CN109516106A - Ion source supporting station - Google Patents
Ion source supporting station Download PDFInfo
- Publication number
- CN109516106A CN109516106A CN201711143720.3A CN201711143720A CN109516106A CN 109516106 A CN109516106 A CN 109516106A CN 201711143720 A CN201711143720 A CN 201711143720A CN 109516106 A CN109516106 A CN 109516106A
- Authority
- CN
- China
- Prior art keywords
- ion source
- pair
- track
- supporting station
- roller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/022—Details
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
- B65G47/24—Devices influencing the relative position or the attitude of articles during transit by conveyors orientating the articles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/38—Mounting, supporting, spacing, or insulating electron-optical or ion-optical arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0214—Articles of special size, shape or weigh
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Combustion & Propulsion (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Plasma Technology (AREA)
Abstract
The present invention provides ion source supporting station, and the ion source (101) being placed on ion source supporting station (X) can be made to become lodging posture with stable state.Ion source supporting station (X) is for placing ion source (101), the ion source (101) includes that the plasma of strip generates container (10) and a pair of rolls (31), the pair of roller (31) is set to plasma and generates on the side wall (11b) opposite on the direction vertical with longitudinal direction of container (10), ion source supporting station (X) includes: a pair of tracks (5), in the state that ion source (101) are suspended in midair, rotationally a pair of rolls (31) are placed；And traction mechanism (6), in the state that a pair of rolls (31) is placed on a pair of tracks (5), by the lateral other end (B) side-lining in one end (A) of ion source (101) from track (5).
Description
Technical field
The present invention relates to the ion source supporting stations of bearing ion source.
Background technique
As shown in Patent Document 1, as previous ion source supporting station, have a kind of for placing and carrying from ion beam photograph
The ion source supporting station for the ion source that the apparatus main bodies such as injection device remove.It is described in the patent document 1: in order to stabilization
State carry the big ion source of height dimension, make the lodging to become smaller with height dimension in the ion source lodging for erecting posture
Posture supports ion source.
Specifically, ion source has a pair of rolls being arranged in a manner of clipping Ion Extraction mouth, in ion source supporting station
On be provided with rotationally place a pair of rolls a pair of tracks.
In addition, when removing ion source from apparatus main body, installed by the position of the ratio center of gravity more posteriorly side in ion source
Metal wire simultaneously gets up ion source suspention, thus ion source is made to become forward lean, roller is placed into rail under the forward lean
On road.As a result, after roller is placed on track, by being gradually lowered ion source, ion source is fallen forwards due to self weight
Volt becomes the posture that lodges.
But as described above, if it is desired to roller is placed on track in the state of keeping suspending in midair ion source, then example
There are following problems if possible: ion source is shaken, and unstable state is become, and the position of roller and track is caused to be deviateed.If
Roller is placed on track in the state of having produced position and having deviateed, it is likely that there are following problems: roller is detached from from track,
Ion source is fallen down from ion source supporting station, and ion source and ion source supporting station generate breakage, is sent out around ion source supporting station
Stranger is calamity.
Existing technical literature
Patent document 1: Japanese Patent Laid-Open Publication 2016-110827
Summary of the invention
Therefore, The present invention is for solving the problems, and it is a primary object of the present invention to can
The ion source being placed on ion source supporting station is set to become lodging posture with stable state.
That is, ion source supporting station of the invention, places ion source, the ion source includes that the plasma of strip is raw
At container and a pair of rolls, the pair of roller be arranged in the plasma generate container on the direction vertical with longitudinal direction
On opposite side wall, the ion source supporting station includes: a pair of tracks, in the state of ion source suspention, rotationally
Place the pair of roller；And traction mechanism, in the state that the pair of roller is placed on the pair of track, will it is described from
Component is drawn from one end side of the track to another side.
In addition, " drawing from one end side to another side " said here refers to that lead is the one end court from track
To the direction of another side, track is reached it is not necessary that roller is centainly placed on the one end of track, is drawn to ion source always
Another side.
According to the ion source supporting station constituted in this way, due to drawing in the state that a pair of rolls is placed in a pair of tracks
Mechanism is from one end of track to other end pulls ions source, so even if assuming that the ion source suspended in midair is in unstable shape
State also can make ion source become stable state at pulls ions source.Thereby, it is possible to make ion source with stable state
As lodging posture, and ion source can be carried with stable posture.
Preferably, the traction mechanism has moving body, and the outside of the pair of track, energy is arranged in the moving body
Enough to move to the other end from the one end of the track, the moving body side contact generates container one with the plasma
What is be arranged is moved by contact component side.
