CN109494281A - The anti-PID device of solar battery - Google Patents
The anti-PID device of solar battery Download PDFInfo
- Publication number
- CN109494281A CN109494281A CN201811468764.8A CN201811468764A CN109494281A CN 109494281 A CN109494281 A CN 109494281A CN 201811468764 A CN201811468764 A CN 201811468764A CN 109494281 A CN109494281 A CN 109494281A
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- homogenizing
- plate
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- cavity
- oxygen
- Prior art date
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 114
- 239000007789 gas Substances 0.000 claims abstract description 104
- 238000002156 mixing Methods 0.000 claims abstract description 79
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 58
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 58
- 239000001301 oxygen Substances 0.000 claims abstract description 57
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 57
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims abstract description 20
- 229910001882 dioxygen Inorganic materials 0.000 claims abstract description 18
- 238000005192 partition Methods 0.000 claims description 39
- 238000007789 sealing Methods 0.000 claims description 36
- 238000009434 installation Methods 0.000 claims description 10
- 230000001105 regulatory effect Effects 0.000 claims description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 24
- 229910052710 silicon Inorganic materials 0.000 abstract description 24
- 239000010703 silicon Substances 0.000 abstract description 24
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- VEMKTZHHVJILDY-UHFFFAOYSA-N resmethrin Chemical compound CC1(C)C(C=C(C)C)C1C(=O)OCC1=COC(CC=2C=CC=CC=2)=C1 VEMKTZHHVJILDY-UHFFFAOYSA-N 0.000 abstract description 3
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 7
- 238000009423 ventilation Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004880 explosion Methods 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- FKNQFGJONOIPTF-UHFFFAOYSA-N Sodium cation Chemical compound [Na+] FKNQFGJONOIPTF-UHFFFAOYSA-N 0.000 description 1
- 230000035508 accumulation Effects 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000002900 effect on cell Effects 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 239000008246 gaseous mixture Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000265 homogenisation Methods 0.000 description 1
- 238000001727 in vivo Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910001415 sodium ion Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
- H01L31/1868—Passivation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Photovoltaic Devices (AREA)
Abstract
It can be avoided gas the invention discloses one kind to collaborate, while can guarantee that mixed gas is evenly distributed on the anti-PID device of the solar battery around silicon chip surface.The anti-PID device of the solar battery, including nitrogen and the unidirectional mixing arrangement of oxygen, dioxygen generator, gas mixing homogenizer and tracheae;The nitrogen and the unidirectional mixing arrangement of oxygen are connected to the air inlet of dioxygen generator;The gas mixing homogenizer is connected to by tracheae with the gas outlet of dioxygen generator.Using the anti-PID device of the solar battery, refluence and the crossfire of gas can be effectively avoided;It can guarantee that mixed gas uniform fold around silicon chip surface, can be suitable for the silicon wafer of different length simultaneously;Production cost can be effectively reduced.
Description
Technical field
The present invention relates to the anti-field PID of solar battery, especially a kind of anti-PID device of solar battery.
Background technique
Well-known: the full name in English of the PID effect of solar battery is: Potential Induced
Degradation, i.e. potential induction attenuation.SunPower company, the U.S. finds for the first time and proposes PID effect, finger assembly within 2005
For a long time in high voltage operation, there are leakage currents between cover-plate glass, encapsulating material, frame, and a large amount of accumulations are in cell piece
Surface causes fill factor, short circuit current, open-circuit voltage to reduce, makes component so that the passivation effect on cell piece surface deteriorates
Design standard can be lower than, but this decaying is reversible.
Therefore solar panel needs to carry out it anti-PID processing, so that it is existing to avoid solar panel from PID occur
As;Then the existing anti-PID equipment of solar panel needs mix by oxygen and nitrogen to be produced by ozone generator
Ozone is covered on silicon chip surface by the mixed gas of ozone, oxygen and nitrogen, guarantees that silicon chip surface forms the two of high-purity compact
Silicon oxide layer, thickness are imitated probably in 10-20nm to solve potential inducing caused by the sodium ion that glass generates in battery component
It answers.
The existing anti-PID device of solar battery is easy to appear following problems:
1, the mixing arrangement of existing nitrogen and oxygen can not adjust in real time the flow of nitrogen and oxygen, while can not prevent
Oxygen and nitrogen are collaborated, while being easy to appear refluence phenomenon.
2, mixed gas is directly passed directly to silicon chip surface, so that the gas that silicon chip surface touches is uneven
It is even, to not can guarantee the silicon dioxide layer that silicon chip surface forms high-purity compact.
