CN114289908A - Laser power real-time online monitoring device and method and laser processing system - Google Patents
Laser power real-time online monitoring device and method and laser processing system Download PDFInfo
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Abstract
The invention relates to a real-time online monitoring device and method of laser power and a laser processing system, wherein the monitoring device comprises a shell, a weighing module, a monitoring module, a sensing reflection assembly, an incident joint and at least one emergent joint, the weighing module is fixedly arranged in the shell and is in communication connection with the monitoring module, and the sensing reflection assembly is fixedly arranged on the weighing module; the incident joints and all the emergent joints are respectively fixedly arranged on two sides of the shell and are respectively communicated with the shell; laser is injected into the shell through the incident joint and is emitted out through the emergent joint after being reflected by the sensing reflection assembly; the invention also provides a real-time online monitoring method of the laser power and a laser processing system. The invention has the advantages that the on-line measurement of the laser power can be realized, the measurement accuracy is high, and the invention has the characteristics of small volume, light weight, high response speed, no need of water cooling and the like; in addition, synchronous processing of a plurality of products can be realized, and the processing efficiency is high.
Description
Technical Field
The invention relates to the technical field of laser processing, in particular to a laser power real-time online monitoring device and method and a laser processing system.
Background
High power lasers have important applications in the field of industrial processing. With the development of fiber laser technology in recent years, the market share of high-power fiber lasers has increased year by year, and has become the most common laser type in industrial processing. At present, the main stream equipment for industrial laser processing is between 1kW and 10kW, and the output power of high-end equipment reaches more than 10kW and can reach 30kW or even 40kW at most. According to statistics of the special committee for laser processing in China, high-power products (1 kW-10 kW) are shipped for 5.5 thousands of fiber lasers and ultra-high-power products (>10kW) are shipped for 1500 fiber lasers in 2020, and the localization rate is further improved.
Accurate measurement of power is very important for guaranteeing the quality of laser processing products, and the output power of a laser needs to be accurately controlled in both laser welding application and laser cutting application, so that the output power of the laser and laser processing equipment needs to be accurately calibrated before leaving a factory. In addition, since the laser may have power attenuation during long-term use, which affects the processing effect and quality, the laser power meter also needs to be used periodically to measure and calibrate the output power of the laser during the use of the laser and the laser processing equipment.
The traditional high-power laser measurement method mainly adopts a calorimetric method. The calorimetric method is characterized in that high-power laser is completely absorbed and converted into heat through an absorption material, and the laser power is obtained through the temperature rise of heat sink or water in a measuring device. The higher the measured power is, the larger the volume of the device is, the higher the cost is, and meanwhile, a corresponding high-power water cooling device needs to be equipped for cooling the power meter. In addition, the calorimetric power meter cannot be used in the laser processing process, and the power online monitoring of the processing process cannot be realized.
Disclosure of Invention
The invention aims to solve the technical problem of providing a laser power real-time online monitoring device and method and a laser processing system, and aims to solve the problems in the prior art.
The technical scheme for solving the technical problems is as follows:
a real-time online laser power monitoring device comprises a shell, a weighing module, a monitoring module, a sensing reflection assembly, an incident joint and at least one emergent joint, wherein the weighing module is fixedly arranged in the shell and is in communication connection with the monitoring module; the incident joints and all the emergent joints are respectively and fixedly arranged on two sides of the shell and are respectively communicated with the shell; laser is shot into in the shell from the incident joint, is shot out by the emergence joint after sensing reflection assembly reflects.
The invention has the beneficial effects that: during monitoring, laser is converted into collimated light by the incident joint and then is emitted into the shell, and the collimated light is reflected by the sensing reflection assembly and then is emitted out of the emergent joint; in the process, the weighing module detects the equivalent mass m of the laser reflection acting on the sensing reflection assembly, the weighing module sends the corresponding mass signal to the monitoring module, the monitoring module receives the corresponding mass signal and substitutes the mass into a related formula to obtain the power of the injected laser, the online monitoring of the laser power is realized, and the accuracy is greatly improved. The invention has the advantages of realizing the on-line measurement of the laser power, having high measurement accuracy, small volume, light weight, high response speed, no need of water cooling and the like, and greatly improving the gain of the optical pressure, thereby improving the accuracy of the laser power measurement.
On the basis of the technical scheme, the invention can be further improved as follows.
Further, the sensing reflection assembly comprises a sensing reflection mirror, and the sensing reflection mirror is horizontally and fixedly arranged on the weighing module; the incident joint and the emergent joint are respectively and fixedly arranged on two sides of the shell in an inclined mode, laser is obliquely incident from the incident joint and is obliquely emitted from the emergent joint after being reflected by the sensing reflector.
When the further scheme is adopted, the beneficial effects are that during monitoring, laser is converted into collimated light beams from the incident joint to be obliquely incident, and the collimated light beams are obliquely emitted from the emergent joint after being reflected by the sensing reflector; in the process, the weighing module detects the equivalent mass m of the laser reflection acting on the sensing reflection assembly, the weighing module sends the corresponding mass signal to the monitoring module, the monitoring module receives the corresponding mass signal and substitutes the mass into a related formula to obtain the power of the injected laser, the online monitoring of the laser power is realized, and the accuracy is greatly improved.
The sensing reflection assembly is arranged in the shell and is positioned above the sensing reflection assembly; the incident joint and the emergent joint are respectively and horizontally and fixedly arranged on two sides of the shell, laser is horizontally injected from the incident joint, and is horizontally injected from the emergent joint after being reflected for multiple times between the sensing reflection assembly and the reflection mechanism.
