CN103872876A - Linear motor and platform device - Google Patents
Linear motor and platform device Download PDFInfo
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- CN103872876A CN103872876A CN201210525941.8A CN201210525941A CN103872876A CN 103872876 A CN103872876 A CN 103872876A CN 201210525941 A CN201210525941 A CN 201210525941A CN 103872876 A CN103872876 A CN 103872876A
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Abstract
Disclosed is a linear motor which comprises a magnet unit, a coil unit, a magnet fixing seat and a control system. The magnet fixing seat is laterally U-shaped. The magnet unit includes a first magnet array and a second magnet array which are respectively disposed on two parallel inner walls of the magnet fixing seat. The coil unit is arranged in a magnetic gap between the two magnet arrays. The control system is used for supplying current to the coil unit. The two magnet arrays are periodically and alternately distributed along a Y direction according to a Halbach array mode. The coil unit includes a first coil array and a second coil array which is disposed along a Z direction perpendicular to the Y direction and is adjacent to the first coil array, and the two coil arrays are staggered by a certain distance delta P along the Y direction. A platform device adopting the linear motor is further disclosed. According to the invention, magnetic leakage can be reduced, greater thrust can be provided, and a double-layer coil arrangement structure is adopted to enable the linear motor to generate required three-degree-of-freedom control force or control torque.
Description
Technical field
The present invention relates to field of lithography, relate in particular to a kind of linear electric motors and stage apparatus.
Background technology
Along with the progress of photoetching technique and the fast development of semi-conductor industry, there are four key property indexs for lithographic equipment: live width uniformity (CD, Critical Dimension Uniformity), depth of focus (Focus), alignment (Overlay) and productive rate (Throughput).In order to improve live width uniformity, work stage or mask platform must be improved the standard to precision positioning ability; In order to improve depth of focus error precision, work stage or mask platform must improve vertical precision positioning ability; In order to improve mask aligner overlay error precision, work stage or mask platform must improve its inner mode and promote Kinematic Positioning characteristic.In addition, lithographic equipment must increase productive rate, and therefore the necessary high-speed motion of estrade, starts fast and stop.The high speed of lithographic equipment, high accelerate and high-accuracy stationkeeping ability is conflicting, increase the larger motor of sweep speed required power, realizes large stroke and high-speed motion, and have multifreedom motion and carry out photolithographic exposure and aligning.
Lithographic equipment is divided into two classes substantially, one class is stepping lithographic equipment, mask pattern single exposure is imaged on an exposure area of wafer, wafer moves with respect to mask subsequently, next exposure area is moved to mask pattern and projection objective below, again mask pattern is exposed in another exposure area of wafer, repeat this process until on wafer all exposure areas all have the picture of mask pattern.Another kind of is step-scan lithographic equipment, and mask pattern is not single exposure imaging, but by the scanning mobile imaging of projection light field; In mask pattern imaging process, mask and wafer move with respect to optical projection system and projected light beam simultaneously.
In above-mentioned lithographic equipment, need there is the carrier of corresponding device as mask/silicon chip, the carrier that is mounted with mask/silicon chip produces accurate motion mutually and meets photoetching needs.The carrier that is mounted with mask is referred to as and holds bed, and the carrier that is mounted with silicon chip is referred to as wafer-supporting platform.
Refer to Fig. 1, Figure 1 shows that the structure of the linear motion actuator schematic diagram of available technology adopting tradition NS magnet array and single layer coil.
U.S. Pat 20040246458A1 discloses a kind of linear electric motors for photo-etching machine work-piece platform or mask platform, there is high actuating force, high efficiency and low ripple power, comprise two parallel relative the first magnetic track and the second magnetic tracks, an and armature, armature comprises three split coil unit, be placed between the first magnetic track and the second magnetic track, the first magnetic track, the second magnetic track and coil unit can each autokinesis, between two relative magnetic tracks and split coil, there is one there is no iron core, this structure can reduce the volume of motor, and when increasing power, do not produce extra heat.Can increase the efficiency of motor by the electromagnetic force of more effective electromagnetic material and Geng Gao, reduce the use of bearing, reduce mobile quality, be specially adapted in vacuum environment.But consider and tilt to disturb to wait the ripple power (ripple) causing, accurately positioning equipment.And the magnet of considering the cuboid of side-by-side alignment easily causes control precision to be difficult on the leakage field impact of yoke and not enough large factor of the controlled force that produces, need to propose a kind of novel more accurate positioning motor and more powerful linear electric motors are provided.