Summary of the invention
It can be avoided gas technical problem to be solved by the invention is to provide one kind to collaborate, while can guarantee gaseous mixture
Body is evenly distributed on the anti-PID device of the solar battery around silicon chip surface.
The technical solution adopted by the present invention to solve the technical problems is: the anti-PID device of solar battery, including nitrogen and
The unidirectional mixing arrangement of oxygen, dioxygen generator, gas mixing homogenizer and tracheae;
The nitrogen and the unidirectional mixing arrangement of oxygen are connected to the air inlet of dioxygen generator;The gas mixing is disguised
It sets and is connected to by tracheae with the gas outlet of dioxygen generator;
The nitrogen and the unidirectional mixing arrangement of oxygen include gas mixing ontology;The gas mixing ontology has both ends equal
The inner cavity of opening;
One end of the gas mixing ontology is provided with the first sealing plate, and the other end is provided with the second sealing plate;The gas
The cavity top that body hybrid ontology has is provided with first level partition, and lower part is provided with the second horizontal baffle;First water
Oxygen inlet chamber is formed between flat partition board and the top of gas mixing ontology cavity;Two horizontal baffle and gas mixing ontology
Nitrogen inlet chamber is formed between the bottom of cavity;
It is provided with the nitrogen inlet duct being connected to nitrogen inlet chamber on first sealing plate, is set on the nitrogen inlet duct
It is equipped with the first check valve and first flow regulating valve;
The gas mixing body upper surface is provided with the oxygen intake pipe being connected to oxygen inlet chamber;The oxygen air inlet
Second one-way valve and second flow regulating valve are provided on pipe;
The first air hole is provided on the first level partition;The lower surface of the first level partition is provided with along cross
To equally distributed first vertical baffle;The second ventilation mouth is provided on second horizontal baffle;Second horizontal baffle
Upper surface be provided with transversely equally distributed second vertical baffle;
The second vertical baffle on second horizontal baffle be located on first level partition adjacent two piece first vertically every
The underface in gap between plate;
Outlet nozzle is provided on second sealing plate;Air-distributing tube is connected on the outlet nozzle;The one of the air-distributing tube
End is connected to outlet nozzle, and the other end is provided with sealing plate;Air distribution plate is provided in the air-distributing tube;It is provided on the sealing plate
The escape pipe being connected to air-distributing tube;Third check valve and third flow control valve are provided on the escape pipe;
The gas mixing homogenizer includes homogenizing main casing, homogenizing region adjusting body and part flow arrangement;It is described equal
Change the inner cavity that main casing has lower openings, is provided with air inlet pipe at the top of the homogenizing main casing;Under the homogenizing main casing
Portion edge is provided with flange;
The inner cavity top of the homogenizing main casing is back taper cavity, and lower part is rectangular cavities;In the back taper cavity
It is provided at least two layers of first homogenizing plates;Every layer of first homogenizing plate includes at least two piece of first homogenizing plate, and is transversely uniformly divided
Cloth;The first homogenizing plate of adjacent two layers is alternately distributed, i.e., the gap between adjacent two piece of first homogenizing plate in upper layer is located at lower layer first
The surface of homogenizing plate;
There are at least two layers of second homogenizing plates in the rectangular cavities;Every layer of second homogenizing plate includes at least two piece second equal
Flowing plate, and be transversely uniformly distributed;The second homogenizing plate of adjacent two layers is alternately distributed, i.e., between adjacent two piece of second homogenizing plate in upper layer
Gap be located at the surface of the second homogenizing plate of lower layer;
The homogenizing region adjusts body center and is provided with installation cavity;The both ends that the homogenizing region adjusts body are all provided with
It is equipped with adjusting cavity;Snorkel is provided with above the adjusting cavity;
The homogenizing region adjusts body and is sleeved on homogenizing main casing, and the homogenizing main casing passes through installation cavity;It is described
Installation cavity is matched with the lower end for being homogenized main casing;
The end face and lower surface of the adjusting cavity have opening, and one end of the adjusting cavity is provided with side sealing plate;Institute
It states and is provided at least two layers lateral homogenizing plate in adjusting cavity;The center of the adjusting cavity is provided with lateral screw rod;
The driving motor of driving screw rod rotation is provided on the side sealing plate;It is slidably fitted in the adjusting cavity
Change adjustable plate;It is provided on the homogenizing adjustable plate and the matched perforation of homogenizing plate;The homogenizing plate passes through homogenizing adjustable plate, institute
It states screw rod and passes through homogenizing adjustable plate, and be threadedly engaged with homogenizing adjustable plate;
The snorkel is connected to by gas-guide tube with part flow arrangement, and the air inlet pipe is connected to stream device;The snorkel
Solenoid valve is provided on gas-guide tube between part flow arrangement;
The part flow arrangement is connected to by tracheae with the gas outlet of dioxygen generator;The escape pipe and dioxygen generator
Air inlet connection.
