CN213932827U - High-power laser power measuring system - Google Patents
High-power laser power measuring system Download PDFInfo
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- CN213932827U CN213932827U CN202022951863.0U CN202022951863U CN213932827U CN 213932827 U CN213932827 U CN 213932827U CN 202022951863 U CN202022951863 U CN 202022951863U CN 213932827 U CN213932827 U CN 213932827U
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Abstract
The utility model discloses a high power laser power measurement system relates to laser surveying technical field. The method comprises the following steps: the measuring device comprises a measuring reflector, a measuring module and a reflector group, wherein a non-reflecting surface of the measuring reflector is connected with a measuring end of the measuring module, the measuring direction of the measuring module is vertical to the reflecting surface of the measuring reflector, and the reflector group is used for changing the light path of incident high-power laser so that the high-power laser is emitted along the direction of the incident light path after being reflected by the measuring reflector. Utility model measurement system's small, light in weight, response speed are fast, need not water-cooling and can on-line measuring, and the measuring accuracy is high and stability is good.
Description
Technical Field
The utility model relates to a laser measurement technical field especially relates to high power laser power measurement system.
Background
The high-power laser generally refers to laser emitted by a high-power laser, the output power of the high-power laser is usually more than 1 kilowatt, and the high-power laser has important application in the fields of industrial processing, military, national defense, scientific research and the like. With the development of laser technology in recent years, the output power level of the laser is increasing. Accurate measurement of power is the basis for research and application of high power lasers, and rapid and accurate measurement of power of high power lasers has been a difficult problem.
At present, the existing high-power laser measuring methods mainly have two types: calorimetric methods and sampling methods.
The calorimetric method is characterized in that high-power laser is completely absorbed and converted into heat through an absorption material, and the laser power is obtained through the temperature rise of heat sink or water in a measuring device. However, the calorimetric method uses a device which is large in volume, heavy in weight and slow in response speed, a water cooling machine or a water storage tank needs to be equipped, and the higher the measured power is, the larger the volume of the device is, the more easily the surface of the absorption material of the measuring device is damaged by laser.
The sampling method takes out a small part of the high-power laser through a sampling device for measurement, and then calculates the power of the laser through the sampling ratio of the device. The volume of the measuring device of the sampling method is small, but the temperature of the sampler rises under the irradiation of high-power laser and generates nonlinear benefits, the sampling ratio is easy to change, the measuring result generates deviation, and compared with a calorimetric method, the measuring device of the sampling method has large measuring error and poor stability.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem that to prior art not enough, provide high power laser power measurement system.
The utility model provides an above-mentioned technical problem's technical scheme as follows:
a high power laser power measurement system comprising: the measuring reflector comprises a measuring reflector, a measuring module and a reflector group, wherein a non-reflecting surface of the measuring reflector is connected with a measuring end of the measuring module, the measuring direction of the measuring module is perpendicular to the reflecting surface of the measuring reflector, and the reflector group is used for changing the light path of incident high-power laser so that the high-power laser is emitted out along the direction of the incident light path after being reflected by the measuring reflector.
The utility model provides an another kind of technical scheme of above-mentioned technical problem as follows:
a high power laser power measurement system comprising: the measuring device comprises a measuring reflector, a measuring module and a reflector, wherein a non-reflecting surface of the measuring reflector is connected with a measuring end of the measuring module, the measuring direction of the measuring module is connected with a reflecting surface of the measuring reflector to form a preset angle, and the reflector is used for changing a light path of high-power laser reflected by the measuring reflector to enable the high-power laser to be emitted along the direction of an incident light path.
