CN109557769A - Objective table driving device and describing device - Google Patents
Objective table driving device and describing device Download PDFInfo
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- CN109557769A CN109557769A CN201810897201.4A CN201810897201A CN109557769A CN 109557769 A CN109557769 A CN 109557769A CN 201810897201 A CN201810897201 A CN 201810897201A CN 109557769 A CN109557769 A CN 109557769A
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- bottom plate
- objective table
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- mover
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2004—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
- G03F7/70866—Environment aspects, e.g. pressure of beam-path gas, temperature of mask or workpiece
- G03F7/70875—Temperature, e.g. temperature control of masks or workpieces via control of stage temperature
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- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Atmospheric Sciences (AREA)
- Toxicology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Linear Motors (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Machine Tool Units (AREA)
Abstract
Objective table driving device (5) of the invention includes: the bottom plate (51) for being provided with objective table, a pair of guide rails, a pair of guide rails holding section (53) engaged respectively with a pair of guide rails, makes mover (546) to the mobile linear motor of moving direction and mover (546) can be fixed on to the mover fixed part (55) of bottom plate (51).In the lower surface (512) of bottom plate (51), will comprising be used to install a pair of guide rails holding section (53) multiple installation regions (A11) minimum rectangular area as region-of-interest (A12), the fixation position (P11) of mover fixed part (55) is fixed in bottom plate (51) positioned at the position than region-of-interest (A12) closer to the outside of moving direction.Thereby, it is possible to inhibit the thermal expansion of the region-of-interest (A12) of bottom plate (51).
Description
Technical field
The present invention relates to a kind of objective table driving device and describing devices.
Background technique
In the prior art, pattern is drawn into the describing device on the photosensitive material of substrate and has been obtained without using mask
Functionization.Objective table driving device and light injection part are provided on describing device.Objective table driving device makes on objective table
Substrate it is mobile relative to light injection part together with objective table.Synchronously, substrate is shone in the modulation of light injection part for movement with substrate
The light penetrated, to draw pattern on substrate (photosensitive material).From the viewpoint of driving stability, usually in above-mentioned loading
Following structure is used in platform driving device, that is, in the lower surface center configuration driven portion for the bottom plate for being provided with objective table, and
A pair of of guiding mechanism is configured across the two sides of the driving portion.In addition, using linear motor to ensure high thrust and speed stability
As driving portion.
In addition, being disclosed in Japanese Unexamined Patent Publication 2004-88981 bulletin: by tables by linear motor include electricity
In the mover of pivot coil and the driving guide device of the movable block of guiding mechanism connection, by be arranged between mover and tables every
Hot material or insulated space, the method for preventing the heat generated by mover to be transmitted to movable block.In addition, in International Publication No.
It discloses: is provided between mover and estrade in the driving guide device of radiator in No. WO2008-123287, setting makes not
The heat that can be dispersed by radiator is conducted to the heat-transfer path of tables, and constitutes tables by the low material of thermal expansion coefficient,
Method to which the heat generated by mover be effectively dissipated.
As described above, the lower surface of the bottom plate in objective table driving device, using its central portion as region-of-interest, containing dynamic
The linear motor of son and stator is configured in the opposite position with the region-of-interest, and a pair of of guidance is arranged across the region-of-interest
Mechanism.In objective table driving device so, the mover because being fixed on region-of-interest causes region-of-interest to be heated due to fever.
In describing device, lifting mechanism for objective table etc. is provided with objective table in the upper face center portion of bottom plate, therefore, because bottom plate
The thermal expansion of region-of-interest, lead to describing device draws accuracy decline.
Summary of the invention
The present invention provides a kind of objective table driving device, and its object is to inhibit the thermal expansion of the region-of-interest of bottom plate.
Objective table driving device of the invention, comprising: bottom plate, it is opposite with the first main surface and above-mentioned first main surface
Second main surface of side, and objective table is provided in above-mentioned first main surface, a pair of guide rails is configured in the upper of above-mentioned bottom plate
State the second main surface side with extend on the moving direction of above-mentioned second major surfaces in parallel, and it is main being parallel to above-mentioned second
Surface and perpendicular to being separated from each other in the width direction of above-mentioned moving direction, a pair of guide rails holding section is installed on above-mentioned bottom plate, and
Can engage respectively in the state of mobile on above-mentioned moving direction with above-mentioned a pair of guide rails, linear motor has and includes line
The mover of circle and stator comprising permanent magnet, and above-mentioned a pair of guide rails is configured in the above-mentioned second main surface side of above-mentioned bottom plate
Between, it moves above-mentioned mover on above-mentioned moving direction and mover fixed part, above-mentioned mover can be fixed on above-mentioned bottom
Plate；In above-mentioned second main surface of above-mentioned bottom plate, by multiple installing zones comprising being used to install above-mentioned a pair of guide rails holding section
The minimum rectangular area in domain as region-of-interest, in above-mentioned bottom plate for fix the fixed bit of above-mentioned mover fixed part setting in than
Above-mentioned region-of-interest more leans on the position in the outside of above-mentioned moving direction or above-mentioned width direction.
In accordance with the invention it is possible to inhibit the thermal expansion of the region-of-interest of bottom plate.
