CN109273607A - A method of flexible large area perovskite solar cell module is prepared using femtosecond laser - Google Patents

A method of flexible large area perovskite solar cell module is prepared using femtosecond laser Download PDF

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Publication number
CN109273607A
CN109273607A CN201811308080.1A CN201811308080A CN109273607A CN 109273607 A CN109273607 A CN 109273607A CN 201811308080 A CN201811308080 A CN 201811308080A CN 109273607 A CN109273607 A CN 109273607A
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layer
femtosecond laser
transparency conducting
functional layer
large area
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程兵
程一兵
李天慧
黄福志
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Wuhan University of Technology WUT
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Wuhan University of Technology WUT
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K30/00Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K39/00Integrated devices, or assemblies of multiple devices, comprising at least one organic radiation-sensitive element covered by group H10K30/00
    • H10K39/10Organic photovoltaic [PV] modules; Arrays of single organic PV cells
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/80Manufacture or treatment specially adapted for the organic devices covered by this subclass using temporary substrates
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/549Organic PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Abstract

The invention belongs to perovskite area of solar cell, and in particular to a method of flexible large area perovskite solar cell module is prepared using femtosecond laser.The described method includes: peeling off the transparency conducting layer (P1) on tangent line using femtosecond laser;It is sequentially depositing functional layer on clean transparency conducting layer, peel off the functional layer on tangent line using femtosecond laser and does not damage transparency conducting layer (P2);The deposit metal electrodes in clean functional layer peel off metal electrode layer and functional layer on tangent line using femtosecond laser, and do not damage transparency conducting layer (P3), and the position P1, P2 and P3 is mutually staggered;After the completion of tangent line, the flexible large area perovskite solar battery of cascaded structure is prepared.Large area flexible perovskite solar battery can be divided into baby battery item by the cutting of femtosecond laser low temperature by the present invention, and is together in series, and guarantee its energy conversion efficiency, to realize that the production of large area flexible perovskite solar battery provides possibility.

