CN109297991A - A kind of glass surface defects detection system and method - Google Patents
A kind of glass surface defects detection system and method Download PDFInfo
- Publication number
- CN109297991A CN109297991A CN201811418935.6A CN201811418935A CN109297991A CN 109297991 A CN109297991 A CN 109297991A CN 201811418935 A CN201811418935 A CN 201811418935A CN 109297991 A CN109297991 A CN 109297991A
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- glass
- detected
- ultraviolet light
- deep ultraviolet
- carrying platform
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/061—Sources
Abstract
The present invention discloses a kind of glass surface defects detection system and method, and wherein detection system includes carrying platform, deep ultraviolet light source and specialized camera, and wherein carrying platform, which is used to support, places glass to be detected；Glass to be detected on carrying platform described in the deep ultraviolet light source emitting ultraviolet light and oblique illumination；The specialized camera is installed on right above the carrying platform and faces the carrying platform surface, for acquiring the deep ultraviolet light of reflection；Include four steps using the detection method of said detecting system: glass to be detected is placed；Deep ultraviolet light irradiation；Image Acquisition；Determine glass to be detected with the presence or absence of defect.Detection system and method provided by the invention are able to solve the shortcomings that prior art can generate larger background interference using visible light source detection glass defect, are detected using deep ultraviolet light source, can eliminate background interference, effectively improve accuracy rate.
Description
Technical field
The present invention relates to glass production manufacturing field, in particular to a kind of glass surface defects detection system and method.
Background technique
Glass is to show as longrange disorder in structure completely, with the amorphous state solid of conversion characteristic in performance.One
As glass calcium carbonate can be added during fabrication, so ultraviolet band translucency weaken, especially wavelength lower than 300nm light it is complete
It is complete impermeable.
With the continuous development of society, scientific and technological technique is constantly progressive, and glass is also increasingly wider in the application of every field
It is general, such as Mobile phone screen film, laser resonant cavity, camera lens, electronic product display screen, eyeglass, satellite optical eyeglass.With
The development of science and technology, demand to glass and require also further increase.But in Improving Glass Manufacturing Processes, due to production
Technique and otherwise reason, which can generate scratch, salient point etc. in glass surface, influences the defect of glass surface flatness, influences
The quality of glass.So how fast and effeciently to detect glass surface defects becomes urgent problem to be solved.
The method of traditional detection glass surface defects mainly uses visible light source to be irradiated glass surface, so
Image Acquisition reprocessing is carried out with camera afterwards.Since simple glass is transparent to visible light source, this method anti-interference ability is weak,
For context request height, usage scenario is more harsh.
Therefore, the prior art is to be improved.
Summary of the invention
In view of the problems of the existing technology, the present invention provides a kind of glass surface defects detection system, and concrete scheme is such as
Under:
Including carrying platform, deep ultraviolet light source and specialized camera, wherein carrying platform, which is used to support, places glass to be detected
Glass；The deep ultraviolet light source emitting ultraviolet light irradiates the glass to be detected on the carrying platform；The specialized camera is installed on
Right above the carrying platform and the carrying platform surface is faced, is used for Image Acquisition.
Preferably, the brightness of the deep ultraviolet light source is adjustable, and the deep ultraviolet light wavelength of transmitting is 200nm~400nm.
Preferably, the specialized camera includes a camera sensor, and the camera sensor front end is equipped with optical filter, institute
State the light that optical filter device is greater than 400nm for shielding wavelength.
Preferably, the Si-Substrate Thickness of the camera sensor is 100um~300um.
Preferably, the Si-Substrate Thickness of the camera sensor is 150um.
Preferably, the corner dimension of the deep ultraviolet light source light emission direction and the carrying platform is 1 °~90 °.
Preferably, the corner dimension of the deep ultraviolet light source light emission direction and the carrying platform is 90 °, the deep ultraviolet
Light source is the annular light source of hollow structure.
The present invention also provides a kind of glass surface defects detection methods, using above-mentioned glass surface defects detection system, tool
Body scheme is as follows:
Including the following steps:
Glass to be detected is placed: glass to be detected is lain against on the carrying platform immediately below the specialized camera；
Deep ultraviolet light irradiation: it opens the deep ultraviolet light source and makes deep ultraviolet light oblique illumination glass surface to be detected；
Image Acquisition: image is acquired by using the specialized camera；
Determine glass to be detected with the presence or absence of defect: if camera acquired image gray value is equal everywhere, determining should
Glass quality to be detected is qualified；If the image place inconsistent there are gray value, determines that the glass quality to be detected exists and lack
It falls into, and the inconsistent position of gray value corresponds in defect position and image, it can not by gray value in image
Orient glass defect position to be detected in consistent position.
Using technical solution of the present invention, have the advantages that
1, the present invention utilizes deep ultraviolet light to generate larger background interference when solving the disadvantage that using visible light source
Light source is detected, and can be eliminated background interference, be effectively improved accuracy rate；
2, in preferred embodiment, the silicon substrate of camera sensor is designed to very thin, can prevent the photodiode at back
Photoelectric current is generated because of Ultraviolet radiation absorbing before work.
Detailed description of the invention
Fig. 1 is the principle schematic diagram of glass surface defects detection system in one embodiment of the invention；
Fig. 2 is the principle schematic diagram of glass surface defects detection system in another embodiment of the present invention；
Fig. 3 is the flow chart of glass surface defects detection method in the present invention.
Specific embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is further described.
Referring to Fig.1, the present invention provides a kind of glass surface defects detection system, including carrying platform 1, deep ultraviolet light source 2
And specialized camera 3, wherein carrying platform 1, which is used to support, places glass 10 to be detected；The deep ultraviolet light source 2 emits deep ultraviolet
Glass to be detected 10 on carrying platform 1 described in light and oblique illumination；The specialized camera 3 is being installed on the carrying platform 1 just
Top simultaneously faces 1 surface of carrying platform, is used for Image Acquisition.
The brightness of the deep ultraviolet light source 2 is adjustable, and the deep ultraviolet light wavelength of transmitting is 200nm~400nm.
The specialized camera 3 includes a camera sensor, and the camera sensor front end is equipped with optical filter, the optical filtering
Device device is used to shield the light that wavelength is greater than 400nm.
The Si-Substrate Thickness of the camera sensor is 150um.
The angle that 2 light emission direction of deep ultraviolet light source and 3 supporting plane of carrying platform are formed is small more than or equal to 1 °
In 90 °.
Referring to Fig. 2, in another embodiment, the deep ultraviolet light source 2a light emission direction and the carrying platform 3 support are flat
The angle that face is formed is equal to 90 °, and the deep ultraviolet light source 2a is the annular light source of hollow structure.
Referring to Fig. 3, the present invention also provides a kind of glass surface defects detection methods, are detected using above-mentioned glass surface defects
System, including the following steps:
Glass to be detected is placed: glass 10 to be detected is lain against the carrying platform 1 immediately below the specialized camera 3
On；
Deep ultraviolet light irradiation: it opens the deep ultraviolet light that the deep ultraviolet light source 2 makes and irradiates 10 surface of glass to be detected；
Image Acquisition: image is acquired by using the specialized camera 3；
Determine glass to be detected with the presence or absence of defect: if 3 acquired image gray value of specialized camera is equal everywhere, sentencing
The fixed glass 10 to be detected is up-to-standard；If the image place inconsistent there are gray value, determine that the glass 10 to be detected is deposited
In defect, and in defect position and image, the inconsistent position of gray value is corresponded, it can passes through gray scale in image
It is worth inconsistent position and orients 10 defect position of glass to be detected.
Using technical solution of the present invention, have the advantages that
1, larger background interference can be generated when solving the disadvantage that in traditional detection method using visible light source, utilizes depth
Ultraviolet source is detected, and can be eliminated background interference, be effectively improved accuracy rate；
2, the silicon substrate of camera sensor is designed to very thin, can prevent from inhaling in the cause of the photodiode work at back
It receives ultraviolet radioactive and generates photoelectric current.
The above description is only a preferred embodiment of the present invention, is not intended to limit the scope of the invention, all at this
Under the inventive concept of invention, using equivalent structure transformation made by description of the invention and accompanying drawing content, or directly/use indirectly
It is included in other related technical areas in scope of patent protection of the invention.
Claims (6)
1. a kind of glass surface defects detection system, it is characterised in that: including carrying platform, deep ultraviolet light source and dedicated phase
Machine, wherein carrying platform, which is used to support, places glass to be detected；The deep ultraviolet light source emitting ultraviolet light irradiation carrying is flat
Glass to be detected on platform；The specialized camera is installed on right above the carrying platform and faces the carrying platform table
Face, the acquisition for image.
2. glass surface defects detection system according to claim 1, it is characterised in that: the brightness of the deep ultraviolet light source
Adjustable, the deep ultraviolet light wavelength of transmitting is 200nm~400nm.
3. glass surface defects detection system according to claim 2, it is characterised in that: the specialized camera includes one
Camera sensor, the camera sensor front end are equipped with optical filter, and the optical filter device is used to shield wavelength greater than 400nm's
Light.
4. glass surface defects detection system according to claim 3, it is characterised in that: the silicon of the camera sensor serves as a contrast
Bottom is with a thickness of 100um~300um.
5. glass surface defects detection system according to claim 1, it is characterised in that: the deep ultraviolet light source luminescent side
It is 1 °~90 ° to the corner dimension formed with the carrying platform supporting surface.
6. a kind of glass surface defects detection method is detected using glass surface defects described in aforesaid right 1-5 any one
System, it is characterised in that: including the following steps:
Glass to be detected is placed: glass to be detected is lain against on the carrying platform immediately below the specialized camera；
Deep ultraviolet light irradiation: the deep ultraviolet light oblique illumination glass surface to be detected that the deep ultraviolet light source makes is opened；
Image Acquisition: image is acquired by using the specialized camera；
Determine glass to be detected with the presence or absence of defect: if specialized camera acquired image gray value is equal everywhere, determining should
Glass quality to be detected is qualified；If the image place inconsistent there are gray value, the glass existing defects to be detected are determined, and
The inconsistent position of gray value corresponds in defect position and image, it can inconsistent by gray value in image
Orient glass defect position to be detected in position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811418935.6A CN109297991B (en) | 2018-11-26 | 2018-11-26 | Glass surface defect detection system and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811418935.6A CN109297991B (en) | 2018-11-26 | 2018-11-26 | Glass surface defect detection system and method |
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| CN109297991A true CN109297991A (en) | 2019-02-01 |
| CN109297991B CN109297991B (en) | 2019-12-17 |
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| CN201811418935.6A Active CN109297991B (en) | 2018-11-26 | 2018-11-26 | Glass surface defect detection system and method |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110221444A (en) * | 2019-06-06 | 2019-09-10 | 深圳市麓邦技术有限公司 | Imaging system |
| CN110986821A (en) * | 2019-12-16 | 2020-04-10 | 广东谨诺科技有限公司 | Workpiece image measuring instrument capable of transmitting visible light and reflecting ultraviolet light |
| CN111272777A (en) * | 2020-02-28 | 2020-06-12 | 合肥市商巨智能装备有限公司 | Defect layering detection device and method |
| CN111896550A (en) * | 2020-03-31 | 2020-11-06 | 广西师范大学 | Surface defect detection device and method |
| TWI743547B (en) * | 2019-08-30 | 2021-10-21 | 海華科技股份有限公司 | Detecting method for glass |
| CN114235847A (en) * | 2021-12-20 | 2022-03-25 | 深圳市尊绅投资有限公司 | Liquid crystal display panel glass substrate surface defect detection device and detection method |
| CN114295641A (en) * | 2021-12-29 | 2022-04-08 | 万津实业(赤壁)有限公司 | Defect detection structure and detection method of glass ink layer |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| TWI743547B (en) * | 2019-08-30 | 2021-10-21 | 海華科技股份有限公司 | Detecting method for glass |
| CN110986821A (en) * | 2019-12-16 | 2020-04-10 | 广东谨诺科技有限公司 | Workpiece image measuring instrument capable of transmitting visible light and reflecting ultraviolet light |
| CN111272777A (en) * | 2020-02-28 | 2020-06-12 | 合肥市商巨智能装备有限公司 | Defect layering detection device and method |
| CN111896550A (en) * | 2020-03-31 | 2020-11-06 | 广西师范大学 | Surface defect detection device and method |
| CN114235847A (en) * | 2021-12-20 | 2022-03-25 | 深圳市尊绅投资有限公司 | Liquid crystal display panel glass substrate surface defect detection device and detection method |
| CN114295641A (en) * | 2021-12-29 | 2022-04-08 | 万津实业(赤壁)有限公司 | Defect detection structure and detection method of glass ink layer |
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