According to such composition, since move body posture is in the outside of a pair of tracks, so operating personnel can be from track
Outside confirms that the inside without injection can be safe such as moving body operating condition with whether being contacted by contact component
Ground carries out operation.
Assuming that traction mechanism is with fixed tractive force pulls ions source, if unbalanced in ion source
By traction mechanism pulls ions source under state, then roller is engaged with track, if further led with fixed tractive force from the state
Deflect from component, it is likely that cause roller to be detached from, ion source tumbles.
It is preferred, therefore, that the traction mechanism can be with manually adjusting the power for drawing the ion source.
According to such composition, when to be caused danger, pulls ions source, energy can be stopped according to the judgement of operating personnel
It is enough to prevent in the first place accident.
As specific embodiment, can enumerate following compositions: the traction mechanism also has a pair of of conveyer belt, institute
The respective outside that the pair of track is arranged in along the track for a pair of of conveyer belt is stated, the moving body is separately mounted to described
On a pair of of conveyer belt.
Preferably, the moving body has the accommodating recess of upward opening, described by the way that the pair of roller to be placed into
It is described to be accommodated by the opening into the accommodating recess by contact component in a pair of tracks.
According to such composition, only a pair of rolls is placed into a pair of tracks, it will be able to make by contact component and movement
Body contact.
The ion source removed from apparatus main body can be placed into ion source bearing by the present invention constituted as described above
Platform simultaneously makes ion source become lodging posture with stable state.
Detailed description of the invention
Fig. 1 is the integrally-built figure for schematically showing the ion irradiating device of present embodiment.
Fig. 2 is the figure for schematically showing the ion source of the embodiment.
Fig. 3 is the figure for schematically showing the ion source supporting station of the embodiment.
Fig. 4 is the figure for illustrating the movement of ion source handling system of the embodiment.
Description of symbols
X ion source supporting station
100 ion irradiating devices
101 ion sources
102 apparatus main bodies
10 plasmas generate container
31 lower side rollers
Side roller on 32
6 traction mechanisms
61 moving bodys
62 conveyer belts
Z is by contact component
Specific embodiment
One embodiment of ion source supporting station of the invention is illustrated.
The ion source supporting station X bearing of present embodiment constitutes the ion source 101 of ion irradiating device 100, for will be from
Component 101 is conveyed to defined position.
Firstly, being illustrated while referring to Fig.1 to ion irradiating device 100.
Ion irradiating device 100 is for example for semiconductors manufacture, including apparatus main body 102 and ion source 101, described device
Main body 102 includes mass-separator 103 and separation slit 104 etc., and the ion source 101 is detachable relative to apparatus main body 102,
Ion irradiating device 100 will be irradiated from the ion beam that ion source 101 is drawn to the wafer W being supported on bearing support 105.
Ion source 101 generates the ion beam comprising ion as defined in phosphorus, arsenic, boron etc. and by the ion beam to apparatus main body
102 project, specifically, as shown in Fig. 2, the plasma that ion source 101 includes: strip generates container 10, in inside life
At plasma；Extraction electrode system (not shown), is made of multiple electrodes, generates drawing for container 10 from plasma is formed in
It exports O and draws ion beam；And electrode support component 20, it is connect with plasma generation container 10 and supports extraction electrode system
System.
Plasma generates container 10 inserted with thermionic filament (not shown) is released, and passes through the electricity released from the filament
Son makes the ion source gas ionization imported in plasma generation container 10 and generates plasma.
As shown in Fig. 2, the plasma of present embodiment generates container 10 for example in cuboid, pacify in ion source 101
It is longitudinally long shape in the state of being attached on apparatus main body 102.
It is formed to strip and is stated on the one side 11a (hereinafter referred to as front 11a) that plasma generates container 10
Outlet O is provided with flange part 12 in the front 11a, and the flange part 12 has multiple screw holes 13.
Extraction electrode system (not shown) makes ion beam acceleration using the effect of electric field and generates container from plasma
The plasma generated in 10 draws ion beam, such as is made of acceleration electrode, extraction electrode, inhibition electrode, grounding electrode etc..
Extraction electrode system configuration in this draws ribbon ion beam from outlet O near the outlet O.
Electrode support component 20 is the cylindrical body for being internally provided with the multiple electrode, and an end face 21a is mounted on described etc.
Gas ions generate before container 10 on 11a, and other end 21b is mounted on the mounting surface of apparatus main body 102 and (does not scheme
Show).In addition, the mounting surface of apparatus main body 102 is the face of 103 side of mass-separator, it is the transport path for for example constituting ion beam
Vacuum tank (not shown) end face.In addition, electrode support component 20 is not limited to tubular, shape can also carry out various change
Become.