Further, the lower end two sides of the homogenizing adjustable plate are provided with convex block;The side wall upper and lower of the adjusting cavity
It is provided with and the matched horizontal concrete chute of convex block;The convex block is slidably mounted in horizontal concrete chute.
Preferably, the part flow arrangement uses four-way pipe.
Further, first homogenizing plate is trapezoidal plate, and second homogenizing plate is rectangular slab.
Further, the bottom of the rectangular cavities is connected to the bottom of adjusting cavity.
Further, the side wall upper part of the gas mixing chamber body is provided with and first level partition matched first
Slot, the lower sidewall of the gas mixing chamber body are provided with and matched second slot of the second horizontal baffle;Described
One horizontal baffle is mounted in the first slot;Second horizontal baffle is mounted in the second slot.
Further, between first sealing plate and gas mixing ontology and the second sealing plate and gas mixing ontology
Between be provided with seal washer.
Further, at least two pieces of air distribution plates being parallel to each other, the air distribution plate is provided in the air-distributing tube vertically to set
It sets.
The beneficial effects of the present invention are: the anti-PID device of solar battery of the present invention has the advantage that
1, due to nitrogen and the unidirectional mixing arrangement of oxygen, the first check valve and first-class is provided on nitrogen inlet duct
Adjustable valve;Second one-way valve and second flow regulating valve are provided on oxygen intake pipe;It is arranged on escape pipe simultaneously
There are third check valve and third flow control valve;So as to effectively avoid refluence and the crossfire of gas;
Secondly as forming oxygen inlet chamber between the first level partition and the top of gas mixing ontology cavity;
Nitrogen inlet chamber is formed between two horizontal baffle and the bottom of gas mixing ontology cavity;It is set on the first level partition
It is equipped with the first air hole;The lower surface of the first level partition is provided with transversely equally distributed first vertical baffle;Institute
It states and is provided with the second ventilation mouth on the second horizontal baffle;The upper surface of second horizontal baffle, which is provided with, to be transversely uniformly distributed
The second vertical baffle;The second vertical baffle on second horizontal baffle is located on first level partition adjacent two piece first
The underface in gap between vertical baffle;Therefore enable to oxygen and nitrogen first level partition and the second horizontal baffle it
Between be sufficiently mixed uniformly;And it can be avoided gas backflow.
2, due to gas mixing homogenizer, it is provided with two layers of homogenizing plate in homogenizing main casing, so as to by equal
Flowing plate makes the gas flowed out out of homogenizing main casing be evenly distributed in the opening for being homogenized main casing lower end;So as to make
Mixed gas can and be distributed in around silicon chip surface.
Simultaneously as gas mixing homogenizer, which is additionally provided with homogenizing region, adjusts body, body tune is adjusted by homogenizing region
Throttle body is homogenized region, so as to be suitable for the silicon wafer of different length;Therefore it can be improved and set for the anti-PID of solar battery
The application range of standby gas mixing homogenizer.
Thereby it is ensured that mixed gas uniform fold is around silicon chip surface, while different length can be suitable for
Silicon wafer;Production cost can be effectively reduced.
