CN109407328A - The separately machined light splitting optical path device of multichannel galvanometer and laser process equipment - Google Patents
The separately machined light splitting optical path device of multichannel galvanometer and laser process equipment Download PDFInfo
- Publication number
- CN109407328A CN109407328A CN201811416398.1A CN201811416398A CN109407328A CN 109407328 A CN109407328 A CN 109407328A CN 201811416398 A CN201811416398 A CN 201811416398A CN 109407328 A CN109407328 A CN 109407328A
- Authority
- CN
- China
- Prior art keywords
- optical path
- laser
- galvanometer
- multichannel
- light splitting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 64
- 238000000034 method Methods 0.000 title claims abstract description 17
- 238000001228 spectrum Methods 0.000 claims abstract description 17
- 230000010287 polarization Effects 0.000 claims description 11
- 239000004744 fabric Substances 0.000 claims 1
- 244000309464 bull Species 0.000 abstract description 4
- 230000000694 effects Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 230000002452 interceptive effect Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012913 prioritisation Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/14—Beam splitting or combining systems operating by reflection only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
- B23K26/0673—Dividing the beam into multiple beams, e.g. multifocusing into independently operating sub-beams, e.g. beam multiplexing to provide laser beams for several stations
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The present invention relates to technical field of laser processing, provide a kind of separately machined light splitting optical path device of multichannel galvanometer, including multiple spectrum groupwares for reflecting and transmiting the laser beam after receiving, the first optical path is formed transmitted through the laser beam after each spectrum groupware, each spectrum groupware reflects the laser beam in first optical path and forms the second optical path；Each spectrum groupware includes the adjustment part for adjusting the power proportions of laser in first optical path；The shutdown part for selecting shutdown laser beam is equipped in each second optical path.The present invention by adjusting the adjustable laser of part power proportions, the power of laser can also be effectively utilized when realizing that bull is separately machined, and matching deflection can be carried out according to map file in process by shutdown part when light being needed to turn off, equivalent implementation branch external control laser function, parameter that can be different with multichannel simultaneous processing can also be realized while efficiently using the power of laser and not interfered between each branch.
Description
Technical field
The present invention relates to technical field of laser processing, the separately machined light splitting optical path device of specially a kind of multichannel galvanometer and
Laser process equipment.
Background technique
Beam splitting system is mainly energy light splitting and time light splitting, individual energy light splitting on the process equipment of laser light splitting at present
System effectiveness is higher, and can efficiently use the power of laser, but can only realize that multi-head synchronous is processed, and can not achieve independent add
Work, and the timesharing that bull may be implemented in time light splitting is separately machined, but can occupy whole outputs of laser every time, it can not
Effectively utilize the power of laser.
Summary of the invention
The purpose of the present invention is to provide a kind of separately machined light splitting optical path device of multichannel galvanometer and laser process equipment,
By adjusting the power proportions of the adjustable laser of part, laser can also be effectively utilized when realizing that bull is separately machined
The power of device, and matching deflection, equivalent reality can be carried out according to map file in process by shutdown part when light being needed to turn off
Existing branch external control laser function, parameter that can be different with multichannel simultaneous processing, while efficiently using the power of laser also
It may be implemented not interfere between each branch.
To achieve the above object, the embodiment of the present invention provides the following technical solutions: a kind of separately machined light splitting of multichannel galvanometer
Light path device, including multiple spectrum groupwares for reflecting and transmiting the laser beam after receiving, transmitted through each light splitting group
Laser beam after part forms the first optical path, and each spectrum groupware reflects the laser beam in first optical path and forms the second light
Road；Each spectrum groupware includes the adjustment part for adjusting the power proportions of laser in first optical path；Each institute
State the shutdown part being equipped in the second optical path for selecting shutdown laser beam.
Further, each adjustment part includes polarization splitting prism and rotatable zero-order half-wave piece, and described zero
Grade half-wave plate and the polarization splitting prism are successively arranged along the direction of first optical path, and the described in second optical routing
It is drawn in one polarization splitting prism.
Further, each adjustment part also includes the first deflection electricity for driving the zero-order half-wave piece rotation
Machine, the quantity of the zero-order half-wave piece is identical as the quantity of first deflection motor and corresponds.
Further, each shutdown part includes light-blocking block and rotatable first total reflective mirror, and described first is all-trans
There is the channel passed through for the laser beam after light splitting before mirror and the light-blocking block.
