CN109273539A - 12 main grid cell pieces of one kind and its manufacturing process - Google Patents

12 main grid cell pieces of one kind and its manufacturing process Download PDF

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Publication number
CN109273539A
CN109273539A CN201811262319.6A CN201811262319A CN109273539A CN 109273539 A CN109273539 A CN 109273539A CN 201811262319 A CN201811262319 A CN 201811262319A CN 109273539 A CN109273539 A CN 109273539A
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China
Prior art keywords
line
grid
phosphorus source
main gate
cell piece
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CN201811262319.6A
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Chinese (zh)
Inventor
赵雅
费春燕
赵沁
赵卫东
赵枫
朱广和
李向华
顾为
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JIANGSU ECONESS ENERGY CO Ltd
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JIANGSU ECONESS ENERGY CO Ltd
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Priority to CN201811262319.6A priority Critical patent/CN109273539A/en
Publication of CN109273539A publication Critical patent/CN109273539A/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0224Electrodes
    • H01L31/022408Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Photovoltaic Devices (AREA)

Abstract

The invention discloses a kind of 12 main grid cell pieces, are related to manufacture of solar cells manufacturing technology field.The present invention includes front electrode and rear electrode, and front electrode is equipped with 12 main gate lines being parallel to each other and several thin grid lines;The both ends of main gate line are respectively provided with into bifurcation structure;Two main gate lines of connected battery on piece connect in such a way that dotted line is connected;Point width in the connected mode of dotted line is 0.6mm, and the line width in the connected mode of dotted line is 0.1mm;Segment grid line is also connected in main gate line between adjacent two thin grid line.Invention passes through with 12 main grid cell pieces made by the segment grid line in 12 main gate lines, several thin grid lines, and setting main gate line, the collecting effect of effective strengthening electric current;Simultaneously by increasing segment grid line, avoid since thin grid line is meticulous, network blocking is easy when printing leads to disconnected grid.

