CN109225943B - Automatic silicon wafer sorting and metering device - Google Patents

Automatic silicon wafer sorting and metering device Download PDF

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Publication number
CN109225943B
CN109225943B CN201811275959.0A CN201811275959A CN109225943B CN 109225943 B CN109225943 B CN 109225943B CN 201811275959 A CN201811275959 A CN 201811275959A CN 109225943 B CN109225943 B CN 109225943B
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Prior art keywords
connecting rod
guide plate
conveyor belt
rod
silicon wafer
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CN201811275959.0A
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CN109225943A (en
Inventor
汪伟华
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Wuxi Oulongyu Automation Technology Co ltd
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Wuxi Oulongyu Automation Technology Co ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/34Sorting according to other particular properties
    • B07C5/342Sorting according to other particular properties according to optical properties, e.g. colour
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/36Sorting apparatus characterised by the means used for distribution
    • B07C5/361Processing or control devices therefor, e.g. escort memory
    • B07C5/362Separating or distributor mechanisms
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06MCOUNTING MECHANISMS; COUNTING OF OBJECTS NOT OTHERWISE PROVIDED FOR
    • G06M7/00Counting of objects carried by a conveyor
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The invention discloses an automatic silicon wafer sorting and metering device which comprises a first conveyor belt, wherein a rotary table is arranged on one side of the first conveyor belt, a rotary shaft is arranged in the middle of the rotary table, a first motor is arranged on one side, far away from the rotary table, of the rotary table, a plurality of placing grooves are formed in the surface of the rotary table, a strip-shaped opening is formed in the middle of the placing grooves and is connected with a pushing device, a second conveyor belt is arranged on one side, far away from the first conveyor belt, of the rotary table, racks are respectively arranged on two sides of the second conveyor belt, a placing box is arranged on the rack on one side of the second conveyor belt, a telescopic device is arranged in the placing box, and an L-shaped rod is arranged above the second conveyor belt. The beneficial effects are that: the counting and collecting of the silicon wafers are greatly realized, the whole process realizes the processes of automatic sorting, counting and collecting, the manual sorting is avoided, the investment of cost is reduced, and the working efficiency is greatly improved.

Description

Automatic silicon wafer sorting and metering device
Technical Field
The invention relates to the field of automatic silicon wafer sorting design, in particular to an automatic silicon wafer sorting and metering device.
Background
The silicon wafer is generally thinner, fragments are easy to occur in the process of slitting, cleaning or conveying, the subsequent application can be carried out after the fragments are inspected, and in the prior art, the silicon wafer possibly containing a large amount of fragments is detected through manual fine inspection, so that very high labor cost is often required, and the detection efficiency is very low.
How to provide an automatic silicon wafer sorting and metering device to solve the problems.
For the problems in the related art, no effective solution has been proposed at present.
Disclosure of Invention
Aiming at the problems in the related art, the invention provides a device for automatically sorting and metering silicon wafers, which aims to overcome the technical problems in the prior art.
The technical scheme of the invention is realized as follows:
The utility model provides a silicon chip automatic sorting metering device, includes first conveyer belt, one side of first conveyer belt is equipped with the carousel, the centre of carousel is equipped with the pivot, the pivot is kept away from one side of carousel is equipped with first motor, the surface of carousel is equipped with a plurality of standing grooves, the centre of standing groove is equipped with the bar opening, the bar opening is connected with thrust unit, the carousel is kept away from one side of first conveyer belt is equipped with the second conveyer belt, the both sides of second conveyer belt are equipped with the frame respectively, be equipped with in the frame of one side of second conveyer belt and place the case, the inside of placing the case is equipped with telescoping device, the top of second conveyer belt is equipped with L type pole, be equipped with first optical fiber sensor and second optical fiber sensor on the L type pole respectively, the frame is kept away from one side of placing the case is equipped with first deflector and second deflector respectively, first deflector and second deflector, the centre of first deflector and second deflector are equipped with the collecting device, first deflector and second deflector are kept away from the first side of collecting device.
