CN109516106B - Ion source supporting table - Google Patents
Ion source supporting table Download PDFInfo
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- CN109516106B CN109516106B CN201711143720.3A CN201711143720A CN109516106B CN 109516106 B CN109516106 B CN 109516106B CN 201711143720 A CN201711143720 A CN 201711143720A CN 109516106 B CN109516106 B CN 109516106B
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- ion source
- pair
- rails
- support table
- plasma generation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/022—Details
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
- B65G47/24—Devices influencing the relative position or the attitude of articles during transit by conveyors orientating the articles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/38—Mounting, supporting, spacing, or insulating electron-optical or ion-optical arrangements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0214—Articles of special size, shape or weigh
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Combustion & Propulsion (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Plasma Technology (AREA)
Abstract
The invention provides an ion source support table, which can enable an ion source (101) placed on the ion source support table (X) to be in a falling posture in a stable state. An ion source support table (X) for placing an ion source (101), the ion source (101) including an elongated plasma generation container (10) and a pair of rollers (31), the pair of rollers (31) being provided on side walls (11b) of the plasma generation container (10) that are opposed in a direction perpendicular to a long side direction, the ion source support table (X) including: a pair of rails (5) on which a pair of rollers (31) are rotatably placed in a state in which the ion source (101) is suspended; and a pulling mechanism (6) that pulls the ion source (101) from one end (A) side to the other end (B) side of the rails (5) in a state where the pair of rollers (31) are placed on the pair of rails (5).
Description
Technical Field
The present invention relates to an ion source support table supporting an ion source.
Background
As shown in patent document 1, there is a conventional ion source support table for placing and conveying an ion source detached from an apparatus main body such as an ion beam irradiation apparatus. Patent document 1 describes: in order to convey an ion source having a large height in a stable state, the ion source in an upright posture is laid down, and the ion source is supported in a laid down posture having a small height.
Specifically, the ion source includes a pair of rollers provided so as to sandwich the ion extraction opening, and a pair of rails on which the pair of rollers are rotatably placed is provided on the ion source support base.
Further, when the ion source is detached from the apparatus main body, the ion source is set to a forward tilted posture in which the roller is placed on the rail by attaching a wire to a position on the rear side of the ion source with respect to the gravity center and suspending the ion source. Thus, after the roller is placed on the rail, the ion source is gradually lowered, and the ion source falls forward by its own weight, and becomes a falling posture.
However, as described above, if it is desired to place the rollers on the rails while keeping the ion source suspended, for example, there may be the following problems: the ion source is shaken and becomes unstable, and positional deviation between the roller and the rail is caused. If the roller is placed on the track in a state where the positional deviation has occurred, there is a possibility that the following problems occur: the roller is separated from the track, the ion source falls from the ion source supporting table, the ion source and the ion source supporting table are damaged, and an artificial disaster occurs around the ion source supporting table.
Documents of the prior art
Patent document 1: japanese patent laid-open publication No. 2016-110827
Disclosure of Invention
The present invention has been made to solve the above-described problems, and a main object of the present invention is to enable an ion source placed on an ion source support table to be in a stable posture.
That is, the ion source support table according to the present invention is an ion source support table on which an ion source is placed, the ion source including an elongated plasma generation container and a pair of lower rollers provided on side walls of the plasma generation container facing each other in a direction perpendicular to a longitudinal direction, a pair of upper rollers provided on the side walls, and the lower rollers and the upper rollers being arranged linearly with a center of gravity of the ion source along a vertical direction in a state where the ion source is attached to an apparatus main body, the ion source support table including: a pair of rails on which the pair of lower rollers are rotatably placed in a state where the ion source is suspended; and a pulling mechanism that pulls the ion source from one end side to the other end side of the rails in a state where the pair of lower rollers are placed on the pair of rails, the pulling mechanism including a moving body that is provided outside the pair of rails and is movable from one end side to the other end side of the rails, and a pair of conveyor belts that are provided outside the pair of rails along the rails, the moving body moving while contacting a contacted member provided integrally with the plasma generation container, the moving bodies being mounted on the pair of conveyor belts, respectively.
The term "pulled from one end side to the other end side" as used herein means that the pulling direction is a direction from one end side to the other end side of the rail, and it is not always necessary to place a roller on one end side of the rail and pull the ion source until reaching the other end side of the rail.