Summary of the invention
The object of the present invention is to provide a kind of linear electric motors and stage apparatus, can reduce magnetic and reveal and provide more high thrust, adopt double-layer coil arrangement to make linear electric motors produce control or the control moment of the Three Degree Of Freedom needing simultaneously.
To achieve the above object, the present invention adopts following technical scheme:
A kind of linear electric motors, comprise magnet unit and coil unit, magnet holder and control system, and described magnet fixed seat side is to taking the shape of the letter U, for supporting described magnet unit; Described magnet unit comprises the first magnet array and second magnet array of the two parallel inwalls that lay respectively at described magnet holder; Described coil unit is arranged at two groups of magnetic gap places between magnet array, described control system is used for providing electric current to described coil unit, described the first magnet array and the second magnet array respectively along Y-direction according to Halbach(Haier Bake) array pattern is periodically alternately distributed; Described coil unit is included in the First Line coil array of the stacked setting of Z-direction and along the Z-direction perpendicular to Y-direction second coil array adjacent with described First Line coil array, described First Line coil array and described the second coil array are along the Y-direction certain distance △ P that staggers, △ P meets: when control system gives described coil unit while passing into required electric current, described coil unit can produce along the control of Y-direction, along the control of Z-direction and one around X to moment.
Preferably, in above-mentioned linear electric motors, described First Line coil array and described the second coil array all have the coil of plural equal number, and the coil-span of each coil is CP, and described First Line coil array is 1/4CP along X to the distance △ P staggering with described the second coil array.
Preferably, in above-mentioned linear electric motors, described the first magnet array and described the second magnet array are periodically alternately distributed according to Halbach array pattern along Y-direction by first kind magnet, Equations of The Second Kind magnet and the 3rd class magnet between them.
Preferably, in above-mentioned linear electric motors, described first kind magnet is square, and its direction of magnetization is along positive direction or the opposite direction of Z axis; Described Equations of The Second Kind magnet is square, and its direction of magnetization is contrary with the direction of magnetization of described first kind magnet; Described the 3rd class magnet comprises the first prism magnet, the second prism magnet and triangular prism magnet, after described the first prism magnet, the second prism magnet and the combination of triangular prism magnet entirety be one with described first kind magnet and contour square of described Equations of The Second Kind magnet, interface between adjacent different prism magnet is inclined-plane, and described the first prism magnet, the second prism magnet and triangular prism magnet are triangular prism and/or quadrangular; The direction of magnetization of described the first prism magnet enters after described the second prism magnet through the interface of itself and the second prism magnet, then enters triangular prism magnet through the interface of the second prism magnet and triangular prism magnet; Or the direction of magnetization of described triangular prism magnet enters after described the second prism magnet through the interface of itself and the second prism magnet, then enters the first prism magnet through the interface of the second prism magnet and the first prism magnet.
Preferably, in above-mentioned linear electric motors, described the first prism magnet, the second prism magnet and triangular prism magnet are respectively right-angled triangle, isosceles triangle and right-angled triangle along the cross section of YZ plane; Or described the first prism magnet, the second prism magnet and triangular prism magnet are respectively right-angled trapezium, isosceles triangle and right-angled trapezium along the cross section of YZ plane; Or described the first prism magnet, the second prism magnet and triangular prism magnet are respectively right-angled triangle, isosceles trapezoid and right-angled triangle along the cross section of YZ plane.
Preferably, in above-mentioned linear electric motors, in the time that described the first prism magnet, the second prism magnet and triangular prism magnet are respectively right-angled triangle, isosceles trapezoid and right-angled triangle along the cross section of YZ plane, described the first prism magnet and triangular prism magnet are the right-angled trapezium with a common edge along the cross section of YZ plane.
Preferably, in above-mentioned linear electric motors, the angle of described interface and Z axis is determined according to size and the shape of described the first prism magnet, the second prism magnet and triangular prism magnet.
The invention also discloses a kind of stage apparatus, comprise hold bed and be positioned at described in hold two bases of bed both sides, it is described that to hold bed and provide by the motor of described two bases top the suspending power of actuating force and the Z-direction of Y-direction, described motor be as above linear electric motors described in any one.
Preferably, in above-mentioned stage apparatus, in described two bases, at least one top is provided with the motion of holding bed described in being used to provides the guider of Y-direction guiding, described guider comprises and holds the floating cushion of bed described in connection and be fixed on the air-float guide rail on described base, described floating cushion be arranged at described air-float guide rail near described in hold bed a side.
Preferably, in above-mentioned stage apparatus, described floating cushion is flexible block.
