CN109228300A - A kind of vacuum film sticking apparatus - Google Patents
A kind of vacuum film sticking apparatus Download PDFInfo
- Publication number
- CN109228300A CN109228300A CN201811098817.1A CN201811098817A CN109228300A CN 109228300 A CN109228300 A CN 109228300A CN 201811098817 A CN201811098817 A CN 201811098817A CN 109228300 A CN109228300 A CN 109228300A
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- China
- Prior art keywords
- cavity
- maintaining part
- carrier film
- vacuum
- substrate
- Prior art date
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- 239000000758 substrate Substances 0.000 claims abstract description 108
- 238000012360 testing method Methods 0.000 claims abstract description 59
- 238000001514 detection method Methods 0.000 claims abstract description 20
- 238000001179 sorption measurement Methods 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 15
- 208000002925 dental caries Diseases 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 description 11
- 230000007246 mechanism Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 239000011521 glass Substances 0.000 description 6
- 238000007789 sealing Methods 0.000 description 5
- 238000005086 pumping Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000037303 wrinkles Effects 0.000 description 3
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 239000002360 explosive Substances 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- 239000000741 silica gel Substances 0.000 description 2
- 229910002027 silica gel Inorganic materials 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 238000005303 weighing Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000005341 toughened glass Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C63/00—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor
- B29C63/02—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor using sheet or web-like material
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
A kind of vacuum film sticking apparatus, comprising: vacuum cavity portion；Carrier film maintaining part, carrier film maintaining part are arranged in the second cavity, comprising: the first positioning region for keeping the first holder of carrier film and for positioning carrier film；Substrate maintaining part is arranged in the first cavity, has the second holder and the second positioning region, for positioning the substrate for being maintained at the second holder；Test section, can cover the first test section of carrier film maintaining part and detection range including detection range can cover the second test section of substrate maintaining part；The position of the carrier film maintaining part and/or the substrate maintaining part is adjusted in adjustment section；Driving portion, including the first driving portion that driving carrier film maintaining part and substrate maintaining part are close to each other or are located remotely from each other, and the second driving portion that the first cavity of driving and the second cavity close or open.Vacuum film sticking apparatus of the invention, can be improved the yield of pad pasting.
Description
Technical field
The present invention relates to Filming Technology field more particularly to a kind of vacuum film sticking apparatus.
Background technique
Film sticking apparatus is typically referred to the film adhered device on substrate.For example, at present various substrate articles by
It is widely used in various electronic equipments, if touch screen is widely used in various display equipment, curved surface substrate is extensive
Applied in mobile phone shell.Since these substrates are during use constantly with the finger of people, desk tops, clothes, knapsack etc.
It directly contacts, scratch, breakage is easy to produce, in order to protect the surface of substrate, during manufacture, it is often necessary in substrate
The surface of (substrate) carries out pad pasting.
Although existing film coating process has been realized in automation pad pasting, still, generally there is also generate gas when pad pasting
The inaccurate technical problem of the positioning of bubble or fine wrinkle or diaphragm and substrate is not high so as to cause the yield of pad pasting.
Summary of the invention
The present invention proposes a kind of vacuum film sticking apparatus to improve the yield of pad pasting.
Vacuum cavity portion has the first cavity and the second cavity, the open end of first cavity and second cavity
Open end can be bonded by first seal；Carrier film maintaining part, the carrier film maintaining part are arranged in second cavity,
Include the first holder for keeping carrier film, and the first positioning region for positioning carrier film；Substrate maintaining part, it is described
Substrate maintaining part is arranged in first cavity, comprising: for keeping the second holder of substrate, and for positioning substrate
Second positioning region；Test section can cover the first test section of the carrier film maintaining part including detection range and detection range can
Cover the second test section of the substrate maintaining part；Adjustment section, the position based on carrier film detected by first test section
The position with substrate detected by second test section is set, to the carrier film maintaining part and/or the substrate maintaining part
Position be adjusted；Driving portion, including drive the carrier film maintaining part and the substrate maintaining part close to each other or mutual
The first separate driving portion, and the second driving portion for driving first cavity and second cavity to close or open.
Preferably, first driving portion includes the first power part and the first output connecting with first power part
Portion, first output section are at least partly accommodated in the vacuum cavity portion, and first output section is accommodated in the vacuum chamber
The first mounting portion is provided on one end in portion, the substrate maintaining part is mounted on first mounting portion.
It is further preferred that the outside of the vacuum cavity portion is arranged in first power part, first output section can
It is slidably embedded in the cavity wall of the bottom of first cavity, the bottom of first output section and first cavity
Cavity wall between, be provided with second seal, the other end of first output section is connect with first power part.
Preferably, first driving portion further includes the second power part and the second output connecting with second power part
Portion, second output section are at least partly accommodated in the vacuum cavity portion, and second output section is accommodated in the vacuum chamber
The second mounting portion is provided on one end in portion, the carrier film maintaining part is mounted on second mounting portion.
Preferably, the material of second holder is light transmission material, is provided on second holder from upper part and passes through
Logical groove portion, the lower part of second holder are provided with the first light source portion for assisting the first test section detection, institute
State the top that groove portion is located at the first light source portion.
Preferably, the carrier film maintaining part further includes clamping section at two, and the clamping section is separately positioned on described first
The opposite two sides of holder, everywhere clamping section respectively include the adsorption section of the wherein side of the both sides of adsorbable carrier film,
And the clamping driving portion that the side of driving clamping element, carrier film will be adsorbed on the adsorption section clamps.