When the further scheme is adopted, the beneficial effects are that during monitoring, laser is horizontally injected after being converted into collimated light by the incident joint, and is horizontally injected by the emergent joint after being reflected for multiple times between the sensing reflection assembly and the reflection mechanism; in the process, the weighing module detects the equivalent mass m of the laser reflection acting on the sensing reflection assembly, the weighing module sends the corresponding mass signal to the monitoring module, the monitoring module receives the corresponding mass signal and substitutes the mass into a related formula to obtain the power of the injected laser, the online monitoring of the laser power is realized, and the accuracy is greatly improved.
Further, the sensing reflection assembly comprises a sensing reflection mirror, and the sensing reflection mirror is horizontally and fixedly arranged on the weighing module; the reflecting mechanism comprises two basic reflecting mirrors, and the two basic reflecting mirrors are fixedly arranged above the sensing reflecting mirror in a V shape; the laser is horizontally emitted into one of the basic reflectors through the incident joint, and is horizontally emitted out through the emergent joint after being sequentially reflected to the sensing reflector and the other basic reflector through the basic reflectors.
When the further scheme is adopted, the beneficial effects are that when in monitoring, laser is converted into collimated light from the incident joint and then horizontally enters one of the basic reflectors, and is horizontally emitted from the emergent joint after being sequentially reflected to the sensing reflector and the other basic reflector by the basic reflector; in the process, the weighing module detects the equivalent mass m of the laser reflection acting on the sensing reflection assembly, the weighing module sends the corresponding mass signal to the monitoring module, the monitoring module receives the corresponding mass signal and substitutes the mass into a related formula to obtain the power of the injected laser, the online monitoring of the laser power is realized, and the accuracy is greatly improved.
Furthermore, the reflecting mechanism also comprises at least one expanding reflector, and each expanding reflector is obliquely and fixedly arranged between the basic reflector and the sensing reflector and is parallel to the basic reflector close to the emergent joint; the number of the emergent joints is equal to the sum of the number of one basic reflector and at least one expanded reflector, the basic reflectors horizontally emit laser into the emergent joints, and the laser is reflected to the sensing reflector, the expanded reflectors and the other basic reflector in sequence by the basic reflectors and then is horizontally emitted by the emergent joints.
The technical scheme has the advantages that during monitoring, laser is converted into collimated light from the incident joint and then horizontally enters one of the basic reflectors, and is sequentially reflected to the sensing reflector, the expanding reflector and the other basic reflector by the basic reflectors and then is horizontally emitted from the plurality of emergent joints, so that the design is reasonable, and the laser can be simultaneously applied to processing a plurality of products; in the process, the weighing module detects the equivalent mass m of the laser reflection acting on the sensing reflection assembly, the weighing module sends the corresponding mass signal to the monitoring module, the monitoring module receives the corresponding mass signal and substitutes the mass into a related formula to obtain the power of the injected laser, the online monitoring of the laser power is realized, and the accuracy is greatly improved.
Furthermore, the sensing reflection assembly comprises two sensing reflection mirrors, and the two sensing reflection mirrors are fixedly arranged on the weighing module in a V shape; the reflecting mechanism comprises two basic reflecting mirrors, and the two basic reflecting mirrors are fixedly arranged above the sensing reflecting mirror in a V shape; the laser is horizontally emitted into one of the basic reflectors through the incident joint, and is sequentially reflected to one of the sensing reflectors, the other sensing reflector and the other basic reflector through the basic reflectors and then is horizontally emitted out through the emergent joint.
When the further scheme is adopted, the beneficial effects are that when in monitoring, laser is converted into collimated light from the incident joint and then horizontally enters one of the basic reflectors, and is horizontally emitted from the emergent joint after being sequentially reflected to one of the sensing reflectors, the other sensing reflector and the other basic reflector by the basic reflector; in the process, the weighing module detects the equivalent mass m of the laser reflection acting on the sensing reflection assembly, the weighing module sends the corresponding mass signal to the monitoring module, the monitoring module receives the corresponding mass signal and substitutes the mass into a related formula to obtain the power of the injected laser, the online monitoring of the laser power is realized, and the accuracy is greatly improved.
Furthermore, the reflecting mechanism also comprises at least one expanding reflector, and each expanding reflector is obliquely and fixedly arranged between the basic reflector and the sensing reflector and is parallel to the basic reflector close to the emergent joint; the number of the emergent joints is equal to the sum of the number of one basic reflector and at least one expanded reflector, the basic reflectors horizontally emit laser into one of the basic reflectors through the incident joints, and the laser is horizontally emitted from the emergent joints after being sequentially reflected to one of the sensing reflectors, the other sensing reflector, the expanded reflector and the other basic reflector through the basic reflectors.
The technical scheme has the advantages that during monitoring, laser is converted into collimated light from the incident joint and then horizontally enters one of the basic reflectors, and is horizontally emitted from the plurality of the emergent joints after being sequentially reflected to one of the sensing reflector, the other sensing reflector, the expansion reflector and the other basic reflector by the basic reflector; in the process, the weighing module detects the equivalent mass m of the laser reflection acting on the sensing reflection assembly, the weighing module sends the corresponding mass signal to the monitoring module, the monitoring module receives the corresponding mass signal and substitutes the mass into a related formula to obtain the power of the injected laser, the online monitoring of the laser power is realized, and the accuracy is greatly improved.
Furthermore, the sensing reflection assembly comprises two sensing reflection mirrors, and the two sensing reflection mirrors are fixedly arranged on the weighing module in an inverted V shape; the reflecting mechanism comprises two basic reflecting mirrors, and the two basic reflecting mirrors are fixedly arranged above the sensing reflecting mirror in an inverted V shape; the laser is horizontally emitted into one of the sensing reflectors through the incident joint, and is sequentially reflected to one of the basic reflectors, the other basic reflector and the other sensing reflector through the sensing reflectors and then is horizontally emitted out through the emergent joint.
