CN109494179A - A kind of automatic organic washing machine, cleaning system and cleaning method - Google Patents
A kind of automatic organic washing machine, cleaning system and cleaning method Download PDFInfo
- Publication number
- CN109494179A CN109494179A CN201811414839.4A CN201811414839A CN109494179A CN 109494179 A CN109494179 A CN 109494179A CN 201811414839 A CN201811414839 A CN 201811414839A CN 109494179 A CN109494179 A CN 109494179A
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- ipa
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/66—Treatment of water, waste water, or sewage by neutralisation; pH adjustment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Hydrology & Water Resources (AREA)
- Environmental & Geological Engineering (AREA)
- Water Supply & Treatment (AREA)
- Life Sciences & Earth Sciences (AREA)
- Organic Chemistry (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention belongs to wafer processing technical fields, provide a kind of automatic organic washing machine, including rack, rack is equipped with seal closure, rack is enclosed by seal closure is set as sealing cleaning chamber, sealing cleaning is intracavitary to be equipped with glue-dispenser technology groove, IPA technology groove and cleaning sink side by side, and the intracavitary hand basket mechanism for being additionally provided with driving device driving is cleaned in sealing, and rack is externally provided with the controller to realize driving device control.The present invention realizes effective substitution of manual labor, greatly reduces the labor intensity of staff, and cleaning efficiency greatly improves, cleaning cost substantially reduces, in addition, effectively preventing injury of the process liquor to human health, and the working environment for entirely cleaning workshop is very significantly improved.
Description
Technical field
The present invention relates to wafer processing technical field more particularly to a kind of automatic organic washing machine, cleaning system and
Cleaning method.
Background technique
Sapphire during wafer processing, after inductively coupled plasma (ICP) equipment lithography is complete
Substrate (PSS), needs to carry out clean process, carries out cleaning of removing photoresist to the photoresist on substrate.Traditional gluing method that goes is,
Product is manually transported to each ultrasonic cleaning process slot, carries out Manual-cleaning, realize according to following process process: product is put
Entering hand basket, -- hand basket product removes photoresist to glue-dispenser slot, and -- removing glue-dispenser to IPA slot, -- screw clamp flushing -- taking out hand basket -- is taken out
Product after cleaning；But the mode of Manual-cleaning is manually carried out, not only large labor intensity, cleaning efficiency is low, and process liquor glue-dispenser
(sulfuric acid is mixed with hydrogen peroxide ratio) is the liquid of pungent smell with IPA (isopropanol), and supersonic wave cleaning machine technology groove is straight
Connect it is exposed in the work environment, even if staff wears mask and gloves as close to solution, solution when carrying hand basket
Sharp aroma easily cause human body uncomfortable, sucking human body can cause damages to human health (such as isopropanol IPA be it is dangerous and
Harmful substance sucks excessive methanol vapor, will cause the harm of human health, can slightly stimulate eyes and the upper respiratory tract, high
Concentration may cause headache, nausea).
Therefore, a kind of automatic organic washing machine, cleaning system and cleaning method are developed, not only there is urgent research valence
Value, it may have good economic benefit and commercial application potentiality, where this power exactly of the invention being accomplished and basis.
Summary of the invention
In order to overcome the defect of the prior art as indicated above, the present inventor has made intensive studies this, is paying
After a large amount of creative works, so as to complete the present invention.
Specifically, the technical problems to be solved by the present invention are: provide a kind of automatic organic washing machine, cleaning system and
Cleaning method, existing large labor intensity when solving manually to carry out photoresist cleaning on substrate at present, cleaning efficiency is low,
Working environment difference and the technical problem big to human health damage.
In order to solve the above technical problems, the technical scheme is that
A kind of automatic organic washing machine, including rack, the rack are equipped with seal closure, and the rack passes through the sealing
Cover, which encloses, is set as sealing cleaning chamber, and the sealing cleaning is intracavitary to be equipped with glue-dispenser technology groove, IPA technology groove and ejected wash water side by side
Slot, the intracavitary hand basket mechanism for being additionally provided with driving device driving of sealing cleaning, the rack are externally provided with to realize the drive
The controller of dynamic device control.
As an improvement technical solution, the side of the rack is equipped with appliance doors and push-and-pull observation window, the equipment
Door hinge, which connects, to be installed in the rack, and is correspondingly arranged with the cleaning sink, and the push-and-pull observation window is slidably mounted on described
In rack, and the push-and-pull observation window is correspondingly arranged with the glue-dispenser technology groove, the IPA technology groove.
As an improvement technical solution, offered on the seal closure of the rack other side respectively air inlet,
Exhaust outlet, glue-dispenser leakage fluid dram and IPA leakage fluid dram, the air inlet and the exhaust outlet are connected to sealing cleaning chamber,
The glue-dispenser leakage fluid dram is connected to the glue-dispenser technology groove, and the IPA leakage fluid dram is connected to the IPA technology groove.
As an improvement technical solution, be equipped with partition in the cleaning sink, the partition is by the cleaning sink
It is divided into cleaning area and draining buffer area, and the bottom of the partition is equipped with drain valve, the drain valve and the controller connect
It connects；
The bottom of the cleaning area is equipped with two positioning plates, and the two positioning plate inclinations are fixedly installed in the cleaning sink
On cell wall, and there are spacing compatible with hand basket width, the top two sides of the cleaning area between the bottom edge of two positioning plates
Two spray waterpipes are respectively equipped with, two spray waterpipes are fixedly installed on the cell wall of the cleaning sink, and the shower water
Several spray heads being connected to the spray waterpipe are uniformly provided on pipe, the spray head has an inclination spray angles；
The bottom of the draining buffer area is equipped with a waste outlet.