According to the ion source support stand configured as described above, since the pulling mechanism pulls the ion source from one end of the rail to the other end thereof in a state where the pair of lower rollers are placed on the pair of rails, the ion source can be brought into a stable state when the ion source is pulled, even if the suspended ion source is in an unstable state. This makes it possible to bring the ion source into a stable posture and to convey the ion source in a stable posture.
Preferably, the pulling mechanism includes a moving body that is provided outside the pair of rails and is movable from one end side to the other end side of the rails, and the moving body moves while contacting a contacted member provided integrally with the plasma generation container.
According to this configuration, since the movable body is located outside the pair of rails, the operator can confirm the operation status, for example, whether the movable body is in contact with the contacted member, from outside the rails, and can perform the operation safely without entering inside the rails.
If the ion source is pulled by the pulling mechanism in a state where the ion source is out of balance, the roller engages with the rail, and if the ion source is further pulled from this state by a fixed pulling force, the roller may be disengaged and the ion source may roll off.
Therefore, it is preferable that the pulling mechanism be capable of manually adjusting the force with which the ion source is pulled.
According to the above configuration, when a danger is about to occur, the ion source can be stopped from being pulled according to the judgment of the operator, and an accident can be prevented.
Specific embodiments include the following configurations: the traction mechanism further includes a pair of conveyor belts provided along the rails on outer sides of the pair of rails, and the moving bodies are mounted on the pair of conveyor belts, respectively.
Preferably, the moving body has an accommodating recess which opens upward, and the contacted member is accommodated in the accommodating recess through the opening by placing the pair of lower rollers onto the pair of rails.
With this configuration, the contacted member can be brought into contact with the movable body by simply placing the pair of lower rollers on the pair of rails.
According to the present invention configured as described above, the ion source detached from the apparatus main body can be placed on the ion source support table and can be set in a stable state in a tilted posture.
Drawings
Fig. 1 is a diagram schematically showing the overall configuration of an ion irradiation apparatus according to the present embodiment.
Fig. 2 is a diagram schematically showing the ion source of this embodiment.
Fig. 3 is a view schematically showing the ion source support table of this embodiment.
Fig. 4 is a diagram illustrating the operation of the ion source handling system according to this embodiment.
Description of the reference numerals
X-ray source supporting table
100 ion irradiation apparatus
101 ion source
102 device body
10 plasma generating container
31 lower side roller
32 upper side roller
6 traction mechanism
61 moving body
62 conveyer belt
Z contacted part
Detailed Description
An embodiment of an ion source support table according to the present invention will be described.
The ion source support X of the present embodiment supports the ion source 101 constituting the ion irradiation device 100, and conveys the ion source 101 to a predetermined position.
First, the ion irradiation apparatus 100 will be described with reference to fig. 1.
The ion irradiation apparatus 100 is used for, for example, semiconductor manufacturing, and includes an apparatus main body 102 and an ion source 101, the apparatus main body 102 includes a mass separator 103, a separation slit 104, and the like, the ion source 101 is detachable from the apparatus main body 102, and the ion irradiation apparatus 100 irradiates an ion beam extracted from the ion source 101 toward a wafer W supported on a support bracket 105.
The ion source 101 generates an ion beam containing predetermined ions such as phosphorus, arsenic, and boron and emits the ion beam toward the apparatus main body 102, and specifically, as shown in fig. 2, the ion source 101 includes: an elongated plasma generation container 10 for generating plasma therein; an extraction electrode system (not shown) composed of a plurality of electrodes and extracting an ion beam from an extraction port O formed in the plasma generation container 10; and an electrode support member 20 connected to the plasma generation container 10 and supporting the extraction electrode system.
A filament (not shown) that emits thermal electrons is inserted into the plasma generation container 10, and the ion source gas introduced into the plasma generation container 10 is ionized by electrons emitted from the filament to generate plasma.
As shown in fig. 2, the plasma generation container 10 of the present embodiment has, for example, a rectangular parallelepiped shape, and has a vertically long shape in a state where the ion source 101 is attached to the apparatus main body 102.
The extraction port O is formed in a long strip shape on one side surface 11a (hereinafter, referred to as a front surface 11a) of the plasma generation container 10, and a flange portion 12 having a plurality of screw holes 13 is provided on the front surface 11 a.