The utility model provides an another kind of technical scheme of above-mentioned technical problem as follows:
a high power laser power measurement system comprising: measurement speculum group, measurement module and speculum group, measurement speculum group includes: a first measuring mirror and a second measuring mirror, the mirror group comprising: a first mirror and a second mirror, wherein:
the non-reflective surface of the first measuring reflector is connected with the measuring end of the measuring module, and the measuring direction of the measuring module and the reflective surface of the first measuring reflector form a preset angle; the non-reflective surface of the second measuring reflector is connected with the measuring end of the measuring module, and the measuring direction of the measuring module and the reflective surface of the second measuring reflector form the preset angle;
the first reflector is used for changing the direction of an emergent light path of the high-power laser reflected by the first measuring reflector to enable the high-power laser to emit to the second reflector, the second reflector is used for changing the direction of the emergent light path of the high-power laser reflected by the first reflector to enable the high-power laser to emit to the second measuring reflector, and the second measuring reflector is used for changing the direction of the emergent light path of the high-power laser reflected by the second reflector to enable the high-power laser to emit along the direction of an incident light path of the first measuring reflector.
Because photons do not have static quality but have momentum, can produce pressure when laser shines the object surface, consequently the utility model provides a high power laser power measurement system, collect the light pressure that is produced by high power laser on the measurement speculum through measuring module, according to the proportional relation between measuring module and the laser power, can record the power of high power laser, compare in calorimetric method, measuring system's small, light in weight, response speed is fast, need not water-cooling and can on-line measurement, compare in sampling method, measuring accuracy is high and stability is good, but also have advantages such as response speed is fast, measuring accuracy is high and can on-line measurement.
Advantages of additional aspects of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.
Drawings
Fig. 1 is a schematic structural diagram of a high power laser power measurement system according to an embodiment of the present invention;
fig. 2 is another schematic structural diagram provided in an embodiment of the high power laser power measurement system of the present invention;
fig. 3 is a schematic structural diagram of another embodiment of the high power laser power measurement system of the present invention.
Detailed Description
The principles and features of the present invention are described below in conjunction with the following drawings, the illustrated embodiments are provided to explain the present invention and not to limit the scope of the invention.
As shown in fig. 1, for the embodiment of the high power laser power measurement system of the present invention provides a schematic structural diagram, the high power laser power measurement system includes: the measuring device comprises a measuring reflector 10, a measuring module 20 and a reflector group 30, wherein a non-reflective surface of the measuring reflector 10 is connected with a measuring end of the measuring module 20, a measuring direction of the measuring module 20 is perpendicular to a reflective surface of the measuring reflector 10, and the reflector group 30 is used for changing a light path of incident high-power laser so that the high-power laser is emitted along the direction of the incident light path after being reflected by the measuring reflector 10.
It should be noted that, in order to reduce loss and heat generation, the reflectance of the mirror 10 and the mirror group 30 is measured to be higher than 99.9%, and the window transmittance is measured to be higher than 99.8%.
Preferably, the mirrors and the reflectivity of the mirrors are measured to be 99.99%.
The measurement module 20 may be a force sensor, a mass sensor or a displacement sensor.
Taking a mass sensor as an example, when a laser with power P is irradiated onto the measuring mirror 10, the mass m measured by the measuring module 20 is:
wherein c is the vacuum light velocity, g is the gravity acceleration, theta is the laser incidence angle, and R and A are the reflectivity and absorptivity of the reflector, respectively. After the laser irradiates the measuring reflector, light pressure is generated on the reflecting surface of the measuring reflector, and the power of the incident laser can be obtained according to the quality reading of the measuring module 20, it should be understood that the relationship between the quality reading of the measuring module 20 and the laser power can be determined in advance.
For example, in fig. 1, assuming that the incident angle of the laser beam to the first mirror is 55 °, the incident angle of the laser beam to the measuring mirror 10 is 20 °, and the incident angle of the laser beam to the second mirror is 55 ° in fig. 1, when the resolution of the measuring module 20 is 1 μ g, the equivalent laser power resolution is about 1.56W, i.e., the conversion coefficient of mass to laser power is 1.56W/μ g. The upper limit of the power measurement of the measurement system is only limited by the damage threshold of the measurement reflector 10, so that the upper limit of the power measurement can reach 100kW or even higher, and meanwhile, the method has the advantages of high response speed, high measurement accuracy, capability of on-line measurement and the like.
Alternatively, the mass sensor model may be XSE 105.
