CN109494484A - A kind of terahertz wave band Meta Materials wave absorbing device - Google Patents
A kind of terahertz wave band Meta Materials wave absorbing device Download PDFInfo
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- CN109494484A CN109494484A CN201811402228.8A CN201811402228A CN109494484A CN 109494484 A CN109494484 A CN 109494484A CN 201811402228 A CN201811402228 A CN 201811402228A CN 109494484 A CN109494484 A CN 109494484A
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- absorbing device
- dielectric layer
- meta materials
- wave absorbing
- substrate
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- 239000000463 material Substances 0.000 title claims description 39
- 229910052751 metal Inorganic materials 0.000 claims abstract description 26
- 239000002184 metal Substances 0.000 claims abstract description 26
- 239000000758 substrate Substances 0.000 claims abstract description 21
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 7
- 239000010931 gold Substances 0.000 claims description 7
- 229910052737 gold Inorganic materials 0.000 claims description 7
- 239000010949 copper Substances 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- 239000004411 aluminium Substances 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 239000004332 silver Substances 0.000 claims description 4
- 229910052709 silver Inorganic materials 0.000 claims description 4
- 235000007164 Oryza sativa Nutrition 0.000 claims description 3
- 239000004642 Polyimide Substances 0.000 claims description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 230000008033 biological extinction Effects 0.000 claims description 3
- 229920001721 polyimide Polymers 0.000 claims description 3
- 235000009566 rice Nutrition 0.000 claims description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims description 2
- 239000007769 metal material Substances 0.000 claims description 2
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 240000007594 Oryza sativa Species 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000010521 absorption reaction Methods 0.000 abstract description 13
- 239000006096 absorbing agent Substances 0.000 abstract description 3
- 230000009102 absorption Effects 0.000 description 12
- 238000010586 diagram Methods 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000004088 simulation Methods 0.000 description 3
- 241000209094 Oryza Species 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical compound [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000005616 pyroelectricity Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q15/00—Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
- H01Q15/0006—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
- H01Q15/0086—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices having materials with a synthesized negative refractive index, e.g. metamaterials or left-handed materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q17/00—Devices for absorbing waves radiated from an antenna; Combinations of such devices with active antenna elements or systems
Landscapes
- Aerials With Secondary Devices (AREA)
Abstract
本发明提供了一种太赫兹波段超材料吸波器，包括沿平面连续设置的多个吸波单元，所述每个吸波单元包括基底、位于基底正上方的金属层、位于金属层正上方的介质层和位于介质层正上方的“II”形结构，“II”形结构水平贴附于介质层表面；所述基底、金属层、介质层的横剖面均为矩形，“II”形结构的臂平行于矩形的其中一条边；所述基底的几何中心、金属层的几何中心、介质层的几何中心和“II”形结构的几何中心在一条直线上。本发明提供的超材料吸波器具有吸收频点多、结构简单、厚度薄、易于制备。
The present invention provides a terahertz band metamaterial wave absorber, comprising a plurality of wave absorbing units continuously arranged along a plane, each wave absorbing unit comprising a substrate, a metal layer directly above the substrate, and a layer directly above the metal layer. The dielectric layer and the "II"-shaped structure directly above the dielectric layer, the "II"-shaped structure is horizontally attached to the surface of the dielectric layer; the cross-sections of the substrate, the metal layer, and the dielectric layer are all rectangular, and the "II"-shaped structure The arms of the are parallel to one of the sides of the rectangle; the geometric center of the substrate, the geometric center of the metal layer, the geometric center of the dielectric layer and the geometric center of the "II"-shaped structure are on a straight line. The metamaterial wave absorber provided by the invention has many absorption frequency points, simple structure, thin thickness and easy preparation.
Description
Technical field
The present invention relates to Terahertz Technology fields, and in particular to a kind of multiband Meta Materials wave absorbing device.
Background technique
In recent years, THz wave generating source and THz wave detection are acknowledged as restricting Terahertz Technology develops two greatly
Critical issue.And the absorption of THz wave and energy capture are basis and the THz wave calibration, tune for realizing Terahertz detection
The key problem of control, conversion and application.Relative to pyroelectricity material and quantum well structure, inhaled using the Terahertz of Meta Materials building
Wave device has the comprehensive advantages such as efficient absorption, highly integrated, flexible design, working and room temperature.Meta Materials are one kind by sub-wavelength people
Work order member arranges constituted artificial electromagnetic material according to certain rule.Since the size of artificial unit is much smaller than operation wavelength,
It therefore is a kind of uniform material of performance for operation wavelength.The advantages of Meta Materials is can be artificial single by adjusting
The structure and size and distribution form of member carry out the electromagnetic attributes of any control material, so that a variety of novel characteristics are obtained, such as negative folding
Penetrate rate, super lens, perfect absorption etc..The wherein perfect wave absorbing device based on Meta Materials, to incidence in a certain frequency point or frequency range
Electromagnetic wave is neither reflected nor is transmitted, and achievees the effect that fully absorb.
Currently, a variety of Meta Materials wave absorbing device structures have been proposed in researcher, but they also face several drawbacks:
One, structural unit bulky dimensions are unfavorable for the miniaturization and integrated development of device；Two, multilayered structure building wave absorbing device can be big
The difficulty and accuracy for increasing device fabrication greatly, are unfavorable for the commercialized development of device；Three, the design master of multiband absorber
It is related to one, two and three frequency band, is seldom related to the research of more multiband wave absorbing device.These problems will seriously restrict super
The development and practical application of material wave absorbing device part.
Summary of the invention
The purpose of the invention is to provide a kind of Meta Materials suction wave with multiple frequency bands for working in terahertz wave band
Device.
The object of the present invention is achieved like this: the Meta Materials wave absorbing device includes the multiple suction wave lists being continuously arranged along plane
Member, it is described it is each inhale wave unit include substrate (1), be located at substrate (1) right above metal layer (2), be located at metal layer (2) just on
Side dielectric layer (3) and be located at dielectric layer (3) right aboveShape structure (4),Shape structure (4) level is attached at Jie
Matter layer (3) surface；The substrate (1), metal layer (2), dielectric layer (3) cross section be rectangle,Shape structure (4)
Arm is parallel to the wherein a line of rectangle；Geometric center, the geometric center of metal layer (2), dielectric layer (3) of the substrate (1)
Geometric center andThe geometric center of shape structure (4) is point-blank.
Preferably, metal layer (2) andShape structure (4) is made of one of gold, silver, copper or aluminium metal material.
Preferably, the thickness d h2 of metal layer (2) is 0.2~1 micron.
Preferably, the material of dielectric layer (3) is polyimides, refractive index 1.8, extinction coefficient 0.06.
Preferably, the thickness t of dielectric layer (3) is 8~16 microns.
Preferably,The thickness d hl of shape structure (4) is 0.2~1 micron.
Preferably,The length L1 of shape structure (4) be 65~75 microns, L2 be 34~54 microns, width W be 6~
15 microns, spacing g is 14~27 microns.
Preferably, substrate (1) is one of High Resistivity Si, GaAs or quartz crystal, thickness d is 50~1000 micro-
Rice plays a part of to support Meta Materials wave absorbing device.
Preferably, a side length px of the cross section rectangle of substrate (1), metal layer (2), dielectric layer (3) is 80~90
Micron, another side length py are 75~85 microns.
Compared with prior art, the present invention its remarkable advantage are as follows:
1. the top layer of Meta Materials wave absorbing device usesShape metal strip, structure is simple, compact, it is easy to accomplish；
2. Meta Materials wave absorbing device proposed by the present invention can realize four absorptions in the frequency range of 0.5~3.8THz
Peak, and all with the absorptivity of almost Perfect；
3. Meta Materials wave absorbing device structure material therefor proposed by the present invention is all conventional material, it is easy to accomplish.
Detailed description of the invention
Fig. 1: three dimensional structure diagram of the invention.
Fig. 2: Fig. 1 main view.
Fig. 3: Fig. 1 bottom view.
Fig. 4: the reflectance map that Meta Materials wave absorbing device of the present invention is emulated using FDTD solutions.
Fig. 5: the normal incident absorption coefficient simulation result diagram of Meta Materials wave absorbing device of the present invention.
Fig. 6: the Meta Materials wave absorbing device of the present invention normal incident absorption coefficient in the lossy and lossless situation of dielectric layer respectively
Simulation result diagram.
Specific embodiment
Present invention is further described in detail with specific embodiment with reference to the accompanying drawing.
As shown in Figure 1, 2, 3, multiband Meta Materials wave absorbing device proposed by the present invention, each suction wave unit includes substrate
(1), it is located at the metal layer (2) right above substrate (1), the dielectric layer (3) being located at right above metal layer (2) and is located at dielectric layer
(3) right aboveShape structure (4),Shape structure (4) level is attached at dielectric layer (3) surface；The substrate (1), gold
Belong to layer (2), dielectric layer (3) cross section be rectangle,The arm of shape structure (4) is parallel to the wherein a line of rectangle；Institute
State the geometric center of substrate (1), the geometric center of metal layer (2), the geometric center of dielectric layer (3) andShape structure (4)
Geometric center is point-blank.
When multiple suction wave units are continuously arranged along plane, substrate (1), metal layer (2), dielectric layer (3) are linked together,
AndIt is then mutually isolated between shape structure (4), so that each suction wave unit is worked independently.
The dielectric layer (3) is lossy polyimides, refractive index 1.8, extinction coefficient 0.06.
The metal layer (2) andShape structure (4) is the same as using one of gold, silver, copper or aluminium, conductivity difference
Are as follows: σGold=4.1 × 107S/m、σSilver=6.1 × 107S/m、σCopper=5.8 × 107S/m and σAluminium=3.8 × 107S/m。
As embodiment, each each dimensional parameters of four-layer structure for inhaling wave unit are as follows: px=85 microns of lattice period, py
=80 microns；The length L1 of shape structure (4) is 71 microns, and L2 is 49 microns, and width W is 9 microns, and spacing g is 27 micro-
Rice；T=13 microns of the thickness of dielectric layer (3)；Metal layer (2) andShape structure (4) is same to use copper product, and thickness is all
0.5 micron.
The absorptivity of five frequency band Meta Materials wave absorbing devices described in the present embodiment is defined as A=1-R-T, and R is reflectivity in formula,
T is transmissivity.In order to maximize absorptivity, it is desirable that small as far as possible in entire frequency range internal reflection rate and transmissivity.This
The metal layer (2) of the suction wave unit of invention design is all-metal film, and electromagnetic wave cannot transmit, and transmissivity levels off to zero, therefore inhales
Yield calculation formula can be reduced to A=1-R.
Fig. 4 is the reflectance curve figure emulated using simulation software FDTD Solutions to the present invention.
Fig. 5 is the normal incident absorption coefficient curve of the invention by reflectance curve calculating and plotting.It can from figure
It arrives, there are four apparent absorption peaks in 0.5~3.8THz.This four absorption peaks in 0.88THz, 2.07THz, 2.79THz and
Absorptivity at 3.49THz is respectively 98.59%, 99.94%, 97.71% and 99.78%, and average absorption ratio is up to
99.01%.This illustrates that wave absorbing device proposed by the present invention has reached the absorption of almost Perfect on four frequency points.
Fig. 6 is the Meta Materials wave absorbing device of the present invention normal incident absorption coefficient in the lossy and lossless situation of dielectric layer respectively
Simulation result diagram.As can be seen from the figure when dielectric layer is lossy, the absorptivity of each Frequency point, which is apparently higher than, to be made
With loss-free, to reflect energy that wave absorbing device is absorbed mainly based on dielectric loss, supplemented by the ohmic loss of metal.
The present invention has been explained by the above embodiments, but it is to be understood that, above-described embodiment is only for
Citing and explanation, and be not intended to limit the invention within the scope of described embodiment.Furthermore those skilled in the art can
With understanding, the present invention is not limited to the above embodiments, and introduction according to the present invention can also make more kinds of modifications
And modification, all fall within the scope of the claimed invention for these variants and modifications.Protection scope of the present invention is by attached
Claims and its equivalent scope defined.
Claims (9)
1. a kind of terahertz wave band Meta Materials wave absorbing device, it is characterised in that: the Meta Materials wave absorbing device, including continuously set along plane
The multiple suction wave units set, each wave unit of inhaling include substrate (1), the metal layer (2) being located at right above substrate (1), are located at gold
" II " the shape structure (4) for belonging to the dielectric layer (3) right above layer (2) and being located at right above dielectric layer (3), " II " shape structure (4) water
It is smooth to invest dielectric layer (3) surface；The substrate (1), metal layer (2), dielectric layer (3) cross section be rectangle, " II " shape
The arm of structure (4) is parallel to the wherein a line of rectangle；The geometric center of the substrate (1), the geometric center of metal layer (2),
The geometric center of the geometric center of dielectric layer (3) and " II " shape structure (4) is point-blank.
2. a kind of terahertz wave band Meta Materials wave absorbing device according to claim 1, it is characterised in that: the metal layer (2)
" II " shape structure (4) is made of one of gold, silver, copper or aluminium metal material.
3. a kind of terahertz wave band Meta Materials wave absorbing device according to claim 1, it is characterised in that: the metal layer (2)
Thickness d h2 be 0.2~1 micron.
4. a kind of terahertz wave band Meta Materials wave absorbing device according to claim 1, it is characterised in that: the dielectric layer (3)
Material be polyimides, refractive index 1.8, extinction coefficient 0.06.
5. a kind of terahertz wave band Meta Materials wave absorbing device according to claim 1, it is characterised in that: the dielectric layer (3)
Thickness t be 8~16 microns.
6. a kind of terahertz wave band Meta Materials wave absorbing device according to claim 1, it is characterised in that: " II " the shape structure
(4) thickness d h1 is 0.2~1 micron.
7. a kind of terahertz wave band Meta Materials wave absorbing device according to claim 1, it is characterised in that: " II " the shape structure
(4) length L1 is 65~75 microns, and L2 is 34~54 microns, and width W is 6~15 microns, and spacing g is 14~27 microns.
8. a kind of terahertz wave band Meta Materials wave absorbing device according to claim 1, it is characterised in that: the substrate (1) is
One of High Resistivity Si, GaAs or quartz crystal, thickness d are 50~1000 microns.
9. a kind of terahertz wave band Meta Materials wave absorbing device according to claim 1, it is characterised in that: the substrate (1), gold
Belong to layer (2), a side length px of cross section rectangle for dielectric layer (3) is 80~90 microns, another side length py is 75~85 micro-
Rice.
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| CN201811402228.8A CN109494484A (en) | 2018-11-17 | 2018-11-17 | A kind of terahertz wave band Meta Materials wave absorbing device |
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| CN201811402228.8A CN109494484A (en) | 2018-11-17 | 2018-11-17 | A kind of terahertz wave band Meta Materials wave absorbing device |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109888488A (en) * | 2019-04-04 | 2019-06-14 | 电子科技大学 | Low-profile and low-scattering ultra-broadband phased array based on polarization selective absorber loading |
| CN111308588A (en) * | 2020-03-23 | 2020-06-19 | 中北大学 | A multi-band perfect absorber based on surface plasmon |
| CN113258294A (en) * | 2021-05-13 | 2021-08-13 | 齐齐哈尔大学 | Single-layer broadband amplitude coding super surface for full-space holographic imaging |
| CN113258299A (en) * | 2021-05-13 | 2021-08-13 | 齐齐哈尔大学 | Single layer encoded super surface for full space electromagnetic holographic imaging |
| CN113571919A (en) * | 2021-07-07 | 2021-10-29 | 佛山(华南)新材料研究院 | A kind of wave absorbing device and preparation method thereof |
| CN114465011A (en) * | 2022-02-10 | 2022-05-10 | 江西省科学院应用物理研究所 | Flexible terahertz metamaterial absorber insensitive to multi-band polarization |
-
2018
- 2018-11-17 CN CN201811402228.8A patent/CN109494484A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109888488A (en) * | 2019-04-04 | 2019-06-14 | 电子科技大学 | Low-profile and low-scattering ultra-broadband phased array based on polarization selective absorber loading |
| CN111308588A (en) * | 2020-03-23 | 2020-06-19 | 中北大学 | A multi-band perfect absorber based on surface plasmon |
| CN113258294A (en) * | 2021-05-13 | 2021-08-13 | 齐齐哈尔大学 | Single-layer broadband amplitude coding super surface for full-space holographic imaging |
| CN113258299A (en) * | 2021-05-13 | 2021-08-13 | 齐齐哈尔大学 | Single layer encoded super surface for full space electromagnetic holographic imaging |
| CN113258294B (en) * | 2021-05-13 | 2024-05-14 | 齐齐哈尔大学 | Single-layer broadband amplitude coding super-surface for full-space holographic imaging |
| CN113258299B (en) * | 2021-05-13 | 2024-05-14 | 齐齐哈尔大学 | Single layer coded super surface for full space electromagnetic holographic imaging |
| CN113571919A (en) * | 2021-07-07 | 2021-10-29 | 佛山(华南)新材料研究院 | A kind of wave absorbing device and preparation method thereof |
| CN113571919B (en) * | 2021-07-07 | 2023-06-16 | 佛山(华南)新材料研究院 | Wave absorbing device and preparation method thereof |
| CN114465011A (en) * | 2022-02-10 | 2022-05-10 | 江西省科学院应用物理研究所 | Flexible terahertz metamaterial absorber insensitive to multi-band polarization |
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Application publication date: 20190319 |