As an improvement technical solution, the driving device include X-axis mounting plate, the first sliding rail, first driving electricity
Machine, the first drive pulley, the first transmission belt, first slide, Y-axis mounting plate, the second sliding rail, the second driving motor, the second transmission
Belt wheel, the second transmission belt and second slide；
The X-axis mounting plate level is fixedly installed in the rack, and the first sliding rail level is fixedly installed in the X
In axle installing plate, first driving motor is fixedly installed in one end of the X-axis mounting plate, and connect with the controller,
There are two first drive pulley is set, and wherein first drive pulley is fixedly installed in first driving motor
On output shaft, another first drive pulley rotational installation is in the other end of the X-axis mounting plate, the first transmission tape holder
It is around between two first drive pulleys, and is engaged with first drive pulley transmission, the first slide is slidably installed
In on first sliding rail, and it is fixedly connected with first transmission belt；
The Y-axis mounting plate is fixedly installed in vertically in the first slide, and second sliding rail is fixedly installed in vertically
On the Y-axis mounting plate, second driving motor is fixedly installed in one end of the Y-axis mounting plate, and with the controller
Connection, there are two second drive pulley is set, and wherein second drive pulley is fixedly installed in second driving
On the output shaft of motor, another second drive pulley rotational installation is passed in the other end of the Y-axis mounting plate, described second
Dynamic tape holder is around between two second drive pulleys, and is engaged with second drive pulley transmission, and the second slide is sliding
It is dynamic to be installed on second sliding rail, and be fixedly connected with second transmission belt.
As an improvement technical solution, the hand basket mechanism includes hand basket arm, the fixed peace in the top of the hand basket arm
Loaded in the second slide, the bottom end of the hand basket arm is fixedly installed with slide bar, and it is corresponding that two are slidably fitted on the slide bar
The sliding block of setting, the bottom of the sliding block is fixedly installed with hand basket hook, and double end cylinder is equipped between two sliding blocks, described double
The piston rod of head cylinder is fixedly connected with two sliding blocks respectively.
As an improvement technical solution, the automatic organic washing machine further includes warning device, the warning device
Including three color alarm lamps and buzzer, the three colors alarm lamp and the buzzer are connect with the controller respectively.
As an improvement technical solution, the automatic organic washing machine further includes hand basket, the hand basket be lattice-shaped
Web plate, which encloses, to be set, and the two sides of the hand basket all have convenient for picking and placing the opening of cassette of substrates, and the top two sides of the hand basket are equal
Equipped with carrying handle, reinforcing rod is fixedly installed in the cassette of substrates placement plate of the hand basket.
The present invention discloses a kind of automatic organic washing systems, including automatic organic washing machine described above, also
Including clear water storage tank, wastewater equalization pond, activated carbon adsorber, glue-dispenser recovery pond and IPA recovery pond, the clear water storage tank passes through
Water supplying pipe is connected to spray waterpipe, and the water supplying pipe is equipped with water supply pump, and the water supply pump is connect with the controller, described
Wastewater equalization pond be connected to by drainpipe with waste outlet, the air intake vent of the activated carbon adsorber pass through waste gas exhaust pipe and
The exhaust outlet of the organic washing machine is connected to, and the air outlet of the activated carbon adsorber is communicated with air pump, the glue-dispenser recycling
Pond is connected to by the first devil liquor recovery pipe with glue-dispenser leakage fluid dram, and the IPA recovery pond is arranged by the second devil liquor recovery pipe and IPA
The connection of liquid mouth.
The present invention discloses a kind of cleaning methods realized using automatic organic washing machine as described above, including
Following steps:
S1, the substrate product cleaned will be needed to be placed into cassette of substrates, and it is placed into hand basket at box；
S2, appliance doors are opened, the hand basket equipped with substrate product is placed into the cleaning area of cleaning sink, pass hull closure
Door；
S3, controller control driving device movement, mention glue-dispenser technique for the hand basket equipped with substrate product by linking up with
In slot, and drive hand basket in shake, scavenging period t1 are removed photoresist process up and down in the agent solution that removes photoresist；
After the completion of S4, removal photoresist process, above-mentioned hand basket is mentioned in IPA technology groove, and and drive hand basket molten in IPA
Shake, scavenging period t2 are removed glue-dispenser technique up and down in liquid；
After the completion of S5, removal glue-dispenser technique, above-mentioned hand basket is mentioned in the cleaning area of cleaning sink, controller control spray
Water drenching water inlet tube impregnates substrate product spray cleaning in hand basket until ejected wash water trough inner water is totally submerged hand basket by spray head
Time t3 carries out last removal IPA technique；
After the completion of S6, removal IPA technique, drain valve is opened, waste water in the cleaning area of cleaning sink is drained, is taken out above-mentioned
Hand basket, while being put into next hand basket equipped with substrate to be cleaned.
After above-mentioned technical proposal, the beneficial effects of the present invention are:
(1) the automatic organic washing machine structure is simple, realizes the automatic cleaning of photoresist on substrate, saves manpower,
The labor intensity of staff is greatly reduced, and compares the cleaning way that manual handling product hand basket carries out Manual-cleaning, clearly
It washes efficiency to greatly improve, cleaning cost substantially reduces.
(2) the automatic organic washing machine encloses the sealing cleaning chamber being set as by seal closure, and entire cleaning process is sealing
Intracavitary progress is cleaned, injury of the process liquor to human health is effectively prevented, and the working environment for entirely cleaning workshop is obtained
To very big improvement.