It should be noted that fig. 1 is only an exemplary block diagram, two mirrors are used in the diagram, due to technical limitation, the laser is usually incident along the horizontal direction, so it is necessary to change the propagation direction of the optical path to make it irradiate the measuring mirror 10, and then the laser is emitted along the original optical path through the second mirror, the placement angle of the two mirrors can be set according to practical requirements, for example, the incident angle of the laser to the first mirror can be preferably 55 °, and optionally 50 ° to 60 °, the incident angle of the laser to the measuring mirror 10 can be preferably 20 °, and optionally 15 ° to 30 °, and the incident angle of the laser to the second mirror can be preferably 55 °, and optionally 50 ° to 60 °.
It should be understood that more reflectors may be disposed on the basis of fig. 1 to reflect the laser light multiple times, and then emit the laser light to the measuring reflector 10, and a symmetrical structure is disposed on the reflected light path of the measuring reflector 10 to emit the light path along the original light path, which is capable of being set by a person skilled in the art according to the reflection principle of the reflector to realize the function of emitting the light path along the original light path, and will not be described in detail herein.
Alternatively, as shown in fig. 1, a housing 40 may be further provided, the entire system being disposed within the housing 40, and a window being provided at a position where the optical path passes.
Because photons do not have static quality but have momentum, can produce pressure when laser shines the object surface, therefore the utility model provides a high power laser power measurement system, gather the light pressure that is produced by high power laser on measuring reflector 10 through measuring module 20, according to the proportional relation between measuring module 20 and the laser power, can record the power of high power laser, compare in calorimetric method, measuring system's small, light in weight, response speed is fast, need not water-cooling and can on-line measurement, because measuring module 20's measuring direction is perpendicular with the reflection surface of measuring reflector 10, consequently compare in sampling method, measuring accuracy is high and stability is good, still have advantages such as response speed is fast, measuring accuracy is high and can on-line measurement.
Optionally, in some possible embodiments, the measurement direction of the measurement module 20 is perpendicular to the direction of the incident light path of the high-power laser, and the measurement direction of the measurement module 20 is the gravity direction.
The measuring direction of the measuring module 20 is set to be the gravity direction, so that the influence of the torque generated by the self weight of the measuring reflector on the measuring result of the measuring module 20 can be avoided, the extra measuring error caused by inconsistent calibration posture and measurement posture of the measuring module 20 is eliminated, the self weight of the measuring reflector 10 can be measured as long as the self weight of the measuring reflector does not exceed the maximum weighing of the measuring module 20, the influence of the torque on the measuring result can not be generated, and the measuring accuracy is improved.
Alternatively, in some possible embodiments, as shown in fig. 1, the mirror group 30 comprises: the first reflector 31 is arranged in the incident light path of the high-power laser, and is used for changing the direction of the incident light path of the high-power laser and reflecting the high-power laser to the measuring reflector 10 at a preset angle; the second reflecting mirror 32 is disposed in the exit optical path of the high power laser, and is configured to change the direction of the exit optical path of the high power laser reflected by the measuring reflecting mirror 10, so that the high power laser is emitted along the direction of the incident optical path.
It should be understood that the preset angle may be set according to actual requirements, and the previous embodiments have been described and are not described in detail.
By adopting the two reflectors, the loss of the laser caused by reflection in the transmission process can be reduced to the greatest extent, so that the measurement result is more accurate.
It will be appreciated that in some embodiments all or part of each of the above alternative embodiments may be included.
As shown in fig. 2, for another structural schematic diagram provided by the embodiment of the high power laser power measurement system of the present invention, the high power laser power measurement system includes: the measuring reflector 10, the measuring module 20 and the reflector 33, the laser is a laser source, wherein the non-reflective surface of the measuring reflector 10 is connected with the measuring end of the measuring module 20, the measuring direction of the measuring module 20 and the reflective surface of the measuring reflector 10 form a preset angle, and the reflector 33 is used for changing the light path of the high-power laser reflected by the measuring reflector 10, so that the high-power laser is emitted along the direction of the incident light path.