Description

12 main grid cell pieces of one kind and its manufacturing process
Technical field
The invention belongs to manufacture of solar cells manufacturing technology field, more particularly to a kind of 12 main grid cell pieces and A kind of 12 main grid cell piece manufacturing process.
Background technique
With the high speed development of photovoltaic industry, efficient differentiated products become the trump of major competition among enterprises.Using efficient Rate, high performance-price ratio photovoltaic module have been increasingly becoming direction and the common recognition of photovoltaic industry development come degree of reduction electricity cost.Sunlight from Cell piece front enters battery, and positive metal electrode can block a part of light, this part is according to luminous energy on the electrode also with regard to nothing Method is transformed into electric energy, from this view, it is intended that grid line is done more thinner better.And the purpose for printing grid line is to conduct electricity Stream, from the angle analysis of resistivity, grid line gets over that detailed rules and regulations conduction cross-sectional area is smaller, and ohmic loss is bigger, but grid line is meticulous is easy Network blocking leads to disconnected grid when being boiled into printing, and disconnected grid situation is even more obvious when EL is tested, and EL degradation ratio is caused to increase.
Summary of the invention
The purpose of the present invention is to provide a kind of 12 main grid cell pieces, by with 12 main gate lines, several thin grid 12 main grid cell pieces made by segment grid line on line, and setting main gate line, the collecting effect of effective strengthening electric current;Together When by increasing segment grid line, avoid since thin grid line is meticulous, network blocking is easy when printing leads to disconnected grid.
In order to solve the above technical problems, the present invention is achieved by the following technical solutions:
The present invention is a kind of 12 main grid cell pieces, including front electrode and rear electrode, the front electrode are equipped with 12 main gate lines being parallel to each other and several thin grid lines;The both ends of the main gate line are respectively provided with into bifurcation structure;
Two main gate line of connected battery on piece connects in such a way that dotted line is connected;In the connected mode of the dotted line Point width be 0.6mm, the line width in the connected mode of the dotted line is 0.1mm;
Segment grid line is also connected in main gate line between the adjacent two thin grid line.
Further, the width of the main gate line is 0.1mm-0.2mm.
Further, the width of the thin grid line is 20-30um.
Further, the wide 5-10um of width of the thinner grid line of segment grid line width.
A kind of manufacturing process of 12 main grid cell piece, successively include making herbs into wool, low pressure diffusion, etching, anti-PID, PECVD, Back electrode printing, positive electrode printing, sintering, testing, sorting, is assembled into component at the printing of back electric field;It is characterized in that,
The low pressure diffusion is spread using two steps, including the diffusion of first time phosphorus source and second of phosphorus source diffusion;
The first time phosphorus source diffusion: the temperature in inside and outside furnace chamber is made to stablize the inside furnace chamber within the scope of 835 ± 0.5 DEG C It is inside passed through big nitrogen, small nitrogen and oxygen, the diffusion of first time phosphorus source is carried out to crystal silicon chip, small nitrogen flow is 1150 ± 50sccm, small Nitrogen flow is 115 ± 5sccm, and oxygen flow is 180 ± 20sccm, and phosphorus source diffusion time first time is 15 ± 1min, inside and outside furnace Intracavitary pressure maintains within the scope of 150 ± 5mbar;
Second of phosphorus source diffusion: the temperature in inside and outside furnace chamber is made to stablize the inside furnace chamber within the scope of 835 ± 0.5 DEG C It is inside passed through big nitrogen, oxygen and the small nitrogen for carrying phosphorus source, second of phosphorus source diffusion is carried out to crystal silicon chip, small nitrogen flow is 1150 ± 50sccm, small nitrogen flow are 180 ± 20sccm, and oxygen flow is 110 ± 10sccm, second phosphorus source diffusion time be 15 ± 1min, the pressure in inside and outside furnace chamber maintain within the scope of 150 ± 5mbar.
Further, the anti-PID includes that the cell piece after the etching is placed in ozone atmosphere to carry out preliminary oxidation, The first silica membrane is formed on the cell piece surface;The cell piece after preliminary oxidation chemical vapor deposition is placed in again to set In standby cavity, under vacuum condition, to contain the gas of nitrogen dioxide as reaction gas in first silica membrane The second silica membrane of upper deposition;The first mixed gas is passed through into the cavity, wherein contain in first mixed gas Having volume ratio is the silane and ammonia of 1:3~6, deposits the first silicon nitride film on second silica membrane;And The second mixed gas is passed through into the cavity, wherein in second mixed gas containing volume ratio be 1:7~9 silane And ammonia, the second silicon nitride film is deposited on first silicon nitride film, obtains anti-PID cell piece.
The invention has the following advantages:
1, the present invention passes through with the segment grid line institute in 12 main gate lines, several thin grid lines, and setting main gate line Manufactured 12 main grid cell piece, the collecting effect of effective strengthening electric current;Simultaneously by increasing segment grid line, avoid due to thin grid Line is meticulous, and network blocking is easy when printing leads to disconnected grid;Ensure that the qualification of EL test, EL qualification rate promote about 1%.