When the further scheme is adopted, the beneficial effects are that when in monitoring, laser is converted into collimated light from the incident joint and then horizontally enters one of the sensing reflectors, and is horizontally emitted from the emergent joint after being sequentially reflected to one of the basic reflectors, the other basic reflector and the other sensing reflector by the sensing reflector; in the process, the weighing module detects the equivalent mass m of the laser reflection acting on the sensing reflection assembly, the weighing module sends the corresponding mass signal to the monitoring module, the monitoring module receives the corresponding mass signal and substitutes the mass into a related formula to obtain the power of the injected laser, the online monitoring of the laser power is realized, and the accuracy is greatly improved.
The invention also relates to a monitoring method adopting the laser power real-time online monitoring device, which comprises the following specific steps:
s1: the monitoring module records the incident angle theta of the laser, and meanwhile, the equivalent mass m of the force exerted on the sensing reflection assembly by the laser reflection is obtained through the weighing module;
s2: the monitoring module substitutes the incident angle theta and the mass m obtained in the step S1 into a formula (1) prestored in the monitoring module to obtain the power P of the incident laser,
wherein c is the vacuum light velocity (m/s), and g is the gravity acceleration (m/s ^2)，θ is the laser incident angle (°), R and a are the reflectivity and absorptivity of the mirror, respectively, n is the number of times the laser light is reflected on the sensing reflective element, and P is the power (W) of the incident laser light.
The further scheme has the advantages that during monitoring, the monitoring module obtains the equivalent mass m of the force exerted on the sensing reflection assembly by the laser reflection through the weighing module according to the incident angle theta of the laser; in addition, the monitoring module substitutes the obtained incident angle theta and the obtained mass m into an internal prestored formula to obtain the power P of the incident laser, so that the on-line monitoring of the laser power is realized, the monitoring is convenient, and the accuracy is greatly improved.
The invention also relates to a laser processing system, which comprises a laser and at least one laser processing head which is in one-to-one correspondence with the ejection joint, and also comprises the laser power real-time online monitoring device, wherein the laser is connected with the incident joint through a transmission optical fiber and is in communication connection with the monitoring module; each laser processing head is connected with the corresponding emergent joint through an operating optical fiber.
The invention has the advantages that the invention has the characteristics of small volume, light weight, high response speed, no need of water cooling and the like, can carry out real-time online measurement and has high measurement accuracy; in addition, synchronous processing of a plurality of products can be realized, and the processing efficiency is high.
Drawings
FIG. 1 is a schematic structural diagram of a first embodiment of the present invention;
fig. 2 is a schematic structural view of a second embodiment of the present invention when an exit joint is provided;
fig. 3 is a schematic structural view of a second embodiment of the present invention when a plurality of exit connectors are provided;
fig. 4 is a schematic structural view of a third embodiment of the present invention in which an exit joint is provided;
fig. 5 is a schematic structural view of a third embodiment of the present invention in which two exit connectors are provided;
fig. 6 is a schematic structural view of a case where a plurality of exit tabs are provided in the third embodiment of the present invention;
FIG. 7 is a schematic structural diagram of a fourth embodiment of the present invention;
FIG. 8 is a schematic diagram of a laser machining system according to the present invention;
fig. 9 is a circuit block diagram of the present invention.
In the drawings, the components represented by the respective reference numerals are listed below:
1. a housing; 2. a weighing module; 3. a monitoring module; 4. an incident joint; 5. an outgoing connector; 6. a sensing mirror; 7. a base mirror; 8. an extended reflector; 9. a laser; 10. a laser processing head.
Detailed Description
The principles and features of this invention are described in connection with the drawings and the detailed description of the invention, which are set forth below as examples to illustrate the invention and not to limit the scope of the invention.
Example 1
As shown in fig. 1 to 7 and 9, the present embodiment provides a laser power real-time online monitoring device, which includes a housing 1, a weighing module 2, a monitoring module 3, a sensing reflection assembly, an incident connector 4 and at least one emergent connector 5, wherein the weighing module 2 is fixedly installed in the housing 1 and is in communication connection with the monitoring module 3, and the sensing reflection assembly is fixedly installed on the weighing module 2; the incident joints 4 and all the emergent joints 5 are respectively and fixedly arranged on two sides of the shell 1 and are respectively communicated with the shell 1; laser is emitted into the shell 1 from the incident joint 4, reflected by the sensing reflection assembly and then emitted from the emergent joint 5.
During monitoring, laser is converted into collimated light by the incident joint 4 and then enters the shell 1, and is reflected by the sensing and reflecting assembly and then is emitted by the emitting joint 5;
in the process, the weighing module 2 detects the equivalent mass m of the laser reflection acting on the sensing reflection assembly, the weighing module 2 sends the corresponding mass signal to the monitoring module 3, the monitoring module 3 receives the corresponding mass signal and substitutes the mass into a related formula to obtain the power of the injected laser, the online monitoring of the laser power is realized, and the accuracy is greatly improved.
In the present embodiment, the housing 1 may be a rectangular housing, or may be a housing having another suitable geometric shape, preferably a rectangular housing, so that the components can be easily mounted.
In addition, the housing 1 is provided with a plurality of internally and externally penetrating mounting holes equal to the sum of the number of the incident joints 4 and the number of the exit joints 5, and the incident joints 4 and the exit joints 5 are fixedly mounted at a plurality of mounting positions respectively.
Preferably, in the present embodiment, the incident connector 4 and/or the exit connector 5 is a QBH connector, and may also be a QD connector.
Moreover, the incident joint 4 converts the laser into a collimated light beam so as to increase the number of times that the laser irradiates on the sensing reflection assembly, so that the weighing module 2 can measure the light pressure of the laser accurately and further measure the power of the laser accurately; the emergent joint 5 converges the light beams reflected by the sensing reflection assembly and then emits the converged light beams, so that the intensity of the emitted laser is ensured, and the requirement of processing products is met.