In a preferred embodiment of the present invention, above-mentioned a pair of guide rails holding section is separately contained in above-mentioned moving direction point
Multiple bootstrap blocks on above-mentioned bottom plate are opened and are mounted on, there are four installing zones for setting in above-mentioned second main surface of above-mentioned bottom plate
Two bootstrap blocks at the both ends in multiple above-mentioned bootstrap blocks that domain, aforementioned four installation region and a guide rail holding section are included
And another guide rail holding section included multiple above-mentioned bootstrap blocks in both ends two bootstrap blocks it is corresponding, and on including
The minimum rectangular area for stating four installation regions is comprised in above-mentioned region-of-interest.
Other preferred embodiments according to the present invention, in above-mentioned bottom plate, for fixing consolidating for above-mentioned mover fixed part
Determine region entirety and is located at position than above-mentioned region-of-interest closer to the outside on above-mentioned moving direction or in above-mentioned width direction
It sets.
Another preferred embodiment according to the present invention, the above-mentioned fixed bit of above-mentioned mover fixed part is setting in than above-mentioned pass
Position of the note region closer to the outside on above-mentioned moving direction.
In one aspect of the present invention, above-mentioned mover fixed part includes the first supporting member, extends on above-mentioned moving direction,
And a pair of second supporting member, it is respectively arranged in the both ends of above-mentioned first supporting member and is fixed on above-mentioned bottom plate；Upper
State in bottom plate, the fixed bit of fixed each above-mentioned second supporting member setting in than above-mentioned region-of-interest closer to above-mentioned movement side
The position in upward outside.
At this time, it is preferable that each above-mentioned second supporting member extends in above-mentioned width direction, at each above-mentioned second
The both ends of bearing member are provided with a pair of of protrusion, and the above-mentioned region-of-interest of ratio in above-mentioned bottom plate more leans on above-mentioned moving direction
The position in outside, a pair of above-mentioned protrusion are fixed in two ends in above-mentioned width direction respectively.
The present invention is also towards the describing device for drawing pattern on object.Describing device of the invention includes objective table
Driving device maintains object on objective table, and light injection part is modulated the light from light source and on above-mentioned objective table
Object irradiation and control unit, control above-mentioned objective table driving device and above-mentioned smooth injection part.
By to the detailed description that carries out of the present invention, can specify referring to the drawings above-mentioned purpose of the invention and other
Purpose, feature, embodiment and advantage.
Detailed description of the invention
Fig. 1 is the figure for indicating the composition of describing device.
Fig. 2 is the main view for indicating objective table driving device.
Fig. 3 is the side view for indicating a part of objective table driving device.
Fig. 4 is the bottom view for indicating a part of objective table driving device.
Fig. 5 is the figure of the installation region for indicating guide rail holding section and the fixation position of mover fixed part.
Fig. 6 is the figure for indicating the objective table driving device of comparative example.
Fig. 7 is the figure for indicating the objective table driving device of comparative example.
Fig. 8 is other the figure for indicating objective table driving device.
Fig. 9 is other the figure for indicating objective table driving device.
The explanation of appended drawing reference:
1 describing device
2 control units
3 smooth injection parts
5 objective table driving devices
9 substrates
31 light sources
41 objective tables
51 bottom plates
52 guide rails
53 guide rail holding sections
54 linear motors
55 mover fixed parts
56 first supporting members
56a, 56b supporting member
57 second supporting members
511 (bottom plate) main surfaces
512 (bottom plate) lower surfaces
531 bootstrap blocks
541 stators
546 movers
571 (the second supporting member) protrusions
The installation region A11
A12 region-of-interest
P11 fixes position
Specific embodiment
Fig. 1 is the figure for indicating the composition of describing device 1 of an embodiment of the present invention.In Fig. 1, by mutually orthogonal three
Direction is as X-direction, Y-direction and Z-direction and (in other figures also identical) indicated by an arrow.In the example of Fig. 1, X-direction and the side Y
To for horizontal direction, Z-direction is vertical direction.According to the design of describing device 1, Z-direction can be is relative to vertical direction
Inclined direction, or be horizontal direction.
Describing device 1 is the photosensitive material being radiated at light on the substrates such as printed base plate 9, to retouch on the photosensitive material
The device of the pattern of painting canvas line etc..Describing device 1 has control unit 2, multiple smooth injection parts 3, objective table 41, lifting of object loading table machine
Structure 4 and objective table driving device 5.Control unit 2 controls multiple smooth injection parts 3, lifting mechanism for objective table 4 and objective table driving dress
Set 5.Objective table 41 keeps substrate 9 in the lower section (side (- Z)) of light injection part 3.It is (following that multiple smooth injection parts 3 are arranged in X-direction
Referred to as " width direction ").Each smooth injection part 3 has light source 31 and light modulation unit 32.Light source 31 is projected to light modulation unit 32 to swash
Light, light modulation unit 32 modulate the light from light source 31.By the substrate on the modulated illumination directive objective table 41 of light modulation unit 32
9.As light modulation unit 32, such as use DMD (Digital Micromirror made of multiple optical modulation element two-dimensional arrangements
Device: Digital Micromirror Device) etc..Light modulation unit 32 is also possible to modulator made of multiple optical modulation element one dimensional arrangements
Deng.