In linear electric motors provided by the invention and stage apparatus, described coil unit is included in First Line coil array and second coil array of the stacked setting of Z-direction, described First Line coil array and described the second coil array are along the Y-direction certain distance △ P that staggers, △ P meets: in the time that control system passes into required electric current to described coil unit, described coil unit can produce the control along Y-direction, along the control of Z-direction and one around X to moment, on the one hand, the double-layer coil of First Line coil array from the above mentioned and described the second coil array composition can produce the vertical suspending power needing, on the other hand, double-layer coil layering alternating expression arrangement architecture can be eliminated and tilt to disturb the ripple power causing that waits, and so that the control moment needing to be provided, eliminates moment of torsion, realizes accurately location, again on the one hand, the first magnet array in magnet unit and the second magnet array are periodically alternately distributed according to Halbach array pattern, the Halbach magnet topology arrays forming is compared and is waited the NS array of magnetic energy product, has relatively increased vertical magnetic flux, the larger horizontal thrust of corresponding generation.In addition, adopt the magnetic of the Halbach magnet array of triangular prism magnet and (or) quadrangular magnet structure to reveal less.In addition, adopt the stage apparatus of the linear electric motors structure of said structure not need vertical air supporting mechanism, only can provide certain axial actuating force of level and vertical suspending power by linear electric motors, simple in structure, easy to operate.
Accompanying drawing explanation
Linear electric motors of the present invention and stage apparatus are provided by following embodiment and accompanying drawing.
Fig. 1 is the structure of the linear motion actuator schematic diagram of available technology adopting tradition NS magnet array and single layer coil.
Fig. 2 is the structure of the linear motion actuator schematic diagram of the embodiment of the present invention 1.
Fig. 3 is the layout viewing of double-layer staggered formula coil unit in the embodiment of the present invention 1.
Fig. 4 is the close distribution map of magnetic of the magnet unit of traditional NS magnet array composition in Fig. 1.
Fig. 5 is the close distribution map of magnetic of the magnet unit of the embodiment of the present invention 1.
Fig. 6 is the coil Y-direction of linear electric motors shown in Fig. 1 and Fig. 2 big or small comparison diagram of exerting oneself.
Fig. 7 is single layer coil and the double-layer coil Z-direction big or small comparison diagram of exerting oneself under the embodiment of the present invention 1 magnet unit pattern of rows and columns.
Fig. 8 is the structure of the linear motion actuator schematic diagram of the embodiment of the present invention 2.
Fig. 9 is the structure of the linear motion actuator schematic diagram of the embodiment of the present invention 3.
Figure 10 is the front view of the stage apparatus of application linear electric motors structure of the present invention.
Figure 11 is the vertical view (wherein linear electric motors only provide coil unit and the second magnet array that is positioned at lower floor) of Figure 10.
In figure: 1-coil unit, 11-First Line coil array, 12-the second coil array, U1, V1, W1, 2-magnet unit, 21-the first magnet array, 22-the second magnet array, 201-first kind magnet, 202-Equations of The Second Kind magnet, 203-the 3rd class magnet, 203a-the first prism magnet, 203b-the second prism magnet, 203c-triangular prism magnet, 3-magnet holder, 4-magnetic gap, 5-stage apparatus, 51-holds bed, 52a, 52b-base, 53a, 53b-motor, 54-guider, 541-floating cushion, 542-air-float guide rail, 531a, 531b-magnet unit, 532a, 532b-coil unit, 533a, 533b-magnet holder.
Embodiment
Below with reference to accompanying drawings the present invention is described in more detail, has wherein represented the preferred embodiments of the present invention, should be appreciated that those skilled in the art can revise the present invention described here and still realize advantageous effects of the present invention.Therefore, following description is appreciated that extensively knowing for those skilled in the art, and not as limitation of the present invention.
For object of the present invention, feature are become apparent, below in conjunction with accompanying drawing, the specific embodiment of the present invention is further described.It should be noted that, accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only in order to convenient, the object of the aid illustration embodiment of the present invention lucidly.