Further, thrust unit includes the second motor, the output of second motor is equipped with the arc runner, the center department of arc runner is equipped with the head rod, the head rod is kept away from one side of arc runner is equipped with the second connecting rod, the other end of second connecting rod is connected with the center department of third connecting rod, the one end of third connecting rod is connected with first slider, in first spout was located to first slider, the one end of first slider is equipped with the lug, the lug is connected with V type pole, the centre of V type pole is connected with first support base, V type pole keep away from the one end of lug with arc runner contacts.
Further, telescoping device includes the second spout, the second spout is located place the inside of case, the inside of second spout is equipped with the slide bar, the one end of slide bar runs through place the lateral wall of case and be connected with the push pedal, the centre of slide bar is equipped with the third spout, be equipped with the second slider in the third spout, surface one side of second slider is equipped with the fourth connecting rod, the fourth connecting rod is kept away from one side of second slider is equipped with the second and supports the base, the centre of fourth connecting rod is equipped with the sleeve, one side of sleeve is connected with the fifth connecting rod, the fifth connecting rod is kept away from telescopic one end is connected with the output of third motor.
Further, a damping spring is arranged on the sliding rod between the outer side of the placement box and the push plate.
Further, the collecting device comprises a recovery box, and a third guide plate is arranged between the recovery box and the second conveyor belt.
Further, the top of the recovery box is provided with a fixed block, and one side, far away from the recovery box, of the fixed block is connected with the L-shaped rod.
Further, the third connecting rod is located in the strip-shaped opening.
Further, the first sliding groove is connected with one side edge of the frame.
The invention has the beneficial effects that: the first optical fiber sensor is convenient for detecting damaged silicon wafers, the second optical fiber sensor is arranged below the first optical fiber sensor and is used for detecting the intact silicon wafers, the counting sensor is used for counting the silicon wafers and then sliding into the collecting box through the guide plate, so that the collection of the intact silicon wafers is realized, the counting and the collection of the silicon wafers are realized, the automatic sorting, counting and collecting processes are realized in the whole process, the manual sorting is avoided, the cost investment is reduced, and the working efficiency is greatly improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a top view of an apparatus for automated silicon wafer sorting and metering in accordance with an embodiment of the present invention;
FIG. 2 is a front view of a second conveyor belt in an apparatus for automated silicon wafer sorting and metering according to an embodiment of the present invention;
FIG. 3 is a left side view of an apparatus for automated silicon wafer sorting and metering in accordance with an embodiment of the present invention;
FIG. 4 is a schematic diagram of a pushing device in an apparatus for automatically sorting and metering silicon wafers according to an embodiment of the present invention;
fig. 5 is a schematic structural view of a telescopic device in an apparatus for automatically sorting and metering silicon wafers according to an embodiment of the present invention.
In the figure:
1. A first conveyor belt; 2. a turntable; 3. a rotating shaft; 4. a first motor; 5. a placement groove; 6. a strip-shaped opening; 7. a second conveyor belt; 8. a frame; 9. placing a box; 10. a telescoping device; 11. an L-shaped rod; 12. a first optical fiber sensor; 13. a second optical fiber sensor; 14. a first guide plate; 15. a second guide plate; 16. a counting sensor; 17. a collection box; 18. a second motor; 19. an arc-shaped rotating wheel; 20. a first connecting rod; 21. a second connecting rod; 22. a third connecting rod; 23. a first slider; 24. a first chute; 25. a bump; 26. a V-shaped rod; 27. a first support base; 28. a second chute; 29. a slide bar; 30. a push plate; 31. a third chute; 32. a fourth connecting rod; 33. a sleeve; 34. a fifth connecting rod; 35. a third motor; 36. a second support base; 37. a damping spring; 38. a recovery box; 39. a third guide plate; 40. and a fixed block.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which are derived by a person skilled in the art based on the embodiments of the invention, fall within the scope of protection of the invention.