The embodiment can realize the on-line measurement of the laser power, has high measurement accuracy, has the characteristics of small volume, light weight, high response speed, no need of water cooling and the like, and greatly improves the gain of the optical pressure, thereby improving the accuracy of the laser power measurement.
Although photons do not have a static mass, photons have momentum, and when laser light is irradiated onto the surface of an object, pressure is generated, and the laser power can be obtained by measuring the magnitude of the laser pressure, that is, the mass m equivalent to the force. Therefore, in the embodiment, the weighing module 2 measures the mass m equivalent to the force exerted by the laser reflection on the sensing reflection assembly.
Example 2
As shown in fig. 1, on the basis of embodiment 1, in this embodiment, the sensing reflection assembly includes a sensing reflection mirror 6, and the sensing reflection mirror 6 is horizontally and fixedly installed on the weighing module 2; the incident joint 4 and the emergent joint 5 are respectively and fixedly arranged on two sides of the shell 1 in an inclined way, and laser is obliquely incident from the incident joint 4 and obliquely emitted from the emergent joint 5 after being reflected by the sensing reflector 6.
The laser route in the scheme is as follows: the laser light injected from the injection joint 4 directly slantingly irradiates to the sensing reflector 6, and is reflected by the sensing reflector 6 and then is injected from the injection joint 5.
During monitoring, laser is converted into collimated light beams from the incident joint 4 to be obliquely incident, and the collimated light beams are reflected by the sensing reflector 6 and then obliquely emitted from the emergent joint 5;
in the process, the weighing module 2 detects the equivalent mass m of the laser reflection acting on the sensing reflection assembly, the weighing module 2 sends the corresponding mass signal to the monitoring module 3, the monitoring module 3 receives the corresponding mass signal and substitutes the mass into a related formula to obtain the power of the injected laser, the online monitoring of the laser power is realized, and the accuracy is greatly improved.
Preferably, in this embodiment, the sensing mirror 6 is preferably a flat mirror.
Example 3
As shown in fig. 2 to 7, on the basis of embodiment 1, the present embodiment further includes a reflection mechanism, the reflection mechanism is fixedly installed in the housing 1, and is located above the sensing reflection assembly; the incident joint 4 and the emergent joint 5 are respectively and horizontally and fixedly arranged at two sides of the shell 1, laser is horizontally injected from the incident joint 4, and is horizontally injected from the emergent joint 5 after being reflected for a plurality of times between the sensing reflection assembly and the reflection mechanism.
The laser route in the scheme is as follows: the laser horizontally injected from the injection joint 4 is injected to the reflection mechanism, reflected between the reflection mechanism and the sensing reflection assembly and then horizontally injected from the injection joint 5.
During monitoring, laser is converted into collimated light by the incident joint 4 and then horizontally enters, and is reflected for multiple times between the sensing reflection assembly and the reflection mechanism and then horizontally exits through the exit joint 5;
in the process, the weighing module 2 detects the equivalent mass m of the laser reflection acting on the sensing reflection assembly, the weighing module 2 sends the corresponding mass signal to the monitoring module 3, the monitoring module 3 receives the corresponding mass signal and substitutes the mass into a related formula to obtain the power of the injected laser, the online monitoring of the laser power is realized, and the accuracy is greatly improved.
Preferably, in this embodiment, the sensing mirror 6 is preferably a flat mirror.
The scheme of the embodiment 3 and the scheme of the embodiment 2 are parallel, the scheme of the embodiment 3 is added with a reflecting mechanism on the basis of the scheme of the embodiment 2, and the laser is horizontally injected and horizontally emitted, while the scheme of the embodiment 2 is obliquely injected downwards and obliquely injected upwards.
Example 4
As shown in fig. 2 and 3, on the basis of embodiment 3, in this embodiment, the sensing reflection assembly includes a sensing reflection mirror 6, and the sensing reflection mirror 6 is horizontally and fixedly installed on the weighing module 2; the reflecting mechanism comprises two basic reflecting mirrors 7, and the two basic reflecting mirrors 7 are fixedly arranged above the sensing reflecting mirror 6 in a V shape; the laser horizontally enters one of the basic reflectors 7 from the entrance joint 4, is sequentially reflected to the sensing reflector 6 through the basic reflector 7, and is horizontally emitted from the exit joint 5 through the other basic reflector 7.
The laser route in the scheme is as follows: the laser horizontally injected from the injection joint 4 is injected to one of the basic reflectors 7, reflected to the sensing reflector 6 by the basic reflector 7, reflected to the other basic reflector 7 by the sensing reflector 6, and finally reflected by the basic reflector 7 and horizontally injected from the injection joint 5.
During monitoring, laser is converted into collimated light by the incident connector 4 and then horizontally enters, and is reflected for multiple times between the sensing reflector 6 and the two basic reflectors 7 and then horizontally exits through the exiting connector 5;
in the process, the weighing module 2 detects the equivalent mass m of the laser reflection acting on the sensing reflection assembly, the weighing module 2 sends the corresponding mass signal to the monitoring module 3, the monitoring module 3 receives the corresponding mass signal and substitutes the mass into a related formula to obtain the power of the injected laser, the online monitoring of the laser power is realized, and the accuracy is greatly improved.
Example 5
On the basis of the embodiment 4, in this embodiment, the reflecting mechanism further includes at least one expanding reflector 8, and each expanding reflector 8 is obliquely and fixedly installed between the basic reflector 7 and the sensing reflector 6, and is parallel to the basic reflector 7 close to the exit joint 5; the number of the emergent joints 5 is equal to the sum of the number of one basic reflector 7 and at least one expanding reflector 8, and the laser is horizontally emitted into one of the basic reflectors 7 from the incident joint 4, is sequentially reflected to the sensing reflector 6, the expanding reflector 8 and the other basic reflector 7 by the basic reflector 7, and is horizontally emitted from the emergent joints 5.