Description

It is a kind of to prepare flexible large area perovskite solar cell module using femtosecond laser Method
Technical field
The invention belongs to perovskite area of solar cell, and in particular to a kind of to prepare flexible large area using femtosecond laser The method of perovskite solar cell module.
Background technique
With the rapid development of science and technology and the continuous growth of human demand, smaller, lighter, thinner energy storage device is developed It is particularly important.The research and development of flexible battery have become one of research hotspot at this stage, also comply with the following wearable device Research direction.Flexible battery refers to the battery for replacing traditional rigid substrates to prepare using flexible base board, flexible battery energy It is enough preferably to bear the deformation such as bending, distortion, stretching, and the performance of battery itself is influenced smaller.In the exploitation of novel device In the process, battery can research and develop equipment as one of those important original part, size, shape and flexibility and be limited. By taking silicon solar cell as an example, solar battery of conventional rigid substrate weight itself is larger, inconvenient to carry, applicable scene Also more single.And flexible battery then has the advantages that rollable folding, lightweight, transparent, large area is distributed, can satisfy can Bending can plant, the demand of wearable electronic product.
Silicon solar cell is the main product of field of photovoltaic power generation at this stage, but its that there are still costs is excessively high, production energy Consume excessive disadvantage.And perovskite solar battery is converted due to its energy and is imitated as a kind of novel solar cell material The advantages that rate is high, raw material cost is low, simple production process, receives attracting attention for the world.Further, since perovskite solar-electricity Pond can be prepared by solwution method at room temperature, it is possible to be combined with roll-to-roll technology, be realized the flexible perovskite sun Energy battery large area printing preparation, substantially reduces production cost, and a wide range of popularization and application of solar battery can be made to become now It is real.
At this stage, the preparation of large area perovskite solar cell module is mainly realized by the method for laser scoring , laser is mostly using pulse width wider nanosecond or picosecond laser.Due to the pulse of nanosecond laser and picosecond laser Wider width, the pulse duration is longer, and when processing to material, thermal process will play main function.Therefore, it may appear that The phenomenon that transfer conversion and thermal diffusion of energy, the material in non-processing region is caused to damage, influences the contact between electrode Resistance.Further, since fuel factor and the material that melts often is attached to tangential boundary solidifies again, cause tangential boundary to be formed Burr can impact machining accuracy, reduce the overall performance of battery.
Summary of the invention
The present invention is in view of the deficiencies of the prior art, and it is an object of the present invention to provide a kind of prepare flexible large area calcium using femtosecond laser The method of titanium ore solar cell module, by the non-linear absorption properties using femtosecond laser, to flexible perovskite solar energy The different material layer of battery component is stripped, and realizes the large area production of perovskite solar battery.
For achieving the above object, the technical solution adopted by the present invention are as follows:
A method of flexible large area perovskite solar cell module being prepared using femtosecond laser, including is walked as follows It is rapid:
(1) transparency conducting layer on tangent line is peeled off in the base lining out containing transparency conducting layer using femtosecond laser;
(2) cleaning base plate, is sequentially depositing functional layer on clean transparency conducting layer, and the functional layer is from the bottom up successively It is electron transfer layer, perovskite light-absorption layer and hole transmission layer;Then it is crossed on a functional using femtosecond laser, peels off tangent line On functional layer and do not damage transparency conducting layer, on the position crossed in the functional layer and step (1) described transparency conducting layer The position of scribing line needs to be staggered;
(3) cleaning base plate, the deposit metal electrodes in clean functional layer, then using femtosecond laser in metal electrode layer It crosses in functional layer, peels off the metal electrode layer and functional layer on tangent line, and do not damage transparency conducting layer, the metal electrode The position crossed and step (1) on layer and functional layer) cross on the transparency conducting layer position, step (2) described functional layer The position of upper scribing line is both needed to be staggered;After the completion of tangent line, that is, the flexible large area perovskite solar energy of cascaded structure is prepared Battery.
In above scheme, step (1) machined parameters crossed over transparent conductive layer using femtosecond laser are as follows: femtosecond Mode, repetition rate are 200k Hz~5M Hz, and laser power is 8~18W, and scan rate of vibrating mirror is on 800~3000mm/s It states in scheme, step (2) machined parameters crossed on a functional using femtosecond laser are as follows: femtosecond mode, repetition rate For 200k Hz~5M Hz, laser power is 9~18W, and scan rate of vibrating mirror is 1000~3000mm/s.
In above scheme, step (3) the processing ginseng crossed on metal electrode layer and functional layer using femtosecond laser Number are as follows: femtosecond mode, repetition rate be 200k Hz~5M Hz, laser power be 8~18W, scan rate of vibrating mirror be 800~ 2000mm/s。
In above scheme, the substrate containing transparency conducting layer includes but is not limited to the SnO of the fluorine containing doping2(FTO) coating Transparent conducting glass substrate, containing tin indium oxide (ITO) coating transparent conducting glass substrate, contain tin indium oxide (ITO) coating Polyethylene terephthalate (PET) electrically conducting transparent plastic base or contain tin indium oxide (ITO) coating poly- naphthalenedicarboxylic acid Glycol ester (PEN) electrically conducting transparent plastic base.
In above scheme, the electron transfer layer includes but is not limited to: titanium dioxide, tin oxide, zinc oxide or Organic Electricity Sub- transmission material etc..
In above scheme, the perovskite light-absorption layer includes but is not limited to: CH3NH3PbI3(MAPbI3)、HC(NH2)2PbI3(FAPbI3)、CsPbI3Deng.
In above scheme, the hole transmission layer includes but is not limited to: spiro-OMeTAD, P3HT, polystyrolsulfon acid Salt (PEDOT:PSS) etc..
In above scheme, the metal electrode includes but is not limited to: golden (Au) electrode, silver (Ag) electrode, copper (Cu) electrode.
Beneficial effects of the present invention are as follows: the method for the invention is for realizing large area flexible perovskite solar battery Production, provide practicable solution;The present invention can be by large area flexible calcium by the cutting of femtosecond laser low temperature Titanium ore solar battery is divided into baby battery item, and is together in series, and guarantees its energy conversion efficiency;This cutting mode it is excellent Point is that femtosecond laser has very high peak power and extremely short laser pulse, and the pulse duration is less than energy generation transfer and turns The time of change is not in thermal diffusion, so will not damage week because of fuel factor to non-processing region heat affecting effect very little Non-processing region is enclosed, can be realized low temperature process, section is neat when processing, non-microcracked and defect.In addition, laser beam can Superfine area of space is focused on, so as to guarantee superfinishing fining-off, invalid is small, can effectively improve perovskite solar energy The geometry effective area of battery, and can realize automation.
Detailed description of the invention
Fig. 1 is the flow chart that femtosecond laser prepares flexible large area perovskite solar cell module, wherein 1- substrate, 2- transparency conducting layer (TCL), 3- electron transfer layer (ETL), 4- perovskite light-absorption layer, 5- hole transmission layer (HTL), 6- metal electricity Pole.
Fig. 2 is the tangent line micrograph that picosecond laser cuts flexible perovskite solar battery transparency conducting layer.
Fig. 3 is the tangent line micrograph that femtosecond laser cuts flexible perovskite solar battery transparency conducting layer.
Fig. 4 is the tangent line micrograph that picosecond laser cuts flexible perovskite solar battery functional layer.
Fig. 5 is the tangent line micrograph that femtosecond laser cuts flexible perovskite solar battery functional layer.
Fig. 6 is the 25cm that in embodiment 1 prepared by femtosecond laser2Flexible perovskite solar battery efficiency figure.
Fig. 7 is the 100cm that in embodiment 2 prepared by femtosecond laser2Flexible perovskite solar battery efficiency figure.
Specific embodiment
For a better understanding of the present invention, below with reference to the embodiment content that the present invention is furture elucidated, but it is of the invention Content is not limited solely to the following examples.
Embodiment 1
As shown in Figure 1, preparing flexible large area perovskite solar cell module method using femtosecond laser, including as follows Step:
(1) by femtosecond laser to 5cm*5cm ITO/PET transparent conductive substrate carry out groove, peeled-off portion region it is saturating Bright conductive layer, machined parameters are as follows: femtosecond mode, repetition rate are 200k Hz, laser power 10W, and scan rate of vibrating mirror is 2000mm/s, etching line width are 0.3mm, and filling spacing is 0.02mm;Substrate is cleaned after the completion of groove;
(2) one layer of tin oxide electron transfer layer is scratched by Slot-die in the substrate cleaned up;
(3) spin coating perovskite and spiro-OMeTAD hole transmission layer on tin oxide electron transfer layer;
(4) functional layer (electron transfer layer, perovskite light-absorption layer and hole transmission layer) is cut by femtosecond laser, But transparency conducting layer is not damaged (P2), position and the P1 of P2 is staggered;Machined parameters are as follows: femtosecond mode, repetition rate are 200k Hz, laser power 11W, scan rate of vibrating mirror 2000mm/s, etching line width are 0.5mm, and filling spacing is 0.02mm;
