CN109336049A - A kind of micro-structure operating method and operating device - Google Patents
A kind of micro-structure operating method and operating device Download PDFInfo
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- CN109336049A CN109336049A CN201811185302.5A CN201811185302A CN109336049A CN 109336049 A CN109336049 A CN 109336049A CN 201811185302 A CN201811185302 A CN 201811185302A CN 109336049 A CN109336049 A CN 109336049A
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- capillary
- operated
- port
- liquid medium
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- 238000011017 operating method Methods 0.000 title claims abstract description 14
- 239000007788 liquid Substances 0.000 claims abstract description 32
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical group CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 4
- 238000006424 Flood reaction Methods 0.000 claims description 2
- 229960000935 dehydrated alcohol Drugs 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 11
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000007599 discharging Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000013329 compounding Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000007306 functionalization reaction Methods 0.000 description 1
- 239000004005 microsphere Substances 0.000 description 1
- 230000008450 motivation Effects 0.000 description 1
- 238000000879 optical micrograph Methods 0.000 description 1
- 238000000399 optical microscopy Methods 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C3/00—Assembling of devices or systems from individually processed components
- B81C3/008—Aspects related to assembling from individually processed components, not covered by groups B81C3/001 - B81C3/002
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Sampling And Sample Adjustment (AREA)
- Micromachines (AREA)
Abstract
The present invention relates to a kind of micro-structure operating methods, under microscopical observation, using capillary close to micro-structure, and by syringe be capillary provide suction, thrust, the liquid medium flow near micro-structure is driven, and then micro-structure is driven accurately to complete to pick up, movement, discharge, assembly manipulation.The micro-structure operating method can complete micro-structure operation under common microscope, simple to operate.The invention further relates to a kind of micro-structure operating devices, including microscope, capillary, the capillary drive mechanism by microscope, the syringe being connected by hose with capillary, capillary is mounted in capillary drive mechanism and carries out the movement on three-dimensional, simple, at low cost, the easy to process production of micro-structure operating device structure under the driving of capillary drive mechanism.
Description
Technical field
The present invention relates to microstructure technology field, in particular to a kind of micro-structure assembly method further relates to a kind of micro-structure
Assembly device.
Background technique
In recent years, with the fast development of the fields technical levels such as MEMS, optical imagery, micro- medical treatment, micro- behaviour
Making technology increasingly attracts people's attention.Microoperation technology is for following nanometer technique, miniaturization, functionalization and integrated
The manufacture of equipment has irreplaceable status.It is operated different from macroscopic arts, the body texture of micro-scale is more crisp, adhesion
Greatly, scale effect is significant, and this is also the major reason for causing microoperation to be difficult to realize.The micro- experimental implementation of tradition can not apply me
Common optical microscopy, and generally use the operation that special micro-structure operation equipment carries out micro-structure, appointed condition is wanted
Ask high, expensive, it is complicated for operation, therefore how using the relatively low operation equipment of relative cost in ordinary optical microscope
Lower completion micro-structure assembly manipulation, which is one, problem to be solved.
Summary of the invention
First technical problem to be solved by this invention be provided for the above-mentioned prior art it is a kind of using common aobvious
Micro mirror can complete pickup, movement, release, the micro-structure operating method for assembling these operations to micro-structure.
Second technical problem to be solved by this invention is simple, the cost that provides a kind of structure for the above-mentioned prior art
Micro-structure operating device low and that micro-structure operation can be completed.
The present invention solves technical solution used by above-mentioned first technical problem are as follows: a kind of micro-structure operating method,
It is characterized in that: the following steps are included:
Micro-structure to be operated, micro-structure to be assembled are placed in the vessel with liquid medium, and then vessel are placed
Under the microscope；
The position of capillary is adjusted, until observing the port of capillary close to wait operate in micro-structure in microscope
Side；
The syringe being connected with capillary is operated, so that generating suction at the port of capillary and driving wait operate micro- knot
Liquid medium near structure is flowed to capillary port, and micro-structure to be operated is moved to capillary under the drive of liquid medium
Port is simultaneously adsorbed on the port of capillary, and then completes the pickup of micro-structure to be operated；
The position of capillary is adjusted, capillary drives the micro-structure to be operated for being adsorbed on Capillary to be moved；
Microscope is adjusted, until observing micro-structure to be assembled, adjusts the position of capillary, until being observed in microscope
To having adsorbed the capillary port of micro-structure to be operated above the rigging position of micro-structure to be assembled；
The syringe being connected with capillary is operated, so that generating motive force at the port of capillary and discharging micro- wait operate
Structure, while the motive force of capillary port drives the liquid medium near the rigging position of micro-structure to be assembled to be assembled micro-
The rigging position of structure flows, and micro-structure to be operated is moved to the assembly position of micro-structure to be assembled under the drive of liquid medium
It sets, and then completes assembly of the micro-structure to be operated on the rigging position of micro-structure to be assembled.