Preferably, the lower part of first holder is additionally provided with the first supporting element, the lower part of first supporting element, if
It is equipped with the second light source portion for assisting the second test section detection.
Preferably, the lower part of second cavity is arranged in first cavity, and second driving portion includes driving institute
The first cavity is stated close to or far from the third driving portion of second cavity, the third driving portion includes being arranged described first
The fourth drive part in the outside of the first side of cavity, and the 5th driving portion of the second side of first cavity is set,
First side is parallel with second side.
It is further preferred that second driving portion further includes for driving second cavity overturning, so that described the
The open end of the two cavitys overturning driving portion opposite with the open end of first cavity.
Preferably, the adjustment section includes UVW to bit platform, and the substrate maintaining part is mounted on the UVW to bit platform
On, the UVW contraposition stage+module is on first mounting portion.
Vacuum film sticking apparatus of the invention may when can eliminate pad pasting due to completing pad pasting in vacuum cavity portion
Bubble or fine wrinkle are led to the problem of, and due to being provided with the carrier film maintaining part for being kept and being positioned to carrier film and setting
While being equipped with the substrate maintaining part for being kept and being positioned to substrate, it is additionally provided with test section machine adjustment section, base may be implemented
In test section detection and by adjusting portion complete carrier film and substrate mutual position adjustment to improve pad pasting
Positioning accuracy, therefore, vacuum film sticking apparatus of the invention can be improved the yield of pad pasting.
Detailed description of the invention
Fig. 1 is that there are two a kind of embodiments of the vacuum laminator of vacuum film sticking apparatus of the invention (omitting hood) for tool
The perspective view of preceding apparent direction；
Fig. 2 is the perspective view of the rear apparent direction of the vacuum laminator (omitting hood) of Fig. 1；
Fig. 3 is the perspective view of the overlook direction of vacuum cavity portion；
Fig. 4 is the perspective view for looking up direction of the vacuum cavity portion of Fig. 3；
Fig. 5 is the carrier film maintaining part of Fig. 1 and the perspective view of the second cavity；
Fig. 6 is the part explosive view of Fig. 5 carrier film maintaining part and the second cavity；
Fig. 7 is the substrate maintaining part of Fig. 1 and the perspective view of the first cavity；
Fig. 8 is the substrate maintaining part of Fig. 7 and the part explosive view of the first cavity；
Fig. 9 is the perspective view with the preceding apparent direction of vacuum laminator (including hood) of Fig. 1.
Specific embodiment
Referring to the drawings, it elaborates to the present invention.It should be pointed out that the present invention can be with many different sides
Formula is realized, however it is not limited to embodiment described herein, on the contrary, the purpose of providing these embodiments is the skill in order to make this field
Art personnel are more thorough and comprehensive to content understanding disclosed in this invention.
In addition, the description that principle according to the present invention carries out illustrative embodiment is intended to carry out in conjunction with attached drawing
It reads, a part of entire printed instructions will be considered.In the description of disclosed the embodiment of the present invention, any direction
Or the reference in orientation is intended merely to facilitate explanation, and be not intended to limit the scope of the invention in any way.Relational language is such as
" front ", " back side ", " top ", " lower part ", " side ", " front end ", " rear end ", " front side portion ", " rear lateral portion ", " in
Portion ", " inside ", " outside ", " lower part ", " top ", " horizontal ", " vertical ", " top ", " lower section ", " upward ",
" downward ", " top " and " bottom ") and its derivative (for example, " horizontally ", " down ", " upward " etc.) should be explained
For orientation shown in the drawings described below or under discussion.These relational languages cannot be wanted only for convenience of purposes of discussion
Equipment is asked to be constructed or operated according to particular orientation, unless there are clearly stating.X-axis, Y-axis, Z axis, specified is space right-angle
X-axis, Y-axis on coordinate system, Z axis.Therefore, the present invention should not be definitely limited to can individualism or in other feature group
The exemplary embodiment that some possible non-limiting combinations of feature present in conjunction are illustrated；Protection scope of the present invention
It is defined by the following claims.
As currently imagining, this disclosure describes optimization model or practice model of the invention.The present invention is not intended to
Understood from limitation level, but is provided in conjunction with the accompanying drawings only for the invention example for illustrating to use, to inform this field
Those of ordinary skill's advantages of the present invention and construction.In the various views of attached drawing, identical appended drawing reference refer to it is identical or
Similar component.
Referring to Fig.1, Fig. 2, vacuum laminator, comprising: vacuum film sticking apparatus 100, wherein vacuum film sticking apparatus 100 includes
It two, is arranged side by side, therefore, for ease of description and marks appended drawing reference, it when necessary can be in different vacuum film sticking apparatus 100
It is upper to mark identical component.Wherein, vacuum film sticking apparatus 100 includes: vacuum cavity portion 1, and vacuum cavity portion 1 mainly includes the first cavity
11 and second cavity 12, the open end 11a of the first cavity 11 can be bonded with the open end 12a of the second cavity 12, wherein
On the end face of the open end 11a of one cavity 11, or on the end face of the open end 12a in the second cavity 12, it is close to be equipped with first
It is sealed when sealing 13, the first cavity 11 and the second cavity 12 are bonded by first seal 13.First seal 13 can be rubber
Glue sealing ring.
Carrier film maintaining part 2, carrier film maintaining part 2 is arranged in the second cavity 12, for holding and locate carrier film.
Substrate maintaining part 3 is arranged in the first cavity 11, for holding and locate substrate.
Driving portion 5 includes the first driving that driving carrier film maintaining part 2 and substrate maintaining part 3 are close to each other or are located remotely from each other
Portion 51 carries out pad pasting operation when the first driving portion 51 driving carrier film maintaining part 2 and substrate maintaining part 3 close to each other.