Detailed description of the invention
Fig. 1 is the perspective view of the anti-PID device of solar battery in the embodiment of the present invention;
Fig. 2 is the main view of the anti-PID device of solar battery in the embodiment of the present invention;
Fig. 3 is the top view of the anti-PID device of solar battery in the embodiment of the present invention;
Fig. 4 is the nitrogen and the unidirectional mixing arrangement of oxygen that the anti-PID equipment of solar battery is used in the embodiment of the present invention
Perspective view of the explosion;
Fig. 5 is the nitrogen and the unidirectional mixing arrangement of oxygen that the anti-PID equipment of solar battery is used in the embodiment of the present invention
Perspective view;
Fig. 6 is the nitrogen and the unidirectional mixing arrangement of oxygen that the anti-PID equipment of solar battery is used in the embodiment of the present invention
Main view;
Fig. 7 is the nitrogen and the unidirectional mixing arrangement of oxygen that the anti-PID equipment of solar battery is used in the embodiment of the present invention
Top view;
Fig. 8 is the A-A cross-sectional view of Fig. 7;
Fig. 9 is the B-B cross-sectional view of Fig. 6;
Figure 10 is the nitrogen and the unidirectional mixing arrangement of oxygen that the anti-PID equipment of solar battery is used in the embodiment of the present invention
Perspective view of the explosion;
Figure 11 is the nitrogen and the unidirectional mixing arrangement of oxygen that the anti-PID equipment of solar battery is used in the embodiment of the present invention
Perspective view;
Figure 12 is the nitrogen and the unidirectional mixing arrangement of oxygen that the anti-PID equipment of solar battery is used in the embodiment of the present invention
Main view;
Figure 13 is the nitrogen and the unidirectional mixing arrangement of oxygen that the anti-PID equipment of solar battery is used in the embodiment of the present invention
Top view;
Figure 14 is the nitrogen and the unidirectional mixing arrangement of oxygen that the anti-PID equipment of solar battery is used in the embodiment of the present invention
Bottom view;
Figure 15 is the C-C cross-sectional view of Figure 12;
Figure 16 is the D-D cross-sectional view of Figure 13;
It is indicated in figure: 100- nitrogen and the unidirectional mixing arrangement of oxygen, 11- gas mixing ontology, the first sealing plate of 12-, 13-
Second sealing plate, 14- nitrogen inlet duct, the first check valve of 15-, 151- first flow regulating valve, 16- oxygen intake pipe, 17-
Two check valves, 171- second flow regulating valve, 18- air-distributing tube, 19- sealing plate, 110- escape pipe, 111- third check valve,
1111- third flow control valve;112- first level partition, the first air hole of 113-, the first vertical baffle of 114-, 115- second
Horizontal baffle, the second vertical baffle of 116-, the second air hole of 117-, 118- air distribution plate;200- ozone generator;
300- gas mixing homogenizer;31- homogenizing main casing, 32- air inlet pipe, 33- flange, the first homogenizing plate of 34-,
The second homogenizing plate of 35-, 36- homogenizing region adjusting body, 37- homogenizing plate, the side 38- sealing plate, 39- driving motor, 310- screw rod,
311- homogenizing adjustable plate, 312- snorkel, 313- part flow arrangement, 314- gas-guide tube, 315- solenoid valve, 316- back taper cavity,
317- central through hole, 318- perforation;400- tracheae.
Specific embodiment
Present invention will be further explained below with reference to the attached drawings and examples.
As shown in Fig. 1 to Figure 16, the anti-PID device of solar battery of the present invention, including nitrogen and oxygen are unidirectionally mixed
It attaches together and sets 100, dioxygen generator 200, gas mixing homogenizer 300 and tracheae 400;
The nitrogen and the unidirectional mixing arrangement 100 of oxygen are connected to the air inlet 201 of dioxygen generator 200;The gas
Mixing homogenizer 300 is connected to by tracheae 400 with the gas outlet 202 of dioxygen generator 200;
The nitrogen and the unidirectional mixing arrangement 100 of oxygen include gas mixing ontology 11;The gas mixing ontology 11 has
There is the inner cavity that both ends are open;
One end of the gas mixing ontology 11 is provided with the first sealing plate 12, and the other end is provided with the second sealing plate 13;
The cavity top that the gas mixing ontology 11 has is provided with first level partition 112, and lower part is provided with the second horizontal baffle
115;Oxygen inlet chamber is formed between the top of 11 cavity of the first level partition 112 and gas mixing ontology;Two water
Nitrogen inlet chamber is formed between the bottom of 11 cavity of flat partition board 115 and gas mixing ontology;
The nitrogen inlet duct 14 being connected to nitrogen inlet chamber, the nitrogen inlet duct are provided on first sealing plate 12
The first check valve 15 and first flow regulating valve 151 are provided on 14;
11 upper surface of gas mixing ontology is provided with the oxygen intake pipe 16 being connected to oxygen inlet chamber;The oxygen
Second one-way valve 17 and second flow regulating valve 171 are provided in air inlet pipe 16;
The first air hole 113 is provided on the first level partition 112;The lower surface of the first level partition 112
It is provided with transversely equally distributed first vertical baffle 114;The second ventilation mouth is provided on second horizontal baffle 115
117;The upper surface of second horizontal baffle 115 is provided with transversely equally distributed second vertical baffle 116;
