CN109385597A - 一种耐磨无氢dlc镀层的压缩机滑片及制备方法 - Google Patents

一种耐磨无氢dlc镀层的压缩机滑片及制备方法 Download PDF

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CN109385597A
CN109385597A CN201811415838.1A CN201811415838A CN109385597A CN 109385597 A CN109385597 A CN 109385597A CN 201811415838 A CN201811415838 A CN 201811415838A CN 109385597 A CN109385597 A CN 109385597A
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slide plate
hydrogen
sliding blade
compressor
free dlc
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林桂开
林承鑫
谢礼忠
郑智群
卢奇霞
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FUJIAN DONGYA MACHINERY Co Ltd
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Abstract

本发明公开了一种耐磨无氢DLC镀层的压缩机滑片，属于压缩机滑片技术领域，所述压缩机滑片包括滑片基体和附着在滑片基体表面的薄膜；所述薄膜由内到外依次为：附着于滑片基体表面的氮化层、金属过渡层和无氢DLC层；同时本发明还提供了上述压缩机滑片的制备方法。本发明提供的一种耐磨无氢DLC镀层的压缩机滑片，首先进行氮化处理，然后沉积金属过渡层，利于提升压缩机滑片的耐磨性和提高滑片基体与涂层间的结合强度；无氢DLC膜层使压缩机滑片表面摩擦系数减小、降低了压缩机滑片的摩擦损失，提升了作业效率，进而提升了压缩机的使用寿命；能够满足现代压缩机高速、高载荷及润滑剂环境下的技术性能要求。

Description

一种耐磨无氢DLC镀层的压缩机滑片及制备方法
技术领域
本发明属于压缩机滑片领域，具体涉及一种耐磨无氢DLC镀层的压缩机滑片及制备方法。
背景技术
在家电和汽车行业，随着能效标准的提高，对转子式压缩机的功耗和单机能效提出了更高的要求，高速和高载荷成为趋势，使得传统压缩机滑片出现表面滑移现象；同时，随着制冷剂的发展，由于工质物性不同，使得压缩机工作压力越来越大润滑条件恶化，致使各摩擦副之间的磨损增大，泄露增加，导致压缩机能效比降低。研究发现，转子式压缩机在工作时，旋转的偏心轴带动套在其偏心部上的转子做偏心旋转，压缩机滑片在背压和弹簧的作用下顶在转子上的气缸槽中做往复运动，滑片R面和转子外表面处于边界润滑或混合润滑状态，滑片R面和转子之间的磨损是最严重的，滑片外端部的摩擦损失最大，约占摩擦总损失的87.1％，其次是滑片侧面损失，约占总损失的12.6％。因此，控制摩擦磨损，尤其是压缩机滑片，是提高转子式压缩机性能和寿命的关键。
目前压缩机滑片使用的是高速钢，为了提供能够满足新工质压缩机使用性能的压缩机滑片，会对压缩机滑片表面进行氮化或硫氮化处理。如申请号为201310118885.0的中国专利；高速钢滑片进行氮化处理可以提升一定的耐磨性，但是其抗粘着性磨损性能是有限的，且氮化层易产生磨粒磨损，造成整个压缩机泄露，快速失效；在转子式压缩机的功耗和单机能效高速、高载要求下，很难满足使用。因此，需要开发一种能够适应高压摩擦及润滑剂环境下的绿色高性能表面涂层技术。
发明内容
为了克服上述现有技术的缺陷，本发明所要解决的技术问题是：提供一种耐磨性能良好的、具高性能表面涂层的压缩机滑片及制备方法。
为了解决上述技术问题，本发明采用的技术方案为：一种耐磨无氢DLC镀层的压缩机滑片，包括滑片基体和附着在滑片基体表面的薄膜；所述薄膜由内到外依次为：附着于所述滑片基体表面的氮化层、附着于所述氮化层的金属过渡层和附着于金属过渡层的无氢DLC层。
本发明的另一技术方案为提供一种上述耐磨无氢DLC镀层的压缩机滑片的制备方法，包括以下步骤：
(1)表面氮化处理：滑片基体经过气体氮化表面形成氮化层；
(2)清洗基体：将步骤(1)得到的滑片基体置于真空环境汇总，通入氩气，开启线性离子源，对滑片基体进行清洗；
(3)沉积金属过渡层：调整步骤(2)得到的滑片基体的负偏压，保持线性离子源开启状态，调整线性离子源的工作电流，继续通入氩气，同时开启阴极电弧源，调整阴极电弧源的工作电流，通入氩气，持续15-18min后关闭线性离子源，完成金属过渡层的沉积；
(4)沉积无氢DLC层调整：调整线性离子源的工作电流、功率，调整步骤(3)得到的滑片基体的负偏压，开启阴极电弧源，电弧使碳靶蒸发并离化为碳离子，碳离子在基底负偏压的作用下，高速轰击基底并沉积成无氢DLC薄膜。
本发明的有益效果在于：压缩机滑片首先进行氮化处理，然后沉积金属过渡层，利于提升压缩机滑片的耐磨性和提高滑片基体与涂层间的结合强度；无氢DLC膜层使压缩机滑片表面摩擦系数减小、降低了压缩机滑片的摩擦损失，提升了作业效率，进而提升了压缩机的使用寿命；能够满足现代压缩机高速、高载荷及润滑剂环境下的技术性能要求。
具体实施方式
为详细说明本发明的技术内容、所实现目的及效果，以下结合实施方式予以说明。
本发明最关键的构思在于：在压缩机滑片的表面使用无氮DLC涂层工艺，形成摩擦修复保护膜，减小压缩机滑片表面的摩擦系数、降低压缩机滑片的摩擦损失。
无氢DLC涂层：类金刚石涂层(Diamond-like carbon，简称DLC)是一种非晶态膜，是含有金刚石结构(sp3键)和石墨结构(sp2键)的亚稳非晶态物质，碳原子主要以sp3和sp2杂化键结合，DLC涂层按照成分可分为含氢DLC(α-C：H)涂层与无氢DLC涂层两种，无氢DLC涂层中常见的是四面体非晶碳(ta-C)膜。
本发明提供一种耐磨无氢DLC镀层的压缩机滑片，包括滑片基体和附着在滑片基体表面的薄膜；所述薄膜由内到外依次为：附着于所述滑片基体表面的氮化层、附着于所述氮化层的金属过渡层和附着于金属过渡层的无氢DLC层。
上述耐磨无氢DLC镀层的压缩机滑片的制备方法，包括以下步骤：
(1)表面氮化处理：滑片基体经过气体氮化表面形成氮化层；
(2)清洗基体：将步骤(1)得到的滑片基体置于真空环境汇总，通入氩气，开启线性离子源，对滑片基体进行清洗；
(3)沉积金属过渡层：调整步骤(2)得到的滑片基体的负偏压，保持线性离子源开启状态，调整线性离子源的工作电流，继续通入氩气，同时开启阴极电弧源，调整阴极电弧源的工作电流，通入氩气，持续15-18min后关闭线性离子源，完成金属过渡层的沉积；
(4)沉积无氢DLC层调整：调整线性离子源的工作电流、功率，调整步骤(3)得到的滑片基体的负偏压，开启阴极电弧源，电弧使碳靶蒸发并离化为碳离子，碳离子在基底负偏压的作用下，高速轰击基底并沉积成无氢DLC薄膜。
从上述描述可知，本发明的有益效果在于：压缩机滑片首先进行氮化处理，然后沉积金属过渡层，利于提升压缩机滑片的耐磨性和提高滑片基体与涂层间的结合强度；最外层涂层为无氢DLC涂层，与只经过氮化处理的压缩机滑片相比，硬度提升了100％，同时无氢DLC膜层的高硬度提高了压缩机滑片的抗磨损能力，其耐磨性提升了500％，也改善高速高载下的服役行为：无氢DLC薄膜在正常润滑运行过程中形成摩擦修复保护膜；高速工况会加速碳基薄膜材料与润滑油间的摩擦化学反应，促进形成摩擦修复膜；变工况、冷启动，在润滑油膜未形成的情况下，压缩机滑片摩擦副之间容易粘着磨损，此时碳基固体润滑作为补充，实现长寿命高可靠润滑，确保在极度缺少润滑的情况下以及冷启动时运转正常。
无氢DLC膜层使压缩机滑片表面摩擦系数减小、降低了压缩机滑片的摩擦损失，提升了作业效率，进而提升了压缩机的使用寿命；能够满足现代压缩机高速、高载荷及润滑剂环境下的技术性能要求。
进一步的，所述金属过渡层为铬层或钛层中的一种。
由上述描述可知，金属过渡层可提高滑片基体与涂层的结合强度，选择铬层或钛层其结合效果更佳。
进一步的，所述金属过渡层厚度为1～2μm，硬度大于850HV。
由上述描述可知，金属过渡层厚度为1～2μm，硬度大于850HV时，其上层的无氢DLC层沉积效果最佳。
进一步的，所述无氢DLC层的厚度大于3μm，硬度为1800～3300HV，表面粗糙度Ra＜0.1。
由上述描述可知，无氢DLC层的厚度大于3μm，硬度为1800～3300HV时，其结合强度最佳，且得到的压缩机滑片耐磨性与硬度最佳。
本发明的实施例一为：
耐磨无氢DLC镀层的压缩机滑片，以6Cr13不锈钢为压缩机滑片基体，滑片基体表面是多层膜结构组成的薄膜，自滑片基体表面起，第一层是氮化层，第二层是Cr过渡层第三层是无氢DLC层。
上述滑片基体表面的薄膜的制备方法包括如下步骤：
(1)表面氮化处理：以6Cr13不锈钢作为压缩机滑片基体，将滑片基体经过气体氮化表面形成氮化层；
(2)清洗基体：将步骤(1)得到的滑片基体固定在工件托架上，抽真空，通入氩气，开启线性离子源，对滑片进行清洗；
(3)沉积金属过渡层：调整滑片基体负偏压100V，保持线性离子源开启状态，调整线性离子源的工作电流为0.1A，继续通入氩气，同时开启阴极电弧源，阴极弧源为铬靶，调整阴极电弧源的工作电流为2.5A，通入50sccm氩气，工作时间为15min，然后关闭线性离子源，形成Cr过渡层；
(4)沉积无氢DLC层调整：调整线性离子源的工作电流为0.22A，功率260W，调整滑片基体的负偏压为100V，开启阴极电弧源，电弧使碳靶蒸发并离化为碳离子，碳离子在基底负偏压的作用下，高速轰击基底并沉积成无氢DLC薄膜。
(5)制得压缩机滑片：待真空室温度降低至室温，得到耐磨无氢DLC镀层的压缩机滑片。
上述压缩机滑片的薄膜的Cr过渡层厚度为1.5μm，硬度900HV；无氢DLC薄膜厚度4μm，硬度2280HV，表面粗糙度Ra0.07，摩擦系数0.092。
所使用的设备为：FCVA镀膜系统，设备包括真空室，阴极电弧源，线性离子源和能同时公转自转的工件托架。
本发明的实施例二为：
耐磨无氢DLC镀层的压缩机滑片，以6Cr13不锈钢为压缩机滑片基体，滑片基体表面是多层膜结构组成的薄膜，自滑片基体表面起，第一层是氮化层，第二层是Ti过渡层第三层是无氢DLC层。
上述滑片基体表面的薄膜的制备方法包括如下步骤：
(1)表面氮化处理：以6Cr13不锈钢作为压缩机滑片基体，将滑片基体经过气体氮化表面形成氮化层；
(2)清洗基体：将步骤(1)得到的滑片基体固定在工件托架上，抽真空，通入氩气，开启线性离子源，对滑片进行清洗；
(3)沉积金属过渡层：调整滑片基体负偏压200V，保持线性离子源开启状态，调整线性离子源的工作电流为0.2A，继续通入氩气，同时开启阴极电弧源，阴极弧源为钛靶，调整阴极电弧源的工作电流为3A，通入60sccm氩气，工作时间为18min，然后关闭线性离子源，形成Ti过渡层；
(4)沉积无氢DLC层调整：调整线性离子源的工作电流为0.3A，功率300W，调整滑片基体的负偏压为200V，开启阴极电弧源，电弧使碳靶蒸发并离化为碳离子，碳离子在基底负偏压的作用下，高速轰击基底并沉积成无氢DLC薄膜。
(5)制得压缩机滑片：待真空室温度降低至室温，得到耐磨无氢DLC镀层的压缩机滑片。
上述压缩机滑片的薄膜的Ti过渡层厚度为2μm，硬度870HV；无氢DLC薄膜厚度3.5μm，硬度2150HV，表面粗糙度Ra0.06，摩擦系数0.088。
所使用的设备为：FCVA镀膜系统，设备包括真空室，阴极电弧源，线性离子源和能同时公转自转的工件托架。
综上所述，本发明提供的耐磨无氢DLC镀层的压缩机滑片，在滑片基体上附着薄膜，所述薄膜由内到外依次为表面的氮化层、金属过渡层和无氢DLC层，降低了压缩机滑片的摩擦损失，提升了作业效率，压缩机滑片表面摩擦系数减小、进而提升了压缩机的使用寿命；能够满足现代压缩机高速、高载荷及润滑剂环境下的技术性能要求。
上述压缩机滑片首先进行氮化处理，然后沉积金属过渡层，利于提升压缩机滑片的耐磨性和提高滑片基体与涂层间的结合强度；最外层涂层为无氢DLC涂层，与只经过氮化处理的压缩机滑片相比，硬度提升了100％，同时无氢DLC膜层的高硬度提高了压缩机滑片的抗磨损能力，其耐磨性提升了500％，也改善了压缩机滑片在高速高载条件下的服役行为：无氢DLC薄膜在正常润滑运行过程中形成摩擦修复保护膜；高速工况会加速碳基薄膜材料与润滑油间的摩擦化学反应，促进形成摩擦修复膜；变工况、冷启动，在润滑油膜未形成的情况下，压缩机滑片摩擦副之间容易粘着磨损，此时碳基固体润滑作为补充，实现长寿命高可靠润滑，确保在极度缺少润滑的情况下以及冷启动时运转正常。
以上所述仅为本发明的实施例，并非因此限制本发明的专利范围，凡是利用本发明说明书内容所作的等同变换，或直接或间接运用在相关的技术领域，均同理包括在本发明的专利保护范围内。

Claims (5)

1.一种耐磨无氢DLC镀层的压缩机滑片，其特征在于，包括滑片基体和附着在滑片基体表面的薄膜；所述薄膜由内到外依次为：附着于所述滑片基体表面的氮化层、附着于所述氮化层的金属过渡层和附着于金属过渡层的无氢DLC层。
2.根据权利要求1所述的耐磨无氢DLC镀层的压缩机滑片，其特征在于，所述金属过渡层为铬层或钛层中的一种。
3.根据权利要求1或2任意一项所述的耐磨无氢DLC镀层的压缩机滑片，其特征在于，所述金属过渡层厚度为1～2μm，硬度大于850HV。
4.根据权利要求1所述的耐磨无氢DLC镀层的压缩机滑片，其特征在于，所述无氢DLC层的厚度大于3μm，硬度为1800～3300HV，表面粗糙度Ra＜0.1。
5.一种权利要求1-4任意一项所述的耐磨无氢DLC镀层的压缩机滑片的制备方法，其特征在于，包括以下步骤：
(1)表面氮化处理：滑片基体经过气体氮化表面形成氮化层；
(2)清洗基体：将步骤(1)得到的滑片基体置于真空环境中，通入氩气，开启线性离子源，对滑片基体进行清洗；
(3)沉积金属过渡层：调整步骤(2)得到的滑片基体的负偏压，保持线性离子源开启状态，调整线性离子源的工作电流，继续通入氩气，同时开启阴极电弧源，调整阴极电弧源的工作电流，通入氩气，持续15-18min后关闭线性离子源，完成金属过渡层的沉积；
(4)沉积无氢DLC层调整：调整线性离子源的工作电流、功率，调整步骤(3)得到的滑片基体的负偏压，开启阴极电弧源，电弧使碳靶蒸发并离化为碳离子，碳离子在基底负偏压的作用下，高速轰击基底并沉积成无氢DLC薄膜。
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