It is more specifically illustrated, is provided with flange on an end face 21a and other end 21b for electrode support component 20
Portion 22, the flange part 22 have multiple screw holes 23, generate 11a before container 10 by the way that screw is passed through plasma
The screw hole 23 of one end face 21a of screw hole 13 and electrode support component 20, connection plasma generate container 10 and electrode branch
Bearing member 20.In addition, passing through the screw hole (not shown) and electrode support component of the mounting surface that screw is passed through to apparatus main body 102
The screw hole 23 of 20 other end 21b, attachment device main body 102 and electrode support component 20.
Ion source 101 is installed on apparatus main body 102 with defined mounting position as a result,.
As depicted in figs. 1 and 2, the mounting position of present embodiment is the posture that ion source 101 is erected along vertical direction, is changed
Sentence is talked about, and is the longitudinal direction of plasma generation container 10 posture parallel with vertical direction.
The ion source 101 of present embodiment further includes lower side roller 31 and upper side roller 32, has been installed on device in ion source 101
In the state of main body 102, the downside that plasma generates container 10 is arranged in the lower side roller 31, and the upper setting of side roller 32 exists
The upside of plasma generation container 10.
Here, a pair of lower roller 31 is configured in a manner of clipping outlet O from the direction vertical with longitudinal direction, and one
Upper side roller 32 is configured in a manner of clipping outlet O from the direction vertical with longitudinal direction.That is, lower side roller 31 is arranged respectively at
On and each opposite flank 11b for extending along the long side direction vertical with front 11a, upper side roller 32 is similarly arranged respectively at each phase
To on the 11b of side.
A pair of lower roller 31 is all configured that the height for the bottom surface 11c for generating container 10 away from plasma is equal, and away from preceding
Face 11a's is equidistant.
Side roller 32 is all configured that from what lower side roller 31 was left upward along the long side direction and is equidistant in a pair, and one
It is equal with the separation distance of a pair of lower roller 31 to the separation distance of upper side roller 32.
In the present embodiment, as shown in Figure 1, in the state that ion source 101 is installed on apparatus main body 102, downside
The center of gravity G of roller 31, upper side roller 32 and ion source 101 is linearly configured along vertical direction.
In addition, each lower side roller 31 and each upper side roller 32 are rotatably supported in respectively on roller bearing part H, pass through roller branch
Bearing portion part H is installed to plasma and generates on the opposite flank 11b of container 10.
In the following, being illustrated while referring to Fig. 3 to the ion source supporting station X of present embodiment.
Ion source supporting station X places the posture (hereinafter referred to as standing posture) removed from apparatus main body 102 and in suspention
Ion source 101, with lodge posture bearing ion source 101, it is described lodging posture center of gravity G than erect posture center of gravity G it is low.
Specifically, as shown in figure 3, ion source supporting station X includes trolley 4 and a pair of tracks 5 for being arranged on trolley 4.
Trolley 4 includes framework 41 and the multiple wheels 42 being mounted in framework 41.Each wheel 42 is mounted under framework 41
Surface, and rotated on such as ground of configuration device main body 102 or the dedicated ground for carrying ion source 101.
A pair of tracks 5 is horizontal rail that the upper surface of framework 41 is arranged in, extending parallel to each other in the horizontal direction.
More specifically, the separation distance of each track 5 and side roller 32 on the separation distance of a pair of lower roller 31 and a pair
Separation distance is equal, and the length of each track 5 is longer than the separation distance of lower side roller 31 and upper side roller 32.
In addition, be provided with retainer 51 at the both ends of these tracks 5, the retainer 51 prevent lower side roller 31 and on
Side roller 32 is rolled down from track 5.
In addition, as shown in Figure 3 and Figure 4, the ion source supporting station X of present embodiment further includes traction mechanism 6, under a pair
In the state that side roller 31 is placed in a pair of tracks 5, the traction mechanism 6 is by ion source 101 from one end side A of track to another
Hold B side-lining.
The traction mechanism 6 has following function: the power in pulls ions source 101 being made to act on the center of gravity G than ion source 101
Position more on the lower makes a pair of lower roller 31 on the rail 5 from one end side A to other end B side roll, and makes ion source
101, from posture lodging is erected, become the posture that lodges.
Specifically, traction mechanism 6 includes: moving body 61, it can be mobile from one end side A of track 5 to the side other end B；
And driving portion 62, keep moving body 61 mobile.61 side of moving body is contacted with by contact component Z, while from one end side A of track 5 to
The side other end B is mobile, thus pulls ions source 101, described to be wholely set by contact component Z and plasma generation container 10.
It is a part of ion source 101 or the component for being installed on ion source 101 by contact component Z, as shown in Fig. 2,
In present embodiment, a pair is attached to ion source 101 by contact component Z.
