object 400 can also be with
Guarantee, and adsorb grasping movement be it is partially flexible, transport object 400 will not be treated substantially and damaged.
In one embodiment, sensor 130 is respectively provided in each handling module 121.In view of each right to transport object 400
Multiple handling modules 121 are answered, if sensor 130 is positioned only in one of handling module 121, then would become hard to identify wait remove
Send object 400 to put inclined situation, put partially if not identifying to transport object 400, handling module 121 will continue to treat transport object 400 into
Row crawl, will lead to and be damaged to transport object 400, and therefore, this programme is respectively provided with sensor 130 in each handling module 121,
It may insure to treat the induction that transport object 400 is put inclined situation in this way, can effectively avoid the crawl of next handling module 121
The damage of transport object 400 is treated in movement, saves the cost to transport object 400, while also avoiding stopping when transport object 400 is damaged
Between working hour, and then improve the working efficiency cut to transport object 400.
In one embodiment, handling module 121 includes fixture 300, is configured as grabbing by way of clamping wait transport
Object 400.Handling module 121 is fixture 300, i.e., is grabbed by way of clamping to transport object 400, fixture 300 is by treating
Transport object 400 applies a pair of symmetrical pressure, makes to be firmly fixed among the symmetrical pressure to transport object 400, substantially not
It can relax, except its release of non-controlling, therefore, handling module 121 is set as fixture 300 by this programme, it is ensured that treats transport object
400 crawl and the stability of conveying.
In one embodiment, fixture 300 includes maxilla 310, lower jaw 320 and cushion 330, and cushion 330 is arranged upper
On the face opposite with lower jaw 320 of jaw 310, maxilla 310 and lower jaw 320 are harmonious clamping to transport object 400.General fixture 300 wraps
Maxilla 310 and lower jaw 320 are included, wherein maxilla 310 and lower jaw 320 are usually to be made of the material with higher hardness, in this way
Maxilla 310 and lower jaw 320 are directly contacted and are clamped after transport object 400, if the hardness to transport object 400 is less than 310 He of maxilla
The hardness of lower jaw 320, then may damage to transport object 400.Therefore, this programme face opposite with lower jaw 320 in maxilla 310
Upper setting cushion 330, in this way maxilla 310 and lower jaw 320 closure clamping when transport object 400, cushion 330 directly with to
Transport object 400 contacts and conducts the pressure of maxilla 310 and lower jaw 320, can be to avoid the higher maxilla 310 of hardness and lower jaw 320
Directly contact is avoided treating transport object 400 and is damaged to transport object 400.
In one embodiment, cushion 330 is made of rubber material.In view of rubber product have it is good flexible and
Biggish coefficient of friction, and have that manufacturing technology is mature, raw material is extensive, the at low cost and properties such as pollution-free, it is very applicable
In as buffering and put friction member.Therefore, this programme cushion 330 is made of rubber material, can be protected to transport object
400 by maxilla 310 and lower jaw 320 from being damaged, and the clamping that can also increase maxilla 310 and lower jaw 320 is secured to transport object 400
Property.
As shown in Figure 3 and Figure 6, as another embodiment of the present invention, a kind of carrying device 100 is disclosed, is applied to glass
Glass substrate, including board 110 and transporter 120, transporter 120 are located at the end of board 110, are configured as conveying glass substrate
410；Sensor 130 is located on transporter 120, is configured as induction glass substrate 410；Each glass substrate 410 is two corresponding
Sensor 130；Transporter 120 includes handling module 121, and 121 quilt of handling module 121 in handling module is arranged in sensor 130
It is configured to crawl glass substrate 410；The corresponding sensor 130 of each glass substrate 410 includes that first sensor 131 and second pass
The both ends that sensor 132, first sensor 131 and second sensor 132 respectively correspond glass substrate 410 are arranged；Handling module 121
Including adsorption structure 200, adsorption structure 200 includes suction nozzle 220 and suction pipe 210, and suction nozzle 220 and suction pipe 210 connect, suction nozzle 220
It is communicated with the inside of suction pipe 210；Adsorption structure 200 is configured as grabbing glass substrate 410 by way of absorption.