Embodiment 1
Refer to Fig. 2, a kind of linear electric motors that the present embodiment provides, comprise magnet unit 2 and coil unit 1, magnet holder 3 and control system (not shown), described magnet holder 3 side direction (being XZ plane in the present embodiment) take the shape of the letter U, for supporting described magnet unit 2; Described magnet unit 2 comprises the first magnet array 21 and second magnet array 22 of the two parallel inwalls that lay respectively at described magnet holder 3; Described coil unit 1 is arranged at two groups of magnetic gap 4 places between magnet array and is arranged at magnetic gap 4 places between the first magnet array 21 and the second magnet array 22, described control system is used for providing electric current to described coil unit 1, described the first magnet array 21 and the second magnet array 22 are periodically alternately distributed according to Halbach array pattern along Y-direction respectively, incorporated by reference to consulting Fig. 3; Described coil unit 1 is included in First Line coil array 11 and second coil array 12 of the stacked setting of Z-direction, described First Line coil array 11 and described the second coil array 12 are along the Y-direction certain distance △ P that staggers, △ P meets: when control system gives described coil unit 1 while passing into required electric current, described coil unit 1 can produce along the control of Y-direction, along the control of Z-direction and one around X to moment.On the one hand, the double-layer coil being made up of described First Line coil array 21 and described the second coil array 22 can produce the suspending power of vertical (being Z-direction in the present embodiment) of needs; On the other hand, double-layer coil layering alternating expression arrangement architecture can be eliminated to tilt to disturb and wait the ripple power causing, and the control moment needing is provided, and eliminates moment of torsion, realizes accurately location; Again on the one hand, the first magnet array 21 in magnet unit 2 and the second magnet array 22 are periodically alternately distributed according to Halbach array pattern, the Halbach magnet topology arrays forming is compared the existing NS array that waits magnetic energy product, relatively increase vertical magnetic flux, thereby can correspondingly produce larger horizontal thrust.
Preferably, described First Line coil array 11 and described the second coil array 12 all have the coil of plural equal number, the coil-span of each coil is that CP(coil-span CP is the width of single coil along Y-direction), described First Line coil array 11 is 1/8 ~ 1/3CP along X to the distance △ P staggering with described the second coil array 12.In the present embodiment, the described distance △ P staggering is preferably 1/4CP, because magnet array is halbach linear array in the present embodiment, the feature of its Distribution of Magnetic Field is between horizontal sinusoidal magnetic field and vertical sinusoidal magnetic field, just to differ 90 degree phase places, i.e. 1/4 cycle, by the double-layer coil 1/4CP that staggers, just with the magnetic field of this both direction have an effect phase place corresponding on.Certainly, arrange according to magnet array magnetic field different and specifically apply needs, also can adopt other coil-spans designs completely.
Preferably, in above-mentioned linear electric motors, described the first magnet array 21 and described the second magnet array 22 are periodically alternately distributed according to Halbach array pattern along Y-direction by first kind magnet 201, Equations of The Second Kind magnet 202 and the 3rd class magnet 203 between them.
Preferably, in above-mentioned linear electric motors, described first kind magnet 201 is square, and its direction of magnetization is along positive direction or the opposite direction of Z axis, described Equations of The Second Kind magnet 202 is square, and its direction of magnetization is contrary with the direction of magnetization of described first kind magnet 201, described the 3rd class magnet 203 comprises the first prism magnet 203a, the second prism magnet 203b and triangular prism magnet 203c, described the first prism magnet 203a, entirety after the second prism magnet 203b and triangular prism magnet 203c combination be one with described first kind magnet 201 and contour square of described Equations of The Second Kind magnet 202, interface between adjacent different prism magnet is inclined-plane, be adjacent first, two prism magnet 203a, interface between 203b is inclined-plane and adjacent second, triangular prism magnet 203b, interface between 203c is inclined-plane, described the first prism magnet 203a, the second prism magnet 203b and triangular prism magnet 203c are triangular prism and/or quadrangular, the direction of magnetization of described the first prism magnet 203a enters after described the second prism magnet 203b through its (being described the first prism magnet 203a) and the interface of the second prism magnet 203b, then enters triangular prism magnet 203c through the interface of the second prism magnet and 203b triangular prism magnet 203c, or, the direction of magnetization of described triangular prism magnet 203c enters after described the second prism magnet 203b with the interface of the second prism magnet 203b through its (i.e. triangular prism magnet 203c), then enters the first prism magnet 203a through the interface of the second prism magnet 203b and the first prism magnet 203a.Above-mentioned first kind magnet 201 and Equations of The Second Kind magnet 202 are quadrangular magnet, and described the 3rd class magnet 203 is made up of triangular prism magnet and (or) quadrangular magnet, and the Halbach magnet array of formation of structure has advantages of that magnetic leakage is less.
Preferably, in above-mentioned linear electric motors, described the first prism magnet 203a, the second prism magnet 203b and triangular prism magnet 203c are respectively right-angled triangle, isosceles triangle and right-angled triangle along the cross section of YZ plane.