Specifically, being columnar component by contact component Z, extends outward from a pair of lower roller 31, be mounted on herein
It rotatably supports on the roller bearing part H of lower side roller 31, along the axially extending of lower side roller 31.
As shown in figure 3, moving body 61 is the blocky structure for being formed with such as resin of accommodating recess 61S of upward opening
Part, accommodating recess 61S receiving it is described by contact component Z.
The depth dimensions of accommodating recess 61S be set to it is at least bigger than by the diameter of contact component Z, thus by contact component
Z can by will not than opening 61O more up side it is outstanding in a manner of accommodate in accommodating recess 61S.
The traction mechanism 6 of present embodiment can use hand traction ion source 101, here, can be described with manually adjusting
Tractive force.In addition, the adjustment of tractive force said here not only refers to the size of adjustment tractive force, it also include adjustment tractive force
Direction (that is, being traction or push).
Specifically, traction mechanism 6 driving portion 62 in a manner of manual mobile moving body 61 can be made up of.More in detail
It carefully says, the driving portion 62 of present embodiment includes: conveyer belt 621, installs moving body 61；And handle 622, for manually
Moving of conveyer belt 621.
Here, the outside of each track 5 is arranged in a pair of of conveyer belt 621, by being made of multiple gears and link member etc.
Link mechanism 63 make 621 both sides of these conveyer belts link.
Specifically, conveyer belt 621 is the endless belt-shaped so-called synchronous belt along the setting of each track 5, along the length of track 5
It spends roughly equal or slightly longer than the length of track 5 with the length of track 5.
Handle 622 is connect by (not shown) such as gears with the conveyer belt 621 of a side, herein in view of operability and safety
Property, the traction side of the ion source 101 of the upper surface of framework 41, the i.e. side other end B of track 5 are set.
In addition, for example by that will be moved from there through conveyer belt 621 to positive (such as clockwise) rotational handle 622
Body 61 is conveyed from one end side A of track 5 to the side other end B, by reverse (such as around rotate counterclockwise) rotational handle 622,
Moving body 61 is conveyed from the side other end B of track 5 to one end side A from there through conveyer belt 621.
In the present embodiment, by rotating forward handle 622, by moving body 61 from one end side A of track 5 to another
The conveying of the side B is held, thus positive tractive force acts on ion source 101, and the more fast positive tractive force of the velocity of rotation of handle 622 is bigger,
The more slow positive tractive force of the velocity of rotation of handle 622 is smaller.On the other hand, to counter rotation fixed handle 622, by moving body 61 from
The side other end B of track 5 is conveyed to one end side A, and negative tractive force (that is, push power) acts on ion source 101, handle 622
The more fast negative tractive force of velocity of rotation is bigger, and the more slow negative tractive force of the velocity of rotation of handle 622 is smaller.
In addition, the traction mechanism 6 can use the traction state and tractive force for acting on ion source 101 in tractive force manually
It does not act between the halted state of ion source 101 and switches.Specifically, by rotational handle 622 by tractive force act on from
Component 101, if not operation handle 622, tractive force does not act on ion source 101.
As shown in figure 4, the ion source supporting station X and suspension gear Y that constitute as described above are constituted together carries ion source
101 handling system 200, the suspension gear Y suspend the ion source 101 removed from apparatus main body 102 in midair.
In addition, suspension gear Y suspends ion source 101 in midair in a manner of it can move along vertical direction and horizontal direction, here, making
With the chain block that can be moved in the horizontal direction.Also electric crane can be used as suspension gear Y.
In the following, being illustrated while referring to Fig. 4 to the movement of the handling system 200.
Firstly, being transported to desired place to the ion source 101 for being installed on apparatus main body 102 is removed, and by ion source
The case where be illustrated.
Firstly, ion source supporting station X is moved to an off component in the state that ion source 101 is installed on apparatus main body 102
Near 101.
Then, by the chain suspension of chain block in the state of in ion source 101, such as user extract attachment device master
The screw of body 102 and electrode support component 20 removes ion source 101 from apparatus main body 102.Plasma is generated as a result, and is held
Device 10 and electrode support component 20 are integrally removed from apparatus main body 102, and ion source 101 is suspended in midair by suspension gear Y, become to erect
Posture (a of Fig. 4).
In the present embodiment, in order to suspend ion source 101 in midair in the state of keeping mounting position, also in order to making to install
Posture and standing posture become identical posture, chain are suspended on respectively on the roller bearing part H for for example supporting upper side roller 32,
Ion source 101 is suspended in midair from the surface of center of gravity G.It is generated on container 10 in addition, chain also may be mounted at plasma.
