CN109336049B - Microstructure operation method and operation device - Google Patents
Microstructure operation method and operation device Download PDFInfo
- Publication number
- CN109336049B CN109336049B CN201811185302.5A CN201811185302A CN109336049B CN 109336049 B CN109336049 B CN 109336049B CN 201811185302 A CN201811185302 A CN 201811185302A CN 109336049 B CN109336049 B CN 109336049B
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- Prior art keywords
- microstructure
- capillary tube
- capillary
- operated
- driving unit
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- 238000000034 method Methods 0.000 title claims abstract description 22
- 239000007788 liquid Substances 0.000 claims abstract description 31
- 230000007246 mechanism Effects 0.000 claims abstract description 29
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical group CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 4
- 230000001105 regulatory effect Effects 0.000 claims 1
- 238000013459 approach Methods 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000004005 microsphere Substances 0.000 description 2
- 238000012795 verification Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000007306 functionalization reaction Methods 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 238000012634 optical imaging Methods 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C3/00—Assembling of devices or systems from individually processed components
- B81C3/008—Aspects related to assembling from individually processed components, not covered by groups B81C3/001 - B81C3/002
Abstract
The invention relates to a microstructure operation method, under the observation of a microscope, a capillary tube is utilized to approach the microstructure, and the suction force and the thrust force provided by a syringe for the capillary tube drive a liquid medium near the microstructure to flow, so that the microstructure is driven to accurately finish the operations of picking up, moving, releasing and assembling. The microstructure operation method can finish microstructure operation under a common microscope, and is simple and convenient to operate. The invention also relates to a microstructure operating device which comprises a microscope, a capillary tube and a capillary tube driving mechanism positioned beside the microscope, wherein the syringe is connected with the capillary tube through a hose, and the capillary tube is arranged on the capillary tube driving mechanism and moves in the three-dimensional direction under the driving of the capillary tube driving mechanism.
Description
Technical Field
The invention relates to the technical field of microstructures, in particular to a microstructure assembling method and a microstructure assembling device.
Background
In recent years, with the rapid development of technical levels in the fields of micro-electromechanical systems, optical imaging, micromedicine and the like, the micro-operation technology attracts more and more attention. Micro-operation technology is an irreplaceable place for future micro-nano technology, miniaturization, functionalization and integrated device fabrication. Unlike macroscopic operations, microscopic objects are physically brittle, have high adhesion, and have significant scale effects, which is also a significant cause of the difficulty in micro-operations. The conventional micro-experiment operation cannot be performed by using a common optical microscope, but a special micro-structure operation device is generally used for performing the micro-structure operation, the requirement on equipment conditions is high, the price is high, the operation is complex, and therefore, how to complete the micro-structure assembly operation under the common optical microscope by using an operation device with relatively low cost is a difficult problem to be solved.
Disclosure of Invention
The first technical problem to be solved by the present invention is to provide a microstructure operation method capable of completing the operations of picking up, moving, releasing and assembling a microstructure by using a common microscope.
The second technical problem to be solved by the present invention is to provide a microstructure operation device which has a simple structure, low cost and can complete microstructure operation.
The technical scheme adopted by the invention for solving the first technical problem is as follows: a method of operating a microstructure, characterized by: the method comprises the following steps:
placing the microstructure to be operated and the microstructure to be assembled in a vessel with a liquid medium, and then placing the vessel under a microscope;
adjusting the position of the capillary until the port of the capillary is observed to be close to the upper part of the microstructure to be operated in the microscope;
operating an injector connected with the capillary tube, so that suction is generated at the port of the capillary tube to drive a liquid medium near the microstructure to be operated to flow to the port of the capillary tube, and the microstructure to be operated is driven by the liquid medium to move to the port of the capillary tube and is adsorbed on the port of the capillary tube, thereby completing the pickup of the microstructure to be operated;
adjusting the position of a capillary, and driving the microstructure to be operated adsorbed at the end of the capillary to move by the capillary;
adjusting the microscope until the microstructure to be assembled is observed, and adjusting the position of the capillary until the position, above the assembling position, of the capillary port, where the microstructure to be operated is adsorbed, of the microstructure to be assembled is observed in the microscope;
the injector connected with the capillary tube is operated, so that the pushing force is generated at the port of the capillary tube to release the microstructure to be operated, meanwhile, the pushing force of the port of the capillary tube drives a liquid medium near the assembling position of the microstructure to be assembled to flow to the assembling position of the microstructure to be assembled, the microstructure to be operated is driven by the liquid medium to move to the assembling position of the microstructure to be assembled, and then the microstructure to be operated is assembled at the assembling position of the microstructure to be assembled.