It should be understood that the preset angle can be set according to actual requirements, for example, the angle in fig. 2 is 45 degrees, and the mirror 33 is set to be parallel to the measuring mirror 10, so that the laser can be emitted along the original light path, and the influence on the laser propagation is reduced.
It should be noted that, in order to reduce loss and heat generation, the reflectance of the mirror 10 and the mirror 33 was measured to be higher than 99.9%, and the window transmittance was measured to be higher than 99.8%.
Preferably, the mirrors and the reflectivity of the mirrors are measured to be 99.99%.
The measurement module 20 may be a force sensor, a mass sensor or a displacement sensor.
Taking a mass sensor as an example, when a laser with power P is irradiated onto the measuring mirror 10, the mass m measured by the measuring module 20 is:
wherein c is the vacuum light velocity, g is the gravity acceleration, theta is the laser incidence angle, and R and A are the reflectivity and absorptivity of the reflector, respectively. After the laser irradiates the measuring reflector, light pressure is generated on the reflecting surface of the measuring reflector, and the power of the incident laser can be obtained according to the quality reading of the measuring module 20, it should be understood that the relationship between the quality reading of the measuring module 20 and the laser power can be determined in advance.
The conversion coefficient between the mass of the measurement module and the laser power is affected by the placement angle of the reflector, and can be measured by limited experiments by those skilled in the art, which is not described herein again. The upper limit of the power measurement of the measurement system is only limited by the damage threshold of the measurement reflector 10, so that the upper limit of the power measurement can reach 100kW or even higher, and meanwhile, the method has the advantages of high response speed, high measurement accuracy, capability of on-line measurement and the like.
Alternatively, the mass sensor model may be XSE 105.
It should be understood that more reflectors may be disposed on the basis of fig. 2 to reflect the laser light for multiple times, and then emit the laser light to the measuring reflector 10, and a symmetrical structure is disposed on the reflected light path of the measuring reflector 10 to emit the light path along the original light path, which is capable of being set by a person skilled in the art according to the reflection principle of the reflector to realize the function of emitting the light path along the original light path, and will not be described in detail herein.
Alternatively, a housing may be provided, the entire system being disposed within the housing, and a window being provided at a position where the optical path passes.
Because photons do not have static quality but have momentum, can produce pressure when laser shines the object surface, consequently the utility model provides a high power laser power measurement system, gather the light pressure that is produced by high power laser on measuring reflector 10 through measuring module 20, according to the proportional relation between measuring module 20 and the laser power, can record the power of high power laser, compare in calorimetric method, measuring system's small, light in weight, response speed is fast, need not water-cooling and can on-line measurement, compare in sampling method, measuring accuracy is high and stability is good, but also have advantages such as response speed is fast, measuring accuracy is high and can on-line measurement.
Optionally, in some possible embodiments, the measurement direction of the measurement module 20 is perpendicular to the direction of the incident light path of the high-power laser, and the measurement direction of the measurement module 20 is the gravity direction.
The measuring direction of the measuring module 20 is set to be the gravity direction, so that the influence of the torque generated by the self weight of the measuring reflector on the measuring result of the measuring module 20 can be avoided, the extra measuring error caused by inconsistent calibration posture and measurement posture of the measuring module 20 is eliminated, the self weight of the measuring reflector 10 can be measured as long as the self weight of the measuring reflector does not exceed the maximum weighing of the measuring module 20, the influence of the torque on the measuring result can not be generated, and the measuring accuracy is improved.
It will be appreciated that in some embodiments all or part of each of the above alternative embodiments may be included.