The invention will be further described with reference to the accompanying drawings and detailed description below:
Referring to fig. 1-5, an apparatus for automatic sorting and metering of silicon wafers according to an embodiment of the present invention includes a first conveyor belt 1, a turntable 2 is disposed on one side of the first conveyor belt 1, a rotating shaft 3 is disposed in the middle of the turntable 2, a first motor 4 is disposed on one side of the rotating shaft 3 away from the turntable 2, a plurality of placing grooves 5 are disposed on the surface of the turntable 2, a strip-shaped opening 6 is disposed in the middle of the placing grooves 5, the strip-shaped opening 6 is connected with a pushing device, a second conveyor belt 7 is disposed on one side of the turntable 2 away from the first conveyor belt 1, racks 8 are disposed on two sides of the second conveyor belt 7, a placing box 9 is disposed on the rack 8 on one side of the second conveyor belt 7, a telescoping device 10 is disposed in the interior of the placing box 9, an L-shaped rod 11 is disposed above the second conveyor belt 7, the L-shaped rod 11 is respectively provided with a first optical fiber sensor 12 and a second optical fiber sensor 13, one side of the rack 8 far away from the placing box 9 is sequentially provided with a first guide plate 14 and a second guide plate 15, the first optical fiber sensor 12 and the second optical fiber sensor 13 are respectively provided with one sides of the first guide plate 14 and the second guide plate 15, the middle parts of the first guide plate 14 and the second guide plate 15 are respectively provided with a counting sensor 16, one sides of the first guide plate 14 and the second guide plate 15 far away from the second conveyor belt 7 are respectively provided with a collecting box 17, one side of the second conveyor belt 7 far away from the turntable 2 is provided with a collecting device, the model of the first optical fiber sensor is (BGQ 3-SR-AC-NA-I), the model of the second optical fiber sensor is (BGQ-SR-AC-NA-I), the counting sensor is of the type (SST 10-NSK-4K/5K/6K).
According to the scheme of the invention, the turntable 2 is arranged between the first conveyor belt 1 and the second conveyor belt 7, so that the silicon wafers are conveniently conveyed from the first conveyor belt 1 to the second conveyor belt 7, meanwhile, after the turntable 2 rotates for half a circle, the silicon wafers are conveniently conveyed to the second conveyor belt 7 by pushing the turntable 2 onto the device, time difference is conveniently generated, the first optical fiber sensor 12 and the second optical fiber sensor 13 detect more accurately in time, the situation that the damaged silicon wafers are mixed into the recovery box 38 is reduced, the first optical fiber sensor 12 is arranged on the second conveyor belt 7, the damaged silicon wafers are conveniently detected, if the first optical fiber sensor 12 detects the silicon wafers, the telescoping device 10 on one side of the first guide plate 14 is started, the second motor 18 is started, the damaged silicon wafers are pushed into the first guide plate 14, the counting sensor 16 on the first guide plate 14 is counted, the silicon wafers are continuously collected by the recovery box 17, if the damage is not detected, the silicon wafers are conveyed onto the second conveyor belt 7, the second optical fiber sensor 12 is arranged on the second guide plate 13, the silicon wafers are well-received by pushing the second guide plate 15, the second guide plate 15 is well-received, the silicon wafers are well-received by the second guide plate 15 is well-received, and the counting device is well-received, the silicon wafers are well-received by the second guide plate 15 is well-received, and the silicon wafers are well-received by the second guide plate 15, and the good silicon wafers are well-received by the second guide plate, and the good-quality is well-received by the second optical sensor device, and the good-quality detector, and the good-quality wafers. After the sorted silicon wafers are respectively sent into different guide plates, the silicon wafers are counted through the counting sensors and then slide into the corresponding collecting boxes 17, counting and collecting of the silicon wafers are achieved greatly, the whole process achieves the processes of automatic sorting, counting and collecting, manual sorting is avoided, cost investment is reduced, and working efficiency is improved greatly.