Make corresponding two sensors 130 of each glass substrate 410, and sensor 130 is distributed in the two of glass substrate 410
End, such glass substrate 410 are slightly put partially, will be sensed by sensor 130, avoid grabbing for next transporter 120
The damage acted to glass substrate 410 is taken, to save the cost of glass substrate 410, while glass substrate 410 also being avoided to damage
Downtime when bad, and then improve the working efficiency that glass substrate 410 is cut；The sensor of end positions to transport object 400
130 can cooperate and treat transport object 400 and be incuded, and can incude to which whether transport object 400 puts partially, to avoid next
The grasping movement of handling module 121 treats the damage of transport object 400, saves the cost to transport object 400, at the same also avoid to
Downtime when transport object 400 is damaged, and then improve the working efficiency cut to transport object 400；Handling module 121 is set as having
Have the structure of adsorption function, grabbed by way of absorption to transport object 400 because absorption grasping movement be it is partially flexible,
Substantially transport object 400 will not be treated to damage, can to avoid handling module 121 crawl to be damaged during transport object 400
Badly to transport object 400, conveying efficiency is improved；In view of absorption is generated using pressure difference, it is contemplated that transported to transport object 400
Safety in the process can produce big pressure difference so adsorption structure 200 needs to have stronger adsorption capacity, therefore,
The adsorption structure 200 of this programme by suction nozzle 220 and suction pipe 210 constitute, suction nozzle 220 and suction pipe 210 connect, and suction nozzle 220 and inhale
The inside of pipe 210 communicates, and suction nozzle 220 is on the surface acted directly on to transport object 400, suction pipe 210 by suction nozzle 220 with wait remove
The gas between object 400 is sent to exhaust, to manufacture suction nozzle 220 and to the pressure difference between transport object 400, because of adsorption structure 200
Controllably, so absorption pressure is controllable, then can guarantee the stability of absorption, the conveying safety for treating transport object 400 can also
With guarantee, and adsorb grasping movement be it is partially flexible, transport object 400 will not be treated substantially and damaged.
As shown in Fig. 3 to Fig. 7, as another embodiment of the present invention, a kind of diced system 600, including cutting are disclosed
Device 500 and as above any carrying device 100, cutter device 500 and carrying device 100 are arranged side by side, and cutter device 500
Staggered relatively with the transporter 110 of carrying device 100, carrying device 100 will be transported to by transporter 110 to transport object 400
Cutter device 500 carries out cutting operation specific steps
S11: sensor 130 is sensed to transport object 400, feeds back information to handling module 121；
S12: handling module 121 judges according to 130 feedback information of sensor；
S13: sensor 130 is sensed to be put partially to transport object 400, and handling module 121 does not execute grasping movement；
S14: sensor 130 is sensed not to be put partially to transport object 400, and handling module 121 executes grasping movement；
S15: handling module 121 will be transported to transport object 400 to cutter device 500；
S16: cutter device 500 treats transport object 400 and carries out cutting operation.
It should be noted that the restriction for each step being related in this programme, in the premise for not influencing concrete scheme implementation
Under, it does not regard as being can be the step of making restriction to step sequencing, write on front what is first carried out, be also possible to
It executes, is possibly even performed simultaneously afterwards, as long as this programme can be implemented, all shall be regarded as belonging to protection model of the invention
It encloses.
Technical solution of the present invention can be widely applied to the glass substrate of various display panels, as TN type display panel is (complete
Referred to as Twisted Nematic, i.e. twisted nematic panel), IPS type display panel (In-Plane Switching, plane turn
Change), VA type display panel (Vertical Alignment, vertical orientation technology), MVA type display panel (Multi-domain
Vertical Alignment, more quadrant vertical orientation technologies), it is of course also possible to be the glass of other kinds of display panel
Substrate can be with such as organic light emitting display panel (organic light-emitting diode, abbreviation OLED display panel)
It is other cutting machines and non-cutting machine, is applicable in.
The above content is specific optional embodiment is combined, further detailed description of the invention, cannot recognize
Fixed specific implementation of the invention is only limited to these instructions.For those of ordinary skill in the art to which the present invention belongs,
Without departing from the inventive concept of the premise, a number of simple deductions or replacements can also be made, all shall be regarded as belonging to the present invention
Protection scope.
Claims (10)
1. a kind of carrying device characterized by comprising
Board；
Transporter is configured as conveying to transport object positioned at the end of the board；
Sensor is located on the transporter, is configured as induction to transport object；
Each to corresponding at least two sensors of transport object.
2. a kind of carrying device as described in claim 1, which is characterized in that the transporter includes handling module, the biography
Sensor is arranged in the handling module, and it is described to transport object that the handling module is configured as crawl；
Each described to the corresponding sensor of transport object includes first sensor and second sensor, the first sensor
The both ends to transport object are respectively corresponded with the second sensor to be arranged.