Driving portion 5 further includes the second driving portion 52 for driving the first cavity 11 and the second cavity 12 to close or open, when the
After two driving portions 52 drive the first cavity 11 and the second cavity 12 closure, it can be vacuumized.
Vacuum cavity portion 1, carrier film maintaining part 2, substrate maintaining part 3 are illustrated below.In addition, it is necessary to explanation,
In the present invention, substrate refers to glass material, such as can be the touch screen of glass material, the mobile phone shell etc. of glass material.But
It is explanation all merely for convenience, and substrate is not limited to glass, those skilled in the art can carries out rationally
Supposition, and one of material by metal, PC plate, organic glass, tempered glass etc. as substrate.
Referring to Fig. 3, Fig. 4, vacuum cavity portion 1 is illustrated first, here, vacuum cavity portion 1 can be a complete pumping
Vacuum plant.
As described above, vacuum cavity portion 1 includes the first cavity 11 and the second cavity 12, vacuum cavity portion 1 in the first cavity 11 and
In the cavity wall of second cavity 12, if being provided with several vacuum adapters 14 and dry vacuum plug 15, vacuum adapter 14 is mainly used for pair
Each pneumatic element in vacuum cavity portion 1 ventilate or is used for ventilation when vacuum breaker, and vacuum plug 15 can be aviation plug,
Mainly it is powered with each electrical component in vacuum cavity portion 1.In addition, vacuum cavity portion 1 further includes and vacuumizes portion 6 (referring to figure
1) the pumping through-hole (not shown) being connected to, the pumping through-hole can be preferably provided on the first cavity 11, and in the first chamber
The outside of body 11 is connected with vacuum flange 16, and vacuumizing portion 6 includes exhaust tube 61, one end of exhaust tube 61 and vaccum-pumping equipment
Connection (not shown), the other end can be equipped with flange, and vacuumizes portion 6 and can be driven by cylinder, when needing to vacuumize
When, the flange of cylinder driving exhaust tube is bonded with vacuum flange, is then vacuumized.
Viewing window 17 can also be arranged in the outside of side in vacuum cavity portion 1, in order to which personnel observe the feelings in vacuum cavity portion 1
Condition.
With continued reference to Fig. 3, Fig. 4, the first driving portion 51 includes the first power part 511 and connect with the first power part 511
First output section 512, the first output section 512 are at least partly accommodated in vacuum cavity portion 1, and the first output section 512 is accommodated in vacuum
The first mounting portion 513 is provided on one end in cavity portion 1, substrate maintaining part 3 is mounted on the first mounting portion 513.
First driving portion 51 further includes the second power part 515 and the second output section 516 for connecting with the second power part 515,
Second output section 516 is at least partly accommodated in vacuum cavity portion 1, and the second output section 516 is accommodated on one end in vacuum cavity portion 1
It is provided with the second mounting portion (not shown), the second mounting portion can be designed with reference to the first mounting portion, and carrier film maintaining part 2 is installed
On the second mounting portion (not shown).
It should be noted that in the present embodiment, substrate maintaining part 3, the second mounting portion are equipped on the first mounting portion 513
On carrier film maintaining part 2 is installed, still, in other occasion, can also be installed on the first mounting portion 513, the second mounting portion
Other component can also divide on the first mounting portion 513, the second mounting portion such as in the evacuation process after the fluid injection of lithium battery
Clamping part, the bayonet etc. of clamping lithium battery are not installed.Therefore, vacuum cavity portion 1 can actually be one and general vacuumize
Device.
Preferably, the bottom 11b of the first cavity 11 is arranged in first power part 511 and the first output section 512, similarly,
The bottom 12b of the second cavity 12 is also preferably arranged in second power part 515 and the second output section 516, so that applying when pad pasting
The direction that the direction of power exerts a force when being closed with the first cavity 11 and the second cavity 12 is consistent, prevents vacuum breaker.Herein, bottom is only
Refer to for open end.
When the stroke of the first output section 512 is longer, can also be arranged in the inside cavity wall of the side of the first cavity 11
First guide part 18, for being oriented to substrate maintaining part 3, the preferred linear slide rail of the first guide part 18.
Certainly, the linear slide rail as guiding equally can be set in the inside cavity wall of the side of the second cavity 12.
The first power part 511 and the first output section 512 are described in detail below.
The outside of vacuum cavity portion 1 is arranged in first power part 511, and the first output section 512 is embedded freely slidablely
In the cavity wall of the bottom 11b of one cavity 11, between the cavity wall of the bottom 11b of the first output section 512 and the first cavity 11, it is provided with
Second seal (not shown), as described above, being provided with first on one end that the first output section 512 is accommodated in vacuum cavity portion 1
Mounting portion 513, the first output section 512 are exposed the other end outside vacuum cavity 1, are connect with the first power part 511.
In the present embodiment, the first output section 512 includes several pilot bushing 512a and is embedded respectively in pilot bushing
Several guiding axis 512b in 512a, guiding axis 512b are freely slidable in pilot bushing 512a.Pilot bushing 512a setting
In the cavity wall of the bottom 11b of the first cavity 11, second seal (not shown) can be rubber seal, second seal packet
The second exterior seal ring being arranged between the cavity wall of the bottom 11b of pilot bushing 512a and the first cavity 11 is included, for sealing the
Gap between one cavity 11 and pilot bushing 512a.Second seal further includes that the inner hole of pilot bushing 512a is arranged in and leads
To the second inner seal ring between axis 512b, for sealing the gap between pilot bushing 512a and guiding axis 512b.Pass through this
Sample, realize between the first output section 512 and the first cavity 11 (between pilot bushing and the first cavity 11, pilot bushing and guiding
Between axis) sealing.
In the present embodiment, the lower part of the bottom 11b of the first cavity 11, including the first electricity is arranged in the first power part 511
Machine 511a and the first lead screw transmission mechanism 511b driven by first motor 511a.Wherein, first motor 511a and first
The screw rod of bar transmission mechanism 511b is mounted on the first rack 19, the screw rod of guiding axis 512b and the first lead screw transmission mechanism 511b
Nut is connected by the first connecting plate 514, and under the driving of first motor 511a, via the first lead screw transmission mechanism 511b's
Transmission and in pilot bushing 512a free sliding.The both ends of guiding axis 512b are provided with threaded hole, the threaded hole of one end with
The connection fastening of first connecting plate 514, the threaded hole of the other end is as the first mounting portion 513, for installing substrate maintaining part 3.Cause
This, substrate maintaining part 3 can be by motor driven lead screw transmission mechanism, to realize accurate feeding.
Motor overload in order to prevent, strong test section 517 is also set up on the first connecting plate 514, and power test section 517 includes pressure
Force snesor or weighing sensor, (that is: the motor driven substrate when opening sliding of the guiding axis 512b towards the first cavity 11
When maintaining part 3 is fed towards carrier film maintaining part 2), power test section 517 is abutted to the first rack 19.By setting pressure sensing
The value of device or weighing sensor causes motor to burn out to prevent motor overload, or substrate is caused to be crushed.
Second output section 516 is referred to the design of the first output section 512, to simplify design cycle.But the second power part
515 can preferred cylinder, to save installation space.
As described above, driving portion 5 further includes the second driving for driving the first cavity 11 and the second cavity 12 to close or open
Portion 52 can be vacuumized after the second driving portion 52 drives the first cavity 11 and the second cavity 12 is closed.
In the present embodiment, the lower part of the second cavity 12 is arranged in the first cavity 11, and the second driving portion 52 includes driving along Z axis
The third driving portion 521 of dynamic first cavity 11 lifting, third driving portion 521 drive the first cavity 11 close along Z-direction or
Far from the second cavity 12.Third driving portion 521 includes the 4th driving that the outside of the first side 11c of the first cavity 11 is arranged in
Portion 522, and the 5th driving portion 523 (referring concurrently to Fig. 7) of the second side 11d of the first cavity 11, the first side 11c are set
It is parallel with the second side 11d.The combination of the preferred motor of fourth drive part 522 and lead screw transmission mechanism, to realize accurate feeding, and
And noise is reduced, and since the first power part 511 has been set the bottom 11b in the first cavity 11, fourth drive part 522
First side 11c of the first cavity 11 is set, uniform force when in order to keep the first cavity 11 to be bonded with the second cavity 12,
Therefore 5th driving portion 523, the 5th driving portion are set preferably on the opposite other side (the second side 11d) of the first cavity 11
523 can choose cylinder driving, and cylinder is connect by floating junction with the first cavity 11.Certainly, the 5th driving portion 523 equally may be used
To select motor driven, two motors can be driven by Dual-motors Driving device at this time simultaneously, make 11 uniform force of the first cavity
Ground is bonded with the second cavity 12.
In order to position in the lifting of the first cavity 11, the outside of the side of the first cavity 11 is also provided with second and leads
To portion 111, the second guide part 111 is also, it is preferred that linear slide rail.
In addition, in the present embodiment, referring to the left part of Fig. 2, for the ease of following test sections 4 to carrier film and base
The position of material is detected, when preferably detecting, the open end 12a of the first cavity 11 and the second cavity 12 upward, also, first
The side of the lower part of the second cavity 12 is arranged in cavity 11.Therefore, in closure, in order to realize the first cavity 11 and the second cavity
12 closure, the second driving portion 52 further include Y-axis driving portion 525, and the third side of the first cavity 11 is arranged in Y-axis driving portion 525
The outside (auxiliary reference Fig. 3) of 11e, for driving the first cavity 11 to be transferred to the underface of the second cavity 12.Y-axis driving portion
525 equally can choose the mode of motor driven lead screw transmission mechanism.
The second cavity 12 is opening up when further, due to detection, when fitting, the second cavity 12 it is opening down,
Therefore, the second driving portion 52 further include for drive the second cavity 12 overturning, so that the second cavity 12 open end 12a and first
The open end 11a of cavity 11 opposite overturning driving portion 524.Overturn the preferred motor acceleration and deceleration machine of executive component of driving portion 524
Combination, in overturning driving portion 524, the second cavity 12, be arranged in the bottom of the second cavity 12 the second power part 515, the
Two output sections 516 are mounted on carrier film maintaining part 2 on the second mounting portion (not shown) of the second output section 516 as a whole,
It is supported on bearing block, is connected to motor by rotary shaft, via speed reducer, to realize overturning.
Carrier film maintaining part 2 is illustrated below.
Referring to Fig. 5, Fig. 6, carrier film maintaining part 2 mainly has the first holder 21 and the first positioning region 22, and first keeps
Part 21 is provided with the first retaining surface 211 for keeping carrier film CZM；The Y of the first holder 21 is arranged in first positioning region 22
In axis direction, for positioning the carrier film CZM for being maintained at the first retaining surface 211.
First holder 21 is elastic component, and when realizing that carrier film CZM is bonded with substrate, first as elastic component is kept
Part 21 allows carrier film CZM according to the shape of substrate slightly adaptively, prevents bubble or fine wrinkle.When substrate is curved surface
When substrate, for example bend glass when, the curved surface according to substrate equally can be set and profiling in the first retaining surface 211.Due to pasting
When film, the first holder 21 bears certain pressure simultaneously, and the first holder 21 deforms excessive in order to prevent, the first holder 21
It is preferred that silica gel aluminium.
First positioning region 22 is arranged according to the concrete shape of carrier film CZM, in the present embodiment, due to carrier film CZM
In the two sides of its length direction, there are two location holes for tool, and therefore, the first positioning region 22 is Preferably also provided with logical with the two
The positioning pin 221 of hole cooperation.
In order to further increase the position precision of the first holder 21, can be set in carrier film maintaining part 2 for along X
Axis direction adjusts the first adjustment portion 25 of the position of the first holder 21.In the present embodiment, X-direction is set as carrier film
Width direction, Y direction are the length direction of carrier film, since X-direction permissible accuracy is high, the first adjustment portion 25
It is provided for adjusting the position of the X-direction of the first holder 21.Certainly, X-axis in the present embodiment, is only convenient for demonstrating
Property explanation and be not intended to limit.
In order to more adjust the position precision of the first holder 21 into a ground, differential head pair is can be used in the first adjustment portion 25
First holder 21 is adjusted.In order to distinguish, the differential head of the first adjustment portion 25 is referred to as the first differential head 251.
In an improved embodiment, in order to further increase pad pasting precision when pad pasting, carrier film maintaining part 2 is also wrapped
Clamping section 23 is included, clamping section 23 has at two, and the opposite two sides of the first holder 21 are arranged in along the x axis respectively.Two folders
Tight portion 23 is symmetrical with the widthwise central of the first holder 21.Wherein, each clamping section 23 includes adsorption section 231, clamps and drive
Dynamic portion 233, clamping element 232.
Certainly, in other embodiments, clamping section 23 can also include many places, such as may include everywhere, in addition to along X-axis side
To being arranged in outside the two sides of the first holder 21, the two sides of the first holder 21 can also be set along the y axis.
The adsorption plane 234 of the wherein side of the both sides of X-direction of the adsorption section 231 with adsorbable carrier film CZM, inhales
Attached portion 231 includes the adsorption plate 235 connecting with vacuum generator, and adsorption plate can in a rectangular parallelepiped shape, and the setting of adsorption plane 234 is being inhaled
The top of attached plate 235, adsorption plane 234 include multiple vacuum absorption holes.The main function that adsorption section 231 is arranged is, prevents from pressing from both sides
Since chucking power is uneven or other reason causes carrier film CZM when clamping to deviate when tight carrier film CZM.
The top of adsorption section 231 is arranged in clamping element 232, clamps driving portion 233 and connect with clamping element 232, and can be along Z
Axis direction drives clamping element 232 to clamp carrier film CZM.Clamping driving portion 233 includes that can drive along Z-direction first is slided
The top of adsorption section 231 is arranged in platform cylinder 233a, clamping element 232, and when carrier film CZM feeding, the both sides of X-direction
It to be placed on adsorption plane 234 via the top of adsorption section 231, at this point, clamping element 232 can cause the placement of carrier film CZM
Interference.It is therefore preferred that clamping driving portion 233 can also include the second slider cylinder 233b along X-axis driving, clamping element 232
It is mounted on the first slider cylinder 233a.Before carrier film CMZ feeding, the second slider cylinder 233b is retracted, and clamping element 232 is drawn
Return to the side of the top of adsorption section 231.Space can be saved using slider cylinder, still, is not construed as limiting, in fact,
Slider cylinder can also be changed to motor-driven slide unit mould group.
Similarly, in order to improve clamping section 23 X-direction clamping accuracy, carrier film maintaining part 2 can also include use
In the second adjustment portion 26 for adjusting clamping section 23 along the x axis.In this embodiment, carrier film maintaining part 2 can also be referred to as
Carry film clamp device.Similar with the first adjustment portion 25, the second adjustment portion 26 can be used differential head and adjust to clamping section 23
Section.Specifically, the spring that the second adjustment portion 26 is stretched including slidable first sliding part 261 along the x axis, along the x axis
262, the second differential head 263.The preferred linear slide rail of first sliding part 261, it is of course also possible to select such as linear steering axis, dovetail
Slot etc..Clamping section 23 is mounted on the first sliding part 261, and the first sliding part 261 is fixed on for installing carrier film maintaining part 2
On second rack 27, the preferred tension spring of spring 262, one end is fixed on the second rack 27, and the other end is connect with clamping section 23, and can
Hold clamping section 23.The extended abutting clamping section 23 of second differential head 263, the prolonging direction and spring 262 of the second differential head 263
Retract it is contrary, therefore, when the elongation of the second differential head 263, so that clamping section 23 is overcome the elastic force of tension spring 262 and the
It is slided on one sliding part 261.After the completion of the adjustment of second differential head 263, clamping section 23 is in tension spring 262 and the second differential head 263
Under effect, in the state for stablizing holding.By this method, can in order to adjust clamping section 23 X-direction position, save
The time of debugging can be greatly shortened during device debugging by having gone the cumbersome process of dismounting screw.
Therefore, with the carrier film maintaining part 2 of clamping section 23, film clamp device is actually also referred to as carried, it can be real
Present carrier film CZM keep and positioning after, clamp before, first pass through adsorption section 231 by the side of carrier film CZM it is attached live, therefore,
Carrier film folder can be prevented inclined.
Substrate maintaining part 3 is described in detail below.
Referring to Fig. 7, Fig. 8, as described above, substrate maintaining part 3 is arranged in the first cavity 11, it mainly include the second maintaining part
32 and second positioning region 33.Wherein, the second holder 32 has the second retaining surface 321 for keeping substrate JC, the second positioning
Portion 33 is for positioning the substrate JC for being maintained at second holder 32.
In the present embodiment, since the position of X-direction is more accurate, in order to improve substrate X-direction positioning accurate
Degree, the second positioning region 33 include the positioning protrusion 323 that the both ends of the second holder 32 are arranged in along the x axis.Preferably, this is fixed
Position protrusion 323 and the second holder 32 are directly integrally machined molding, and according to the size contoured design of substrate.In addition, second is fixed
Position portion 33 further includes the activity orientation portion 331 that the both ends of the second holder 32 are arranged in along the y axis, it is preferable that activity orientation
Portion 331 includes positioning cylinder 331a, is equipped with tight lifting pin 331b on positioning cylinder, tight lifting pin it is radial parallel in Y direction.Top
The main function tightly sold is along the y axis, to hold out against from the side of substrate onto the thickness face of substrate, carries out to substrate along Y
While axis direction holds out against, positions, the location conflicts of tight lifting pin and pad pasting when can prevent pad pasting.
After holding, positioning, clamping and the holding of realization substrate JC, the positioning for realizing carrier film CZM, next must also
It must complete the accurate positionin between carrier film CZM and substrate JC.Specifically, in order to improve between carrier film CZM and substrate JC
Positioning accuracy further includes test section 4.
Test section 4 is described in detail below.
In the present embodiment, test section 4 carries out detection of taking pictures by CCD.
Referring to Fig.1, Fig. 2, test section 4 include the first test section 41 and the inspection that detection range can cover carrier film maintaining part 2
The second test section 42 of substrate maintaining part 3 can be covered by surveying range.
Specifically, the first test section 41 includes top, the position for detecting carrier film that carrier film maintaining part 2 is arranged in
First camera 412.The range of taking pictures of first camera 412 can cover carrier film maintaining part 2, cover can be the first phase herein
The visual field of the camera lens of machine 412 itself can cover carrier film maintaining part 2, be also possible to first camera 412 and pass through the first manipulator
The driving of (aftermentioned) and allow its visual field to cover carrier film maintaining part 2, be also possible to first camera 412 include several,
The combination of several first cameras 412 can cover carrier film maintaining part 2.
Referring to Fig. 6, in order to assist first camera 412 to detect, the first test section 41 further includes first light source portion 411, and first
The preferred area source in light source portion 411.In the present embodiment, in order to improve the brightness of carrier film maintaining part 2, first light source portion 411 is excellent
The lower part of the first holder 21 is arranged in selection of land, to improve the bright of carrier film maintaining part 2 from the down light of the first holder 21
Degree.Further, when such as the first holder 21 is silica gel aluminium, in order to further increase the luminous journey in first light source portion 411
First supporting element 24 can be arranged in the lower part of the first holder 21 in degree again, and the material of the first supporting element 24 is light transmission material,
Such as PC plate, and first light source portion 411 is arranged in the lower part of the first supporting element 24, thus dissipating first light source portion 411
The space enlargement of light.In this way, the brightness of carrier film maintaining part 2 can be improved, to improve the detection of the first test section 41
Precision.
Referring to Fig. 2, Fig. 8, similarly, the second test section 42 includes the top of substrate maintaining part 3 being arranged in, for detecting base
The second camera 422 of the position of material.Similarly, the explanation that substrate maintaining part is covered about second camera is referred to the first phase
The description of machine is no longer described in detail at this.In order to assist second camera 422 to detect, the second test section 42 further includes second
Light source portion 421, the preferred area source in second light source portion 421.In the present embodiment, in order to improve the brightness of substrate maintaining part 3, second
The material of holder 32 selects light transmission material, such as PC plate.Second light source portion 421 is preferably provided in the lower part of the second holder 32,
To improve the brightness of substrate maintaining part 3 from the down light of the second holder 32, so that second camera 422 be assisted to detect, improve
The detection accuracy of second test section 42.
Further, in order to by second light source portion 421 can diverging light space enlargement, be arranged on the second holder 32
There is the groove portion 322 penetrated through from top, groove portion 322 penetrates into lower surface, and slot from the second retaining surface 321 of the second holder 32
Portion 322 is located at the top in second light source portion 421.Since groove portion 322 penetrates through the second retaining surface 321 of the second holder 32,
The light source in second light source portion 421 can greatly improve the brightness of substrate maintaining part 3 from groove portion 322 toward external diffusion, thus
The position of the detection accuracy for further increasing the second test section 42, the frame or substrate JC that prevent error detection substrate JC leads to base
There is deviation in positioning between material JC and carrier film CZM.
Referring to Fig. 8, adjustment section 310 is described in detail below.
In the present embodiment, adjustment section 310 includes UVW to bit platform 31, and substrate maintaining part 3 is mounted on UVW to bit platform
On 31, UVW is mounted on the first mounting portion 513 (referring to Fig. 4) bit platform 31.UVW is based on bit platform 31 based on test section
The position of carrier film CZM in carrier film maintaining part 2 detected by first test section 41, and examined based on the second test section 42
The position of the substrate JC in substrate maintaining part 3 measured, and the substrate JC in substrate maintaining part 3 is adjusted, it is held with improving
Mutual precision between film carrier and substrate.
Certainly, UVW also may be mounted on the second mounting portion bit platform, and carrier film maintaining part 2 is mounted on UVW pairs
On bit platform, at this point, UVW to bit platform based on test section based in carrier film maintaining part 2 detected by the first test section 41
Carrier film CZM position, and the position based on the substrate JC in substrate maintaining part 3 detected by the second test section 42, and
Carrying mould CZM in carrier film maintaining part 2 is adjusted.
Certainly, UVW can also include two to bit platform, be separately mounted on the first mounting portion 513, for installing substrate
Maintaining part 3, and be mounted on the second mounting portion, for installing carrying mould maintaining part 2.At this point it is possible to preset a standard
Position, be mounted on the UVW on the first mounting portion 513 to bit platform, testing result and standard based on the second test section 42
Position, and adjust the position of substrate maintaining part 3；The UVW on the second mounting portion is mounted on to bit platform, then is based on the first test section
41 testing result and the position of standard, and adjust the position of carrier film maintaining part 2.
In addition, in some embodiments, such as the occasion of plane pad pasting, UVW may be replaced by X/Y biaxial plane to bit platform
Tool hand.
Including carrier film maintaining part 2, substrate maintaining part 3, the first test section 41, the second test section 42, adjustment section therefore,
310 part, effectively can function as the film-sticking location device of laminator, and independently extract, individually as one
Device, and apply in the pad pasting of different products.
In addition, based on the first test section 41 for the testing result of carrier film maintaining part 2 and the second test section 42 to substrate
Algorithm software, the PLC of the testing result of maintaining part 3, the control unit on vacuum film sticking apparatus, such as CCD detection can work work
With to control UVW to the adjustment of bit platform 31 position, so as to adjust the substrate in substrate maintaining part 3 relative to carrier film holding
Position in portion 2.Control unit exists in each automation equipment, and technical solution of the present invention does not protect control
Method, therefore, here, only the shape and construction of device are described in detail, without the method for control is described in detail.
Referring to Fig.1, Fig. 2, Fig. 9, in addition, in order to improve the efficiency of pad pasting, as the vacuum with vacuum film sticking apparatus 100
Laminator mainly includes two vacuum film sticking apparatus 100.But due to when pad pasting, the first camera of test section 4
412 and second camera 422 do not work, can be by the first camera of the test section 4 of vacuum film sticking apparatus in order to save cost
412 and second camera 422 share.Specifically, two vacuum film sticking apparatus 100 can be arranged side by side, vacuum film sticking apparatus 100
Top, being provided with can be across the first manipulator 43 of two vacuum film sticking apparatus, and the first manipulator 43 is preferably motor-driven
Uniaxial slide unit mould group, wherein first camera 412 and second camera 422 are separately mounted to the uniaxial slide unit mould group of the first manipulator 43
Sliding block on, specifically, on the sliding block of uniaxial slide unit mould group, test section mounting plate 431, test section mounting plate can be set
431 respectively in the top of vacuum film sticking apparatus 100, and both ends extend respectively into the surface of carrier film maintaining part 2 and substrate is protected
Hold the surface in portion 3, and respectively by first camera 412 be installed to test section mounting plate 431 be located at carrier film maintaining part 2 just on
The side of side, is installed to the side that test section mounting plate 431 is located at the surface of substrate maintaining part 3 for second camera 422.
It should be noted that the surface referred herein to, be not necessarily referring to fixed surface, and refer to first camera 412 and
Second camera 422 can be located at surface and the substrate maintaining part of carrier film maintaining part 2 by the driving of the first manipulator 43
3 surface.
When work, the contraposition work of the carrier film and substrate of the vacuum film sticking apparatus 100 at one is completed first, after the completion,
Carry out the work of pad pasting；At the same time, the first manipulator 43 driving test section 4 is transferred to the vacuum film sticking apparatus 100 at another place
Place carries out the detection of the vacuum film sticking apparatus 100 at another place.
Certainly, in the present embodiment, since two vacuum film sticking apparatus 100 are arranged side by side, the first manipulator 43 can
To select single-shaft mechanical arm, in other embodiments, when vacuum film sticking apparatus is not arranged side by side, the first manipulator 43 is same
It is various suitable to can choose such as two axis robots, three axle robert, four axis robots, five axis robots, six-joint robot
Manipulator.
In the vacuum laminator of the present embodiment, carrier film maintaining part 2 is located at the side of station 101, substrate maintaining part 3
It is located remotely from the side of station 101.Therefore, the feeding of carrier film can choose manually in the direct feeding of station, substrate
Feeding can pass through manipulator feeding.Preferably, feeding manipulator 7 is located between two vacuum film sticking apparatus 100, main to use
In the feeding of substrate, specifically, feeding manipulator 7 can be used uniaxial slide unit mould group, on the slide unit of uniaxial slide unit mould group, setting
There is substrate positioning region 71, substrate positioning region 71 can be designed with reference to the second positioning region 33 of substrate maintaining part 3.Preferably, it is used for
Substrate on substrate positioning region 71 is transported to the substrate trucking department 432 of substrate maintaining part 3, can be set in the first manipulator 43
On, the carrying that Pneumatic clamping jaw, vacuum chuck etc. realize substrate can be used in substrate trucking department 432.
In the present embodiment, although carrier film by artificial loading, in fact, carrier film can also it is automatic on
Material is e.g. arranged carrier film positioning region is (not shown) on feeding manipulator 7, also, carrier film positioning region can also be with reference to the
The setting of one positioning region 22, similarly, carrier film trucking department (not shown) can be set on the first manipulator 43, it is preferable to use true
Suction disk is drawn, and realizes the carrying of carrier film.
It is easy to maintain in order to keep the layout of vacuum laminator more reasonable, it is preferable that by the exhaust tube 61 of vacuum cavity portion 1
Pipe is sidled along two the outer of vacuum film sticking apparatus 100, to prevent exhaust tube 61 from influencing the layout of feeding manipulator 7, and is tieed up
Shield is convenient.
Each specific technical characteristic as described in the above specific embodiments in the case of no contradiction can be with
It is combined in any manner, for unnecessary repetition, the present invention is to various combinations of possible ways not otherwise stated.
The above examples are only used to illustrate the technical scheme of the present invention and is not intended to limit it, all without departing from the present invention
Any modification of range or equivalent replacement should all be included in technical solution of the present invention.
Claims (10)
1. a kind of vacuum film sticking apparatus characterized by comprising
Vacuum cavity portion has the first cavity and the second cavity, the opening of the open end of first cavity and second cavity
End can be bonded by first seal；
Carrier film maintaining part, the carrier film maintaining part are arranged in second cavity, comprising: for keeping the of carrier film
One holder, and the first positioning region for positioning carrier film；
Substrate maintaining part, the substrate maintaining part are arranged in first cavity, comprising: for keeping the second of substrate to keep
Part, and the second positioning region for positioning substrate；
Test section, the first test section of the carrier film maintaining part can be covered including detection range and detection range can cover it is described
Second test section of substrate maintaining part；
Adjustment section, detected by position and second test section based on carrier film detected by first test section
The position of the carrier film maintaining part and/or the substrate maintaining part is adjusted in the position of substrate；
Driving portion, first including driving the carrier film maintaining part and the substrate maintaining part close to each other or being located remotely from each other drives
Dynamic portion, and the second driving portion for driving first cavity and second cavity to close or open.
2. a kind of vacuum film sticking apparatus according to claim 1, which is characterized in that first driving portion includes first dynamic
Power portion and the first output section connecting with first power part, first output section are at least partly accommodated in the vacuum chamber
In portion, the first mounting portion is provided on one end that first output section is accommodated in the vacuum cavity portion, the substrate is kept
Portion is mounted on first mounting portion.
3. a kind of vacuum film sticking apparatus according to claim 2, which is characterized in that first power part is arranged described
The outside of vacuum cavity portion, first output section are embedded freely slidablely in the cavity wall of the bottom of first cavity, institute
Between the cavity wall for stating the bottom of the first output section and first cavity, it is provided with second seal, first output section
The other end is connect with first power part.
4. a kind of vacuum film sticking apparatus according to claim 2, which is characterized in that first driving portion further includes second
Power part and the second output section connecting with second power part, second output section are at least partly accommodated in the vacuum
In cavity portion, the second mounting portion, the carrier film are provided on one end that second output section is accommodated in the vacuum cavity portion
Maintaining part is mounted on second mounting portion.
5. a kind of vacuum film sticking apparatus according to claim 1, which is characterized in that the material of second holder is
Finish is provided with the groove portion penetrated through from upper part on second holder, and the lower part of second holder is provided with and is used for
The first light source portion of the first test section detection is assisted, the groove portion is located at the top in the first light source portion.
6. a kind of vacuum film sticking apparatus according to claim 1, which is characterized in that the carrier film maintaining part further includes two
Locate clamping section, the clamping section is separately positioned on the opposite two sides of first holder, and everywhere clamping section respectively includes can
Adsorb the adsorption section of the wherein side of the both sides of carrier film, and driving clamping element, the carrying the adsorption section will be adsorbed on
The clamping driving portion that the side of film clamps.
7. a kind of vacuum film sticking apparatus according to claim 1 or 5, which is characterized in that the lower part of first holder
It is additionally provided with the first supporting element, the lower part of first supporting element is provided with for assisting the second test section detection
Two light source portions.
8. a kind of vacuum film sticking apparatus according to claim 1, which is characterized in that first cavity setting is described the
The lower part of two cavitys, second driving portion include that driving first cavity drives close to or far from the third of second cavity
Dynamic portion, the third driving portion includes the fourth drive part that the outside of the first side of first cavity is arranged in, and setting
The 5th driving portion in the second side of first cavity, first side are parallel with second side.
9. a kind of vacuum film sticking apparatus according to claim 8, which is characterized in that second driving portion further includes being used for
Drive second cavity overturning, so that the overturning opposite with the open end of first cavity of the open end of second cavity
Driving portion.
10. a kind of vacuum film sticking apparatus according to claim 2, which is characterized in that the adjustment section includes that UVW contraposition is flat
Platform, the substrate maintaining part are mounted on the UVW on bit platform, and the UVW contraposition stage+module is in first mounting portion
On.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811098817.1A CN109228300A (en) | 2018-09-19 | 2018-09-19 | A kind of vacuum film sticking apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811098817.1A CN109228300A (en) | 2018-09-19 | 2018-09-19 | A kind of vacuum film sticking apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109228300A true CN109228300A (en) | 2019-01-18 |
Family
ID=65059761
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811098817.1A Pending CN109228300A (en) | 2018-09-19 | 2018-09-19 | A kind of vacuum film sticking apparatus |
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| Country | Link |
|---|---|
| CN (1) | CN109228300A (en) |
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| CN112786497A (en) * | 2021-03-03 | 2021-05-11 | 芯钛科半导体设备(上海)有限公司 | Inverted vacuum wafer film pasting device |
| CN112874118A (en) * | 2020-12-31 | 2021-06-01 | 孝感市九天中创自动化设备有限公司 | V-shaped vacuum laminating device |
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