Lifting mechanism for objective table 4 keeps objective table 41 mobile along Z-direction (hereinafter referred to as " up and down direction ").Objective table driving dress
Setting 5 keeps objective table 41 and lifting mechanism for objective table 4 mobile along Y-direction (hereinafter referred to as " moving direction ") together.As a result, by light tune
The irradiation position of the modulated light in portion 32 processed moves along direction scanning on substrate 9.In describing device 1, driven with objective table
The movement of objective table 41 caused by dynamic device 5 synchronously controls light injection part 3, thus draws pattern on substrate 9.Drawing dress
It sets in 1, also can be omitted lifting mechanism for objective table 4, can also be arranged makes objective table 41 centered on the axis parallel with Z-direction
The rotating mechanism rotated.
Fig. 2 is the main view for indicating objective table driving device 5.Fig. 3 is the side for indicating a part of objective table driving device 5
View, it is shown that the objective table driving device 5 when from the lateral direction (+X) (- X).In Fig. 3, indicate aftermentioned with double dot dash line
Guide rail 52, and the diagram of the stator 541 of linear scale 59 and linear motor 54 is omitted.Fig. 4 is to indicate that objective table drives
The bottom view of a part of device.The diagram of stator 541 is omitted in Fig. 4.
Objective table driving device 5 have bottom plate 51, a pair of guide rails 52, a pair of guide rails holding section 53, linear motor 54 and
Mover fixed part 55.Bottom plate 51 is the plate of rectangle, and extends on the direction vertical with up and down direction.Bottom plate 51 is by metal shape
At, such as formed by carbon steels such as SS400.Bottom plate 51 has the opposite side of first main surface 511 and the main surface 511 of the side (+Z)
The second main surface 512 (main surface of the side (- Z), hereinafter referred to as " lower surface 512 ").As shown in Fig. 2, in the main table of bottom plate 51
On face 511, above-mentioned lifting mechanism for objective table 4 and objective table 41 are set.In addition, according to the design of objective table driving device 5,
The main surface 511 of bottom plate 51 can be used as objective table.
A pair of guide rails 52 is fixed on base station 10 in 512 side of the lower surface of bottom plate 51 (side (- Z)).A pair of guide rails 52 with
Extend on the parallel moving direction in lower surface 512 (Y-direction), and is being parallel to lower surface 512 and perpendicular to moving direction
It is separately from each other in width direction (X-direction).A pair of guide rails holding section 53 is installed on the lower surface 512 of bottom plate 51, and with one
Guide rail 52 is engaged respectively.In objective table driving device 5, a pair is constituted by a pair of guide rails holding section 53 and a pair of guide rails 52 and is drawn
Lead mechanism.
As shown in figure 4, respectively there are two bootstrap blocks 531 for tool for a pair of guide rails holding section 53.The two of each guide rail holding section 53
A bootstrap block 531 is separated from each other in the direction of movement and is installed on the lower surface 512 of bottom plate 51.Two bootstrap blocks 531 exist
Identical position is configured in width direction.In four bootstrap blocks 531 that a pair of guide rails holding section 53 is included, it is set to (+Y)
Two bootstrap blocks 531 of side are configured at mutually the same position in the direction of movement, and two bootstrap blocks 531 for being set to the side (- Y) exist
Mutually the same position is configured on moving direction.
Each bootstrap block 531 is engaged with the state that can be moved in the direction of movement with guide rail 52.By bootstrap block 531 with
The engaging of guide rail 52, the position of bootstrap block 531 in the direction of the width are fixed relative to guide rail 52.In other words, when only considering width
When direction, in the lower surface of bottom plate 51 512, the installation region A11 for installing bootstrap block 531 is fixed relative to guide rail 52.Installation
Region A11 is the region contacted with bootstrap block 531 in lower surface 512.As guide rail 52 and bootstrap block 531, such as can benefit
With LM rolling guide (LM GUIDE (Linear Motion Guide), registered trademark).
As shown in Fig. 2, linear motor 54 is configured between a pair of guide rails 52 in 512 side of the lower surface of bottom plate 51.Linearly
Motor 54 has the stator 541 comprising permanent magnet and the mover comprising coil 546.Stator 541 extends in the direction of movement
It is blocky.In the side in court direction (+X) of stator 541, slot is provided in the length range of the length direction of the stator 541
542.Slot 542 extends along the face (X/Y plane) perpendicular to up and down direction.The shape of stator 541 when along moving direction observation is
U-shaped of the opening portion towards the direction (+X).In stator 541, set at the position of side (+Z) across slot 542 and the position of the side (- Z)
It is equipped with permanent magnet.Stator 541 is fixed on base station 10.
Mover 546 has in the coil part 547 of the plate vertical with up and down direction and in the plate vertical with width direction
Base portion 548.Length on the moving direction of coil part 547 is greater than the width in width direction (referring to Fig. 4).Coil part 547
On be provided with coil.The end of side (+X) of coil part 547 is connected with base portion 548.Coil part 547 is configured at the slot of stator 541
542 inside.That is, in stator 541 between the position of the above-mentioned side (+Z) of slot 542 and the position of the side (- Z), coil part
547 with the discontiguous state configuration in the position at position and the side (- Z) with the above-mentioned side (+Z).In linear motor 54, by province's sketch map
The mobile control division shown controls the electric current of the coil for flowing through mover 546, mover 546 relative to stator 541 in the direction of movement
It is mobile.Mover 546 is kept by mover fixed part 55, is not contacted with bottom plate 51.