Further, each shutdown part further includes the second deflection electricity for driving the first total reflective mirror rotation
Machine, the quantity of first total reflective mirror is identical as the quantity of second deflection motor and corresponds.
Further, when each first total reflective mirror rotates, one end far from the adjustment part is towards close to described light-blocking
The direction of block is mobile.
It further, further include the second total reflective mirror, the laser beam that second reflecting mirror reflects in first optical path is formed
Third optical path；Multiple adjustment parts are successively arranged, and second total reflective mirror is located at the end of each adjustment part arrangement.
The embodiment of the present invention provides a kind of another technical solution: laser process equipment, including for emitting laser beams
Laser, further includes a kind of above-mentioned separately machined light splitting optical path device of multichannel galvanometer, and the spectrum groupware has described in reception
The receiving end of the laser of laser transmitting.
Further, further include with a plurality of second optical path multiple scanning galvanometers correspondingly, and can control each institute
State the controller that shutdown part and each scanning galvanometer work independently；Each scanning galvanometer is set to corresponding described
In second optical path, and it is located at the light-emitting window of the shutdown part.
It further, further include that multiple processing platforms, each processing are flat correspondingly with multiple scanning galvanometers
Platform is set at the light-emitting window of the corresponding scanning galvanometer.
Compared with prior art, the beneficial effects of the present invention are: by adjusting the adjustable laser of part power proportions, can
The power of laser can also be effectively utilized when realizing that bull is separately machined, and can be according to processed by shutdown part
Map file carries out matching deflection in journey when light being needed to turn off, and equivalent implementation branch external control laser function can be with multichannel simultaneous processing
Different parameters can also be realized while efficiently using the power of laser and not interfered between each branch.
Detailed description of the invention
Fig. 1 is a kind of schematic diagram of laser process equipment provided in an embodiment of the present invention；
Fig. 2 is a kind of laser beam shutdown of separately machined light splitting optical path device of multichannel galvanometer provided in an embodiment of the present invention
Schematic diagram；
In appended drawing reference: 10- zero-order half-wave piece；11- polarization splitting prism；20- light-blocking block；The first total reflective mirror of 21-；22-
Channel；The second total reflective mirror of 3-；The first optical path of 4-；The second optical path of 5-；6- third optical path；7- scanning galvanometer；8- processing platform；9- swashs
Light device；Laser beam after a- light splitting；A- closes light；B- opens the light.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts all other
Embodiment shall fall within the protection scope of the present invention.
Referring to Fig. 1, the embodiment of the present invention provides a kind of separately machined light splitting optical path device of multichannel galvanometer, including for anti-
The multiple spectrum groupwares for penetrating and transmiting the laser beam after receiving form first transmitted through the laser beam after each spectrum groupware
Optical path 4, each spectrum groupware reflect the laser beam in first optical path 4 and form the second optical path 5；Each light splitting group
Part includes the adjustment part for adjusting the power proportions of laser in first optical path 4；It is all provided in each second optical path 5
There is the shutdown part for selecting shutdown laser beam.In the present embodiment, laser in laser 9 after issuing, by multiple light splitting
Component, a part of transmissive form the first optical path 4, i.e. main optical path, and another part has been reflected to form a plurality of
Two optical paths 5, i.e. branch.Each spectrum groupware can separate a branch, and the laser that then they are transmitted forms
First optical path 4.During light splitting, the power proportions of the laser in the first optical path 4 can be rapidly adjusted by adjusting part,
So that the laser there can be specified power proportions after assigning in branch, therefore can also have when realizing separately machined
Effect utilizes the power of laser 9.In addition, being free to selection shutdown or by swashing by turning off part during light splitting
Light beam.
The following are specific embodiments:
As the prioritization scheme of the embodiment of the present invention, referring to Fig. 1, each adjustment part includes polarization splitting prism
11 and rotatable zero-order half-wave piece 10, the zero-order half-wave piece 10 and the polarization splitting prism 11 are along first optical path
4 direction is successively arranged, and second optical path 5 in first polarization splitting prism 11 by drawing.In the present embodiment, lead to
It crosses polarization splitting prism and realizes light splitting, when the power proportions for needing to carry out branch laser adjust, by rotating zero-order half-wave piece
10 can rapidly reach purpose to adjust.