2, the end of main gate line of the invention use bifurcation design, it is ensured that can effective collected current while, increase part Light-receiving area, while solder joint is played when avoiding main grid wire bonding, it is released effectively thermal stress when conducive to welding, it is hidden to have reduced solder joint It splits;Main gate line significantly reduces silver paste consumption in such a way that dotted line is connected simultaneously.
3, oxygen concentration, increase second step spread source stream before the present invention increases on the basis of existing two steps oxygen flow diffusion technique Amount increases surface dopant concentration, and sheet resistance uniformity in lifting tab reduces series resistance, promotes short circuit current and open-circuit voltage, leads to The sheet resistance distribution crossed more evenly combines the sintering condition of optimization, is promoted to obtain higher transfer efficiency.
Certainly, it implements any of the products of the present invention and does not necessarily require achieving all the advantages described above at the same time.
Specific embodiment
A kind of 12 main grid cell pieces, including front electrode and rear electrode, the front electrode are equipped with 12 phases Mutually parallel main gate line and several thin grid lines;The both ends of the main gate line are respectively provided with into bifurcation structure;
Two main gate line of connected battery on piece connects in such a way that dotted line is connected;In the connected mode of the dotted line Point width be 0.6mm, the line width in the connected mode of the dotted line is 0.1mm;
Segment grid line is also connected in main gate line between the adjacent two thin grid line.
Further, the width of the main gate line is 0.1mm-0.2mm.
Further, the width of the thin grid line is 20-30um.
Further, the wide 5-10um of width of the thinner grid line of segment grid line width.
A kind of manufacturing process of 12 main grid cell piece, successively include making herbs into wool, low pressure diffusion, etching, anti-PID, PECVD, Back electrode printing, positive electrode printing, sintering, testing, sorting, is assembled into component at the printing of back electric field;It is characterized in that,
The low pressure diffusion is spread using two steps, including the diffusion of first time phosphorus source and second of phosphorus source diffusion;
The first time phosphorus source diffusion: the temperature in inside and outside furnace chamber is made to stablize the inside furnace chamber within the scope of 835 ± 0.5 DEG C It is inside passed through big nitrogen, small nitrogen and oxygen, the diffusion of first time phosphorus source is carried out to crystal silicon chip, small nitrogen flow is 1150 ± 50sccm, small Nitrogen flow is 115 ± 5sccm, and oxygen flow is 180 ± 20sccm, and phosphorus source diffusion time first time is 15 ± 1min, inside and outside furnace Intracavitary pressure maintains within the scope of 150 ± 5mbar;
Second of phosphorus source diffusion: the temperature in inside and outside furnace chamber is made to stablize the inside furnace chamber within the scope of 835 ± 0.5 DEG C It is inside passed through big nitrogen, oxygen and the small nitrogen for carrying phosphorus source, second of phosphorus source diffusion is carried out to crystal silicon chip, small nitrogen flow is 1150 ± 50sccm, small nitrogen flow are 180 ± 20sccm, and oxygen flow is 110 ± 10sccm, second phosphorus source diffusion time be 15 ± 1min, the pressure in inside and outside furnace chamber maintain within the scope of 150 ± 5mbar.
Further, the anti-PID includes that the cell piece after the etching is placed in ozone atmosphere to carry out preliminary oxidation, The first silica membrane is formed on the cell piece surface;The cell piece after preliminary oxidation chemical vapor deposition is placed in again to set In standby cavity, under vacuum condition, to contain the gas of nitrogen dioxide as reaction gas in first silica membrane The second silica membrane of upper deposition;The first mixed gas is passed through into the cavity, wherein contain in first mixed gas Having volume ratio is the silane and ammonia of 1:3~6, deposits the first silicon nitride film on second silica membrane;And The second mixed gas is passed through into the cavity, wherein in second mixed gas containing volume ratio be 1:7~9 silane And ammonia, the second silicon nitride film is deposited on first silicon nitride film, obtains anti-PID cell piece.
Conclusion: 12 main grid cell piece prepared by the present invention, battery front side unit consumption decline 30%, light-receiving area increase is about 1%, short circuit current, which is promoted, is greater than 50mA transfer efficiency raising 0.1%, and silver paste consumption reduces by 40% or so in production process, and EL is closed Lattice rate promotes about 1%.
In the description of this specification, the description of reference term " one embodiment ", " example ", " specific example " etc. means Particular features, structures, materials, or characteristics described in conjunction with this embodiment or example are contained at least one implementation of the invention In example or example.In the present specification, schematic expression of the above terms may not refer to the same embodiment or example. Moreover, particular features, structures, materials, or characteristics described can be in any one or more of the embodiments or examples to close Suitable mode combines.
Present invention disclosed above preferred embodiment is only intended to help to illustrate the present invention.There is no detailed for preferred embodiment All details are described, are not limited the invention to the specific embodiments described.Obviously, according to the content of this specification, It can make many modifications and variations.These embodiments are chosen and specifically described to this specification, is in order to better explain the present invention Principle and practical application, so that skilled artisan be enable to better understand and utilize the present invention.The present invention is only It is limited by claims and its full scope and equivalent.