Then, ion source 101 is moved to an off component branch by the ion source 101 for rotating or moving horizontally as needed suspention
The top of cushion cap X.In more detail, moving iron source 101, so that a pair of lower roller 31 is located at one end A of a pair of tracks 5
The top of side.
In addition, gradually decrease ion source 101, by a pair of lower roller 31 be placed into a pair of tracks 5 one end side A (Fig. 4's
b).At this point, by the way that lower side roller 31 is placed on track 5, so that is extended outward from lower side roller 31 is accommodated by contact component Z
Moving body 61 is configured in one end side A of track 5 in advance to the mode in the accommodating recess 61S of moving body 61.
After on one end side A for be placed into a pair of lower roller 31 a pair of tracks 5, confirmation has been received by contact component Z
Into the accommodating recess 61S of moving body 61, then by traction mechanism 6 by ion source 101 from one end side A of track 5 to another
Hold B side-lining.In the present embodiment, operating personnel is for example by making moving body 61 from track 5 to handle 622 is rotated forward
One end side A it is mobile (Fig. 4 c) to the side other end B.
In this way, by side make moving body 61 with by contact component Z contact edge make moving body 61 from one end side A of track 5 to
The side other end B is mobile, lower side roller 31 on the rail 5 from one end side A to other end B side roll, upper 32 side of side roller close to track 5,
101 side of ion source is gradually tilted from posture is erected.
In addition, if side roller 32 in a pair is placed on the rail 5, then becomes lower side roller 31 and both upper side roller 32 is put
State on the rail 5 is set, ion source 101 becomes the posture that lodges.In addition, in the present embodiment, under the posture that lodges, drawing
Mouth O becomes state downward.
The state for keeping the lodging posture removes the suspension hook of crane, such as by operating personnel mobile trolley used 4, can
Ion source 101 is transported to desired position with stable state.
Then, the situation that ion source 101 is installed on apparatus main body 102 is illustrated.
Firstly, the ion source 101 being placed on ion source supporting station X is moved near apparatus main body 102.In addition,
Ion source 101 at this time is lodging posture.
Then, by the chain suspension of chain block to ion source 101, ion source 101 is sling.Side roller 32 is gone up as a result, from rail
Road 5 leaves, and lower side roller 31 is on the rail 5 from the side other end B to one end A side roll.In addition, lower side roller 31 leaves track 5,
Ion source 101 is suspended, and becomes to erect posture.
At this point, become identical posture to make to erect posture and mounting position, also in order to making ion source 101 along vertical
Direction erects, and chain is hanging to respectively on such as the roller bearing part H for supporting upper side roller 32, outstanding from the surface of center of gravity G
Hang component 101.It is generated on container 10 in addition, chain also may be mounted at plasma.
Then, the ion source 101 suspended in midair, approaching device main body are rotated, move horizontally or moved up and down as needed
102, pass through screw connection apparatus main body 102 and electrode support component 20.It is keeping ion source 101 to erect posture as a result,
It is installed under state on apparatus main body 102.
If it is the ion source supporting station X of the present embodiment constituted as described above, then due in a pair of lower roller 31
In the state of being placed into a pair of tracks 5, traction mechanism 6 from one end side A of track 5 to other end B side-lining ion source 101,
So when pulls ions source 101, can also make ion source 101 even if assuming that the ion source 101 of suspention is in an unsure state
In stable state.Thereby, it is possible to make ion source 101 become lodging posture with stable state, and removed with stable posture
Transport out of component 101.
But the case where the ion source 101 removed from apparatus main body 102 is for example suspended in midair in a manner of becoming forward lean
Under, when removing, ion source 101 tilts and ion source 101 and apparatus main body 102 is made to rub, can be to ion source 101 and device master
Body 102 causes to damage.In addition, when removing ion source 101 from apparatus main body 102, to connection ion source 101 and apparatus main body
102 screw etc. generates load, it is possible to lead to the breakages such as screw.
On the other hand, when being installed to the ion source 101 of suspention on apparatus main body 102 with forward lean, while by ion source
101, which push 102 side screw of apparatus main body etc. to, is attached, also negative to generations such as screws when installation other than operation is bothersome
Lotus, it is possible to lead to breakage.
In order to avoid such problems, when removing ion source 101 from apparatus main body 102, it is preferred that do not make ion as far as possible
Source 101 is obliquely dismantled in the state of keeping mounting position, on the other hand, if will be from the state of keeping mounting position
Component 101 is placed on ion source supporting station X, then does not know which of the side A and other side B of track 5 ion source 101 swing to
Side, danger close.