Above scheme is advanced optimized, referring to Fig. 1, each adjustment part is also included for driving the zero level half
Wave plate 10 rotate the first deflection motor, the quantity of the zero-order half-wave piece 10 it is identical as the quantity of first deflection motor and
It corresponds.In the present embodiment, above-mentioned adjustment can by manually adjusting, can also through this embodiment in first partially
Rotating motor is adjusted, and realizes automatic adjustment.
As the prioritization scheme of the embodiment of the present invention, Fig. 1 and Fig. 2 are please referred to, each shutdown part includes light-blocking block
20 and rotatable first total reflective mirror 21, have for laser after light splitting before first total reflective mirror 21 and the light-blocking block 20
The channel 22 of beam passed through.In the present embodiment, the shutdown of laser by light-blocking block 20 and rotatable first total reflective mirror 21 come
Cooperation is realized, wherein has the channel 22 passed through for laser beam between light-blocking block 20 and the first total reflective mirror 21, specifically, such as
Shown in Fig. 2, having when light-blocking block 20 and the first total reflective mirror 21 are arranged in parallel, between them can be for the laser beam a after light splitting
By channel 22, as open the light B, and when the first total reflective mirror 21 rotation when, the laser beam of light splitting will be reflected away, Bu Huizai
It enters in the position of laser processing, as pass light A.And the laser beam reflected can be blocked by setting this light-blocking block 20.
Above scheme is advanced optimized, each shutdown part further includes for driving first total reflective mirror 21 to rotate
The second deflection motor, the quantity of first total reflective mirror 21 it is identical as the quantity of second deflection motor and correspond.
In the present embodiment, the second deflection motor and the first deflection motor are the motor of phase same-action, just repeat no more its effect.Herein
Point first, second only to facilitate distinguish, convenient for description.
Above scheme is advanced optimized, referring to Fig. 1, when each first total reflective mirror 21 rotates, far from the tune
One end of one integral piece is towards close to the movement of the direction of the light-blocking block 20.In the present embodiment, the rotation of the first total reflective mirror 21 is defined
Direction, to guarantee that the laser of reflection can have light-blocking block 20 to block.It is of course also possible in the other side of first total reflective mirror 21
It also is provided with light-blocking block 20, can so guarantee to rotate regardless of the first total reflective mirror 21 and (howsoever turn, it is all bottom end towards leaning on
The direction of nearly light-blocking block 20 is mobile), it can guarantee there is light-blocking block 20 to block.But should be noted that two light-blocking blocks 20 it
Between distance be greater than total reflective mirror length, with prevent the first total reflective mirror 21 rotation when light-blocking block 20 it is caused to interfere.
Above scheme is advanced optimized, referring to Fig. 1, further including the second total reflective mirror 3, described in the second reflecting mirror reflection
Laser beam in first optical path 4 forms third optical path 6；Multiple adjustment parts are successively arranged, and second total reflective mirror 3 is located at each
The end of the adjustment part arrangement.In the present embodiment, third optical path 6 and the second above-mentioned optical path 5 belong to light splitting branch, take
Second and third be intended merely to distinguish, convenient for description, the second total reflective mirror 3 and the first total reflective mirror 21 are also identical effect, are defined
The one the second also for difference.And the third branch is from the reflection of the second total reflective mirror 3, it is by the adjustment part close to it
Laser 9 in its branch is adjusted, but adjustment herein is proximate to its branch and adjusts simultaneously with the branch.This
Also it is still equipped with shutdown part in three branches, can be used to turn off laser beam.
The embodiment of the present invention provides a kind of laser process equipment, referring to Fig. 1, including laser for emitting laser beams
9 and a kind of above-mentioned separately machined light splitting optical path device of multichannel galvanometer, the spectrum groupware, which has, to be received the laser 9 and sends out
The receiving end for the laser penetrated.In the present embodiment, laser 9 is used to emit laser beam, after it is received by above-mentioned device
It is divided, and this equipment is made to have had both the working power of laser and shutdown point in each branch of adjustment of above-mentioned apparatus
The function of laser beam a after light.
Above scheme is advanced optimized, referring to Fig. 1, this equipment further includes corresponding with a plurality of second optical path 5
Multiple scanning galvanometers 7, and can control it is each it is described shutdown part and each scanning galvanometer 7 work independently controller.Its
In, each scanning galvanometer 7 is set in corresponding second optical path 5, and is located at the light-emitting window of the shutdown part.