Mover fixed part 55 has maintainance block 551, the first supporting member 56 and a pair of second supporting member 57.This implementation
In mode, maintainance block 551, the first supporting member 56 and the second supporting member 57 are to form (example by material identical with bottom plate 51
Such as SS400 carbon steel).In addition, these components can also be formed by the material different from bottom plate 51.Maintainance block 551 is in movement side
The bulk upwardly extended.The base portion 548 of mover 546 is installed on court direction (- X) of maintainance block 551 by modes such as bolt links
Face.The length of maintainance block 551 on moving direction is slightly longer than mover 546, the mover 546 on moving direction it is almost whole with
Maintainance block 551 contacts.Radiator 552 is installed on the face in court direction (+X) of maintainance block 551.
First supporting member 56 be extend in the direction of movement it is rodlike, for example, with rectangle section.Maintainance block 551
It is mounted in the first supporting member 56.Specifically, as shown in figure 3, being arranged on the face in court direction (+Z) of maintainance block 551
There are multiple protrusions 553.Multiple protrusions 553 are in the direction of movement across being alternatively arranged.Multiple protrusions 553 are connected by bolt
The modes such as knot are fixed in the face in direction court (- Z) of the first supporting member 56.Two adjacent protrusions in the direction of movement
Between 553, maintainance block 551 is separated with the first about 56 supporting member.
As shown in figure 4, each second supporting member 57 is extended in the direction of the width rodlike.For example, with rectangle
Section.Bottom plate 51 is respectively configured in the outside at the both ends of moving direction in a pair of second supporting member 57.A pair of second supporting member
57 is opposite with two end faces 513 on the moving direction of bottom plate 51 respectively.In the direction of the width, each second supporting member 57
Length is roughly the same with the width of bottom plate 51.The both ends of second supporting member 57 are respectively arranged with a pair of of protrusion 571.A pair is prominent
It is prominent to play both ends of the portion 571 in the width direction of the end face of bottom plate 51 513.Each protrusion 571 passes through bolt link mode
It is fixed on the end face 513 of bottom plate 51.Between a pair of of protrusion 571 in the direction of the width, the second supporting member 57 and bottom plate
51 end face 513 separates in the direction of movement.
As shown in figure 3, the thickness of the second supporting member 57 in above-below direction is slightly larger than the thickness of bottom plate 51.In above-below direction
On, the face of side (+Z) of the second supporting member 57 configures on the position roughly the same with the main surface 511 of bottom plate 51.Second
The face of side (- Z) of bearing member 57 configures on the position of the more partial below of lower surface 512 (side (- Z)) than bottom plate 51.First
The both ends of bearing member 56 are located at the outside of bottom plate 51 in the direction of movement.The direction court (+Z) at the both ends of the first supporting member 56
Face is respectively arranged on the face in court direction (- Z) of a pair of second supporting member 57 by bolt link mode.As described above, by
It configures in the face of side (- Z) of the second supporting member 57 in the position of the more partial below of lower surface 512 than bottom plate 51, therefore, first
Supporting member 56 separates on entire moving direction up and down with the lower surface 512 of bottom plate 51.According to the above structure, mover fixed part
55 can be fixed on mover 546 on bottom plate 51.
As shown in figure 4, objective table driving device 5 also has linear scale 59.Linear scale 59 has scale 591 and sliding block
592.Scale 591 extends in the direction of movement, and is arranged in base station 10 (referring to Fig. 2).Sliding block 592 is mounted under bottom plate 51
End on the moving direction on surface 512.In the example of Fig. 4, in the direction of the width, the configuration of sliding block 592 engages in a guide rail
Between the bootstrap block 531 of side (+Y) of the bootstrap block 531 and another guide rail holding section 53 of the side (+Y) in portion 53.Sliding block 592 with
Scale 591 is opposite in the direction of the width with contactless state.Sliding block 592 has illumination region and acceptance part, and according to from scale
591 reflected light detects the position of the sliding block 592 on moving direction.In objective table driving device 5, in addition to optical linear scale
Except, magnetic linear scale etc. also can be used.
Fig. 5 is to indicate to install the installation region A11 of guide rail holding section 53 and consolidating for fixed mover fixed part 55 in bottom plate 51
The figure of P11 is set in positioning.It is only that bottom plate 51, a pair of guide rails holding section 53 and mover fixed part 55 is indicated by the solid line in Fig. 5, mover
546 are indicated with double dot dash line.In addition, adding the parallel diagonal lines at narrow interval to each installation region A11.
Here, paying close attention to minimum rectangular area A12 (hereinafter referred to as " region-of-interest for the lower surface 512 of bottom plate 51
A12 "), minimum rectangular area A12 is in multiple (whole) installation region A11 including being equipped with a pair of guide rails holding section 53
Region.In the objective table driving device 5 of Fig. 5, it is provided on the lower surface of bottom plate 51 512 and is wrapped with a guide rail holding section 53
Two bootstrap blocks, 531 corresponding four installation regions that two bootstrap blocks 531 and another guide rail holding section 53 contained are included
A11.Therefore, as being indicated in Fig. 5 such as the parallel diagonal lines of addition wide interval, the minimum square comprising four installation region A11
Shape region becomes region-of-interest A12.Region-of-interest A12 and is contained using four installation region A11 as the rectangular area of apex angle
The central portion of bottom plate 51.Lifting mechanism for objective table 4 is provided with objective table 41 in the central portion of bottom plate 51.Therefore, to drawing
For device 1, region-of-interest A12 is considered as the region for having larger impact to the precision that pattern is drawn.In addition, a pair of guide rails card
Three or more bootstrap blocks being installed on bottom plate 51 in a manner of separating in the direction of movement also can be respectively arranged in conjunction portion 53
531.In this case, two bootstrap blocks at both ends are located in the multiple bootstrap blocks 531 for being included with a guide rail holding section 53
531 and another guide rail holding section 53 included multiple bootstrap blocks 531 in be located at both ends two bootstrap blocks 531 corresponding four
The minimum rectangular area of a installation region A11 becomes region-of-interest A12.
