CN109547717A - THz wave array image sensor chip - Google Patents

THz wave array image sensor chip Download PDF

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Publication number
CN109547717A
CN109547717A CN201811292307.8A CN201811292307A CN109547717A CN 109547717 A CN109547717 A CN 109547717A CN 201811292307 A CN201811292307 A CN 201811292307A CN 109547717 A CN109547717 A CN 109547717A
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CN
China
Prior art keywords
thz wave
image sensor
terahertz
sensor chip
array image
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201811292307.8A
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Chinese (zh)
Inventor
方桐
刘力源
刘剑
吴南健
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Institute of Semiconductors of CAS
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Institute of Semiconductors of CAS
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Priority to CN201811292307.8A priority Critical patent/CN109547717A/en
Publication of CN109547717A publication Critical patent/CN109547717A/en
Pending legal-status Critical Current

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    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith
    • H04N25/76Addressed sensors, e.g. MOS or CMOS sensors
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith
    • H04N25/71Charge-coupled device [CCD] sensors; Charge-transfer registers specially adapted for CCD sensors
    • H04N25/75Circuitry for providing, modifying or processing image signals from the pixel array
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith
    • H04N25/76Addressed sensors, e.g. MOS or CMOS sensors
    • H04N25/77Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith
    • H04N25/76Addressed sensors, e.g. MOS or CMOS sensors
    • H04N25/77Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components
    • H04N25/772Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components comprising A/D, V/T, V/F, I/T or I/F converters

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  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)

Abstract

The present invention provides a kind of THz wave array image sensor chips, are related to THz wave detection technology field.The chip includes: Terahertz pixel array for receiving terahertz wave signal and exporting DC simulation signal;Column parallel read-out circuit by DC simulation signal for amplifying and being converted to digital signal;Electric power bias circuit is for providing bias voltage and bias current;Digital Logic control module is used to provide the line election time of parameter configuration and the control Terahertz pixel array to the column parallel read-out circuit to realize different imaging frame rates.The present invention is integrated on same silicon wafer by the detection array that terahertz detector is made into and by reading circuit, Digital Logic control module and electric power bias circuit, solves the problems, such as that single pixel scanning imagery takes long time and imaging system is excessively complicated.

