CN109521654A - A kind of inclination joining method of scanning light source - Google Patents
A kind of inclination joining method of scanning light source Download PDFInfo
- Publication number
- CN109521654A CN109521654A CN201811575714.XA CN201811575714A CN109521654A CN 109521654 A CN109521654 A CN 109521654A CN 201811575714 A CN201811575714 A CN 201811575714A CN 109521654 A CN109521654 A CN 109521654A
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- CN
- China
- Prior art keywords
- light source
- scanning
- module
- module light
- inclination
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2004—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light
Abstract
The present invention relates to a kind of inclination joining methods of scanning light source, which comprises the steps of: 1., module light source determine, according to the calculating of scanning area, choose the module light source of suitable quantity and spot size；2., light source incline, the module light source levels chosen are well placed, and the direction for keeping it vertical with scanning direction degree into θ angle, θ be 10-60 degree, form it into three block scan regions, the delta-shaped region of intermediate parallel quadrilateral area and two sides；3., light source splicing, the module light source for setting angle is spliced on scanning activity device, it can be ensured that the case where being not in gap and seam when light source scanning.
Description
Technical field
The present invention relates to array exposure field more particularly to a kind of inclination joining methods of scanning light source, using light source die
Block is spliced, and is suitable for needing the field of large area UVLED array exposure.
Background technique
The integrated level and quality of printed wiring board depend primarily on the performance of ultraviolet exposure machine, in recent years LED because its energy conservation,
Environmental protection, the service life is long, the advantages that few of generating heat is gradually in every field instead of conventional light source, also has compared to mercury lamp light source and opens
That is the advantages such as pass, are more suitable for exposure light source.
When assist side exposes, large area UVLED array exposure is needed, it is therefore desirable to splice to light source module, such as
Shown in Fig. 2, light source module all includes mostly single table surface light source mechanical cover 5, and separate unit area source can be formed on working face 4
In the spot size 5 of working face, the splicing of light source module is carried out according to A scheme in Fig. 2, it may appear that between scanning as shown in the figure
Gap, according in Fig. 2 B scheme carry out light source module splicing, theoretically feasible, the existing operation that is also not always the case mostly,
There are certain defects for this scheme, it is necessary to which the moment keeps high-precision to run, and accuracy requirement is too high, if there is trueness error, meeting
There is the seam in figure.
Summary of the invention
The purpose of the present invention is in view of the above drawbacks of the prior art, provide a kind of inclination joining method of scanning light source.
In order to achieve the goal above, the technical solution adopted by the present invention are as follows: a kind of inclination joining method of scanning light source, packet
Include following steps:
1., module light source determine, according to the calculating of scanning area, choose the module light source of suitable quantity and spot size；
2., light source incline, the module light source levels chosen are well placed, and the direction for keeping it vertical with scanning direction is into θ angle
Degree, θ are 10-60 degree, form it into three block scan regions, the delta-shaped region of intermediate parallel quadrilateral area and two sides；
3., light source splicing, the module light source for setting angle is spliced on scanning activity device.
Preferably, 3. light source splices in step step, when module light source splices, keeps two adjacent light source modules mechanical outer
The back side panel of shell is bonded with another front side board and is installed on scanning activity device, and makes the delta of two module light sources
In the rectangular region of the same front and back trend in domain.
Preferably, step 3. light source splicing step in, module light source splice when, make all light sources center be in and scanning
It on the vertical straight line in direction and is installed on scanning activity device, and the spacing between two neighboring light source is the mould after inclination
Twice in the projection with scanning direction vertical direction of block light source spot size.
Preferably, module light source include the LED lamp panel in single table surface light source mechanical cover and set gradually, fly lens and
Common field lens, and the center of LED lamp panel, fly lens and common field lens is on same straight line.
Detailed description of the invention
Fig. 1 is the module light source schematic diagram after getting rid of single table surface light source mechanical cover.
Fig. 2 is existing connection scheme schematic diagram.
Fig. 3 is the schematic diagram of 1 connection scheme of embodiment.
Fig. 4 is the schematic diagram of 2 connection scheme of embodiment.