The extraction electrode system (not shown) accelerates the ion beam by the action of the electric field and extracts the ion beam from the plasma generated in the plasma generation container 10, and is composed of, for example, an acceleration electrode, an extraction electrode, a suppression electrode, a ground electrode, and the like. The extraction electrode system is disposed in the vicinity of the extraction port O, and extracts the ribbon-shaped ion beam from the extraction port O.
The electrode support member 20 is a cylindrical body in which the plurality of electrodes are provided, and has one end face 21a attached to the front face 11a of the plasma generation container 10 and the other end face 21b attached to a mounting surface (not shown) of the apparatus main body 102. The mounting surface of the apparatus main body 102 is a surface on the mass separator 103 side, and is, for example, an end surface of a vacuum chamber (not shown) constituting a transport path of the ion beam. The electrode supporting member 20 is not limited to a cylindrical shape, and its shape may be variously changed.
More specifically, a flange portion 22 is provided on one end surface 21a and the other end surface 21b of the electrode supporting member 20, the flange portion 22 has a plurality of screw holes 23, and the plasma generation container 10 and the electrode supporting member 20 are connected by passing screws through the screw holes 13 of the front surface 11a of the plasma generation container 10 and the screw holes 23 of the one end surface 21a of the electrode supporting member 20. The device body 102 and the electrode supporting member 20 are connected by inserting screws through screw holes (not shown) on the mounting surface of the device body 102 and through screw holes 23 on the other end surface 21b of the electrode supporting member 20.
Thereby, the ion source 101 is attached to the apparatus main body 102 in a predetermined attachment posture.
As shown in fig. 1 and 2, the installation posture of the present embodiment is a posture in which the ion source 101 stands in the vertical direction, in other words, a posture in which the longitudinal direction of the plasma generation container 10 is parallel to the vertical direction.
The ion source 101 of the present embodiment further includes a lower roller 31 and an upper roller 32, and the lower roller 31 is disposed below the plasma generation container 10 and the upper roller 32 is disposed above the plasma generation container 10 in a state where the ion source 101 is mounted on the apparatus main body 102.
Here, the pair of lower rollers 31 are disposed so as to sandwich the draw-out opening O from a direction perpendicular to the longitudinal direction, and the pair of upper rollers 32 are disposed so as to sandwich the draw-out opening O from a direction perpendicular to the longitudinal direction. That is, the lower rollers 31 are disposed on the respective opposing side surfaces 11b extending in the longitudinal direction perpendicular to the front surface 11a, and the upper rollers 32 are similarly disposed on the respective opposing side surfaces 11 b.
The pair of lower rollers 31 are each configured such that: the height from the bottom surface 11c of the plasma generation container 10 is equal, and the distance from the front surface 11a is equal.
The pair of upper rollers 32 are each configured such that: the distance from the lower roller 31 upward in the longitudinal direction is equal, and the distance between the pair of upper rollers 32 is equal to the distance between the pair of lower rollers 31.
In the present embodiment, as shown in fig. 1, in a state where the ion source 101 is attached to the apparatus main body 102, the gravity centers G of the lower roller 31, the upper roller 32, and the ion source 101 are linearly arranged in the vertical direction.
The lower rollers 31 and the upper rollers 32 are rotatably supported by roller support members H, and are attached to the opposite side surfaces 11b of the plasma generation container 10 via the roller support members H.
Next, the ion source support X of the present embodiment will be described with reference to fig. 3.
The ion source support X is configured to place the ion source 101 in a suspended posture (hereinafter, referred to as an upright posture) with the ion source support X detached from the apparatus main body 102, and support the ion source 101 in a lying posture with a lower center of gravity G than that in the upright posture.
Specifically, as shown in fig. 3, the ion source support table X includes a carriage 4 and a pair of rails 5 provided on the carriage 4.
The carriage 4 includes a frame 41 and a plurality of wheels 42 attached to the frame 41. Each wheel 42 is attached to the lower surface of the frame 41, and rotates on, for example, a floor on which the apparatus main body 102 is disposed or a dedicated floor for carrying the ion source 101.
The pair of rails 5 are horizontal rails provided on the upper surface of the frame 41 and extending in parallel to each other in the horizontal direction.
More specifically, the distance separating the rails 5 is equal to the distance separating the pair of lower rollers 31 and the distance separating the pair of upper rollers 32, and the length of each rail 5 is longer than the distance separating the lower rollers 31 and the upper rollers 32.