(5) golden (80nm) electrode layer is deposited in side on a functional;
(6) gold electrode layer and functional layer are cut by femtosecond laser, but transparency conducting layer is not damaged (P3), and the position of P3 is staggered with P2, P1, machined parameters are as follows: femtosecond mode, repetition rate are 200k Hz, and laser power is 10W, scan rate of vibrating mirror 1200mm/s, etching line width are 0.5mm, and filling spacing is 0.02mm;After the completion of tangent line, that is, make It is standby to obtain flexible large area perovskite solar battery.
Battery testing is carried out to the flexible large area perovskite solar battery that the present embodiment is prepared, as a result such as Fig. 6 Shown, as can be seen from Figure 6: the flexible perovskite device efficiency of the 5cm*5cm size of preparation is up to 14%, and open-circuit voltage is 6.493V, short-circuit current density 19.08mA/cm2, fill factor 0.678.
Embodiment 2
As shown in Figure 1, preparing flexible large area perovskite solar cell module method using femtosecond laser, including as follows Step:
(1) groove is carried out to 10cm*10cm ITO/PET transparent conductive substrate by femtosecond laser, peeled-off portion region Transparency conducting layer, machined parameters are as follows: femtosecond mode, repetition rate are 200k Hz, laser power 10W, and scan rate of vibrating mirror is 2000mm/s, etching line width are 0.5mm, and filling spacing is 0.02mm;Substrate is cleaned after the completion of groove;
(2) one layer of tin oxide electron transfer layer is scratched by Slot-die in the substrate cleaned up;
(3) spin coating perovskite and spiro-OMeTAD hole transmission layer on tin oxide electron transfer layer;
(4) functional layer (electron transfer layer, perovskite light-absorption layer and hole transmission layer) is cut by femtosecond laser, But transparency conducting layer is not damaged (P2), position and the P1 of P2 is staggered;Machined parameters are as follows: femtosecond mode, repetition rate are 200k Hz, laser power 11W, scan rate of vibrating mirror 2000mm/s, etching line width are 0.5mm, and filling spacing is 0.02mm;
(5) golden (80nm) electrode layer is deposited in side on a functional;
(6) gold electrode layer and functional layer are cut by femtosecond laser, but transparency conducting layer is not damaged (P3), and the position of P3 is staggered with P2, P1, machined parameters are as follows: femtosecond mode, repetition rate are 200k Hz, and laser power is 10W, scan rate of vibrating mirror 1200mm/s, etching line width are 0.5mm, and filling spacing is 0.02mm;After the completion of tangent line, that is, make It is standby to obtain flexible large area perovskite solar battery.
Battery testing is carried out to the flexible large area perovskite solar battery that the present embodiment is prepared, as a result such as Fig. 7 Shown, as can be seen from Figure 7: the flexible perovskite device efficiency of the 10cm*10cm size of preparation reaches 7.36%, open circuit electricity Pressure is 12.44V, short-circuit current density 14.2mA/cm2, fill factor be 0.416 (device amplification efficiency decline be significantly source Perovskite light-absorption layer is prepared in solution spin coating, rather than laser machines problem).
Compared by Fig. 2 and Fig. 3, it can be seen that when being performed etching to substrate transparency conducting layer, picosecond laser because Longer for the pulse duration, energy is spread, and groove edge is caused burr occur, more coarse.And due to picosecond swash Trimmed book body energy is higher, causes to cause to damage to underlying substrate in cutting process, and groove part substrate occurs by burnt phenomenon. And the groove edge etched in Fig. 3 using femtosecond laser is then more smooth, and groove part does not cause to damage to substrate.
It is compared by Fig. 4 and Fig. 5, it can be seen that when performing etching to battery functi on layer, picosecond laser is due to arteries and veins Rush that the duration is longer, and energy is spread, it is weaker to the selectivity of etachable material therefore also right while etching functional layer Lower layer's transparency conducting layer causes damage, this influences whether the series resistance of battery, to impact to battery overall performance. And then since its pulse duration is extremely short, energy has not occurred dispersive impulse and just has finished on femtosecond laser in Fig. 5, it will not There is thermal diffusion, so will not cause to damage to the material outside machining area, therefore while being completely stripped functional layer simultaneously Underlying substrate is not caused to damage, groove is more smooth.
Obviously, above-described embodiment is only intended to clearly illustrate made example, and is not the limitation to embodiment.It is right For those of ordinary skill in the art, can also make on the basis of the above description it is other it is various forms of variation or It changes.There is no necessity and possibility to exhaust all the enbodiments.And the obvious variation or change therefore amplified It moves within still in the protection scope of the invention.

Claims (9)

1. a kind of method for preparing flexible large area perovskite solar cell module using femtosecond laser, includes the following steps:
(1) transparency conducting layer on tangent line is peeled off in the base lining out containing transparency conducting layer using femtosecond laser;
(2) cleaning base plate, is sequentially depositing functional layer on clean transparency conducting layer, and the functional layer is successively electricity from the bottom up Sub- transport layer, perovskite light-absorption layer and hole transmission layer;Then it is crossed, is peeled off on tangent line on a functional using femtosecond laser Functional layer and transparency conducting layer is not damaged, the position crossed in the functional layer and crossed on step (1) described transparency conducting layer Position need be staggered;
(3) cleaning base plate, the deposit metal electrodes in clean functional layer, then using femtosecond laser in metal electrode layer and function Cross on ergosphere, peel off the metal electrode layer and functional layer on tangent line, and do not damage transparency conducting layer, the metal electrode layer and It the position crossed in functional layer and crosses on the position crossed on step (1) described transparency conducting layer, step (2) described functional layer Position be both needed to be staggered;After the completion of tangent line, that is, the flexible large area perovskite solar battery of cascaded structure is prepared.
2. preparation method according to claim 1, which is characterized in that step (1) is described to be led using femtosecond laser transparent Electricity
The machined parameters crossed on layer are as follows: femtosecond mode, repetition rate are 200k Hz ~ 5M Hz, and laser power is 8 ~ 18W, vibration Scarnning mirror speed is 800 ~ 3000 mm/s.
3. preparation method according to claim 1, which is characterized in that step (2) is described to utilize femtosecond laser in functional layer On
The machined parameters of scribing line are as follows: femtosecond mode, repetition rate are 200k Hz ~ 5M Hz, and laser power is 9 ~ 18 W, and galvanometer is swept Retouching speed is 1000 ~ 3000 mm/s.
4. preparation method according to claim 1, which is characterized in that step (3) is described electric in metal using femtosecond laser Pole
The machined parameters crossed on layer and functional layer are as follows: femtosecond mode, repetition rate are 200k Hz ~ 5M Hz, laser power 8 ~ 18 W, scan rate of vibrating mirror are 800 ~ 2000 mm/s.
5. preparation method according to claim 1, which is characterized in that the substrate containing transparency conducting layer includes but unlimited In
The SnO of the fluorine containing doping2(FTO) transparent conducting glass substrate of coating, the electrically conducting transparent glass containing tin indium oxide (ITO) coating Glass substrate, polyethylene terephthalate (PET) the electrically conducting transparent plastic base or oxygen-containing for containing tin indium oxide (ITO) coating Change polyethylene naphthalate (PEN) electrically conducting transparent plastic base of indium tin (ITO) coating.
6. preparation method according to claim 1, which is characterized in that the electron transfer layer be titanium dioxide, tin oxide,
Zinc oxide or Organic Electron Transport Material.
7. preparation method according to claim 1, which is characterized in that the perovskite light-absorption layer is selected from following a kind of:
CH3NH3PbI3(MAPbI3)、HC(NH2)2PbI3(FAPbI3) and CsPbI3
8. preparation method according to claim 1, which is characterized in that the hole transmission layer be spiro-OMeTAD, P3HT、
Or PEDOT:PSS.
9. preparation method according to claim 1, the metal electrode is gold electrode, silver electrode or copper electrode.
CN201811308080.1A 2018-11-05 2018-11-05 A method of flexible large area perovskite solar cell module is prepared using femtosecond laser Pending CN109273607A (en)

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Cited By (4)

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CN110767810A (en) * 2019-10-28 2020-02-07 大连理工大学 Large-area perovskite solar cell and preparation method thereof
CN112599678A (en) * 2020-12-15 2021-04-02 华能新能源股份有限公司 Metal electrode laser scribing method and perovskite battery prepared based on same
CN112885968A (en) * 2021-01-20 2021-06-01 中国科学院新疆理化技术研究所 Femtosecond laser etching process method of perovskite thin-film solar cell
CN117750849A (en) * 2024-02-20 2024-03-22 西安电子科技大学 Preparation method of large-area flexible perovskite solar cell and cell

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CN117750849A (en) * 2024-02-20 2024-03-22 西安电子科技大学 Preparation method of large-area flexible perovskite solar cell and cell

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Application publication date: 20190125