Label character as shown in the figure indicates are as follows: 1, LED lamp panel；2, fly lens；3, common field lens；4, working face；5, single
Table top light source mechanical cover；6, spot size of the separate unit area source in working face；41, spot size；42, common field lens size.
Dash area expression is module energy of light source distribution situation in figure.
Specific embodiment
In order to make those skilled in the art more fully understand technical solution of the present invention, with reference to the accompanying drawing to the present invention into
Row detailed description, the description of this part be only it is exemplary and explanatory, should not have any limitation to protection scope of the present invention
Effect.
Embodiment 1
As shown in figure 3, specific structure of the present invention are as follows: a kind of inclination joining method of scanning light source includes the following steps:
1., module light source determine, according to the calculating of scanning area, choose the module light source of suitable quantity and spot size；
2., light source incline, the module light source levels chosen are well placed, and the direction for keeping it vertical with scanning direction is into θ angle
Degree, θ are 10-60 degree, form it into three block scan regions, the delta-shaped region of intermediate parallel quadrilateral area and two sides；
3., light source splicing, the module light source for setting angle is spliced on scanning activity device, module light source splice when, make phase
The back side panel of two adjacent light source module mechanical covers is bonded with another front side board to be installed on scanning activity device, and makes
In the rectangular region of the same front and back trend of the delta-shaped region of two module light sources.
The product on working face 4 is scanned using above-mentioned spliced light source, two blocks of module light sources have sweeping for overlapping
Region is retouched, therefore the case where be not in gap and seam, due to energy on the individual module light source direction vertical with scanning direction
Amount distribution is successively rising-balance-decline, and the part for scanning overlapping experienced the twice sweep of adjacent block light source, therefore, two
The energy of the scanning area of block module light source overlapping can be balanced with other positions substantially, it is ensured that the effect of scanning.
Embodiment 2
A kind of inclination joining method of scanning light source as shown in Figure 4, includes the following steps:
1., module light source determine, according to the calculating of scanning area, choose the module light source of suitable quantity and spot size；
2., light source incline, the module light source levels chosen are well placed, and the direction for keeping it vertical with scanning direction is into θ angle
Degree, θ are 10-60 degree, form it into three block scan regions, the delta-shaped region of intermediate parallel quadrilateral area and two sides；
3., light source splicing, the module light source for setting angle is spliced on scanning activity device, module light source splice when, make phase
The back side panel of two adjacent light source module mechanical covers is bonded with another front side board to be installed on scanning activity device, and makes
In the rectangular region of the same front and back trend of the delta-shaped region of two module light sources.
Preferably, step 3. light source splicing step in, module light source splice when, make all light sources center be in and scanning
It on the vertical straight line in direction and is installed on scanning activity device, and the spacing between two neighboring light source is the mould after inclination
Twice in the projection with scanning direction vertical direction of block light source spot size.
Spliced splicing light source is scanned using the above scheme, first makes scanning activity device along scanning direction walking one
A stroke completes single pass, moves a certain distance scanning activity device along the direction vertical with scanning direction later,
This distance is equal with module light source spot size with the projected length of scanning direction vertical direction, fills scanning activity again later
Direction walking one stroke opposite along scanning direction is set, completes single pass again, this is step-by-step movement scanning, due to single
Energy distribution is successively rising-balance-decline on the module light source direction vertical with scanning direction, during twice sweep,
Overlapping scan can be occurred in the delta-shaped region twice of single source, therefore can ensure the balance of energy, be also achieved continuously
Gap and jointless scanning.
Preferably, module light source includes the LED lamp panel 1 in single table surface light source mechanical cover 6 and set gradually, fly lens
2 and common field lens 3, and the center of LED lamp panel 1, fly lens 2 and common field lens 3 is on same straight line.
Every LED lamp bead forms same light on working face 4 after fly lens 2 and common field lens 3 in LED lamp panel 1
Spot, therefore the hot spot overlapping that all LED lamp beads are formed on working face 4, so that hot spot is steady with good uniformity and uniformly
It is qualitative.
It should be noted that, in this document, the terms "include", "comprise" or its any other variant are intended to non-row
His property includes, so that the process, method, article or equipment for including a series of elements not only includes those elements, and
And further include other elements that are not explicitly listed, or further include for this process, method, article or equipment institute it is intrinsic
Element.
