CN105549133A - Near-infrared omnidirectional absorber based on hyperbolic specific material micro-cavity - Google Patents
Near-infrared omnidirectional absorber based on hyperbolic specific material micro-cavity Download PDFInfo
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- CN105549133A CN105549133A CN201510906521.8A CN201510906521A CN105549133A CN 105549133 A CN105549133 A CN 105549133A CN 201510906521 A CN201510906521 A CN 201510906521A CN 105549133 A CN105549133 A CN 105549133A
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- near infrared
- tin oxide
- indium tin
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/003—Light absorbing elements
Abstract
The invention relates to a near-infrared omnidirectional absorber based on a hyperbolic specific material micro-cavity, and the absorber comprises a metal substrate. The metal substrate is provided with thin silicon films and indium tin oxide films in a periodically stacked manner, wherein the uppermost indium tin oxide film is provided with thick silicon films and silicon nitride films in a periodically stacked manner. Compared with the prior art, the indium tin oxide films and the thin silicon films at a sub-wavelength scale are used for forming an equivalent hyperbolic specific material, and the hyperbolic specific material serves as a Fabry-Perot cavity. Through the abnormal wave vector dispersion of the hyperbolic specific material, the absorber carries out the compensation of the normal dispersion of a Bragg reflector, and achieves the near-infrared omnidirectional absorption with the property of polarization selection. The absorptivity of the absorber can reach 95% or more under the incidence condition of a 60-degree slant angle. The absorber can be used in the chemical and bio-sensing fields.
Description
Technical field
The present invention relates to a kind of near infrared omnidirectional absorber, especially relate to a kind of near infrared omnidirectional absorber based on hyperbolic metamaterials microcavity.
Background technology
In near-infrared band field, people need to utilize near infrared absorption device to carry out chemistry and biological detection, and therefore near infrared absorption device is widely used.Its principle of work is that biomolecule or chemical molecular have stronger resonance absorbing peak at near-infrared band, when sample is subject to frequency continually varying Infrared irradiation, the molecule absorption radiation of some frequency, thus cause the change of absorption spectra, therefore at biomolecular spectroscopy and chemical spectrum, there is a lot of application, as air pollution monitoring, gas " fingerprint " detect and analyze mankind's respiratory disorder mark.In prior art, various optics cavity is applied in the middle of absorber, comprising Fabry Perot chamber, and Echo Wall chamber etc.But common near infrared absorption device is angle dependency, absorption frequency corresponding to different angles is different.This makes traditional biological detection angular spectrum scope very narrow, greatly limit its range of application.
The nanometer bulletin of the nearest U.S. is published the sub-wavelength near infrared absorption device be made up of the array of metal nano disk and metallic substrates.There is the surface plasmon mode of local near infrared in metal nano array of discs, utilizes the Fabry Perot chamber between metallic substrates and metal nano array of discs, can strengthen this phasmon effect, thus the perfection realizing omnidirectional absorbs.But it is three-dimensional structure that this absorber has a shortcoming to be exactly it, therefore processed complex, meticulously must prepares, have quite high requirement to litho machine, this absorbs application in the near infrared omnidirectional increasingly developed very large restriction.
Summary of the invention
Object of the present invention be exactly in order to overcome above-mentioned prior art exist defect and a kind of near infrared omnidirectional absorber based on hyperbolic metamaterials microcavity is provided, the present invention utilizes simple coating technique can realize the Polarization selection of near infrared omnidirectional absorber.
Object of the present invention can be achieved through the following technical solutions:
A kind of near infrared omnidirectional absorber based on hyperbolic metamaterials microcavity, comprise metallic substrates, be provided with thin silicon film and the indium tin oxide films of cycle stacked setting on the metallic substrate, the superiors' indium tin oxide films is provided with thick silicon thin film and the silicon nitride film of cycle stacked setting.
It is stacked that described thin silicon film and indium tin oxide films have 5 cycles.Described indium tin oxide films is a kind of transparent conductive film, a kind of phasmon material at near-infrared band, there is metalloid characteristic, for forming equivalent hyperbolic metamaterials microcavity with thin silicon film, phase compensation is realized with Bragg mirror, thus realize dispersionless Fabry Perot chamber, the local microcavity pattern of wide-angle can be excited.