In the present embodiment, each branch is equipped with a scanning galvanometer 7, for processing to map file.In this laser process equipment
In, processing operation is controlled by controller, it can be individually controlled the shutdown of each shutdown part and be individually controlled each
The processing of scanning galvanometer, specifically, each galvanometer can be with independent control, according to processing map file parameter, together when each branch is processed
When by its with shutdown part control signal match, the separately machined control of branch is realized in the shutdown of controlling brancher laser, with
Achieve the purpose that not interfering between each branch separately machined.Controller is able to carry out simple programming, the map file that needs are processed
It pre-deposits in controller, when needing to process any map file, which processing program is just accordingly selected, it can be according to this
It processes map file parameter and realizes non-interfering work between each scanning galvanometer, and then realize in the same time, accomplish not same
The processing of product.
Above scheme is advanced optimized, referring to Fig. 1, this equipment further includes corresponding with multiple scanning galvanometers 7
Multiple processing platforms 8, each processing platform 8 be set to the corresponding scanning galvanometer 7 light-emitting window at.In this reality
It applies in example, processing platform 8 is for disposing workpiece, and how many a processing platforms 8 represent being capable of the how many a works of simultaneous processing
Part.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
A variety of variations, modification, replacement can be carried out to these embodiments without departing from the principles and spirit of the present invention by understanding
And modification, the scope of the present invention is defined by the appended.
Claims (10)
1. a kind of separately machined light splitting optical path device of multichannel galvanometer, including for reflecting and transmiting the multiple of the laser beam after receiving
Spectrum groupware, it is characterised in that: form the first optical path, each light splitting transmitted through the laser beam after each spectrum groupware
Component reflects the laser beam in first optical path and forms the second optical path；Each spectrum groupware includes described for adjusting
The adjustment part of the power proportions of laser in first optical path；It is equipped in each second optical path for selecting shutdown laser beam
Turn off part.
2. the separately machined light splitting optical path device of multichannel galvanometer as described in claim 1, it is characterised in that: each adjustment part
It include polarization splitting prism and rotatable zero-order half-wave piece, the zero-order half-wave piece and the polarization splitting prism are along institute
The direction for stating the first optical path is successively arranged, and is drawn in the first polarization splitting prism described in second optical routing.
3. the separately machined light splitting optical path device of multichannel galvanometer as claimed in claim 2, it is characterised in that: each adjustment part
Also include the first deflection motor for driving zero-order half-wave piece rotation, the quantity of the zero-order half-wave piece and described the
The quantity of one deflection motor is identical and corresponds.
4. the separately machined light splitting optical path device of multichannel galvanometer as described in claim 1, it is characterised in that: each shutdown part
Include light-blocking block and rotatable first total reflective mirror, has before first total reflective mirror and the light-blocking block for after light splitting
The channel that passes through of laser beam.
5. the separately machined light splitting optical path device of multichannel galvanometer as claimed in claim 4, it is characterised in that: each shutdown part
It further include the second deflection motor for driving first total reflective mirror rotation, the quantity of first total reflective mirror and described the
The quantity of two deflection motors is identical and corresponds.
6. the separately machined light splitting optical path device of multichannel galvanometer as claimed in claim 4, it is characterised in that: each described first is complete
When anti-mirror rotates, one end far from the adjustment part is towards close to the movement of the direction of the light-blocking block.
7. the separately machined light splitting optical path device of multichannel galvanometer as described in claim 1, it is characterised in that: further include second being all-trans
Mirror, second reflecting mirror reflect the laser beam in first optical path and form third optical path；Multiple adjustment parts are successively arranged
Cloth, second total reflective mirror are located at the end of each adjustment part arrangement.
8. a kind of laser process equipment, including laser for emitting laser beams, it is characterised in that: further include such as claim
A kind of any separately machined light splitting optical path device of multichannel galvanometer of 1-7, the spectrum groupware, which has, receives the laser
The receiving end of the laser of transmitting.
9. laser process equipment as claimed in claim 8, it is characterised in that: further include a pair of with a plurality of second optical path one
The multiple scanning galvanometers answered, and the controller that can control each shutdown part and each scanning galvanometer to work independently；Often
One scanning galvanometer is set in corresponding second optical path, and is located at the light-emitting window of the shutdown part.