As shown in fig. 3 and 4, the ion source support X of the present embodiment further includes a pulling mechanism 6, and the ion source 101 is pulled from one end a side to the other end B side of the rail by the pulling mechanism 6 in a state where the pair of lower rollers 31 are placed on the pair of rails 5.
The traction mechanism 6 has the following functions: the force pulling the ion source 101 is applied to a position lower than the center of gravity G of the ion source 101, the pair of lower rollers 31 are rolled from one end a side to the other end B side on the rail 5, and the ion source 101 is tilted from the standing posture to the tilted posture.
Specifically, the traction mechanism 6 includes: a movable body 61 movable from one end a side to the other end B side of the rail 5; and a driving unit 62 for moving the moving body 61. The movable body 61 moves from the one end a side of the rail 5 to the other end B side while contacting a contacted member Z provided integrally with the plasma generation container 10, thereby pulling the ion source 101.
The contacted members Z are a part of the ion source 101 or a member attached to the ion source 101, and as shown in fig. 2, in the present embodiment, a pair of contacted members Z are provided outside the ion source 101.
Specifically, the contacted member Z is a columnar member, extends outward from the pair of lower rollers 31, is attached to a roller support member H that rotatably supports the lower rollers 31, and extends in the axial direction of the lower rollers 31.
As shown in fig. 3, the moving body 61 is a block-shaped member made of, for example, resin, and formed with an accommodating recess 61S that opens upward, and the accommodating recess 61S accommodates the contacted member Z.
The depth dimension of the receiving recess 61S is set to be at least larger than the diameter of the contacted member Z, so that the contacted member Z can be received in the receiving recess 61S without protruding upward from the opening 61O.
The pulling mechanism 6 of the present embodiment can manually pull the ion source 101, and here, the pulling force can be manually adjusted. The adjustment of the traction force as referred to herein is not only the adjustment of the magnitude of the traction force, but also includes the adjustment of the direction of the traction force (i.e., whether the traction is traction or pushing).
Specifically, the traction mechanism 6 is configured to be able to manually move the movable body 61 by the driving unit 62. More specifically, the driving unit 62 of the present embodiment includes: a conveyor belt 621 on which the moving body 61 is mounted; and a handle 622 for manually moving the conveyor 621.
Here, the pair of conveyor belts 621 are provided outside each of the rails 5, and both of the conveyor belts 621 are interlocked by a link mechanism 63 including a plurality of gears, link members, and the like.
Specifically, the conveyor 621 is an endless belt-shaped so-called timing belt provided along each track 5, and the length along the track 5 is substantially equal to the length of the track 5 or slightly longer than the length of the track 5.
The handle 622 is connected to one of the conveyor belts 621 through a gear or the like (not shown), and is provided on the upper surface of the housing 41 on the side of the ion source 101 drawn in, i.e., on the side of the other end B of the rail 5, in view of operability and safety.
Further, for example, by rotating the handle 622 in the forward direction (for example, clockwise), the moving body 61 is conveyed from the one end a side to the other end B side of the rail 5 by the conveying belt 621, and by rotating the handle 622 in the reverse direction (for example, counterclockwise), the moving body 61 is conveyed from the other end B side to the one end a side of the rail 5 by the conveying belt 621.
In the present embodiment, when the handle 622 is rotated in the forward direction to transport the movable body 61 from the one end a side to the other end B side of the rail 5, a positive traction force acts on the ion source 101, and the higher the rotational speed of the handle 622, the larger the positive traction force, and the lower the rotational speed of the handle 622, the smaller the positive traction force. On the other hand, when the handle 622 is rotated in the reverse direction to transport the movable body 61 from the other end B side to the one end a side of the rail 5, a negative traction force (i.e., a pushing force) acts on the ion source 101, and the faster the rotational speed of the handle 622, the greater the negative traction force, and the slower the rotational speed of the handle 622, the smaller the negative traction force.
In addition, the pulling mechanism 6 can be manually switched between a pulling state in which a pulling force acts on the ion source 101 and a stopping state in which the pulling force does not act on the ion source 101. Specifically, the pulling force is applied to the ion source 101 by rotating the handle 622, and if the handle 622 is not operated, the pulling force is not applied to the ion source 101.
As shown in fig. 4, the ion source support table X configured as described above and the suspension mechanism Y suspending the ion source 101 detached from the apparatus main body 102 together constitute a conveyance system 200 that conveys the ion source 101.
The suspension mechanism Y suspends the ion source 101 so as to be movable in the vertical direction and the horizontal direction, and here, a chain block movable in the horizontal direction is used. An electric crane may also be used as the suspension mechanism Y.
