CN109505765B - Gas delivery device - Google Patents

Abstract

The scheme provides a gas conveying device which is composed of at least one flow guide unit, wherein the at least one flow guide unit comprises an inlet plate, a base material, a resonance plate, an actuating membrane, a piezoelectric element and an outlet plate which are sequentially stacked, a first cavity is defined between the resonance plate and the actuating membrane, a second cavity is defined between the actuating membrane and the outlet plate, when the piezoelectric element drives the actuating membrane, gas enters a confluence cavity of the base material from an inlet hole of the inlet plate and flows through a hollow hole of the resonance plate to enter the first cavity, is guided into the second cavity from a gap of the actuating membrane and is finally guided out from an outlet hole of the outlet plate, and therefore the circulation of the gas is controlled.

Description

Gas delivery device

[ technical field ] A method for producing a semiconductor device

The present invention relates to a gas delivery device, and more particularly, to a miniature, thin and silent gas delivery device.

[ background of the invention ]

At present, in all fields, no matter the industries such as medicine, computer science and technology, printing, energy and the like, products are developed towards refinement and miniaturization, wherein a gas conveying structure contained in a micropump is a key technology of the products, so that how to break through the technical bottleneck of the products by means of an innovative structure is an important content of development.

With the development of technology, the applications of gas delivery devices are becoming more diversified, such as industrial applications, biomedical applications, medical care, electronic heat dissipation, etc., and even recently, the image of a wearable device is seen, which means that the conventional gas delivery devices have been gradually miniaturized and the flow rate thereof is becoming larger.

In the prior art, the gas conveying device is mainly formed by stacking conventional mechanism components, and each mechanism component is minimized or thinned, so as to achieve the purpose of miniaturization and thinning of the whole device. However, after the conventional mechanism is miniaturized, the dimensional accuracy is difficult to control, and the assembly accuracy is also difficult to control, thereby causing problems of inconsistent product yield, unstable gas delivery flow, and the like.

Furthermore, the known gas transmission device also has a problem of insufficient delivery flow, it is difficult to meet the requirement of large amount of gas transmission through a single gas transmission device, and the known gas transmission device usually has a protruded conductive pin for power connection, so if a plurality of known gas transmission devices are arranged side by side to increase the delivery amount, the assembly precision is also difficult to control, the conductive pin is easy to cause obstacle in arrangement, and the arrangement of the external power supply line is also complicated, so it is still difficult to increase the flow through this way, and the arrangement mode is not flexible.

Therefore, how to develop a micro gas transmission device that can improve the above-mentioned shortcomings of the known technology, achieve the purpose of small volume, miniaturization and silence of the conventional instruments or equipment using the gas transmission device, overcome the problems of difficult control of the miniature size precision and insufficient flow rate, and be flexibly applied to various devices is a problem that needs to be solved at present.

[ summary of the invention ]

The main purpose of the present invention is to provide a gas delivery device, which is an integrally formed miniaturized gas delivery device manufactured by micro-electro-mechanical process, so as to overcome the problems that the conventional delivery device cannot simultaneously have the advantages of small volume, miniaturization, dimensional accuracy control and insufficient flow.

To achieve the above object, a gas delivery device according to a broader aspect of the present invention is composed of at least one flow guiding unit, the at least one flow guiding unit includes: an inlet plate having at least one inlet aperture; a substrate; a resonance plate which is a suspension structure made by surface micro-processing technology and is provided with a hollow hole and a plurality of movable parts; the actuating membrane is a hollow suspension structure manufactured by a surface micro-processing technology and is provided with a plurality of suspension parts, an outer frame part and at least one gap; a piezoelectric element attached to a surface of the suspension portion of the actuation film; an outlet plate having an outlet aperture; the inlet plate, the base material, the resonator plate, the actuating membrane and the outlet plate are sequentially and correspondingly stacked, a gap is formed between the resonator plate and the actuating membrane of the flow guide unit to form a first chamber, a second chamber is formed between the actuating membrane and the outlet plate, when the piezoelectric element of the flow guide unit drives the actuating membrane, gas enters the confluence chamber through the inlet hole of the inlet plate and flows through the hollow hole of the resonator plate to enter the first chamber, is guided into the second chamber through the at least one gap, and is finally guided out through the outlet hole of the outlet plate, so that the circulation of the gas is controlled.

[ description of the drawings ]

Fig. 1 is a schematic structural diagram illustrating an appearance of a gas delivery apparatus according to a first preferred embodiment.

Fig. 2 is a schematic cross-sectional view of the gas delivery device shown in fig. 1.

FIG. 3A is a partially enlarged structural view of a single flow guide unit in the cross section of the gas delivery device shown in FIG. 2.