Preferably, in above-mentioned linear electric motors, the angle of described interface and Z axis is determined according to size and the shape of described the first prism magnet 203a, the second prism magnet 203b and triangular prism magnet 203c.
Fig. 4 is the close distribution map of magnetic of the magnet unit of traditional NS magnet array composition, and Fig. 5 is the close distribution map of magnetic of the magnet unit of the embodiment of the present invention 1.Contrasted from Fig. 4 and Fig. 5, the maximum 1.0501tesla(of the close B distribution of tradition NS magnet array magnetic amplitude tesla), the maximum 1.8363tesla of (being periodically alternately distributed according to Halbach array pattern the magnet unit that the first magnet array 21 and the second magnet array 22 form) the close B distribution of the magnetic amplitude of Halbach array in the embodiment of the present invention 1, the close amplitude of magnetic has clear improvement.Can make the close distribution of magnetic more approach sine curve by the size of arranging that changes magnet array in addition.
Fig. 6 is the Y-direction of structure of the linear motion actuator coil shown in Fig. 1 and Fig. 2 big or small comparison diagram of exerting oneself, and Fig. 7 adopts single layer coil and the double-layer coil Z-direction big or small comparison diagram of exerting oneself under the embodiment of the present invention 1 magnet unit pattern of rows and columns.Traditional NS magnet array coil is exerted oneself large small magnitude at-42.05 ~ 44.17N as shown in Figure 6, and the Halbach magnet array coil shown in embodiment 1 is exerted oneself large small magnitude at-72.54 ~ 74.33N.In the visible embodiment of the present invention compared to existing technology 1, Halbach array is irised out power amplitude aspect online obvious advantage.As shown in Figure 7, in embodiment 1, single layer coil is exerted oneself peak value at 4.973N, and double-layer coil is exerted oneself peak value at 27.45N, and the visible single layer coil embodiment of the present invention 1 coil compared to existing technology amplitude of exerting oneself has obvious advantage in Z-direction.
Refer to Fig. 8, the present embodiment is with the difference of implementing 1:
Described the first prism magnet 203a, the second prism magnet 203b and triangular prism magnet 203c are respectively right-angled triangle, isosceles trapezoid and right-angled triangle along the cross section of YZ plane.The first magnet array 21 and the second magnet array 22 that the 3rd class magnet 203 of employing said structure and first kind magnet 201 and Equations of The Second Kind magnet 202 form.The present embodiment, can produce the vertical suspending power needing equally; Can eliminate and tilt to disturb the ripple power causing that waits, so that the control moment needing to be provided, eliminate moment of torsion, realize accurately location; Can increase vertical magnetic flux, produce larger corresponding horizontal thrust, and have advantages of that magnetic leakage is less.
Embodiment 3
Refer to Fig. 9, the present embodiment is with the difference of implementing 1:
Described the first prism magnet 203a, the second prism magnet 203b and triangular prism magnet 203c are respectively right-angled trapezium, isosceles triangle and right-angled trapezium along the cross section of YZ plane.Described the first prism magnet 203a and triangular prism magnet 203b are the right-angled trapezium with a common edge along the cross section of YZ plane.The first magnet array 21 and the second magnet array 22 that the 3rd class magnet 203 of employing said structure and first kind magnet 201 and Equations of The Second Kind magnet 202 form, have advantages of that magnetic leakage is less equally.The present embodiment, can produce the vertical suspending power needing equally; Can eliminate and tilt to disturb the ripple power causing that waits, so that the control moment needing to be provided, eliminate moment of torsion, realize accurately location; Can increase vertical magnetic flux, produce larger corresponding horizontal thrust, and have advantages of that magnetic leakage is less.
Refer to Figure 10 and Figure 11, the present embodiment provides a kind of stage apparatus 5, comprise hold bed 51 and be positioned at described in hold two base 52a, 52b of bed 51 both sides, the described motor 53a of bed 51 by described two base 52a, 52b top, actuating force that 53b provides Y-direction and the suspending power of Z-direction of holding, motor 53a comprises magnet holder 533a, magnet unit 531a and coil unit 532a, and motor 53b comprises magnet holder 533b, magnet unit 531b and coil unit 532b; Described motor 53a, 53b are that any one linear electric motors as above (comprise the linear electric motors 0 described in embodiment 1 or embodiment 2 or embodiment 3.Adopt the stage apparatus of the linear electric motors structure of said structure, not only have advantages of described in embodiment 1 ~ embodiment, but also can not need vertical air supporting mechanism, only can provide certain axial actuating force of level and vertical suspending power (Z-direction) by linear electric motors, simple in structure, easy to operate.