Next, the operation of the conveyance system 200 will be described with reference to fig. 4.
First, a case will be described in which the ion source 101 attached to the apparatus main body 102 is detached and transported to a desired location.
First, the ion source support X is moved to the vicinity of the ion source 101 in a state where the ion source 101 is attached to the apparatus main body 102.
Next, in a state where the chain of the chain block is suspended on the ion source 101, for example, a user pulls out a screw connecting the apparatus main body 102 and the electrode supporting member 20, and removes the ion source 101 from the apparatus main body 102. Thereby, the plasma generation container 10 and the electrode support member 20 are integrally detached from the apparatus main body 102, and the ion source 101 is suspended by the suspension mechanism Y to be in an upright posture (a of fig. 4).
In the present embodiment, in order to suspend the ion source 101 while keeping the mounting posture, that is, in order to make the mounting posture and the standing posture the same, chains are suspended from, for example, the roller support member H supporting the upper roller 32, and the ion source 101 is suspended from directly above the center of gravity G. Further, a chain may be mounted on the plasma generation container 10.
Subsequently, the suspended ion source 101 is rotated or horizontally moved as necessary, and the ion source 101 is moved above the ion source support X. More specifically, the ion source 101 is moved so that the pair of lower rollers 31 are respectively positioned above the pair of rails 5 on the side of one end a.
Further, the ion source 101 is gradually lowered, and the pair of lower rollers 31 are placed to one end a side of the pair of rails 5 (b of fig. 4). At this time, the lower roller 31 is placed on the rail 5, and the movable body 61 is disposed in advance on the one end a side of the rail 5 so that the contacted member Z extending outward from the lower roller 31 is accommodated in the accommodating recess 61S of the movable body 61.
After placing the pair of lower rollers 31 on the one end a side of the pair of rails 5, it is confirmed that the contacted member Z has been accommodated in the accommodating recess 61S of the moving body 61, and then the ion source 101 is pulled from the one end a side to the other end B side of the rails 5 by the pulling mechanism 6. In the present embodiment, the operator moves the movable body 61 from the one end a side to the other end B side of the rail 5 by, for example, rotating the handle 622 in the forward direction (fig. 4 c).
In this way, by moving the movable body 61 from the one end a side to the other end B side of the rail 5 while bringing the movable body 61 into contact with the contacted member Z, the lower roller 31 rolls on the rail 5 from the one end a side to the other end B side, the upper roller 32 approaches the rail 5, and the ion source 101 is gradually inclined from the standing posture.
Further, if the pair of upper rollers 32 is placed on the rail 5, a state is brought in which both the lower roller 31 and the upper roller 32 are placed on the rail 5, and the ion source 101 is brought into a falling posture. In the present embodiment, the lead-out opening O faces downward in the collapsed posture.
The ion source 101 can be transported to a desired position in a stable state by removing the hook of the crane and moving the carriage 4 by, for example, an operator while maintaining the lodging posture.
Next, a case where the ion source 101 is attached to the apparatus main body 102 will be described.
First, the ion source 101 placed on the ion source support table X is moved to the vicinity of the apparatus main body 102. Further, the ion source 101 at this time is in a falling posture.
Next, the chain of the chain block is suspended on the ion source 101, and the ion source 101 is lifted. Thereby, the upper roller 32 is separated from the rail 5, and the lower roller 31 rolls from the other end B side to the one end a side on the rail 5. Further, the lower roller 31 is separated from the rail 5, and the ion source 101 is suspended and set in an upright posture.
At this time, in order to make the standing posture and the mounting posture the same, that is, in order to vertically stand the ion source 101, chains are respectively hung on, for example, the roller support member H supporting the upper roller 32, and the ion source 101 is hung from directly above the center of gravity G. Further, a chain may be mounted on the plasma generation container 10.
Next, the suspended ion source 101 is rotated, horizontally moved, or moved up and down as necessary, and brought close to the apparatus main body 102, and the apparatus main body 102 and the electrode supporting member 20 are connected by screws. Thus, the ion source 101 is attached to the apparatus main body 102 while being held in the standing posture.