In contrast, ion source supporting station X in the embodiment, due to being placed on a pair of of rail in a pair of lower roller 31
In the state of on road 5, traction mechanism 6 is from one end side A of track 5 to other end B side-lining ion source 101, even if not making from dress
It sets the ion source 101 that main body 102 removes and is placed into ion source obliquely, in the state of keeping mounting position by ion source 101
On supporting station X, ion source 101 also can reliably be made to swing to the side of track.
When removing ion source 101 from apparatus main body 102 as a result, due to not needing angle-tilt ion source 101, so can prevent
Ion source 101 and apparatus main body 102 rub, apply load to screw etc. when only removing.
In addition, when ion source 101 is installed on apparatus main body 102, without shifting ion source 101 onto apparatus main body by force
On 102, can prevent operation it is bothersome, to screw etc. apply load.
In addition, since moving body 61 is located at the outside of a pair of tracks 5, so operating personnel can be true from the outside of track 5
Recognize such as moving body 61 whether with contacted by contact component Z operating condition, the inside without injection 5 can be safely
Carry out operation.
In addition, due to the power that can adjust the hand traction ion source 101 of traction mechanism 6, so for example in ion source 101
When causing danger when disequilibrium etc., pulls ions source 101 can be stopped, or reverse fixed handle according to the judgement of operating personnel
Ion source is rolled back.Thereby, it is possible to prevent lower side roller 31 from the accidents such as the disengaging of track 5 or the overturning of ion source 101 in possible trouble.
In addition, the present invention is not limited to the embodiments.
For example, synchronous belt is utilized in the traction mechanism of the embodiment, moving body is carried by conveyer belt, as long as but
It is that the composition for moving to the other end moving body from the one end of track can be applicable in, specifically, can enumerate bullet
Spring balancer or capstan winch etc. are used for the composition of traction mechanism.
Be concretely demonstrated, Spring balancer or capstan winch have the front end that metal wire is set hook (mounting portion) and
The main part of hook is drawn, hook is moving body, and main part is driving portion.
In more detail, it is generated on container by the way that such as plasma will be hung over, the part tangled, which becomes, to be connect
Contact portion part.It links up with and works with by contact portion contact edge from one end of track to the mobile moving body of the other end as side as a result,.
In addition, in the another side that main part is fixed to such as trolley, lower side roller is placed on the shape of the one end of track
Under state, is pulled and linked up with by main part, thus, it is possible to ion source is drawn to another side from one end.In addition, main part without
Need to centainly fix can also be fixed on the car on component or ground of the another side positioned at track etc..
In addition, traction mechanism is configured to enough manual mobile moving bodys in said embodiment, but can also be with structure
As the structure for being able to use motor etc. moving body being automatically moved, no matter can also have can switch manually or automatically
The variable-speed motor of the gear ratio of the movement speed of moving body.
In addition, traction mechanism can also shift ion source onto another side from the one end of track.
In said embodiment, illustrate in the state that ion source is installed on apparatus main body, lower side roller, upper side roller with
And the composition that the center of gravity of ion source is configured along vertical direction, but without all being configured along vertical direction, for example, lower side roller and
Upper side roller can also deviate center of gravity along vertical direction.
Even such ion source, as long as chain to be installed to the surface of the center of gravity of ion source, it will be able to keep
Ion source is removed from apparatus main body in the state of mounting position, then by operation same as the embodiment, make from
Component becomes lodging posture.
In said embodiment, it is illustrated to erecting the case where posture and mounting position are identical postures, but
It is that the posture that for example can also more turn forward than mounting position suspends the ion source removed from apparatus main body in midair, in this way, can also be with
Make after being erected with the ion source that forward lean suspends in midair along vertical direction, is placed on ion source supporting station.
In said embodiment, in the state that lower side roller to be placed on to the one end of track, by ion source from track
One end lateral another side traction, but can also for example prepare many tracks longer than the longitudinal direction of ion source 101,
Lower side roller is placed in the state of central portion or the another side of track, by ion source from one end side of track to another side
Traction.
In addition, when using long track more than two ion sources can be placed on an ion source supporting station.
The embodiment is the component extended outward from lower side roller by contact component, but for example by contact component
It is also possible to the component extended outward from the opposite flank that plasma generates container, can also be from electrode support component
The component that side extends outward.
In said embodiment, lower side roller and upper side roller are arranged on opposite sides, but also can be set preceding
On the back side of face and the side opposite with front, it can also be arranged on electrode support component.In addition, the quantity of roller is not limited to institute
The quantity in embodiment is stated, such as a pair of of intermediate calender rolls can also be set between upper side roller and lower side roller.
In said embodiment, illustrate that the bearing of ion source supporting station has plasma and generates container, extraction electrode
The ion source of system and electrode support component, but ion source supporting station can also support and not have extraction electrode system and electrode
The ion source of supporting member can also support plasma and generate container.