When being observed along up and down direction, the mover 546 of linear motor 54 (referring to the mover 546 of double dot dash line in Fig. 5) with
The region-of-interest A12 (and central portion) of bottom plate 51 is overlapped.Mover 546 is not contacted with bottom plate 51, for keeping the dynamic of mover 546
In sub- fixed part 55, the protrusion 571 of the second supporting member 57 is fixed in the end face 513 of bottom plate 51.Mover fixed part 55
Other parts are not contacted with bottom plate 51.If each contact area by mover fixed part 55 and bottom plate 51 (is each prominent herein
Play the contact area in portion 571 and end face 513) center of gravity be defined as fixed position P11, then fix position P11 as the end of bottom plate 51
The end of face 513 in the direction of the width.As above, the fixed position P11 of mover fixed part 55 is located at than region-of-interest A12 in bottom plate 51
Closer to the position in the outside on moving direction.In addition, when by be used to fix in bottom plate 51 mover fixed part 55 region (that is,
Above-mentioned contact area) when being known as fixed area, fixed area is integrally located at than region-of-interest A12 closer to outer on moving direction
The position of side.In the example of fig. 5, fixed area is set to the end face 513 of bottom plate 51.
When driving objective table driving device 5, the electric current of the coil of mover 546 is flowed through in mobile control division control, to make
Mover 546 moves in the direction of movement relative to stator 541.It is fixed on mover 546 via mover fixed part 55 as a result,
Bottom plate 51 moves in the direction of movement.At this point, the coil heating of mover 546.A part of heat of mover 546 is fixed by mover
Radiator 552 (referring to Fig. 2) in the maintainance block 551 in portion 55 is released to extraneous gas.Another part heat of mover 546 passes through
The first supporting member 56 and the second supporting member 57 of strip are released to extraneous gas.The remaining heat of mover 546 is via
One supporting member 56 and the second supporting member 57 are conducted to the end face of bottom plate 51 513.As a result, near the end face of bottom plate 51 513
Position generate thermal expansion.On the other hand, in the region-of-interest for the fixation position P11 (fixed area) for leaving mover fixed part 55
At A12, the thermal expansion of bottom plate 51 is inhibited.In other words, can be avoided in bottom plate 51 than region-of-interest A12 closer to movement
Position on the outside of direction is deformed due to caused by thermal expansion.
Here, the objective table driving device of narration comparative example.Fig. 6 and Fig. 7 is the objective table driving device 8 for indicating comparative example
Figure, respectively correspond Fig. 2 and Fig. 3.In Fig. 6 and Fig. 7, the range of region-of-interest is illustrated with arrow A82.Loading to comparative example
For platform driving device 8, in mover fixed part 85, the maintainance block 851 for being fixed with mover 846 is fixed on the following table of bottom plate 81
On face 812.In Fig. 6 and Fig. 7, the fixed area A83 that maintainance block 851 is fixed in bottom plate 81 is indicated with thick line.In addition, comparing
In the objective table driving device 8 of example, a pair of guide rails 82 and a pair of guide rails holding section 83 are identical as in objective table driving device 5.
In the objective table driving device 8 of comparative example, the fixation position of mover fixed part 85 is actually mover fixed part 85
Fixed area A83 almost all be comprised in region-of-interest A82.Therefore, because the heat of mover 846, the pass of bottom plate 81
It infuses and generates thermal expansion in the A82 of region.At this point, the position of bootstrap block 831 is fixed relative to guide rail 82 due in the direction of the width,
So bottom plate 81 generates warpage, and bottom plate 81, which becomes the convex protruded upwards, (also to be had as recessed as shown in double dot dash line in Fig. 6
The situation of shape).When such deformation occurs on bottom plate 81, the pattern of describing device is caused to draw accuracy decline.Further, since
The region-of-interest A82 of bottom plate 81 expands in the direction of movement, between the sliding block of linear scale and each position of region-of-interest A82
Distance can change.In this case, the pattern for also resulting in describing device draws accuracy decline.Also have by with cold
But the magnetism servo-electric motor water-cooling of device carries out the scheme of water cooling to maintainance block 851, but the manufacturing cost of objective table driving device 8 is caused to increase.
In contrast, in objective table driving device 5, the fixation position of mover fixed part 55 is fixed in fixed bottom plate 51
P11 is located at than region-of-interest A12 closer to the position in the outside on moving direction.Thereby, it is possible to inhibit the fever because of mover 546
The thermal expansion of the region-of-interest A12 of caused bottom plate 51.As a result, it is possible to inhibit the warpage because of bottom plate 51, linear scale 59
Between sliding block 592 and each position of region-of-interest A12 caused by variation of distance (distance mainly on moving direction) etc.
