CN109428513A - A kind of wireless sensing module based on wideband vibration energy collector - Google Patents

A kind of wireless sensing module based on wideband vibration energy collector Download PDF

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Publication number
CN109428513A
CN109428513A CN201710744916.1A CN201710744916A CN109428513A CN 109428513 A CN109428513 A CN 109428513A CN 201710744916 A CN201710744916 A CN 201710744916A CN 109428513 A CN109428513 A CN 109428513A
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China
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cantilever beam
energy collector
mass block
vibration energy
cantilever
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CN201710744916.1A
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Chinese (zh)
Inventor
牟笑静
周鸿�
尚正国
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Qingdao Feinisi Microelectronics Technology Co Ltd
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Qingdao Feinisi Microelectronics Technology Co Ltd
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Priority to CN201710744916.1A priority Critical patent/CN109428513A/en
Publication of CN109428513A publication Critical patent/CN109428513A/en
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/18Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
    • H02N2/186Vibration harvesters
    • H02N2/188Vibration harvesters adapted for resonant operation

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Abstract

The invention discloses a kind of wireless sensing modules based on wideband vibration energy collector, including sensor, A/D conversion module, processor, memory and wireless transmitter, the sensor is connected to the A/D conversion module, and the A/D conversion module, memory, wireless transmitter are all connected to the processor;It further include super capacitor and wideband vibration energy collector, the energy output end of the wideband vibration energy collector is connected to the energy input end of the super capacitor, and the super capacitor is the sensor, A/D conversion module, processor, memory and wireless transmitter provide power supply.The present invention collects energy by using wideband vibration energy collector and provides electric energy for each section, so that wireless sensing module is simplified to a small functional module, the integrated of function is realized, application cost is reduced, and can be used as independent product and produced and worked.

Description

A kind of wireless sensing module based on wideband vibration energy collector
Technical field
The present invention relates to wireless sensor technology fields, and in particular to a kind of wireless biography based on wideband vibration energy collector Feel module.
Background technique
[developing direction of wireless sensing module is miniaturization to reduce application cost, therefore also power pack is required to have The features such as small in size, light-weight, the service life is long.However, the volume of the power pack of existing wireless sensing module is all larger, and not It can continuously power, need periodically to be maintained, application cost is higher.
Summary of the invention
In view of the deficiencies of the prior art, the present invention is intended to provide a kind of wireless sensing mould of wideband vibration energy collector Block collects energy by using wideband vibration energy collector and provides electric energy for each section, so that wireless sensing module simplifies At a small functional module, realize the integrated of function, reduce application cost, and can be used as independent product into Row production and work.
To achieve the goals above, the present invention adopts the following technical scheme that;
A kind of wireless sensing module based on wideband vibration energy collector, including sensor, A/D conversion module, processor, deposit Reservoir and wireless transmitter, the sensor are connected to the A/D conversion module, the A/D conversion module, memory, wireless Transmitter is all connected to the processor;It further include super capacitor and wideband vibration energy collector;The wideband vibration energy Collector includes cantilever beam structure, and the cantilever beam structure is mainly made of cantilever beam, mass block and piezoelectric layer, the piezoelectric layer It from top to bottom successively include top electrode, piezoelectric material and lower electrode;The piezoelectric layer is set to the surface of the cantilever beam, the matter Gauge block is connected to the cantilever beam;The wideband vibration energy collector includes at least two cantilever beam structures, each cantilever beam It is coupled between structure;The piezoelectric layer of the wideband vibration energy collector is electrically connected at the super electricity by rectification circuit Hold, the super capacitor is then sensor, A/D conversion module, processor, memory and wireless transmitter provide electric energy.
Further, the overarm arm on each suspension beam structure is coupled by crossbeam, and the crossbeam is connected to secondary cantilever One end of beam;The secondary cantilever beam is equipped with piezoelectric layer, and the other end is connected with another mass block.