Preferably, in this embodiment, the reflecting mechanism further includes a plurality of expanding reflectors 8, the expanding reflectors 8 are distributed between the base reflector 7 and the sensing reflector 6 at regular intervals from top to bottom, and are parallel to each other, and at this time, the number of the outgoing joints 5 is plural.
The laser route in the scheme is as follows: the laser horizontally injected from the injection joint 4 is injected to one of the basic reflectors 7, reflected to the sensing reflector 6 by the basic reflector 7, reflected to the other basic reflector 7 and the extended reflector 8 by the sensing reflector 6, and finally reflected by the basic reflector 7 and horizontally injected from the multiple injection joints 5.
During monitoring, laser is converted into collimated light by the incident joint 4 and then horizontally enters, and a plurality of emergent joints 5 are horizontally emitted after being reflected for a plurality of times among the sensing reflector 6, the two basic reflectors 7 and the expanding reflector 8, so that the design is reasonable, and the laser can be simultaneously applied to processing a plurality of products;
in the process, the weighing module 2 detects the equivalent mass m of the laser reflection acting on the sensing reflection assembly, the weighing module 2 sends the corresponding mass signal to the monitoring module 3, the monitoring module 3 receives the corresponding mass signal and substitutes the mass into a related formula to obtain the power of the injected laser, the online monitoring of the laser power is realized, and the accuracy is greatly improved.
When the extended reflector 8 is arranged, the whole scheme has the following two working modes:
(1) time division multiplexing mode: each extended reflector 8 is detachably mounted, for example, adhered to a corresponding bracket by an adhesive, and the bracket is located below the corresponding basic reflector 7; the bottom of the bracket is fixedly provided with a motor, the driving end of the motor is vertically upward and is fixedly connected with the bottom of the bracket, and the motor drives the motor to directly rotate; when the number of the expansion reflectors 8 is multiple, the expansion reflectors are distributed on the support at intervals in the circumferential direction and are arranged in a staggered mode. When the device is used, the motor drives the support to rotate and drives any one of the expanding reflectors 8 to rotate to the position below the corresponding basic reflector 7 so as to block the basic reflector 7, and at the moment, the laser reflected by the sensing reflector 6 is reflected by the expanding reflector 8 and then is emitted from the corresponding emitting connector 5; or the motor drives the support to rotate, the plurality of expanding reflectors 8 are staggered with the corresponding basic reflectors 7, and the laser reflected by the sensing reflector 6 is reflected by the corresponding basic reflectors 7 and then is emitted from the corresponding emitting joints 5.
In this mode, the total power of the laser light, that is, the power at the time of laser light emission is monitored.
(2) Power multiplexing mode: each expanding reflector 8 adopts an expanding beam splitter, namely, a part of laser is reflected by the beam splitter, a part of laser penetrates through the beam splitter, and the two parts of laser respectively enter different outgoing joints 5.
Note that, in this mode, the monitoring is still the entire power of the laser, and the power value is equal to the sum of the powers of the laser light emitted from the plurality of emission joints 5.
The two modes are preferably time division multiplexing modes.
Example 6
As shown in fig. 4 and fig. 6, on the basis of embodiment 3, in this embodiment, the sensing and reflecting assembly includes two sensing and reflecting mirrors 6, and the two sensing and reflecting mirrors 6 are fixedly mounted on the weighing module 2 in a V shape; the reflecting mechanism comprises two basic reflecting mirrors 7, and the two basic reflecting mirrors 7 are fixedly arranged above the sensing reflecting mirror 6 in a V shape; the laser horizontally enters one of the basic reflectors 7 from the entrance joint 4, and is reflected to one of the sensing reflectors 6, the other sensing reflector 6 and the other basic reflector 7 in sequence by the basic reflector 7 to be horizontally emitted from the exit joint 5.
The laser route in the scheme is as follows: the laser light horizontally injected from the injection joint 4 is injected to one of the base reflectors 7, reflected to one of the sensing reflectors 6 by the base reflector 7, reflected to the other sensing reflector 6 by the sensing reflector 6, reflected to the other base reflector 7 by the sensing reflector 6, and finally reflected by the base reflector 7 and horizontally injected from the injection joint 5.
During monitoring, laser is horizontally injected after being converted into collimated light by the incident connector 4, and is horizontally injected by the plurality of emergent connectors 5 after being reflected for multiple times among the sensing reflector 6, the two basic reflectors 7 and the expanding reflector 8, so that the design is reasonable, and the laser can be simultaneously applied to processing a plurality of products;
in the process, the weighing module 2 detects the equivalent mass m of the laser reflection acting on the sensing reflection assembly, the weighing module 2 sends the corresponding mass signal to the monitoring module 3, the monitoring module 3 receives the corresponding mass signal and substitutes the mass into a related formula to obtain the power of the injected laser, the online monitoring of the laser power is realized, and the accuracy is greatly improved.
Example 7
On the basis of the embodiment 6, in this embodiment, the reflecting mechanism further includes at least one expanding reflector 8, and each expanding reflector 8 is obliquely and fixedly installed between the basic reflector 7 and the sensing reflector 6, and is parallel to the basic reflector 7 close to the exit joint 5; the number of the emergent joints 5 is equal to the sum of the number of one basic reflector 7 and at least one expanding reflector 8, and the laser is horizontally emitted into one of the basic reflectors 7 from the incident joint 4, and is sequentially reflected to one of the sensing reflectors 6, the other sensing reflector 6, the expanding reflector 8 and the other basic reflector 7 through the basic reflector 7 to be horizontally emitted from the emergent joints 5.