Preferably, in the vessel, the liquid medium is caused to flood the microstructure.
In order to reduce the adhesion effect of the microstructure and improve the smoothness of the movement of the microstructure, the liquid medium is absolute ethyl alcohol.
The invention solves the second technical problem by adopting the technical proposal that: a microstructure handling apparatus, characterized in that: comprising
A microscope;
a capillary tube;
the capillary driving mechanism is positioned beside the microscope, the capillary is arranged on the capillary driving mechanism, the tail end part of the capillary is obliquely arranged relative to the horizontal direction, and the capillary driving mechanism can drive the capillary to move in the three-dimensional direction;
the syringe is connected with the capillary tube through a hose.
For convenient operation, the syringe is mounted on the mounting base by a fixing plate.
Preferably, the capillary tube driving mechanism comprises a lifting driving unit, a left driving unit, a right driving unit and a front driving unit and a rear driving unit, wherein the left driving unit and the right driving unit are connected to the lifting driving unit, and the front driving unit and the rear driving unit are connected to the left driving unit and the right driving unit, and the capillary tube is fixedly arranged on the front driving unit and the rear driving unit through a mounting block.
In order to improve the convenience of operation, the port diameter of the capillary is slightly smaller than the diameter of the microstructure.
In order to improve the sensitivity of the operation, the syringe, the hose and the capillary tube are provided with liquid medium.
Preferably, the tip portion of the capillary tube has an inclination angle of 60 ° to 80 ° with respect to the horizontal direction.
Compared with the prior art, the invention has the advantages that: in the microstructure operation method, under the net auxiliary action of a common microscope, the capillary force of the capillary tube is utilized to drive the liquid medium to move, and the liquid medium pushes the microstructure to move under the action of self flexibility and self-calibration performance so as to approach, adsorb or leave the port of the capillary tube, thus completing the operations of picking up, moving, releasing and assembling the microstructure by the capillary tube. And during the operation of the microstructure, the microstructure is protected by the liquid medium, so that the damage to the microstructure due to stress concentration is reduced. The microstructure operating device disclosed by the invention is characterized in that except for a common microscope, only the capillary, the driving mechanism capable of driving the capillary to perform three-dimensional movement and the injector for realizing the suction force and the release force of the end part of the capillary are required to be arranged, and the driving mechanism and the injector are simple in structure, low in cost and convenient to operate. The microstructure operating device can be applied to the fields of micromachine assembly, medical treatment, bioengineering and the like, and has a wide application range.
Drawings
Fig. 1 is a block diagram of a microstructure operating apparatus according to an embodiment of the present invention.
Detailed Description
The invention is described in further detail below with reference to the embodiments of the drawings.
As shown in fig. 1, the microstructure handling apparatus in this embodiment is used to perform operations of picking up, moving, releasing, assembling, and the like, on a microstructure. The microstructure operating device comprises a microscope, a capillary 1, a capillary driving mechanism 2 and a syringe 3. In specific operations, vessels, slides, etc. are also used as needed to cooperate with the operating devices.
The microscope is used for assisting in the operation of the microstructure, so that the operation process is visible, and the accuracy of the operation is ensured.
The capillary 1 is a capillary 1 with a port diameter slightly smaller than the diameter of the microstructure to be operated, so that the microstructure to be operated is adsorbed at the port of the capillary 1 in the picking and moving processes described below, and cannot enter the capillary 1, and operability and convenience in operation can be improved.
The capillary 1 is mounted on the capillary driving mechanism 2, the capillary driving mechanism 2 is placed beside the microscope during operation, and the capillary driving mechanism 2 can be independently placed anywhere for storage according to the need when the operation is not performed. After the capillary 1 is mounted on the capillary driving mechanism 2, the end portion of the capillary 1 is inclined with respect to the horizontal direction, so that the end portion of the capillary 1 can be ensured not to shade the display of the microstructure in the microscope during the operation described below, and the position of the end portion of the capillary 1 with respect to the microstructure can be clearly checked. The tip portion of the capillary 1 is inclined at an angle of 60 ° to 80 ° with respect to the horizontal direction, and the tip portion of the capillary 1 is preferably inclined at an angle of 70 ° with respect to the horizontal direction in the present embodiment.
The capillary driving mechanism 2 in the present embodiment is a driving mechanism capable of driving the capillary 1 to perform a movement in three dimensions. The capillary tube driving mechanism 2 includes a lift driving unit 21, left and right driving units 22 connected to the lift driving unit 21, and front and rear driving units 23 connected to the left and right driving units 22, and the capillary tube 1 is fixedly mounted on the front and rear driving units 23 by a mounting block. The up-and-down driving unit 21 is configured to drive the capillary 1 to move in the up-and-down direction, the left-and-right driving unit 22 is configured to drive the capillary 1 to move in the left-and-right direction, and the front-and-rear driving unit 23 is configured to drive the capillary 1 to move in the front-and-rear direction. The lifting drive unit 21, the left-right drive unit 22, and the front-rear drive unit 23 may be drive mechanisms of various structures in the prior art, manual drive mechanisms, or electric drive mechanisms. In this embodiment, a manual driving mechanism is adopted, and the lifting driving unit 21, the left and right driving unit 22 and the front and rear driving unit 23 are respectively provided with corresponding adjusting knobs, so that the capillary 1 can be driven to move to a required position by operating the adjusting knobs.
The syringe 3 in this embodiment is connected to the capillary tube 1 by a hose 6. In order to avoid the influence of air in the syringe 3, the tube 6 and the capillary tube 1 on the operation during use, the syringe 3, the tube 6 and the capillary tube 1 may be filled with a liquid medium, and in this embodiment, the same liquid medium as that in a vessel described below is used, and absolute ethanol is preferably used as the liquid medium. In order to improve the convenience of handling the syringe 3, the syringe 3 is mounted on the mounting 5 by a fixing plate 4.
The microstructure operation method in the embodiment can be applied to the fields of micromachine assembly, medical treatment, bioengineering and the like. When verification is carried out in a laboratory, the femtosecond laser two-photon polymerization equipment can be utilized to manufacture microspheres on a glass slide in advance to be used as a microstructure to be operated and a microstructure with a micro groove is used as a microstructure to be assembled, when the microstructure with the micro groove is manufactured, the microstructure can be manufactured on a piece of PVC plate, reliable adhesion of the microstructure on the PVC plate is ensured, and when the operation is carried out, a series of operations such as picking up, moving and releasing the microspheres into the micro groove are completed, and then the verification of the microstructure operation is completed.
The specific microstructure operation method comprises the following steps: placing the microstructure to be operated and the microstructure to be assembled in a vessel with a liquid medium, and submerging the microstructure to be operated and the microstructure to be assembled by the liquid medium; the liquid medium in this embodiment is absolute ethanol; placing the vessel under a microscope, and adjusting the microscope so that the microstructure to be operated can be observed under the microscope;
first, the capillary driving mechanism 2 is manually operated, so that the end of the capillary 1 driven by the capillary driving mechanism 2 stretches into the liquid medium of the vessel and approaches to the microstructure to be operated on the glass slide carrying the microstructure to be operated, at the moment, the position of the capillary 1 is adjusted through observation of a microscope, so that the end of the capillary 1 and the microstructure to be operated are simultaneously found in the microscope, and then the position of the capillary 1 is finely adjusted through operation of the capillary driving mechanism 2 until the port of the capillary 1 is observed to be close to the microstructure to be operated in the microscope.
The push rod of the injector 3 is pulled outwards, so that suction force is generated at the port of the capillary 1 to drive liquid medium near the microstructure to be operated to flow to the port of the capillary 1, and the microstructure to be operated is driven by the liquid medium to move to the port of the capillary 1 and is adsorbed on the port of the capillary 1, so that the microstructure to be operated is picked up.
When the microstructure is required to be moved, the position of the capillary 1 can be adjusted by operating the capillary driving mechanism 2, and the capillary 1 drives the microstructure to be operated adsorbed at the end of the capillary 1 to move.
When the release and assembly operations are required, the position of the microstructure to be assembled in the vessel can be moved, or the microstructure to be assembled can be not placed in the earlier stage, and then the microstructure to be assembled is placed. Adjusting the microscope until the microstructure to be assembled is observed, and adjusting the position of the capillary 1 in the same operation as the microstructure to be operated in the picking process until the position, close to the position above the assembling position of the microstructure to be assembled, of the port of the capillary 1 adsorbing the microstructure to be operated is observed in the microscope;
pushing the push rod of the injector 3 inwards to enable the port of the capillary tube 1 to generate pushing force to release the microstructure to be operated, meanwhile, driving the liquid medium near the assembling position of the microstructure to be assembled to flow to the assembling position of the microstructure to be assembled by the pushing force of the port of the capillary tube 1, and enabling the microstructure to be operated to move to the assembling position of the microstructure to be assembled under the driving of the liquid medium, so that the microstructure to be operated is assembled at the assembling position of the microstructure to be assembled.
The microstructure operating device and the operating method realize that the microstructure is picked up and released after observation and operation under a common optical microscope. Solves the problem that the microstructure can not be accurately positioned in the operation process and the difficulties faced by other microstructure operations. Compared with other microstructure operating devices, the device has the advantages of low requirement on experimental conditions, simplicity in operation, low cost, easiness in processing and manufacturing and the like.
Claims (5)
1. A method of operating a microstructure, characterized by: the method comprises the following steps:
placing the microstructure to be operated and the microstructure to be assembled in a vessel with a liquid medium, and then placing the vessel under a microscope;
adjusting the position of the capillary (1) until the port of the capillary (1) is observed to be close to the upper part of the microstructure to be operated in the microscope;
operating an injector (3) connected with the capillary tube (1), so that suction is generated at the port of the capillary tube (1) to drive a liquid medium near the microstructure to be operated to flow to the port of the capillary tube (1), and the microstructure to be operated is driven by the liquid medium to move to the port of the capillary tube (1) and is adsorbed on the port of the capillary tube (1), thereby completing the pickup of the microstructure to be operated;
the position of the capillary tube (1) is regulated, and the capillary tube (1) drives the microstructure to be operated adsorbed at the end of the capillary tube (1) to move;
adjusting the microscope until the microstructure to be assembled is observed, and adjusting the position of the capillary tube (1) until the position, above the assembling position, of the port of the capillary tube (1) adsorbing the microstructure to be operated, close to the microstructure to be assembled is observed in the microscope;
operating the injector (3) connected with the capillary tube (1) to enable the port of the capillary tube (1) to generate pushing force to release the microstructure to be operated, and simultaneously driving liquid medium near the assembling position of the microstructure to be assembled to flow to the assembling position of the microstructure to be assembled by the pushing force of the port of the capillary tube (1), wherein the microstructure to be operated is driven by the liquid medium to move to the assembling position of the microstructure to be assembled, so that the microstructure to be operated is assembled at the assembling position of the microstructure to be assembled;
a microstructure operation apparatus for realizing a microstructure operation method includes
A microscope;
a capillary tube (1);
the capillary driving mechanism (2) is positioned beside the microscope, the capillary (1) is arranged on the capillary driving mechanism (2), the tail end part of the capillary (1) is obliquely arranged relative to the horizontal direction, and the capillary driving mechanism (2) can drive the capillary (1) to move in the three-dimensional direction;
the injector (3) is connected with the capillary tube (1) through a hose (6);
the injector (3) is arranged on the mounting seat (5) through a fixing plate (4); the capillary tube driving mechanism (2) comprises a lifting driving unit (21), a left driving unit and a right driving unit (22) connected to the lifting driving unit (21) and a front driving unit and rear driving unit (23) connected to the left driving unit and the right driving unit (22), and the capillary tube (1) is fixedly arranged on the front driving unit and the rear driving unit (23) through a mounting block; the tip portion of the capillary tube (1) has an inclination angle of 60 DEG to 80 DEG with respect to the horizontal direction.
2. The method of operating a microstructure according to claim 1, wherein: in the vessel, the liquid medium is caused to flood the microstructure.
3. The method of operating a microstructure according to claim 1, wherein: the liquid medium is absolute ethyl alcohol.
4. The method of operating a microstructure according to claim 1, wherein: the diameter of the port of the capillary tube (1) is slightly smaller than the diameter of the microstructure.
5. The method of operating a microstructure according to claim 1, wherein: the syringe (3), the hose (6) and the capillary tube (1) are internally provided with liquid media.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811185302.5A CN109336049B (en) | 2018-10-11 | 2018-10-11 | Microstructure operation method and operation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811185302.5A CN109336049B (en) | 2018-10-11 | 2018-10-11 | Microstructure operation method and operation device |
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| Publication Number | Publication Date |
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| CN109336049A CN109336049A (en) | 2019-02-15 |
| CN109336049B true CN109336049B (en) | 2023-10-24 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201811185302.5A Active CN109336049B (en) | 2018-10-11 | 2018-10-11 | Microstructure operation method and operation device |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000016833A1 (en) * | 1998-09-18 | 2000-03-30 | The University Of Utah Research Foundation | Surface micromachined microneedles |
| CN1369698A (en) * | 2001-01-31 | 2002-09-18 | 株式会社岛津制作所 | Liquid transfer system and reacting vessel |
| JP2004012361A (en) * | 2002-06-10 | 2004-01-15 | Konica Minolta Holdings Inc | Continuous suction type micro sampling system, apparatus, and analysis method as well as continuous suction type micro capillary |
| WO2007135878A1 (en) * | 2006-05-18 | 2007-11-29 | Semiconductor Energy Laboratory Co., Ltd. | Microstructure, micromachine, and manufacturing method of microstructure and micromachine |
| CN104609741A (en) * | 2015-02-15 | 2015-05-13 | 宁波大学 | Method for preparing microstructure in glass capillary tube |
| CN105967532A (en) * | 2016-06-06 | 2016-09-28 | 宁波大学 | Device and method for rotatably machining microstructure in glass capillary |
| CN106601657A (en) * | 2016-12-12 | 2017-04-26 | 厦门市三安光电科技有限公司 | Transfer system and transfer method of microelements, manufacturing method, device and electronic device |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020100714A1 (en) * | 2001-01-31 | 2002-08-01 | Sau Lan Tang Staats | Microfluidic devices |
| US7198961B2 (en) * | 2004-03-30 | 2007-04-03 | Matsushita Electric Industrial Co., Ltd. | Method for modifying existing micro-and nano-structures using a near-field scanning optical microscope |
| US10365187B2 (en) * | 2016-04-28 | 2019-07-30 | The University Of Hong Kong | Method for rapid and precise manipulation of a tiny volume of liquid droplets |
-
2018
- 2018-10-11 CN CN201811185302.5A patent/CN109336049B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000016833A1 (en) * | 1998-09-18 | 2000-03-30 | The University Of Utah Research Foundation | Surface micromachined microneedles |
| CN1369698A (en) * | 2001-01-31 | 2002-09-18 | 株式会社岛津制作所 | Liquid transfer system and reacting vessel |
| JP2004012361A (en) * | 2002-06-10 | 2004-01-15 | Konica Minolta Holdings Inc | Continuous suction type micro sampling system, apparatus, and analysis method as well as continuous suction type micro capillary |
| WO2007135878A1 (en) * | 2006-05-18 | 2007-11-29 | Semiconductor Energy Laboratory Co., Ltd. | Microstructure, micromachine, and manufacturing method of microstructure and micromachine |
| CN104609741A (en) * | 2015-02-15 | 2015-05-13 | 宁波大学 | Method for preparing microstructure in glass capillary tube |
| CN105967532A (en) * | 2016-06-06 | 2016-09-28 | 宁波大学 | Device and method for rotatably machining microstructure in glass capillary |
| CN106601657A (en) * | 2016-12-12 | 2017-04-26 | 厦门市三安光电科技有限公司 | Transfer system and transfer method of microelements, manufacturing method, device and electronic device |
Non-Patent Citations (2)
| Title |
|---|
| 基于微球透镜的任选区高分辨光学显微成像新方法研究;王淑莹;章海军;张冬仙;;物理学报(第03期);全文 * |
| 宏微结合的多机械手微装配机器人系统;李海鹏;邢登鹏;张正涛;徐德;张大朋;;机器人(第01期);全文 * |
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