Preferably, in the stage apparatus of the present embodiment, in described two base 52a, 52b, at least one top is provided with the motion of holding bed 51 described in being used to provides the guider 54 of Y-direction guiding, described guider 54 comprises and holds the floating cushion 541 of bed 51 described in connection and be fixed on the air-float guide rail 542 on described base 52a and/or 52b, described floating cushion 541 be arranged at described air-float guide rail 542 near described in hold bed 51 a side.Preferably, in the stage apparatus of the present embodiment, described floating cushion 541 can be flexible block.Adopting the air-float guide rail of floating cushion 541 and air-float guide rail 542 is the basic principles based on air bearing, realizes without friction and vibrationless level and smooth movement.It has the features such as kinematic accuracy is high, cleanliness without any pollution.Also there is error homogenization simultaneously, thereby can obtain higher guiding accuracy by the lower accuracy of manufacture.
When work, pass into electric current to described coil unit 532a, 532b, make mutual coil unit 532a, 532b between described magnet unit 531a, 531b produce along the actuating force of Y-direction, perpendicular to the suspending power of the Z-direction of Y-direction and around X to control moment.
In sum, in linear electric motors provided by the invention and stage apparatus, described coil unit is included in First Line coil array and second coil array of the stacked setting of Z-direction, described First Line coil array and described the second coil array are along the Y-direction certain distance △ P that staggers, △ P meets: in the time that control system passes into required electric current to described coil unit, described coil unit can produce the control along Y-direction, along the control of Z-direction and one around X to moment, on the one hand, the double-layer coil of First Line coil array from the above mentioned and described the second coil array composition can produce the vertical suspending power needing, on the other hand, double-layer coil layering alternating expression arrangement architecture can be eliminated and tilt to disturb the ripple power causing that waits, and so that the control moment needing to be provided, eliminates moment of torsion, realizes accurately location, again on the one hand, the first magnet array in magnet unit and the second magnet array are periodically alternately distributed according to Halbach array pattern, the Halbach magnet topology arrays forming is compared and is waited the NS array of magnetic energy product, has relatively increased vertical magnetic flux, the larger horizontal thrust of corresponding generation.In addition, adopt the magnetic of the Halbach magnet array of triangular prism magnet and (or) quadrangular magnet structure to reveal less.In addition, adopt the stage apparatus of the linear electric motors structure of said structure not need vertical air supporting mechanism, only can provide certain axial actuating force of level and vertical suspending power by linear electric motors, simple in structure, easy to operate.
Obviously, those skilled in the art can carry out various changes and modification and not depart from the spirit and scope of the present invention the present invention.Like this, if within of the present invention these are revised and modification belongs to the scope of the claims in the present invention and equivalent technologies thereof, the present invention is also intended to comprise these changes and modification interior.
Claims (10)
1. linear electric motors, comprise magnet unit and coil unit, magnet holder and control system, and described magnet fixed seat side is to taking the shape of the letter U, for supporting described magnet unit; Described magnet unit comprises the first magnet array and second magnet array of the two parallel inwalls that lay respectively at described magnet holder; Described coil unit is arranged at two groups of magnetic gap places between magnet array, described control system is used for providing electric current to described coil unit, it is characterized in that, described the first magnet array and the second magnet array are periodically alternately distributed according to Halbach array pattern along Y-direction respectively; Described coil unit is included in First Line coil array and second coil array of the stacked setting of Z-direction, described First Line coil array and described the second coil array are along the Y-direction certain distance △ P that staggers, △ P meets: when control system gives described coil unit while passing into required electric current, described coil unit can produce along the control of Y-direction, along the control of Z-direction and one around X to moment.
2. linear electric motors according to claim 1, it is characterized in that, described First Line coil array and described the second coil array all have the coil of plural equal number, the coil-span of each coil is CP, and described First Line coil array is 1/4CP along X to the distance △ P staggering with described the second coil array.
3. linear electric motors according to claim 1, it is characterized in that, described the first magnet array and described the second magnet array are periodically alternately distributed according to Halbach array pattern along Y-direction by first kind magnet, Equations of The Second Kind magnet and the 3rd class magnet between them.