As an implementation, the overarm arm on each suspension beam structure is coupled by crossbeam, and the crossbeam also connects It is connected to one end of secondary cantilever beam;The secondary cantilever beam is equipped with piezoelectric layer, and the other end is connected with another mass block;Often The cantilever beam of a cantilever beam structure is connected to same mass block, which is also attached to the crossbeam.
As another embodiment, the cantilever beam of one of cantilever design is the frame-like of outer rim structure triangular in shape The cantilever beam of structure, the structure triangular in shape of another cantilever design is located in its frame-like structure;The outer rim knot triangular in shape The free end of the cantilever beam of the frame-like structure of structure is connected to a mass block, and the fixing end of the cantilever beam of another triangular structure Fixing end be connected to the mass block, free end is then connected with another mass block.
As another embodiment, cantilever beam structure triangular in shape, the free end side of being connected to of one of cantilever beam The mass block of frame shape is connected to the fixing end of the cantilever beam of another triangular structure in the mass block of the block form, should The free end of cantilever beam is connected with mass block.
As another embodiment, in parallel between each cantilever beam structure, the mass block connection of each cantilever beam structure In the free end of the cantilever beam and the free end of each cantilever beam is by spring connection, and the coefficient of elasticity ratio of the spring is every The coefficient of elasticity of a cantilever beam is small, and resonance frequency is different.
As another embodiment, in parallel by spring between each cantilever beam structure, and each cantilever beam structure Mass block is set to the middle part of cantilever beam, and the both ends of the spring are connected to the cantilever of two coupled cantilever beam structures The middle part of beam;The piezoelectric layer is covered with the surface of the cantilever beam;The coefficient of elasticity of the spring is less than the bullet of the cantilever beam Property coefficient.
As another embodiment, all cantilever beam structures form an array, lead between each cantilever beam structure Lintel connection.
The beneficial effects of the present invention are:
1, energy is collected by using wideband vibration energy collector and provide electric energy for each section, so that wireless sensing module is simple It is melted into a small functional module, the integrated of function is realized, reduces application cost, and can be used as independent product It is produced and is worked.
2, wideband vibration energy collector uses the connection type of cantilever beam multistage coupling, and makes the bullet between not at the same level Property coefficient is different, to widen the frequency range of energy harvester.
Detailed description of the invention
Fig. 1 is general structure schematic diagram of the invention;
Fig. 2 is that schematic diagram is conceived in the overall design of structure of the invention;
Fig. 3 is AA ' sectional view in Fig. 2;
Fig. 4 is the electric energy schematic diagram of the collection of energy output of structure shown in Fig. 2.
Fig. 5-Figure 14 is the structural schematic diagram of embodiment 1-10;
Figure 15-16 is the simulation result schematic diagram of embodiment 1;
Figure 17-18 is the simulation result schematic diagram of embodiment 3;
Figure 19-20 is the simulation result schematic diagram of embodiment 4;
Figure 21-22 is the simulation result schematic diagram of embodiment 5;
Figure 23-24 is the simulation result schematic diagram of embodiment 8;
Figure 25-26 is the simulation result schematic diagram of embodiment 9;
Figure 27-28 is the simulation result schematic diagram of embodiment 10;
Figure 29 is the circuit diagram of the embodiment of the present invention.
Specific embodiment
Below with reference to attached drawing, the invention will be further described, it should be noted that the present embodiment is with this technology side Premised on case, the detailed implementation method and specific operation process are given, but the scope of the present invention is not limited to the present embodiment.
As shown in Figure 1, a kind of wireless sensing module based on wideband vibration energy collector, including sensor 101, A/D Conversion module 106, processor, memory (processor and memory are integral type module 102 in the present embodiment) and nothing Line transmitter 104, the sensor 101 are connected to the A/D conversion module 106, the A/D conversion module 106, memory, Wireless transmitter 104 is all connected to the processor.It further include super capacitor 105 and wideband vibration energy collector 103.