The second vertical baffle 116 on second horizontal baffle 115 is located on first level partition 112 adjacent two piece
The underface in gap between one vertical baffle 114;
Outlet nozzle 131 is provided on second sealing plate 13;Air-distributing tube 118 is connected on the outlet nozzle 131;It is described
One end of air-distributing tube 118 is connected to outlet nozzle 131, and the other end is provided with sealing plate 19;Gas distribution is provided in the air-distributing tube 118
Plate 118;The escape pipe 110 being connected to air-distributing tube 118 is provided on the sealing plate 19;Is provided on the escape pipe 110
Three check valves 111 and third flow control valve 1111;
The gas mixing homogenizer 300 includes homogenizing main casing 31, homogenizing region adjusting body 36 and part flow arrangement
313;The homogenizing main casing 31 has the inner cavity of lower openings, is provided with air inlet pipe 32 at the top of the homogenizing main casing 31;Institute
The lower edge for stating homogenizing main casing 31 is provided with flange 33;
The inner cavity top of the homogenizing main casing 31 is back taper cavity 316, and lower part is rectangular cavities;The back taper chamber
At least two layers of first homogenizing plates 34 are provided in body 316;Every layer of first homogenizing plate 34 includes at least two piece of first homogenizing plate 34, and
Transversely it is uniformly distributed;The first homogenizing plate of adjacent two layers 34 is alternately distributed, i.e., between adjacent two piece of first homogenizing plate 34 in upper layer
Gap is located at the surface of the first homogenizing plate of lower layer 34;
There are at least two layers of second homogenizing plates 35 in the rectangular cavities;Every layer of second homogenizing plate 35 includes at least two pieces the
Two homogenizing plates 35, and be transversely uniformly distributed;The second homogenizing plate of adjacent two layers 35 is alternately distributed, i.e., upper layer it is adjacent two piece second
Gap between flowing plate 35 is located at the surface of the second homogenizing plate of lower layer 35;
The homogenizing region adjusts 36 center of body and is provided with installation cavity 361;The homogenizing region adjusts body 36
Both ends are provided with adjusting cavity 362;Snorkel 312 is provided with above the adjusting cavity 362;
The homogenizing region adjusts body 36 and is sleeved on homogenizing main casing 31, and the homogenizing main casing 31 passes through installation cavity
361;The installation cavity 361 is matched with the lower end for being homogenized main casing 31;
The end face and lower surface of the adjusting cavity 362 have opening, and one end of the adjusting cavity 362 is provided with side sealing
Plate 38;At least two layers lateral homogenizing plate 37 is provided in the adjusting cavity 362;The center of the adjusting cavity 362 is arranged
There is lateral screw rod 310;
The driving motor 39 that driving screw rod 310 rotates is provided on the side sealing plate 38;It is sliding in the adjusting cavity 362
It is dynamic that homogenizing adjustable plate 311 is installed;It is provided on the homogenizing adjustable plate 311 and the matched perforation 318 of homogenizing plate 37;It is described equal
Flowing plate 37 passes through homogenizing adjustable plate 311, and the screw rod 310 passes through homogenizing adjustable plate 311, and matches with homogenizing 311 screw thread of adjustable plate
It closes;
The snorkel 312 is connected to by gas-guide tube 314 with part flow arrangement 313, and the air inlet pipe 32 connects with stream device 313
It is logical;Solenoid valve 315 is provided on gas-guide tube 314 between the snorkel 312 and part flow arrangement 313;
The part flow arrangement 313 is connected to by tracheae 400 with the gas outlet 202 of dioxygen generator 200;The escape pipe
110 are connected to the air inlet 201 of dioxygen generator 200.
During the work time:
Nitrogen and oxygen are mixed in nitrogen and the unidirectional mixing arrangement 100 of oxygen first;By pure oxygen feeder
It is connected to oxygen intake pipe 16, purity nitrogen feeder is connected to nitrogen inlet duct 14;When work, first flow valve 151 is opened
With second flow valve 171;Then it is supplied by pure oxygen feeder into oxygen inlet chamber;Purity nitrogen feeder is to nitrogen air inlet
Intracavitary gas supply;Oxygen flows to first level by the first air hole 113 on first level partition by the oxygen inlet chamber on top
Cavity between partition 112 and the second horizontal baffle 115;Nitrogen passes through the second horizontal baffle 115 by the nitrogen inlet chamber of lower part
On the second air hole 117 flow to the cavity between first level partition 112 and the second horizontal baffle 115;
Due to being provided with the first air hole 113 on the first level partition 112;Under the first level partition 112
Surface is provided with transversely equally distributed first vertical baffle 114;It is ventilative that second is provided on second horizontal baffle 115
Mouth 117;The upper surface of second horizontal baffle 115 is provided with transversely equally distributed second vertical baffle 116;Described
The second vertical baffle 116 on two horizontal baffles 115 is located at adjacent two piece of first vertical baffle 114 on first level partition 112
Between gap underface;So that the chamber of nitrogen and oxygen between first level partition 112 and the second horizontal baffle 115
It is uniformly mixed in vivo.