In addition, the present invention is not limited to the embodiments, it is of course possible to without departing from the spirit and scope of the present invention into
Row various modifications.
It can be combined with each other documented technical characteristic in each embodiment (embodiment) of the invention and form new skill
Art scheme.
Claims (9)
1. a kind of ion source supporting station, place ion source, the ion source include strip plasma generate container and
The side opposite on the direction vertical with longitudinal direction that the plasma generates container is arranged in a pair of rolls, the pair of roller
On wall,
The ion source supporting station is characterized in that,
The ion source supporting station includes:
A pair of tracks rotationally places the pair of roller in the state of ion source suspention；And
Traction mechanism, in the state that the pair of roller is placed on the pair of track, by the ion source from the track
One end lateral another side traction.
2. ion source supporting station according to claim 1, which is characterized in that
The traction mechanism has moving body, and the outside of the pair of track is arranged in the moving body, can be from the track
One end move to the other end,
The moving body while contact with the plasma generation container be wholely set by contact component while move.
3. ion source supporting station according to claim 1 or 2, which is characterized in that
The traction mechanism can be with manually adjusting the power for drawing the ion source.
4. ion source supporting station according to claim 2, which is characterized in that
The traction mechanism also has a pair of of conveyer belt, and the pair of track is arranged in along the track in the pair of conveyer belt
Respective outside,
The moving body is separately mounted on the pair of conveyer belt.
5. ion source supporting station according to claim 3, which is characterized in that
The traction mechanism also has a pair of of conveyer belt, and the pair of track is arranged in along the track in the pair of conveyer belt
Respective outside,
The moving body is separately mounted on the pair of conveyer belt.
6. ion source supporting station according to claim 2, which is characterized in that
The moving body has the accommodating recess of upward opening,
It is described to be accommodated by the opening to described by contact component by the way that the pair of roller to be placed on the pair of track
In accommodating recess.
7. ion source supporting station according to claim 3, which is characterized in that
The moving body has the accommodating recess of upward opening,
It is described to be accommodated by the opening to described by contact component by the way that the pair of roller to be placed on the pair of track
In accommodating recess.
8. ion source supporting station according to claim 4, which is characterized in that
The moving body has the accommodating recess of upward opening,
It is described to be accommodated by the opening to described by contact component by the way that the pair of roller to be placed on the pair of track
In accommodating recess.
9. ion source supporting station according to claim 5, which is characterized in that
The moving body has the accommodating recess of upward opening,
It is described to be accommodated by the opening to described by contact component by the way that the pair of roller to be placed on the pair of track
In accommodating recess.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017180230A JP6653067B2 (en) | 2017-09-20 | 2017-09-20 | Ion source support |
| JP2017-180230 | 2017-09-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109516106A true CN109516106A (en) | 2019-03-26 |
| CN109516106B CN109516106B (en) | 2020-11-03 |
Family
ID=64602981
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711143720.3A Active CN109516106B (en) | 2017-09-20 | 2017-11-17 | Ion source supporting table |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6653067B2 (en) |
| KR (1) | KR101922352B1 (en) |
| CN (1) | CN109516106B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7325723B2 (en) | 2021-09-30 | 2023-08-15 | 日新イオン機器株式会社 | Ion source mover and ion implanter |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09315763A (en) * | 1996-05-28 | 1997-12-09 | Nishimatsu Constr Co Ltd | Multi-way reversing device |
| CN102975075A (en) * | 2012-12-10 | 2013-03-20 | 成都飞机工业（集团）有限责任公司 | Large-sized workpiece machining lifting tool |
| CN202804058U (en) * | 2012-10-23 | 2013-03-20 | 中国第二重型机械集团（德阳）万信工程设备有限责任公司 | C-shaped plate second-level turnover tool |
| CN103058054A (en) * | 2012-12-27 | 2013-04-24 | 三一重工股份有限公司 | Tail device and tail dragging method |
| CN204173780U (en) * | 2014-09-24 | 2015-02-25 | 上海振华重工(集团)股份有限公司 | Steel structure equipment for supporting patient with burn and terrestrial components thereof |
| CN105129613A (en) * | 2014-05-26 | 2015-12-09 | 东风汽车部件厂 | Die overturning tool |
| CN105366556A (en) * | 2015-11-26 | 2016-03-02 | 中广核工程有限公司 | Device and method for turning main equipment automatically through nuclear island ring crane |
| JP2016110827A (en) * | 2014-12-05 | 2016-06-20 | 日新イオン機器株式会社 | Ion source, susceptor, suspension mechanism, ion source conveyance system and ion source conveyance method |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2709542B2 (en) * | 1991-08-29 | 1998-02-04 | 関東自動車工業株式会社 | Chair laying and collection machine |
| JP2573835Y2 (en) * | 1992-10-13 | 1998-06-04 | 輝雄 森田 | Cart |
| JP3576388B2 (en) * | 1998-07-08 | 2004-10-13 | ワールド技研株式会社 | Transfer device |
| JP2009023811A (en) * | 2007-07-21 | 2009-02-05 | Kawasaki Heavy Ind Ltd | Tilting type truck frame conveying device |
| JP5142077B2 (en) * | 2008-02-05 | 2013-02-13 | 株式会社日立プラントテクノロジー | Transport cart |
| JP5302861B2 (en) * | 2009-11-26 | 2013-10-02 | 株式会社日立産機システム | Control panel with unit replacement function |
| US20140169922A1 (en) * | 2012-12-18 | 2014-06-19 | Frank Charles Cozza | Cart with lifting system and omnidirectional wheels |
-
2017
- 2017-09-20 JP JP2017180230A patent/JP6653067B2/en active Active
- 2017-11-17 CN CN201711143720.3A patent/CN109516106B/en active Active
- 2017-12-22 KR KR1020170178116A patent/KR101922352B1/en active IP Right Grant
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09315763A (en) * | 1996-05-28 | 1997-12-09 | Nishimatsu Constr Co Ltd | Multi-way reversing device |
| CN202804058U (en) * | 2012-10-23 | 2013-03-20 | 中国第二重型机械集团（德阳）万信工程设备有限责任公司 | C-shaped plate second-level turnover tool |
| CN102975075A (en) * | 2012-12-10 | 2013-03-20 | 成都飞机工业（集团）有限责任公司 | Large-sized workpiece machining lifting tool |
| CN103058054A (en) * | 2012-12-27 | 2013-04-24 | 三一重工股份有限公司 | Tail device and tail dragging method |
| CN105129613A (en) * | 2014-05-26 | 2015-12-09 | 东风汽车部件厂 | Die overturning tool |
| CN204173780U (en) * | 2014-09-24 | 2015-02-25 | 上海振华重工(集团)股份有限公司 | Steel structure equipment for supporting patient with burn and terrestrial components thereof |
| JP2016110827A (en) * | 2014-12-05 | 2016-06-20 | 日新イオン機器株式会社 | Ion source, susceptor, suspension mechanism, ion source conveyance system and ion source conveyance method |
| CN105366556A (en) * | 2015-11-26 | 2016-03-02 | 中广核工程有限公司 | Device and method for turning main equipment automatically through nuclear island ring crane |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101922352B1 (en) | 2018-11-26 |
| JP2019057385A (en) | 2019-04-11 |
| CN109516106B (en) | 2020-11-03 |
| JP6653067B2 (en) | 2020-02-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9187260B2 (en) | Conveying system and conveying method | |
| US3074356A (en) | Conveyor trolley and track thereof | |
| CN109516106A (en) | Ion source supporting station | |
| JP2009241796A (en) | Elevating type overhead carrier | |
| US20220332500A1 (en) | Transport system and storage | |
| TWI432370B (en) | Transferring system for magnetic levitation | |
| BR112020026327A2 (en) | SYSTEMS AND METHODS TO IMPROVE THE STABILITY OF NON-FERROUS METALS IN A TRANSPORTER | |
| JP6573099B2 (en) | Ion source, support base, suspension mechanism, ion source transport system, and ion source transport method | |
| CN209259518U (en) | A kind of workpiece turning system | |
| JP2580264B2 (en) | Conveyor cart with suspended equipment | |
| JP2016110827A5 (en) | ||
| CN211168916U (en) | Conveyer for glass wholesale | |
| JP2011143758A (en) | Rail type transport apparatus | |
| JP2010042911A (en) | Descent conveying device | |
| CN111924438A (en) | Battery cell overturning and feeding mechanism and battery cell welding system | |
| JP2003306143A (en) | Hanging conveying facility | |
| CN108408375A (en) | A kind of bottle base conveying device of bottle blowing machine | |
| CN114408489B (en) | Air transport vehicle and air transport system | |
| CN205952847U (en) | Cubical switchboard inclined plane conveyer | |
| CN217995648U (en) | Carrier chain link, chain link unit, plate chain assembly, lifting mechanism and hanging system | |
| CN102208763B (en) | Scissor-shaped support guide rail device | |
| CN202400774U (en) | Car and carry-on device for vehicle-mounted power generator of car | |
| JPH09150946A (en) | Transferring device for hung article | |
| JPH07172753A (en) | Ramp of overhead traveling car | |
| CN104773456B (en) | A kind of super-tonnage transport trolley |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |