CN109405819B

CN109405819B - Monolithic integration z-axis redundancy three-axis gyroscope structure array

Info

Publication number: CN109405819B
Application number: CN201811225125.9A
Authority: CN
Inventors: 曹慧亮; 马翊翔; 刘俊; 石云波; 唐军; 申冲; 黄堃; 高晋阳; 邵星灵; 苏磬
Original assignee: North University of China
Current assignee: North University of China
Priority date: 2018-10-20
Filing date: 2018-10-20
Publication date: 2020-04-28
Anticipated expiration: 2038-10-20
Also published as: CN109405819A

Abstract

The invention relates to a three-axis gyroscope, in particular to a monolithic integration z-axis redundant three-axis gyroscope structure array. The invention solves the problems of low measurement precision and high production cost of the existing three-axis gyroscope. A monolithic integrated z-axis redundant three-axis gyroscope structure array comprises a glass substrate, a first square frame, a first driving module, an x-axis detection module, a first z-axis detection module, a first driving detection module, a second square frame, a second driving module, a y-axis detection module, a second z-axis detection module and a second driving detection module; the first driving module comprises a left longitudinal strip-shaped movable driving pole plate, a right longitudinal strip-shaped movable driving pole plate, two left anchor blocks, two right anchor blocks, two left wave-shaped elastic supporting suspension beams, two right wave-shaped elastic supporting suspension beams, eight pairs of left fixed driving pole plates, eight pairs of right fixed driving pole plates, a left elastic decoupling suspension beam and a right elastic decoupling suspension beam. The invention is suitable for high-precision fields such as military navigation, deep space exploration and the like.

Description

Monolithic integration z-axis redundancy three-axis gyroscope structure array

Technical Field

The invention relates to a three-axis gyroscope, in particular to a monolithic integration z-axis redundant three-axis gyroscope structure array.

Background

The three-axis gyroscope is a core sensitive device of an inertial navigation system, can simultaneously measure angular velocity input in the directions of an x axis, a y axis and a z axis, is widely applied to high precision fields such as military navigation, deep space exploration and the like, and has extremely wide application prospect. Existing triaxial gyroscopes are mainly classified into two categories: one type is an assembled three-axis gyroscope (formed by assembling three single-axis gyroscopes), and the three-axis gyroscope is limited by an assembling process and has the problem of low measurement precision. Another type is a monolithic integrated triaxial gyroscope, which suffers from the following problems: first, complete decoupling of each driving and detecting direction cannot be achieved, resulting in large coupling errors between modes, and thus low measurement accuracy. Secondly, the structure and the processing technology are complex, so that mass production is difficult to realize, and the production cost is high. Therefore, a brand new three-axis gyroscope needs to be invented to solve the problems of low measurement accuracy and high production cost of the existing three-axis gyroscope.

Disclosure of Invention

The invention provides a monolithic integrated z-axis redundant three-axis gyroscope structure array, which aims to solve the problems of low measurement precision and high production cost of the conventional three-axis gyroscope.

The invention is realized by adopting the following technical scheme:

a monolithic integrated z-axis redundant three-axis gyroscope structure array comprises a glass substrate, a first square frame, a first driving module, an x-axis detection module, a first z-axis detection module, a first driving detection module, a second square frame, a second driving module, a y-axis detection module, a second z-axis detection module and a second driving detection module;

the first square frame is positioned above the glass substrate, and four sides of the first square frame are parallel to the glass substrate; a gap is reserved between the lower surface of the first square frame and the upper surface of the glass substrate;

the first driving module comprises a left longitudinal strip-shaped movable driving polar plate, a right longitudinal strip-shaped movable driving polar plate, two left anchor blocks, two right anchor blocks, two left wave-shaped elastic supporting suspension beams, two right wave-shaped elastic supporting suspension beams, eight pairs of left fixed driving polar plates, eight pairs of right fixed driving polar plates, a left elastic decoupling suspension beam and a right elastic decoupling suspension beam;

the left longitudinal strip-shaped movable driving pole plate and the right longitudinal strip-shaped movable driving pole plate are symmetrically distributed at the left part and the right part of the inner cavity of the first square frame, and the left longitudinal strip-shaped movable driving pole plate and the right longitudinal strip-shaped movable driving pole plate are both parallel to the glass substrate; gaps are reserved between the lower surfaces of the left longitudinal strip-shaped movable driving polar plate and the right longitudinal strip-shaped movable driving polar plate and the upper surface of the glass substrate; the surface of the left longitudinal strip-shaped movable driving pole plate is provided with eight left rectangular driving holes which are communicated up and down, and the eight left rectangular driving holes are arranged from front to back at equal intervals; the surface of the right longitudinal strip-shaped movable driving pole plate is provided with eight right rectangular driving holes which are communicated up and down, and the eight right rectangular driving holes are equidistantly arranged from front to back; the two left anchor blocks are fixed on the upper surface of the glass substrate and are symmetrically distributed on the left front angle and the left rear angle of the inner cavity of the first square frame; the two right anchor blocks are fixed on the upper surface of the glass substrate and are symmetrically distributed on the right front angle and the right rear angle of the inner cavity of the first square frame; the head end surfaces of the two left wave-shaped elastic supporting suspension beams are respectively fixed with the front end surface and the rear end surface of the left longitudinal strip-shaped movable driving polar plate; the tail ends of the two left wave-shaped elastic supporting suspension beams are respectively fixed with the upper surface of the glass substrate through two left anchor blocks; the head end surfaces of the two right wavy elastic supporting suspension beams are respectively fixed with the front end surface and the rear end surface of the right longitudinal strip-shaped movable driving polar plate; the tail ends of the two right-side wavy elastic supporting suspension beams are fixed with the upper surface of the glass substrate through two right anchor blocks respectively; the eight pairs of left fixed driving polar plates are vertically fixed on the upper surface of the glass substrate and symmetrically distributed at the front parts and the rear parts of the inner cavities of the eight left rectangular driving holes one by one; eight pairs of left fixed driving polar plates and left longitudinal strip-shaped movable driving polar plates form a variable-pitch electrostatic force driving capacitor; the eight pairs of right fixed driving polar plates are vertically fixed on the upper surface of the glass substrate and symmetrically distributed at the front parts and the rear parts of the inner cavities of the eight right rectangular driving holes one by one; eight pairs of right fixed driving polar plates and right longitudinal strip-shaped movable driving polar plates form a variable-pitch electrostatic force driving capacitor; the left elastic decoupling suspension beam comprises a left U-shaped elastic decoupling suspension beam section, a left U-shaped elastic decoupling suspension beam section and a left straight elastic decoupling suspension beam section; two ends of the left U-shaped elastic decoupling suspension beam section are respectively and vertically fixed on the front part of the left inner side surface and the rear part of the left inner side surface of the first square frame; two ends of the left U-shaped elastic decoupling suspension beam section are respectively and vertically fixed on the front part of the left end surface and the rear part of the left end surface of the left longitudinal strip-shaped movable driving polar plate; two ends of the left straight elastic decoupling suspension beam section are respectively and vertically fixed in the middle of the bottom edge of the left U-shaped elastic decoupling suspension beam section and the middle of the bottom edge of the left U-shaped elastic decoupling suspension beam section; the right elastic decoupling suspension beam comprises a right U-shaped elastic decoupling suspension beam section, a right two U-shaped elastic decoupling suspension beam sections and a right straight elastic decoupling suspension beam section; two ends of the right U-shaped elastic decoupling suspension beam section are respectively and vertically fixed at the front part of the right inner side surface and the rear part of the right inner side surface of the first square frame; two ends of the right two U-shaped elastic decoupling suspension beam sections are respectively and vertically fixed at the front part of the right end face and the rear part of the right end face of the right longitudinal strip-shaped movable driving polar plate; two ends of the right straight elastic decoupling suspension beam section are respectively and vertically fixed in the middle of the bottom edge of the right U-shaped elastic decoupling suspension beam section and the middle of the bottom edge of the right two U-shaped elastic decoupling suspension beam sections;

the x-axis detection module comprises a longitudinal strip-shaped x-axis detection plate, four x-axis detection comb teeth, a left elastic decoupling suspension beam, a right elastic decoupling suspension beam and a right elastic decoupling suspension beam;

the longitudinal strip-shaped x-axis detection plate is positioned in the middle of the inner cavity of the first square frame and is parallel to the glass substrate; a gap is reserved between the lower surface of the longitudinal strip-shaped x-axis detection plate and the upper surface of the glass substrate; four longitudinal strip-shaped detection holes which are communicated up and down are formed in the surface of the longitudinal strip-shaped x-axis detection plate, and the four longitudinal strip-shaped detection holes are arranged equidistantly from left to right; the four x-axis detection comb teeth are vertically fixed on the upper surface of the glass substrate and are positioned in the middle of the inner cavities of the four longitudinal strip-shaped detection holes in a one-to-one correspondence manner; the upper end surfaces of the four x-axis detection comb teeth are lower than the upper surface of the longitudinal strip-shaped x-axis detection plate, and the four x-axis detection comb teeth and the longitudinal strip-shaped x-axis detection plate form a variable-area detection capacitor; the left second elastic decoupling suspension beam comprises a left rectangular connecting plate, two left connecting blocks, two left first L-shaped elastic decoupling suspension beam sections and two left second L-shaped elastic decoupling suspension beam sections; the left rectangular connecting plate is positioned between the right end face of the left longitudinal strip-shaped movable driving polar plate and the left end face of the longitudinal strip-shaped x-axis detection plate and is parallel to the glass substrate; a gap is reserved between the lower surface of the left rectangular connecting plate and the upper surface of the glass substrate; the two left connecting blocks are respectively fixed on the front part of the left end face and the rear part of the left end face of the longitudinal strip-shaped x-axis detection plate; the head ends of the two left L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed at the front part of the right end face and the rear part of the right end face of the left longitudinal strip-shaped movable driving polar plate; the tail ends of the two left L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed at the left part of the front end surface and the left part of the rear end surface of the left rectangular connecting plate; the front ends of the two left-two L-shaped elastic decoupling suspension beam sections are respectively fixed with the front part of the left end surface and the rear part of the left end surface of the longitudinal strip-shaped x-axis detection plate through two left connecting blocks; the tail ends of the two left two L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed on the right part of the front end surface and the right part of the rear end surface of the left rectangular connecting plate; the right two-elastic decoupling suspension beam comprises a right rectangular connecting plate, two right connecting blocks, two right one-L-shaped elastic decoupling suspension beam sections and two right two-L-shaped elastic decoupling suspension beam sections; the right rectangular connecting plate is positioned between the left end face of the right longitudinal strip-shaped movable driving polar plate and the right end face of the longitudinal strip-shaped x-axis detection plate and is parallel to the glass substrate; a gap is reserved between the lower surface of the right rectangular connecting plate and the upper surface of the glass substrate; the two right connecting blocks are respectively fixed at the front part of the right end face and the rear part of the right end face of the longitudinal strip-shaped x-axis detection plate; the head ends of the two right L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed at the front part of the left end surface and the rear part of the left end surface of the right longitudinal strip-shaped movable driving polar plate; the tail ends of the two right L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed at the right part of the front end surface and the right part of the rear end surface of the right rectangular connecting plate; the head ends of the two right two L-shaped elastic decoupling suspension beam sections are respectively fixed with the front part of the right end face and the rear part of the right end face of the longitudinal strip-shaped x-axis detection plate through two right connecting blocks; the tail ends of the two right two L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed at the left part of the front end surface and the left part of the rear end surface of the right rectangular connecting plate;

the first z-axis detection module comprises eight front movable z-axis detection comb teeth, eight rear movable z-axis detection comb teeth, eight pairs of front fixed z-axis detection comb teeth and eight pairs of rear fixed z-axis detection comb teeth;

the eight front movable z-axis detection comb teeth are vertically fixed on the front outer side surface of the first square frame and are arranged at equal intervals from left to right; gaps are reserved between the lower end surfaces of the eight front movable z-axis detection comb teeth and the upper surface of the glass substrate; the eight rear movable z-axis detection comb teeth are vertically fixed on the rear outer side surface of the first square frame and are arranged at equal intervals from left to right; gaps are reserved between the lower end surfaces of the eight rear movable z-axis detection comb teeth and the upper surface of the glass substrate; the eight pairs of front fixed z-axis detection comb teeth are vertically fixed on the upper surface of the glass substrate; the eight pairs of front fixed z-axis detection comb teeth are symmetrically distributed on two sides of the eight front movable z-axis detection comb teeth in a one-to-one correspondence manner, and the eight pairs of front fixed z-axis detection comb teeth and the eight front movable z-axis detection comb teeth form a differential variable-pitch detection capacitor in a one-to-one correspondence manner; the eight pairs of rear fixed z-axis detection comb teeth are vertically fixed on the upper surface of the glass substrate; the eight pairs of rear fixed z-axis detection comb teeth are symmetrically distributed on two sides of the eight rear movable z-axis detection comb teeth in a one-to-one correspondence manner, and the eight pairs of rear fixed z-axis detection comb teeth and the eight rear movable z-axis detection comb teeth form a differential variable-pitch detection capacitor in a one-to-one correspondence manner;

the first drive detection module comprises eight left movable drive detection comb teeth, eight right movable drive detection comb teeth, eight pairs of left fixed drive detection comb teeth and eight pairs of right fixed drive detection comb teeth;

the eight left movable driving detection comb teeth are vertically fixed on the left outer side surface of the first square frame, and are arranged from front to back at equal intervals; gaps are reserved between the lower end surfaces of the eight left movable driving detection comb teeth and the upper surface of the glass substrate; the eight right movable driving detection comb teeth are vertically fixed on the right outer side face of the first square frame, and are arranged from front to back at equal intervals; gaps are reserved between the lower end surfaces of the eight right movable driving detection comb teeth and the upper surface of the glass substrate; the eight pairs of left fixed driving detection comb teeth are vertically fixed on the upper surface of the glass substrate; the eight pairs of left fixed driving detection comb teeth are symmetrically distributed on two sides of the eight left movable driving detection comb teeth in a one-to-one correspondence manner, and the eight pairs of left fixed driving detection comb teeth and the eight left movable driving detection comb teeth form a differential variable-pitch detection capacitor in a one-to-one correspondence manner; the eight pairs of right fixed driving detection comb teeth are vertically fixed on the upper surface of the glass substrate; the eight pairs of right fixed driving detection comb teeth are symmetrically distributed on two sides of the eight right movable driving detection comb teeth in a one-to-one correspondence manner, and the eight pairs of right fixed driving detection comb teeth and the eight right movable driving detection comb teeth form a differential variable-pitch detection capacitor in a one-to-one correspondence manner;

the second square frame is positioned above the glass substrate, and four sides of the second square frame are parallel to the glass substrate; a gap is reserved between the lower surface of the second square frame and the upper surface of the glass substrate;

the second driving module comprises a front transverse strip-shaped movable driving pole plate, a rear transverse strip-shaped movable driving pole plate, two front anchor blocks, two rear anchor blocks, two front wave-shaped elastic supporting suspension beams, two rear wave-shaped elastic supporting suspension beams, eight pairs of front fixed driving pole plates, eight pairs of rear fixed driving pole plates, a front elastic decoupling suspension beam and a rear elastic decoupling suspension beam;

the front transverse strip-shaped movable driving pole plate and the rear transverse strip-shaped movable driving pole plate are symmetrically distributed at the front part and the rear part of the inner cavity of the second square frame, and the front transverse strip-shaped movable driving pole plate and the rear transverse strip-shaped movable driving pole plate are both parallel to the glass substrate; gaps are reserved between the lower surfaces of the front transverse strip-shaped movable driving polar plates and the lower surfaces of the rear transverse strip-shaped movable driving polar plates and the upper surface of the glass substrate; eight front rectangular driving holes which are communicated up and down are formed in the surface of the front transverse strip-shaped movable driving pole plate, and the eight front rectangular driving holes are arranged from left to right at equal intervals; eight rear rectangular driving holes which are communicated up and down are formed in the surface of the rear transverse strip-shaped movable driving pole plate, and the eight rear rectangular driving holes are arranged from left to right at equal intervals; the two front anchor blocks are fixed on the upper surface of the glass substrate and are symmetrically distributed on the left front angle of the inner cavity and the right front angle of the inner cavity of the second square frame; the two rear anchor blocks are fixed on the upper surface of the glass substrate and symmetrically distributed on the left rear corner and the right rear corner of the inner cavity of the second square frame; the head end surfaces of the two front wave-shaped elastic supporting suspension beams are respectively fixed with the left end surface and the right end surface of the front transverse strip-shaped movable driving polar plate; the tail ends of the two front wave-shaped elastic supporting suspension beams are respectively fixed with the upper surface of the glass substrate through two front anchor blocks; the head end surfaces of the two rear wave-shaped elastic supporting suspension beams are respectively fixed with the left end surface and the right end surface of the rear transverse strip-shaped movable driving polar plate; the tail ends of the two rear wave-shaped elastic supporting suspension beams are respectively fixed with the upper surface of the glass substrate through two rear anchor blocks; the eight pairs of front fixed driving pole plates are vertically fixed on the upper surface of the glass substrate and are symmetrically distributed on the left part and the right part of the inner cavity of the eight front rectangular driving holes in a one-to-one correspondence manner; eight pairs of front fixed driving polar plates and front transverse strip-shaped movable driving polar plates form a variable-pitch electrostatic force driving capacitor; the eight pairs of rear fixed driving pole plates are vertically fixed on the upper surface of the glass substrate and are symmetrically distributed on the left part and the right part of the inner cavity of the eight rear rectangular driving holes in a one-to-one correspondence manner; eight pairs of rear fixed driving polar plates and rear transverse strip-shaped movable driving polar plates form a variable-pitch electrostatic force driving capacitor; the front elastic decoupling suspension beam comprises a front U-shaped elastic decoupling suspension beam section, a front two U-shaped elastic decoupling suspension beam sections and a front straight elastic decoupling suspension beam section; two ends of the front U-shaped elastic decoupling suspension beam section are respectively and vertically fixed on the left part of the front inner side surface and the right part of the front inner side surface of the second square frame; two ends of the front two U-shaped elastic decoupling suspension beam sections are respectively and vertically fixed on the left part and the right part of the front end face of the front transverse strip-shaped movable driving pole plate; two ends of the front straight elastic decoupling suspension beam section are respectively and vertically fixed in the middle of the bottom edge of the front U-shaped elastic decoupling suspension beam section and the middle of the bottom edge of the front two U-shaped elastic decoupling suspension beam sections; the rear elastic decoupling suspension beam comprises a rear U-shaped elastic decoupling suspension beam section, a rear two U-shaped elastic decoupling suspension beam sections and a rear straight elastic decoupling suspension beam section; two ends of the rear U-shaped elastic decoupling suspension beam section are respectively and vertically fixed on the left part of the rear inner side surface and the right part of the rear inner side surface of the second square frame; two ends of the rear two U-shaped elastic decoupling suspension beam sections are respectively and vertically fixed on the left part and the right part of the rear end face of the rear transverse strip-shaped movable driving polar plate; two ends of the rear straight elastic decoupling suspension beam section are respectively and vertically fixed in the middle of the bottom edge of the rear U-shaped elastic decoupling suspension beam section and the middle of the bottom edge of the rear two U-shaped elastic decoupling suspension beam sections;

the y-axis detection module comprises a transverse strip-shaped y-axis detection plate, four y-axis detection comb teeth, two front elastic decoupling suspension beams and two rear elastic decoupling suspension beams;

the transverse strip-shaped y-axis detection plate is positioned in the middle of the inner cavity of the second square frame and is parallel to the glass substrate; a gap is reserved between the lower surface of the transverse strip-shaped y-axis detection plate and the upper surface of the glass substrate; four transverse strip-shaped detection holes which are communicated up and down are formed in the surface of the transverse strip-shaped y-axis detection plate, and the four transverse strip-shaped detection holes are arranged in an equidistant mode from front to back; the four y-axis detection comb teeth are vertically fixed on the upper surface of the glass substrate and are positioned in the middle of the inner cavities of the four transverse strip-shaped detection holes in a one-to-one correspondence manner; the upper end surfaces of the four y-axis detection comb teeth are lower than the upper surface of the transverse strip-shaped y-axis detection plate, and the four y-axis detection comb teeth and the transverse strip-shaped y-axis detection plate form a variable-area detection capacitor; the front two elastic decoupling suspension beams comprise front rectangular connecting plates, two front connecting blocks, two front L-shaped elastic decoupling suspension beam sections and two front two L-shaped elastic decoupling suspension beam sections; the front rectangular connecting plate is positioned between the rear end face of the front transverse strip-shaped movable driving pole plate and the front end face of the transverse strip-shaped y-axis detection plate and is parallel to the glass substrate; a gap is reserved between the lower surface of the front rectangular connecting plate and the upper surface of the glass substrate; the two front connecting blocks are respectively fixed on the left part of the front end surface and the right part of the front end surface of the transverse strip-shaped y-axis detection plate; the head ends of the two front L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed on the left part of the rear end surface and the right part of the rear end surface of the front transverse strip-shaped movable driving polar plate; the tail ends of two front L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed at the front part of the left end surface and the front part of the right end surface of the front rectangular connecting plate; the head ends of the two front two L-shaped elastic decoupling suspension beam sections are respectively fixed with the left part of the front end surface and the right part of the front end surface of the transverse strip-shaped y-axis detection plate through two front connecting blocks; the tail ends of the two front two L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed at the rear part of the left end face and the rear part of the right end face of the front rectangular connecting plate; the second elastic decoupling suspension beam comprises a rear rectangular connecting plate, two rear connecting blocks, two rear L-shaped elastic decoupling suspension beam sections and two rear two L-shaped elastic decoupling suspension beam sections; the rear rectangular connecting plate is positioned between the front end face of the rear transverse strip-shaped movable driving polar plate and the rear end face of the transverse strip-shaped y-axis detection plate, and is parallel to the glass substrate; a gap is reserved between the lower surface of the rear rectangular connecting plate and the upper surface of the glass substrate; the two rear connecting blocks are respectively fixed on the left part of the rear end face and the right part of the rear end face of the transverse strip-shaped y-axis detection plate; the head ends of the two rear L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed on the left part of the front end surface and the right part of the front end surface of the rear transverse strip-shaped movable driving polar plate; the tail ends of the two rear L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed at the rear part of the left end face and the rear part of the right end face of the rear rectangular connecting plate; the head ends of the two rear two L-shaped elastic decoupling suspension beam sections are respectively fixed with the left part of the rear end surface and the right part of the rear end surface of the transverse strip-shaped y-axis detection plate through two rear connecting blocks; the tail ends of the two rear two L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed at the front part of the left end surface and the front part of the right end surface of the rear rectangular connecting plate;

the second z-axis detection module comprises eight left movable z-axis detection comb teeth, eight right movable z-axis detection comb teeth, eight pairs of left fixed z-axis detection comb teeth and eight pairs of right fixed z-axis detection comb teeth;

the eight left movable z-axis detection comb teeth are vertically fixed on the left outer side surface of the second square frame, and are arranged from front to back at equal intervals; gaps are reserved between the lower end surfaces of the eight left movable z-axis detection comb teeth and the upper surface of the glass substrate; the eight right movable z-axis detection comb teeth are vertically fixed on the right outer side face of the second square frame and are arranged from front to back at equal intervals; gaps are reserved between the lower end surfaces of the eight right movable z-axis detection comb teeth and the upper surface of the glass substrate; the eight pairs of left fixed z-axis detection comb teeth are vertically fixed on the upper surface of the glass substrate; the eight pairs of left fixed z-axis detection comb teeth are symmetrically distributed on two sides of the eight left movable z-axis detection comb teeth in a one-to-one correspondence manner, and the eight pairs of left fixed z-axis detection comb teeth and the eight left movable z-axis detection comb teeth form a differential variable-pitch detection capacitor in a one-to-one correspondence manner; the eight pairs of right fixed z-axis detection comb teeth are vertically fixed on the upper surface of the glass substrate; the eight pairs of right fixed z-axis detection comb teeth are symmetrically distributed on two sides of the eight right movable z-axis detection comb teeth in a one-to-one correspondence manner, and the eight pairs of right fixed z-axis detection comb teeth and the eight right movable z-axis detection comb teeth form a differential variable-pitch detection capacitor in a one-to-one correspondence manner;

the second driving detection module comprises eight front movable driving detection comb teeth, eight rear movable driving detection comb teeth, eight pairs of front fixed driving detection comb teeth and eight pairs of rear fixed driving detection comb teeth;

the eight front movable driving detection comb teeth are vertically fixed on the front outer side surface of the second square frame and are arranged from left to right at equal intervals; gaps are reserved between the lower end surfaces of the eight front movable driving detection comb teeth and the upper surface of the glass substrate; the eight rear movable driving detection comb teeth are vertically fixed on the rear outer side surface of the second square frame and are arranged from left to right at equal intervals; gaps are reserved between the lower end surfaces of the eight rear movable driving detection comb teeth and the upper surface of the glass substrate; the eight pairs of front fixed driving detection comb teeth are vertically fixed on the upper surface of the glass substrate; the eight pairs of front fixed driving detection comb teeth are symmetrically distributed on two sides of the eight front movable driving detection comb teeth in a one-to-one correspondence manner, and the eight pairs of front fixed driving detection comb teeth and the eight front movable driving detection comb teeth form differential variable-pitch detection capacitors in a one-to-one correspondence manner; the eight pairs of rear fixed driving detection comb teeth are vertically fixed on the upper surface of the glass substrate; eight pairs of rear fixed drive detection comb teeth are symmetrically distributed on two sides of the eight rear movable drive detection comb teeth in a one-to-one correspondence manner, and the eight pairs of rear fixed drive detection comb teeth and the eight rear movable drive detection comb teeth form a differential variable-pitch detection capacitor in a one-to-one correspondence manner.

During operation, the eight left fixed driving polar plates (right fixed driving polar plates) which are positioned at the front parts of the eight left rectangular driving holes (right rectangular driving holes) inner cavities are connected together through the leads and apply forward voltage, the eight left fixed driving polar plates (right fixed driving polar plates) which are positioned at the rear parts of the eight left rectangular driving holes (right rectangular driving holes) inner cavities are connected together through the leads and apply reverse voltage, therefore, each pair of left fixed driving polar plates (right fixed driving polar plates) form a push-pull driving capacitor, the left longitudinal strip-shaped movable driving polar plates (right longitudinal strip-shaped movable driving polar plates) vibrate front and back under the driving of electrostatic force, and the first square frame and the longitudinal strip-shaped x-axis detection plate are driven to vibrate front and back. The eight front fixed driving polar plates (rear fixed driving polar plates) positioned at the left parts of the inner cavities of the eight front rectangular driving holes (rear rectangular driving holes) are connected together through leads and apply forward voltage, the eight front fixed driving polar plates (rear fixed driving polar plates) positioned at the right parts of the inner cavities of the eight front rectangular driving holes (rear rectangular driving holes) are connected together through leads and apply reverse voltage, therefore, each pair of front fixed driving polar plates (rear fixed driving polar plates) form a push-pull driving capacitor, the front transverse bar-shaped movable driving polar plates (rear transverse bar-shaped movable driving polar plates) vibrate left and right under the driving of electrostatic force, and the second square frame and the transverse bar-shaped y-axis detection plate are driven to vibrate left and right. The specific working process is as follows: firstly, measuring the input of angular speed in the x-axis direction: when no angular speed is input in the x-axis direction, the overlapping area of the longitudinal strip-shaped x-axis detection plate and the four x-axis detection comb teeth is kept unchanged, and the capacity of a capacitor formed by the longitudinal strip-shaped x-axis detection plate and the four x-axis detection comb teeth is kept unchanged. At this time, by detecting the capacitance of the capacitor formed by the longitudinal strip-shaped x-axis detection plate and the four x-axis detection comb teeth, the input of the angular velocity in the x-axis direction can be solved to be zero. When angular velocity is input in the x-axis direction, the longitudinal strip-shaped x-axis detection plate vibrates up and down under the action of the coriolis force, so that the overlapping area of the longitudinal strip-shaped x-axis detection plate and the four x-axis detection comb teeth is changed, and the capacity of a capacitor formed by the longitudinal strip-shaped x-axis detection plate and the four x-axis detection comb teeth is changed. At this time, by detecting the capacitance of the capacitor formed by the longitudinal strip-shaped x-axis detection plate and the four x-axis detection comb teeth, the angular velocity input in the x-axis direction can be solved. Secondly, measuring the input of the angular speed in the y-axis direction: when no angular speed is input in the y-axis direction, the overlapping area of the transverse strip-shaped y-axis detection plate and the four y-axis detection comb teeth is kept unchanged, and the capacity of a capacitor formed by the transverse strip-shaped y-axis detection plate and the four y-axis detection comb teeth is kept unchanged. At this time, by detecting the capacity of the capacitor formed by the transverse strip-shaped y-axis detection plate and the four y-axis detection comb teeth, the input of the angular velocity in the y-axis direction can be solved to be zero. When angular speed is input in the y-axis direction, the transverse bar-shaped y-axis detection plate vibrates up and down under the action of the Coriolis force, so that the overlapping area of the transverse bar-shaped y-axis detection plate and the four y-axis detection comb teeth is changed, and the capacity of a capacitor formed by the transverse bar-shaped y-axis detection plate and the four y-axis detection comb teeth is changed. At this time, the input of the angular velocity in the y-axis direction can be solved by detecting the capacitance of the capacitor formed by the transverse strip-shaped y-axis detection plate and the four y-axis detection comb teeth. Thirdly, measuring the input of the angular speed in the z-axis direction: when no angular velocity is input in the z-axis direction, the distances between the eight front movable z-axis detection comb teeth (rear movable z-axis detection comb teeth) and the eight pairs of front fixed z-axis detection comb teeth (rear fixed z-axis detection comb teeth) remain unchanged, the distances between the eight left movable z-axis detection comb teeth (right movable z-axis detection comb teeth) and the eight pairs of left fixed z-axis detection comb teeth (right fixed z-axis detection comb teeth) remain unchanged, the capacities of the capacitors formed by the eight front movable z-axis detection comb teeth (rear movable z-axis detection comb teeth) and the eight pairs of front fixed z-axis detection comb teeth (rear fixed z-axis detection comb teeth) remain unchanged, and the capacities of the capacitors formed by the eight left movable z-axis detection comb teeth (right movable z-axis detection comb teeth) and the eight pairs of left fixed z-axis detection comb teeth (right fixed z-axis detection comb teeth) remain unchanged. At this time, the input of the angular velocity in the z-axis direction can be resolved to zero by detecting the capacity of the capacitance formed by the eight front movable z-axis detection comb teeth (rear movable z-axis detection comb teeth) and the eight pairs of front fixed z-axis detection comb teeth (rear fixed z-axis detection comb teeth), or by detecting the capacity of the capacitance formed by the eight left movable z-axis detection comb teeth (right movable z-axis detection comb teeth) and the eight pairs of left fixed z-axis detection comb teeth (right fixed z-axis detection comb teeth). When an angular velocity is input in the z-axis direction, the first square frame vibrates left and right under the action of the coriolis force, and the second square frame vibrates front and back under the action of the coriolis force, so that the distances between the eight front movable z-axis detection comb teeth (rear movable z-axis detection comb teeth) and the eight pairs of front fixed z-axis detection comb teeth (rear fixed z-axis detection comb teeth) change, the distances between the eight front movable z-axis detection comb teeth (right movable z-axis detection comb teeth) and the eight pairs of left fixed z-axis detection comb teeth (right fixed z-axis detection comb teeth) change, the capacities of the capacitors formed by the eight front movable z-axis detection comb teeth (rear movable z-axis detection comb teeth) and the eight pairs of front fixed z-axis detection comb teeth (rear fixed z-axis detection comb teeth) change, and the capacities of the capacitors formed by the eight left movable z-axis detection comb teeth (right movable z-axis detection comb teeth) and the eight pairs of left fixed z-axis detection comb teeth (right fixed z-axis detection comb teeth) change simultaneously A change occurs. At this time, the angular velocity input in the z-axis direction can be resolved by detecting the capacity of the capacitance formed by the eight front movable z-axis detection comb teeth (rear movable z-axis detection comb teeth) and the eight pairs of front fixed z-axis detection comb teeth (rear fixed z-axis detection comb teeth), or by detecting the capacity of the capacitance formed by the eight left movable z-axis detection comb teeth (right movable z-axis detection comb teeth) and the eight pairs of left fixed z-axis detection comb teeth (right fixed z-axis detection comb teeth). Fourthly, driving and detecting: when the first square frame vibrates back and forth, the eight left movable drive detection comb teeth (right movable drive detection comb teeth) vibrate back and forth along with the first square frame, so that the distance between the eight left movable drive detection comb teeth (right movable drive detection comb teeth) and the eight left fixed drive detection comb teeth (right fixed drive detection comb teeth) changes, and the capacity of the capacitor formed by the eight left movable drive detection comb teeth (right movable drive detection comb teeth) and the eight left fixed drive detection comb teeth (right fixed drive detection comb teeth) changes. At this time, the drive detection function can be realized by detecting the capacity of the capacitance formed by the eight left movable drive detection comb teeth (right movable drive detection comb teeth) and the eight pairs of left fixed drive detection comb teeth (right fixed drive detection comb teeth). When the second square frame is vibrated left and right, the eight front movable drive detection comb teeth (rear movable drive detection comb teeth) are vibrated left and right therewith, so that the distances between the eight front movable drive detection comb teeth (rear movable drive detection comb teeth) and the eight pairs of front fixed drive detection comb teeth (rear fixed drive detection comb teeth) are changed, and the capacities of the capacitors formed by the eight front movable drive detection comb teeth (rear movable drive detection comb teeth) and the eight pairs of front fixed drive detection comb teeth (rear fixed drive detection comb teeth) are changed. At this time, the drive detection function can be realized by detecting the capacity of the capacitance formed by the eight front movable drive detection comb teeth (rear movable drive detection comb teeth) and the eight pairs of front fixed drive detection comb teeth (rear fixed drive detection comb teeth).

Based on the process, compared with the existing three-axis gyroscope, the monolithic integration z-axis redundant three-axis gyroscope structure array realizes the simultaneous measurement of the angular velocity input in the directions of the x axis, the y axis and the z axis by adopting a brand new structure, thereby having the following advantages: compared with the existing assembled triaxial gyroscope, the invention adopts a monolithic integrated structure, so that the invention is not limited by the assembly process any more, thereby effectively improving the measurement precision. Compared with the existing monolithic integrated triaxial gyroscope, the invention has the following advantages: first, the invention realizes the complete decoupling of each driving and detecting direction, thereby effectively reducing the coupling error between each mode and effectively improving the measuring precision. Secondly, the structure and the processing technology of the invention are simpler, so that the invention can realize mass production, thereby effectively reducing the production cost.

The three-axis gyroscope has a reasonable structure and an ingenious design, effectively solves the problems of low measurement precision and high production cost of the conventional three-axis gyroscope, and is suitable for high precision fields such as military navigation, deep space exploration and the like.

Drawings

Fig. 1 is a schematic structural view of the present invention.

In the figure: 1-glass substrate, 2-first square frame, 301 a-left longitudinal strip movable driving pole plate, 301 b-right longitudinal strip movable driving pole plate, 302 a-left anchor block, 302 b-right anchor block, 303 a-left wave elastic supporting suspension beam, 303 b-right wave elastic supporting suspension beam, 304 a-left fixed driving pole plate, 304 b-right fixed driving pole plate, 305 a-left elastic decoupling suspension beam, 305 b-right elastic decoupling suspension beam, 401-longitudinal strip x-axis detection plate, 402-x-axis detection comb tooth, 403 a-left elastic decoupling suspension beam, 403 b-right elastic decoupling suspension beam, 501 a-front movable z-axis detection comb tooth, 501 b-rear movable z-axis detection comb tooth, 502 a-front fixed z-axis detection comb tooth, 502 b-rear fixed z-axis sensing comb, 601 a-left movable drive sensing comb, 601 b-right movable drive sensing comb, 602 a-left fixed drive sensing comb, 602 b-right fixed drive sensing comb, 7-second square frame, 801 a-front transverse strip movable drive plate, 801 b-rear transverse strip movable drive plate, 802 a-front anchor block, 802 b-rear anchor block, 803 a-front wavy elastic support cantilever, 803 b-rear wavy elastic support cantilever, 804 a-front fixed drive plate, 804 b-rear fixed drive plate, 805 a-front elastic decoupling cantilever, 805 b-rear elastic decoupling cantilever, 901-transverse strip y-axis sensing plate, 902-y-axis sensing comb, 903 a-front elastic decoupling cantilever, 903 b-two rear elastic decoupling suspension beams, 1001 a-left movable z-axis detection comb teeth, 1001 b-right movable z-axis detection comb teeth, 1002 a-left fixed z-axis detection comb teeth, 1002 b-right fixed z-axis detection comb teeth, 1101 a-front movable driving detection comb teeth, 1101 b-rear movable driving detection comb teeth, 1102 a-front fixed driving detection comb teeth and 1102 b-rear fixed driving detection comb teeth.

Detailed Description

A monolithic integrated z-axis redundant three-axis gyroscope structure array comprises a glass substrate 1, a first square frame 2, a first driving module, an x-axis detection module, a first z-axis detection module, a first driving detection module, a second square frame 7, a second driving module, a y-axis detection module, a second z-axis detection module and a second driving detection module;

the first square frame 2 is positioned above the glass substrate 1, and four sides of the first square frame 2 are parallel to the glass substrate 1; a gap is left between the lower surface of the first square frame 2 and the upper surface of the glass substrate 1;

the first driving module comprises a left longitudinal strip-shaped movable driving pole plate 301a, a right longitudinal strip-shaped movable driving pole plate 301b, two left anchor blocks 302a, two right anchor blocks 302b, two left wave-shaped elastic supporting suspension beams 303a, two right wave-shaped elastic supporting suspension beams 303b, eight pairs of left fixed driving pole plates 304a, eight pairs of right fixed driving pole plates 304b, a left elastic decoupling suspension beam 305a and a right elastic decoupling suspension beam 305 b;

the left longitudinal strip-shaped movable driving pole plate 301a and the right longitudinal strip-shaped movable driving pole plate 301b are symmetrically distributed at the left part and the right part of the inner cavity of the first square frame 2, and the left longitudinal strip-shaped movable driving pole plate 301a and the right longitudinal strip-shaped movable driving pole plate 301b are both parallel to the glass substrate 1; gaps are reserved between the lower surfaces of the left longitudinal strip-shaped movable driving pole plate 301a and the right longitudinal strip-shaped movable driving pole plate 301b and the upper surface of the glass substrate 1; eight left rectangular driving holes which are communicated up and down are formed in the surface of the left longitudinal strip-shaped movable driving pole plate 301a, and the eight left rectangular driving holes are arranged in a forward and backward equidistant mode; eight right rectangular driving holes which are communicated up and down are formed in the surface of the right longitudinal strip-shaped movable driving pole plate 301b, and the eight right rectangular driving holes are arranged in a forward and backward equidistant manner; the two left anchor blocks 302a are fixed on the upper surface of the glass substrate 1, and the two left anchor blocks 302a are symmetrically distributed on the front left corner and the rear left corner of the inner cavity of the first square frame 2; the two right anchor blocks 302b are fixed on the upper surface of the glass substrate 1, and the two right anchor blocks 302b are symmetrically distributed on the right front corner and the right rear corner of the inner cavity of the first square frame 2; the head end surfaces of the two left wave-shaped elastic supporting suspension beams 303a are respectively fixed with the front end surface and the rear end surface of the left longitudinal strip-shaped movable driving polar plate 301 a; the tail ends of the two left wave-shaped elastic supporting suspension beams 303a are respectively fixed with the upper surface of the glass substrate 1 through two left anchor blocks 302 a; the head end surfaces of the two right wavy elastic supporting suspension beams 303b are respectively fixed with the front end surface and the rear end surface of the right longitudinal strip-shaped movable driving pole plate 301 b; the tail ends of the two right-side wavy elastic supporting suspension beams 303b are respectively fixed with the upper surface of the glass substrate 1 through two right anchor blocks 302 b; the eight pairs of left fixed driving pole plates 304a are vertically fixed on the upper surface of the glass substrate 1, and the eight pairs of left fixed driving pole plates 304a are symmetrically distributed at the front parts and the rear parts of the inner cavities of the eight left rectangular driving holes one by one; eight pairs of left fixed driving polar plates 304a and left longitudinal strip-shaped movable driving polar plates 301a form a variable-pitch electrostatic force driving capacitor; the eight pairs of right fixed driving pole plates 304b are vertically fixed on the upper surface of the glass substrate 1, and the eight pairs of right fixed driving pole plates 304b are symmetrically distributed at the front parts and the rear parts of the inner cavities of the eight right rectangular driving holes one by one; eight pairs of right fixed driving polar plates 304b and right longitudinal strip-shaped movable driving polar plates 301b form a variable-pitch electrostatic force driving capacitor; the left elastic decoupling suspension beam 305a comprises a left U-shaped elastic decoupling suspension beam section, a left U-shaped elastic decoupling suspension beam section and a left straight elastic decoupling suspension beam section; two ends of the left U-shaped elastic decoupling suspension beam section are respectively and vertically fixed at the front part of the left inner side surface and the rear part of the left inner side surface of the first square frame 2; two ends of the left U-shaped elastic decoupling suspension beam section are respectively and vertically fixed on the front part of the left end surface and the rear part of the left end surface of the left longitudinal strip-shaped movable driving pole plate 301 a; two ends of the left straight elastic decoupling suspension beam section are respectively and vertically fixed in the middle of the bottom edge of the left U-shaped elastic decoupling suspension beam section and the middle of the bottom edge of the left U-shaped elastic decoupling suspension beam section; the right elastic decoupling suspension beam 305b comprises a right U-shaped elastic decoupling suspension beam section, a right two U-shaped elastic decoupling suspension beam sections and a right straight elastic decoupling suspension beam section; two ends of the right U-shaped elastic decoupling suspension beam section are respectively and vertically fixed at the front part of the right inner side surface and the rear part of the right inner side surface of the first square frame 2; two ends of the right two U-shaped elastic decoupling suspension beam sections are respectively and vertically fixed at the front part of the right end face and the rear part of the right end face of the right longitudinal strip-shaped movable driving pole plate 301 b; two ends of the right straight elastic decoupling suspension beam section are respectively and vertically fixed in the middle of the bottom edge of the right U-shaped elastic decoupling suspension beam section and the middle of the bottom edge of the right two U-shaped elastic decoupling suspension beam sections;

the x-axis detection module comprises a longitudinal strip-shaped x-axis detection plate 401, four x-axis detection comb teeth 402, a left two elastic decoupling suspension beams 403a and a right two elastic decoupling suspension beams 403 b;

the longitudinal strip-shaped x-axis detection plate 401 is positioned in the middle of the inner cavity of the first square frame 2, and the longitudinal strip-shaped x-axis detection plate 401 is parallel to the glass substrate 1; a gap is reserved between the lower surface of the longitudinal strip-shaped x-axis detection plate 401 and the upper surface of the glass substrate 1; four vertical strip-shaped detection holes which are communicated up and down are formed in the surface of the vertical strip-shaped x-axis detection plate 401, and the four vertical strip-shaped detection holes are arranged equidistantly from left to right; the four x-axis detection comb teeth 402 are vertically fixed on the upper surface of the glass substrate 1, and the four x-axis detection comb teeth 402 are located in the middle of the inner cavities of the four longitudinal strip-shaped detection holes in a one-to-one correspondence manner; the upper end surfaces of the four x-axis detection comb teeth 402 are lower than the upper surface of the longitudinal strip-shaped x-axis detection plate 401, and the four x-axis detection comb teeth 402 and the longitudinal strip-shaped x-axis detection plate 401 form a variable-area detection capacitor; the left second elastic decoupling suspension beam 403a comprises a left rectangular connecting plate, two left connecting blocks, two left first L-shaped elastic decoupling suspension beam sections and two left second L-shaped elastic decoupling suspension beam sections; the left rectangular connecting plate is positioned between the right end face of the left longitudinal strip-shaped movable driving polar plate 301a and the left end face of the longitudinal strip-shaped x-axis detection plate 401, and is parallel to the glass substrate 1; a gap is reserved between the lower surface of the left rectangular connecting plate and the upper surface of the glass substrate 1; the two left connecting blocks are respectively fixed on the front part of the left end face and the rear part of the left end face of the longitudinal strip-shaped x-axis detection plate 401; the head ends of the two left L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed at the front part of the right end face and the rear part of the right end face of the left longitudinal strip-shaped movable driving pole plate 301 a; the tail ends of the two left L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed at the left part of the front end surface and the left part of the rear end surface of the left rectangular connecting plate; the head ends of the two left two L-shaped elastic decoupling suspension beam sections are respectively fixed with the front part of the left end surface and the rear part of the left end surface of the longitudinal strip-shaped x-axis detection plate 401 through two left connecting blocks; the tail ends of the two left two L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed on the right part of the front end surface and the right part of the rear end surface of the left rectangular connecting plate; the right two-elastic decoupling suspension beam 403b comprises a right rectangular connecting plate, two right connecting blocks, two right one-L-shaped elastic decoupling suspension beam sections and two right two-L-shaped elastic decoupling suspension beam sections; the right rectangular connecting plate is positioned between the left end face of the right longitudinal strip-shaped movable driving pole plate 301b and the right end face of the longitudinal strip-shaped x-axis detection plate 401, and is parallel to the glass substrate 1; a gap is reserved between the lower surface of the right rectangular connecting plate and the upper surface of the glass substrate 1; the two right connecting blocks are respectively fixed on the front part of the right end face and the rear part of the right end face of the longitudinal strip-shaped x-axis detection plate 401; the head ends of the two right L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed at the front part of the left end surface and the rear part of the left end surface of the right longitudinal strip-shaped movable driving polar plate 301 b; the tail ends of the two right L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed at the right part of the front end surface and the right part of the rear end surface of the right rectangular connecting plate; the head ends of the two right two L-shaped elastic decoupling suspension beam sections are respectively fixed with the front part of the right end face and the rear part of the right end face of the longitudinal strip-shaped x-axis detection plate 401 through two right connecting blocks; the tail ends of the two right two L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed at the left part of the front end surface and the left part of the rear end surface of the right rectangular connecting plate;

the first z-axis detection module comprises eight front movable z-axis detection comb teeth 501a, eight rear movable z-axis detection comb teeth 501b, eight pairs of front fixed z-axis detection comb teeth 502a, and eight pairs of rear fixed z-axis detection comb teeth 502 b;

the eight front movable z-axis detection comb teeth 501a are vertically fixed on the front outer side surface of the first square frame 2, and the eight front movable z-axis detection comb teeth 501a are arranged equidistantly from left to right; gaps are reserved between the lower end faces of the eight front movable z-axis detection comb teeth 501a and the upper surface of the glass substrate 1; the eight rear movable z-axis detection comb teeth 501b are vertically fixed on the rear outer side surface of the first square frame 2, and the eight rear movable z-axis detection comb teeth 501b are arranged equidistantly from left to right; gaps are reserved between the lower end faces of the eight rear movable z-axis detection comb teeth 501b and the upper surface of the glass substrate 1; the eight pairs of front fixed z-axis detection comb teeth 502a are all vertically fixed on the upper surface of the glass substrate 1; the eight pairs of front fixed z-axis detection comb teeth 502a are symmetrically distributed on two sides of the eight front movable z-axis detection comb teeth 501a one-to-one, and the eight pairs of front fixed z-axis detection comb teeth 502a and the eight front movable z-axis detection comb teeth 501a form a differential variable-pitch detection capacitor one-to-one; the eight pairs of rear fixed z-axis detection comb teeth 502b are all vertically fixed on the upper surface of the glass substrate 1; the eight pairs of rear fixed z-axis detection comb teeth 502b are symmetrically distributed on two sides of the eight rear movable z-axis detection comb teeth 501b in a one-to-one correspondence manner, and the eight pairs of rear fixed z-axis detection comb teeth 502b and the eight rear movable z-axis detection comb teeth 501b form a differential variable-pitch detection capacitor in a one-to-one correspondence manner;

the first drive detection module comprises eight left movable drive detection combs 601a, eight right movable drive detection combs 601b, eight pairs of left fixed drive detection combs 602a, and eight pairs of right fixed drive detection combs 602 b;

the eight left movable driving detection comb teeth 601a are vertically fixed on the left outer side surface of the first square frame 2, and the eight left movable driving detection comb teeth 601a are arranged from front to back at equal intervals; gaps are reserved between the lower end faces of the eight left movable driving detection comb teeth 601a and the upper surface of the glass substrate 1; the eight right movable driving detection comb teeth 601b are vertically fixed on the right outer side surface of the first square frame 2, and the eight right movable driving detection comb teeth 601b are arranged from front to back at equal intervals; gaps are reserved between the lower end faces of the eight right movable driving detection comb teeth 601b and the upper surface of the glass substrate 1; the eight pairs of left fixed drive detection combs 602a are all vertically fixed to the upper surface of the glass substrate 1; eight pairs of left fixed drive detection combs 602a are symmetrically distributed on two sides of the eight left movable drive detection combs 601a in a one-to-one correspondence manner, and the eight pairs of left fixed drive detection combs 602a and the eight left movable drive detection combs 601a form a differential variable-pitch detection capacitor in a one-to-one correspondence manner; the eight pairs of right fixed drive detection comb teeth 602b are all vertically fixed on the upper surface of the glass substrate 1; eight pairs of right fixed drive detection combs 602b are symmetrically distributed on two sides of the eight right movable drive detection combs 601b in a one-to-one correspondence manner, and the eight pairs of right fixed drive detection combs 602b and the eight right movable drive detection combs 601b form a differential variable-pitch detection capacitor in a one-to-one correspondence manner;

the second square frame 7 is positioned above the glass substrate 1, and four sides of the second square frame 7 are parallel to the glass substrate 1; a gap is left between the lower surface of the second square frame 7 and the upper surface of the glass substrate 1;

the second driving module comprises a front transverse strip-shaped movable driving pole plate 801a, a rear transverse strip-shaped movable driving pole plate 801b, two front anchor blocks 802a, two rear anchor blocks 802b, two front wave-shaped elastic supporting suspension beams 803a, two rear wave-shaped elastic supporting suspension beams 803b, eight pairs of front fixed driving pole plates 804a, eight pairs of rear fixed driving pole plates 804b, a front elastic decoupling suspension beam 805a and a rear elastic decoupling suspension beam 805 b;

the front transverse strip-shaped movable driving pole plate 801a and the rear transverse strip-shaped movable driving pole plate 801b are symmetrically distributed at the front part and the rear part of the inner cavity of the second square frame 7, and the front transverse strip-shaped movable driving pole plate 801a and the rear transverse strip-shaped movable driving pole plate 801b are parallel to the glass substrate 1; gaps are reserved between the lower surfaces of the front transverse strip-shaped movable driving polar plates 801a and the lower surfaces of the rear transverse strip-shaped movable driving polar plates 801b and the upper surface of the glass substrate 1; eight front rectangular driving holes which are communicated up and down are formed in the surface of the front transverse strip-shaped movable driving pole plate 801a, and the eight front rectangular driving holes are arranged equidistantly from left to right; eight rear rectangular driving holes which are communicated up and down are formed in the surface of the rear transverse strip-shaped movable driving pole plate 801b, and the eight rear rectangular driving holes are arranged equidistantly from left to right; the two front anchor blocks 802a are fixed on the upper surface of the glass substrate 1, and the two front anchor blocks 802a are symmetrically distributed on the left front corner and the right front corner of the inner cavity of the second square frame 7; the two rear anchor blocks 802b are fixed on the upper surface of the glass substrate 1, and the two rear anchor blocks 802b are symmetrically distributed on the left rear corner and the right rear corner of the inner cavity of the second square frame 7; the head end surfaces of two front wave-shaped elastic supporting suspension beams 803a are respectively fixed with the left end surface and the right end surface of the front transverse strip-shaped movable driving pole plate 801 a; the tail ends of the two front wave-shaped elastic supporting suspension beams 803a are respectively fixed with the upper surface of the glass substrate 1 through two front anchor blocks 802 a; the head end surfaces of two rear wave-shaped elastic supporting suspension beams 803b are respectively fixed with the left end surface and the right end surface of the rear transverse strip-shaped movable driving pole plate 801 b; the tail ends of the two rear wave-shaped elastic supporting suspension beams 803b are respectively fixed with the upper surface of the glass substrate 1 through two rear anchor blocks 802 b; the eight pairs of front fixed driving pole plates 804a are vertically fixed on the upper surface of the glass substrate 1, and the eight pairs of front fixed driving pole plates 804a are symmetrically distributed on the left part and the right part of the inner cavity of the eight front rectangular driving holes in a one-to-one correspondence manner; eight pairs of front fixed driving polar plates 804a and front transverse strip-shaped movable driving polar plates 801a form a variable-pitch electrostatic force driving capacitor; the eight pairs of rear fixed driving pole plates 804b are vertically fixed on the upper surface of the glass substrate 1, and the eight pairs of rear fixed driving pole plates 804b are symmetrically distributed on the left part and the right part of the inner cavity of the eight rear rectangular driving holes in a one-to-one correspondence manner; eight pairs of rear fixed driving polar plates 804b and rear transverse strip-shaped movable driving polar plates 801b form a variable-pitch electrostatic force driving capacitor; the former elastic decoupling suspension beam 805a comprises a former U-shaped elastic decoupling suspension beam section, a former two U-shaped elastic decoupling suspension beam sections and a former straight elastic decoupling suspension beam section; two ends of the front U-shaped elastic decoupling suspension beam section are respectively and vertically fixed on the left part of the front inner side surface and the right part of the front inner side surface of the second square frame 7; two ends of the front two U-shaped elastic decoupling suspension beam sections are respectively and vertically fixed on the left part and the right part of the front end face of the front transverse strip-shaped movable driving pole plate 801 a; two ends of the front straight elastic decoupling suspension beam section are respectively and vertically fixed in the middle of the bottom edge of the front U-shaped elastic decoupling suspension beam section and the middle of the bottom edge of the front two U-shaped elastic decoupling suspension beam sections; the rear elastic decoupling suspension beam 805b comprises a rear U-shaped elastic decoupling suspension beam section, a rear two U-shaped elastic decoupling suspension beam sections and a rear straight elastic decoupling suspension beam section; two ends of the rear U-shaped elastic decoupling suspension beam section are respectively and vertically fixed on the left part of the rear inner side surface and the right part of the rear inner side surface of the second square frame 7; two ends of the rear two U-shaped elastic decoupling suspension beam sections are respectively and vertically fixed on the left part and the right part of the rear end face of the rear transverse strip-shaped movable driving pole plate 801 b; two ends of the rear straight elastic decoupling suspension beam section are respectively and vertically fixed in the middle of the bottom edge of the rear U-shaped elastic decoupling suspension beam section and the middle of the bottom edge of the rear two U-shaped elastic decoupling suspension beam sections;

the y-axis detection module comprises a transverse strip-shaped y-axis detection plate 901, four y-axis detection comb teeth 902, two front elastic decoupling suspension beams 903a and two rear elastic decoupling suspension beams 903 b;

the transverse strip-shaped y-axis detection plate 901 is positioned in the middle of the inner cavity of the second square frame 7, and the transverse strip-shaped y-axis detection plate 901 is parallel to the glass substrate 1; a gap is reserved between the lower surface of the transverse strip-shaped y-axis detection plate 901 and the upper surface of the glass substrate 1; four transverse strip-shaped detection holes which are communicated up and down are formed in the surface of the transverse strip-shaped y-axis detection plate 901, and the four transverse strip-shaped detection holes are arranged in a forward and backward equidistant manner; the four y-axis detection comb teeth 902 are vertically fixed on the upper surface of the glass substrate 1, and the four y-axis detection comb teeth 902 are located in the middle of the inner cavities of the four transverse strip-shaped detection holes in a one-to-one correspondence manner; the upper end surfaces of the four y-axis detection comb teeth 902 are lower than the upper surface of the transverse strip-shaped y-axis detection plate 901, and the four y-axis detection comb teeth 902 and the transverse strip-shaped y-axis detection plate 901 form a variable-area detection capacitor; the front two elastic decoupling suspension beams 903a comprise front rectangular connecting plates, two front connecting blocks, two front L-shaped elastic decoupling suspension beam sections and two front two L-shaped elastic decoupling suspension beam sections; the front rectangular connecting plate is positioned between the rear end face of the front transverse strip-shaped movable driving pole plate 801a and the front end face of the transverse strip-shaped y-axis detection plate 901, and is parallel to the glass substrate 1; a gap is reserved between the lower surface of the front rectangular connecting plate and the upper surface of the glass substrate 1; the two front connecting blocks are respectively fixed on the left part and the right part of the front end face of the transverse strip-shaped y-axis detection plate 901; the head ends of two front L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed on the left part and the right part of the rear end face of the front transverse strip-shaped movable driving pole plate 801 a; the tail ends of two front L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed at the front part of the left end surface and the front part of the right end surface of the front rectangular connecting plate; the head ends of the two front two L-shaped elastic decoupling suspension beam sections are respectively fixed with the left part of the front end surface and the right part of the front end surface of the transverse strip-shaped y-axis detection plate 901 through two front connecting blocks; the tail ends of the two front two L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed at the rear part of the left end face and the rear part of the right end face of the front rectangular connecting plate; the rear two elastic decoupling suspension beams 903b comprise rear rectangular connecting plates, two rear connecting blocks, two rear L-shaped elastic decoupling suspension beam sections and two rear two L-shaped elastic decoupling suspension beam sections; the rear rectangular connecting plate is positioned between the front end face of the rear transverse strip-shaped movable driving pole plate 801b and the rear end face of the transverse strip-shaped y-axis detection plate 901, and is parallel to the glass substrate 1; a gap is reserved between the lower surface of the rear rectangular connecting plate and the upper surface of the glass substrate 1; the two rear connecting blocks are respectively fixed on the left part and the right part of the rear end face of the transverse strip-shaped y-axis detection plate 901; the head ends of the two rear L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed on the left part of the front end surface and the right part of the front end surface of the rear transverse strip-shaped movable driving pole plate 801 b; the tail ends of the two rear L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed at the rear part of the left end face and the rear part of the right end face of the rear rectangular connecting plate; the head ends of the two rear two L-shaped elastic decoupling suspension beam sections are respectively fixed with the left part of the rear end surface and the right part of the rear end surface of the transverse strip-shaped y-axis detection plate 901 through two rear connecting blocks; the tail ends of the two rear two L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed at the front part of the left end surface and the front part of the right end surface of the rear rectangular connecting plate;

the second z-axis detection module comprises eight left movable z-axis detection comb teeth 1001a, eight right movable z-axis detection comb teeth 1001b, eight pairs of left fixed z-axis detection comb teeth 1002a, and eight pairs of right fixed z-axis detection comb teeth 1002 b;

the eight left movable z-axis detection comb teeth 1001a are vertically fixed on the left outer side surface of the second square frame 7, and the eight left movable z-axis detection comb teeth 1001a are arranged from front to back at equal intervals; gaps are reserved between the lower end faces of the eight left movable z-axis detection comb teeth 1001a and the upper surface of the glass substrate 1; the eight right movable z-axis detection comb teeth 1001b are vertically fixed to the right outer side surface of the second square frame 7, and the eight right movable z-axis detection comb teeth 1001b are arranged equidistantly from front to back; gaps are reserved between the lower end faces of the eight right movable z-axis detection comb teeth 1001b and the upper surface of the glass substrate 1; the eight pairs of left fixed z-axis detection comb teeth 1002a are all vertically fixed on the upper surface of the glass substrate 1; the eight pairs of left fixed z-axis detection comb teeth 1002a are symmetrically distributed on two sides of the eight left movable z-axis detection comb teeth 1001a in a one-to-one correspondence manner, and the eight pairs of left fixed z-axis detection comb teeth 1002a and the eight left movable z-axis detection comb teeth 1001a form a differential variable-pitch detection capacitor in a one-to-one correspondence manner; the eight pairs of right fixed z-axis detection comb teeth 1002b are all vertically fixed on the upper surface of the glass substrate 1; the eight pairs of right fixed z-axis detection comb teeth 1002b are symmetrically distributed on two sides of the eight right movable z-axis detection comb teeth 1001b in a one-to-one correspondence manner, and the eight pairs of right fixed z-axis detection comb teeth 1002b and the eight right movable z-axis detection comb teeth 1001b form a differential variable-pitch detection capacitor in a one-to-one correspondence manner;

the second drive detection module comprises eight front movable drive detection combs 1101a, eight rear movable drive detection combs 1101b, eight pairs of front fixed drive detection combs 1102a, and eight pairs of rear fixed drive detection combs 1102 b;

the eight front movable driving detection comb teeth 1101a are vertically fixed on the front outer side surface of the second square frame 7, and the eight front movable driving detection comb teeth 1101a are arranged from left to right at equal intervals; gaps are reserved between the lower end faces of the eight front movable driving detection comb teeth 1101a and the upper surface of the glass substrate 1; the eight rear movable driving detection comb teeth 1101b are vertically fixed on the rear outer side surface of the second square frame 7, and the eight rear movable driving detection comb teeth 1101b are arranged from left to right at equal intervals; gaps are reserved between the lower end faces of the eight rear movable driving detection comb teeth 1101b and the upper surface of the glass substrate 1; the eight pairs of front fixed driving detection comb teeth 1102a are vertically fixed on the upper surface of the glass substrate 1; eight pairs of front fixed drive detection combs 1102a are symmetrically distributed on two sides of the eight front movable drive detection combs 1101a one-to-one, and the eight pairs of front fixed drive detection combs 1102a and the eight front movable drive detection combs 1101a form differential variable-pitch detection capacitors one-to-one; the eight pairs of rear fixed driving detection comb teeth 1102b are vertically fixed on the upper surface of the glass substrate 1; eight pairs of rear fixed drive detection combs 1102b are symmetrically distributed on both sides of the eight rear movable drive detection combs 1101b in a one-to-one correspondence, and the eight pairs of rear fixed drive detection combs 1102b and the eight rear movable drive detection combs 1101b form a differential variable pitch detection capacitor in a one-to-one correspondence.

In specific implementation, four x-axis detection lead electrodes, eight pairs of front z-axis detection lead electrodes, eight pairs of rear z-axis detection lead electrodes, eight pairs of left drive detection lead electrodes, eight pairs of right drive detection lead electrodes, four y-axis detection lead electrodes, eight pairs of left z-axis detection lead electrodes, eight pairs of right z-axis detection lead electrodes, eight pairs of front drive detection lead electrodes, and eight pairs of rear drive detection lead electrodes are sputtered on the upper surface of the glass substrate 1; the four x-axis detection lead electrodes are connected with the four x-axis detection comb teeth 402 in a one-to-one correspondence manner; eight pairs of front z-axis detection lead electrodes are connected with eight pairs of front fixed z-axis detection comb teeth 502a in a one-to-one correspondence manner; eight pairs of rear z-axis detection lead electrodes are connected with eight pairs of rear fixed z-axis detection comb teeth 502b in a one-to-one correspondence manner; eight pairs of left drive detection lead electrodes are connected with eight pairs of left fixed drive detection comb teeth 602a in a one-to-one correspondence; eight pairs of right drive detection lead electrodes are connected with eight pairs of right fixed drive detection comb teeth 602b in a one-to-one correspondence; the four y-axis detection lead electrodes are connected with the four y-axis detection comb teeth 902 in a one-to-one correspondence manner; eight pairs of left z-axis detection lead electrodes are connected with eight pairs of left fixed z-axis detection comb teeth 1002a in a one-to-one correspondence manner; the eight pairs of right z-axis detection lead electrodes are connected with the eight pairs of right fixed z-axis detection comb teeth 1002b in a one-to-one correspondence manner; eight pairs of front driving detection lead electrodes are correspondingly connected with eight pairs of front fixed driving detection comb teeth 1102a one by one; eight pairs of rear drive detection lead electrodes are connected in one-to-one correspondence with eight pairs of rear fixed drive detection comb teeth 1102 b. During operation, the capacity of the capacitance formed by the longitudinal strip-shaped x-axis detection plate and the four x-axis detection comb teeth can be detected through the four x-axis detection lead electrodes. The capacitance of the capacitance formed by the eight front movable z-axis detection comb teeth (rear movable z-axis detection comb teeth) and the eight pairs of front fixed z-axis detection comb teeth (rear fixed z-axis detection comb teeth) can be detected by the eight pairs of front z-axis detection lead electrodes (rear z-axis detection lead electrodes). The capacitance of the capacitance formed by the eight left movable drive detection comb teeth (right movable drive detection comb teeth) and the eight left fixed drive detection comb teeth (right fixed drive detection comb teeth) can be detected by the eight pairs of left drive detection lead electrodes (right drive detection lead electrodes). The capacitance of the capacitor formed by the transverse strip-shaped y-axis detection plate and the four y-axis detection comb teeth can be detected through the four y-axis detection lead electrodes. The capacitance of the capacitance formed by the eight left movable z-axis detection comb teeth (right movable z-axis detection comb teeth) and the eight left fixed z-axis detection comb teeth (right fixed z-axis detection comb teeth) can be detected by the eight pairs of left z-axis detection lead electrodes (right z-axis detection lead electrodes). The capacitance of the capacitance formed by the eight front movable drive detection comb teeth (rear movable drive detection comb teeth) and the eight front fixed drive detection comb teeth (rear fixed drive detection comb teeth) can be detected by the eight pairs of front drive detection lead electrodes (rear drive detection lead electrodes). The glass substrate 1 is a rectangular glass substrate, and the first square frame 2 and the second square frame 7 are symmetrically distributed above the rear part and the front part of the glass substrate 1; the first square frame 2, the first driving module, the x-axis detection module, the first z-axis detection module, the first driving detection module, the second square frame 7, the second driving module, the y-axis detection module, the second z-axis detection module and the second driving detection module are all made of silicon.

Claims

1. A monolithic integration z-axis redundant three-axis gyroscope structure array is characterized in that: the device comprises a glass substrate (1), a first square frame (2), a first driving module, an x-axis detection module, a first z-axis detection module, a first driving detection module, a second square frame (7), a second driving module, a y-axis detection module, a second z-axis detection module and a second driving detection module;

the first square frame (2) is positioned above the glass substrate (1), and the four sides of the first square frame (2) are parallel to the glass substrate (1); a gap is reserved between the lower surface of the first square frame (2) and the upper surface of the glass substrate (1);

the first driving module comprises a left longitudinal strip-shaped movable driving pole plate (301 a), a right longitudinal strip-shaped movable driving pole plate (301 b), two left anchor blocks (302 a), two right anchor blocks (302 b), two left wave-shaped elastic supporting suspension beams (303 a), two right wave-shaped elastic supporting suspension beams (303 b), eight pairs of left fixed driving pole plates (304 a), eight pairs of right fixed driving pole plates (304 b), a left elastic decoupling suspension beam (305 a) and a right elastic decoupling suspension beam (305 b);

the left longitudinal strip-shaped movable driving pole plate (301 a) and the right longitudinal strip-shaped movable driving pole plate (301 b) are symmetrically distributed at the left part and the right part of the inner cavity of the first square frame (2), and the left longitudinal strip-shaped movable driving pole plate (301 a) and the right longitudinal strip-shaped movable driving pole plate (301 b) are parallel to the glass substrate (1); gaps are reserved between the lower surfaces of the left longitudinal strip-shaped movable driving polar plate (301 a) and the right longitudinal strip-shaped movable driving polar plate (301 b) and the upper surface of the glass substrate (1); eight left rectangular driving holes which are communicated up and down are formed in the surface of the left longitudinal strip-shaped movable driving pole plate (301 a), and the eight left rectangular driving holes are arranged in a forward and backward equidistant mode; the surface of the right longitudinal strip-shaped movable driving pole plate (301 b) is provided with eight right rectangular driving holes which are communicated up and down, and the eight right rectangular driving holes are arranged in a forward and backward equidistant manner; the two left anchor blocks (302 a) are fixed on the upper surface of the glass substrate (1), and the two left anchor blocks (302 a) are symmetrically distributed on the left front corner and the left rear corner of the inner cavity of the first square frame (2); the two right anchor blocks (302 b) are fixed on the upper surface of the glass substrate (1), and the two right anchor blocks (302 b) are symmetrically distributed on the right front angle and the right rear angle of the inner cavity of the first square frame (2); the head end surfaces of the two left wave-shaped elastic supporting suspension beams (303 a) are respectively fixed with the front end surface and the rear end surface of the left longitudinal strip-shaped movable driving polar plate (301 a); the tail ends of the two left wave-shaped elastic supporting suspension beams (303 a) are respectively fixed with the upper surface of the glass substrate (1) through two left anchor blocks (302 a); the head end surfaces of the two right wavy elastic supporting suspension beams (303 b) are respectively fixed with the front end surface and the rear end surface of the right longitudinal strip-shaped movable driving polar plate (301 b); the tail ends of the two right-wave-shaped elastic supporting suspension beams (303 b) are respectively fixed with the upper surface of the glass substrate (1) through two right anchor blocks (302 b); the eight pairs of left fixed driving polar plates (304 a) are vertically fixed on the upper surface of the glass substrate (1), and the eight pairs of left fixed driving polar plates (304 a) are symmetrically distributed at the front parts and the rear parts of the inner cavities of the eight left rectangular driving holes one by one; eight pairs of left fixed driving polar plates (304 a) and left longitudinal strip-shaped movable driving polar plates (301 a) form a variable-pitch electrostatic force driving capacitor; the eight pairs of right fixed driving polar plates (304 b) are vertically fixed on the upper surface of the glass substrate (1), and the eight pairs of right fixed driving polar plates (304 b) are symmetrically distributed at the front parts and the rear parts of the inner cavities of the eight right rectangular driving holes one by one; eight pairs of right fixed driving polar plates (304 b) and right longitudinal strip-shaped movable driving polar plates (301 b) form a variable-pitch electrostatic force driving capacitor; the left elastic decoupling suspension beam (305 a) comprises a left U-shaped elastic decoupling suspension beam section, a left U-shaped elastic decoupling suspension beam section and a left straight elastic decoupling suspension beam section; two ends of the left U-shaped elastic decoupling suspension beam section are respectively and vertically fixed on the front part of the left inner side surface and the rear part of the left inner side surface of the first square frame (2); two ends of the left U-shaped elastic decoupling suspension beam section are respectively and vertically fixed on the front part of the left end surface and the rear part of the left end surface of the left longitudinal strip-shaped movable driving polar plate (301 a); two ends of the left straight elastic decoupling suspension beam section are respectively and vertically fixed in the middle of the bottom edge of the left U-shaped elastic decoupling suspension beam section and the middle of the bottom edge of the left U-shaped elastic decoupling suspension beam section; the right elastic decoupling suspension beam (305 b) comprises a right U-shaped elastic decoupling suspension beam section, a right two U-shaped elastic decoupling suspension beam sections and a right straight elastic decoupling suspension beam section; two ends of the right U-shaped elastic decoupling suspension beam section are respectively and vertically fixed at the front part of the right inner side surface and the rear part of the right inner side surface of the first square frame (2); two ends of the right two U-shaped elastic decoupling suspension beam sections are respectively and vertically fixed at the front part of the right end face and the rear part of the right end face of the right longitudinal strip-shaped movable driving polar plate (301 b); two ends of the right straight elastic decoupling suspension beam section are respectively and vertically fixed in the middle of the bottom edge of the right U-shaped elastic decoupling suspension beam section and the middle of the bottom edge of the right two U-shaped elastic decoupling suspension beam sections;

the x-axis detection module comprises a longitudinal strip-shaped x-axis detection plate (401), four x-axis detection comb teeth (402), a left two elastic decoupling suspension beams (403 a) and a right two elastic decoupling suspension beams (403 b);

the longitudinal strip-shaped x-axis detection plate (401) is positioned in the middle of the inner cavity of the first square frame (2), and the longitudinal strip-shaped x-axis detection plate (401) is parallel to the glass substrate (1); a gap is reserved between the lower surface of the longitudinal strip-shaped x-axis detection plate (401) and the upper surface of the glass substrate (1); four vertical strip-shaped detection holes which are communicated up and down are formed in the surface of the vertical strip-shaped x-axis detection plate (401), and the four vertical strip-shaped detection holes are arranged at equal intervals from left to right; the four x-axis detection comb teeth (402) are vertically fixed on the upper surface of the glass substrate (1), and the four x-axis detection comb teeth (402) are located in the middle of the inner cavities of the four longitudinal strip-shaped detection holes in a one-to-one correspondence manner; the upper end surfaces of the four x-axis detection comb teeth (402) are lower than the upper surface of the longitudinal strip-shaped x-axis detection plate (401), and the four x-axis detection comb teeth (402) and the longitudinal strip-shaped x-axis detection plate (401) form a variable-area detection capacitor; the left second elastic decoupling suspension beam (403 a) comprises a left rectangular connecting plate, two left connecting blocks, two left first L-shaped elastic decoupling suspension beam sections and two left second L-shaped elastic decoupling suspension beam sections; the left rectangular connecting plate is positioned between the right end face of the left longitudinal strip-shaped movable driving polar plate (301 a) and the left end face of the longitudinal strip-shaped x-axis detection plate (401), and is parallel to the glass substrate (1); a gap is reserved between the lower surface of the left rectangular connecting plate and the upper surface of the glass substrate (1); the two left connecting blocks are respectively fixed on the front part of the left end face and the rear part of the left end face of the longitudinal strip-shaped x-axis detection plate (401); the head ends of the two left L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed on the front part of the right end face and the rear part of the right end face of the left longitudinal strip-shaped movable driving polar plate (301 a); the tail ends of the two left L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed at the left part of the front end surface and the left part of the rear end surface of the left rectangular connecting plate; the head ends of the two left two L-shaped elastic decoupling suspension beam sections are respectively fixed with the front part of the left end surface and the rear part of the left end surface of the longitudinal strip-shaped x-axis detection plate (401) through two left connecting blocks; the tail ends of the two left two L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed on the right part of the front end surface and the right part of the rear end surface of the left rectangular connecting plate; the right two elastic decoupling suspension beams (403 b) comprise a right rectangular connecting plate, two right connecting blocks, two right one L-shaped elastic decoupling suspension beam sections and two right two L-shaped elastic decoupling suspension beam sections; the right rectangular connecting plate is positioned between the left end face of the right longitudinal strip-shaped movable driving polar plate (301 b) and the right end face of the longitudinal strip-shaped x-axis detection plate (401), and is parallel to the glass substrate (1); a gap is reserved between the lower surface of the right rectangular connecting plate and the upper surface of the glass substrate (1); the two right connecting blocks are respectively fixed on the front part of the right end face and the rear part of the right end face of the longitudinal strip-shaped x-axis detection plate (401); the head ends of the two right L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed on the front part of the left end surface and the rear part of the left end surface of the right longitudinal strip-shaped movable driving polar plate (301 b); the tail ends of the two right L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed at the right part of the front end surface and the right part of the rear end surface of the right rectangular connecting plate; the head ends of the two right two L-shaped elastic decoupling suspension beam sections are respectively fixed with the front part of the right end face and the rear part of the right end face of the longitudinal strip-shaped x-axis detection plate (401) through two right connecting blocks; the tail ends of the two right two L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed at the left part of the front end surface and the left part of the rear end surface of the right rectangular connecting plate;

the first z-axis detection module comprises eight front movable z-axis detection comb teeth (501 a), eight rear movable z-axis detection comb teeth (501 b), eight pairs of front fixed z-axis detection comb teeth (502 a) and eight pairs of rear fixed z-axis detection comb teeth (502 b);

the eight front movable z-axis detection comb teeth (501 a) are vertically fixed on the front outer side surface of the first square frame (2), and the eight front movable z-axis detection comb teeth (501 a) are arranged equidistantly from left to right; gaps are reserved between the lower end faces of the eight front movable z-axis detection comb teeth (501 a) and the upper surface of the glass substrate (1); the eight rear movable z-axis detection comb teeth (501 b) are vertically fixed on the rear outer side surface of the first square frame (2), and the eight rear movable z-axis detection comb teeth (501 b) are arranged equidistantly from left to right; gaps are reserved between the lower end faces of the eight rear movable z-axis detection comb teeth (501 b) and the upper surface of the glass substrate (1); the eight pairs of front fixed z-axis detection comb teeth (502 a) are vertically fixed on the upper surface of the glass substrate (1); the eight pairs of front fixed z-axis detection comb teeth (502 a) are symmetrically distributed on two sides of the eight front movable z-axis detection comb teeth (501 a) in a one-to-one correspondence manner, and the eight pairs of front fixed z-axis detection comb teeth (502 a) and the eight front movable z-axis detection comb teeth (501 a) form a differential variable-pitch detection capacitor in a one-to-one correspondence manner; the eight pairs of rear fixed z-axis detection comb teeth (502 b) are vertically fixed on the upper surface of the glass substrate (1); eight pairs of rear fixed z-axis detection comb teeth (502 b) are symmetrically distributed on two sides of the eight rear movable z-axis detection comb teeth (501 b) in a one-to-one correspondence manner, and the eight pairs of rear fixed z-axis detection comb teeth (502 b) and the eight rear movable z-axis detection comb teeth (501 b) form a differential variable-pitch detection capacitor in a one-to-one correspondence manner;

the first drive detection module comprises eight left movable drive detection combs (601 a), eight right movable drive detection combs (601 b), eight pairs of left fixed drive detection combs (602 a), and eight pairs of right fixed drive detection combs (602 b);

the eight left movable driving detection comb teeth (601 a) are vertically fixed on the left outer side surface of the first square frame (2), and the eight left movable driving detection comb teeth (601 a) are arranged from front to back at equal intervals; gaps are reserved between the lower end faces of the eight left movable driving detection comb teeth (601 a) and the upper surface of the glass substrate (1); the eight right movable driving detection comb teeth (601 b) are vertically fixed on the right outer side surface of the first square frame (2), and the eight right movable driving detection comb teeth (601 b) are arranged from front to back at equal intervals; gaps are reserved between the lower end faces of the eight right movable driving detection comb teeth (601 b) and the upper surface of the glass substrate (1); the eight pairs of left fixed driving detection comb teeth (602 a) are vertically fixed on the upper surface of the glass substrate (1); eight pairs of left fixed drive detection comb teeth (602 a) are symmetrically distributed on two sides of the eight left movable drive detection comb teeth (601 a) in a one-to-one correspondence manner, and the eight pairs of left fixed drive detection comb teeth (602 a) and the eight left movable drive detection comb teeth (601 a) form a differential variable-pitch detection capacitor in a one-to-one correspondence manner; the eight pairs of right fixed driving detection comb teeth (602 b) are vertically fixed on the upper surface of the glass substrate (1); eight pairs of right fixed driving detection comb teeth (602 b) are symmetrically distributed on two sides of the eight right movable driving detection comb teeth (601 b) in a one-to-one correspondence manner, and the eight pairs of right fixed driving detection comb teeth (602 b) and the eight right movable driving detection comb teeth (601 b) form a differential variable-pitch detection capacitor in a one-to-one correspondence manner;

the second square frame (7) is positioned above the glass substrate (1), and four sides of the second square frame (7) are parallel to the glass substrate (1); a gap is reserved between the lower surface of the second square frame (7) and the upper surface of the glass substrate (1);

the second driving module comprises a front transverse strip-shaped movable driving pole plate (801 a), a rear transverse strip-shaped movable driving pole plate (801 b), two front anchor blocks (802 a), two rear anchor blocks (802 b), two front wave-shaped elastic supporting suspension beams (803 a), two rear wave-shaped elastic supporting suspension beams (803 b), eight pairs of front fixed driving pole plates (804 a), eight pairs of rear fixed driving pole plates (804 b), a front elastic decoupling suspension beam (805 a) and a rear elastic decoupling suspension beam (805 b);

the front transverse strip-shaped movable driving pole plate (801 a) and the rear transverse strip-shaped movable driving pole plate (801 b) are symmetrically distributed at the front part and the rear part of the inner cavity of the second square frame (7), and the front transverse strip-shaped movable driving pole plate (801 a) and the rear transverse strip-shaped movable driving pole plate (801 b) are parallel to the glass substrate (1); gaps are reserved between the lower surfaces of the front transverse strip-shaped movable driving polar plates (801 a) and the rear transverse strip-shaped movable driving polar plates (801 b) and the upper surface of the glass substrate (1); eight front rectangular driving holes which are communicated up and down are formed in the surface of the front transverse strip-shaped movable driving pole plate (801 a), and the eight front rectangular driving holes are arranged at equal intervals from left to right; eight rear rectangular driving holes which are communicated up and down are formed in the surface of the rear transverse strip-shaped movable driving pole plate (801 b), and the eight rear rectangular driving holes are arranged at equal intervals from left to right; the two front anchor blocks (802 a) are fixed on the upper surface of the glass substrate (1), and the two front anchor blocks (802 a) are symmetrically distributed on the left front corner and the right front corner of the inner cavity of the second square frame (7); the two rear anchor blocks (802 b) are fixed on the upper surface of the glass substrate (1), and the two rear anchor blocks (802 b) are symmetrically distributed on the left rear corner and the right rear corner of the inner cavity of the second square frame (7); the head end surfaces of two front wave-shaped elastic supporting suspension beams (803 a) are respectively fixed with the left end surface and the right end surface of a front transverse strip-shaped movable driving polar plate (801 a); the tail ends of the two front wave-shaped elastic supporting suspension beams (803 a) are respectively fixed with the upper surface of the glass substrate (1) through two front anchor blocks (802 a); the head end surfaces of two rear wave-shaped elastic supporting suspension beams (803 b) are respectively fixed with the left end surface and the right end surface of a rear transverse strip-shaped movable driving polar plate (801 b); the tail ends of the two rear wave-shaped elastic supporting suspension beams (803 b) are respectively fixed with the upper surface of the glass substrate (1) through two rear anchor blocks (802 b); the eight pairs of front fixed driving polar plates (804 a) are vertically fixed on the upper surface of the glass substrate (1), and the eight pairs of front fixed driving polar plates (804 a) are symmetrically distributed on the left part and the right part of the inner cavity of the eight front rectangular driving holes in a one-to-one correspondence manner; eight pairs of front fixed driving polar plates (804 a) and front transverse strip-shaped movable driving polar plates (801 a) form a variable-pitch type electrostatic force driving capacitor; the eight pairs of rear fixed driving polar plates (804 b) are vertically fixed on the upper surface of the glass substrate (1), and the eight pairs of rear fixed driving polar plates (804 b) are symmetrically distributed on the left part and the right part of the inner cavity of the eight rear rectangular driving holes in a one-to-one correspondence manner; eight pairs of rear fixed driving polar plates (804 b) and rear transverse strip-shaped movable driving polar plates (801 b) form a variable-pitch type electrostatic force driving capacitor; the front elastic decoupling suspension beam (805 a) comprises a front U-shaped elastic decoupling suspension beam section, a front two U-shaped elastic decoupling suspension beam sections and a front straight elastic decoupling suspension beam section; two ends of the front U-shaped elastic decoupling suspension beam section are respectively and vertically fixed on the left part of the front inner side surface and the right part of the front inner side surface of the second square frame (7); two ends of the front two U-shaped elastic decoupling suspension beam sections are respectively and vertically fixed on the left part and the right part of the front end face of the front transverse strip-shaped movable driving pole plate (801 a); two ends of the front straight elastic decoupling suspension beam section are respectively and vertically fixed in the middle of the bottom edge of the front U-shaped elastic decoupling suspension beam section and the middle of the bottom edge of the front two U-shaped elastic decoupling suspension beam sections; the rear elastic decoupling suspension beam (805 b) comprises a rear U-shaped elastic decoupling suspension beam section, a rear two U-shaped elastic decoupling suspension beam sections and a rear straight elastic decoupling suspension beam section; two ends of the rear U-shaped elastic decoupling suspension beam section are respectively and vertically fixed on the left part of the rear inner side surface and the right part of the rear inner side surface of the second square frame (7); two ends of the rear two U-shaped elastic decoupling suspension beam sections are respectively and vertically fixed on the left part and the right part of the rear end face of the rear transverse strip-shaped movable driving pole plate (801 b); two ends of the rear straight elastic decoupling suspension beam section are respectively and vertically fixed in the middle of the bottom edge of the rear U-shaped elastic decoupling suspension beam section and the middle of the bottom edge of the rear two U-shaped elastic decoupling suspension beam sections;

the y-axis detection module comprises a transverse strip-shaped y-axis detection plate (901), four y-axis detection comb teeth (902), two front elastic decoupling suspension beams (903 a) and two rear elastic decoupling suspension beams (903 b);

the transverse strip-shaped y-axis detection plate (901) is positioned in the middle of the inner cavity of the second square frame (7), and the transverse strip-shaped y-axis detection plate (901) is parallel to the glass substrate (1); a gap is reserved between the lower surface of the transverse strip-shaped y-axis detection plate (901) and the upper surface of the glass substrate (1); four transverse strip-shaped detection holes which are communicated up and down are formed in the surface of the transverse strip-shaped y-axis detection plate (901), and the four transverse strip-shaped detection holes are arranged in a forward and backward equidistant mode; the four y-axis detection comb teeth (902) are vertically fixed on the upper surface of the glass substrate (1), and the four y-axis detection comb teeth (902) are located in the middle of the inner cavities of the four transverse strip-shaped detection holes in a one-to-one correspondence manner; the upper end surfaces of the four y-axis detection comb teeth (902) are lower than the upper surface of the transverse strip-shaped y-axis detection plate (901), and the four y-axis detection comb teeth (902) and the transverse strip-shaped y-axis detection plate (901) form a variable-area detection capacitor; the front two elastic decoupling suspension beams (903 a) comprise front rectangular connecting plates, two front connecting blocks, two front L-shaped elastic decoupling suspension beam sections and two front two L-shaped elastic decoupling suspension beam sections; the front rectangular connecting plate is positioned between the rear end face of the front transverse strip-shaped movable driving pole plate (801 a) and the front end face of the transverse strip-shaped y-axis detection plate (901), and is parallel to the glass substrate (1); a gap is reserved between the lower surface of the front rectangular connecting plate and the upper surface of the glass substrate (1); the two front connecting blocks are respectively fixed on the left part and the right part of the front end face of the transverse strip-shaped y-axis detection plate (901); the head ends of two front L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed on the left part and the right part of the rear end surface of a front transverse strip-shaped movable driving polar plate (801 a); the tail ends of two front L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed at the front part of the left end surface and the front part of the right end surface of the front rectangular connecting plate; the head ends of the two front two L-shaped elastic decoupling suspension beam sections are respectively fixed with the left part of the front end surface and the right part of the front end surface of the transverse strip-shaped y-axis detection plate (901) through two front connecting blocks; the tail ends of the two front two L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed at the rear part of the left end face and the rear part of the right end face of the front rectangular connecting plate; the rear two elastic decoupling suspension beams (903 b) comprise rear rectangular connecting plates, two rear connecting blocks, two rear L-shaped elastic decoupling suspension beam sections and two rear two L-shaped elastic decoupling suspension beam sections; the rear rectangular connecting plate is positioned between the front end face of the rear transverse strip-shaped movable driving pole plate (801 b) and the rear end face of the transverse strip-shaped y-axis detection plate (901), and is parallel to the glass substrate (1); a gap is reserved between the lower surface of the rear rectangular connecting plate and the upper surface of the glass substrate (1); the two rear connecting blocks are respectively fixed on the left part and the right part of the rear end face of the transverse strip-shaped y-axis detection plate (901); the head ends of two back L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed on the left part of the front end surface and the right part of the front end surface of a back transverse strip-shaped movable driving polar plate (801 b); the tail ends of the two rear L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed at the rear part of the left end face and the rear part of the right end face of the rear rectangular connecting plate; the head ends of the two rear two L-shaped elastic decoupling suspension beam sections are respectively fixed with the left part of the rear end surface and the right part of the rear end surface of the transverse strip-shaped y-axis detection plate (901) through two rear connecting blocks; the tail ends of the two rear two L-shaped elastic decoupling suspension beam sections are respectively and vertically fixed at the front part of the left end surface and the front part of the right end surface of the rear rectangular connecting plate;

the second z-axis detection module comprises eight left movable z-axis detection comb teeth (1001 a), eight right movable z-axis detection comb teeth (1001 b), eight pairs of left fixed z-axis detection comb teeth (1002 a), and eight pairs of right fixed z-axis detection comb teeth (1002 b);

the eight left movable z-axis detection comb teeth (1001 a) are vertically fixed on the left outer side surface of the second square frame (7), and the eight left movable z-axis detection comb teeth (1001 a) are arranged from front to back at equal intervals; gaps are reserved between the lower end faces of the eight left movable z-axis detection comb teeth (1001 a) and the upper surface of the glass substrate (1); the eight right movable z-axis detection comb teeth (1001 b) are vertically fixed on the right outer side face of the second square frame (7), and the eight right movable z-axis detection comb teeth (1001 b) are arranged from front to back at equal intervals; gaps are reserved between the lower end faces of the eight right movable z-axis detection comb teeth (1001 b) and the upper surface of the glass substrate (1); the eight pairs of left fixed z-axis detection comb teeth (1002 a) are vertically fixed on the upper surface of the glass substrate (1); the eight pairs of left fixed z-axis detection comb teeth (1002 a) are symmetrically distributed on two sides of the eight left movable z-axis detection comb teeth (1001 a) in a one-to-one correspondence manner, and the eight pairs of left fixed z-axis detection comb teeth (1002 a) and the eight left movable z-axis detection comb teeth (1001 a) form a differential variable-pitch detection capacitor in a one-to-one correspondence manner; the eight pairs of right fixed z-axis detection comb teeth (1002 b) are vertically fixed on the upper surface of the glass substrate (1); the eight pairs of right fixed z-axis detection comb teeth (1002 b) are symmetrically distributed on two sides of the eight right movable z-axis detection comb teeth (1001 b) in a one-to-one correspondence manner, and the eight pairs of right fixed z-axis detection comb teeth (1002 b) and the eight right movable z-axis detection comb teeth (1001 b) form a differential variable-pitch detection capacitor in a one-to-one correspondence manner;

the second drive detection module comprises eight front movable drive detection combs (1101 a), eight rear movable drive detection combs (1101 b), eight pairs of front fixed drive detection combs (1102 a), and eight pairs of rear fixed drive detection combs (1102 b);

the eight front movable driving detection comb teeth (1101 a) are vertically fixed on the front outer side face of the second square frame (7), and the eight front movable driving detection comb teeth (1101 a) are arranged from left to right at equal intervals; gaps are reserved between the lower end faces of the eight front movable driving detection comb teeth (1101 a) and the upper surface of the glass substrate (1); the eight rear movable driving detection comb teeth (1101 b) are vertically fixed on the rear outer side face of the second square frame (7), and the eight rear movable driving detection comb teeth (1101 b) are arranged from left to right at equal intervals; gaps are reserved between the lower end faces of the eight rear movable driving detection comb teeth (1101 b) and the upper surface of the glass substrate (1); the eight pairs of front fixed driving detection comb teeth (1102 a) are vertically fixed on the upper surface of the glass substrate (1); eight pairs of front fixed driving detection comb teeth (1102 a) are symmetrically distributed on two sides of the eight front movable driving detection comb teeth (1101 a) in a one-to-one correspondence manner, and the eight pairs of front fixed driving detection comb teeth (1102 a) and the eight front movable driving detection comb teeth (1101 a) form a differential variable-pitch detection capacitor in a one-to-one correspondence manner; the eight pairs of rear fixed driving detection comb teeth (1102 b) are vertically fixed on the upper surface of the glass substrate (1); eight pairs of rear fixed drive detection combs (1102 b) are symmetrically distributed on two sides of the eight rear movable drive detection combs (1101 b) in a one-to-one correspondence manner, and the eight pairs of rear fixed drive detection combs (1102 b) and the eight rear movable drive detection combs (1101 b) form a differential variable-pitch detection capacitor in a one-to-one correspondence manner.

2. The array of monolithically integrated z-axis redundant three-axis gyroscope structures of claim 1, wherein: four x-axis detection lead electrodes, eight pairs of front z-axis detection lead electrodes, eight pairs of rear z-axis detection lead electrodes, eight pairs of left drive detection lead electrodes, eight pairs of right drive detection lead electrodes, four y-axis detection lead electrodes, eight pairs of left z-axis detection lead electrodes, eight pairs of right z-axis detection lead electrodes, eight pairs of front drive detection lead electrodes and eight pairs of rear drive detection lead electrodes are sputtered on the upper surface of the glass substrate (1) respectively; the four x-axis detection lead electrodes are correspondingly connected with the four x-axis detection comb teeth (402) one by one; the eight pairs of front z-axis detection lead electrodes are correspondingly connected with the eight pairs of front fixed z-axis detection comb teeth (502 a) one by one; eight pairs of rear z-axis detection lead electrodes are correspondingly connected with eight pairs of rear fixed z-axis detection comb teeth (502 b) one by one; eight pairs of left driving detection lead electrodes are correspondingly connected with eight pairs of left fixed driving detection comb teeth (602 a) one by one; eight pairs of right drive detection lead electrodes are correspondingly connected with eight pairs of right fixed drive detection comb teeth (602 b) one by one; the four y-axis detection lead electrodes are correspondingly connected with the four y-axis detection comb teeth (902) one by one; eight pairs of left z-axis detection lead electrodes are correspondingly connected with eight pairs of left fixed z-axis detection comb teeth (1002 a) one by one; the eight pairs of right z-axis detection lead electrodes are correspondingly connected with the eight pairs of right fixed z-axis detection comb teeth (1002 b) one by one; eight pairs of front driving detection lead electrodes are correspondingly connected with eight pairs of front fixed driving detection comb teeth (1102 a) one by one; eight pairs of rear drive detection lead electrodes are connected with eight pairs of rear fixed drive detection comb teeth (1102 b) in a one-to-one correspondence.

3. The array of monolithically integrated z-axis redundant three-axis gyroscope structures of claim 1, wherein: the glass substrate (1) is a rectangular glass substrate, and the first square frame (2) and the second square frame (7) are symmetrically distributed above the rear part and the front part of the glass substrate (1); the first square frame (2), the first driving module, the x-axis detection module, the first z-axis detection module, the first driving detection module, the second square frame (7), the second driving module, the y-axis detection module, the second z-axis detection module and the second driving detection module are all made of silicon.