The pattern of describing device 1 draws accuracy decline.That is, compared with the describing device of the objective table driving device 8 with comparative example, tool
There is the describing device 1 of objective table driving device 5 to can be improved the precision that pattern is drawn.In addition, not needing the water of maintainance block 851 yet
Cold structure can cut down the manufacturing cost of objective table driving device 5.
In bottom plate 51, the fixed area for being fixed with mover fixed part 55 is integrally located at than region-of-interest A12 closer to shifting
Position on the outside of dynamic direction, so as to more reliably inhibit bottom plate 51 region-of-interest A12 thermal expansion.In addition, pass through by
The fixation position P11 of mover fixed part 55 is set to the end face 513 of bottom plate 51, can further inhibit the concern area of bottom plate 51
The thermal expansion of domain A12.
Mover fixed part 55 includes the first supporting member 56, extends in the direction of movement；And a pair of second supporting member
57, it is separately mounted to the both ends of the first supporting member 56 and is fixed on bottom plate 51.Thereby, it is possible to easily by bottom plate 51
Fixation position, that is, mover fixed part 55 fixation position P11 configuration of two supporting members 57 than region-of-interest A12 closer to shifting
The position in the outside on dynamic direction.In addition, each second supporting member 57 extends in the direction of the width, and structure is supported second
The both ends of part 57 are provided with a pair of of protrusion 571.Also, a pair of protrusion 571 is more than the region-of-interest A12 in bottom plate 51
The position in the outside on moving direction, is separately fixed at two ends in width direction.Thereby, it is possible to further suppress
The thermal expansion of the region-of-interest A12 of bottom plate 51.
In objective table driving device 5, heat follower 546 is transferred to the path of bottom plate 51 by extending in the direction of movement
First supporting member 56 and the second supporting member 57 extended in the direction of the width formation.The path is lengthened as a result, it can be at this
More heats are released in path.As a result, can reduce compared with the objective table driving device 8 of comparative example and be transmitted to bottom plate
51 heat.
Fig. 8 is the figure for indicating the other examples of objective table driving device.In Fig. 8, shown in the same manner as Fig. 5 in bottom plate 51
Installation region A11 and fixed position P11 (in aftermentioned Fig. 9 similarly).It is fixed in the mover of the objective table driving device 5 of Fig. 8
In portion 55, it is provided with supporting member 56a, to replace the first supporting member 56 and the second supporting member 57 of Fig. 5.Mover 546 is pacified
On supporting member 56a.Supporting member 56a extends in the direction of the width, and the both ends of supporting member 56a are located in width direction
Bottom plate 51 outside.The oriented side (+Z) a pair of of protrusion 561 outstanding is respectively set at the both ends of supporting member 56a.It is each
Protrusion 561 by bolt link mode be fixed on bottom plate 51 towards on the side of width direction 514.In entire width direction
On, the lower surface 512 of supporting member 56a and bottom plate 51 separates in the up-down direction.Mover fixed part 55 is fixed in bottom plate 51
Fixation position P11 be located at the center of side 514 in the direction of movement.
In the objective table driving device 5 of Fig. 8, the fixation position P11 of mover fixed part 55 is located at more than region-of-interest A12
The position in the outside in width direction.The region-of-interest of bottom plate 51 caused by thereby, it is possible to inhibit the fever because of mover 546
The thermal expansion of A12.In addition, the fixed area for being fixed with mover fixed part 55 is integrally located at than region-of-interest A12 in bottom plate 51
Closer to the position in the outside of width direction.Thereby, it is possible to more reliably inhibit the thermal expansion of the region-of-interest A12 of bottom plate 51.
By the way that the fixation position P11 of mover fixed part 55 to be arranged on the side 514 of bottom plate 51, bottom plate 51 can be further suppressed
The thermal expansion of region-of-interest A12.
The bootstrap block 531 of the side (+Y) of the fixation position P11 configuration of mover fixed part 55 in the direction of movement and the side (- Y)
Bootstrap block 531 between substantial middle.Therefore, two bootstrap blocks opposite in the direction of the width in bottom plate 51 are able to suppress
Thermal expansion between 531 is able to suppress the generation of warpage in bottom plate 51 (referring to the bottom plate 81 of double dot dash line in Fig. 6).
Fig. 9 is the figure for indicating the other examples of objective table driving device 5.It is each in the objective table driving device 5 of Fig. 9
Guide rail holding section 53 is respectively provided with a bootstrap block 531.Two bootstrap blocks 531 of a pair of guide rails holding section 53 are configured in movement side
Upward same position.Region-of-interest A12 in the lower surface 512 of bottom plate 51 is by the installation region of two bootstrap blocks 531
A11 as outer rim a part and the minimum rectangular area that is formed.Region-of-interest A12 is Chong Die with the central portion of bottom plate 51.
Mover fixed part 55 has the supporting member 56b extended in the direction of movement.Supporting member 56b on moving direction
Length be less than bottom plate 51 length, greater than the length of bootstrap block 531.The both ends of supporting member 56b and the lower surface of bottom plate 51
The region on the outside of both ends on the moving direction of region-of-interest A12 in 512 is opposite.The both ends of supporting member 56b are respectively set
The oriented side (+Z) a pair of of protrusion 561 outstanding.Each protrusion 561 is fixed under bottom plate 51 by modes such as bolt links
Surface 512.In addition to protrusion 561, supporting member 56b is separated in the up-down direction with lower surface 512.