In the ion source support table X of the present embodiment configured as described above, since the pulling mechanism 6 pulls the ion source 101 from the one end a side to the other end B side of the rail 5 in a state where the pair of lower rollers 31 are placed on the pair of rails 5, the ion source 101 can be brought into a stable state even when the suspended ion source 101 is pulled in a state where it is assumed that the ion source 101 is unstable. This allows the ion source 101 to be placed in a stable state in a collapsed posture, and the ion source 101 to be conveyed in a stable posture.
However, when the ion source 101 detached from the apparatus main body 102 is suspended so as to be tilted forward, for example, the ion source 101 is tilted and the ion source 101 and the apparatus main body 102 rub against each other at the time of detachment, which may damage the ion source 101 and the apparatus main body 102. Further, when the ion source 101 is detached from the apparatus main body 102, a load is applied to a screw or the like connecting the ion source 101 and the apparatus main body 102, and the screw or the like may be damaged.
On the other hand, when the suspended ion source 101 is attached to the apparatus main body 102 in a tilted posture, the ion source 101 is connected by screws or the like while being pushed toward the apparatus main body 102, which may cause a load on the screws or the like during attachment and damage in addition to a work effort.
In order to avoid such a problem, when the ion source 101 is detached from the apparatus main body 102, it is preferable to detach the ion source 101 in a state where the attachment posture is maintained without inclining the ion source 101 as much as possible, and on the other hand, if the ion source 101 is placed on the ion source support table X in a state where the attachment posture is maintained, it is not known which side of the one side a and the other side B of the rail 5 the ion source 101 falls, which is dangerous.
In contrast, according to the ion source support X of the present embodiment, since the pulling mechanism 6 pulls the ion source 101 from the one end a side to the other end B side of the rail 5 in a state where the pair of lower rollers 31 are placed on the pair of rails 5, even if the ion source 101 detached from the apparatus main body 102 is placed on the ion source support X in a state where the installation posture is maintained without tilting the ion source 101, the ion source 101 can be reliably tilted to one side of the rails.
Thus, when the ion source 101 is detached from the apparatus body 102, since it is not necessary to tilt the ion source 101, it is possible to prevent the ion source 101 and the apparatus body 102 from rubbing against each other and applying a load to a screw or the like during detachment.
Further, when the ion source 101 is attached to the apparatus main body 102, it is not necessary to forcibly push the ion source 101 to the apparatus main body 102, and it is possible to prevent work trouble and load from being applied to screws and the like.
Further, since the movable body 61 is positioned outside the pair of rails 5, the operator can confirm the working situation such as whether or not the movable body 61 is in contact with the contacted member Z from outside the rails 5, and can safely perform the work without entering inside the rails 5.
Further, since the force with which the ion source 101 is manually pulled by the pulling mechanism 6 can be adjusted, when a danger occurs, for example, when the ion source 101 is out of balance, the pulling of the ion source 101 can be stopped or the ion source can be pushed back by turning the handle in reverse according to the judgment of the operator. This can prevent accidents such as the lower roller 31 coming off the rail 5 or the ion source 101 falling over.
The present invention is not limited to the above embodiments.
For example, although the traction mechanism of the above embodiment uses a timing belt and transports the mobile body by a conveyor belt, the traction mechanism may be applied to any configuration as long as the mobile body is moved from one end side of the rail to the other end side, and specifically, a configuration using a spring balancer, a winch, or the like as the traction mechanism may be mentioned.
Specifically, the spring balancer or the capstan includes a hook (mounting portion) provided at the tip of the wire and a main body portion that pulls the hook, the hook is a movable body, and the main body portion is a driving portion.
More specifically, by hanging the hook on, for example, the plasma generation container, the hung portion becomes the contacted member. Thus, the hook functions as a moving body that moves from one end of the rail to the other end while contacting the contacted portion.
Further, the ion source can be pulled from one end side to the other end side by pulling the hook by the main body portion in a state where the main body portion is fixed to the other end side of the carriage, for example, and the lower roller is placed on one end side of the rail. The main body portion need not necessarily be fixed to the carriage, but may be fixed to a member positioned on the other end side of the rail, a floor surface, or the like.
In the above embodiment, the traction mechanism is configured to be able to move the movable body manually, but may be configured to be able to automatically move the movable body using a motor or the like, or may be provided with a transmission that can switch a transmission ratio of a moving speed of the movable body either manually or automatically.
Further, the pulling mechanism may push the ion source from one end side of the rail to the other end side.