Used herein a specific example illustrates the principle and implementation of the invention, the explanation of above example
It is merely used to help understand method and its core concept of the invention.The above is only a preferred embodiment of the present invention, it answers
When pointing out due to the finiteness of literal expression, and objectively there is unlimited specific structure, for the common skill of the art
For art personnel, without departing from the principle of the present invention, several improvement, retouching or variation can also be made, can also incited somebody to action
Above-mentioned technical characteristic is combined in the right way；These improve retouching, variation or combination, or the not improved structure by invention
Think and technical solution directly applies to other occasions, is regarded as protection scope of the present invention.
Claims (4)
1. a kind of inclination joining method of scanning light source, which comprises the steps of:
1., module light source determine, according to the calculating of scanning area, choose the module light source of suitable quantity and spot size；
2., light source incline, the module light source levels chosen are well placed, and the direction for keeping it vertical with scanning direction is into θ angle
Degree, θ are 10-60 degree, form it into three block scan regions, the delta-shaped region of intermediate parallel quadrilateral area and two sides；
3., light source splicing, the module light source for setting angle is spliced on scanning activity device.
2. a kind of inclination joining method of scanning light source according to claim 1, which is characterized in that 3. light source splices step
In step, when module light source splices, paste the back side panel of two adjacent light source module mechanical covers and another front side board
Conjunction is installed on scanning activity device, and makes the rectangular region of the same front and back trend of the delta-shaped region of two module light sources
It is interior.
3. a kind of inclination joining method of scanning light source according to claim 1, which is characterized in that 3. light source splices step
In step, when module light source splices, the center of all light sources is made to be on the straight line vertical with scanning direction and be installed to scanning
On head, and the spacing between two neighboring light source be inclination after module light source spot size with scanning direction hang down
Histogram to twice of projection.
4. a kind of inclination joining method of scanning light source according to claim 1-3, which is characterized in that module light
Source includes LED lamp panel (1), fly lens (2) and the common field lens (3) in single table surface light source mechanical cover (6) and set gradually,
And the center of LED lamp panel (1), fly lens (2) and common field lens (3) is on same straight line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811575714.XA CN109521654A (en) | 2018-12-22 | 2018-12-22 | A kind of inclination joining method of scanning light source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811575714.XA CN109521654A (en) | 2018-12-22 | 2018-12-22 | A kind of inclination joining method of scanning light source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109521654A true CN109521654A (en) | 2019-03-26 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201811575714.XA Pending CN109521654A (en) | 2018-12-22 | 2018-12-22 | A kind of inclination joining method of scanning light source |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060121395A1 (en) * | 2001-06-27 | 2006-06-08 | Fries David P | Maskless photolithography for etching and deposition |
| CN106537224A (en) * | 2014-04-15 | 2017-03-22 | 荷兰应用科学研究会(Tno) | Exposure head, exposure apparatus and method of operating an exposure head |
| CN107589636A (en) * | 2017-10-31 | 2018-01-16 | 中国科学院重庆绿色智能技术研究院 | The LED exposure device and its ultraviolet exposure machine of a kind of ultraviolet exposure machine |
| CN108255021A (en) * | 2016-12-29 | 2018-07-06 | 旭东机械工业股份有限公司 | Maskless laser direct writing exposure machine |
-
2018
- 2018-12-22 CN CN201811575714.XA patent/CN109521654A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060121395A1 (en) * | 2001-06-27 | 2006-06-08 | Fries David P | Maskless photolithography for etching and deposition |
| CN106537224A (en) * | 2014-04-15 | 2017-03-22 | 荷兰应用科学研究会(Tno) | Exposure head, exposure apparatus and method of operating an exposure head |
| CN108255021A (en) * | 2016-12-29 | 2018-07-06 | 旭东机械工业股份有限公司 | Maskless laser direct writing exposure machine |
| CN107589636A (en) * | 2017-10-31 | 2018-01-16 | 中国科学院重庆绿色智能技术研究院 | The LED exposure device and its ultraviolet exposure machine of a kind of ultraviolet exposure machine |
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Application publication date: 20190326 |
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