Description

THz wave array image sensor chip
Technical field
The present invention relates to THz wave detection technology field field more particularly to a kind of THz wave array image sensors Chip.
Background technique
THz wave refers to electromagnetic wave of the frequency within the scope of 0.1THz~10THz, and wave band is located at millimeter wave and infrared Between light.THz wave has many unique properties, in safety inspection, biomedical imaging, quality monitoring and lossless detection Equal fields have huge application prospect, and terahertz imaging majority is single pixel scanning imagery at present, or use piece foreign trader Signal is amplified and handled with amplifier and ADC, or uses Advanced Packaging by pixel array and reading circuit module It is packaged together, the above terahertz imaging system is not only complicated and higher cost.
Summary of the invention
(1) technical problems to be solved
In view of above-mentioned technical problem, the invention proposes a kind of by THz wave array image sensor chip, at least Part solves above-mentioned technical problem.
(2) technical solution
According to an aspect of the present invention, a kind of THz wave array image sensor chip is provided, comprising:
Terahertz pixel array, for receiving terahertz wave signal and exporting DC simulation signal;
Column parallel read-out circuit, the DC simulation signal for exporting Terahertz column pixel amplify and are converted to number Word signal;
Electric power bias circuit, for providing bias voltage to the Terahertz pixel array and the column parallel read-out circuit And bias current;
Digital Logic control module, for providing parameter configuration and the control terahertz to the column parallel read-out circuit Hereby the line election time of pixel array is to realize different imaging frame rates.
In a further embodiment, the Terahertz pixel array is greater than 1 × 1.
In a further embodiment, each pixel includes: on-chip antenna, field-effect crystalline substance in the Terahertz pixel array Body pipe, matching network, notch filter and row selecting pipe;Wherein, the source electrode of the field effect transistor by matching network with The on-chip antenna is connected, and the drain electrode of the field effect transistor is connected with the row selecting pipe, the field effect transistor The grid of pipe is connected with the notch filter.
In a further embodiment, the column parallel read-out circuit includes multiple row reading circuit, and each column are read Circuit includes chopper amplifier, for amplifying the DC simulation signal, and is output to analog-digital converter;Modulus turns Parallel operation, for the output signal of the amplifier to be converted to digital signal.
In a further embodiment, its gain of the chopper amplifier and chopping frequency and analog-digital converter Reference voltage is programmable.
6, THz wave array image sensor chip according to claim 4 or 5, which is characterized in that the mould Number converter is over-sampling type analog-digital converter or successive approximation register type analog-to-digital converter.
In a further embodiment, the Digital Logic control module provides ginseng to the column parallel read-out circuit Number configuration, for the copped wave frequency of chopper inside gain and the chopping frequency for controlling chopper amplifier, and control analog-digital converter Rate and reference voltage numerical value.
In a further embodiment, the on-chip antenna is paster antenna, butterfly antenna, loop aerial or dipole Antenna.
In a further embodiment, described notch filter one end is connected with the grid of field effect transistor, another End is open circuit, and its length is determined according to the THz wave wavelength detected.
In a further embodiment, the matching network includes microstrip line and its between field effect transistor source electrode Interconnection metal contact hole.
(3) beneficial effect
It can be seen from the above technical proposal that THz wave array image sensor chip of the present invention is by Terahertz pixel battle array Column, column parallel read-out circuit, electric power bias circuit, Digital Logic control module are integrated on a chip, to have following The utility model has the advantages that
(1) THz wave array image sensor chip provided by the invention can be carried out focal plane imaging, than traditional single picture Plain scanning imagery speed is many fastly;
(2) DC simulation that THz wave array image sensor chip provided by the invention can export pixel in array Signal is directly handled and is exported in piece as digital signal, is needed not rely on commercial chip or instrument outside piece, is made whole Body structure is simpler, keeps imaging system easier, and overall price is less expensive, is suitble to produce in enormous quantities.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of THz wave of embodiment of the present invention array image sensor chip;
Fig. 2 is the dot structure schematic diagram of THz wave of embodiment of the present invention array image sensor chip;
Fig. 3 is the operation schematic diagram of THz wave of embodiment of the present invention array image sensor chip.
Specific embodiment
To make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with specific embodiment, and reference Attached drawing, the present invention is described in further detail.
The embodiment of the present invention will do referring to appended attached drawing in rear and more comprehensively describe to property, some of but and not all Embodiment will be shown.In fact, various embodiments of the present invention can be realized in many different forms, and it is not necessarily to be construed as It is limited to this several illustrated embodiment;Relatively, these embodiments are provided so that the present invention meets applicable legal requirement.
According to one embodiment of present invention, a kind of THz wave array image sensor chip is provided, comprising:
Terahertz pixel array, for receiving terahertz wave signal and exporting DC simulation signal;
Column parallel read-out circuit, the DC simulation signal for exporting Terahertz column pixel amplify and are converted to number Word signal;
Electric power bias circuit, for providing bias voltage to the Terahertz pixel array and the column parallel read-out circuit And bias current;
Digital Logic control module, for providing parameter configuration and the control terahertz to the column parallel read-out circuit Hereby the line election time of pixel array is to realize different imaging frame rates.
Detection array that terahertz detector is made by the present invention and by reading circuit, Digital Logic control module and power supply Biasing circuit is integrated on same silicon wafer, solves that single pixel scanning imagery takes long time and imaging system is excessively complicated asks Topic.
Wherein, the Terahertz pixel array is pixel array greater than 1 × 1, for receiving terahertz wave signal and defeated Low-frequency d analog signal supplies the column parallel read-out processing of circuit out.