10. laser process equipment as claimed in claim 9, it is characterised in that: further include with multiple scanning galvanometers one by one
Corresponding multiple processing platforms, each processing platform are set at the light-emitting window of the corresponding scanning galvanometer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811416398.1A CN109407328A (en) | 2018-11-26 | 2018-11-26 | The separately machined light splitting optical path device of multichannel galvanometer and laser process equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811416398.1A CN109407328A (en) | 2018-11-26 | 2018-11-26 | The separately machined light splitting optical path device of multichannel galvanometer and laser process equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109407328A true CN109407328A (en) | 2019-03-01 |
Family
ID=65455534
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811416398.1A Pending CN109407328A (en) | 2018-11-26 | 2018-11-26 | The separately machined light splitting optical path device of multichannel galvanometer and laser process equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109407328A (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110181169A (en) * | 2019-06-26 | 2019-08-30 | 帝尔激光科技(无锡)有限公司 | Can independent control Laser Time Sharing light splitting optical path, laser-processing system and method |
| CN110369863A (en) * | 2019-07-23 | 2019-10-25 | 上海精测半导体技术有限公司 | Light dividing method, the cutting method based on laser, equipment and system |
| CN111215744A (en) * | 2020-01-10 | 2020-06-02 | 深圳市大德激光技术有限公司 | Laser energy light splitting method and device |
| CN111871966A (en) * | 2020-06-30 | 2020-11-03 | 中国科学院理化技术研究所 | Laser cleaning head and laser cleaning equipment |
| CN112620930A (en) * | 2020-12-29 | 2021-04-09 | 苏州科韵激光科技有限公司 | Semiconductor laser processing multi-focus optical path system, laser system and processing method |
| CN113828927A (en) * | 2021-09-27 | 2021-12-24 | 浙江师范大学 | Processing device and processing method for micro-nano structure on surface of solar thin film battery |
| CN114289908A (en) * | 2021-12-22 | 2022-04-08 | 中国计量科学研究院 | Laser power real-time online monitoring device and method and laser processing system |
| CN114799494A (en) * | 2022-03-17 | 2022-07-29 | 武汉华工激光工程有限责任公司 | Laser beam splitting device and laser processing equipment |
| CN114951975A (en) * | 2022-05-31 | 2022-08-30 | 苏州科韵激光科技有限公司 | Laser processing apparatus and method |
| EP3936923A4 (en) * | 2019-03-06 | 2022-12-28 | Kawasaki Jukogyo Kabushiki Kaisha | Light guide device |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101020277A (en) * | 2007-03-22 | 2007-08-22 | 苏州德龙激光有限公司 | Distributed laser processing system |
| CN101125392A (en) * | 2006-08-14 | 2008-02-20 | 日产自动车株式会社 | Laser working apparatus and method of controlling laser working apparatus |
| CN203616529U (en) * | 2013-11-27 | 2014-05-28 | 江苏中科四象激光科技有限公司 | Integrated high-speed high-power laser optical gate switching device |
| CN103878487A (en) * | 2014-03-25 | 2014-06-25 | 深圳市宝福珠宝首饰有限公司 | Laser engraving method for jewelry product and laser engraving jig for ringlike jewelries |
| CN104081250A (en) * | 2012-01-26 | 2014-10-01 | 奥林巴斯株式会社 | Light scanning observation device |
| CN104280878A (en) * | 2014-09-26 | 2015-01-14 | 中国科学院半导体研究所 | Laser switching-off system with high damage resistance |
| CN207840409U (en) * | 2018-01-24 | 2018-09-11 | 武汉华工激光工程有限责任公司 | Single more galvanometer processing unit (plant)s of laser |
| CN209231614U (en) * | 2018-11-26 | 2019-08-09 | 武汉华工激光工程有限责任公司 | The separately machined light splitting optical path device of multichannel galvanometer and laser process equipment |
-
2018
- 2018-11-26 CN CN201811416398.1A patent/CN109407328A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101125392A (en) * | 2006-08-14 | 2008-02-20 | 日产自动车株式会社 | Laser working apparatus and method of controlling laser working apparatus |
| CN101020277A (en) * | 2007-03-22 | 2007-08-22 | 苏州德龙激光有限公司 | Distributed laser processing system |
| CN104081250A (en) * | 2012-01-26 | 2014-10-01 | 奥林巴斯株式会社 | Light scanning observation device |
| CN203616529U (en) * | 2013-11-27 | 2014-05-28 | 江苏中科四象激光科技有限公司 | Integrated high-speed high-power laser optical gate switching device |