(3) in the cleaning process in removal photoresist process with removing glue-dispenser technique, by driving product hand basket in work
The cleaning way (rinsing) shaken up and down in skill liquid, the side for being statically placed in and cleaning in technology groove can only be submerged by comparing traditional hand basket
Formula realizes the auxiliary cleaning to substrate product, further improves the cleaning efficiency to substrate product, reduces cleaning week
Phase.
(4) basket structure being equipped with is placed and is cleaned at box convenient for substrate product, and the substrate product that can once place
Amount is more, and then further improves cleaning efficiency.
(5) positioning plate structure being equipped in cleaning sink, it is fixed in positioning plate convenient for the placement of hand basket, and after hand basket placement
Under the effect of position, hand basket is slided into automatically between two positioning plates, so that the placement location of hand basket is accurate, it is not in inclination, offset
Phenomenon extracts and spray head is to the accurate spray washing of hand basket the accurate of hand basket convenient for hand basket mechanism.
(6) the hand basket mechanism being equipped with, structure is simple, flexible by the piston rod for controlling double end cylinder, can realize hand basket
Loading or unloading operation, it is convenient, practical.
(7) spray waterpipe and showerhead configuration being equipped with, product carries out in two rows of inclined theta alignment hand baskets of spray head
The cleaning way for spraying cleaning is compared traditional cleaning way for directly taking water pipe artificial flushing, is cleaned uniformly, cleaning efficiency
Height, cleaning effect is good, and water consumption substantially reduces, in addition, Auto-drainage after the completion of automatic cleaning, cleaning, is not required to artificial drainage,
Reduce the labor intensity of staff.
(8) warning device being equipped with after the completion of worker's feeding, can do other work in scavenging period section, without keeping an eye on,
It need to only hear equipment buzzing prompt or complete blanking after seeing alarming lamp prompt, it is convenient and practical.
(9) appliance doors being equipped with are easy to implement feeding and blanking operation；The push-and-pull observation window being equipped with, convenient for glue-dispenser
The cleaning process of technology groove and IPA technology groove carries out observation periodically or non-periodically, if there is cleaning failure, convenient for passing through push-and-pull
Even if observation window carries out maintenance process.
(10) sealing can be cleaned intracavitary exhaust gas and extracted out in time, so that sealing is clear by the exhaust outlet and air inlet being equipped with
It washes intracavitary exhaust gas concentration to substantially reduce, to further reduced during opening door progress operation of feeding and discharging, exhaust gas pair
The harm of staff and exhaust emissions are into workshop.
(11) cleaning system being equipped with, realize substrate is cleaned automatically while, convenient for being generated in cleaning process
Waste water handled with exhaust gas, discharged after processing, avoid environmental pollution, clean and environmental protection, while convenient for removing photoresist after using
The recycling of agent solution and IPA solution is stored, so as to recycling and reusing.
Detailed description of the invention
It, below will be to specific in order to illustrate more clearly of the specific embodiment of the invention or technical solution in the prior art
Embodiment or attached drawing needed to be used in the description of the prior art are briefly described.In all the appended drawings, similar element
Or part is generally identified by similar appended drawing reference.In attached drawing, each element or part might not be drawn according to actual ratio.
Fig. 1 is the structural schematic diagram of the automatic organic washing machine of the present invention；
Fig. 2 is the schematic perspective view of the automatic organic washing machine of the present invention；
Fig. 3 is another schematic perspective view of the automatic organic washing machine of the present invention；
Fig. 4 is transhipment structural schematic diagram of the hand basket of the present invention under driving device driving；
Fig. 5 is hand basket of the present invention in the displacement structure schematic diagram in cleaning sink；
Fig. 6 is the structural schematic diagram of driving device of the present invention；
Fig. 7 is the structural schematic diagram of hand basket mechanism of the present invention；
Fig. 8 is the structural schematic diagram of cleaning sink of the present invention；
Fig. 9 is the structural schematic diagram of hand basket of the present invention；
Figure 10 is the structural schematic diagram of the automatic organic washing system of the present invention；
Figure 11 is the structural schematic diagram of activated carbon adsorber of the present invention；
Appended drawing reference: 1- rack；2- seal closure；201- air inlet；202- exhaust outlet；3- glue-dispenser technology groove；301- is gone
Jelly leakage fluid dram；4-IPA technology groove；401-IPA leakage fluid dram；5- cleaning sink；501- partition；502- positioning plate；503- waste water
Discharge outlet；The cleaning area 5a-；5b- drains buffer area；6- driving device；601-X axle installing plate；The first sliding rail of 602-；603- first
Driving motor；The first drive pulley of 604-；The first transmission belt of 605-；606- first slide；607-Y axle installing plate；608- second
Sliding rail；The second driving motor of 609-；The second drive pulley of 6010-；The second transmission belt of 6011-；6012- second slide；7- hand basket
Mechanism；701- hand basket arm；702- slide bar；703- sliding block；704- hand basket hook；705- double end cylinder；8- appliance doors；9- push-and-pull is seen
Examine window；10- drain valve；11- spray waterpipe；1101- spray head；Tri- color alarm lamp of 12-；13- hand basket；1301- carrying handle；1302-
Cassette of substrates placement plate；1303- reinforcing rod；14- control cabinet；15- controls touch screen；16- control button；17- cassette of substrates；18- is clear
Water storage tank；19- wastewater equalization pond；20- activated carbon adsorber；2001- air intake vent；2002- air outlet；The filling of 2003- active carbon
Layer；21- glue-dispenser recovery pond；22-IPA recovery pond；23- water supplying pipe；24- water supply pump；25- drainpipe；26- waste gas exhaust pipe；
27- air pump；28- the first devil liquor recovery pipe；29- the second devil liquor recovery pipe.