In the above-described embodiment, the configuration in which the center of gravity of the lower roller, the upper roller, and the ion source is arranged in the vertical direction in the state in which the ion source is attached to the apparatus main body has been described, but all of them are not necessarily arranged in the vertical direction, and for example, the center of gravity of the lower roller and the upper roller may be shifted in the vertical direction.
Even in such an ion source, the ion source can be detached from the apparatus main body while maintaining the attachment posture by attaching the chain directly above the center of gravity of the ion source, and then the ion source can be brought into the tilted posture by the same operation as in the above-described embodiment.
In the above-described embodiment, the explanation has been made on the case where the upright posture and the mounting posture are the same posture, but for example, the ion source detached from the apparatus main body may be suspended in a posture inclined forward from the mounting posture, and the ion source suspended in the inclined posture may be set upright in the vertical direction and then placed on the ion source support table.
In the above embodiment, the ion source is pulled from one end side of the orbit to the other end side of the orbit in a state where the lower roller is placed on one end side of the orbit, but for example, a significantly longer orbit than the longitudinal direction of the ion source 101 may be prepared, and the ion source may be pulled from one end side of the orbit to the other end side of the orbit in a state where the lower roller is placed in the center portion or the other end side of the orbit.
Furthermore, when a long rail is used, more than two ion sources can be placed on one ion source support table.
The contacted member in the above embodiment is a member extending outward from the lower roller, but the contacted member may be a member extending outward from the opposite side surface of the plasma generation container, or may be a member extending outward from the side surface of the electrode support member, for example.
In the above embodiment, the lower roller and the upper roller are provided on the opposite side surfaces, but may be provided on the front surface and the back surface on the side opposite to the front surface, or may be provided on the electrode supporting member. In addition, the number of rollers is not limited to the number in the above embodiment, and for example, a pair of intermediate rollers may be provided between the upper roller and the lower roller.
In the above-described embodiment, the ion source support table has been described as supporting the ion source including the plasma generation container, the extraction electrode system, and the electrode support member, but the ion source support table may support an ion source not including the extraction electrode system and the electrode support member, that is, may support the plasma generation container.
The present invention is not limited to the above embodiment, and various modifications may be made without departing from the spirit of the present invention.
The technical features described in the embodiments (examples) of the present invention may be combined with each other to form a new technical solution.
Claims (3)
1. An ion source support table on which an ion source is placed, the ion source including an elongated plasma generation container and a pair of lower rollers provided on side walls of the plasma generation container that are opposed in a direction perpendicular to a longitudinal direction,
the ion source support table is characterized in that,
a pair of upper rollers are provided on the side walls,
wherein the lower roller and the upper roller are arranged linearly in a vertical direction with respect to a center of gravity of the ion source in a state where the ion source is attached to the apparatus main body,
the ion source support table includes:
a pair of rails on which the pair of lower rollers are rotatably placed in a state where the ion source is suspended; and
a pulling mechanism that pulls the ion source from one end side to the other end side of the rails in a state where the pair of lower rollers are placed on the pair of rails,
the traction mechanism has a moving body provided outside the pair of rails and movable from one end side to the other end side of the rails, and a pair of conveyor belts provided outside the pair of rails along the rails,
the movable bodies move while contacting a contacted member provided integrally with the plasma generation container, and the movable bodies are mounted on the pair of conveyor belts, respectively.
2. An ion source support table according to claim 1,
the pulling mechanism enables manual adjustment of the force pulling the ion source.
3. An ion source support table according to claim 1 or 2,
the moving body has a receiving recess opened upward,
by placing the pair of lower rollers onto the pair of rails, the contacted member is received into the receiving recess through the opening.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017180230A JP6653067B2 (en) | 2017-09-20 | 2017-09-20 | Ion source support |
| JP2017-180230 | 2017-09-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109516106A CN109516106A (en) | 2019-03-26 |
| CN109516106B true CN109516106B (en) | 2020-11-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711143720.3A Active CN109516106B (en) | 2017-09-20 | 2017-11-17 | Ion source supporting table |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6653067B2 (en) |
| KR (1) | KR101922352B1 (en) |
| CN (1) | CN109516106B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7325723B2 (en) | 2021-09-30 | 2023-08-15 | 日新イオン機器株式会社 | Ion source mover and ion implanter |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP6653067B2 (en) | 2020-02-26 |
| JP2019057385A (en) | 2019-04-11 |
| CN109516106A (en) | 2019-03-26 |
| KR101922352B1 (en) | 2018-11-26 |
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