KR101946101B1 - Ion source, support member, suspension mechanism, ion source transfer system and ion source transfer method - Google Patents

Ion source, support member, suspension mechanism, ion source transfer system and ion source transfer method Download PDF

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KR101946101B1
KR101946101B1 KR1020150115953A KR20150115953A KR101946101B1 KR 101946101 B1 KR101946101 B1 KR 101946101B1 KR 1020150115953 A KR1020150115953 A KR 1020150115953A KR 20150115953 A KR20150115953 A KR 20150115953A KR 101946101 B1 KR101946101 B1 KR 101946101B1
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Prior art keywords
ion source
case
roller
posture
electrode
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KR1020150115953A
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Korean (ko)
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KR20160068637A (en
Inventor
가즈토 고제니
유이치 니와
마사토시 오노다
준이치 다테미치
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닛신 이온기기 가부시기가이샤
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G7/00—Devices for assisting manual moving or tilting heavy loads
    • B65G7/02—Devices adapted to be interposed between loads and the ground or floor, e.g. crowbars with means for assisting conveyance of loads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G7/00—Devices for assisting manual moving or tilting heavy loads
    • B65G7/02—Devices adapted to be interposed between loads and the ground or floor, e.g. crowbars with means for assisting conveyance of loads
    • B65G7/04—Rollers

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  • Electron Sources, Ion Sources (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

So that the ion source can be reliably transported in a stable state.
An electrode holding member 50 connected to the case 10 and holding at least one electrode and a case 10 which is detachably attached to the case 10 in an attaching posture Only the lower roller 21 attached to the case 10 is supported on the horizontal rail 23 in the standing posture with the lower roller 21 and the upper roller 22 removed from the apparatus main body 102 Both of the lower rollers 21 and the upper rollers 22 attached to the case 10 are disposed on the horizontal rails (not shown) 23).

Description

TECHNICAL FIELD [0001] The present invention relates to an ion source, a support, a suspension mechanism, an ion source transport system, and an ion source transport method.

The present invention relates to an ion source, a support for supporting the ion source, a suspension mechanism for suspending the ion source, an ion source transport system for transporting the ion source, and an ion source transport method for transporting the ion source.

This kind of ion source is attached to the apparatus main body of the ion irradiation apparatus in a predetermined attaching posture to constitute the ion irradiation apparatus, and may be removed from the apparatus main body, for example, when exchanging with a new one.

Thus, the ion source shown in Patent Document 1 has a case and a support leg supporting the case and a roller that can be rotated, so that the ion source can be conveyed while maintaining the attachment posture.

However, in the above-described configuration, as the height dimension in the attaching posture increases, the position of the center of gravity becomes higher, and the ion source becomes unstable when it is conveyed.

Particularly, in recent years, as the size of the substrate is increasing, the ion beam is enlarged in accordance with the substrate, and therefore, the height dimension of the ion source in the mounting posture increases, and the above problem becomes more significant.

Patent Document 1: Japanese Utility Model Open Publication No. 62-198649

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and its main object is to enable the ion source to be reliably and stably transported.

That is, the ion source according to the present invention is an ion source attached to a device main body of an ion irradiation apparatus in a predetermined attaching posture, comprising: a case provided with an ion outlet port; at least one electrode for extracting ions from the outlet port; And a lower roller and an upper roller which are removably attached to the case or the electrode holding member in the attaching posture and which are attached to the upper and lower rollers, In the posture, only the lower roller attached to the case or the electrode holding member is arranged to be capable of rolling on a predetermined support surface while being laid down from the standing posture and reduced in height dimension Both of the lower roller and the upper roller attached to the case or the electrode holding member, It is characterized in that the group arranged in the support surface.

Such an ion source is supported on the supporting surface in a lowered position in the lowered position than the attaching posture. Therefore, by moving the support while maintaining the uniform posture, the ion source can be transported in a stable state with a low center of gravity have.

Here, a case of carrying the ion source removed from the apparatus main body is considered. In this case, since the lower roller rolls on the support surface by lowering the ion source to the support surface in the standing posture, the ion source gradually overlaps from the standing posture in accordance with this movement, and becomes a posture.

On the other hand, when the ion source is attached to the apparatus main body, the upper roller is separated from the supporting surface while the lower roller rolls on the supporting surface by raising the ion source supported on the supporting surface in the restoring posture, Stand up slowly and stand posture.

As described above, in the case of the above-described ion source, the ion source can be transported in a stable state, and the ion source can be positively brought to a standing position or a dressing position as needed.

As a more specific embodiment, the support surface is formed on a pair of horizontal rails provided in parallel, and the pair of lower rollers and the upper roller are provided so as to correspond to the horizontal rails.

In addition, the supporting base according to the present invention is characterized by having a horizontal rail on which the aforementioned ion source is arranged.

By using this support, the above-described ion source can be transported in a stable state, and the ion source can be surely brought to the standing position or the dressing position, if necessary.

As a support for transporting the ion source to a desired position, a wheel may be provided so that the floor surface is movable.

The supporting base preferably has a roller holding portion for holding the lower roller or the upper roller removed from the case or the electrode holding member.

If this is the case, it is possible to prevent the roller from being lost by holding the roller removed from the case or the electrode holding member by the roller holding portion.

The suspension mechanism according to the present invention suspends the ion source suspended between the support base and the apparatus main body, suspends the ion source removed from the apparatus main body in the standing position, The ion source is moved downward, the lower roller is disposed on the support surface, the ion source is further lowered, and the upper roller is placed on the support surface The lower roller is rotated on the support surface until the lower roller is rotated.

By using this suspending mechanism, the ion source can be surely put in the dressing posture and can be transported in a stable state.

The above-described action and effect can be obtained in the ion source transportation system including the support base and the suspension mechanism.

According to the present invention constructed as described above, the ion source can be transported in a stable state by lowering the position of the center of gravity, and the ion source can be positively brought to the standing posture or the posture positively as necessary.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a diagram schematically showing an overall configuration of an ion irradiation apparatus according to an embodiment of the present invention. Fig.
Fig. 2 is a diagram schematically showing an ion source of this embodiment. Fig.
Fig. 3 is a view schematically showing a support member of the embodiment; Fig.
4 is a view for explaining the operation of the ion source transportation system of this embodiment;

One embodiment of the ion source according to the present invention will be described.

The ion source 101 of the present embodiment constitutes an ion irradiation device 100 and is carried by the ion source transportation system 200.

Hereinafter, the ion irradiation system 100 will be described, and then the ion source transportation system 200 will be described.

1, the ion beam irradiated from the ion source 101 is passed through the mass separator 103 and the separating slit 104 (see FIG. 1) The desired ion species are selected and then injected into the wafer W held in the holder 105.

Specifically, the ion irradiation apparatus 100 is provided with an apparatus main body 102 and an ion source 101 attached to the apparatus main body 102. Here, the apparatus main body 102 includes the above- (Not shown), a lens for shaping the ion beam, a steering coil for correcting the traveling direction of the ion beam, and the like.

The ion source 101 is attached to the apparatus main body 102 (here, the end surface of a vacuum container, not shown, which is disposed on the side of the mass separator 103 and constitutes a transport path of the ion beam) And generates a ribbon-shaped ion beam containing predetermined ions such as phosphorus, arsenic, boron, etc., and injects it into the apparatus main body 102.

The attaching posture of the present embodiment is a posture in which the ion source 101 is erected along the vertical direction.

2, the ion source 101 includes a case 10 having an outlet O through which an ion beam generated therein is drawn out, and at least one electrode (not shown) provided near the outlet O, A tubular body 50 which is an electrode holding member connected to the case 10 to hold the drawing electrode system and a lower roller 21 which is removably attached to the case 10, And an upper roller 22 which is removably attached to the case 10 and is located above the lower roller 21 in the attachment position.

The case 10 accommodates a thermal cathode (not shown) for emitting thermal electrons and has a function as a plasma generating container in which plasma is generated.

Thus, in the present embodiment, plasma is generated while introducing a process gas such as phosphine (PH 3 ), arsine (AsH 3 ) and boron trifluoride (BF 3 ) into the case 10, Ions, and the ion beam is emitted from the outlet (O).

More specifically, as shown in Fig. 2, the case 10 has an internal space, and has a vertically elongated shape such as a rectangular parallelepiped shape in an attaching posture. The case 10 has, for example, And the outlet O is formed.

The outlet O is formed on the mounting surface 11a of the side wall 11 which is attached to the apparatus body 102 through the cylinder 50. In this embodiment, A flange portion 12 having a plurality of bolt holes 13 is formed on the mounting surface 11a.

The drawing electrode system is composed of, for example, an accelerating electrode, a drawing electrode, a suppressing electrode, a grounding electrode, and the like, and by these electrodes, the ion beam can be accelerated to draw out an ion beam having a desired energy.

The tubular body 50 is disposed between the apparatus main body 102 and the case 10 and has one end connected to the apparatus main body 102 and the other end side And is configured to be connected to the case 10.

More specifically, the cylinder 50 and the apparatus main body 102 are connected by a bolt (not shown) through a bolt hole 521 formed in the flange portion 511 at one end of the cylinder 50. The bolt hole 522 formed in the flange portion 512 on the other end side of the cylinder 50 communicates with the bolt hole 13 formed in the flange portion 12 of the mounting surface 11a described above, The cylindrical body (50) and the case (10) are connected by a bolt.

The lower roller 21 and the upper roller 22 are fixed to a roller support member H for supporting the rollers 21 and 22 to be capable of rolling, (10).

The roller support member H is configured to be attached to the side peripheral surface 11 of the case 10 in an attaching posture with a screw or the like.

The lower roller 21 is attached to the side peripheral surface 11 so as to be capable of being taken out so that a pair of lower rollers 21 are arranged so as to sandwich the outflow opening O from the left and right sides .

More specifically, each of the lower rollers 21 is a surface different from the attachment surface 11a of the side surface 11 and is attached to each of the opposing surfaces 11b facing each other. The attachment positions of the lower rollers 21 are all the same height from the bottom surface 11c of the case 10 in the attachment position and are set to be the same distance from the attachment surface 11a .

In addition, in the present embodiment, each of the opposing surfaces 11b is formed as a plane perpendicular to the mounting surface 11a and parallel to each other.

The upper roller 22 is attached to the side peripheral surface 11 so as to be capable of being taken out so that a pair of upper rollers 22 are disposed so as to sandwich the outlet O from the left and right sides .

More specifically, each of the upper rollers 22 is attached to each of the opposing faces 11b, and the attachment position thereof is set at a position spaced apart from the lower rollers 21 by a predetermined distance upward.

More specifically, in the present embodiment, the distance between the lower roller 21 and the upper roller 22 on each of the opposing surfaces 11b is the same, and the distance between the lower rollers 21 and the distance between the upper rollers 22 ) Are equal to each other.

Next, the ion source transport system 200 for transporting the above-described ion source 101 will be described with reference to Figs. 3 and 4. Fig.

The ion source transportation system 200 includes a suspension mechanism 40 for suspending the ion source 101 in a standing posture in a state of being removed from the apparatus main body 102, And a support base 30 for supporting the base 101.

delete

The suspending mechanism 40 suspends the ion source 101 removed from the apparatus main body 102 in a standing posture and moves the ion source 101 in the vertical direction and the horizontal direction, In this case, for example, a ceiling crane is used.

The ceiling crane of this embodiment is attached to the ceiling of the ion irradiation apparatus 100 and is located inside the ion irradiation apparatus 100 and above the place where the ion source 101 is disposed. Of course, a ceiling crane provided outside the apparatus may be used instead of such a structure.

The support base 30 supports the ion source 101 at the position of the center of gravity lower than the standing position and transports the ion source 101 to a predetermined position. And a pair of horizontal rails 32 provided on the carriage 31 as shown in Fig.

The bogie 31 includes a frame 311 and a plurality of wheels 312 attached to the frame 311. Each of the wheels 312 is attached to the lower surface of the frame 311 and transmits a floor surface on which the apparatus body 102 is disposed or a floor surface dedicated for conveying the ion source 101. [

The rollers 21 and 22 removed from the case 10 are attached to the carriage 31 of the present embodiment and a plurality of roller holding portions 313 for holding the rollers 21 and 22 are provided.

In this embodiment, roller holding portions 313 are provided in the same number as the rollers 21 and 22 provided in the case 10, and each of the roller holding portions 313 is fixed by screwing .

The pair of horizontal rails 32 are provided on the upper surface of the frame 311 and extend parallel to each other along the horizontal direction.

More specifically, the separation distance of each horizontal rail 32 is equal to the separation distance of the pair of lower rollers 21 and the separation distance of the pair of upper rollers 22, and the length of each horizontal rail 32 , And the distance between the lower roller 21 and the upper roller 22 is longer than the distance between the lower roller 21 and the upper roller 22.

The stoppers 321 and 322 for preventing the lower rollers 21 and the upper rollers 22 from being tumbled from the horizontal rail 32 are provided at the one end portion 32a and the other end portion 32b of the horizontal rail 32, ).

The stopper 321 has a stopper surface 322 inclined upward and inclined toward the outside at each of the end portions 32a and 32b of the horizontal rail 32. Here, the stopper surface 322 is inclined downward And is formed as a curved curved surface.

Next, the operation of the above-described ion source transport system 200 will be described with reference to Fig.

First, an operation of transporting the ion source 101 removed from the apparatus main body 102 to a desired position will be described.

The removal of the ion source 101 is performed, for example, by the user pulling out a bolt connecting the apparatus main body 102 and the cylinder 50. Here, the case 10 and the cylinder 50 are integrally formed And is removed from the apparatus main body 102.

First, the suspending mechanism 40 suspends the ion source 101 removed from the apparatus main body 102 in a standing posture.

At this time, by standing the ion source 101 from the center of gravity or from the vicinity of the center of gravity, the ion source 101 is slightly inclined from the standing position in the vertical direction or the position.

More specifically, the suspension mechanism 40 of the present embodiment attaches a wire or the like to the rear side of the center of gravity of the ion source 101 on the upper surface of the case 10 to suspend the ion source 101 Whereby the ion source 101 becomes slightly forward inclined posture than the posture standing in the vertical direction.

Next, the suspending mechanism 40 moves the ion source 101 in a standing angle in a standing posture at a predetermined angle and, if necessary, moves in the vertical direction and the horizontal direction to move upward of the support base 30 prepared in advance .

More specifically, the suspending mechanism 40 includes an ion source 101 (not shown) such that each lower roller 21 is positioned above the side of the one end 32a of the horizontal rail 32 provided on the support 30, (Fig. 4 (a)).

Subsequently, the suspension mechanism 40 descends the ion source 101 while keeping the standing posture, and places each lower roller 21 on the horizontal rail 32 (Fig. 4 (b)).

In this state, each of the lower rollers 21 is located rearward (opposite to the outlet O) from the center of gravity of the ion source 101 in the horizontal direction, and each of the upper rollers 22 is located in the horizontal direction (The outlet O side) of the center of gravity of the ion source 101. [

After each lower roller 21 is disposed on the horizontal rail 32, the suspending mechanism 40 further lowers the ion source 101. As a result, each of the lower rollers 21 rolls on the horizontal rail 32 from one end portion 32a toward the other end portion 32b so that each upper roller 22 is close to the horizontal rail 32 , The ion source 101 starts to gradually fall from the standing posture (Fig. 4 (c)).

At this time, the outflow port O formed in the case 10 gradually extends downward, for example, to a lower portion of the ion source 101 from the one end portion 32a of the horizontal rail 32 toward the other end portion 32b .

The contact surfaces of the rollers 21 and 22 and the horizontal rail 32 may be flat or curved.

When each of the upper rollers 22 is disposed on the horizontal rail 32, both the lower roller 21 and the upper roller 22 are disposed on the horizontal rail 32, (Fig. 4 (d)).

In this embodiment, the lower roller 21 and the upper roller 22 are positioned above the outlet O and the outlet O is directed downward.

The ion source 101 can be transported to a desired position in a stable state by, for example, moving the carriage 31 while the user remains in this restoring posture.

Next, a case in which the ion source 101 is transported from a predetermined position to the vicinity of the apparatus main body 102 and attached to the apparatus main body 102 will be described.

First, the suspending mechanism 40 lifts up the ion source 101 supported by the support table 30 in a resting position.

As a result, each upper roller 22 is separated from the horizontal rail 32, and each lower roller 21 rolls on the horizontal rail 32 from the other end 32b toward the one end 32a .

From this state, the suspending mechanism 40 further lifts the ion source 101. Thereby, the lower rollers 21 are separated from the horizontal rail 32, and the ion source 101 is in the standing posture.

With this standing posture, the suspending mechanism 40 moves the ion source 101 in the vertical direction and the horizontal direction, moves it to the vicinity of the apparatus main body 102, (102).

The ion source 101 is attached to the apparatus main body 102 in a predetermined attaching posture, for example, by a user connecting the apparatus main body 102 and the cylinder 50 by bolts.

Since the ion source 101 according to the present embodiment configured as described above is supported on the support table 30 in a lowered position than the attachment position, by moving the support table 30 while maintaining the lowered position, The ion source can be transported in a stable state with a low center position.

In addition, since the ion source 101 is in a standing posture by being lowered on the horizontal rail 32 while standing in a standing posture, it is in a standing posture by lifting the ion source 101 from a state in which it is supported on a support table in a posture, It is possible to easily and surely make the body 101 a standing or standing position.

In addition, since the outlet O is directed downward in the dressing posture, dust or the like hardly enters the case 10 from the outlet O, thereby making it difficult for the inside of the case 10 to become dirty have. In addition, since the lower roller 21 and the upper roller 22 are located above the outflow port O, the center of gravity of the ion source 101 supported by the support table 30 can be reliably lowered can do.

Here, when the roller supporting member H supporting the rollers 21 and 22 has conductivity, there is a fear that a discharge is generated in the roller supporting member H and the ion source 101 is broken. Thus, when the ion source 101 is operated, the roller support member H is removed from the case 10 together with the rollers 21 and 22.

Further, in the state where the ion source 101 is attached to the apparatus main body 102, many members such as a permanent magnet and a coolant channel for cooling the permanent magnet are disposed around the ion source 101. It is also preferable that after the ion source 101 is attached to the apparatus main body 102, the rollers 21 and 22 are removed from the case 10 so as not to interfere with each other.

As described above, when the ion source 101 is in operation, the rollers 21 and 22 may be removed from the case 10. In this embodiment, the support base 30 is provided with the roller holding portion 313 The rollers 21 and 22 removed from the case 10 can be held by the roller holding portion 313 and the rollers 21 and 22 can be prevented from being lost.

In addition, since the stoppers 321 are provided at both ends 32a and 32b of the horizontal rail 32, it is possible to prevent the ion source 101 from falling off the horizontal rail 32 during transportation.

Even if the lower roller 21 is lowered to the one end portion 32a or the other end portion 32b of the horizontal rail 32 because the stopper surface 322 of the stopper 321 has a curved shape, The rollers 21 are guided smoothly onto the horizontal rails 32 without falling off the horizontal rails 32.

If the stopper surface 322 of the stopper 321 is a curved surface, even if the ion source 101 is suspended in a standing position in the vertical direction, the lower roller 21 is placed on the curved surface The ion source 101 can be covered so that the outflow port O faces downward.

In addition, when the ion source 101 is removed from the apparatus main body 102, the case 10 is removed from the case 10 because the cylinder 50 holding one or more electrodes constituting the drawing electrode system is connected to the case 10. [ And the extraction electrode system can be removed at once. When attaching the ion source 101 to the apparatus main body 102, the case 10 and the extraction electrode system can be attached at once. As a result, the workability at the time of attaching and detaching the ion source 101 can be improved.

The present invention is not limited to the above-described embodiments.

For example, in the above-described embodiment, the lower roller and the upper roller are provided on the opposite surface, but may be provided on the mounting surface or the back surface opposite to the mounting surface.

Further, the lower roller may be provided on the bottom surface of the case in the standing posture, and the upper roller may be provided on the upper surface of the case in the standing posture.

Incidentally, the lower roller and the upper roller may be provided in a cylinder holding the drawing electrode system. For example, the lower roller and the upper roller may be provided on the cylinder so that the roller supporting member is directly attached to the cylinder, or the roller supporting member is attached to the member attached to the cylinder. In this case, the rollers are located at the substantially same height as the outflow port in the yielding posture.

In the above-described embodiment, the outflow port is directed downward in the dressing posture, but the outflow port may be directed upward.

Further, the outflow port may be oriented in the left-right direction or the back-and-forth direction in the dressing posture. As a specific embodiment of this case, a configuration in which a pair of lower rollers and a pair of upper rollers are provided on the attachment surface and the back surface can be mentioned.

In removing the ion source, in the above embodiment, the case and the cylinder are integrally removed from the apparatus main body, but the case and the cylinder may be separately removed. In this case, it is preferable that the lower roller and the upper roller are attached to each of the case and the cylinder.

Further, the suspension mechanism may be configured to suspend the ion source by using, for example, two or more ceiling cranes. Further, the wires may be divided into a plurality of pieces by a separator or the like, and these wires may be attached to the ion source.

By doing so, the suspended ion source can be moved more stably.

Incidentally, in the above embodiment, the wire is attached to the case, but the wire may be attached to each roller supporting member for supporting the upper roller.

For example, by using two ceiling cranes, the wires of the respective cranes are attached to the respective roller supporting members for supporting the upper rollers. By doing so, it is possible to secure sufficient lifting allowance as compared with the case where wires are attached to the upper surface of the case.

In the above embodiment, the support surface described in the claims is formed on the horizontal rail, but the support surface may be a floor surface on which the apparatus main body is disposed. The ends of the roller support members H to which the rollers 21 and 22 are fixed are inserted into the end portions of the flanges 511 of the cylinder 50, And protrudes toward the main body side. Specifically, the roller supporting member H is constituted by a member bent in a crank shape, and one end is attached to the case 10, and the other end, to which the rollers 21 and 22 are fixed, The flange portion 511 of the flange portion 511 protrudes toward the apparatus main body side.

Instead of providing the pair of horizontal rails 32 on the carriage 31, a separate member (e.g., a flat plate or the like) constituting the support surface may be provided.

In addition, the support surface in the claims does not necessarily have to be horizontal, but may be slightly tilted. Thereby, even when the ion source is suspended in a standing position in the vertical direction, the ion source can be covered so that the outlet is directed downward.

In the above embodiment, the pair of lower rollers and the pair of upper rollers are provided, but the number of the rollers is not limited thereto. For example, a pair of intermediate rollers may be provided at the intermediate positions of the upper and lower rollers.

In the above embodiment, the cylinder holds all the electrodes constituting the drawing electrode system. However, the case may hold a part of the electrodes constituting the drawing electrode system. Further, the case and the tubular body may be constituted by a single member.

In addition, the shape of the electrode holding member for holding the electrode is not limited to the cylindrical shape, and can be variously changed.

It is needless to say that the present invention is not limited to the above-described embodiment, and that various modifications are possible without departing from the spirit of the present invention.

100: ion irradiation device
101: ion source
10: Case
11:
O: Outlet
21: Lower roller
22: Upper roller
102:
30: Support
31: Bogie
32: Horizontal rail
50: electrode holding member (cylindrical member)

Claims (9)

As an ion source attached to the apparatus main body of the ion irradiation apparatus in a predetermined attaching posture,
An electrode holding member connected to the case and holding the at least one electrode; and an electrode holding member connected to the case and holding the at least one electrode, And a lower roller and an upper roller which are removably attached to a side peripheral surface of the case or the electrode holding member in an attaching posture,
Only the lower roller attached to the case or the electrode holding member is disposed to be able to roll on a predetermined support surface in a standing posture in a state of being removed from the apparatus main body,
Characterized in that both the lower roller and the upper roller attached to the case or the electrode holding member are disposed on the support surface in a wrapping posture in which the ball is laid down from the standing posture and the height dimension is reduced, won. 2. The apparatus according to claim 1, wherein the support surface is formed on a pair of horizontal rails provided in parallel,
Wherein the pair of lower rollers and the pair of upper rollers are provided so as to correspond to the horizontal rails. A support structure comprising a horizontal rail on which the ion source according to claim 1 is disposed. 4. The support as set forth in claim 3, wherein a wheel is provided and the floor surface is movable. The support according to claim 3 or 4, further comprising a roller holding portion for holding the lower roller or the upper roller removed from the case or the electrode holding member. A suspending mechanism for suspending the ion source according to claim 1 and carrying it between a support base having a horizontal rail on which the ion source is disposed and the apparatus main body,
The ion source removed from the apparatus main body is suspended in the standing posture,
The ion source is moved above the horizontal rail while maintaining the standing posture,
Lowering the ion source, placing the lower roller on the horizontal rail,
Further lowering the ion source to transfer the lower roller on the horizontal rail until the upper roller is disposed on the horizontal rail. A system for conveying an ion source,
A supporting member having a horizontal rail on which the ion source is disposed, and a suspending mechanism according to claim 6. A method for transporting the ion source according to any one of claims 1 to 3,
The ion source is removed from the apparatus main body to suspend in the standing posture,
The ion source is moved above the support surface while maintaining the standing posture,
The ion source is lowered, the lower roller is disposed on the support surface,
Further lowering the ion source to transfer the lower roller on the support surface until the upper roller is disposed on the support surface. As an ion source attached to the apparatus main body of the ion irradiation apparatus in a predetermined attaching posture,
An electrode holding member connected to the case and holding the at least one electrode; and an electrode holding member connected to the case and holding the at least one electrode, And a lower roller and an upper roller which are removably attached to a side peripheral surface of the case or the electrode holding member in an attaching posture.
KR1020150115953A 2014-12-05 2015-08-18 Ion source, support member, suspension mechanism, ion source transfer system and ion source transfer method KR101946101B1 (en)

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JPJP-P-2014-246986 2014-12-05
JP2014246986A JP6573099B2 (en) 2014-12-05 2014-12-05 Ion source, support base, suspension mechanism, ion source transport system, and ion source transport method

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KR101946101B1 true KR101946101B1 (en) 2019-02-08

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JP6418262B2 (en) * 2017-03-09 2018-11-07 日新イオン機器株式会社 Ion beam irradiation apparatus and ion source attachment / detachment method
JP6653067B2 (en) * 2017-09-20 2020-02-26 日新イオン機器株式会社 Ion source support
JP7325723B2 (en) * 2021-09-30 2023-08-15 日新イオン機器株式会社 Ion source mover and ion implanter

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