Preferably, in this embodiment, the reflecting mechanism further includes a plurality of expanding reflectors 8, the expanding reflectors 8 are distributed between the base reflector 7 and the sensing reflector 6 at regular intervals from top to bottom, and are parallel to each other, and at this time, the number of the outgoing joints 5 is plural.
The laser route in the scheme is as follows: the laser horizontally injected from the injection joint 4 is injected to one of the base reflectors 7, and is reflected to one of the sensing reflectors 6 by the base reflector 7, the sensing reflector 6 reflects the laser to the other sensing reflector 6, the sensing reflector 6 reflects the laser to the other base reflector 7 and the extended reflector 8, and finally the laser is reflected by the base reflector 7 and the extended reflector 8 and is horizontally injected from the multiple injection joints 5.
Preferably, in this embodiment, the two sensing reflectors 6 may be plane mirrors, the two plane mirrors are obliquely and relatively fixedly mounted on the weighing module 2, and the included angle between the two plane mirrors and the weighing module 2 is 45 degrees; further, the two base mirrors 7 are parallel to the two sensor mirrors 6, respectively.
Besides the above embodiments, the two sensing mirrors 6 may also be 45 ° mirrors, the 45 ° mirrors are relatively fixedly mounted on the weighing module 2, and the two base mirrors 7 are parallel to the reflecting mirror surfaces of the two 45 ° mirrors respectively.
During monitoring, laser is horizontally emitted by a plurality of emitting connectors 5 after being converted into collimated light by the incident connector 4 and reflected for a plurality of times between the two sensing reflectors 6, the two basic reflectors 7 and the expanding reflector 8, and the laser is reasonably designed and can be simultaneously applied to processing a plurality of products;
in the process, the weighing module 2 detects the equivalent mass m of the laser reflection acting on the sensing reflection assembly, the weighing module 2 sends the corresponding mass signal to the monitoring module 3, the monitoring module 3 receives the corresponding mass signal and substitutes the mass into a related formula to obtain the power of the injected laser, the online monitoring of the laser power is realized, and the accuracy is greatly improved.
When the extended reflector 8 is arranged, the whole scheme has the following two working modes:
(1) time division multiplexing mode: each extended reflector 8 is detachably mounted, for example, adhered to a corresponding bracket by an adhesive, and the bracket is located below the corresponding basic reflector 7; the bottom of the bracket is fixedly provided with a motor, the driving end of the motor is vertically upward and is fixedly connected with the bottom of the bracket, and the motor drives the motor to directly rotate; when the number of the expansion reflectors 8 is multiple, the expansion reflectors are distributed on the support at intervals in the circumferential direction and are arranged in a staggered mode. When the device is used, the motor drives the support to rotate and drives any one of the expanding reflectors 8 to rotate to the position below the corresponding basic reflector 7 so as to block the basic reflector 7, and at the moment, the laser reflected by the sensing reflector 6 is reflected by the expanding reflector 8 and then is emitted from the corresponding emitting connector 5; or the motor drives the support to rotate, the plurality of expanding reflectors 8 are staggered with the corresponding basic reflectors 7, and the laser reflected by the sensing reflector 6 is reflected by the corresponding basic reflectors 7 and then is emitted from the corresponding emitting joints 5.
In this mode, the total power of the laser light, that is, the power at the time of laser light emission is monitored.
(2) Power multiplexing mode: each expanding reflector 8 adopts an expanding beam splitter, namely, a part of laser is reflected by the beam splitter, a part of laser penetrates through the beam splitter, and the two parts of laser respectively enter different outgoing joints 5.
Note that, in this mode, the monitoring is still the entire power of the laser, and the power value is equal to the sum of the powers of the laser light emitted from the plurality of emission joints 5.
The two modes are preferably time division multiplexing modes.
Example 8
As shown in fig. 7, on the basis of embodiment 3, in this embodiment, the sensing and reflecting assembly includes two sensing and reflecting mirrors 6, and the two sensing and reflecting mirrors 6 are fixedly mounted on the weighing module 2 in an inverted V shape; the reflecting mechanism comprises two basic reflecting mirrors 7, and the two basic reflecting mirrors 7 are fixedly arranged above the sensing reflecting mirror 6 in an inverted V shape; the laser horizontally enters one of the sensing reflectors 6 from the entrance joint 4, is sequentially reflected to one of the base reflectors 7, the other base reflector 7 and the other sensing reflector 6 through the sensing reflector 6, and then is horizontally emitted from the exit joint 5.
The laser route in the scheme is as follows: the laser light horizontally incident from the incident joint 4 is incident on one of the sensing mirrors 6, reflected to one of the base mirrors 7 by the sensing mirror 6, reflected to the other base mirror 7 by the base mirror 7, and finally reflected by the other sensing mirror 6 and horizontally emitted from the exit joint 5.
Preferably, in this embodiment, the two sensing reflectors 6 are fixedly mounted on the weighing module 2 in an inverted V shape, and an included angle between the two sensing reflectors 6 and the weighing module 2 is 45 degrees; the two base mirrors 7 are parallel to the two sensor mirrors 6, respectively.
In addition to the above embodiments, the two sensing reflectors 6 may also be replaced by a triple prism, which is fixedly installed on the weighing module 2, and one surface of the triple prism is attached to the weighing module 2, and the pointed cone of the triple prism faces upward.
During monitoring, laser is converted into collimated light by the incident connector 4 and then horizontally enters, and is reflected for multiple times between the two sensing reflectors 6 and the two basic reflectors 7 and then horizontally exits through the exit connector 5; in the process, the weighing module 2 detects the equivalent mass m of the laser reflection acting on the sensing reflection assembly, the weighing module 2 sends the corresponding mass signal to the monitoring module 3, the monitoring module 3 receives the corresponding mass signal and substitutes the mass into a related formula to obtain the power of the injected laser, the online monitoring of the laser power is realized, and the accuracy is greatly improved.
The schemes of the embodiments 4 and 5, the schemes of the embodiments 6 and 7, and the scheme of the embodiment 8 are parallel schemes, the number of the exit joints 5 of the schemes of the embodiments 4 and 5 and the schemes of the embodiments 6 and 7 may be one or multiple, synchronous processing of multiple products can be achieved, and laser is finally reflected to the exit joints 5 through the base reflector 7 and the expansion reflector 8; however, the number of the exit joints 5 in the solution of embodiment 8 is only one, and the laser light is finally reflected to the exit joints 5 via the sensing mirror 6.
Example 9
On the basis of the above embodiments, the present embodiment further relates to a monitoring method using the above laser power real-time online monitoring device, which includes the following specific steps:
s1: the monitoring module 3 records the incident angle theta of the laser, and meanwhile, the equivalent mass m of the force exerted on the sensing reflection assembly by the laser reflection is obtained through the weighing module 2;
s2: the monitoring module 3 substitutes the incident angle theta and the mass m obtained in the step S1 into an internally prestored formula (1) to obtain the power P of the incident laser,
wherein c is the vacuum light velocity (m/s), and g is the gravity acceleration (m/s ^2) θ is the laser incident angle (°), R and a are the reflectivity and absorptivity of the mirror, respectively, n is the number of times the laser light is reflected on the sensing reflective element, and P is the power (W) of the incident laser light.
During monitoring, the monitoring module 3 obtains the mass m equivalent to the force exerted on the sensing reflector 6 by the laser reflection through the weighing module 2 according to the incident angle theta of the laser; in addition, the monitoring module 3 substitutes the obtained incident angle theta and the obtained mass m into an internal prestored formula to obtain the power P of the incident laser, so that the online monitoring of the laser power is realized, the monitoring is convenient, and the accuracy is greatly improved.
Example 10
As shown in fig. 8 and 9, on the basis of the above embodiments, the present embodiment further provides a laser processing system, which includes a laser 9 and at least one laser processing head 10 corresponding to the exit connector 5 one by one, and further includes the above-mentioned laser power real-time online monitoring device, where the laser 9 is connected to the entrance connector 4 through a transmission optical fiber and is in communication connection with the monitoring module 3; each laser processing head 10 is connected to a corresponding exit joint 5 by means of an operating optical fiber.
The working principle is as follows: the laser 9 emits laser, the laser is emitted into the shell 1 through the transmission optical fiber incidence connector 4, reflected for many times through the sensing reflection assembly and the reflection mechanism and then emitted out through the emission connector 5, reaches the laser processing head 10 through the operation optical fiber, and the product is processed through the laser processing head 10, so that the processing efficiency is high.
Preferably, in this embodiment, the monitoring module 3 is a controller in the prior art.
In addition, the monitoring module 3 can be installed in the housing 1, and at this time, a threading hole for connecting a circuit between the monitoring module 3 and the laser 9 is formed in the side wall of the housing 1; monitoring module 3 also can install outside shell 1, supplies the through wires hole of interconnecting link between monitoring module 3 and the weighing module 2 on the lateral wall of shell 1 this moment.
In the process, the monitoring module 3 is matched with the weighing module 2 to monitor the real-time power of the laser in real time.
The method has the characteristics of small volume, light weight, high response speed, no need of water cooling and the like, can perform real-time online measurement, and has high measurement accuracy; in addition, synchronous processing of a plurality of products can be realized, and the processing efficiency is high.
The working principle of the invention is as follows:
during processing, the laser 9 emits laser, the laser is emitted into the shell 1 through the transmission optical fiber incidence connector 4, reflected for multiple times through the sensing reflection assembly and the reflection mechanism and then emitted out through the emission connector 5, reaches the laser processing head 10 through the operation optical fiber, and a product is processed through the laser processing head 10, so that the processing efficiency is high.
In the process, laser is converted into collimated light by the incident joint 4 and then enters the shell 1, and the collimated light is reflected by the sensing reflection assembly and then is emitted by the emitting joint 5; meanwhile, the weighing module 2 detects the equivalent of the force applied by the laser reflection on the sensing reflection assembly, the weighing module 2 sends the corresponding mass signal to the monitoring module 3, the monitoring module 3 receives the corresponding mass signal and substitutes the mass into a related formula to obtain the power of the injected laser, the online monitoring of the laser power is realized, and the accuracy is greatly improved.
Compared with the traditional calorimetric laser power meter, the monitoring device provided by the invention has the advantages of high response speed, high upper limit of power measurement, no need of water cooling and the like, and the higher the measured laser power is, the higher the signal-to-noise ratio of the measurement result is, so that the device has obvious advantages in measuring the laser with higher power. In addition, the transmission direction of the laser can be kept unchanged after the laser passes through the optical pressure type power meter, the power attenuation is extremely small (generally below 0.1 percent), and the laser processing device is very suitable for in-situ online measurement of the output power of the laser 9 and laser processing equipment.
It should be noted that, the laser 9 and the weighing module 2 according to the present invention are both in the prior art, the laser 9 and the weighing module 2 are electrically connected to the monitoring module 3, and the control circuit between the monitoring module 3 and each component is in the prior art.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (10)
1. The utility model provides a real-time on-line monitoring device of laser power which characterized in that: the device comprises a shell (1), a weighing module (2), a monitoring module (3), a sensing reflection assembly, an incident joint (4) and at least one emergent joint (5), wherein the weighing module (2) is fixedly arranged in the shell (1) and is in communication connection with the monitoring module (3), and the sensing reflection assembly is fixedly arranged on the weighing module (2); the incident joints (4) and all the emergent joints (5) are respectively and fixedly arranged on two sides of the shell (1) and are respectively communicated with the shell (1); laser is shot into the shell (1) from the incidence joint (4), and is shot out from the emergence joint (5) after being reflected by the sensing reflection assembly.
2. The laser power real-time online monitoring device according to claim 1, characterized in that: the sensing reflection assembly comprises a sensing reflection mirror (6), and the sensing reflection mirror (6) is horizontally and fixedly arranged on the weighing module (2); the incident connector (4) and the emergent connector (5) are respectively and fixedly arranged on two sides of the shell (1) in an inclined mode, laser is obliquely emitted from the incident connector (4), and is obliquely emitted from the emergent connector (5) after being reflected by the sensing reflector (6).
3. The laser power real-time online monitoring device according to claim 1, characterized in that: the sensor is characterized by further comprising a reflecting mechanism, wherein the reflecting mechanism is fixedly arranged in the shell (1) and is positioned above the sensing reflecting assembly; the incident joint (4) and the emergent joint (5) are horizontally and fixedly arranged on two sides of the shell (1) respectively, laser is horizontally emitted from the incident joint (4), and is horizontally emitted from the emergent joint (5) after being reflected for multiple times between the sensing reflection assembly and the reflection mechanism.
4. The real-time online laser power monitoring device according to claim 3, wherein: the sensing reflection assembly comprises a sensing reflection mirror (6), and the sensing reflection mirror (6) is horizontally and fixedly arranged on the weighing module (2); the reflecting mechanism comprises two basic reflecting mirrors (7), and the two basic reflecting mirrors (7) are fixedly arranged above the sensing reflecting mirror (6) in a V shape; the laser is horizontally emitted into one of the basic reflectors (7) through the incident connector (4), and is sequentially reflected to the sensing reflector (6) and the other basic reflector (7) through the basic reflector (7) and then is horizontally emitted through the emergent connector (5).
5. The real-time online laser power monitoring device according to claim 4, wherein: the reflecting mechanism further comprises at least one expanding reflector (8), and each expanding reflector (8) is obliquely and fixedly installed between the basic reflector (7) and the sensing reflector (6) and is parallel to the basic reflector (7) close to the emergent joint (5); the number of the emergent joints (5) is equal to the sum of the number of one basic reflector (7) and at least one extended reflector (8) and corresponds to one another, laser is horizontally emitted into one of the basic reflectors (7) through the incident joint (4), and is sequentially reflected to the sensing reflector (6), the extended reflector (8) and the other basic reflector (7) through the basic reflector (7) and then is horizontally emitted out through the plurality of emergent joints (5).
6. The real-time online laser power monitoring device according to claim 3, wherein: the sensing reflection assembly comprises two sensing reflection mirrors (6), and the two sensing reflection mirrors (6) are fixedly arranged on the weighing module (2) in a V shape; the reflecting mechanism comprises two basic reflecting mirrors (7), and the two basic reflecting mirrors (7) are fixedly arranged above the sensing reflecting mirror (6) in a V shape; the laser is horizontally emitted into one of the basic reflectors (7) through the incident connector (4), and is sequentially reflected to one of the sensing reflectors (6), the other sensing reflector (6) and the other basic reflector (7) through the basic reflector (7) and then is horizontally emitted out through the emergent connector (5).
7. The laser power real-time online monitoring device according to claim 6, characterized in that: the reflecting mechanism further comprises at least one expanding reflector (8), and each expanding reflector (8) is obliquely and fixedly installed between the basic reflector (7) and the sensing reflector (6) and is parallel to the basic reflector (7) close to the emergent joint (5); the number of the emergent joints (5) is equal to the sum of the number of one basic reflector (7) and at least one expanded reflector (8) and corresponds to one another, laser is horizontally emitted into one of the basic reflectors (7) through the incident joint (4), and is sequentially reflected to one of the sensing reflectors (6), the other sensing reflector (6), the expanded reflector (8) and the other basic reflector (7) through the basic reflector (7) and is horizontally emitted out through the plurality of emergent joints (5).
8. The real-time online laser power monitoring device according to claim 3, wherein: the sensing reflection assembly comprises two sensing reflection mirrors (6), and the two sensing reflection mirrors (6) are fixedly arranged on the weighing module (2) in an inverted V shape; the reflecting mechanism comprises two basic reflecting mirrors (7), and the two basic reflecting mirrors (7) are fixedly arranged above the sensing reflecting mirror (6) in an inverted V shape; the laser is horizontally emitted into one of the sensing reflectors (6) from the incident joint (4), and is sequentially reflected to one of the basic reflectors (7), the other basic reflector (7) and the other sensing reflector (6) through the sensing reflector (6) and then is horizontally emitted from the emergent joint (5).
9. A monitoring method using the laser power real-time on-line monitoring device according to any one of claims 1 to 8, comprising the following specific steps:
s1: the monitoring module (3) records the incident angle theta of the laser, and meanwhile, the equivalent mass m of the force exerted on the sensing reflection assembly by the laser reflection is obtained through the weighing module (2);
s2: the monitoring module (3) substitutes the incident angle theta and the mass m obtained in the S1 into a formula (1) prestored in the monitoring module to obtain the power P of the incident laser,
wherein c is the vacuum light velocity (m/s), and g is the gravity acceleration (m/s ^2) θ is the laser incident angle (°), R and a are the reflectivity and absorptivity of the mirror, respectively, n is the number of times the laser light is reflected on the sensing reflective element, and P is the power (W) of the incident laser light.
10. A laser machining system comprising a laser (9) and at least one laser machining head (10) in one-to-one correspondence with the exit joint (5), characterized in that: the real-time online laser power monitoring device according to any one of claims 1 to 8, wherein the laser (9) is connected with the incident joint (4) through a transmission optical fiber and is in communication connection with the monitoring module (3); each laser processing head (10) is connected with the corresponding emergent joint (5) through an operation optical fiber.
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