It is stacked that described thick silicon thin film and silicon nitride film have 4 cycles.
Described thick silicon thin film and the silicon nitride film cycle stacked rear as Bragg mirror, provide Bragg reflection at near-infrared band.
The refractive index of described thin silicon film is 3.48, and thickness is 25 nanometers.
Described indium tin oxide films is a kind of transparent conductive film, and thickness is 25 nanometers.
The refractive index of described thick silicon thin film is 3.48, and thickness is 112 nanometers.
The refractive index of described silicon nitride film is 2.0, and thickness is 232 nanometers.
Described metallic substrates is silver, uses as absorption layer.
The present invention utilizes the indium tin oxide films of sub-wavelength dimensions and thin silicon film to form the hyperbolic metamaterials of equivalence, and with this hyperbolic metamaterials as Fabry Perot chamber, utilize the normal dispersion of unusual wave vector dispersion to Bragg mirror of hyperbolic metamaterials to compensate, realize the near infrared omnidirectional with Polarization selection characteristic and absorb.Under the incident condition in 60 ° of pitch angle, absorptivity still can reach more than 95%.The present invention can be applicable to chemistry and bio-sensing field.
Compared with prior art, the present invention has following effect and advantage:
1, because the present invention is a kind of multi-layer film structure, belong to one-dimentional structure, utilize the coating technique of current maturation to realize, experiment preparation is simple, not high to requirement for experiment condition.
2, because the present invention utilizes the normal dispersion of unusual wave vector dispersion to Bragg mirror of hyperbolic metamaterials to compensate, omnidirectional can be realized absorb, and this mechanism could can only realize originally in two dimension even three-dimensional structure, cannot realize in one-dimentional structure.
3, owing to make use of hyperbolic metamaterials in the present invention, be therefore Polarization selection.
Accompanying drawing explanation
Fig. 1 is structure side view of the present invention;
Fig. 2 is the change of near infrared omnidirectional of the present invention absorber absorption spectra with angle.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is described in detail.
Embodiment
As shown in Figure 1, a kind of near infrared omnidirectional absorber based on hyperbolic metamaterials microcavity, comprise metallic substrates 1, metallic substrates 1 is provided with thin silicon film 2 and the indium tin oxide films 3 of cycle stacked setting, the superiors' indium tin oxide films 3 is provided with thick silicon thin film 4 and the silicon nitride film 5 of cycle stacked setting.
Wherein, to have 5 cycles stacked for thin silicon film 2 and indium tin oxide films 3.Indium tin oxide films 3 is a kind of transparent conductive films, thickness is 25 nanometers, a kind of phasmon material at near-infrared band, there is metalloid characteristic, for forming equivalent hyperbolic metamaterials microcavity with thin silicon film 2, realize phase compensation with Bragg mirror, thus realize dispersionless Fabry Perot chamber, the local microcavity pattern of wide-angle can be excited.The refractive index of thin silicon film 2 is 3.48, and thickness is 25 nanometers.It is stacked that thick silicon thin film 4 and silicon nitride film 5 have 4 cycles, as Bragg mirror, provides Bragg reflection at near-infrared band.The refractive index of thick silicon thin film 4 is 3.48, and thickness is 112 nanometers.The refractive index of silicon nitride film 5 is 2.0, and thickness is 232 nanometers.Metallic substrates 1 is silver, uses as absorption layer.
The indium tin oxide films of sub-wavelength dimensions and thin silicon film is utilized to form the hyperbolic metamaterials of equivalence, and with this hyperbolic metamaterials as Fabry Perot chamber, utilize the normal dispersion of unusual wave vector dispersion to Bragg mirror of hyperbolic metamaterials to compensate, realize the near infrared omnidirectional with Polarization selection characteristic and absorb.Because hyperbolic metamaterials only has response to TM polarized wave, therefore this absorber can realize the absorption of the wide-angle of Polarization selection, near infrared omnidirectional of the present invention absorber absorption spectra with angle change as shown in Figure 2, under the incident condition in 60 ° of pitch angle, absorptivity still can reach more than 95%.Near infrared omnidirectional of the present invention absorber can be applicable to chemistry and bio-sensing field.
Above-mentioned is can understand and use invention for ease of those skilled in the art to the description of embodiment.Person skilled in the art obviously easily can make various amendment to these embodiments, and General Principle described herein is applied in other embodiments and need not through performing creative labour.Therefore, the invention is not restricted to above-described embodiment, those skilled in the art, according to announcement of the present invention, do not depart from improvement that scope makes and amendment all should within protection scope of the present invention.
Claims (9)
1. the near infrared omnidirectional absorber based on hyperbolic metamaterials microcavity, it is characterized in that, this absorber comprises metallic substrates, be provided with thin silicon film and the indium tin oxide films of cycle stacked setting on the metallic substrate, the superiors' indium tin oxide films is provided with thick silicon thin film and the silicon nitride film of cycle stacked setting.
2. a kind of near infrared omnidirectional absorber based on hyperbolic metamaterials microcavity according to claim 1, it is characterized in that, it is stacked that described thin silicon film and indium tin oxide films have 5 cycles.
3. a kind of near infrared omnidirectional absorber based on hyperbolic metamaterials microcavity according to claim 1, it is characterized in that, it is stacked that described thick silicon thin film and silicon nitride film have 4 cycles.
4. a kind of near infrared omnidirectional absorber based on hyperbolic metamaterials microcavity according to claim 1, is characterized in that, described thick silicon thin film and the silicon nitride film cycle stacked rear as Bragg mirror.
5. a kind of near infrared omnidirectional absorber based on hyperbolic metamaterials microcavity according to claim 1, it is characterized in that, the refractive index of described thin silicon film is 3.48, and thickness is 25 nanometers.
6. a kind of near infrared omnidirectional absorber based on hyperbolic metamaterials microcavity according to claim 1, it is characterized in that, described indium tin oxide films is a kind of transparent conductive film, and thickness is 25 nanometers.
7. a kind of near infrared omnidirectional absorber based on hyperbolic metamaterials microcavity according to claim 1, it is characterized in that, the refractive index of described thick silicon thin film is 3.48, and thickness is 112 nanometers.
8. a kind of near infrared omnidirectional absorber based on hyperbolic metamaterials microcavity according to claim 1, it is characterized in that, the refractive index of described silicon nitride film is 2.0, and thickness is 232 nanometers.
9. a kind of near infrared omnidirectional absorber based on hyperbolic metamaterials microcavity according to claim 1, is characterized in that, described metallic substrates is silver, uses as absorption layer.
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| CN106405972A (en) * | 2016-10-28 | 2017-02-15 | 同济大学 | Magnetic control frequency modulation far-infrared optical switch and implementation method thereof |
| CN109521504A (en) * | 2017-09-20 | 2019-03-26 | 苏州大学 | A kind of THz wave absorbing structure |
| WO2019206188A1 (en) * | 2018-04-24 | 2019-10-31 | Hong Kong Baptist University | Sapphire coated substrate with a flexible, anti-scratch and multi-layer coating |
| US11713503B2 (en) | 2011-12-23 | 2023-08-01 | Hong Kong Baptist University | Sapphire coated substrate with a flexible, anti-scratch and multi-layer coating |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11713503B2 (en) | 2011-12-23 | 2023-08-01 | Hong Kong Baptist University | Sapphire coated substrate with a flexible, anti-scratch and multi-layer coating |
| CN106405972A (en) * | 2016-10-28 | 2017-02-15 | 同济大学 | Magnetic control frequency modulation far-infrared optical switch and implementation method thereof |
| CN106405972B (en) * | 2016-10-28 | 2019-02-01 | 同济大学 | A kind of magnetic control Frequency Adjustable far red light switch and its implementation |
| CN109521504A (en) * | 2017-09-20 | 2019-03-26 | 苏州大学 | A kind of THz wave absorbing structure |
| CN109521504B (en) * | 2017-09-20 | 2021-02-05 | 苏州大学 | Terahertz wave absorption structure |
| WO2019206188A1 (en) * | 2018-04-24 | 2019-10-31 | Hong Kong Baptist University | Sapphire coated substrate with a flexible, anti-scratch and multi-layer coating |
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