Preferably, in vessel, so that liquid medium floods micro-structure.
In order to reduce the effect that is adhered of micro-structure, the mobile smoothness of micro-structure is improved, the liquid medium is anhydrous second
Alcohol.
The present invention solves technical solution used by above-mentioned second technical problem are as follows: a kind of micro-structure operating device,
It is characterized in that: including
Microscope；
Capillary；
Capillary drive mechanism is located at by microscope, and the capillary is mounted in capillary drive mechanism, and capillary
The end section of pipe is obliquely installed relative to horizontal direction, and the capillary drive mechanism can drive capillary to carry out three-dimensional side
Upward movement；
Syringe is connected by hose with capillary.
The syringe is mounted in mounting base by a fixed plate for operating easily,.
Preferably, the capillary drive mechanism include elevation driving unit, the left and right that is connected on elevation driving unit
Driving unit and the front and back driving unit being connected on the driving unit of left and right, the capillary pass through the fixed peace of a mounting blocks
On the driving unit of front and back.
In order to improve the convenience of operation, the port diameter of the capillary is slightly less than the diameter of micro-structure.
In order to improve the sensitivity of operation, the syringe, hose have liquid medium in capillary.
Preferably, the end section of capillary inclination angle relative to horizontal direction is 60 ° to 80 °.
Compared with the prior art, the advantages of the present invention are as follows: common micro- in the micro-structure operating method in the present invention
Under the net booster action of mirror, liquid medium is driven to be moved using the capillary force of capillary, liquid medium is in the submissive of itself
Property and self calibration performance under the action of push micro-structure to be moved, and then port that is close, adsorbing or leave capillary,
Capillary is so completed to the pickup of micro-structure, movement, release, assembly manipulation.It is micro- and in the operating process to micro-structure
Structure is reduced under the protective effect of liquid medium since stress concentrates the destruction to micro-structure.Micro-structure behaviour in the present invention
Make device, in addition to common microscope, it is only necessary to the driving mechanism that capillary is set, capillary can be driven to carry out three-dimensional motion
And realize the syringe of capillary end suction and release force, and the driving mechanism, syringe construction are simple, and it is at low cost, and grasp
It is convenient to make.The micro-structure operating device can be applied in the fields such as micromachine assembly, medical treatment, bioengineering, use scope
Extensively.
Detailed description of the invention
Fig. 1 is the structure chart of micro-structure operating device in the embodiment of the present invention.
Specific embodiment
The present invention will be described in further detail below with reference to the embodiments of the drawings.
As shown in Figure 1, micro-structure operating device in the present embodiment is for realizing being picked up micro-structure, move, release
The operation such as put, assemble.The micro-structure operating device includes microscope, capillary 1, capillary drive mechanism 2, syringe 3.Having
When gymnastics is made, also according to needing using the compounding practices device such as vessel, glass slide.
Wherein microscope uses existing simple microscope, which is used for the operation for assisting carrying out micro-structure,
So that operating process is visible, it is ensured that the accuracy of operation.
The capillary 1 that capillary 1 selects port diameter more smaller than micro-structure diameter to be operated, can so guarantee following
Pickup, in moving process, micro-structure to be operated is adsorbed at the port of capillary 1, without entering in capillary 1
The convenience of operability and operation so can be improved in portion.
Capillary 1 is mounted in capillary drive mechanism 2, in operation places capillary drive mechanism 2 by microscope,
Can according to need without operation anywhere independence is stored the placement of capillary drive mechanism 2.Capillary
After 1 installs in capillary drive mechanism 2, the end section of capillary 1 is obliquely installed relative to horizontal direction, can so be protected
For card in following operating process, the end of capillary 1 will not block display of the micro-structure in microscope, while also can be clear
The position relative to micro-structure for checking 1 end of capillary of Chu.Inclination angle is the end section of capillary 1 relative to horizontal direction
60 ° to 80 °, inclination angle is preferably 70 ° to the end section of capillary 1 relative to horizontal direction in the present embodiment.
Capillary drive mechanism 2 in the present embodiment is the drive that capillary 1 can be driven to carry out the movement on three-dimensional
Motivation structure.The capillary drive mechanism 2 includes elevation driving unit 21, the left and right driving list being connected on elevation driving unit 21
Member 22 and the front and back driving unit 23 being connected on left and right driving unit 22, capillary 1 are fixedly mounted by a mounting blocks
On front and back driving unit 23.The movement that elevation driving unit 21 is used to that capillary 1 to be driven to carry out in up and down direction, left and right driving
For unit 22 for driving the movement of capillary 1 in the lateral direction, front and back driving unit 23 carries out front and back with driving capillary 1
Upward movement.Wherein elevation driving unit 21, left and right driving unit 22, front and back driving unit 23 can be using in the prior art
Various structures driving mechanism, can use Manual drive mechanism, electric driving mechanism can also be used.It is adopted in the present embodiment
With Manual drive mechanism, elevation driving unit 21, left and right driving unit 22, front and back driving unit 23 are each configured with corresponding tune
Knob is saved, is being operated, adjusting knob is operated, that is, is able to achieve the mobile driving to capillary 1, driving capillary 1 is moved to
The position needed.
Syringe 3 in the present embodiment is connected by hose 6 with capillary 1.When in use, in order to avoid syringe 3,
Influence of the air to operation in hose 6, capillary 1 can fill liquid medium in syringe 3, hose 6, capillary 1, this
Liquid medium in embodiment use with identical liquid medium in following vessel, it is preferable to use anhydrous second for the liquid medium
Alcohol.In order to improve the convenience operated to syringe 3, syringe 3 is mounted in mounting base 5 by a fixed plate 4.
Micro-structure operating method in the present embodiment can be applied to the fields such as micromachine assembly, medical treatment, bioengineering
In.When verifying in the lab, microsphere can be made on glass slide using Fs laser double photon polymerization unit in advance
The micro-structure practical and with microflute as micro-structure to be operated is used as micro-structure to be assembled, has microflute in production
When micro-structure, which can be produced in a piece of PVC board, guarantee micro-structure being reliably adhered in PVC board, grasp
When making, microballoon is picked up, move and is released into microflute and complete a series of operations such as assembly, and then completed to micro- knot
The verifying of structure operation.
Specific micro-structure operating method are as follows: micro-structure to be operated, micro-structure to be assembled are placed on liquid medium
Vessel in, and liquid medium is made to flood micro-structure to be operated, micro-structure to be assembled these micro-structures；In the present embodiment
Liquid medium uses dehydrated alcohol；And then place vessel under the microscope, microscope is adjusted, so that can see under the microscope
Observe micro-structure to be operated；
Operation capillary drive mechanism 2 artificial first, so that capillary drive mechanism 2 drives the end of capillary 1 to stretch
The microstructure positional to be operated entered in the liquid medium of vessel and on the glass slide for being loaded with micro-structure to be operated is close, at this time
Again by microscopical observation, the position of capillary 1 is adjusted, so that finding 1 end of capillary and wait grasp simultaneously in microscope
Make micro-structure, and then the position of capillary 1 is being finely tuned by operation capillary drive mechanism 2, until being observed in microscope
The port of capillary 1 is above micro-structure to be operated.
The push rod of syringe 3 is pulled out, so that generating suction at the port of capillary 1 and driving micro-structure to be operated attached
Close liquid medium is flowed to 1 port of capillary, and micro-structure to be operated is moved to the end of capillary 1 under the drive of liquid medium
Mouth is simultaneously adsorbed on the port of capillary 1, and then completes the pickup of micro-structure to be operated.
When needing to micro-structure moving operation, then the position of capillary 1 can be adjusted by operating capillary drive mechanism 2
It sets, capillary 1 drives the micro-structure to be operated for being adsorbed on 1 end of capillary to be moved.
When carrying out release and assembly manipulation, position of the micro-structure to be assembled in vessel can be moved, it can also
It does not place micro-structure to be assembled with early period, places micro-structure to be assembled again at this time.Microscope is adjusted, until observing to be assembled micro-
Structure adjusts the position of capillary 1 with the operation in micro-structure pick process to be operated, until observing suction in microscope
1 port of capillary of attached micro-structure to be operated is above the rigging position of micro-structure to be assembled；
The push rod of syringe 3 is inwardly pushed, so that generating motive force at the port of capillary 1 and discharging wait operate micro- knot
Structure, while the motive force of 1 port of capillary drives the liquid medium near the rigging position of micro-structure to be assembled to be assembled micro-
The rigging position of structure flows, and micro-structure to be operated is moved to the assembly position of micro-structure to be assembled under the drive of liquid medium
It sets, and then completes assembly of the micro-structure to be operated on the rigging position of micro-structure to be assembled.
Micro-structure operating device and operating method above-mentioned are realized in common optical microphotograph microscopic observation and have been operated
At the pickup and release of micro-structure.It solves the problems, such as to be unable to precise positioning and other micro-structures in micro-structure operating process
Operate faced difficulty.Compared with other micro-structure operating devices, have to experiment condition require it is low, easy to operate, at
The advantages that this production low, easy to process.
Claims (9)
1. a kind of micro-structure operating method, it is characterised in that: the following steps are included:
Micro-structure to be operated, micro-structure to be assembled are placed in the vessel with liquid medium, and then vessel are placed on aobvious
Under micro mirror；
The position of capillary (1) is adjusted, until observing the port of capillary (1) close to wait operate in micro-structure in microscope
Side；
The syringe (3) being connected with capillary (1) is operated, so that generating suction at the port of capillary (1) and driving wait grasp
Make the liquid medium near micro-structure to flow to capillary (1) port, micro-structure to be operated moves under the drive of liquid medium
To capillary (1) port and be adsorbed on the port of capillary (1), and then complete the pickup of micro-structure to be operated；
The position of capillary (1) is adjusted, capillary (1) drives the micro-structure to be operated for being adsorbed on capillary (1) end to be moved；
Microscope is adjusted, until observing micro-structure to be assembled, adjusts the position of capillary (1), until being observed in microscope
To having adsorbed capillary (1) port of micro-structure to be operated above the rigging position of micro-structure to be assembled；
Operate the syringe (3) that is connected with capillary (1) so that at the port of capillary (1) generation motive force and discharge to
Micro-structure is operated, while the motive force of capillary (1) port drives the liquid medium near the rigging position of micro-structure to be assembled
It is flowed to the rigging position of micro-structure to be assembled, micro-structure to be operated is moved to micro-structure to be assembled under the drive of liquid medium
Rigging position, and then complete assembly of the micro-structure to be operated on the rigging position of micro-structure to be assembled.
2. micro-structure operating method according to claim 1, it is characterised in that: in vessel, so that liquid medium floods
Micro-structure.
3. micro-structure operating method according to claim 1, it is characterised in that: the liquid medium is dehydrated alcohol.
4. a kind of micro-structure operating device for realizing the micro-structure operating method as described in 1 to 3 any claim, feature exist
In: including
Microscope；
Capillary (1)；
Capillary drive mechanism (2) is located at by microscope, and the capillary (1) is mounted on capillary drive mechanism (2), and
And the end section of capillary (1) is obliquely installed relative to horizontal direction, the capillary drive mechanism (2) can drive capillary
Manage the movement on (1) progress three-dimensional；
Syringe (3) is connected by hose (6) with capillary (1).
5. micro-structure operating device according to claim 4, it is characterised in that: the syringe (3) passes through a fixation
Plate (4) is mounted on mounting base (5).
6. micro-structure operating device according to claim 4, it is characterised in that: the capillary drive mechanism (2) includes
Elevation driving unit (21), the left and right driving unit (22) being connected on elevation driving unit (21) and be connected to left and right driving
Front and back driving unit (23) on unit (22), the capillary (1) are fixedly mounted on front and back driving list by a mounting blocks
On first (23).
7. micro-structure operating device according to claim 4, it is characterised in that: the port diameter of the capillary (1) is omited
Less than the diameter of micro-structure.
8. micro-structure operating device according to claim 4, it is characterised in that: the syringe (3), hose (6), capillary
Managing has liquid medium in (1).
9. micro-structure operating device according to claim 4, it is characterised in that: the terminal part split-phase of the capillary (1)
Inclination angle for horizontal direction is 60 ° to 80 °.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811185302.5A CN109336049B (en) | 2018-10-11 | 2018-10-11 | Microstructure operation method and operation device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811185302.5A CN109336049B (en) | 2018-10-11 | 2018-10-11 | Microstructure operation method and operation device |
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| CN109336049A true CN109336049A (en) | 2019-02-15 |
| CN109336049B CN109336049B (en) | 2023-10-24 |
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| CN109336049B (en) | 2023-10-24 |
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