3. a kind of carrying device as claimed in claim 2, which is characterized in that the handling module includes adsorption structure, is matched
It is set to and is grabbed by way of absorption to transport object.
4. a kind of carrying device as claimed in claim 3, which is characterized in that the adsorption structure includes suction nozzle and suction pipe, institute
It states suction nozzle to connect with the suction pipe, the suction nozzle is communicated with the inside of the suction pipe.
5. a kind of carrying device as claimed in claim 2, which is characterized in that be respectively provided with the biography in each handling module
Sensor.
6. a kind of carrying device as claimed in claim 2, which is characterized in that the handling module includes fixture, is configured as
It is grabbed by way of clamping described to transport object.
7. a kind of carrying device as claimed in claim 6, which is characterized in that the fixture includes maxilla, lower jaw and cushion,
The cushion is arranged on the maxilla face opposite with lower jaw, the maxilla matched with the lower jaw clamp it is described to
Transport object.
8. a kind of carrying device as claimed in claim 7, which is characterized in that the cushion is made of rubber material.
9. a kind of carrying device is applied to glass substrate characterized by comprising
Board；
Transporter is configured as conveying glass substrate positioned at the end of the board；
Sensor is located on the transporter, is configured as induction glass substrate；
Corresponding two sensors of each glass substrate；
The transporter includes handling module, and the sensor is arranged in the handling module, and the handling module is configured
To grab glass substrate；
The corresponding sensor of each glass substrate includes first sensor and second sensor, the first sensor
The both ends for respectively corresponding the glass substrate with the second sensor are arranged；
The handling module includes adsorption structure, and the adsorption structure includes suction nozzle and suction pipe, and the suction nozzle and the suction pipe connect
It connects, the suction nozzle is communicated with the inside of the suction pipe；The adsorption structure is configured as grabbing glass base by way of absorption
Plate.
10. a kind of diced system, which is characterized in that including cutter device and conveying as claimed in any one of claims 1 to 9
Device, the cutter device and the carrying device are arranged side by side, and the cutter device is opposite with the transporter of the carrying device
It places, the carrying device is transported to the cutter device progress cutting operation to transport object for described by transporter.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811579701.XA CN109592413B (en) | 2018-12-24 | 2018-12-24 | Carrying device and cutting system |
| PCT/CN2019/073587 WO2020133627A1 (en) | 2018-12-24 | 2019-01-29 | Conveying device and cutting system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811579701.XA CN109592413B (en) | 2018-12-24 | 2018-12-24 | Carrying device and cutting system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109592413A true CN109592413A (en) | 2019-04-09 |
| CN109592413B CN109592413B (en) | 2021-08-06 |
Family
ID=65964232
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811579701.XA Active CN109592413B (en) | 2018-12-24 | 2018-12-24 | Carrying device and cutting system |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN109592413B (en) |
| WO (1) | WO2020133627A1 (en) |
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| JP2005193303A (en) * | 2003-12-26 | 2005-07-21 | Mitsubishi Heavy Ind Ltd | Substrate transporting device |
| WO2009126899A2 (en) * | 2008-04-10 | 2009-10-15 | Applied Materials, Inc. | Laser-scribing platform |
| CN102464210A (en) * | 2010-11-11 | 2012-05-23 | 株式会社Siti | Substrate carrying device |
| CN104743361B (en) * | 2013-12-25 | 2017-07-21 | 昆山国显光电有限公司 | Base plate transfer device |
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|---|---|---|---|---|
| CN205264677U (en) * | 2014-11-07 | 2016-05-25 | 应用材料公司 | Robot and base plate processing system |
| CN105609453A (en) * | 2014-11-11 | 2016-05-25 | 沈阳新松机器人自动化股份有限公司 | Semiconductor wafer transmission device |
| CN105035742A (en) * | 2015-07-23 | 2015-11-11 | 苏州宏瑞达新能源装备有限公司 | Automatic clamping device |
| CN207551346U (en) * | 2017-03-07 | 2018-06-29 | 迅得机械（东莞）有限公司 | Suction device with quick release function |
| CN207046437U (en) * | 2017-03-21 | 2018-02-27 | 东旭科技集团有限公司 | Base plate glass fetching device |
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Also Published As
| Publication number | Publication date |
|---|---|
| WO2020133627A1 (en) | 2020-07-02 |
| CN109592413B (en) | 2021-08-06 |
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