CN210738778U - Micro-electromechanical fluid control device - Google Patents

Abstract

The present application provides a micro-electromechanical fluid control device, which is composed of at least one flow guide unit, wherein the at least one flow guide unit comprises an inlet plate, a substrate, a resonance membrane, an actuating membrane, a piezoelectric membrane and an outlet plate, which are sequentially stacked, a first chamber is defined between the resonance membrane and the actuating membrane, a second chamber is defined between the actuating membrane and the outlet plate, when the actuating membrane is driven by the piezoelectric membrane, a fluid enters a confluence chamber of the substrate through an inlet hole of the inlet plate, flows through a hollow hole of the resonance membrane, enters the first chamber, is guided into the second chamber through a gap of the actuating membrane, and is finally guided out through an outlet hole of the outlet plate, so as to control the flow of the fluid.

Description

Micro-electromechanical fluid control device

[ technical field ] A method for producing a semiconductor device

The present invention relates to a micro-electromechanical fluid control device, and more particularly, to a micro-electromechanical fluid control device with low profile and silence.

[ background of the invention ]

At present, in all fields, no matter in medicine, computer technology, printing, energy and other industries, products are developed towards refinement and miniaturization, wherein fluid conveying structures contained in products such as micropumps, sprayers, ink jet heads, industrial printing devices and the like are key technologies thereof, so that how to break through technical bottlenecks thereof by means of innovative structures is an important content of development.

With the increasing development of technology, the applications of fluid delivery devices are becoming more diversified, such as industrial applications, biomedical applications, medical care, electronic heat dissipation, etc., and even recently, the image of a wearable device is seen, which means that the conventional fluid delivery devices have been gradually miniaturized and the flow rate thereof is becoming maximized.

In the prior art, the fluid conveying device is mainly formed by stacking conventional mechanism components, and each mechanism component is minimized or thinned, so as to achieve the purpose of miniaturization and thinning of the whole device. However, after the conventional mechanism is miniaturized, the dimensional accuracy is difficult to control, and the assembly accuracy is also difficult to control, thereby causing problems of inconsistent product yield, unstable flow rate of fluid delivery, and the like.

Furthermore, the known fluid transfer device also has a problem of insufficient flow rate, it is difficult to meet the requirement of large amount of fluid transfer through a single fluid transfer device, and the known fluid transfer device usually has a protruding conductive pin for electrical connection, so if a plurality of known fluid transfer devices are arranged side by side to increase the flow rate, the assembly precision is also difficult to control, the conductive pin is easy to cause an obstacle to the arrangement, and the external power supply line is complicated to arrange, so it is still difficult to increase the flow rate through this way, and the arrangement mode is not flexible.

Therefore, how to develop a micro fluid transmission device that can improve the above-mentioned shortcomings of the known technology, achieve the purpose of small volume, miniaturization and silence of the conventional instruments or equipment using the fluid transmission device, overcome the problems of difficult control of the miniature size precision and insufficient flow rate, and be flexibly applied to various devices is a problem that needs to be solved at present.

[ Utility model ] content

The main objective of the present invention is to provide a micro-electromechanical fluid control device, which is an integrally formed micro-electromechanical fluid control device manufactured by a micro-electromechanical process, so as to overcome the problems that the conventional fluid conveying device cannot simultaneously have the advantages of small volume, miniaturization, dimensional accuracy control and insufficient flow rate.

To achieve the above object, a broader aspect of the present invention provides a micro-electromechanical fluid control device, which is composed of at least one flow guiding unit, the flow guiding unit comprising: an inlet plate having at least one inlet aperture; a substrate; a resonance membrane which is a suspension structure made by surface micro-processing technology and is provided with a hollow hole and a plurality of movable parts; the actuating membrane is a hollow suspension structure manufactured by a surface micro-processing technology and is provided with a plurality of suspension parts, an outer frame part and at least one gap; a piezoelectric film attached to a surface of the suspended portion of the actuating film; an outlet plate having an outlet aperture; the inlet plate, the substrate, the resonance membrane, the actuating membrane and the outlet plate are sequentially and correspondingly stacked, a gap is formed between the resonance membrane and the actuating membrane of the flow guide unit to form a first chamber, a second chamber is formed between the actuating membrane and the outlet plate, when the piezoelectric membrane of the flow guide unit drives the actuating membrane, fluid enters the confluence chamber through the inlet hole of the inlet plate and flows through the hollow hole of the resonance membrane to enter the first chamber, is guided into the second chamber through the at least one gap, and is finally guided out through the outlet hole of the outlet plate, so that the flow of the fluid is controlled.

[ description of the drawings ]

Fig. 1 is a schematic view of an external structure of a micro-electromechanical fluid control device according to a first preferred embodiment.

FIG. 2 is a cross-sectional view of the MEMS fluid control device shown in FIG. 1.

Fig. 3A is a partially enlarged structural diagram of a single flow guide unit in the cross section of the micro-electromechanical fluid control device shown in fig. 2.

Fig. 3B to fig. 3E are partial schematic views of an operation flow of a single flow guide unit of the micro-electromechanical fluid control device shown in fig. 3A.

Fig. 4 is a schematic view illustrating an external structure of a micro-electromechanical fluid control device according to a second preferred embodiment.

Fig. 5 is a schematic view illustrating an external structure of a micro-electromechanical fluid control device according to a third preferred embodiment.

[ detailed description ] embodiments

Exemplary embodiments that embody features and advantages of this disclosure are described in detail below in the detailed description. It will be understood that the present disclosure is capable of various modifications without departing from the scope of the disclosure, and that the description and drawings are to be regarded as illustrative in nature, and not as restrictive.

The micro-electromechanical fluid control device is an integrally formed micro-fluid control device manufactured by a micro-electromechanical process, and is used for overcoming the problems that the traditional fluid conveying device cannot simultaneously have small volume, miniaturization, insufficient output flow, poor dimensional accuracy control and the like. First, referring to fig. 1 and fig. 2, fig. 1 is a schematic diagram illustrating an external structure of a micro-electromechanical fluid control device according to a first preferred embodiment, and fig. 2 is a schematic diagram illustrating a cross-sectional structure of the micro-electromechanical fluid control device shown in fig. 1. The micro-electromechanical fluid control device 1 of the present embodiment is a fluid control device manufactured by micro-electromechanical systems (MEMS), and is manufactured by performing micro-processing on a material surface through dry etching and wet etching to manufacture an integrally formed micro-fluid control device. As shown in fig. 1 and 2, in the first embodiment, the mems fluid control device 1 is a rectangular plate-shaped structure, but not limited thereto, and is mainly formed by sequentially stacking an inlet plate 17, a substrate 11, a resonator 13, an actuator 14, a plurality of piezoelectric membranes 15, and an outlet plate 16, wherein the inlet plate 17 has an inlet hole 170, the resonator 13 has a hollow hole 130 and a plurality of movable portions 131, a confluence chamber 12 is provided between the resonator 13 and the inlet plate 17 (as shown in fig. 3A), the actuator 14 has a suspending portion 141, an outer frame portion 142, and a plurality of gaps 143 (as shown in fig. 3A), and the outlet plate 16 has an outlet hole 160, but not limited thereto, and the structure, characteristics, and arrangement thereof will be further described in detail in the following description. The micro-electromechanical fluid control device 1 of the present embodiment is integrally formed by a micro-electromechanical system (MEMS) process, and has a small size, a thin shape, and no need of stacking and processing as in the conventional fluid control devices, thereby avoiding the problem of difficulty in controlling the size precision, and the produced product has stable quality and high yield.

The micro-electromechanical fluid control device 1 of the present embodiment passes through the plurality of inlet holes 170 of the inlet plate 17, the plurality of confluence chambers 12 of the substrate 11, the plurality of hollow holes 130 and the plurality of movable portions 131 of the resonance membrane 13, the plurality of floating portions 141 and the plurality of gaps 143 of the actuating membrane 14, the plurality of piezoelectric membranes 15 and the plurality of outlet holes 160 to form a plurality of flow guide units 10, in other words, each flow guide unit 10 includes one confluence chamber 12, one hollow hole 130, one movable portion 131, one floating portion 141, one gap 143, one piezoelectric membrane 15 and one outlet hole 160, and the plurality of flow guide units 10 share one inlet hole 170, but not limited thereto, each flow guide unit 10 has a gap g0 between the resonance membrane 13 and the actuating membrane 14 to form a first chamber 18 (as shown in fig. 3A), and a second chamber 19 (as shown in fig. 3A) between the actuating membrane 14 and the outlet plate 16. For convenience of describing the structure and the fluid control manner of the micro-electromechanical fluid control device 1, the following description will be made with reference to a single flow guide unit 10, but this is not intended to limit the present application to only a single flow guide unit 10, and the flow guide units 10 may include a plurality of micro-electromechanical fluid control devices 1 composed of single flow guide units 10 with the same structure, and the number of the flow guide units 10 may be changed arbitrarily according to the actual situation. In other embodiments, each flow guiding unit 10 may also include an inlet hole 170, but not limited thereto.

As shown in fig. 1, in the first preferred embodiment, the number of the plurality of flow guiding units 10 of the micro-electromechanical fluid control device 1 is 40, that is, the micro-electromechanical fluid control device 1 has 40 units capable of independently transmitting fluid, that is, as shown in fig. 1, each outlet hole 160 corresponds to each flow guiding unit 10, and the 40 flow guiding units 10 are further 20 in a row, and are arranged side by side in a pairwise correspondence, but not limited thereto, and the number and the arrangement thereof can be changed arbitrarily according to the actual situation.

Referring to fig. 2, in the present embodiment, the inlet plate 17 has inlet holes 170, which are holes penetrating through the inlet plate 17 for fluid to flow through, and the number of the inlet holes 170 in the present embodiment is 1. In some embodiments, the number of the inlet holes 170 may be more than 1, but not limited thereto, and the number and the arrangement thereof may be changed arbitrarily according to the actual situation. In some embodiments, the inlet plate 17 may further include a filtering device (not shown), but not limited thereto, the filtering device is disposed at the inlet hole 170 in a sealing manner for filtering dust in the gas or filtering impurities in the fluid, so as to prevent the impurities and dust from flowing into the interior of the mems fluid control device 1 and damaging the components.

Referring to fig. 2 and fig. 3A, fig. 3A is a schematic diagram of a partial enlarged structure of a single flow guide unit in a cross section of the micro-electromechanical fluid control device shown in fig. 2. As shown in the drawings, in the present embodiment, the substrate 11 of the flow guiding unit 10 is made by Bulk Micromachining (Bulk Micromachining) in micro-electromechanical process, and is a fluid inlet structure with a high aspect ratio, and has a density of only one third of that of steel due to the young's coefficient similar to that of steel and twice as high yield strength of silicon, and the mechanical properties of silicon are very stable, so that the dynamic microstructure is suitable for application, but not limited thereto, and the material thereof may be changed according to actual situations. In the present embodiment, the substrate 11 further includes a driving circuit (not shown) electrically connected to the positive electrode and the negative electrode of the piezoelectric film 15 for providing a driving power, but not limited thereto. In some embodiments, the driving circuit may be disposed at any position inside the micro-electromechanical fluid control device 1, but not limited thereto, and may be changed arbitrarily according to the actual situation.

Referring to fig. 2 and fig. 3A, in the micro-electromechanical fluid control apparatus 1 of the present embodiment, the resonance membrane 13 is a suspension structure made by Surface micro-machining (Surface micro-machining), the resonance membrane 13 further has a hollow hole 130 and a plurality of movable portions 131, and each of the flow guide units 10 has a hollow hole 130 and a corresponding movable portion 131. In the flow guiding unit 10 of the present embodiment, the hollow hole 130 is disposed at the center of the movable portion 131, and the hollow hole 130 is a hole penetrating through the resonance membrane 13 and communicated between the converging chamber 12 and the first chamber 18 for fluid flowing and transferring. The movable portion 131 of the present embodiment is a portion of the resonance membrane 13, and is of a flexible structure, and can be driven by the actuating module 14 to perform up-and-down bending vibration, thereby transmitting fluid, and the actuating manner of the movable portion will be further described in detail later in the specification.

Referring to fig. 2 and fig. 3A, in the micro-electromechanical fluid control device 1 of the present embodiment, the actuating membrane 14 is formed by a metal material thin film or a polysilicon thin film, but not limited thereto, the actuating membrane 14 is a hollow suspension structure made by Surface micromachining technology (Surface micromachining), the actuating membrane 14 further includes a suspension portion 141 and an outer frame portion 142, and each of the flow guiding units 10 has a suspension portion 141. In the guide unit 10 of the present embodiment, the suspension portion 141 is connected to the outer frame portion 142 by a plurality of connecting portions (not shown), so that the suspension portion 141 is suspended in the outer frame portion 142, and a plurality of gaps 143 are defined between the suspension portion 141 and the outer frame portion 142 for fluid to flow through, and the arrangement, implementation and number of the suspension portion 141, the outer frame portion 142 and the gaps 143 are not limited thereto, and may be changed according to actual situations. In some embodiments, the floating portion 141 is a stepped structure, that is, the floating portion 141 further includes a protrusion (not shown), which may be but not limited to a circular protrusion structure, disposed on the lower surface of the floating portion 141, and the protrusion is disposed to maintain the depth of the first chamber 18 at a specific interval, so as to avoid the problem that the movable portion 131 of the resonant mode 13 collides with the actuating membrane 14 during resonance due to too small depth of the first chamber 18 and generates noise, and to avoid the problem that the fluid transmission pressure is insufficient due to too large depth of the first chamber 18, but not limited thereto.

Referring to fig. 2 and fig. 3A, in the micro-electromechanical fluid control device 1 of the present embodiment, each of the flow guiding units 10 has a piezoelectric film 15, wherein the piezoelectric film 15 further has a positive electrode and a negative electrode (not shown) for driving the piezoelectric film 14. In the flow guiding unit 10 of the present embodiment, the piezoelectric film 15 is a metal oxide thin film made by a Sol-gel method (Sol-gelmethod), but not limited thereto, the piezoelectric film 15 is attached to the upper surface of the suspension portion 141 of the actuating film 14 for driving the actuating film 14 to reciprocally and vertically vibrate in a reciprocating manner and driving the resonance film 13 to resonate, so that the first chamber 18 between the resonance film 13 and the actuating film 14 generates a pressure change for transmitting a fluid, and the operation manner of the piezoelectric film 15 is further detailed in the later section of the specification.

Referring to fig. 1 to fig. 3A, in the micro-electromechanical fluid control device 1 of the present embodiment, the outlet plate 16 further includes an outlet hole 160, and each of the flow guiding units 10 has an outlet hole 160. In the flow guiding unit 10 of the present embodiment, the outlet hole 160 is communicated between the second chamber 19 and the outside of the outlet plate 16, so that the fluid flows from the second chamber 19 to the outside of the outlet plate 16 through the outlet hole 160, thereby realizing the fluid transmission. In some embodiments, the outlet plate 16 of the diversion unit 10 further comprises a check valve (not shown) that is disposed at the outlet hole 160 in a sealing manner and is opened or closed according to the pressure change of the second chamber 19, so as to prevent the fluid from flowing backward into the second chamber 19 from the outside, but not limited thereto. In other embodiments, the outlet plate 16 of the flow guiding unit 10 further comprises a filtering device (not shown) disposed at the outlet hole 160 for filtering dust in the gas or impurities in the fluid, so as to prevent the impurities and dust from flowing to the internal components of the mems fluid control device 1 and being damaged.

Referring to fig. 3A to 3E, fig. 3B to 3E are partial schematic views of an operation flow of a single flow guide unit of the micro-electromechanical fluid control device shown in fig. 3A. First, the flow guiding unit 10 of the micro-electromechanical fluid control device 1 shown in fig. 3A is in an inactivated state (i.e., an initial state), wherein a gap g0 is formed between the resonance membrane 13 and the actuating membrane 14, so that the depth of the gap g0 can be maintained between the resonance membrane 13 and the floating portion 141 of the actuating membrane 14, and further the fluid can be guided to flow more rapidly, and since the floating portion 141 and the resonance membrane 13 keep a proper distance, the contact interference between each other is reduced, and the noise generation can be reduced, but not limited thereto.

As shown in fig. 2 and 3B, in the flow guiding unit 10, when the actuating membrane 14 is actuated by the voltage of the piezoelectric membrane 15, the suspension portion 141 of the actuating membrane 14 vibrates upwards, so that the volume of the first chamber 18 increases and the pressure decreases, and the fluid enters from the inlet hole 170 on the inlet plate 17 in compliance with the external pressure, collects at the confluence chamber 12 of the substrate 11, and then flows upwards into the first chamber 18 through the central hole 130 of the resonance membrane 13 corresponding to the confluence chamber 12.

Then, as shown in fig. 2 and fig. 3C, the movable portion 131 of the resonance membrane 13 is driven by the vibration of the suspension portion 141 of the actuation membrane 14 to vibrate upwards along with the resonance, and the suspension portion 141 of the actuation membrane 14 vibrates downwards at the same time, so that the movable portion 131 of the resonance membrane 13 is attached to and abutted against the suspension portion 141 of the actuation membrane 14, and the space circulating in the middle of the first chamber 18 is closed, thereby compressing the first chamber 18 to reduce the volume and increase the pressure, and increasing the volume and reducing the pressure of the second chamber 19, so as to form a pressure gradient, so that the fluid in the first chamber 18 flows to both sides, and flows into the second chamber 19 through the plurality of gaps 140 of the actuation membrane 14.

As shown in fig. 2 and 3D, the suspension portion 141 of the actuating membrane 14 continuously vibrates downwards and drives the movable portion 131 of the resonance membrane 13 to vibrate downwards, so that the first chamber 18 is further compressed, and most of the fluid flows into the second chamber 19 for temporary storage, so as to be squeezed out in a large amount in the next step.

Finally, as shown in fig. 2 and fig. 3E, the floating portion 141 of the actuating membrane 14 vibrates upwards to compress the second chamber 19, so that the volume of the second chamber is reduced and the pressure of the second chamber is increased, and the fluid in the second chamber 19 is guided out of the outlet plate 16 from the outlet hole 160 of the outlet plate 16 to complete the fluid transmission, and the floating portion 141 of the actuating membrane 14 vibrates upwards while the movable portion 131 of the resonance plate 13 vibrates downwards to increase the volume of the first chamber 18 and reduce the pressure of the first chamber 18, so that the fluid enters the confluence chamber 12 of the substrate 11 again from the inlet hole 170 of the inlet plate 17 in compliance with the external pressure and is converged into the first chamber 18 through the central hole 130 of the resonance membrane 13 corresponding to the confluence chamber 12. The fluid transfer flow of the flow guide unit 10 of fig. 3B to 3E is repeated, so that the floating portion 141 of the actuating membrane 14 and the movable portion 131 of the resonance membrane 13 continuously vibrate up and down in a reciprocating manner, and the fluid is continuously guided from the inlet 170 to the outlet 160, thereby realizing the fluid transfer.

Therefore, the micro-electromechanical fluid control device 1 of the present embodiment generates a pressure gradient in the flow channel design of each flow guiding unit 10, so that the fluid flows at a high speed, and the fluid is transmitted from the suction end to the discharge end through the impedance difference in the flow channel inlet and outlet directions, and the fluid can be continuously pushed out under the pressure at the discharge end, and the effect of silence can be achieved. In some embodiments, the vertical reciprocating vibration frequency of the resonance membrane 13 can be the same as the vibration frequency of the actuating membrane 14, i.e. both can be upward or downward at the same time, which can be varied according to the actual implementation, and is not limited to the implementation shown in this embodiment.

In the embodiment, the micro-electromechanical fluid control device 1 can be matched with the design of various arrangement modes and the connection of the driving circuit through 40 flow guide units 10, has extremely high flexibility, is more applicable to various electronic components, and can transmit fluid through 40 flow guide units 10 at the same time, so as to meet the requirement of large-flow fluid transmission; in addition, each flow guiding unit 10 can also be controlled to operate or stop independently, for example: some of the diversion units 10 are activated, another part of the diversion units 10 are deactivated, or some diversion units 10 and another part of the diversion units 10 are alternatively operated, but not limited to this, so as to easily achieve the requirement of various fluid transmission flow rates and achieve the effect of greatly reducing power consumption.

Referring to fig. 4, fig. 4 is a schematic view illustrating an external structure of a micro-electromechanical fluid control device according to a second preferred embodiment. In the second preferred embodiment of the present disclosure, the number of the plurality of flow guiding units 20 of the micro-electromechanical fluid control device 2 is 80, that is, each outlet hole 260 of the outlet plate 26 corresponds to each flow guiding unit 20, in other words, the micro-electromechanical fluid control device 2 has 80 units capable of independently transmitting fluid, and the structure of each flow guiding unit 20 is similar to that of the first embodiment, and the difference is only the number and the arrangement manner thereof, so the structure thereof is not further described herein. In the embodiment, the 80 diversion units 20 are also arranged in a row of 20 and in parallel of four rows, but not limited thereto, and the number and arrangement thereof can be changed arbitrarily according to the actual situation. Through the simultaneous enabling of 80 diversion units 20 to transmit fluid, a larger fluid transmission amount can be achieved compared to the foregoing embodiment, and each diversion unit 20 can also independently enable diversion, which can control a larger range of fluid transmission flow rate, so that it can be more flexibly applied to various devices requiring large flow fluid transmission, but not limited thereto.

Referring to fig. 5, fig. 5 is a schematic view illustrating an external structure of a micro-electromechanical fluid control device according to a third preferred embodiment. In the third preferred embodiment of the present invention, the micro-electromechanical fluid control device 3 is a circular structure, and the number of the flow guiding units 30 is 40, that is, each outlet hole 360 of the outlet plate 36 corresponds to each flow guiding unit 30, in other words, the micro-electromechanical fluid control device 3 has 40 units capable of independently transmitting fluid, and the structure of each flow guiding unit 30 is similar to that of the first embodiment, and the difference is only in the number and arrangement, so the structure thereof is not further described herein. In the embodiment, the 40 diversion units 30 are arranged in a ring-shaped arrangement, but not limited thereto, and the number and the arrangement thereof can be arbitrarily changed according to the actual situation. The annular array of 40 flow guide units 30 can be applied to various circular or annular fluid transmission channels. By changing the array of each flow guiding unit 30, it can be applied to various fluid transmission devices more flexibly according to various shapes required in the required device. In other embodiments, the flow guiding units 30 may be arranged in a honeycomb manner (not shown), but not limited thereto.

In summary, the micro-electromechanical fluid control device provided by the present invention is integrally formed by micro-electromechanical system (MEMS) technology, which can achieve the effects of small size, thin profile, etc., and can avoid the problem of difficult control of dimensional accuracy without stacking and processing the conventional fluid control devices, and the produced product has stable quality and high yield. In addition, the piezoelectric film can actuate the actuating film to generate a pressure gradient in the designed flow channel and the pressure chamber, so that the fluid flows at a high speed and is rapidly transmitted from the inlet end to the outlet end, and the transmission of the fluid is realized. Moreover, the number, the arrangement mode and the driving mode of the flow guide units are flexibly changed, so that the device can meet the requirements of various devices and fluid transmission flow, and can achieve the effects of high transmission capacity, high efficiency, high flexibility and the like.

Various modifications may be made by those skilled in the art without departing from the scope of the invention as defined by the appended claims.

[ notation ] to show

1. 2, 3: micro-electromechanical fluid control device

10. 20, 30: flow guiding unit

11: base material

12: confluence chamber

13: resonance film

130: hollow hole

131: movable part

14: actuating membrane

141: suspension part

142: outer frame part

143: voids

15: piezoelectric film

16. 26, 36: outlet plate

160. 260, 360: an outlet orifice

17: entrance plate

170: inlet aperture

18: the first chamber

19: second chamber

g 0: gap

Claims (9)

1. A micro-electromechanical fluid control device is composed of at least two flow guide units, wherein the flow guide units comprise:

an inlet plate having at least one inlet aperture;

a substrate;

a resonance membrane which is a suspension structure made by surface micromachining technology and is provided with a hollow hole and a plurality of movable parts, and a confluence chamber is arranged between the resonance membrane and the inlet plate;

the actuating membrane is a hollow suspension structure manufactured by a surface micro-processing technology and is provided with a suspension part, an outer frame part and at least one gap;

a piezoelectric film attached to a surface of the suspended portion of the actuating film; and

an outlet plate having an outlet aperture;

the inlet plate, the substrate, the resonance membrane, the actuating membrane and the outlet plate are correspondingly stacked in sequence, a gap is formed between the resonance membrane and the actuating membrane of the flow guide unit to form a first chamber, a second chamber is formed between the actuating membrane and the outlet plate, when the piezoelectric membrane of the flow guide unit drives the actuating membrane, fluid enters the confluence chamber through the inlet hole of the inlet plate and flows through the hollow hole of the resonance membrane to enter the first chamber, is guided into the second chamber through the at least one gap, and is finally guided out through the outlet hole of the outlet plate, so that the flow of the fluid is controlled.

2. The microelectromechanical fluid control device of claim 1, characterized in that the actuating membrane is a metallic material membrane or a polysilicon membrane.

3. The microelectromechanical fluid control device of claim 1, characterized in that the piezoelectric film is a metal oxide film formed by a sol-gel process.

4. The microelectromechanical fluid control device of claim 1, characterized in that the microelectromechanical fluid control device is an integrally formed structure fabricated by a microelectromechanical systems process.

5. The microelectromechanical fluid control device of claim 1, wherein the piezoelectric film further comprises a positive electrode and a negative electrode for driving actuation of the piezoelectric film.

6. The microelectromechanical fluid control device of claim 1, characterized in that the number of the plurality of flow guide units is 40, and 20 flow guide units are arranged in a row, and two rows are correspondingly arranged side by side.

7. The microelectromechanical fluid control device of claim 1, characterized in that the plurality of flow directing units are 80 in number, and 20 are arranged in a row, and four rows are correspondingly arranged side by side.

8. The microelectromechanical fluid control device of claim 1, characterized in that the plurality of flow directing units are arranged in a ring-like manner.

9. The microelectromechanical fluid control device of claim 1, characterized in that the plurality of flow directing cells are arranged in a honeycomb pattern.

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