In the objective table driving device 5 of Fig. 9, the fixation position P11 of mover fixed part 55 is located at more than region-of-interest A12
The position in the outside on moving direction.Therefore, it is able to suppress the region-of-interest of bottom plate 51 caused by the fever because of mover 546
The thermal expansion of A12.In addition, the fixed area for being fixed with mover fixed part 55 is integrally located at than region-of-interest A12 in bottom plate 51
Closer to the position in the outside of moving direction.Therefore, the thermal expansion of the region-of-interest A12 of bottom plate 51 can more reliably be inhibited.
In addition, in the objective table driving device 5 of Fig. 9, in order to further suppress the thermal expansion of region-of-interest A12, mover fixed part 55
Fixation position P11 be preferably disposed on the periphery of bottom plate 51.
It, can also be using supporting member 56b as the first supporting member, by protrusion 561 as the second bearing structure in Fig. 9
Part.In this case, mover fixed part 55 includes the first supporting member, extends in the direction of movement；And it is second a pair of
Bearing member is respectively arranged in the both ends of the first supporting member and is fixed on bottom plate 51.It according to this structure, can be easily
The fixation position of second supporting member is configured in the position than region-of-interest A12 closer to the outside of moving direction.
However, existing as shown in the objective table driving device 5 of Fig. 8 when in side (- Z) of bottom plate 51 (512 side of lower surface) setting
When the supporting member 56a extended in width direction, in order to avoid supporting member 56a interferes a pair of guide rails being arranged on base station 10
52 (referring to Fig. 2), need to be arranged larger by the thickness in the Z-direction of bootstrap block 531 etc..In this regard, the objective table in Fig. 9 drives
In device 5, the supporting member 56b extended in the direction of movement is set, can easily avoid supporting member 56b and guide rail 52
Interference.
Above-mentioned objective table driving device 5 and describing device 1 can carry out various modifications.
The fixation position P11 of mover fixed part 55 can also be all located on moving direction and the two directions of width direction
Than region-of-interest A12 closer to the position in outside.In addition, as long as at least one for being fixed with mover fixed part 55 in bottom plate 51 is solid
Positioning is set P11 and is located at than region-of-interest A12 closer to moving direction or the position in the outside of width direction, mover fixed part 55
A part can connect by such as heat-barrier material etc. with region-of-interest A12.It is swollen from the heat for the region-of-interest A12 for inhibiting bottom plate 51
It from the viewpoint of swollen, is fixed in the gross area of whole fixed area of mover fixed part 55, is located at than concern on bottom plate 51
Region A12 closer to moving direction or the fixed area area of the position in the outside of width direction ratio, preferably 50%
More than, more preferably 80% or more.
Mover fixed part 55 is not necessarily fixed on bottom plate 51 in multiple fixed position P11, when mover 546 size compared with
When small, mover fixed part 55 can be only fixed on bottom plate 51 in a fixed position P11.
Radiator fan can also be set on supporting member 56,56a, 56b, 57, effectively to release heat.
As described above, each guide rail holding section 53 also can have arranges in the direction of movement according to the size etc. of bottom plate 51
Three or more bootstrap blocks 531 of column.In addition, according to the design of objective table driving device 5, the guidance of a guide rail holding section 53
The position of block 531 and the position of the bootstrap block 531 of another guide rail holding section 53 can also misplace in the direction of movement.In kind of a feelings
Under condition, it can also will make comprising the minimum rectangular area of multiple (whole) installation region A11 in the lower surface of bottom plate 51 512
For region-of-interest, wherein above-mentioned multiple (whole) installation region A11 are for installing the multiple of a pair of guide rails holding section 53
The region of (whole) bootstrap block 531.
Figuratum substrate 9 is drawn, other than printed base plate, is also possible to semiconductor substrate or glass substrate etc..It retouches
Picture device 1 can also be used for drawing pattern on the various objects other than substrate 9.The objective table 41 for maintaining object is carried out
The objective table driving device 5 of driving, also can be applied in the device other than describing device 1.
As long as composition in above embodiment and each variation is not conflicting can carry out it is appropriately combined.
The present invention is described and illustrated in detail above, but above description is illustrative, and non-limiting.Therefore,
It may be said that without departing from the scope of the present invention, so that it may use various modifications and embodiment.
Claims (7)
1. a kind of objective table driving device,
Include:
Bottom plate, the second main surface of the opposite side with the first main surface and above-mentioned first main surface, and in the above-mentioned first main table
Objective table is provided on face,
A pair of guide rails is configured in the above-mentioned second main surface side of above-mentioned bottom plate in the movement with above-mentioned second major surfaces in parallel
Side upwardly extends, and is being parallel to above-mentioned second main surface and perpendicular to mutually dividing in the width direction of above-mentioned moving direction
It opens,
A pair of guide rails holding section is installed on above-mentioned bottom plate, and the state and above-mentioned one can move on above-mentioned moving direction
Guide rail is engaged respectively,
Linear motor has the mover comprising coil and the stator comprising permanent magnet, and in the above-mentioned second main table of above-mentioned bottom plate
Face side is configured between above-mentioned a pair of guide rails, moves above-mentioned mover on above-mentioned moving direction, and
Above-mentioned mover can be fixed on above-mentioned bottom plate by mover fixed part；
In above-mentioned second main surface of above-mentioned bottom plate, by multiple installing zones comprising being used to install above-mentioned a pair of guide rails holding section
The minimum rectangular area in domain as region-of-interest, in above-mentioned bottom plate for fix the fixed bit of above-mentioned mover fixed part setting in than
Above-mentioned region-of-interest is closer to above-mentioned moving direction or the position in the outside of above-mentioned width direction.
2. objective table driving device according to claim 1, wherein
Above-mentioned a pair of guide rails holding section is separately contained in above-mentioned moving direction and separates and be mounted on multiple guidance on above-mentioned bottom plate
Block,
There are four installation region, aforementioned four installation region and a guide rails for setting in above-mentioned second main surface of above-mentioned bottom plate
Two bootstrap blocks at the both ends in multiple above-mentioned bootstrap blocks that holding section is included and another guide rail holding section are included
Two bootstrap blocks at the both ends in multiple above-mentioned bootstrap blocks are corresponding, and include the minimum rectangular area of aforementioned four installation region
It is comprised in above-mentioned region-of-interest.
3. objective table driving device according to claim 1, wherein
In above-mentioned bottom plate, the fixed area for fixing above-mentioned mover fixed part be integrally located at than above-mentioned region-of-interest closer to
The position in the outside on above-mentioned moving direction or in above-mentioned width direction.
4. objective table driving device according to claim 1, wherein
The above-mentioned fixed bit of above-mentioned mover fixed part setting in than above-mentioned region-of-interest closer to the outside on above-mentioned moving direction
Position.
5. objective table driving device according to any one of claims 1 to 4, wherein
Above-mentioned mover fixed part includes
First supporting member extends on above-mentioned moving direction, and
A pair of second supporting member, is respectively arranged in the both ends of above-mentioned first supporting member and is fixed on above-mentioned bottom plate；
In above-mentioned bottom plate, the fixed bit of fixed each above-mentioned second supporting member setting in than above-mentioned region-of-interest closer to upper
State the position in the outside on moving direction.
6. objective table driving device according to claim 5, wherein
Each above-mentioned second supporting member extends in above-mentioned width direction,
The both ends of each above-mentioned second supporting member are provided with a pair of of protrusion,
Position of the above-mentioned region-of-interest of ratio closer to the outside on above-mentioned moving direction in above-mentioned bottom plate, a pair of above-mentioned protrusion
Portion is fixed in two ends in above-mentioned width direction respectively.
7. a kind of describing device for drawing pattern on object, comprising:
Objective table driving device according to any one of claims 1 to 6 maintains object on objective table,
Light injection part, is modulated the light from light source and the object on above-mentioned objective table irradiates, and
Control unit controls above-mentioned objective table driving device and above-mentioned smooth injection part.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017-184801 | 2017-09-26 | ||
| JP2017184801A JP6917848B2 (en) | 2017-09-26 | 2017-09-26 | Stage drive and drawing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109557769A true CN109557769A (en) | 2019-04-02 |
| CN109557769B CN109557769B (en) | 2021-03-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810897201.4A Active CN109557769B (en) | 2017-09-26 | 2018-08-08 | Stage driving device and imaging device |
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| Country | Link |
|---|---|
| JP (1) | JP6917848B2 (en) |
| KR (1) | KR102115661B1 (en) |
| CN (1) | CN109557769B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112448559A (en) * | 2019-09-04 | 2021-03-05 | 佳能株式会社 | Linear actuator |
| CN114253085A (en) * | 2020-09-23 | 2022-03-29 | 株式会社斯库林集团 | Drawing device |
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| US20090263747A1 (en) * | 2008-04-17 | 2009-10-22 | Nikon Corporation | Three axis linear actuator |
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| US9088201B2 (en) * | 2007-03-30 | 2015-07-21 | Thk Co., Ltd. | Drive guide apparatus |
| JP5113436B2 (en) * | 2007-06-18 | 2013-01-09 | 三菱電機株式会社 | Linear motor drive shaft feeder |
| KR200464501Y1 (en) * | 2010-12-08 | 2013-01-21 | 미래산업 주식회사 | Encoder Device, Linear Motor having the same, and Apparatus for Transferring Substrate |
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- 2017-09-26 JP JP2017184801A patent/JP6917848B2/en active Active
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| US6124923A (en) * | 1994-11-01 | 2000-09-26 | Nikon Corporation | Stage unit, drive table, and scanning exposure apparatus using the same |
| JP2004088981A (en) * | 2001-09-28 | 2004-03-18 | Thk Co Ltd | Drive guide |
| US20090263747A1 (en) * | 2008-04-17 | 2009-10-22 | Nikon Corporation | Three axis linear actuator |
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| CN112448559A (en) * | 2019-09-04 | 2021-03-05 | 佳能株式会社 | Linear actuator |
| CN112448559B (en) * | 2019-09-04 | 2024-08-20 | 佳能株式会社 | Linear actuator |
| CN114253085A (en) * | 2020-09-23 | 2022-03-29 | 株式会社斯库林集团 | Drawing device |
| CN114253085B (en) * | 2020-09-23 | 2024-05-24 | 株式会社斯库林集团 | Drawing device |
Also Published As
| Publication number | Publication date |
|---|---|
| KR102115661B1 (en) | 2020-05-26 |
| JP6917848B2 (en) | 2021-08-11 |
| CN109557769B (en) | 2021-03-02 |
| JP2019062633A (en) | 2019-04-18 |
| KR20190035489A (en) | 2019-04-03 |
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