As shown in fig. 3, for another schematic structural diagram provided by an embodiment of the high power laser power measurement system of the present invention, the high power laser power measurement system includes: measurement speculum group, measurement module 20 and speculum group, measurement speculum group includes: a first measuring mirror 11 and a second measuring mirror 12, the mirror group comprising: a first mirror 31 and a second mirror 32, laser being a laser source, wherein:
the non-reflective surface of the first measuring reflector 11 is connected with the measuring end of the measuring module 20, and the measuring direction of the measuring module 20 and the reflective surface of the first measuring reflector 11 form a preset angle; the non-reflective surface of the second measuring reflector 12 is connected with the measuring end of the measuring module 20, and the measuring direction of the measuring module 20 and the reflective surface of the second measuring reflector 12 form a preset angle;
the first reflecting mirror 31 is used for changing the direction of the emergent light path of the high-power laser light reflected by the first measuring reflecting mirror 11 to enable the high-power laser light to irradiate the second reflecting mirror 32, the second reflecting mirror 32 is used for changing the direction of the emergent light path of the high-power laser light reflected by the first reflecting mirror 31 to enable the high-power laser light to irradiate the second measuring reflecting mirror 12, and the second measuring reflecting mirror 12 is used for changing the direction of the emergent light path of the high-power laser light reflected by the second reflecting mirror 32 to enable the high-power laser light to irradiate along the direction of the incident light path of the first measuring reflecting mirror 11.
It should be understood that the preset angle may be set according to actual requirements, for example, the angle in fig. 3 is 45 degrees, and the mirror is set to be parallel to the corresponding measuring mirror, so that the laser can be emitted along the original light path, and the influence on the laser propagation is reduced.
Note that to reduce losses and heating, the mirrors and mirror reflectivities were measured to be above 99.9% and the window transmissivity above 99.8%.
Preferably, the mirrors and the reflectivity of the mirrors are measured to be 99.99%.
The measurement module 20 may be a force sensor, a mass sensor or a displacement sensor.
Taking a mass sensor as an example, when a laser with power P is irradiated onto the measurement mirror, the mass m measured by the measurement module 20 is:
wherein c is the vacuum light velocity, g is the gravity acceleration, theta is the laser incidence angle, and R and A are the reflectivity and absorptivity of the reflector, respectively. After the laser irradiates the measuring reflector, light pressure is generated on the reflecting surface of the measuring reflector, and the power of the incident laser can be obtained according to the quality reading of the measuring module 20, it should be understood that the relationship between the quality reading of the measuring module 20 and the laser power can be determined in advance.
The conversion coefficient between the mass of the measurement module and the laser power is affected by the placement angle of the reflector, and can be measured by limited experiments by those skilled in the art, which is not described herein again. The upper limit of power measurement of the measurement system is only limited by the damage threshold of the measurement reflector, so that the upper limit of power measurement can reach 100kW or even higher, and meanwhile, the method has the advantages of high response speed, high measurement accuracy, capability of online measurement and the like.
It will be appreciated that since the measurement module connects the two measurement mirrors, its actual power is half the measured power.
Alternatively, the mass sensor model may be XSE 105.
It should be understood that more reflectors may be disposed on the basis of fig. 3 to reflect the laser light multiple times, and then emit the laser light to the measuring reflector, and a symmetrical structure is disposed on the reflected light path of the measuring reflector to emit the light path along the original light path, which is capable of being set by a person skilled in the art according to the reflection principle of the reflectors to realize the function of emitting the light path along the original light path, and will not be described herein.
Alternatively, a housing may be provided, the entire system being disposed within the housing, and a window being provided at a position where the optical path passes.
Because photons do not have static quality but have momentum, can produce pressure when laser shines the object surface, consequently the utility model provides a high power laser power measurement system, collect the light pressure that is produced by high power laser on the measurement speculum through measuring module 20, according to the proportional relation between measuring module 20 and the laser power, can record the power of high power laser, compare in calorimetric method, measuring system's small, light in weight, response speed is fast, need not water-cooling and can on-line measurement, compare in sampling method, measuring accuracy is high and stability is good, but also have advantages such as response speed is fast, measuring accuracy is high and can on-line measurement.
Optionally, in some possible embodiments, the measurement direction of the measurement module 20 is perpendicular to the direction of the incident light path of the high-power laser, and the measurement direction of the measurement module 20 is the gravity direction.
The measuring direction of the measuring module 20 is set to be the gravity direction, so that the influence of the torque generated by the self weight of the measuring reflector on the measuring result of the measuring module 20 can be avoided, the extra measuring error caused by inconsistent calibration posture and measuring posture of the measuring module 20 is eliminated, the self weight of the measuring reflector can be measured as long as the self weight of the measuring reflector does not exceed the maximum weighing of the measuring module 20, the influence of the torque on the measuring result can not be generated, and the measuring accuracy is improved.
It will be appreciated that in some embodiments all or part of each of the above alternative embodiments may be included.
The reader should understand that in the description of this specification, reference to the description of the terms "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily think of various equivalent modifications or replacements within the technical scope of the present invention, and these modifications or replacements should be covered within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (10)
1. A high power laser power measurement system, comprising: the measuring reflector comprises a measuring reflector, a measuring module and a reflector group, wherein a non-reflecting surface of the measuring reflector is connected with a measuring end of the measuring module, the measuring direction of the measuring module is perpendicular to the reflecting surface of the measuring reflector, and the reflector group is used for changing the light path of incident high-power laser so that the high-power laser is emitted out along the direction of the incident light path after being reflected by the measuring reflector.
2. The high power laser power measurement system of claim 1, wherein the measurement mirror and the set of mirrors comprise a mirror having a reflectivity above 99.9% and a window transmission above 99.8% of the measurement module measurement direction.
3. The high power laser power measurement system according to claim 1, wherein the measurement direction of the measurement module is perpendicular to the direction of the incident light path of the high power laser, and the measurement direction of the measurement module is the direction of gravity.
4. The high power laser power measurement system of any one of claims 1 to 3, wherein the mirror group comprises: the first reflector is arranged in an incident light path of the high-power laser and used for changing the direction of the incident light path of the high-power laser and reflecting the high-power laser to the measuring reflector at a preset angle; the second reflector is arranged in the emergent light path of the high-power laser and used for changing the direction of the emergent light path of the high-power laser reflected by the measuring reflector so that the high-power laser is emitted along the direction of the incident light path.
5. A high power laser power measurement system, comprising: the measuring device comprises a measuring reflector, a measuring module and a reflector, wherein a non-reflecting surface of the measuring reflector is connected with a measuring end of the measuring module, the measuring direction of the measuring module is connected with a reflecting surface of the measuring reflector to form a preset angle, and the reflector is used for changing a light path of high-power laser reflected by the measuring reflector to enable the high-power laser to be emitted along the direction of an incident light path.
6. The high power laser power measurement system of claim 5, wherein the measurement mirror and the reflectivity of the mirror are higher than 99.9%, and the window transmission is higher than 99.8% of the measurement module measurement direction.
7. The high power laser power measurement system according to claim 5 or 6, wherein the measurement direction of the measurement module is perpendicular to the direction of the incident light path of the high power laser, and the measurement direction of the measurement module is the gravity direction.
8. A high power laser power measurement system, comprising: measurement speculum group, measurement module and speculum group, measurement speculum group includes: a first measuring mirror and a second measuring mirror, the mirror group comprising: a first mirror and a second mirror, wherein:
the non-reflective surface of the first measuring reflector is connected with the measuring end of the measuring module, and the measuring direction of the measuring module and the reflective surface of the first measuring reflector form a preset angle; the non-reflective surface of the second measuring reflector is connected with the measuring end of the measuring module, and the measuring direction of the measuring module and the reflective surface of the second measuring reflector form the preset angle;
the first reflector is used for changing the direction of an emergent light path of the high-power laser reflected by the first measuring reflector to enable the high-power laser to emit to the second reflector, the second reflector is used for changing the direction of the emergent light path of the high-power laser reflected by the first reflector to enable the high-power laser to emit to the second measuring reflector, and the second measuring reflector is used for changing the direction of the emergent light path of the high-power laser reflected by the second reflector to enable the high-power laser to emit along the direction of an incident light path of the first measuring reflector.
9. The high power laser power measurement system of claim 8, wherein the first, second, first and second measurement mirrors have a reflectivity above 99.9% and a window transmission above 99.8% of the measurement module measurement direction.
10. The high power laser power measurement system according to claim 9, wherein the measurement direction of the measurement module is perpendicular to the direction of the incident light path of the high power laser, and the measurement direction of the measurement module is the direction of gravity.
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