As Figure 2-3, the wideband vibration energy collector, including cantilever beam structure 1, the cantilever beam structure 1 are main It to be made of cantilever beam 11, mass block 12 and piezoelectric layer, the piezoelectric layer successively includes top electrode 13, piezoelectric material from top to bottom 14 and lower electrode 15,16 show the fixing end of cantilever beam 11, for cantilever beam structure to be fixed on carrier;The piezoelectric layer Set on the surface of the cantilever beam 11, the mass block 12 is connected to the cantilever beam 11;The wideband vibration energy collector Including at least two cantilever beam structures 1, it is coupled between each cantilever beam structure 1.
Super capacitor connects that circuit diagram is as shown in figure 29, and U is energy harvester, D1-D4 with wideband vibration energy collector For diode, C is super capacitor.D1-D4 forms rectification circuit, the alternating voltage that piezoelectric layers all in energy harvester are exported DC voltage is rectified into as super capacitor C charging.Super capacitor C is electrical component power supply all in wireless sensing module.
When the wireless sensing module works, sensor passes the data sensed after the conversion of A/D conversion module It transports in processor, processor is transmitted to memory and is stored, and is sent to exterior terminal by wireless transmitter.
It should be noted that the material of cantilever beam, secondary cantilever beam and mass block can be silicon Si, top electrode and lower electrode can Using aluminium Al, nickel, molybdenum Mo etc., PZT thin film PZT, aluminium nitride film AlN, zinc-oxide film is can be used in piezoelectric material ZnO, aluminium nitride scandium film ScxAl1-xN, PVDF thin film, PVDF-TrFE film and PDMS film etc..
When vibrational energy collector senses outside energy and mass block vibration is made to get up, mass block drives cantilever beam Vibration, cantilever beam and then drives piezoelectric material to occur bending and deformation, and piezoelectric material will appear the phenomenon of piezoelectricity, and upper/lower electrode is by piezoelectricity Material electric charge transfer generated is gone out, to realize energy acquisition function.
Wideband principle: when two cantilever beam as shown in Figure 2 is connected using crossbeam 2, and two beams resonance frequency it is different but When close, two cantilever beams will generate coupling phenomenon, and side vibration will drive another party's vibration, and this to be coupled in collection of energy defeated It will appear phenomenon as shown in Figure 4 on electric energy out.In Fig. 4, all there are two wave crests in every curve, and in broader frequency It can be collected into energy within the scope of rate, realize wideband effect.In addition, the vibration with external environment is more violent, appearance Wave crest amplitude is bigger, and the energy being collected into is also bigger.
Embodiment 1
As shown in figure 5, the overarm arm 11 on each suspension beam structure 1 is coupled by crossbeam 2, mass block is connected on free end 12.The crossbeam 2 is connected to one end of secondary cantilever beam 3;Overarm arm 11 is equipped with piezoelectric layer, and composition is as shown in Figure 3.Described time Grade cantilever beam 3 is equipped with piezoelectric layer, and the other end is connected with another mass block 31.As shown in Figure 5.The secondary cantilever beam The composition of piezoelectric layer is identical with the piezoelectric layer set-up mode of cantilever design shown in Fig. 3.It in the present embodiment further include having outline border Frame 101, the fixing end of the cantilever beam of each cantilever design are both secured to the outer framework 101.
As shown in figures 15-16, Figure 15 show the model of embodiment 1 by obtained by emulation to the simulation result of embodiment 1 Deformation map share at two that there are resonance according to showing in Figure 15, respectively in cantilever beam end and beam-ends (such as figure institute Show).Figure 16 is the simulation result diagram of Figure 15 institute representation model, and the abscissa in figure is frequency, and ordinate is amplitude.It can be with from figure Find out that there are resonance points at two, and in the frequency separation between resonance point twice, the output electric energy of energy harvester all compares Greatly, reach wideband purpose.