| CN103878487A (en) * | 2014-03-25 | 2014-06-25 | 深圳市宝福珠宝首饰有限公司 | Laser engraving method for jewelry product and laser engraving jig for ringlike jewelries |
| CN104280878A (en) * | 2014-09-26 | 2015-01-14 | 中国科学院半导体研究所 | Laser switching-off system with high damage resistance |
| CN207840409U (en) * | 2018-01-24 | 2018-09-11 | 武汉华工激光工程有限责任公司 | Single more galvanometer processing unit (plant)s of laser |
| CN209231614U (en) * | 2018-11-26 | 2019-08-09 | 武汉华工激光工程有限责任公司 | The separately machined light splitting optical path device of multichannel galvanometer and laser process equipment |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3936923A4 (en) * | 2019-03-06 | 2022-12-28 | Kawasaki Jukogyo Kabushiki Kaisha | Light guide device |
| CN110181169A (en) * | 2019-06-26 | 2019-08-30 | 帝尔激光科技(无锡)有限公司 | Can independent control Laser Time Sharing light splitting optical path, laser-processing system and method |
| CN110369863A (en) * | 2019-07-23 | 2019-10-25 | 上海精测半导体技术有限公司 | Light dividing method, the cutting method based on laser, equipment and system |
| CN111215744A (en) * | 2020-01-10 | 2020-06-02 | 深圳市大德激光技术有限公司 | Laser energy light splitting method and device |
| CN111871966A (en) * | 2020-06-30 | 2020-11-03 | 中国科学院理化技术研究所 | Laser cleaning head and laser cleaning equipment |
| CN112620930A (en) * | 2020-12-29 | 2021-04-09 | 苏州科韵激光科技有限公司 | Semiconductor laser processing multi-focus optical path system, laser system and processing method |
| CN113828927A (en) * | 2021-09-27 | 2021-12-24 | 浙江师范大学 | Processing device and processing method for micro-nano structure on surface of solar thin film battery |
| CN114289908A (en) * | 2021-12-22 | 2022-04-08 | 中国计量科学研究院 | Laser power real-time online monitoring device and method and laser processing system |
| CN114799494A (en) * | 2022-03-17 | 2022-07-29 | 武汉华工激光工程有限责任公司 | Laser beam splitting device and laser processing equipment |
| CN114799494B (en) * | 2022-03-17 | 2024-04-26 | 武汉华工激光工程有限责任公司 | Laser beam splitting device and laser processing equipment |
| CN114951975A (en) * | 2022-05-31 | 2022-08-30 | 苏州科韵激光科技有限公司 | Laser processing apparatus and method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109407328A (en) | The separately machined light splitting optical path device of multichannel galvanometer and laser process equipment | |
| CN209231614U (en) | The separately machined light splitting optical path device of multichannel galvanometer and laser process equipment | |
| US7688877B2 (en) | Laser machining apparatus | |
| CN102205467B (en) | Laser processing apparatus | |
| CN112620930B (en) | Multi-focus optical path system for semiconductor laser processing, laser system and processing method | |
| TW200712552A (en) | Optical level control device, method for controlling same, and laser application device | |
| CN110369863B (en) | Light ray segmentation method, laser-based cutting method, device and system | |
| US7554650B2 (en) | Laser beam projecting device | |
| CN206411290U (en) | A kind of change angle of divergence emitter of wireless light communication antenna | |
| JP2020506067A (en) | Laser scribing device | |
| JP5265788B2 (en) | Space dividing device and light receiving device using the space dividing device | |
| CN108500477A (en) | The cutting method and cutter device of LED wafer | |
| KR20120016456A (en) | Laser processing apparatus and laser processing method | |
| CN109702328A (en) | Laser processing device | |
| CN101271204A (en) | Optical power equalizer for duplex laser scribing machine | |
| CN102642083B (en) | Laser processing mechanism | |
| JP2017517366A (en) | Diffraction grating for wavelength selection in line scan SLO | |
| WO2015155895A1 (en) | Laser diode drive circuit and laser apparatus | |
| CN208104433U (en) | Laser capture microdissection embryo's cutter device | |
| CN111618447B (en) | Substrate bilateral laser cutting device and cutting method | |
| CN115085820B (en) | Optical fiber coding matrix system and optical fiber channel switching method thereof | |
| KR20180060827A (en) | Laser processing apparatus and laser processing method | |
| CN108165489A (en) | Laser microprobe dating device and its method of work | |
| CN111702349A (en) | Laser cutting device and cutting method | |
| CN110137784A (en) | The fleck defect prosthetic appliance of laser light source component and its composition |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |