CN109292452A - Silicon wafer wafer-handling device - Google Patents
Silicon wafer wafer-handling device Download PDFInfo
- Publication number
- CN109292452A CN109292452A CN201811446123.2A CN201811446123A CN109292452A CN 109292452 A CN109292452 A CN 109292452A CN 201811446123 A CN201811446123 A CN 201811446123A CN 109292452 A CN109292452 A CN 109292452A
- Authority
- CN
- China
- Prior art keywords
- silicon wafer
- basket
- wafer
- handling device
- material basket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 213
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 212
- 239000010703 silicon Substances 0.000 title claims abstract description 212
- 239000000463 material Substances 0.000 claims abstract description 88
- 238000003860 storage Methods 0.000 claims abstract description 21
- 238000004519 manufacturing process Methods 0.000 claims abstract description 5
- 238000007599 discharging Methods 0.000 abstract description 12
- 238000000926 separation method Methods 0.000 abstract description 3
- 235000012431 wafers Nutrition 0.000 description 142
- 238000000034 method Methods 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 230000003044 adaptive effect Effects 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
- B65G47/912—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers provided with drive systems with rectilinear movements only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/34—Devices for discharging articles or materials from conveyor
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a kind of silicon wafer wafer-handling devices, including expecting basket, material basket, which is configured in from preceding pipeline production line, receives silicon wafer, expect the fixed device of basket, the fixed device of material basket is configured in fixed material basket, expect basket handling device, material basket handling device, which is configured in, is carried to material basket at the fixed device of material basket, silicon wafer goes out basket device, silicon wafer go out basket device be configured in by silicon wafer from material basket in separate, silicon chip storage device, silicon chip storage device is configured in storage silicon wafer, silicon wafer handling device, silicon wafer handling device reception silicon wafer goes out the silicon wafer that basket device is isolated and silicon wafer is moved in silicon chip storage device, by the setting for expecting basket handling device and silicon wafer handling device, realize the carrying movement of material basket and silicon wafer, avoid the carrying manually to material basket and silicon wafer, go out basket device by silicon wafer simultaneously to separate silicon wafer from material basket, avoid manually to silicon wafer into Row separation obtains, and so as to avoid manual operation, ensure that the stability of silicon wafer discharging, improves the working efficiency of silicon wafer discharging.
Description
Technical field
The present invention relates to a kind of silicon wafer rotating device more particularly to a kind of silicon wafer wafer-handling devices.
Background technique
The haul mode for the still manual cleaning that now silicon wafer discharging uses on the market, obtains silicon wafer from preceding road by manpower,
And silicon wafer slices are inserted into silicon wafer box.
During artificial haul, because of silicon wafer extremely crisp fritter, it is easy to because manpower force is unstable, silicon wafer be caused to be removed
During fortune the phenomenon that chipping or crack, this haul mode requires very high and is difficult to work long hours to worker, in turn
Production efficiency is also very low.
Summary of the invention
In order to guarantee the stability of silicon wafer discharging, the working efficiency of silicon wafer discharging, technical solution of the present invention are improved
Provide a kind of silicon wafer wafer-handling device.Technical solution is as follows:
In a first aspect, the present invention provides a kind of silicon wafer wafer-handling device, including material basket, material basket, which is configured in from preceding road, to be produced
Line receives silicon wafer, the fixed device of material basket, and the fixed device of material basket is configured in fixed material basket, expects that basket handling device, material basket carry dress
It sets to be configured in and material basket is carried at the fixed device of material basket, silicon wafer goes out basket device, and silicon wafer goes out basket device and is configured in silicon wafer
It is separated from material basket, silicon chip storage device, silicon chip storage device is configured in storage silicon wafer, silicon wafer handling device, and silicon wafer is carried
Device reception silicon wafer goes out the silicon wafer that basket device is isolated and silicon wafer is moved in silicon chip storage device.
By expecting the setting of basket handling device and silicon wafer handling device, the carrying movement of material basket and silicon wafer is realized, is avoided
Manually to the carrying of material basket and silicon wafer, while basket device is gone out by silicon wafer and separates silicon wafer from material basket, it is manually right to avoid
Silicon wafer carries out separation acquisition, so as to avoid manual operation, ensure that the stability of silicon wafer discharging, improves the work of silicon wafer discharging
Make efficiency.
In the first possible implementation of the first aspect, material basket includes at least four limited posts and at least two pieces gears
Plate, limited post are mounted between baffle, and limited post is equipped with multiple grooves to match with single silicon wafer thickness.
By the design of limited post, so that position of the silicon wafer in material basket is fixed, consequently facilitating silicon wafer handling device
Acquisition to silicon wafer.
With reference to first aspect with the first possible implementation of first aspect, second in first aspect is possible
In implementation, limited post is four, wherein two limited posts are guide and limit column, remaining two limited posts are to hold limit
Column.
With reference to first aspect to second of possible implementation of first aspect, the third in first aspect is possible
In implementation, the fixed device of material basket includes fast pulley and fast pulley power device, and fast pulley is mounted on fast pulley power device
Motion end.
It drives fast pulley to compress material basket by fast pulley power device, so as to determine the position of material basket, and then is convenient for
The shift position for determining silicon wafer handling device considerably increases the stability of silicon wafer wafer-handling device.
With reference to first aspect to the third possible implementation of first aspect, the 4th kind in first aspect is possible
In implementation, material basket handling device includes that material basket carries clamping jaw and material basket clamping jaw power device, expects basket clamping jaw power device band
Dynamic material basket is carried three axis of clamping jaw and is moved back and forth.
The position of tight and mobile material basket by material basket conveying clamp claw clip, realizing material basket, from preceding working procedure to be transported to material basket solid
Determine device, thus increases the compatibility of silicon wafer wafer-handling device Yu preceding road station.
With reference to first aspect to the 4th kind of possible implementation of first aspect, the 5th kind in first aspect is possible
In implementation, it includes that silicon wafer goes out basket head and silicon wafer is driven to go out the silicon wafer that basket head acts to go out basket power device that silicon wafer, which goes out basket device,
Silicon wafer goes out basket power device and silicon wafer is driven to go out the reciprocating motion of three axis of basket head.
The setting for going out basket device by silicon wafer isolates silicon wafer from material basket, consequently facilitating silicon wafer carries dress
It sets and the silicon wafer in material basket is obtained, the setting of basket power device is gone out by silicon wafer, realize silicon wafer and go out basket head to the material each portion of basket
The silicon wafer of position can be separated, and the stability of silicon wafer wafer-handling device is considerably increased.
With reference to first aspect to the 5th kind of possible implementation of first aspect, the 6th kind in first aspect is possible
In implementation, silicon wafer goes out basket head and is equipped with multiple matched grooves of position institute with silicon wafer in material basket.
The setting for going out the groove on basket head by silicon wafer enables silicon wafer to be embedded in silicon wafer when basket out and goes out basket head
On groove in, hereby it is ensured that the stability of silicon wafer of silicon wafer during basket out.
With reference to first aspect to the 6th kind of possible implementation of first aspect, the 7th kind in first aspect is possible
In implementation, silicon wafer handling device includes silicon wafer clamping plate and the clamping plate power device for driving the movement of silicon wafer clamping plate, silicon
Piece clamping plate is equipped with the groove matched with silicon wafer.
By the setting of the groove on silicon wafer clamping plate, silicon wafer is enabled to be embedded in silicon wafer clamping when being stepped up
In groove on plate, and then the stability for the silicon wafer being clamped in clamping plate can be stablized.
With reference to first aspect to the 6th kind of possible implementation of first aspect, the 7th kind in first aspect is possible
In implementation, silicon chip storage device includes magazine and the lift-sliding power device for driving magazine movement.
Magazine is driven to carry out lift-sliding movement by lift-sliding power device, to realize silicon chip storage device energy
It enough follows silicon wafer handling device to be acted, and then has saved the unloading piece speed of silicon wafer wafer-handling device, finally improve silicon wafer and unload
Expect the working efficiency of device.
Detailed description of the invention
The drawings herein are incorporated into the specification and constitutes part of specification, shows and meets implementation of the invention
Example, and be used to explain the principle of the present invention together with specification, in which:
Fig. 1 is a kind of schematic perspective view of material basket of the embodiment of the present invention；
Fig. 2 is a kind of schematic perspective view of magazine of the embodiment of the present invention；
A kind of schematic perspective view of silicon wafer wafer-handling device of the position Fig. 3 embodiment of the present invention；
Fig. 4 is the schematic perspective view of another angle of Fig. 3；
Fig. 5 is the schematic perspective view of the material basket and material basket carrying clamping jaw in the embodiment of the present invention；
Fig. 6 is the partial view of location A in Fig. 3；
Fig. 7 is the partial view of B location in Fig. 3；
Fig. 8 goes out the schematic perspective view of basket head for the silicon wafer in the embodiment of the present invention；
Fig. 9 is the partial view of location of C in Fig. 8；
Figure 10 is the partial view of the position D in Fig. 1；
Figure 11 is the partial view of the position E in Fig. 3.
Specific embodiment
Following disclosure provides many different embodiments or example is used to realize different structure of the invention.In order to
Simplify disclosure of the invention, hereinafter the component of specific examples and setting are described.Certainly, they are merely examples, and
And it is not intended to limit the present invention.In addition, the present invention can in different examples repeat reference numerals and/or reference letter,
This repetition is for purposes of simplicity and clarity, itself not indicate between discussed various embodiments and/or setting
Relationship.In addition, the present invention provides various specific techniques and material example, but those of ordinary skill in the art can be with
Recognize the application of other techniques and/or the use of other materials.
The haul mode for the still manual cleaning that now silicon wafer discharging uses on the market, obtains silicon wafer from preceding road by manpower,
And silicon wafer slices are inserted into silicon wafer box.
During artificial haul, because of silicon wafer extremely crisp fritter, it is easy to because manpower force is unstable, silicon wafer be caused to be removed
During fortune the phenomenon that chipping or crack, this haul mode requires very high and is difficult to work long hours to worker, in turn
Production efficiency is also very low.
In order to guarantee the stability of silicon wafer discharging, the working efficiency of silicon wafer discharging is improved, the present invention provides one kind
Silicon wafer wafer-handling device, technical solution are as follows:
The present invention is described in further details below according to attached drawing 1 to Figure 10.
As shown in Figures 2 and 3, the present invention provides a kind of silicon wafer wafer-handling device, including material basket 1, material basket 1 be configured in from
Preceding pipeline production line receives silicon wafer, the fixed device 2 of material basket, and the fixed device 2 of material basket is configured in fixed material basket 1, expects basket handling device
3, material basket handling device 3, which is configured in, is carried to material basket 1 at the fixed device 2 of material basket, and silicon wafer goes out basket device 4, and silicon wafer goes out basket dress
It sets 4 to be configured in silicon wafer from expecting to separate in basket 1, silicon chip storage device 5, silicon chip storage device 5 is configured in storage silicon wafer, silicon
Piece handling device 6, the reception silicon wafer of silicon wafer handling device 6 go out the silicon wafer that basket device 4 is isolated and silicon wafer are moved in silicon wafer storage dress
Set 5.
By expecting the setting of basket handling device 3 and silicon wafer handling device 6, the carrying movement of material basket 1 and silicon wafer is realized, is kept away
Exempt from the carrying manually to material basket 1 and silicon wafer, while basket device 4 is gone out by silicon wafer and separates silicon wafer from material basket 1, avoids people
Work carries out separation acquisition to silicon wafer, so as to avoid manual operation, ensure that the stability of silicon wafer discharging, improves silicon wafer discharging
Working efficiency.
As shown in Fig. 1 and Figure 10, material basket 1 includes at least four limited posts 12 and at least two block baffles 11, and limited post 12 is pacified
Between baffle 11, limited post 12 is equipped with multiple grooves to match with single silicon wafer thickness, in individually material basket 1, limit
Position column 12 is four, wherein two limited posts 12 are guide and limit column 12, remaining two limited posts 12 are to hold limited post 12.
By the design of limited post 12, so that position of the silicon wafer in material basket 1 is fixed, consequently facilitating silicon wafer carries dress
Set the acquisition of 6 pairs of silicon wafers.
As shown in figure 11, the fixed device 2 of material basket includes fast pulley 21 and fast pulley power device 22, and fast pulley 21 is mounted on
The motion end of fast pulley power device 22.
Fast pulley 21 is driven to compress material basket 1 by fast pulley power device 22, so as to determine the position of material basket 1, into
And convenient for determining the shift position of silicon wafer handling device 6, the stability of silicon wafer wafer-handling device is considerably increased, in the present embodiment
In, fast pulley power device is telescopic cylinder.
As shown in Fig. 3, Fig. 4 and Fig. 5, material basket handling device 3 includes that material basket carries clamping jaw 31 and material basket clamping jaw power device
32, material basket clamping jaw power device 32 drives material basket to carry 31 3 axis of clamping jaw and moves back and forth, and in the present embodiment, expects basket clamping jaw power
Device 32 is three axis mobile platforms, expects that basket carries the telescopic cylinder for also having drive clamping jaw to carry out opening and closing movement on clamping jaw 31 certainly.
The position that the clamping of clamping jaw 31 and mobile material basket 1 are carried by material basket realizes material basket 1 from preceding working procedure and is transported to material
Basket fixes device 2, thus increases the compatibility of silicon wafer wafer-handling device Yu preceding road station.
As shown in Fig. 3, Fig. 7, Fig. 8 and Fig. 9, it includes that silicon wafer goes out basket head 42 and silicon wafer is driven to go out basket head that silicon wafer, which goes out basket device 4,
The silicon wafer of 42 movements goes out basket power device 41, and silicon wafer goes out basket power device 41 and silicon wafer is driven to go out the reciprocating motion of 42 3 axis of basket head, silicon
Piece goes out basket head 42 and is equipped with multiple matched grooves of position institute with silicon wafer in material basket 1, and in the present embodiment, silicon wafer goes out basket power dress
41 are set as the combination settings of lifting cylinder and traversing servo motor group, the type selecting for going out basket power device 41 to silicon wafer here is not subject to
It limits.
The setting for going out basket device 4 by silicon wafer isolates silicon wafer from material basket 1, consequently facilitating silicon wafer is carried
Silicon wafer in 6 pairs of material baskets 1 of device obtains, and the setting of basket power device 41 is gone out by silicon wafer, silicon wafer is realized and goes out 42 pairs of basket head material
The silicon wafer at each position of basket 1 can be separated, and the stability of silicon wafer wafer-handling device is considerably increased.
The setting for going out the groove on basket head 42 by silicon wafer enables silicon wafer to be embedded in silicon wafer when basket out and goes out basket
In groove on first 42, hereby it is ensured that the stability of silicon wafer of silicon wafer during basket out.
As shown in Figure 3 and Figure 6, silicon wafer handling device 6 includes silicon wafer clamping plate 61 and silicon wafer clamping plate 61 is driven to act
Clamping plate power device 62, in the present embodiment, clamping plate power device 62 are set as two telescopic cylinders, and telescopic cylinder drives
Two silicon wafer clamping plates 61 do clamping movement, and silicon wafer clamping plate 61 is equipped with the groove matched with silicon wafer.
By the setting of the groove on silicon wafer clamping plate 61, silicon wafer is enabled to be embedded in wafer chuck when being stepped up
In groove on tight plate 61, and then the stability for the silicon wafer being clamped in clamping plate can be stablized.
As shown in Figure 2, Figure 3 and Figure 4, silicon chip storage device 5 includes magazine 51 and the lift-sliding for driving the movement of magazine 51
Power device 52, in the present embodiment, lift-sliding power device 52 are the cooperation assembly of servo motor and lead screw, here to liter
The type selecting for dropping traversing power device 52 is not limited.
Magazine is driven to carry out lift-sliding movement by lift-sliding power device, to realize silicon chip storage device energy
It enough follows silicon wafer handling device to be acted, and then has saved the unloading piece speed of silicon wafer wafer-handling device, finally improve silicon wafer and unload
Expect the working efficiency of device.
Unless otherwise defined, the technical term or scientific term used herein should be in fields of the present invention and has
The ordinary meaning that the personage of general technical ability is understood.Used in present patent application specification and claims " the
One ", " second " and similar word do not represent any sequence, quantity or importance, and are used only to distinguish different groups
At part.It equally " connects " word that either " connected " etc. is similar and is not limited to physics or mechanical connection, but can
It is either direct or indirect to include electrical connection." one end ", " other end " only indicate opposite positional relationship,
After the absolute positional relation for the object being described changes, then this thinks that corresponding positional relationship also changes accordingly.In addition in text
The "at least one" said include one, two or more.
Those skilled in the art will readily occur to of the invention its after considering specification and the invention invented here of practice
Its embodiment.This application is intended to cover any variations, uses, or adaptations of the invention, these modifications, purposes or
Person's adaptive change follows general principle of the invention and including common knowledge in the art of the invention or usual
Technological means.The description and examples are only to be considered as illustrative, and true scope and spirit of the invention are pointed out by claim.
It should be understood that the present invention is not limited to the precise structure already described above and shown in the accompanying drawings, and
And various modifications and changes may be made without departing from the scope thereof.The scope of the present invention is limited only by the attached claims.
Claims (9)
1. a kind of silicon wafer wafer-handling device, which is characterized in that including
Expect that basket, the material basket are configured in from preceding pipeline production line and receive silicon wafer,
Expect that the fixed device of basket, the fixed device of the material basket are configured in the fixed material basket,
Expect basket handling device, the material basket handling device, which is configured in, is carried to material basket at the fixed device of the material basket,
Silicon wafer goes out basket device, and the silicon wafer goes out basket device and is configured in separates silicon wafer from the material basket,
Silicon chip storage device, the silicon chip storage device are configured in storage silicon wafer,
Silicon wafer handling device, the silicon wafer handling device receive the silicon wafer and go out silicon wafer that basket device is isolated and by the silicon wafer
Move in the silicon chip storage device.
2. silicon wafer wafer-handling device according to claim 1, which is characterized in that the material basket include at least four limited posts and
At least two block baffles, the limited post are mounted between the baffle, and the limited post is equipped with multiple and single silicon wafer thickness
The groove to match.
3. silicon wafer wafer-handling device according to claim 2, which is characterized in that the limited post is four, wherein two limits
Position column is guide and limit column, and remaining two limited posts are to hold limited post.
4. silicon wafer wafer-handling device according to claim 1, which is characterized in that the fixed device of the material basket include fast pulley with
Fast pulley power device, the fast pulley are mounted on the motion end of the fast pulley power device.
5. silicon wafer wafer-handling device according to claim 1, which is characterized in that the material basket handling device includes that material basket is carried
Clamping jaw and material basket clamping jaw power device, the material basket clamping jaw power device drive the material basket to carry three axis of clamping jaw and move back and forth.
6. silicon wafer wafer-handling device according to claim 1, which is characterized in that it includes that silicon wafer goes out basket that the silicon wafer, which goes out basket device,
Head and the silicon wafer for driving the silicon wafer to go out the movement of basket head go out basket power device, and the silicon wafer goes out basket power device and silicon wafer is driven to go out basket
First three axis moves back and forth.
7. silicon wafer wafer-handling device according to claim 6, which is characterized in that the silicon wafer go out basket head be equipped with it is multiple with it is described
Expect the matched groove of position institute of silicon wafer in basket.
8. according to right want 1 described in silicon wafer wafer-handling device, which is characterized in that the silicon wafer handling device includes silicon wafer clamping plate
The clamping plate power device acted with the drive silicon wafer clamping plate, the silicon wafer clamping plate are recessed equipped with matching with silicon wafer
Slot.
9. silicon wafer wafer-handling device according to claim 1, which is characterized in that the silicon chip storage device includes magazine and band
Move the lift-sliding power device of the magazine movement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811446123.2A CN109292452A (en) | 2018-11-29 | 2018-11-29 | Silicon wafer wafer-handling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811446123.2A CN109292452A (en) | 2018-11-29 | 2018-11-29 | Silicon wafer wafer-handling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109292452A true CN109292452A (en) | 2019-02-01 |
Family
ID=65142029
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811446123.2A Pending CN109292452A (en) | 2018-11-29 | 2018-11-29 | Silicon wafer wafer-handling device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109292452A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110850830A (en) * | 2019-11-20 | 2020-02-28 | 常州捷佳创精密机械有限公司 | Slot type equipment for automatic process treatment and formula scheduling method thereof |
| CN111206237A (en) * | 2020-02-19 | 2020-05-29 | 无锡市江松科技有限公司 | ALD silicon chip loading and unloading device |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201699001U (en) * | 2010-06-30 | 2011-01-05 | 英利能源（中国）有限公司 | Silicon wafer basket conveying line |
| CN203325863U (en) * | 2013-05-20 | 2013-12-04 | 嘉兴博科精密机械有限公司 | Silicon chip bearing box |
| JP3189816U (en) * | 2014-01-20 | 2014-04-03 | ウー，チャン−リンＷＵ， Ｃｈａｎ−Ｌｉｎ | Drawer basket frame |
| CN205471575U (en) * | 2016-02-03 | 2016-08-17 | 广州东智自动化设计有限公司 | Automatic mark system of beating of timber |
| CN107887314A (en) * | 2017-11-07 | 2018-04-06 | 河北晶龙阳光设备有限公司 | A kind of silicon chip transhipment loading attachment and the silicon chip transhipment stowage based on it |
| CN107993970A (en) * | 2017-12-29 | 2018-05-04 | 无锡市江松科技有限公司 | Silicon chip transport system |
| CN209242135U (en) * | 2018-11-29 | 2019-08-13 | 无锡市江松科技有限公司 | Silicon wafer wafer-handling device |
-
2018
- 2018-11-29 CN CN201811446123.2A patent/CN109292452A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201699001U (en) * | 2010-06-30 | 2011-01-05 | 英利能源（中国）有限公司 | Silicon wafer basket conveying line |
| CN203325863U (en) * | 2013-05-20 | 2013-12-04 | 嘉兴博科精密机械有限公司 | Silicon chip bearing box |
| JP3189816U (en) * | 2014-01-20 | 2014-04-03 | ウー，チャン−リンＷＵ， Ｃｈａｎ−Ｌｉｎ | Drawer basket frame |
| CN205471575U (en) * | 2016-02-03 | 2016-08-17 | 广州东智自动化设计有限公司 | Automatic mark system of beating of timber |
| CN107887314A (en) * | 2017-11-07 | 2018-04-06 | 河北晶龙阳光设备有限公司 | A kind of silicon chip transhipment loading attachment and the silicon chip transhipment stowage based on it |
| CN107993970A (en) * | 2017-12-29 | 2018-05-04 | 无锡市江松科技有限公司 | Silicon chip transport system |
| CN209242135U (en) * | 2018-11-29 | 2019-08-13 | 无锡市江松科技有限公司 | Silicon wafer wafer-handling device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110850830A (en) * | 2019-11-20 | 2020-02-28 | 常州捷佳创精密机械有限公司 | Slot type equipment for automatic process treatment and formula scheduling method thereof |
| CN110850830B (en) * | 2019-11-20 | 2023-03-14 | 常州捷佳创精密机械有限公司 | Slot type equipment for automatic process treatment and formula scheduling method thereof |
| CN111206237A (en) * | 2020-02-19 | 2020-05-29 | 无锡市江松科技有限公司 | ALD silicon chip loading and unloading device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105762094B (en) | The device and its clamp method of crystal round fringes are clamped when a kind of automatic cleaning wafer | |
| CN109292452A (en) | Silicon wafer wafer-handling device | |
| CN208234120U (en) | Cylinder body handling gripper | |
| CN107553289B (en) | Automatic production line for guide plate surface treatment | |
| CN209242135U (en) | Silicon wafer wafer-handling device | |
| CN107617861A (en) | Automatic assembling device | |
| CN212553899U (en) | Integrated robot paw transmission mechanism | |
| CN202957281U (en) | LED chip support clipping device used for LED die bonder | |
| CN108565245B (en) | Combined manipulator for transferring silicon wafers | |
| CN106736740B (en) | Squeeze carrier | |
| CN214494868U (en) | Bung, bucket hoop and bolt material loading tongs | |
| CN108247306B (en) | Automatic feeding and assembling mechanism for triangular spring plates of automatic production line of stepping motor | |
| CN109352332A (en) | Trunk draw bar kludge | |
| CN109422100A (en) | Work-piece picking device | |
| CN109015611A (en) | A kind of automatic loading and unloading manipulator | |
| CN212100931U (en) | Variable-pitch taking device | |
| CN111331365B (en) | Tightening device, processing and discharging integrated mechanism | |
| CN210504668U (en) | Wafer feeding mechanism | |
| TWI732117B (en) | Automation of stator catching clamper and stator catching method | |
| CN209999222U (en) | variable-spacing clamp device and robot arm | |
| CN214771463U (en) | Workpiece clamping and positioning mechanism | |
| CN108942142A (en) | A kind of installation equipment separating lamp bar | |
| CN112978374B (en) | Material taking and placing device for material barrel | |
| CN203817754U (en) | Workpiece slewing mechanism for valve assembling machine | |
| CN109895230A (en) | Self centering pottery art repaired biscuit folder |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information |
Address after: No.208 Changjiang East Road, Shuofang, Xinwu District, Wuxi City, Jiangsu Province, 214000 Applicant after: Wuxi Jiangsong Technology Co.,Ltd. Address before: 214028 plot c20-2, phase V, Shuofang industrial concentration zone, New District, Wuxi City, Jiangsu Province Applicant before: WUXI JIANGSONG SCIENCE AND TECHNOLOGY Co.,Ltd. |
|
| CB02 | Change of applicant information |