Embodiment 2
As shown in fig. 6, the overarm arm 11 on each suspension beam structure 1 is coupled by crossbeam 2, being also attached to for the crossbeam 2 is secondary One end of grade cantilever beam 3;The secondary cantilever beam 3 is equipped with piezoelectric layer, and the other end is connected with another mass block 31;Each The cantilever beam 11 of cantilever beam structure 1 is connected to same mass block 12, which is also attached to the crossbeam 2.Overarm arm 11 It is equipped with piezoelectric layer, composition is as shown in Figure 3.The set-up mode of the piezoelectric layer of the secondary cantilever beam and cantilever knot shown in Fig. 3 The piezoelectric layer set-up mode of structure is identical.In the present embodiment, the free end of the 2 connecting cantilever beam of crossbeam, and mass block 12 It is superimposed on crossbeam.It in the present embodiment further include having outer framework 101, the fixing end of the cantilever beam of each cantilever design is fixed In the outer framework 101.
Embodiment 3
The present embodiment principle is similar to Example 2, as shown in fig. 7, being essentially to further increase on the basis of embodiment 2 The quantity of cantilever beam 11 and secondary cantilever beam 3 (cantilever beam quantity is four, and secondary cantilever beam quantity is two), cantilever beam 11 Fixing end be connected to frame 101, free end is commonly connected to crossbeam 2, and shares same mass block 12.In the present embodiment In, the mass block 12 is superimposed on the free end and crossbeam 2 of cantilever beam 11.Overarm arm 11 is equipped with piezoelectric layer, composition such as Fig. 3 It is shown.
Shown in the simulation result diagram 17-18 of embodiment 3, the model that Figure 17 show embodiment 1 is obtained by emulating Deformation map, Figure 18 for Figure 17 institute representation model simulation result diagram.
Embodiment 4
In the present embodiment, the cantilever beam 11 structure triangular in shape.As shown in figure 8, the cantilever of one of cantilever design Beam 11 is the frame-like structure of outer rim structure triangular in shape, and the cantilever beam 11 of the structure triangular in shape of another cantilever design is located at it In frame-like structure;The free end of the cantilever beam 11 of the frame-like structure of the outer rim structure triangular in shape is connected to a mass block 12, and the fixing end of the fixing end of the cantilever beam 11 of another triangular structure is connected to the mass block 12, free end is then connected with Another mass block 12.The fixing end of cantilever beam 11 is connected to outer framework 101.Overarm arm 11 is equipped with piezoelectric layer, forms such as Fig. 3 institute Show.
For the simulation result diagram of embodiment 4 as shown in 19-20, Figure 19 show the model of embodiment 1 by obtained by emulation Deformation map, Figure 20 for Figure 19 institute representation model simulation result diagram.
Embodiment 5
In the present embodiment, as shown in figure 9, the structure triangular in shape of cantilever beam 11.The free end of cantilever beam 11 is connected to square frame-shaped The mass block 12 of shape, is connected to the fixing end of the cantilever beam 11 of triangular structure in the mass block 12, the cantilever beam 11 from Mass block 12 is connected with by end.The mass block 12 is equivalent to crossbeam and has coupled two cantilever beams 11.Positioned at the matter of block form The fixing end of cantilever beam 11 outside gauge block 12 is connected to outer framework 101.Overarm arm 11 is equipped with piezoelectric layer, and composition is as shown in Figure 3.
As shown in fig. 21-22, Figure 21 show the model of embodiment 1 by obtained by emulation to the simulation result of embodiment 5 Deformation map, Figure 22 for Figure 21 institute representation model simulation result diagram.
Embodiment 4 and the structure of implementation 5 belong to cantilever beam tandem connection type, and two cantilever beams are not directly connected, and second Grade cantilever beam is fixed on first order mass block (resistance cascade in similar circuit), and has piezoelectricity function on each cantilever beam Vibrational energy is switched to electric energy by energy thin-film material.