Claims (6)

1. a kind of 12 main grid cell pieces, including front electrode and rear electrode, it is characterised in that: the front electrode is equipped with 12 main gate lines being parallel to each other and several thin grid lines;The both ends of the main gate line are respectively provided with into bifurcation structure;
Two main gate line of connected battery on piece connects in such a way that dotted line is connected;Point in the connected mode of the dotted line Width is 0.6mm, and the line width in the connected mode of the dotted line is 0.1mm;
Segment grid line is connected in main gate line between the adjacent two thin grid line.
2. a kind of 12 main grid cell piece according to claim 1, which is characterized in that the width of the main gate line is 0.1mm-0.2mm。
3. a kind of 12 main grid cell piece according to claim 1, which is characterized in that the width of the thin grid line is 20- 30um。
4. a kind of 12 main grid cell piece according to claim 1, which is characterized in that the thinner grid of segment grid line width The wide 5-10um of the width of line.
5. the manufacturing process of the 12 main grid cell piece of one kind as described in claim 1-4 is any one successively includes making herbs into wool, low pressure Diffusion, etching, the printing of anti-PID, PECVD, back electrode, back electric field printing, positive electrode printing, sintering, testing, sorting, assembling are in groups Part;It is characterized in that,
The low pressure diffusion is spread using two steps, including the diffusion of first time phosphorus source and second of phosphorus source diffusion;
The first time phosphorus source diffusion: stablize the temperature in inside and outside furnace chamber within the scope of 835 ± 0.5 DEG C, lead in inside furnace chamber Enter big nitrogen, small nitrogen and oxygen, the diffusion of first time phosphorus source is carried out to crystal silicon chip, small nitrogen flow is 1150 ± 50sccm, small nitrogen stream Amount is 115 ± 5sccm, and oxygen flow is 180 ± 20sccm, and phosphorus source diffusion time first time is 15 ± 1min, in inside and outside furnace chamber Pressure maintain within the scope of 150 ± 5mbar;
Second of phosphorus source diffusion: stablize the temperature in inside and outside furnace chamber within the scope of 835 ± 0.5 DEG C, lead in inside furnace chamber Enter big nitrogen, oxygen and carry phosphorus source small nitrogen, to crystal silicon chip carry out second of phosphorus source diffusion, small nitrogen flow be 1150 ± 50sccm, small nitrogen flow are 180 ± 20sccm, and oxygen flow is 110 ± 10sccm, second phosphorus source diffusion time be 15 ± 1min, the pressure in inside and outside furnace chamber maintain within the scope of 150 ± 5mbar.
6. a kind of manufacturing process of 12 main grid cell piece according to claim 5, which is characterized in that the anti-PID packet It includes for the cell piece after the etching to be placed in ozone atmosphere and carries out preliminary oxidation, form the first dioxy on the cell piece surface SiClx film;The cell piece after preliminary oxidation is placed in the cavity of chemical vapor depsotition equipment again, under vacuum condition, to contain The gas of nitrogen dioxide deposits the second silica membrane on first silica membrane as reaction gas;To described The first mixed gas is passed through in cavity, wherein in first mixed gas containing volume ratio be 1:3~6 silane and ammonia, The first silicon nitride film is deposited on second silica membrane;And the second mixed gas is passed through into the cavity, It wherein, is the silane and ammonia of 1:7~9 containing volume ratio in second mixed gas, on first silicon nitride film The second silicon nitride film is deposited, anti-PID cell piece is obtained.
CN201811262319.6A 2018-10-27 2018-10-27 12 main grid cell pieces of one kind and its manufacturing process Pending CN109273539A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115763583A (en) * 2022-11-21 2023-03-07 宣城海螺建筑光伏科技有限公司 High-efficiency photovoltaic module and manufacturing method thereof

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Publication number Priority date Publication date Assignee Title
CN101552308A (en) * 2009-05-15 2009-10-07 江阴浚鑫科技有限公司 Constant temperature diffusion technology applied on silicon solar cell
JP2013201217A (en) * 2012-03-23 2013-10-03 Mitsubishi Electric Corp Solar cell and manufacturing method thereof
US20160056454A1 (en) * 2008-04-08 2016-02-25 Trojan Battery Company, Llc Flooded lead-acid battery and method of making the same
CN106328723A (en) * 2016-11-04 2017-01-11 东莞南玻光伏科技有限公司 Manufacturing method of anti-PID battery piece and photovoltaic component
CN107910384A (en) * 2017-11-29 2018-04-13 江苏彩虹永能新能源有限公司 A kind of more main grid solar cells
CN207651505U (en) * 2017-12-29 2018-07-24 苏州阿特斯阳光电力科技有限公司 Cell piece and printing screen plate

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160056454A1 (en) * 2008-04-08 2016-02-25 Trojan Battery Company, Llc Flooded lead-acid battery and method of making the same
CN101552308A (en) * 2009-05-15 2009-10-07 江阴浚鑫科技有限公司 Constant temperature diffusion technology applied on silicon solar cell
JP2013201217A (en) * 2012-03-23 2013-10-03 Mitsubishi Electric Corp Solar cell and manufacturing method thereof
CN106328723A (en) * 2016-11-04 2017-01-11 东莞南玻光伏科技有限公司 Manufacturing method of anti-PID battery piece and photovoltaic component
CN107910384A (en) * 2017-11-29 2018-04-13 江苏彩虹永能新能源有限公司 A kind of more main grid solar cells
CN207651505U (en) * 2017-12-29 2018-07-24 苏州阿特斯阳光电力科技有限公司 Cell piece and printing screen plate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115763583A (en) * 2022-11-21 2023-03-07 宣城海螺建筑光伏科技有限公司 High-efficiency photovoltaic module and manufacturing method thereof

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