CN207937356U - A kind of Terahertz Meta Materials sensor - Google Patents
A kind of Terahertz Meta Materials sensor Download PDFInfo
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- CN207937356U CN207937356U CN201820356929.1U CN201820356929U CN207937356U CN 207937356 U CN207937356 U CN 207937356U CN 201820356929 U CN201820356929 U CN 201820356929U CN 207937356 U CN207937356 U CN 207937356U
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- metal wire
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Abstract
The utility model discloses a kind of Terahertz Meta Materials sensors, including substrate and process the artificial micro-structure array in substrate surface, the artificial micro-structure includes the first metal wire and the second metal wire in parallel relation, and between the first metal wire and the second metal wire, and the third metal wire vertical with the first metal wire and the second metal wire.First and second metal wire couples to form destructive interference to transparent to incidence wave presentation with the generation of third metal wire, so that sensor has good transmission performance and quality factor (Q values), there are good refractive index sensitivity and sensing capabilities simultaneously, meet refractive index sensing application requirement.
Description
Technical field
The utility model is related to index sensor, especially a kind of Terahertz Meta Materials sensor.
Background technology
THz wave refers to electromagnetic wave of the frequency range in 0.1~10THz, in electromagnetic spectrum be located at microwave and it is infrared it
Between, the transitional region of photonic propulsion is acquired in electronics.The photon energy of terahertz emission is very low, will not generate damage to measured matter
Wound can carry out lossless detection, while Terahertz is also widely used for the fields such as imaging, sensing and fingerprint resolution.Effectively too
The research that the shortage of hertz source and detector results in Terahertz Technology to be fallen behind more relative to its all band, limits terahertz
The hereby further development of technology.
Meta Materials are a kind of artificial composite structures with the extraordinary physical property not available for natural material, usually by more
Artificial cellular construction of the kind with sub-wavelength dimensions is composed, and super material can be adjusted by artificial adjustment unit structure snd size
The dielectric constant and magnetic conductivity of material.Compared with common material, Meta Materials have a series of antipodal electromagnetic properties, such as negative folding
Penetrate rate, negative magnetoconductivity, negative permittivity, backward wave property, reversed Doppler effect etc..Meta Materials provide for design of material field
A kind of completely new thinking can make researcher control and manipulate to a certain extent the transmission of light wave, electromagnetic wave and sound wave.Super material
Completely new physical phenomenon may be implemented in the great innovation for expecting design philosophy, generates the new skill with great dual-use value
Art, new material promote and lead novel industry development.
Utility model content
Based on the deficiency of existing Terahertz sensing arrangement, the utility model provides a kind of simple in structure, refractive index sensitivity
High, the Terahertz Meta Materials sensor with good transmission performance and sensing capabilities.
The technical solution adopted in the utility model is as follows：
As a kind of Terahertz Meta Materials sensor, one embodiment of the utility model includes substrate and processes in substrate
The artificial micro-structure array on surface, the artificial micro-structure include the first metal wire and the second metal wire in parallel relation, with
And between the first metal wire and the second metal wire, and the third metal wire vertical with the first metal wire and the second metal wire.
Preferably, the length of first metal wire and second metal wire be less than incident electromagnetic wave wavelength three/
One.
Preferably, the length of first metal wire and second metal wire isλ is incident electromagnetic wave
Wavelength.
Preferably, first metal wire is identical with the size of second metal wire.
Preferably, the both ends of first metal wire and second metal wire are aligned respectively.
Preferably, there is spacing between third metal wire both ends and the first metal wire and the second metal wire.
Preferably, third metal wire both ends between the first metal wire or the second metal wire that close at a distance from beW is the width of the first metal wire or the second metal wire.
Preferably, third metal wire both ends between the first metal wire or the second metal wire that close at a distance from it is equal.
The achievable positive advantageous effects of the utility model include：Meta Materials resonant element be unsymmetric structure, three
When the relative position of metal line and size difference, the topology of artificial micro-structure is changed, the first and second metal wire
It couples to form destructive interference to transparent to incidence wave presentation with the generation of third metal wire so that sensor has good transmission
Performance and quality factor (Q values), while there are good refractive index sensitivity and sensing capabilities, meet refractive index sensing application
It is required that；Terahertz Meta Materials sensor structure is simple, and production cost is low, is conducive to the further development of Terahertz Technology.