Embodiment 6
As shown in Figure 10, in parallel between each cantilever beam structure 11, the mass block 12 of each cantilever beam structure 11 is connected to described The free end of cantilever beam 11 and the free end of each cantilever beam 11 pass through spring 5 and connect, it is contemplated that two cantilever beams must elasticity Connection, which is just able to achieve, opens up yupin effect, and the coefficient of elasticity of the spring must be smaller than the coefficient of elasticity of each cantilever beam.Pass through control Cantilever beam improve quality block size it is different so that the natural resonance frequency of two cantilever beams is different.Piezoelectric layer 4 is set to cantilever beam 11 surface, composition are as shown in Figure 3.The fixing end of cantilever beam 11 is connected to outer framework 101.Further, 5 shape of spring For S-shaped bending.
Embodiment 7
The structure of the present embodiment and the structure of embodiment 6 are essentially identical, but 5 shape of the spring is rectangle frame rack-like, is such as schemed Shown in 11.
Embodiment 8
As shown in figure 12, in parallel by spring 5 between each cantilever beam structure, and the mass block 12 of each cantilever beam structure is all provided with In the middle part of cantilever beam 11, the both ends of the spring 5 are connected to the cantilever beam 11 of two coupled cantilever beam structures Middle part;The piezoelectric layer 4 is covered with the surface of the cantilever beam (composition is as shown in Figure 3);The coefficient of elasticity of the spring 5 is less than institute State the coefficient of elasticity of cantilever beam 11.The fixing end of cantilever beam 11 is connected to outer framework 101.Further, the spring is that S-shaped is curved Curved or rectangle frame rack-like (being S-shaped bending in the present embodiment).
Shown in the simulation result diagram 23-24 of embodiment 8, the model that Figure 23 show embodiment 1 is obtained by emulating Deformation map, Figure 24 for Figure 23 institute representation model simulation result diagram.
Embodiment 9
The present embodiment and the structure of embodiment 8 are essentially identical, and difference essentially consists in there are three cantilever beam structures in parallel, such as Figure 13 It is shown.
Shown in the simulation result diagram 25-26 of embodiment 9, the model that Figure 25 show embodiment 1 is obtained by emulating Deformation map, Figure 25 for Figure 26 institute representation model simulation result diagram.
Embodiment 10
All cantilever beam structures 1 form an array, are connected between each cantilever beam structure 1 by beam 6.As shown in figure 14.
Shown in the simulation result diagram 27-28 of embodiment 10, the model that Figure 27 show embodiment 1 is obtained by emulating Deformation map, Figure 27 for Figure 28 institute representation model simulation result diagram.
For those skilled in the art, it can be provided various corresponding according to above technical solution and design Change and modification, and all these change and modification, should be construed as being included within the scope of protection of the claims of the present invention.

Claims (8)

1. a kind of wireless sensing module based on wideband vibration energy collector, including sensor, A/D conversion module, processor, Memory and wireless transmitter, the sensor are connected to the A/D conversion module, the A/D conversion module, memory, nothing Line transmitter is all connected to the processor;It is characterized in that, further including super capacitor and wideband vibration energy collector;It is described Wideband vibration energy collector includes cantilever beam structure, and the cantilever beam structure is mainly by cantilever beam, mass block and piezoelectric layer group At the piezoelectric layer successively includes top electrode, piezoelectric material and lower electrode from top to bottom;The piezoelectric layer is set to the cantilever beam Surface, the mass block is connected to the cantilever beam;The wideband vibration energy collector includes at least two cantilever beam knots Structure is coupled between each cantilever beam structure;The piezoelectric layer of the wideband vibration energy collector is electrically connected by rectification circuit It is connected to the super capacitor, the super capacitor is then sensor, A/D conversion module, processor, memory and wireless transmitter Electric energy is provided.
2. the wireless sensing module according to claim 1 based on wideband vibration energy collector, which is characterized in that each Overarm arm on suspension beam structure is coupled by crossbeam, and the crossbeam is connected to one end of secondary cantilever beam;The secondary cantilever Beam is equipped with piezoelectric layer, and the other end is connected with another mass block.