Specific embodiment
Below with reference to specific embodiment, the present invention is further described.But the purposes and mesh of these exemplary embodiments
Be only used to enumerate the present invention, any type of any restriction not is constituted to real protection scope of the invention, it is more non-to incite somebody to action this
The protection scope of invention is confined to this.
As shown in Figures 1 to 4, a kind of automatic organic washing machine, including rack 1 are present embodiments provided, rack 1 is stainless
Frame structure made of steel-pipe welding, rack 1 are equipped with seal closure 2, and rack 1 is enclosed by seal closure 2 is set as sealing cleaning chamber,
Sealing cleaning is intracavitary to be equipped with glue-dispenser technology groove 3, IPA technology groove 4 and cleaning sink 5 side by side, and sealing cleaning is intracavitary to be additionally provided with drive
The hand basket mechanism 7 that dynamic device 6 drives, rack 1 are externally provided with the controller controlled to realize driving device 6.
Due to the cleaning process to substrate are as follows: first pass through agent solution cleaning of removing photoresist, clean using IPA solution, most pass through afterwards
Clear water cleaning is crossed, therefore, to improve transfer efficiency of the hand basket 13 between each technology groove 4, while considering the body of the cleaning machine equipment
Product, glue-dispenser technology groove 3, IPA technology groove 4 and cleaning sink 5 clean intracavitary embark on journey in sealing and are arranged successively setting, i.e. IPA work
Skill slot 4 is between glue-dispenser technology groove 3 and cleaning sink 5.
As shown in Fig. 2, the side of rack 1 is equipped with appliance doors 8 and push-and-pull observation window 9, appliance doors 8 are hingedly installed by hinge
In in rack 1, and be correspondingly arranged with cleaning sink 5, push-and-pull observation window 9 is slidably mounted in rack 1, and push and pull observation window 9 with
Glue-dispenser technology groove 3, IPA technology groove 4 are correspondingly arranged, and in the present embodiment, push-and-pull observation window 9 is provided with upper layer and lower layer；It is equipped with
Appliance doors 8 are easy to implement feeding and blanking operation, the push-and-pull observation window 9 being equipped with, convenient for glue-dispenser technology groove 3 and IPA technique
The cleaning process of slot 4 carries out observation periodically or non-periodically, if there is cleaning failure, convenient for being by pushing and pulling observation window 9
Make maintenance process.
In the present embodiment, seal closure 2, appliance doors 8 and push-and-pull observation window 9 are all made of organic glass and are made, and seal meeting
While service performance, structural strength is big, and facilitates through organic glass and be observed to the cleaning state in cleaning machine, so as to
Flexible modulation is made to cleaning parameters according to cleaning state or carries out the operation such as replacement processing according to process liquor service condition.
As shown in figure 3, air inlet 201, exhaust outlet 202, glue-dispenser are offered on the seal closure 2 of 1 other side of rack respectively
Leakage fluid dram 301 and IPA leakage fluid dram 401, air inlet 201 and exhaust outlet 202 are connected to sealing cleaning chamber, glue-dispenser leakage fluid dram
301 are connected to glue-dispenser technology groove 3, and are located at the bottom of glue-dispenser technology groove 3, and IPA leakage fluid dram 401 and IPA technology groove 4 connect
It is logical, and it is located at the bottom of IPA technology groove 4；Sealing can be cleaned intracavitary exhaust gas by the exhaust outlet 202 and air inlet 201 being equipped with
Extraction in time carries out up and down to further reduced in opening door so that sealing is cleaned intracavitary exhaust gas concentration and substantially reduced
Expect in operating process, exhaust gas to the harm of staff and exhaust emissions into workshop, the glue-dispenser leakage fluid dram 301 that is equipped with
Replacement with IPA leakage fluid dram 401 for process liquor in technology groove 4 is provided convenience.
In the present embodiment, glue-dispenser technology groove 3 and IPA technology groove 4 can be used with it is existing it is identical, there is ultrasonic cleaning
And 4 equipment of technology groove of temperature control heating function, and jelly technology groove 4 and IPA technology groove 4 are connect with controller respectively, by controlling
Device control, since glue-dispenser technology groove 3 and IPA technology groove 4 are existing commercial product, structure and working principle is existing
Conventional technical means in technology, is known together by those skilled in the art, and and therefore not to repeat here.
As shown in figure 8, being equipped with partition 501 in cleaning sink 5, cleaning sink 5 is divided into cleaning area 5a and row by partition 501
Water buffer area 5b, and the bottom of partition 501 is equipped with drain valve 10, drain valve 10 is connect with controller, is controlled and is arranged by controller
Whether water.
As Fig. 5 and Fig. 8 jointly shown in, the bottom of cleaning area 5a is equipped with two positioning plates 502, and the inclination of two positioning plates 502 is fixed
It is installed on the cell wall of cleaning sink 5, and there is spacing compatible with 13 width of hand basket between the bottom edge of two positioning plates 502, clearly
The top two sides for washing area 5a are respectively equipped with two spray waterpipes 11, and two spray waterpipes 11 are fixedly installed in the slot of cleaning sink 5
Several spray heads 1101 being connected to spray waterpipe 11 are uniformly provided on wall, and on spray waterpipe 11, spray head 1101 has one
Spray angles are tilted, in the present embodiment, the spray angles of spray head 1101 are 45 °, and certainly, actual spray angles can be according to reality
Spray waterpipe 11 is adjusted in the cleaning demand on border；502 structure of positioning plate being equipped in cleaning sink 5, convenient for hand basket 13
It places, facilitates staff that hand basket 13 is accurately put into correct position, and after the placement of hand basket 13, position and make in positioning plate 502
Under, hand basket 13 slides between two positioning plates 502 automatically, so that the placement location of hand basket 13 is accurate, it is not in inclination, inclined
Phenomenon is moved, the accurate of hand basket 13 is extracted and spray head 1101 is to the accurate spray washing of hand basket 13 convenient for hand basket mechanism 7.
1101 structure of above-mentioned spray waterpipe 11 and spray head being equipped with, the inclined theta alignment hand basket of two rows of spray heads 1101
Product carries out the cleaning way of spray cleaning in 13, compares and traditional directly takes water pipe (the usually water pipe of φ 30) artificial flushing
Cleaning way, uniformly, cleaning efficiency is high, and cleaning effect is good, and water consumption substantially reduces for cleaning, in addition, automatic cleaning, cleaning
Auto-drainage after the completion is not required to artificial drainage, reduces the labor intensity of staff.
In the present embodiment, the bottom of draining buffer area 5b is equipped with a waste outlet 503, convenient for the row of waste water after cleaning
Out.
The automatic organic washing machine further includes the hand basket 13 to hold substrate product, and 13 structure of hand basket is as shown in figure 9, mention
Basket 13 encloses for lattice-shaped web plate to be set, and the two sides of hand basket 13 all have convenient for picking and placing the opening of cassette of substrates 17, hand basket 13
Top two sides are equipped with carrying handle 1301, and in the present embodiment, the middle position of hand basket 13 is fixedly installed with a web plate, and passing through web plate will
Hand basket 13 is divided into upper layer and lower layer, web plate with hand basket 13 bottom plate as the cassette of substrates placement plate 1302 for placing cassette of substrates 17, and
It is fixedly installed with reinforcing rod 1303 thereon, while increasing by 13 structural strength of hand basket, convenient for the placement of cassette of substrates 17, uses
When, substrate to be cleaned is placed in cassette of substrates 17, then cassette of substrates 17 is placed in the hand basket 13；13 knot of hand basket being equipped with
Structure is placed and is cleaned at box convenient for substrate product, and the substrate product amount that can once place is more, and then further improves clear
Wash efficiency.
To realize automatically extracting and carrying to hand basket 13, as shown in fig. 7, hand basket mechanism 7 includes hand basket arm 701, hand basket
The bottom end of arm 701 is fixedly installed with slide bar 702, and two sliding blocks 703 being correspondingly arranged are slidably fitted on slide bar 702, sliding block 703
Bottom is fixedly installed with hand basket hook 704, and double end cylinder 705 is equipped between two sliding blocks 703, the piston rod point of double end cylinder 705
It is not fixedly connected with two sliding blocks 703；The hand basket mechanism 7 being equipped with, structure is simple, by the piston rod for controlling double end cylinder 705
It is flexible, it can realize the loading or unloading operation of hand basket 13, it is convenient, practical.
To realize the driving to hand basket mechanism 7, cleaned between each technology groove 4 to carry hand basket 13 by hand basket mechanism 7
And transhipment, as shown in fig. 6, driving device 6 includes X-axis mounting plate, the first sliding rail 602, the first driving motor in the present embodiment
603, the first drive pulley 604, the first transmission belt 605, first slide 606, Y-axis mounting plate, the driving of the second sliding rail 608, second
Motor 609, the second drive pulley 6010, the second transmission belt 6011 and second slide 6012；X-axis mounting plate level is fixedly installed in
In rack 1,602 level of the first sliding rail is fixedly installed on X-axis mounting plate, and the first driving motor 603 is fixedly installed in X-axis installation
One end of plate, and being connect with controller, there are two the first drive pulley 604 is set, and the wherein fixed peace of one first drive pulley 604
On output shaft loaded on the first driving motor 603, another first drive pulley 604 is rotatablely installed in the other end of X-axis mounting plate,
First transmission belt, 605 frame is around between two first drive pulleys 604, and is engaged with the transmission of the first drive pulley 604, first slide
606 are slidably mounted on the first sliding rail 602, and are fixedly connected with the first transmission belt 605；Y-axis mounting plate is fixedly installed in vertically
In first slide 606, the second sliding rail 608 is fixedly installed in vertically on Y-axis mounting plate, and the second driving motor 609 is fixedly installed in Y
One end of axle installing plate, and being connect with controller, there are two the second drive pulley 6010 is set, and wherein one second drive pulley
6010 are fixedly installed on the output shaft of the second driving motor 609, and another rotational installation of second drive pulley 6010 is installed in Y-axis
The other end of plate, 6011 frame of the second transmission belt are around between two second drive pulleys 6010, and are passed with the second drive pulley 6010
Dynamic engagement, second slide 6012 is slidably mounted on the second sliding rail 608, and is fixedly connected with the second transmission belt 6011.Pass through drive
Structural schematic diagram when hand basket 13 is transported by dynamic device 6 and hand basket mechanism 7 is as shown in Figure 4.