4. linear electric motors according to claim 1, is characterized in that, described first kind magnet is square, and its direction of magnetization is along positive direction or the opposite direction of Z axis; Described Equations of The Second Kind magnet is square, and its direction of magnetization is contrary with the direction of magnetization of described first kind magnet; Described the 3rd class magnet comprises the first prism magnet, the second prism magnet and triangular prism magnet, after described the first prism magnet, the second prism magnet and the combination of triangular prism magnet entirety be one with described first kind magnet and contour square of described Equations of The Second Kind magnet, interface between adjacent different prism magnet is inclined-plane, and described the first prism magnet, the second prism magnet and triangular prism magnet are triangular prism and/or quadrangular; The direction of magnetization of described the first prism magnet enters after described the second prism magnet through the interface of itself and the second prism magnet, then enters triangular prism magnet through the interface of the second prism magnet and triangular prism magnet; Or the direction of magnetization of described triangular prism magnet enters after described the second prism magnet through the interface of itself and the second prism magnet, then enters the first prism magnet through the interface of the second prism magnet and the first prism magnet.
5. linear electric motors as claimed in claim 4, is characterized in that: described the first prism magnet, the second prism magnet and triangular prism magnet are respectively right-angled triangle, isosceles triangle and right-angled triangle along the cross section of YZ plane; Or described the first prism magnet, the second prism magnet and triangular prism magnet are respectively right-angled trapezium, isosceles triangle and right-angled trapezium along the cross section of YZ plane; Or described the first prism magnet, the second prism magnet and triangular prism magnet are respectively right-angled triangle, isosceles trapezoid and right-angled triangle along the cross section of YZ plane.
6. linear electric motors as claimed in claim 5, it is characterized in that: in the time that described the first prism magnet, the second prism magnet and triangular prism magnet are respectively right-angled triangle, isosceles trapezoid and right-angled triangle along the cross section of YZ plane, described the first prism magnet and triangular prism magnet are the right-angled trapezium with a common edge along the cross section of YZ plane.
7. linear electric motors as claimed in claim 4, is characterized in that: the angle of described interface and Z axis is determined according to size and the shape of described the first prism magnet, the second prism magnet and triangular prism magnet.
8. a stage apparatus, comprise hold bed and be positioned at described in hold two bases of bed both sides, it is characterized in that: described in to hold bed and provide by the motor of described two bases top the suspending power of actuating force and the Z-direction of Y-direction, described motor be the linear electric motors as described in any one in claim 1 ~ 7.
9. stage apparatus as claimed in claim 8, it is characterized in that: in described two bases, at least one top is provided with the motion of holding bed described in being used to provides the guider of Y-direction guiding, described guider comprises and holds the floating cushion of bed described in connection and be fixed on the air-float guide rail on described base, described floating cushion be arranged at described air-float guide rail near described in hold bed a side.
10. stage apparatus as claimed in claim 9, is characterized in that: described floating cushion is flexible block.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210525941.8A CN103872876A (en) | 2012-12-07 | 2012-12-07 | Linear motor and platform device |
| US14/408,130 US9755493B2 (en) | 2012-07-31 | 2013-07-02 | Linear motor and stage apparatus |
| PCT/CN2013/078671 WO2014019438A1 (en) | 2012-07-31 | 2013-07-02 | Linear motor and platform device |
| EP13826225.8A EP2882082A4 (en) | 2012-07-31 | 2013-07-02 | Linear motor and platform device |
| SG11201407672XA SG11201407672XA (en) | 2012-07-31 | 2013-07-02 | Linear motor and stage apparatus |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210525941.8A CN103872876A (en) | 2012-12-07 | 2012-12-07 | Linear motor and platform device |
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| CN103872876A true CN103872876A (en) | 2014-06-18 |
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| CN201210525941.8A Pending CN103872876A (en) | 2012-07-31 | 2012-12-07 | Linear motor and platform device |
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104767346A (en) * | 2015-04-27 | 2015-07-08 | 重庆大学 | Electromagnetic type vibration energy collector based on Halbach array |
| CN105099122A (en) * | 2015-09-09 | 2015-11-25 | 华中科技大学 | Moving-magnet type long-stroke ultra-precision linear motion mechanism |
| CN105743321A (en) * | 2014-12-09 | 2016-07-06 | 鸿富锦精密工业（深圳）有限公司 | Linear motor |
| CN106329875A (en) * | 2015-07-10 | 2017-01-11 | 上海微电子装备有限公司 | Multi-degree of freedom linear motor |
| CN106549550A (en) * | 2015-09-23 | 2017-03-29 | 上海微电子装备有限公司 | A kind of linear electric motors, sports platform and lithographic equipment |
| CN107872140A (en) * | 2016-09-26 | 2018-04-03 | 上海微电子装备（集团）股份有限公司 | A kind of voice coil motor and stage apparatus |
| CN108258877A (en) * | 2018-02-05 | 2018-07-06 | 东南大学 | A kind of permanent-magnetism linear motor based on stator arc with interior stepped mixed structure |
| CN108649769A (en) * | 2018-05-28 | 2018-10-12 | 浙江大学 | A kind of coreless permanent magnet linear synchronous motor based on Double Layer Winding structure |
| CN109327126A (en) * | 2018-11-14 | 2019-02-12 | 哈尔滨工业大学 | A kind of linear motion device based on dynamic magnet steel arranged side by side |
| CN109462320A (en) * | 2018-11-02 | 2019-03-12 | 安徽大学 | The double-deck reversed dip winding coreless permanent magnet linear synchronous motor |
| CN112671204A (en) * | 2021-01-18 | 2021-04-16 | 哈尔滨工业大学 | Multilayer winding magnetic suspension linear permanent magnet synchronous motor |
| CN114694910A (en) * | 2020-12-25 | 2022-07-01 | 中国航天科工飞航技术研究院（中国航天海鹰机电技术研究院） | Zero-magnetic-flux electric suspension coil unit and superconducting magnetic suspension system |
| WO2023201634A1 (en) * | 2022-04-19 | 2023-10-26 | 哈尔滨工业大学 | Moving armature segmented permanent magnet synchronous linear motor and driving control method |
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Cited By (17)
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| CN105743321A (en) * | 2014-12-09 | 2016-07-06 | 鸿富锦精密工业（深圳）有限公司 | Linear motor |
| CN104767346A (en) * | 2015-04-27 | 2015-07-08 | 重庆大学 | Electromagnetic type vibration energy collector based on Halbach array |
| CN106329875A (en) * | 2015-07-10 | 2017-01-11 | 上海微电子装备有限公司 | Multi-degree of freedom linear motor |
| CN105099122A (en) * | 2015-09-09 | 2015-11-25 | 华中科技大学 | Moving-magnet type long-stroke ultra-precision linear motion mechanism |
| CN105099122B (en) * | 2015-09-09 | 2017-06-13 | 华中科技大学 | A kind of moving-magnetic type long stroke ultraprecise straight-line motion mechanism |
| CN106549550B (en) * | 2015-09-23 | 2019-04-12 | 上海微电子装备（集团）股份有限公司 | A kind of linear motor, sports platform and lithographic equipment |
| CN106549550A (en) * | 2015-09-23 | 2017-03-29 | 上海微电子装备有限公司 | A kind of linear electric motors, sports platform and lithographic equipment |
| CN107872140A (en) * | 2016-09-26 | 2018-04-03 | 上海微电子装备（集团）股份有限公司 | A kind of voice coil motor and stage apparatus |
| CN108258877B (en) * | 2018-02-05 | 2019-10-11 | 东南大学 | A kind of permanent-magnetism linear motor based on stator arc with interior stepped mixed structure |
| CN108258877A (en) * | 2018-02-05 | 2018-07-06 | 东南大学 | A kind of permanent-magnetism linear motor based on stator arc with interior stepped mixed structure |
| CN108649769A (en) * | 2018-05-28 | 2018-10-12 | 浙江大学 | A kind of coreless permanent magnet linear synchronous motor based on Double Layer Winding structure |
| CN109462320A (en) * | 2018-11-02 | 2019-03-12 | 安徽大学 | The double-deck reversed dip winding coreless permanent magnet linear synchronous motor |
| CN109327126A (en) * | 2018-11-14 | 2019-02-12 | 哈尔滨工业大学 | A kind of linear motion device based on dynamic magnet steel arranged side by side |
| CN114694910A (en) * | 2020-12-25 | 2022-07-01 | 中国航天科工飞航技术研究院（中国航天海鹰机电技术研究院） | Zero-magnetic-flux electric suspension coil unit and superconducting magnetic suspension system |
| CN112671204A (en) * | 2021-01-18 | 2021-04-16 | 哈尔滨工业大学 | Multilayer winding magnetic suspension linear permanent magnet synchronous motor |
| CN112671204B (en) * | 2021-01-18 | 2022-07-01 | 哈尔滨工业大学 | Multilayer winding magnetic suspension linear permanent magnet synchronous motor |
| WO2023201634A1 (en) * | 2022-04-19 | 2023-10-26 | 哈尔滨工业大学 | Moving armature segmented permanent magnet synchronous linear motor and driving control method |
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