It is entered in air-distributing tube 18 after oxygen and nitrogen mixing by the outlet nozzle 131 on the second sealing plate 13, passes through cloth
Air distribution plate 118 in inflator 18, so that uniform gas flow, is then discharged mixed gas by the escape pipe 110 on sealing plate 19,
By going out, the third flow valve 111 on pipe 110 adjusts flow, avoids gas backstreaming by third check valve 1111.
Then, entered in ozone generator 200 by the mixed gas that escape pipe 110 is discharged and prepare ozone, obtain ozone,
The mixed gas of oxygen and nitrogen.
Finally, the mixed gas of ozone, oxygen and nitrogen is passed into mixed gas homogenizer 300 by tracheae 400
It is interior, so that gas is homogenised for., tracheae 400 is connected to part flow arrangement 13 first;Then anti-PID processing is carried out as needed
The size of silicon wafer determines a need for starting homogenizing region adjusting body 36 and the region of gas homogenization is adjusted;If homogenizing
The lower end of main casing 31 is enough to cover silicon wafer;Then close solenoid valve 315;Start feeder and gas is fed to homogenizing main casing
In 31, then make gas in homogenizing main casing by the first homogenizing plate 34 and the second homogenizing plate 35 that are arranged in homogenizing main casing 31
It is uniformly distributed at 31 lower ending opening of body, so that mixed gas is evenly distributed in around silicon wafer.
When the lower end of homogenizing main casing 31 cannot cover silicon wafer;Then open solenoid valve 315;Starting feeder supplies gas
Enter to homogenizing main casing 31 and homogenizing region and adjust in body 36, then starts driving motor 39 and driving motor 39 is made to drive screw rod
310 rotations, so that position of the homogenizing adjustable plate 311 in adjusting cavity 362 is adjusted, so that adjusting cavity 362 has the region of gas
Silicon wafer can be covered with the lower end area of homogenizing main casing 31.
The mixed gas in homogenizing main casing 31 is entered, 34 He of the first homogenizing plate being arranged in homogenizing main casing 31 is passed through
Second homogenizing plate 35 is uniformly distributed gas at homogenizing 31 lower ending opening of main casing, adjusts the mixed of body 36 into homogenizing region
Gas is closed, when coming out by the opening that the homogenizing plate 37 in homogenizing region adjusting body 36 makes gas adjust 36 lower end of body from region
It is uniformly distributed;So that mixed gas and be distributed in around silicon wafer.
In conclusion the anti-PID device of solar battery of the present invention has the advantage that
1, due to nitrogen and the unidirectional mixing arrangement of oxygen, the first check valve and first-class is provided on nitrogen inlet duct
Adjustable valve;Second one-way valve and second flow regulating valve are provided on oxygen intake pipe;It is arranged on escape pipe simultaneously
There are third check valve and third flow control valve;So as to effectively avoid refluence and the crossfire of gas;
Secondly as forming oxygen inlet chamber between the first level partition and the top of gas mixing ontology cavity;
Nitrogen inlet chamber is formed between two horizontal baffle and the bottom of gas mixing ontology cavity;It is set on the first level partition
It is equipped with the first air hole;The lower surface of the first level partition is provided with transversely equally distributed first vertical baffle;Institute
It states and is provided with the second ventilation mouth on the second horizontal baffle;The upper surface of second horizontal baffle, which is provided with, to be transversely uniformly distributed
The second vertical baffle;The second vertical baffle on second horizontal baffle is located on first level partition adjacent two piece first
The underface in gap between vertical baffle;Therefore enable to oxygen and nitrogen first level partition and the second horizontal baffle it
Between be sufficiently mixed uniformly;And it can be avoided gas backflow.
2, due to gas mixing homogenizer, it is provided with two layers of homogenizing plate in homogenizing main casing, so as to by equal
Flowing plate makes the gas flowed out out of homogenizing main casing be evenly distributed in the opening for being homogenized main casing lower end;So as to make
Mixed gas can and be distributed in around silicon chip surface.
Simultaneously as gas mixing homogenizer, which is additionally provided with homogenizing region, adjusts body, body tune is adjusted by homogenizing region
Throttle body is homogenized region, so as to be suitable for the silicon wafer of different length;Therefore it can be improved and set for the anti-PID of solar battery
The application range of standby gas mixing homogenizer.