The automatic organic washing machine further includes warning device, and warning device includes three color alarm lamps 12 and buzzer, three colors
Alarm lamp 12 and buzzer are connect with controller respectively, and existing commercial product can be used in three color alarm lamps 12 and buzzer,
Therefore not to repeat here；The warning device being equipped with after the completion of worker's feeding, other work can be done in scavenging period section, are not necessarily to
It keeps an eye on, is completed when the entire cleaning frequency, waste water is after waste outlet 503 drains, three color alarm lamps 12 and buzzer work, only
It need to hear equipment buzzing prompt or complete blanking after seeing alarming lamp prompt, it is convenient to carry out a new cleaning frequency
It is practical.
Controller can be selected single-chip microcontroller or PLC and control chip, be realized by control program to the first driving motor 603, the
The coordinated control of two driving motors 609, drain valve 10, three color alarm lamps 12 and buzzer etc., in the present embodiment, outside rack 1
It is respectively equipped with control cabinet 14, control touch screen 15 and control button 16, realizes cleaning control operation, it should be noted that this hair
Bright function realizes that the above-mentioned control equipment relied on and computer software programs belong to common sense well known to those skilled in the art, creates
New point is the structure and new hardware annexation of cleaning machine.
The present embodiment also discloses a kind of cleaning method realized using automatic organic washing machine as described above, packet
Include following steps:
S1, the substrate product cleaned will be needed to be placed into cassette of substrates 17, and it is placed into hand basket 13 at box；
S2, appliance doors 8 are opened, the hand basket 13 equipped with substrate product is placed into the cleaning area 5a of cleaning sink 5, closed
Appliance doors 8；
S3, controller control driving device 6 act, and the hand basket 13 equipped with substrate product is mentioned glue-dispenser work by linking up with
In skill slot 3, and drive hand basket 13 in shake, scavenging period t1 are removed photoresist process up and down in the agent solution that removes photoresist；
S4, removal photoresist process after the completion of, above-mentioned hand basket 13 is mentioned in IPA technology groove 4, and and drive hand basket 13 in
Shake, scavenging period t2 are removed glue-dispenser technique up and down in IPA solution；
After the completion of S5, removal glue-dispenser technique, above-mentioned hand basket 13 is mentioned in the cleaning area 5a of cleaning sink 5, controller
It controls spray waterpipe 11 to intake, by spray head 1101 to substrate product spray cleaning in hand basket 13, until water is complete in cleaning sink 5
Full submergence hand basket 13, soaking time t3 carry out last removal IPA technique；
After the completion of S6, removal IPA technique, drain valve 10 is opened, waste water in the cleaning area 5a of cleaning sink 5 is drained, is taken
Above-mentioned hand basket 13 out, while being put into next hand basket 13 equipped with substrate to be cleaned.
In the present embodiment, scavenging period t1, t2, t3 can carry out flexibly setting and regulation according to practical cleaning situation, by
Controller control, when the scavenging period value for reaching setting, controller controls motor action, carries out the clear of next cleaning process automatically
Wash operation.
Automatic organic washing machine and cleaning method based on above structure, cleaning-machine structure is simple, small in size, realizes lining
The automatic cleaning of photoresist on bottom, saves manpower, monocycle every hand basket 13 (12 box substrate products, weight 15KG), before
Two staff are needed frequently to be transported to each technology groove 4 back and forth, large labor intensity only needs a people to be put into hand basket 13 now
In equipment, whole cleaning actions are completed using the automatic organic washing machine, greatly reduce the labor intensity of staff,
The cleaning way that manual handling product hand basket 13 carries out Manual-cleaning is compared, cleaning efficiency greatly improves, and in removal photoresist
In cleaning process of the technique with removing glue-dispenser technique, by driving product hand basket 13 in the cleaning side shaken up and down in process liquor
Formula (rinses), and the mode for being statically placed in and cleaning in technology groove 4 can only be submerged by comparing traditional hand basket 13, realizes to substrate product
Auxiliary cleaning, further improves the cleaning efficiency to substrate product, and once 12 box substrate products of cleaning need 60 minutes before,
And only needed 35 minutes now using the automatic organic washing machine cleaning, cleaning efficiency is high, substantially reduces the cleaning frequency；In addition,
The automatic organic washing machine is enclosed the sealing being set as by seal closure 2 and cleans chamber, and glue-dispenser technology groove 3 and IPA technology groove 4 are realized
With the seal isolation of external working environment, entire cleaning process cleans intracavitary progress in sealing, effectively prevents process liquor pair
The injury of human health, and the working environment for entirely cleaning workshop is very significantly improved.
Since the automatic organic washing machine structure is simple, artificial always put into material for making the cleaning equipment is 2.5 ten thousand
Member, the cleaning machine can withdraw input cost using 5 months, be tested the equipment at least and can work normally using 5 years, separate unit
Equipment can save nearly 300,000 yuan of cost of cleaning, and cleaning cost substantially reduces.
The present embodiment also discloses a kind of automatic organic washing system, as shown in Figure 10, including above-mentioned automatic organic
Cleaning machine further includes clear water storage tank 18, wastewater equalization pond 19, activated carbon adsorber 20, glue-dispenser recovery pond 21 and IPA recovery pond
22, clear water storage tank 18 be connected to by water supplying pipe 23 with spray waterpipe 11, and water supplying pipe 23 is equipped with water supply pump 24, water supply pump 24 and
Controller connection, is controlled by controller whether water supply and water supply time, wastewater equalization pond 19 are arranged by drainpipe 25 and waste water
The mouth of a river 503 is connected to, and the air intake vent 2001 of activated carbon adsorber 20 passes through the exhaust outlet 202 of waste gas exhaust pipe 26 and organic washing machine
Connection, the air outlet 2002 of activated carbon adsorber 20 are communicated with air pump 27, and glue-dispenser recovery pond 21 passes through the first devil liquor recovery pipe
28 are connected to glue-dispenser leakage fluid dram 301, and IPA recovery pond 22 is connected to by the second devil liquor recovery pipe 29 with IPA leakage fluid dram 401.
Since waste water is the ejected wash water after cleaning remains in the IPA solution on substrate product, the waste water after cleaning is through draining
Pipe 25 flows into wastewater equalization pond 19 and temporarily stores, and when to wastewater treatment in wastewater equalization pond 19, can detect the pH value of waste water, according to
The discharge of waste water can be realized after adding suitable weak base additive into wastewater equalization pond 19 and reacting according to the pH value of detection,
Treated, and waste water meets discharge standard.
Active carbon is full of in active carbon filled layer 2003 in activated carbon adsorber 20, tower body is designed as top batch turning, under
Side's discharging, exhaust gas discharge after the activated carbon adsorption of internal active carbon filled layer 2003, the gas discharged after adsorption treatment
Body meets discharge standard, and the structural schematic diagram of activated carbon adsorber 20 is as shown in figure 11；In the present embodiment, activated carbon adsorber 20
The processing air quantity for using Jiangsu Xiu Kun environmental science and technology Co., Ltd to produce is the adsorption plant of 4000CMH.
Automatic organic washing system being equipped with, while substrate is cleaned in realization automatically, convenient for in cleaning process
The waste water of generation is handled with exhaust gas, is discharged after processing, avoids environmental pollution, clean and environmental protection, while convenient for after to using
It removes photoresist the recycling storage of agent solution and IPA solution, so as to recycling and reusing.
It should be appreciated that the purposes of these embodiments is merely to illustrate the present invention and is not intended to limit protection model of the invention
It encloses.In addition, it should also be understood that, after reading the technical contents of the present invention, those skilled in the art can make the present invention each
Kind change, modification and/or variation, all these equivalent forms equally fall within guarantor defined by the application the appended claims
Within the scope of shield.
Claims (10)
1. a kind of automatic organic washing machine, it is characterised in that: including rack, the rack is equipped with seal closure, and the rack is logical
It crosses the seal closure and encloses and be set as sealing cleaning chamber, sealing cleaning is intracavitary side by side equipped with glue-dispenser technology groove, IPA technology groove
And cleaning sink, the intracavitary hand basket mechanism for being additionally provided with driving device driving of sealing cleaning, the rack are externally provided with to reality
The controller of the existing driving device control.
2. a kind of automatic organic washing machine as described in claim 1, it is characterised in that: the side of the rack is equipped with appliance doors
With push-and-pull observation window, the appliance doors are hingedly installed in the rack, and are correspondingly arranged with the cleaning sink, the push-and-pull
Observation window is slidably mounted in the rack, and the push-and-pull observation window and the glue-dispenser technology groove, the IPA technology groove pair
It should be arranged.
3. a kind of automatic organic washing machine as claimed in claim 2, it is characterised in that: the sealing of the rack other side
Air inlet, exhaust outlet, glue-dispenser leakage fluid dram and IPA leakage fluid dram are offered on cover respectively, the air inlet and the exhaust outlet are equal
It is connected to sealing cleaning chamber, the glue-dispenser leakage fluid dram is connected to the glue-dispenser technology groove, the IPA leakage fluid dram and institute
State the connection of IPA technology groove.
4. a kind of automatic organic washing machine as claimed in claim 3, it is characterised in that: partition is equipped in the cleaning sink,
The cleaning sink is divided into cleaning area and draining buffer area by the partition, and the bottom of the partition is equipped with drain valve, institute
Drain valve is stated to connect with the controller；
The bottom of the cleaning area is equipped with two positioning plates, and the two positioning plate inclinations are fixedly installed in the cell wall of the cleaning sink
On, and there is spacing compatible with hand basket width between the bottom edge of two positioning plates, the top two sides of the cleaning area are distinguished
Equipped with two spray waterpipes, two spray waterpipes are fixedly installed on the cell wall of the cleaning sink, and on the spray waterpipe
Several spray heads being connected to the spray waterpipe are uniformly provided with, the spray head has an inclination spray angles；
The bottom of the draining buffer area is equipped with a waste outlet.
5. a kind of automatic organic washing machine as claimed in claim 4, it is characterised in that: the driving device includes X-axis installation
Plate, the first sliding rail, the first driving motor, the first drive pulley, the first transmission belt, first slide, Y-axis mounting plate, the second sliding rail,
Second driving motor, the second drive pulley, the second transmission belt and second slide；
The X-axis mounting plate level is fixedly installed in the rack, and the first sliding rail level is fixedly installed in the X-axis peace
In loading board, first driving motor is fixedly installed in one end of the X-axis mounting plate, and connect with the controller, described
There are two first drive pulley is set, and wherein first drive pulley is fixedly installed in the output of first driving motor
On axis, another first drive pulley rotational installation is around in the other end of the X-axis mounting plate, the first transmission tape holder
It between two first drive pulleys, and is engaged with first drive pulley transmission, the first slide is slidably mounted on institute
It states on the first sliding rail, and is fixedly connected with first transmission belt；
The Y-axis mounting plate is fixedly installed in vertically in the first slide, and second sliding rail is fixedly installed in the Y vertically
In axle installing plate, second driving motor is fixedly installed in one end of the Y-axis mounting plate, and connect with the controller,
There are two second drive pulley is set, and wherein second drive pulley is fixedly installed in second driving motor
On output shaft, another second drive pulley rotational installation is in the other end of the Y-axis mounting plate, the second transmission tape holder
It is around between two second drive pulleys, and is engaged with second drive pulley transmission, the second slide is slidably installed
In on second sliding rail, and it is fixedly connected with second transmission belt.