Other aspects and advantage of the utility model become apparent according to detailed description below in conjunction with the accompanying drawings, described
The principles of the present invention are illustrated by way of example in attached drawing.
Description of the drawings
Fig. 1 is the Terahertz Meta Materials sensor structure schematic diagram that the utility model embodiment provides；
Fig. 2 is the artificial micro-structure structural representation vertical view that the utility model embodiment provides；
Fig. 3 is under the different S parameters (third metal wire deviates the distance of center) that the utility model embodiment provides
The relational graph of transmissivity and quality factor q；
Fig. 4 is transmissivity, reflectivity and the absorbance curves under the resonant frequency that the utility model embodiment provides,
Wherein, 10- metamaterial sheets, 12- Meta Materials resonant element, 14- artificial micro-structures, 16- substrates, the first gold medals of 142-
Belong to line, the second metal wires of 146-, 144- third metal wires.
Specific implementation mode
Below in conjunction with the accompanying drawings, the utility model is described in detail.
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation
Example, the present invention will be further described in detail.It should be appreciated that specific embodiment described herein is only used to explain
The utility model is not used to limit the utility model.
Fig. 1 is the Terahertz Meta Materials sensor structure schematic diagram that the utility model embodiment provides, as shown in Figure 1, passing
Sensor includes the substrate composition of the artificial micro-structure array of substrate and processing in substrate surface, each artificial micro-structure and its attachment
Meta Materials resonant element.Fig. 2 is the artificial micro-structure structural representation vertical view that the utility model embodiment provides, as shown in Fig. 2,
Artificial micro-structure includes the first metal wire and the second metal wire in parallel relation, and is located at the first metal wire and the second metal
Between line, and the third metal wire vertical with the first metal wire and the second metal wire.Meta Materials resonant element array arrangement forms
Metamaterial sheet, metamaterial sheet generate continuous response to incident electromagnetic wave.
The length of first metal wire and the second metal wire is less than the one third of incident electromagnetic wave wavelength, optimally, first
The length of metal wire and the second metal wire isλ is incident electromagnetic wave wavelength.The size of two metal wires is identical, i.e., and
The length of one metal wire and the second metal wire, width and thickness are identical, and the both ends of two metal wires are aligned respectively.
Third metal wire is between the first metal wire and the second metal wire, both ends and the first metal wire for closing on or the
There are spacing, distance between two metal wires isW is the width of the first metal wire or the second metal wire, third metal
Line both ends between the first metal wire or the second metal wire that close at a distance from it is equal.
Meta Materials resonant element is unsymmetric structure, and third metal wire can be moved along the first and second metal wire direction.Pass through tune
The relative position relation and size for saving three metal lines, are changed the topology of artificial micro-structure so that first and second
The generation of metal wire and third metal wire, which couple, to form destructive interference and transparent to incidence wave presentation, to make the super material of the Terahertz
Expect that sensor has good transmission performance and quality factor (Q values), while there is good refractive index sensitivity and sensing
Performance meets refractive index sensing application requirement.
Material used by metal wire can be one or more of silver, copper, gold, aluminium, and metal wire section can be arbitrary
Shape.The used material of substrate is organic glass or polyimides, can be attached to artificial micro-structure by certain processing technology
On substrate, for example, laser writing technology, inkjet printing technology, laser transfer technology etc..
As embodiment, the first and second wire lengths of artificial micro-structure are 120 μm, and the length of third metal wire is 130
μm, the width and thickness of metal wire is respectively 20 μm and 0.3 μm, and third metal wire both ends are away from the first metal wire closed on or second
Metal wire is 10 μm apart from size, and (central point of the first metal wire and the second metal wire connects third metal wire disalignment
Line) distance be 15 μm.Transmissivity, reflectivity and absorbance curves under simulation result resonant frequency as shown in Figure 4, when
When the distance of three metal wire disalignments is 15 μm, Meta Materials resonant element is in asymmetric state, goes out near 0.73THz
Class EIT transmission peaks are showed, transmissivity 0.71 reflects that the resonator has good transmission performance.Reflectivity is 0.16, can
Find out that the radiation near 0.73THz is weaker.Absorptivity is only 0.05 simultaneously, and by calculating, the structure is at 0.73THz frequencies
Produce the transparent window that three dB bandwidth is 27GHz.The transmissivity of Terahertz Meta Materials sensor with this kind of artificial micro-structure
And its quality factor (Q values) with S parameter (distance of third metal wire disalignment) variation as shown in figure 3, when third gold
When the distance for belonging to line disalignment is 15 μm, transmissivity 0.71, corresponding quality factor q is 27.03.