Thereby it is ensured that mixed gas uniform fold is around silicon chip surface, while different length can be suitable for
Silicon wafer;Production cost can be effectively reduced.
For the ease of installation, simplify structure, further, the side wall upper part of 11 inner cavity of gas mixing ontology is provided with
With matched first slot of first level partition 112, the lower sidewall of 11 inner cavity of gas mixing ontology is provided with and second
Matched second slot of horizontal baffle 115;The first level partition 112 is mounted in the first slot;Described second it is horizontal every
Plate 115 is mounted in the second slot.
In order to enable equipment better tightness, further, between first sealing plate 12 and gas mixing ontology 11
And second be provided with seal washer between sealing plate 13 and gas mixing ontology 11.
In order to enable uniform gas flow, further, it is provided at least two pieces in the air-distributing tube 18 and is parallel to each other
Air distribution plate 118, the air distribution plate 118 are vertically arranged.
It is slidably installed in adjusting cavity 362 for the ease of homogenizing adjustable plate 311, further, the homogenizing adjustable plate 311
Lower end two sides be provided with convex block;The side wall upper and lower of the adjusting cavity 362 is provided with and the matched horizontal concrete chute of convex block
363;The convex block is slidably mounted in horizontal concrete chute 363.
It in order to simplify structure, is easily installed, reduces cost, it is preferred that the part flow arrangement 313 uses four-way pipe.
For the ease of realizing the water conservancy diversion to air-flow, further, as shown in figure 15, first homogenizing plate 34 is trapezoidal
Plate, second homogenizing plate 35 are rectangular slab;And it is arranged according to arrangement as shown in figure 15.
In order to guarantee that gas can be evenly distributed in around silicon chip surface, further, the bottom of the rectangular cavities
Portion is connected to the bottom of adjusting cavity 362.
Claims (8)
1. the anti-PID device of solar battery, it is characterised in that: occur including nitrogen and the unidirectional mixing arrangement of oxygen (100), dioxygen
Device (200), gas mixing homogenizer (300) and tracheae (400);
The nitrogen and the unidirectional mixing arrangement of oxygen (100) are connected to the air inlet (201) of dioxygen generator (200);The gas
Body mixing homogenizer (300) is connected to by tracheae (400) with the gas outlet (202) of dioxygen generator (200);
The nitrogen and the unidirectional mixing arrangement of oxygen (100) include gas mixing ontology (11);The gas mixing ontology (11)
The inner cavity being open with both ends;
One end of the gas mixing ontology (11) is provided with the first sealing plate (12), and the other end is provided with the second sealing plate
(13);The cavity top that the gas mixing ontology (11) has is provided with first level partition (112), and lower part is provided with second
Horizontal baffle (115);Between the first level partition (112) and the top of gas mixing ontology (11) cavity formed oxygen into
Air cavity;Nitrogen inlet chamber is formed between two horizontal baffle (115) and the bottom of gas mixing ontology (11) cavity;
The nitrogen inlet duct (14) being connected to nitrogen inlet chamber, the nitrogen inlet duct are provided on first sealing plate (12)
(14) the first check valve (15) and first flow regulating valve (151) are provided on;
Gas mixing ontology (11) upper surface is provided with the oxygen intake pipe (16) being connected to oxygen inlet chamber;The oxygen
Second one-way valve (17) and second flow regulating valve (171) are provided in air inlet pipe (16);
The first air hole (113) are provided on the first level partition (112);The following table of the first level partition (112)
Face is provided with transversely equally distributed first vertical baffle (114);Second is provided on second horizontal baffle (115) thoroughly
Port (117);The upper surface of second horizontal baffle (115) is provided with transversely equally distributed second vertical baffle
(116);
The second vertical baffle (116) on second horizontal baffle (115) is located at upper adjacent two pieces of first level partition (112)
The underface in gap between first vertical baffle (114);
Outlet nozzle (131) are provided on second sealing plate (13);Air-distributing tube (118) are connected on the outlet nozzle (131);
One end of the air-distributing tube (118) is connected to outlet nozzle (131), and the other end is provided with sealing plate (19);The air-distributing tube (118)
Inside it is provided with air distribution plate (118);The escape pipe (110) being connected to air-distributing tube (118) is provided on the sealing plate (19);It is described
Third check valve (111) and third flow control valve (1111) are provided on escape pipe (110);
The gas mixing homogenizer (300) includes homogenizing main casing (31), homogenizing region adjusting body (36) and shunting dress
Set (313);Homogenizing main casing (31) has the inner cavity of lower openings, is provided with air inlet at the top of the homogenizing main casing (31)
It manages (32);The lower edge of homogenizing main casing (31) is provided with flange (33);
The inner cavity top of homogenizing main casing (31) is back taper cavity (316), and lower part is rectangular cavities;The back taper chamber
At least two layers of first homogenizing plates (34) are provided in body (316);Every layer of first homogenizing plate (34) includes at least two piece first and flows
Plate (34), and be transversely uniformly distributed;The first homogenizing plate of adjacent two layers (34) is alternately distributed, i.e., adjacent two piece first of upper layer is flowed
Gap between plate (34) is located at the surface of the first homogenizing plate of lower layer (34);
There are at least two layers of second homogenizing plates (35) in the rectangular cavities;Every layer of second homogenizing plate (35) includes at least two pieces the
Two homogenizing plates (35), and be transversely uniformly distributed;The second homogenizing plate of adjacent two layers (35) is alternately distributed, i.e., upper layer is two piece adjacent
Gap between two homogenizing plates (35) is located at the surface of the second homogenizing plate of lower layer (35);
The homogenizing region adjusts body (36) center and is provided with installation cavity (361);The homogenizing region adjusts body (36)
Both ends be provided with adjusting cavity (362);Snorkel (312) are provided with above the adjusting cavity (362);
The homogenizing region adjusts body (36) and is sleeved in homogenizing main casing (31), and it is logical that the homogenizing main casing (31) passes through installation
Chamber (361);Installation cavity (361) matches with the lower end for being homogenized main casing (31);
The end face and lower surface of the adjusting cavity (362) have opening, and one end of the adjusting cavity (362) is provided with side sealing
Plate (38);At least two layers lateral homogenizing plate (37) is provided in the adjusting cavity (362);The center of the adjusting cavity (362)
Position is provided with lateral screw rod (310);
The driving motor (39) of driving screw rod (310) rotation is provided on the side sealing plate (38);The adjusting cavity (362)
Inside it is slidably fitted with homogenizing adjustable plate (311);It is provided on the homogenizing adjustable plate (311) and homogenizing plate (37) matched perforation
(318);The homogenizing plate (37) passes through homogenizing adjustable plate (311), and the screw rod (310), which passes through, is homogenized adjustable plate (311), and with
Homogenizing adjustable plate (311) is threadedly engaged;
The snorkel (312) is connected to by gas-guide tube (314) with part flow arrangement (313), the air inlet pipe (32) and stream device
(313) it is connected to;Solenoid valve (315) are provided on gas-guide tube (314) between the snorkel (312) and part flow arrangement (313);
The part flow arrangement (313) is connected to by tracheae (400) with the gas outlet (202) of dioxygen generator (200);The outlet
Pipe (110) is connected to the air inlet (201) of dioxygen generator (200).
2. the anti-PID device of solar battery as described in claim 1, it is characterised in that: under the homogenizing adjustable plate (311)
End two sides are provided with convex block;The side wall upper and lower of the adjusting cavity (362) is provided with and the matched horizontal concrete chute of convex block
(363);The convex block is slidably mounted in horizontal concrete chute (363).
3. the anti-PID device of solar battery as claimed in claim 2, it is characterised in that: the part flow arrangement (313) uses four
Siphunculus.
4. the anti-PID device of solar battery as claimed in claim 3, it is characterised in that: first homogenizing plate (34) is ladder
Shape plate, second homogenizing plate (35) are rectangular slab.
5. the anti-PID device of solar battery as claimed in claim 4, it is characterised in that: the bottom of the rectangular cavities and tune
Save the bottom connection of chamber (362).
6. the anti-PID device of solar battery as described in claim 1, it is characterised in that: in the gas mixing ontology (11)
The side wall upper part of chamber is provided with and matched first slot of first level partition (112), gas mixing ontology (11) inner cavity
Lower sidewall be provided with and matched second slot of the second horizontal baffle (115);The first level partition (112) is mounted on
In first slot;Second horizontal baffle (115) is mounted in the second slot.
7. the anti-PID device of solar battery as claimed in claim 6, it is characterised in that: first sealing plate (12) and gas
Seal washer is provided between body hybrid ontology (11) and between the second sealing plate (13) and gas mixing ontology (11).
8. the anti-PID device of solar battery as claimed in claim 7, it is characterised in that: be provided in the air-distributing tube (18)
At least two pieces air distribution plates (118) being parallel to each other, the air distribution plate (118) are vertically arranged.
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