6. a kind of automatic organic washing machine as claimed in claim 5, it is characterised in that: the hand basket mechanism includes hand basket arm,
The top of the hand basket arm is fixedly installed in the second slide, and the bottom end of the hand basket arm is fixedly installed with slide bar, described
Two sliding blocks being correspondingly arranged are slidably fitted on slide bar, the bottom of the sliding block is fixedly installed with hand basket hook, and two cunnings
Double end cylinder is equipped between block, the piston rod of the double end cylinder is fixedly connected with two sliding blocks respectively.
7. a kind of automatic organic washing machine as claimed in any one of claims 1 to 6, it is characterised in that: it further include warning device,
The warning device includes three color alarm lamps and buzzer, the three colors alarm lamp and the buzzer respectively with the controller
Connection.
8. a kind of automatic organic washing machine as claimed in any one of claims 1 to 6, it is characterised in that: it further include hand basket, it is described
Hand basket encloses for lattice-shaped web plate to be set, and the two sides of the hand basket all have convenient for picking and placing the opening of cassette of substrates, the hand basket
Top two sides be equipped with carrying handle, be fixedly installed with reinforcing rod in the cassette of substrates placement plate of the hand basket.
9. a kind of automatic organic washing system, it is characterised in that: including automatic organic washing machine as described in claim 1, also
Including clear water storage tank, wastewater equalization pond, activated carbon adsorber, glue-dispenser recovery pond and IPA recovery pond, the clear water storage tank passes through
Water supplying pipe is connected to spray waterpipe, and the water supplying pipe is equipped with water supply pump, and the water supply pump is connect with the controller, described
Wastewater equalization pond be connected to by drainpipe with waste outlet, the air intake vent of the activated carbon adsorber pass through waste gas exhaust pipe and
The exhaust outlet of the organic washing machine is connected to, and the air outlet of the activated carbon adsorber is communicated with air pump, the glue-dispenser recycling
Pond is connected to by the first devil liquor recovery pipe with glue-dispenser leakage fluid dram, and the IPA recovery pond is arranged by the second devil liquor recovery pipe and IPA
The connection of liquid mouth.
10. a kind of cleaning method realized using automatic organic washing machine as described in claim 1, which is characterized in that including
Following steps:
S1, the substrate product cleaned will be needed to be placed into cassette of substrates, and it is placed into hand basket at box；
S2, appliance doors are opened, the hand basket equipped with substrate product is placed into the cleaning area of cleaning sink, pass hull closure door；
S3, controller control driving device movement, are mentioned the hand basket equipped with substrate product in glue-dispenser technology groove by linking up with,
And drive hand basket in shake, scavenging period t1 are removed photoresist process up and down in the agent solution that removes photoresist；
After the completion of S4, removal photoresist process, above-mentioned hand basket is mentioned in IPA technology groove, and and drive hand basket in IPA solution
Shake, scavenging period t2 are removed glue-dispenser technique up and down；
After the completion of S5, removal glue-dispenser technique, above-mentioned hand basket is mentioned in the cleaning area of cleaning sink, controller controls shower water
Water inlet tube, by spray head to substrate product spray cleaning in hand basket, until ejected wash water trough inner water is totally submerged hand basket, soaking time
T3 carries out last removal IPA technique；
After the completion of S6, removal IPA technique, drain valve is opened, waste water in the cleaning area of cleaning sink is drained, takes out above-mentioned mention
Basket, while being put into next hand basket equipped with substrate to be cleaned.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811414839.4A CN109494179A (en) | 2018-11-26 | 2018-11-26 | A kind of automatic organic washing machine, cleaning system and cleaning method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811414839.4A CN109494179A (en) | 2018-11-26 | 2018-11-26 | A kind of automatic organic washing machine, cleaning system and cleaning method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109494179A true CN109494179A (en) | 2019-03-19 |
Family
ID=65697456
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811414839.4A Withdrawn CN109494179A (en) | 2018-11-26 | 2018-11-26 | A kind of automatic organic washing machine, cleaning system and cleaning method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109494179A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113182244A (en) * | 2021-03-29 | 2021-07-30 | 江苏亚电科技有限公司 | Photovoltaic silicon wafer cleaning method |
| CN114609811A (en) * | 2022-03-30 | 2022-06-10 | 中电创达(深圳)实业有限公司 | Large-size substrate for TFT liquid crystal panel and manufacturing method thereof |
-
2018
- 2018-11-26 CN CN201811414839.4A patent/CN109494179A/en not_active Withdrawn
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113182244A (en) * | 2021-03-29 | 2021-07-30 | 江苏亚电科技有限公司 | Photovoltaic silicon wafer cleaning method |
| CN113182244B (en) * | 2021-03-29 | 2022-10-18 | 江苏亚电科技有限公司 | Photovoltaic silicon wafer cleaning method |
| CN114609811A (en) * | 2022-03-30 | 2022-06-10 | 中电创达(深圳)实业有限公司 | Large-size substrate for TFT liquid crystal panel and manufacturing method thereof |
| CN114609811B (en) * | 2022-03-30 | 2024-04-09 | 广东灿达股份有限公司 | Large-size substrate for TFT liquid crystal panel and manufacturing method thereof |
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Application publication date: 20190319 |