The different aspect, embodiment, embodiment or feature of the utility model can be used alone or be used in any combination.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
All any modification, equivalent and improvement etc., should be included in the utility model made by within the spirit and principle of utility model
Protection domain within.
Claims (8)
1. a kind of Terahertz Meta Materials sensor, it is characterised in that including substrate and process the artificial micro-structure battle array in substrate surface
Row, the artificial micro-structure include the first metal wire and the second metal wire in parallel relation, and positioned at the first metal wire and
Between second metal wire, and the third metal wire vertical with the first metal wire and the second metal wire.
2. a kind of Terahertz Meta Materials sensor according to claim 1, which is characterized in that first metal wire and institute
The length for stating the second metal wire is less than the one third of incident electromagnetic wave wavelength.
3. a kind of Terahertz Meta Materials sensor according to claim 1, which is characterized in that first metal wire and institute
The length for stating the second metal wire isλ is incident electromagnetic wave wavelength.
4. a kind of Terahertz Meta Materials sensor according to claim 1, which is characterized in that first metal wire and institute
The size for stating the second metal wire is identical.
5. a kind of Terahertz Meta Materials sensor according to claim 1, which is characterized in that first metal wire and institute
The both ends for stating the second metal wire are aligned respectively.
6. a kind of Terahertz Meta Materials sensor according to claim 1, which is characterized in that third metal wire both ends
There is spacing between the first metal wire and the second metal wire.
7. a kind of Terahertz Meta Materials sensor according to claim 1, which is characterized in that third metal wire both ends
It is at a distance between the first metal wire or the second metal wire closed onW is the width of the first metal wire or the second metal wire
Degree.
8. a kind of Terahertz Meta Materials sensor according to claim 1, which is characterized in that third metal wire both ends
It is equal at a distance between the first metal wire or the second metal wire closed on.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201820356929.1U CN207937356U (en) | 2018-03-16 | 2018-03-16 | A kind of Terahertz Meta Materials sensor |
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| CN201820356929.1U CN207937356U (en) | 2018-03-16 | 2018-03-16 | A kind of Terahertz Meta Materials sensor |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109557050A (en) * | 2018-11-29 | 2019-04-02 | 重庆邮电大学 | A kind of Terahertz Meta Materials sensor of complementary type structure |
| CN110632291A (en) * | 2019-09-26 | 2019-12-31 | 中国科学院半导体研究所 | Terahertz metamaterial biosensor and preparation method and detection method thereof |
| CN113113775A (en) * | 2021-03-25 | 2021-07-13 | 重庆邮电大学 | Terahertz wave splitter applied to 6G system and based on double-line metamaterial structure |
-
2018
- 2018-03-16 CN CN201820356929.1U patent/CN207937356U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109557050A (en) * | 2018-11-29 | 2019-04-02 | 重庆邮电大学 | A kind of Terahertz Meta Materials sensor of complementary type structure |
| CN109557050B (en) * | 2018-11-29 | 2021-05-18 | 重庆邮电大学 | Terahertz metamaterial sensor with complementary structure |
| CN110632291A (en) * | 2019-09-26 | 2019-12-31 | 中国科学院半导体研究所 | Terahertz metamaterial biosensor and preparation method and detection method thereof |
| CN110632291B (en) * | 2019-09-26 | 2020-10-20 | 中国科学院半导体研究所 | Terahertz metamaterial biosensor and preparation method and detection method thereof |
| CN113113775A (en) * | 2021-03-25 | 2021-07-13 | 重庆邮电大学 | Terahertz wave splitter applied to 6G system and based on double-line metamaterial structure |
| CN113113775B (en) * | 2021-03-25 | 2024-03-19 | 重庆邮电大学 | Terahertz wave divider based on double-line metamaterial structure and applied to 6G system |
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Granted publication date: 20181002 Termination date: 20190316 |