In the present embodiment, each pixel includes: on-chip antenna in the Terahertz pixel array, for receiving THz wave Signal;Field effect transistor includes source electrode, drain and gate, and source electrode is used to input the THz wave letter that the antenna receives Number, drain electrode is used for output signal, is loaded with a bias voltage on grid, for providing bias voltage, makes field effect transistor Pipe works in peak response area;Matching network, the terahertz wave signal power for receiving the antenna maximize transmission Effect transistor is stated to place;Notch filter makes terahertz wave signal form AC deposition in grid, eliminates outside lead to field The influence of effect transistor;Row selecting pipe, for choosing the same a line probe unit detected.Wherein, the field effect The source electrode of transistor is answered to be connected by matching network with the on-chip antenna, the drain electrode of the field effect transistor and the row Selecting pipe is connected, and the grid of the field effect transistor is connected with the notch filter.Wherein, the notch filter One end is connected with the grid of field effect transistor, and the other end is open circuit, and its length is determined according to the THz wave wavelength detected It is fixed, it is subject to simulated trim again in a quarter of CMOS insulating medium layer medium wavelength for THz wave to be measured.Wherein, the matching Network includes microstrip line and its interconnection metal contact hole between field effect transistor source electrode.Preferably, the on-chip antenna For paster antenna, butterfly antenna, loop aerial or dipole antenna.
Wherein, the column parallel read-out circuit amplifies the DC simulation signal exported from Terahertz pixel, later The DC simulation signal of amplification is converted into digital signal and is exported.
In the present embodiment, the column parallel read-out circuit includes multiple row reading circuit, and each row reading circuit wraps Chopper amplifier is included, for amplifying the DC simulation signal, and is output to analog-digital converter;Analog-digital converter is used In the output signal of the amplifier is converted to digital signal.In the present embodiment, its gain of the chopper amplifier and The reference voltage of chopping frequency and analog-digital converter is programmable.Preferably, the analog-digital converter is over-sampling pattern Number converter or successive approximation register type analog-to-digital converter.
Wherein, the Digital Logic control module is by providing parameter configuration and control to the column parallel read-out circuit The line election time of pixel array is to realize different imaging frame rates.
In the present embodiment, the Digital Logic control module provides parameter configuration to the column parallel read-out circuit, Chopping frequency and reference for chopper inside gain and the chopping frequency for controlling chopper amplifier, and control analog-digital converter Voltage value.In an exemplary embodiment of the present invention, a kind of THz wave array image sensor chip is provided.It should THz wave array image sensor chip includes;Terahertz pixel array,;Column parallel read-out circuit, electric power bias circuit and Digital Logic control module.By work in the THz wave array image sensor under 860GHz frequency for, to the present invention into One step is described in detail.
Fig. 1 is the structural schematic diagram of THz wave of embodiment of the present invention array image sensor, as shown in Figure 1, of the invention By Terahertz pixel array, column parallel read-out circuit, electric power bias circuit and digital control logic module are integrated in same silicon wafer On, chip is realized using 180nm 1P6M standard CMOS process, and chip center is pixel array, and array size is 24 × 32, core The piece left side is Digital Logic control module, is electric power bias circuit on the right of chip, and chip is up and down column parallel read-out circuit, due to Width is larger when the layout drawing of reading circuit, so respectively place 16 row reading circuits up and down, above 16 column processing be odd number Column pixel, below 16 column processing be even column pixels.
Fig. 2 is the single pixel structural representation in the pixel array of THz wave of embodiment of the present invention array image sensor Figure, as shown in Fig. 2, wherein antenna is connected to the source electrode of field effect transistor by matching network, the grid of field effect transistor is connect There is a notch filter, in order to make grid be AC deposition under THz wave frequency range, the drain electrode of field effect transistor is followed by a line Selecting pipe, row selecting pipe gates the then external output signal of pixel energy, if row selecting pipe is by the not external output signal of pixel.
Fig. 3 is THz wave of embodiment of the present invention array image sensor pixel array operation schematic diagram.As shown in figure 3, Row selection signal each moment only chooses a line, and the output signal of 32 pixels of a line then passes through row selecting pipe and is connected to 32 column Handled on reading circuit, after the processes pixel of a line is complete, the row selection signal be it is low, the row selecting pipe of the row is all ended, The pixel of this line is exported just to be disconnected between 32 row reading circuits, and then row selection signal makes the row selecting pipe of next line High level turns it on, and and then the 32 of this line pixel output signal is connected to 32 row reading circuits and is handled, successively 24 row pixels of the array are handled, 24 rows have been handled, and are a frame images.
So far, attached drawing is had been combined the present embodiment is described in detail.According to above description, those skilled in the art There should be clear understanding to THz wave array image sensor of the present invention.The present invention by Terahertz pixel array, column simultaneously Row reading circuit, Digital Logic control module and electric power bias circuit module are integrated on same silicon wafer, the THz wave array Imaging sensor can be carried out focal plane imaging, more many fastly than traditional single pixel scanning imagery speed, and THz wave array image The DC simulation signal that pixel in array exports can directly be handled in piece and be exported as digital signal by sensor, be not required to To keep overall structure simpler by the commercial chip or instrument outside piece,.
It should be noted that in attached drawing or specification text, the implementation for not being painted or describing is affiliated technology Form known to a person of ordinary skill in the art, is not described in detail in field.In addition, the above-mentioned definition to each element and method is simultaneously It is not limited only to various specific structures, shape or the mode mentioned in embodiment, those of ordinary skill in the art can carry out letter to it It singly changes or replaces.
It should also be noted that, can provide the demonstration of the parameter comprising particular value herein, but these parameters are without definite etc. In corresponding value, but analog value can be similar in acceptable error margin or design constraint.The side mentioned in embodiment It is only the direction with reference to attached drawing to term, such as "upper", "lower", "front", "rear", "left", "right" etc., is not used to limit this The protection scope of invention.
Terahertz pixel array, column parallel read-out circuit, Digital Logic are controlled in conclusion the present invention provides a kind of Module and electric power bias circuit module are integrated on same silicon wafer, the THz wave array image sensor can be carried out focal plane at Picture, it is more many fastly than traditional single pixel scanning imagery speed, and THz wave array image sensor can export pixel in array DC simulation signal directly handled and exported in piece need not rely on for digital signal commercial chip outside piece or Instrument keeps overall structure simpler.
Particular embodiments described above has carried out further in detail the purpose of the present invention, technical scheme and beneficial effects Describe in detail bright, it should be understood that the above is only a specific embodiment of the present invention, is not intended to restrict the invention, it is all Within the spirit and principles in the present invention, any modification, equivalent substitution, improvement and etc. done should be included in protection of the invention Within the scope of.