Fig. 3B to 3D are partial schematic views of the operation flow of the single flow guide unit of the gas delivery device shown in fig. 3A.

FIG. 4 is a schematic structural diagram illustrating an appearance of a gas delivery device according to a second preferred embodiment.

FIG. 5 is a schematic structural diagram illustrating an appearance of a gas delivery device according to a third preferred embodiment.

FIG. 6 is a schematic view of an appearance structure of a gas delivery device according to a fourth preferred embodiment.

Fig. 7A and 7B are operation schematic diagrams of the first, second and third embodiments of the valve of the present disclosure.

Fig. 8A and 8B are operation schematic diagrams of a fourth and fifth embodiment of the valve of the present disclosure.

[ detailed description ] embodiments

Exemplary embodiments that embody features and advantages of this disclosure are described in detail below in the detailed description. It will be understood that the present disclosure is capable of various modifications without departing from the scope of the disclosure, and that the description and drawings are to be regarded as illustrative in nature, and not as restrictive.

Referring to fig. 1, 2 and 3A, in a first embodiment, a gas delivery device 1 includes a first flow guide unit group 10a, a second flow guide unit group 10b and a gas collecting chamber 10c, where the first flow guide unit group 10a and the second flow guide unit group 10b are respectively formed by a plurality of flow guide units 10, and the gas collecting chamber 10c is disposed between the first flow guide unit group 10a and the second flow guide unit group 10 b; each flow guide unit 10 includes an inlet plate 17, a substrate 11, a resonator plate 13, an actuator plate 14, a piezoelectric element 15, and an outlet plate 16, which are sequentially stacked, wherein the inlet plate 17 has an inlet hole 170, the resonator plate 13 has a hollow hole 130 and a movable portion 131, a confluence chamber 12 is formed between the resonator plate 13 and the inlet plate 17, the actuator plate 14 has a suspension portion 141, an outer frame portion 142, and a plurality of gaps 143, and the outlet plate 16 has an outlet hole 160, the structure, characteristics, and arrangement of which will be described in further detail in the following description.

In the embodiment, the plurality of flow guiding units 10 of the first flow guiding unit group 10a and the second flow guiding unit group 10b pass through the plurality of inlet holes 170 of the inlet plate 17, the plurality of collecting chambers 12 of the substrate 11, the plurality of hollow holes 130 and the plurality of movable portions 131 of the resonator plate 13, the plurality of floating portions 141 and the plurality of gaps 143 of the actuator plate 14, the plurality of piezoelectric elements 15 and the plurality of outlet holes 160 to form the plurality of flow guiding units 10, in other words, each flow guiding unit 10 includes one collecting chamber 12, one hollow hole 130, one movable portion 131, one floating portion 141, one gap 143, one piezoelectric element 15 and one outlet hole 160, and the plurality of flow guiding units 10 share one inlet hole 170, but not limited thereto, each guide unit 10 has a gap g0 between the resonator plate 13 and the actuating plate 14 to form a first chamber 18 (as shown in fig. 3A), and a second chamber 19 (as shown in fig. 3A) between the actuating plate 14 and the outlet plate 16. For convenience of describing the structure and gas control manner of the gas delivery device 1, the following description will be made with reference to a single flow guide unit 10, however, the present disclosure is not limited to only a single flow guide unit 10, and the first flow guide unit group 10a and the second flow guide unit group 10b may include a plurality of single flow guide units 10 having the same structure, and the number thereof may be changed according to the actual situation. In other embodiments, each flow guiding unit 10 may also include an inlet hole 170, but not limited thereto.

As shown in fig. 1, in the first preferred embodiment, the number of the plurality of flow guide units 10 of the first flow guide unit group 10a (not shown) and the second flow guide unit group 10b is 40, that is, the first flow guide unit group 10a and the second flow guide unit group 10b both have 40 units capable of independently transmitting gas, that is, as shown in fig. 1, each outlet hole 160 of the second flow guide unit group 10b corresponds to each flow guide unit 10, and the 40 flow guide units 10 further take 20 as a row, and are arranged side by side in pairs, but not limited thereto, and the number and the arrangement thereof may be changed arbitrarily according to the actual situation.

Referring to fig. 2, in the present embodiment, the inlet plate 17 has inlet holes 170, which are holes penetrating through the inlet plate 17 for gas to flow through, and the number of the inlet holes 170 in the present embodiment is 1. In some embodiments, the number of the inlet holes 170 may be more than 1, but not limited thereto, and the number and the arrangement thereof may be changed arbitrarily according to the actual situation. In some embodiments, the inlet plate 17 may further include a filtering device (not shown), but not limited thereto, the filtering device is disposed at the inlet hole 170 in a sealing manner for filtering dust in the gas or for filtering impurities in the gas, so as to prevent the impurities and dust from flowing into the gas conveying device 1 and damaging the components.

The substrate 11 of the gas delivery device 1 of the present embodiment further includes a driving circuit (not shown) electrically connected to the positive electrode and the negative electrode of the piezoelectric element 15 for providing a driving power source, but not limited thereto. In some embodiments, the driving circuit may be disposed at any position inside the gas delivery device 1, but not limited thereto, and may be changed arbitrarily according to the actual situation.

Referring to fig. 2 and fig. 3A, in the gas delivery device 1 of the present embodiment, the resonance plate 13 is a suspension structure, the resonance plate 13 further has a hollow hole 130 and a plurality of movable portions 131, and each flow guide unit 10 has a hollow hole 130 and a corresponding movable portion 131. In the flow guiding unit 10 of the present embodiment, the hollow hole 130 is disposed at the center of the movable portion 131, and the hollow hole 130 is a hole penetrating through the resonator plate 13 and communicated between the converging chamber 12 and the first chamber 18 for gas flowing and transmitting. The movable portion 131 of the present embodiment is a portion of the resonator plate 13, and is a flexible structure, and can be driven by the actuating mold 14 to perform up-and-down bending vibration, so as to transmit gas, and the actuating manner thereof will be further described in detail later in the specification.

Referring to fig. 2 and fig. 3A, in the gas delivery device 1 of the present embodiment, the actuator plate 14 is made of a metal film or a polysilicon film, but not limited thereto, the actuator plate 14 is a hollow suspension structure, the actuator plate 14 further has a suspension portion 141 and an outer frame portion 142, and each of the flow guide units 10 has a suspension portion 141. In the guide unit 10 of the present embodiment, the suspending portion 141 is connected to the outer frame portion 142 by a plurality of connecting portions (not shown), so that the suspending portion 141 is suspended in the outer frame portion 142, and a plurality of gaps 143 are defined between the suspending portion 141 and the outer frame portion 142 for gas to flow through, and the arrangement, implementation and number of the suspending portion 141, the outer frame portion 142 and the gaps 143 are not limited thereto, and may be changed according to actual situations. In some embodiments, the floating portion 141 is a stepped structure, that is, the floating portion 141 further includes a protrusion (not shown), which may be but not limited to a circular protrusion structure, disposed on the lower surface of the floating portion 141, and the protrusion is disposed to maintain the depth of the first chamber 18 at a specific interval, so as to avoid the problem that the movable portion 131 of the resonance plate 13 collides with the actuating plate 14 when the first chamber 18 is too small in depth to generate noise, and to avoid the problem that the gas transmission pressure is insufficient due to too large in depth of the first chamber 18, but not limited thereto.

Referring to fig. 2 and fig. 3A, in the gas delivery device 1 of the present embodiment, each flow guiding unit 10 has a piezoelectric element 15, the piezoelectric element 15 is attached to the upper surface of the suspension portion 141 of the actuating plate 14, and the piezoelectric element 15 further has an anode and a cathode (not shown) for electrical connection, so that the piezoelectric element 15 generates a deformation when receiving a voltage, and the piezoelectric element is used to drive the actuating plate 14 to reciprocally vibrate in a vertical direction in a reciprocating manner and drive the resonance plate 13 to resonate, thereby generating a pressure change in the first chamber 18 between the resonance plate 13 and the actuating plate 14 for gas transmission, and the actuation manner of the first chamber 18 will be further detailed in the later section of the specification.

Referring to fig. 1 to fig. 3A, in the gas delivery device 1 of the present embodiment, the outlet plate 16 further includes a plurality of outlet holes 160, and each of the diversion units 10 has one outlet hole 160. In the flow guiding unit 10 of the present embodiment, the outlet hole 160 is communicated between the second chamber 19 and the outside of the outlet plate 16, so that the gas flows from the second chamber 19 to the outside of the outlet plate 16 through the outlet hole 160, thereby realizing the transmission of the gas.

Referring to fig. 3A to 3D, fig. 3B to 3E are partial schematic views of the operation flow of the single flow guide unit 10 of the gas delivery device shown in fig. 3A. First, the flow guiding unit 10 of the gas delivery device 1 shown in fig. 3A is in an inactivated state (i.e., an initial state), in which a gap g0 is formed between the resonator plate 13 and the actuating plate 14, so that the depth of the gap g0 can be maintained between the resonator plate 13 and the floating portion 141 of the actuating plate 14, and thus the gas can be guided to flow more rapidly, and the floating portion 141 and the resonator plate 13 are kept at a proper distance to reduce contact interference therebetween, so that noise generation can be reduced, but not limited thereto.

As shown in fig. 2 and 3B, in the flow guiding unit 10, when the piezoelectric element 15 applies a voltage to drive the actuator plate 14 to actuate by the piezoelectric element 15, the floating portion 141 of the actuator plate 14 vibrates upwards to increase the volume and decrease the pressure of the first chamber 18, so that the gas enters from the inlet hole 170 on the inlet plate 17 in compliance with the external pressure, collects at the confluence chamber 12 of the substrate 11, and flows upwards into the first chamber 18 through the central hole 130 arranged on the resonance plate 13 corresponding to the confluence chamber 12. Then, as shown in fig. 2 and 3C, the movable portion 131 of the resonator plate 13 is driven by the vibration of the floating portion 141 of the actuator plate 14 to vibrate upwards along with the resonance, and the floating portion 141 of the actuator plate 14 vibrates downwards at the same time, so that the movable portion 131 of the resonator plate 13 is attached to and abutted against the floating portion 141 of the actuator plate 14, and the space communicated with the middle of the first chamber 18 is closed, thereby compressing the first chamber 18 to reduce the volume and increase the pressure, and increasing the volume and reducing the pressure of the second chamber 19, so as to form a pressure gradient, so that the gas in the first chamber 18 flows to both sides, and flows into the second chamber 19 through the gaps 140 of the actuator plate 14.

As shown in fig. 2 and 3D, the floating portion 141 of the actuating plate 14 continues to vibrate downward and drives the movable portion 131 of the resonator plate 13 to vibrate downward, so that the first chamber 18 is further compressed and most of the gas flows into the second chamber 19 for temporary storage,

finally, the floating portion 141 of the actuator plate 14 vibrates upwards to compress the second chamber 19, so that the volume of the second chamber is decreased and the pressure of the second chamber 19 is increased, and the gas in the second chamber 19 is guided out from the outlet hole 160 of the outlet plate 16 to the outside of the outlet plate 16 to complete the gas transmission, and thus the operation shown in fig. 3B is repeated to increase the volume and decrease the pressure of the first chamber 18, so that the gas enters from the inlet hole 170 of the inlet plate 17 again in compliance with the external pressure and is collected at the confluence chamber 12 of the substrate 11, and then flows upwards into the first chamber 18 through the central hole 130 of the resonator plate 13 corresponding to the confluence chamber 12. By repeating the gas delivery operation flow of the guide unit 10 of fig. 3B to 3D, the floating portion 141 of the actuating plate 14 and the movable portion 131 of the resonator plate 13 continuously vibrate up and down in a reciprocating manner, and the gas is continuously guided from the inlet 170 to the outlet 160, so that the gas is delivered.

In this way, the gas conveying device 1 of the present embodiment generates a pressure gradient in the flow channel design of each flow guiding unit 10, so that the gas flows at a high speed, and is transmitted from the suction end to the discharge end through the impedance difference in the flow channel inlet and outlet directions, and the gas can be continuously pushed out under the pressure at the discharge end, and the effect of silence can be achieved. In some embodiments, the vertical reciprocating vibration frequency of the resonator plate 13 may be the same as the vibration frequency of the actuator plate 14, i.e. both may be upward or downward at the same time, which may vary according to the actual implementation, and is not limited to the implementation shown in this embodiment.

As shown in fig. 2, in the present embodiment, a plurality of flow guide units 10 are connected in series to form a first flow guide unit group 10a and a second flow guide unit group 10b, the first flow guide unit group 10a is stacked vertically upward on the second flow guide unit group 10b, and a gas collecting chamber 10c is disposed between the first flow guide unit group 10a and the second flow guide unit group 10b for communication. When the flow guide units 10 in the first flow guide unit group 10a are activated, gas may be sucked from the plurality of inlet holes 170 and then delivered to the gas collection chamber 10c through the plurality of outlet holes 160 to accumulate the gas, and when the flow guide units 10 of the second flow guide unit group 10b are activated, gas accumulated in the gas collection chamber 10c may be sucked from the plurality of inlet holes 170 and then discharged through the plurality of outlet holes 160, so that the gas delivery device 1 may adjust an appropriate gas delivery amount by the activation of the first flow guide unit group 10a and the second flow guide unit group 10 b. In addition, the number and the arrangement manner between the first guide unit group 10a and the second guide unit group 10b are the same, but not limited thereto, and in another embodiment, the number and the arrangement manner of the first guide unit group 10a and the second guide unit group 10b may also be different.

In the embodiment, the first flow guide unit group 10a and the second flow guide unit group 10b of the gas delivery device 1 can be matched with the design of various arrangement modes and the connection of the driving circuit, have extremely high flexibility, are more applicable to various electronic components, can transmit gas simultaneously, and can meet the gas transmission requirement of large flow; in addition, each flow guiding unit 10 can also be controlled to operate or stop independently, for example: some of the diversion units 10 are activated, another part of the diversion units 10 are deactivated, or some diversion units 10 and another part of the diversion units 10 are alternatively operated, but not limited to this, so that the requirements of various gas transmission flow rates can be easily met, and the effect of greatly reducing power consumption can be achieved.

Referring to fig. 4, fig. 4 is a schematic structural diagram illustrating an appearance of a gas delivery device according to a second preferred embodiment. In a second preferred embodiment of the present disclosure, the first flow guide unit set 20a (not shown) and the second flow guide unit set 20b of the gas delivery device 2 are longitudinally stacked, a gas collecting chamber (not shown) is disposed between the first flow guide unit set 20a and the second flow guide unit set 20b, the arrangement is similar to that of the previous embodiment, and therefore, the number of the plurality of flow guide units 20 of the first flow guide unit group 20a (not shown) and the second flow guide unit group 20b of this embodiment is 80, the arrangement is such that each outlet hole 260 of the outlet plate 26 corresponds to each flow guide unit 20, in other words, the gas conveying device 2 has 160 units capable of independently conveying gas, the structure of each flow guide unit 20 is similar to that of the first embodiment, and the difference is only in the number and arrangement, so the structure thereof is not further described herein. In the embodiment, the 80 guide units 20 of the first guide unit group 20a (not shown) and the second guide unit group 20b are also arranged in parallel by taking 20 guide units as a row and four rows, but not limited thereto, and the number and the arrangement thereof may be changed arbitrarily according to the actual situation. Through 80 diversion units 20 simultaneously enabling gas transmission, a larger gas transmission amount can be achieved compared with the foregoing embodiment, and each diversion unit 20 can also independently enable diversion, which can control a larger range of gas transmission flow amount, so that it is more flexibly applied to various devices requiring large flow gas transmission, but not limited thereto. Referring to fig. 1, the number of the plurality of flow guide units 20 of the first flow guide unit group 20a and the second flow guide unit group 20b of the gas delivery device 2 is 20, and the arrangement manner thereof may be a row-by-row arrangement or a column-by-column arrangement.

Referring to fig. 5, fig. 5 is a schematic structural diagram illustrating an appearance of a gas delivery device according to a third preferred embodiment. In a third preferred embodiment of the present invention, the gas delivery device 3 is a circular structure, the gas delivery device 3 is also formed by longitudinally stacking a first flow guide unit group 30a (not shown) and a second flow guide unit group 30b, a gas collecting chamber (not shown) is disposed between the first flow guide unit group 30a and the second flow guide unit group 30b, the arrangement manner is similar to the above-mentioned embodiment, and therefore, it is not repeated herein, and the number of the flow guide units 30 of the first flow guide unit group 30a (not shown) and the second flow guide unit group 30b is 40, that is, each outlet hole 360 of the outlet plate 36 corresponds to each flow guide unit 30, in other words, the first flow guide unit group 30a and the second flow guide unit group 30b of the gas delivery device 3 respectively have 40 units capable of independently transmitting gas, and the structure of each flow guide unit 30 is similar to the above-mentioned first embodiment, the difference is only the number and arrangement, so the structure is not further described herein. In the embodiment, the 40 guide units 30 of the first guide unit group 30a (not shown) and the second guide unit group 30b are arranged in a ring-shaped arrangement, but not limited thereto, and the number and the arrangement thereof may be changed according to the actual situation. The annular array of 40 flow guide units 30 can be applied to various circular or annular gas transmission channels. Through the variation of the array mode of each flow guiding unit 30, it can be applied to various gas transmission devices more flexibly according to the various shapes required in the required devices.

Referring to fig. 6, fig. 6 is a schematic structural diagram illustrating an appearance of a gas delivery device according to a fourth preferred embodiment. In the fourth preferred embodiment of the present invention, the gas delivery device 4 is also formed by longitudinally stacking the first flow guiding unit group 40a and the second flow guiding unit group 40b, and a gas collecting chamber (not shown) is disposed between the first flow guiding unit group 30a and the second flow guiding unit group 30b, which is similar to the above-mentioned embodiments, so that the description is omitted here, and in this embodiment, the flow guiding units 40 of the first flow guiding unit group 40a and the second flow guiding unit group 40b are arranged in a honeycomb manner, but not limited thereto.

Referring to fig. 1, the gas delivery device 1 further includes at least one valve 5, and the valve 5 may be disposed at the inlet 170 or the outlet 160 of the gas delivery device 1, or disposed at both the inlet 170 and the outlet 160.

Referring to fig. 7A and 7B, a first embodiment of the valve 5 includes a retaining member 51, a sealing member 52, and a valve plate 53. The valve plate 53 is disposed in the accommodating space 55 formed between the holder 51 and the sealing member 52, the holder 51 has at least two vent holes 511, the valve plate 53 has vent holes 531 corresponding to the vent holes 511 on the holder 51, the vent holes 511 of the holder 51 and the vent holes 531 of the valve plate 53 are substantially aligned with each other, the sealing member 52 has at least one vent hole 521, and the vent holes 521 of the sealing member 52 and the vent holes 511 of the holder 51 are misaligned.

With continued reference to fig. 7A and 7B, in the first embodiment, the valve 5 may be disposed at the inlet hole 170 of the inlet plate 17; when the gas conveying device 1 is energized to introduce gas into the gas conveying device 1 through the inlet hole 170 of the inlet plate 17, at this time, suction is formed inside the gas conveying device 1, the valve sheet 53 pushes up the valve sheet 53 by the gas flow in the direction of the arrow as shown in fig. 7B, so that the valve 53 abuts against the holder 51, and the vent hole 521 of the sealing member 52 is opened, so that gas can be introduced through the vent hole 102a of the sealing member 102, and since the position of the vent hole 531 of the valve sheet 53 is approximately aligned with the vent hole 511 of the holder 51, the vent holes 531 and 511 can be communicated with each other, so that the gas flow upward and enter the gas conveying device 1. When the actuating plate 14 of the gas delivery device 1 vibrates downward, the volume of the first chamber 18 is further compressed, so that the gas flows upward into the second chamber 19 through the gap 143, and the valve plate 53 of the valve 5 is pushed by the gas, so as to resume the action of the vent hole 521 of the sealing member 52 shown in fig. 7A, so as to form a one-way flow of the gas into the confluence chamber 12, and accumulate the gas in the confluence chamber 12, so that when the actuating plate 14 of the gas delivery device 1 vibrates upward, more gas can be discharged from the outlet hole 160, and the output of the gas quantity is improved.

The retainer 51, the sealing member 52 and the valve plate 53 of the present valve 5 can be made of graphene material to form a miniaturized valve. In the second embodiment of the valve 5, the valve plate 53 is a charged material, and the retainer 51 is a bipolar conductive material. The holder 51 is electrically connected to a control circuit (not shown) for controlling the polarity (positive or negative) of the holder 51. If the valve plate 53 is made of a material with negative charge, when the valve 5 needs to be controlled to open, the control circuit controls the retainer 51 to form a positive electrode, and the valve plate 53 and the retainer 51 maintain different polarities, so that the valve plate 53 approaches the retainer 51 to open the valve 5 (as shown in fig. 7B). On the contrary, if the valve plate 53 is made of a material with negative charge, when the valve 5 needs to be controlled to be closed, the control circuit controls the retainer 51 to form a negative electrode, and the valve plate 53 and the retainer 51 maintain the same polarity, so that the valve plate 53 approaches the sealing member 52, thereby closing the valve 5 (as shown in fig. 7A).

In a third embodiment of the present valve 10, the valve plate 5 is a magnetic material, and the retainer 51 is a magnetic material with controllable polarity. The holder 51 is electrically connected to a control circuit (not shown) for controlling the polarity (positive or negative) of the holder 51. If the valve plate 53 is made of a magnetic material with a negative pole, when the valve 5 needs to be controlled to open, the retainer 51 forms a positive magnetic pole, and the control circuit controls the valve plate 53 and the retainer 51 to maintain different polarities, so that the valve plate 53 approaches the retainer 51 to open the valve 5 (as shown in fig. 7B). On the contrary, if the valve plate 53 is made of a magnetic material with a negative pole, when the valve 5 needs to be controlled to be closed, the retainer 51 forms a negative pole, and the control circuit controls the valve plate 53 and the retainer 51 to maintain the same polarity, so that the valve plate 53 approaches the seal 52, thereby closing the valve 5 (as shown in fig. 7A).

Please refer to fig. 8A and 8B, which are operation diagrams of a fourth embodiment of the valve of the present disclosure. As shown in fig. 8A, the valve 5 includes a holder 51, a sealing member 52, and a flexible membrane 54. The holder 51 has at least two air vents 511, and a receiving space 55 is maintained between the holder 51 and the sealing member 52. The flexible film 54 is made of a flexible material, is attached to one side surface of the holder 51 and is disposed in the accommodating space 55, and is also provided with a vent hole 541 corresponding to the vent hole 511 on the holder 51, and the vent hole 511 of the holder 51 and the vent hole 541 of the flexible film 54 are substantially aligned with each other. And the sealing member 52 is provided with at least one vent hole 521, and the position of the vent hole 521 of the sealing member 52 is misaligned with the position of the vent hole 511 of the holder 51.

Please continue to refer to fig. 8A and fig. 8B. In the fourth preferred embodiment of the present valve 5, the holder 51 is a thermally expandable material and is electrically connected to a control circuit (not shown) for controlling the holder 51 to be heated. When the valve 5 needs to be controlled to open, the control circuit controls the retaining member 51 to be kept in the accommodating space 55 without thermal expansion, and form a gap with the sealing member 52, so as to open the valve 5 (as shown in fig. 7A). On the contrary, when the valve 5 needs to be controlled to be closed, the control circuit controls the retaining member 51 to expand due to heat, so as to drive the retaining member 51 to abut against the sealing member 52, and the flexible membrane 54 can be tightly attached to and close the vent hole 521 of the sealing member 52, thereby closing the valve 5 (as shown in fig. 8B).

With continuing reference to fig. 8A and 8B, the present valve 5 is implemented as a fifth embodiment, wherein the retaining member 51 is a piezoelectric material, and the deformation of the retaining member is controlled by a control circuit (not shown). When the valve 5 needs to be opened under control, the retaining member 51 is not deformed and is kept in the accommodating space 55 and spaced from the sealing member 52, thereby opening the valve (as shown in fig. 7A). On the contrary, when the valve 5 needs to be controlled to be closed, the control circuit controls the retaining member 51, so that the retaining member 51 is deformed to urge the retaining member 51 to abut against the sealing member 52, and the flexible membrane 54 closes the vent hole 521 of the sealing member 52, thereby closing the valve 5 (as shown in fig. 8B). Of course, the holders 51 of each partition corresponding to the plurality of vent holes 521 of the sealing member 52 may be controlled by the control circuit independently to perform the flow operation of the variable valve 5, thereby achieving the adjustment of the appropriate gas flow rate.

In summary, the gas delivery device provided in the present disclosure includes a plurality of flow guiding units, wherein the flow guiding units are actuated to generate a pressure gradient to enable gas to flow rapidly, and the flow guiding units form a first flow guiding unit group and a second flow guiding unit group, and the flow guiding units in the first flow guiding unit group and the second flow guiding unit group are arranged in a specific arrangement manner to control and adjust gas delivery amount. In addition, the piezoelectric element enables the actuating plate to act, so that gas generates pressure gradient in the designed flow channel and the designed pressure chamber, and further the gas flows at high speed and is rapidly transmitted to the outlet end from the inlet end, and the gas is transmitted. Moreover, the number, the arrangement mode and the driving mode of the flow guide units are flexibly changed, so that the device can meet the requirements of various devices and gas transmission flow, and can achieve the effects of high transmission capacity, high efficiency, high flexibility and the like.

Various modifications may be made by those skilled in the art without departing from the scope of the invention as defined by the appended claims.

[ notation ] to show

1. 2, 3, 4: gas delivery device

10a, 20a, 30a, 40 a: first guide unit group

10b, 20b, 30b, 40 b: second flow guide unit group

10 c: air-collecting chamber

10. 20, 30, 40: flow guiding unit

11: base material

12: confluence chamber

13: resonance board

130: hollow hole

131: movable part

14: actuating plate

141: suspension part

142: outer frame part

143: voids

15: piezoelectric element

16. 26, 36: outlet plate

160. 260, 360: an outlet orifice

17: entrance plate

170: inlet aperture

18: the first chamber

19: second chamber

g 0: gap

5: valve with a valve body

51: holding member

52: sealing element

53: valve plate

54: flexible film

511. 521, 531, 541: vent hole

55: containing space

Claims (13)

1. A gas delivery device, comprising:

a first and second guide unit set respectively composed of a plurality of guide units, each of the guide units comprising:

an inlet plate having at least one inlet aperture;

a substrate having a body and at least one converging chamber, the body being disposed opposite to the at least one inlet aperture;

a resonance plate having a hollow hole, and the at least one confluence chamber being disposed between the resonance plate and the inlet plate;

an actuating plate having a suspension portion, an outer frame portion and at least one gap;

a piezoelectric element attached to a surface of the suspension portion of the actuator plate; and

an outlet plate having at least one outlet hole, the outlet hole being sequentially communicated with the gap, the hollow hole, the confluence chamber and the inlet hole; and

the air collecting cavity is arranged between the first flow guide unit group and the second flow guide unit group;

wherein, the plurality of flow guiding units of the first flow guiding unit group suck the gas from the respective inlet holes and transmit the gas to the gas collecting chamber from the respective outlet holes, and the plurality of flow guiding units of the second flow guiding unit group suck the gas in the gas collecting chamber from the respective inlet holes and discharge the gas from the respective outlet holes, so as to realize the adjustment of the gas transmission amount.

2. The gas delivery device according to claim 1, wherein the first and second flow guide units are respectively arranged in a row-by-row serial arrangement from the plurality of flow guide units.

3. The gas delivery device according to claim 1, wherein the first and second flow guide units are respectively arranged in a row by row in series.

4. The gas delivery device according to claim 1, wherein the first and second flow guide units are respectively arranged in a ring-like manner by the plurality of flow guide units.

5. The gas delivery device according to claim 1, wherein the first and second flow guide units are respectively arranged in a honeycomb manner by the plurality of flow guide units.

6. The gas delivery device according to claim 1, wherein the plurality of flow guide units further comprises:

a valve disposed in at least one of the inlet port and the outlet port;

the inlet plate, the substrate, the resonator plate, the actuating plate and the outlet plate are correspondingly stacked in sequence, a gap is formed between the resonator plate and the actuating plate to form a first chamber, a second chamber is formed between the actuating plate and the outlet plate, the piezoelectric element drives the actuating plate to generate bending resonance, so that the first chamber and the second chamber form a pressure difference, the valve is opened, gas enters the confluence chamber from the inlet hole of the inlet plate and flows through the hollow hole of the resonator plate to enter the first chamber, and is guided into the second chamber from the at least one gap and finally is guided out from the outlet hole of the outlet plate, and therefore the flow of the gas is transmitted.

7. The gas delivery device of claim 6, wherein the valve comprises a holder, a sealing member, and a valve plate, wherein a receiving space is defined between the holder and the sealing member, the valve plate is disposed in the receiving space, the holder has at least two vents, the valve plate has vents corresponding to the vents of the holder, the vents of the holder and the vents of the valve plate are substantially aligned with each other, and the sealing member has at least one vent that is misaligned with the vents of the holder.

8. The gas delivery device according to claim 6, wherein the valve comprises a holder made of graphene, a sealing member, and a valve plate, wherein a receiving space is defined between the holder and the sealing member, the valve plate is disposed in the receiving space, the holder has at least two vent holes, the valve plate has vent holes corresponding to the vent holes of the holder, the vent holes of the holder and the valve plate are substantially aligned with each other, and the sealing member has at least one vent hole, which is misaligned with the vent holes of the holder.

9. The gas delivery device according to claim 7 or 8, wherein the valve plate is a charged material and the retainer is a bipolar conductive material, the polarity of the conductive material being controlled by a control circuit, the valve plate being moved closer to the retainer when the valve plate and the retainer maintain different polarities, thereby opening the valve; when the valve plate and the retainer maintain the same polarity, the valve plate approaches the sealing element to close the valve.

10. A gas delivery device according to claim 7 or claim 8, wherein the valve plate is of a magnetic material and the retainer is of a magnetic material of controlled polarity reversal, the polarity of the valve plate being controlled by a control circuit, the valve plate being urged towards the retainer when the valve plate and retainer are maintained at different polarities to effect opening of the valve, and the valve plate being urged towards the seal when the valve plate and retainer are maintained at the same polarity to effect closing of the valve.

11. The gas delivery device according to claim 6, wherein the valve comprises a holder, a sealing member and a flexible membrane, wherein a receiving space is defined between the holder and the sealing member, the flexible membrane is attached to a surface of the holder and disposed in the receiving space, the holder has at least two vent holes, the flexible membrane has vent holes corresponding to the vent holes of the holder, the vent holes of the holder and the vent holes of the flexible membrane are substantially aligned with each other, and the sealing member has at least one vent hole and is misaligned with the vent holes of the holder.

12. The gas delivery device according to claim 11, wherein the retaining member is a thermally expandable material, the heating of which is controlled by a control circuit, such that when the retaining member expands due to heating, the flexible membrane is urged against the sealing member to close the at least one vent hole of the sealing member, thereby closing the valve; when the retaining member is not thermally expanded, the space between the sealing member and the retaining member is kept to open the valve.

13. The gas delivery device according to claim 11, wherein the retaining member is a piezoelectric material whose deformation is controlled by a control circuit, such that when the retaining member is deformed, the flexible membrane is urged against the sealing member to close the at least one vent hole of the sealing member, thereby closing the valve; when the retaining piece is not deformed, the distance between the sealing piece and the retaining piece is kept in the accommodating space so as to open the valve.

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