3. the wireless sensing module according to claim 1 based on wideband vibration energy collector, which is characterized in that each Overarm arm on suspension beam structure is coupled by crossbeam, one end for being also attached to secondary cantilever beam of the crossbeam;The secondary Cantilever beam is equipped with piezoelectric layer, and the other end is connected with another mass block;The cantilever beam of each cantilever beam structure is connected to together One mass block, the mass block are also attached to the crossbeam.
4. the wireless sensing module according to claim 1 based on wideband vibration energy collector, which is characterized in that wherein The cantilever beam of one cantilever design is the frame-like structure of outer rim structure triangular in shape, the structure triangular in shape of another cantilever design Cantilever beam be located in its frame-like structure;The free end of the cantilever beam of the frame-like structure of the outer rim structure triangular in shape connects It is connected to a mass block, and the fixing end of the fixing end of the cantilever beam of another triangular structure is connected to the mass block, free end is then It is connected with another mass block.
5. the wireless sensing module according to claim 1 based on wideband vibration energy collector, which is characterized in that cantilever Beam structure triangular in shape, the free end of one of cantilever beam are connected to the mass block of block form, the matter of the block form The fixing end of the cantilever beam of another triangular structure is connected in gauge block, the free end of the cantilever beam is connected with mass block.
6. the wireless sensing module according to claim 1 based on wideband vibration energy collector, which is characterized in that each In parallel between cantilever beam structure, the mass block of each cantilever beam structure is connected to the free end of the cantilever beam and each cantilever The free end of beam is connected by spring, and the coefficient of elasticity of the spring is smaller than the coefficient of elasticity of each cantilever beam, and resonance frequency It is different.
7. the wireless sensing module according to claim 1 based on wideband vibration energy collector, which is characterized in that each By spring parallel connection between cantilever beam structure, and the mass block of each cantilever beam structure is set to the middle part of cantilever beam, the bullet The both ends of spring are connected to the middle part of the cantilever beam of two coupled cantilever beam structures;The piezoelectric layer is covered with the cantilever The surface of beam;The coefficient of elasticity of the spring is less than the coefficient of elasticity of the cantilever beam.
8. the vibrational energy collector of multistage coupled structure according to claim 1, which is characterized in that all cantilever beams One array of structure composition passes through beam between each cantilever beam structure and connects.
CN201710744916.1A 2017-08-25 2017-08-25 A kind of wireless sensing module based on wideband vibration energy collector Pending CN109428513A (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101017989A (en) * 2007-02-28 2007-08-15 西南科技大学 Self-supply micro radio sensing network node based on the piezoelectric vibration power generation
CN201656813U (en) * 2010-04-28 2010-11-24 扬州博达电气设备有限公司 Node of wireless sensor networks using piezoelectric generator power supply
US20150145376A1 (en) * 2013-11-22 2015-05-28 Agency For Science, Technology And Research Energy harvesting device and method for forming the same
CN105337531A (en) * 2014-06-25 2016-02-17 华为技术有限公司 Piezoelectric power generation device
CN207304408U (en) * 2017-08-25 2018-05-01 青岛因菲尼思微电子科技有限公司 A kind of wireless sensing module based on wideband vibration energy collector

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101017989A (en) * 2007-02-28 2007-08-15 西南科技大学 Self-supply micro radio sensing network node based on the piezoelectric vibration power generation
CN201656813U (en) * 2010-04-28 2010-11-24 扬州博达电气设备有限公司 Node of wireless sensor networks using piezoelectric generator power supply
US20150145376A1 (en) * 2013-11-22 2015-05-28 Agency For Science, Technology And Research Energy harvesting device and method for forming the same
CN105337531A (en) * 2014-06-25 2016-02-17 华为技术有限公司 Piezoelectric power generation device
CN207304408U (en) * 2017-08-25 2018-05-01 青岛因菲尼思微电子科技有限公司 A kind of wireless sensing module based on wideband vibration energy collector

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Application publication date: 20190305