Claims (10)

1. a kind of THz wave array image sensor chip characterized by comprising
Terahertz pixel array, for receiving terahertz wave signal and exporting DC simulation signal;
Column parallel read-out circuit, the DC simulation signal for exporting Terahertz column pixel amplify and are converted to digital letter Number;
Electric power bias circuit, for the Terahertz pixel array and column parallel read-out circuit offer bias voltage and partially Set electric current;
Digital Logic control module, for providing parameter configuration and the control Terahertz picture to the column parallel read-out circuit The line election time of pixel array is to realize different imaging frame rates.
2. THz wave array image sensor chip according to claim 1, which is characterized in that the Terahertz pixel Array is greater than 1 × 1.
3. THz wave array image sensor chip according to claim 1 or 2, which is characterized in that the Terahertz Each pixel includes: on-chip antenna, field effect transistor, matching network, notch filter and row selecting pipe in pixel array;Its In, the source electrode of the field effect transistor is connected by matching network with the on-chip antenna, the field effect transistor Drain electrode is connected with the row selecting pipe, and the grid of the field effect transistor is connected with the notch filter.
4. THz wave array image sensor chip according to claim 1, which is characterized in that the column parallel read-out Circuit includes multiple row reading circuit, and each row reading circuit includes chopper amplifier, is used for the DC simulation signal It amplifies, and is output to analog-digital converter;Analog-digital converter, for the output signal of the amplifier to be converted to digital letter Number.
5. THz wave array image sensor chip according to claim 4, which is characterized in that the chopper amplification The reference voltage of its gain of device and chopping frequency and analog-digital converter is programmable.
6. THz wave array image sensor chip according to claim 4 or 5, which is characterized in that the modulus turns Parallel operation is over-sampling type analog-digital converter or successive approximation register type analog-to-digital converter.
7. THz wave array image sensor chip according to claim 1, which is characterized in that the Digital Logic Control module provides parameter configuration to the column parallel read-out circuit, gain and chopping frequency for control chopper amplifier, with And the chopping frequency and reference voltage numerical value of control analog-digital converter inside chopper.
8. THz wave array image sensor chip according to claim 3, which is characterized in that the on-chip antenna is Paster antenna, butterfly antenna, loop aerial or dipole antenna.
9. THz wave array image sensor chip according to claim 3, which is characterized in that the notch filter One end is connected with the grid of field effect transistor, and the other end is open circuit, and its length is determined according to the THz wave wavelength detected It is fixed.
10. THz wave array image sensor chip according to claim 3, which is characterized in that the matching network Interconnection metal contact hole including microstrip line and its between field effect transistor source electrode.
CN201811292307.8A 2018-10-31 2018-10-31 THz wave array image sensor chip Pending CN109547717A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110855916A (en) * 2019-11-22 2020-02-28 中国电子科技集团公司第四十四研究所 Analog signal reading circuit array with variable output channel number and reading method
CN112230297A (en) * 2020-09-03 2021-01-15 广东工业大学 Detector based on NxM multi-frequency antenna array and SBD array

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CN106328754A (en) * 2015-07-03 2017-01-11 中国科学院苏州纳米技术与纳米仿生研究所 Combined terahertz wave detector
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110855916A (en) * 2019-11-22 2020-02-28 中国电子科技集团公司第四十四研究所 Analog signal reading circuit array with variable output channel number and reading method
CN110855916B (en) * 2019-11-22 2021-12-24 中国电子科技集团公司第四十四研究所 Analog signal reading circuit array with variable output channel number and reading method
CN112230297A (en) * 2020-09-03 2021-01-15 广东工业大学 Detector based on NxM multi-frequency antenna array and SBD array
CN112230297B (en) * 2020-09-03 2024-04-09 广东工业大学 Detector based on N×M multi-frequency antenna array and SBD array

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Application publication date: 20190329