In a specific application, for the pushing device, the pushing device comprises a second motor 18, an arc-shaped rotating wheel 19 is arranged at the output end of the second motor 18, a first connecting rod 20 is arranged at the center of the arc-shaped rotating wheel 19, a second connecting rod 21 is arranged at one side of the first connecting rod 20 away from the arc-shaped rotating wheel 19, the other end of the second connecting rod 21 is connected with the center of a third connecting rod 22, one end of the third connecting rod 22 is connected with a first sliding block 23, the first sliding block 23 is arranged in a first sliding groove 24, one end of the first sliding block 23 is provided with a convex block 25, the convex block 25 is connected with a V-shaped rod 26, the middle of the V-shaped rod 26 is connected with the first supporting base 27, one end of the V-shaped rod 26 away from the protruding block 25 is contacted with the arc-shaped rotating wheel 19, the arc-shaped rotating wheel 19 is driven to rotate by the start of the second motor 18, the first connecting rod 20 is driven to rotate by the arc-shaped rotating wheel 19, the second connecting rod 21 is driven to move by the first connecting rod 20, the third connecting rod 22 is driven to move by the second connecting rod 21, the first sliding block 23 moves up and down in the first sliding groove 24, one end of the V-shaped rod 26 moves down by the protruding block 25, the other end of the V-shaped rod 26 is driven to lift, waiting for the pushing of the arc-shaped rotating wheel 19 again to enable the other end of the V-shaped rod 26 to rise, so that the silicon wafer is pushed into the second conveyor belt 7 at the strip-shaped opening 6 in a vertical intermittent manner, and a time difference is generated in time, so that the detection of the first optical fiber sensor 12 and the second optical fiber sensor 13 is more accurate; for the telescopic device 10, the telescopic device 10 comprises a second chute 28, the second chute 28 is arranged in the placing box 9, a sliding rod 29 is arranged in the second chute 28, one end of the sliding rod 29 penetrates through the side wall of the placing box 9 to be connected with a push plate 30, a third chute 31 is arranged in the middle of the sliding rod 29, a second sliding block is arranged in the third chute 31, a fourth connecting rod 32 is arranged on one side of the surface of the second sliding block, a second supporting base 36 is arranged on one side of the fourth connecting rod 32 away from the second sliding block, a sleeve 33 is arranged in the middle of the fourth connecting rod 32, one side of the sleeve 33 is connected with a fifth connecting rod 34, one end of the fifth connecting rod 34 far away from the sleeve 33 is connected with the output end of the third motor 35, and by starting the third motor 35, the third motor 35 drives the fourth connecting rod 32 to move left and right, indirectly drives the slide bar 29 to stretch and retract, so that the push plate 30 stretches and contracts back and forth, and silicon wafers are conveniently pushed into the guide plate, and the sorting process is realized; for the placement box 9, a damping spring 37 is arranged on the sliding rod 29 between the outer side of the placement box 9 and the push plate 30, so that the push plate 30 is prevented from being impacted with the outer wall of the placement box 9, the damping effect is achieved, and the use safety of the push plate 30 is protected; for the collecting device, the collecting device comprises a recovery box 38, and a third guide plate 39 is arranged between the recovery box 38 and the second conveyor belt 7, so that waste chips generated in production except for intact silicon chips and damaged silicon chips can enter the collecting device along with the second conveyor belt 7, and the cleanliness of the production environment is improved; for the recovery box 38, a fixed block 40 is arranged at the top of the recovery box 38, and one side, away from the recovery box 38, of the fixed block 40 is connected with the L-shaped rod 11 to support the L-shaped rod 11; for the third connecting rod 22, the third connecting rod 22 is located in the strip-shaped opening 6, so that the silicon wafer in the placing groove 5 is conveniently pushed onto the second conveyor belt 7. For the first chute 24, the first chute 24 is connected to a side of the frame 8, so as to avoid the suspended placement of the first chute 24.
In summary, by means of the above technical solution of the present invention, by arranging the turntable 2 between the first conveyor belt 1 and the second conveyor belt 7, it is convenient to transfer the silicon wafer from the first conveyor belt 1 to the second conveyor belt 7, and at the same time, by pushing the turntable 2 onto the second conveyor belt 7 after rotating for half a turn, it is convenient to generate a time difference in time, so that the first optical fiber sensor 12 and the second optical fiber sensor 13 detect more accurately, reduce the mixing of damaged silicon wafer into the recovery box 38, and the first optical fiber sensor 12 is arranged on the second conveyor belt 7, so that the damaged silicon wafer is conveniently detected, if the first optical fiber sensor 12 detects that the silicon wafer is damaged, the telescoping device 10 on one side of the first guide plate 14 is started, starting the second motor 18 to push the damaged silicon wafer into the first guide plate 14, counting by the counting sensor 16 on the first guide plate 14, and entering the collecting box 17 from the first guide plate 14, so as to collect the damaged silicon wafer, if the silicon wafer does not detect the damage, continuing to convey the silicon wafer on the second conveying belt 7, conveying the silicon wafer below the second optical fiber sensor 13 to detect the good silicon wafer, if the silicon wafer is good, starting the telescopic device 10 on one side of the second guide plate 15, pushing the good silicon wafer into the second guide plate 15 by the pushing plate 30, counting by the counting sensor 16 on the second guide plate 15, the second guide plate 15 slides into the collecting box 17 to collect the perfect silicon chips, and besides the perfect silicon chips and the damaged silicon chips, waste chips generated in production can enter the collecting device along with the second conveying belt 7, so that the automatic sorting of the silicon chips is greatly realized, the sorted silicon chips are respectively sent into different guide plates and then counted by the counting sensor and then slide into the corresponding collecting box 17, the counting and collecting of the silicon chips are greatly realized, the automatic sorting, counting and collecting processes are realized in the whole process, the manual sorting is avoided, the cost input is reduced, and the working efficiency is greatly improved; the second motor 18 is started to drive the arc-shaped rotating wheel 19 to rotate, the arc-shaped rotating wheel 19 drives the first connecting rod 20 to rotate, the first connecting rod 20 drives the second connecting rod 21 to move, the second connecting rod 21 drives the third connecting rod 22 to move up and down, the first sliding block 23 moves up and down in the first sliding groove 24, the first sliding block 23 pushes the protruding block 25 to enable one end of the V-shaped rod 26 to move down, the other end of the V-shaped rod 26 drives to lift up, the arc-shaped rotating wheel 19 is waited to push again, the other end of the V-shaped rod 26 is lifted up, accordingly, the up-down discontinuity of the third connecting rod 22 is driven to push the silicon chip into the second conveyor belt 7 at the strip-shaped opening 6, a time difference is generated in time, so that the first optical fiber sensor 12 and the second optical fiber sensor 13 detect more accurately; by starting the third motor 35, the third motor 35 drives the fourth connecting rod 32 to move left and right, indirectly drives the sliding rod 29 to stretch and retract, so that the push plate 30 stretches and contracts back and forth, and silicon wafers are conveniently pushed into the guide plates, and the sorting process is realized; the damping spring 37 prevents the push plate 30 from colliding with the outer wall of the placement box 9, plays a role in damping and protects the use safety of the push plate 30; the waste chips generated in the production process can enter the collecting device along with the second conveyor belt 7 except for the intact silicon chips and the damaged silicon chips, so that the cleanliness of the production environment is improved.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the invention.

Claims (6)

1. A device for automatically sorting and metering silicon wafers is characterized in that,
Including first conveyer belt (1), one side of first conveyer belt (1) is equipped with carousel (2), the centre of carousel (2) is equipped with pivot (3), one side of carousel (2) is kept away from in pivot (3) is equipped with first motor (4), the surface of carousel (2) is equipped with a plurality of standing grooves (5), the centre of standing groove (5) is equipped with bar opening (6), bar opening (6) are connected with thrust unit, carousel (2) are kept away from one side of first conveyer belt (1) is equipped with second conveyer belt (7), the both sides of second conveyer belt (7) are equipped with frame (8) respectively, be equipped with on frame (8) of one side of second conveyer belt (7) and place case (9), the inside of placing case (9) is equipped with telescoping device (10), the top of second conveyer belt (7) is equipped with L type pole (11), be equipped with first optical fiber sensor (12) and second optical fiber sensor (13) on L type pole (11) respectively, frame (8) are kept away from first side (14) and second guide plate (14) in proper order, the first optical fiber sensor (12) and the second optical fiber sensor (13) are respectively provided with one sides of the first guide plate (14) and the second guide plate (15), the middle parts of the first guide plate (14) and the second guide plate (15) are respectively provided with a counting sensor (16), one sides of the first guide plate (14) and the second guide plate (15) far away from the second conveyor belt (7) are respectively provided with a collecting box (17), and one side of the second conveyor belt (7) far away from the turntable (2) is provided with a collecting device;
The pushing device comprises a second motor (18), an arc-shaped rotating wheel (19) is arranged at the output end of the second motor (18), a first connecting rod (20) is arranged at the center of the arc-shaped rotating wheel (19), a second connecting rod (21) is arranged at one side, far away from the arc-shaped rotating wheel (19), of the first connecting rod (20), the other end of the second connecting rod (21) is connected with the center of a third connecting rod (22), one end of the third connecting rod (22) is connected with a first sliding block (23), the first sliding block (23) is arranged in a first sliding groove (24), a protruding block (25) is arranged at one end of the first sliding block (23), the protruding block (25) is connected with a V-shaped rod (26), the middle of the V-shaped rod (26) is connected with a first supporting base (27), and one end, far away from the protruding block (25), of the V-shaped rod (26) is contacted with the arc-shaped rotating wheel (19).
The telescopic device (10) comprises a second sliding groove (28), the second sliding groove (28) is formed in the accommodating box (9), a sliding rod (29) is arranged in the second sliding groove (28), one end of the sliding rod (29) penetrates through the side wall of the accommodating box (9) and is connected with a push plate (30), a third sliding groove (31) is formed in the middle of the sliding rod (29), a second sliding block is arranged in the third sliding groove (31), a fourth connecting rod (32) is arranged on one side of the surface of the second sliding block, a second supporting base (36) is arranged on one side of the fourth connecting rod (32), a sleeve (33) is arranged in the middle of the fourth connecting rod (32), one side of the sleeve (33) is connected with a fifth connecting rod (34), and one end of the fifth connecting rod (34) away from the sleeve (33) is connected with the output end of a third motor (35).
2. The automatic silicon wafer sorting and metering device according to claim 1, wherein a damping spring (37) is arranged on the sliding rod (29) between the outer side of the placement box (9) and the push plate (30).
3. An automatic silicon wafer sorting and metering device according to claim 1, characterized in that the collecting device comprises a recovery box (38), a third guide plate (39) being arranged between the recovery box (38) and the second conveyor belt (7).
4. A silicon wafer automatic sorting and metering device according to claim 3, characterized in that a fixed block (40) is arranged at the top of the recovery box (38), and one side of the fixed block (40) away from the recovery box (38) is connected with the L-shaped rod (11).
5. An automatic silicon wafer sorting and metering device according to claim 1, characterized in that the third connecting rod (22) is located in the strip-shaped opening (6).
6. An automatic silicon wafer sorting and metering device according to claim 1, characterized in that the first chute (24) is connected with one side of the frame (8).
CN201811275959.0A 2018-10-30 2018-10-30 Automatic silicon wafer sorting and metering device Active CN109225943B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201811275959.0A CN109225943B (en) 2018-10-30 2018-10-30 Automatic silicon wafer sorting and metering device

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Application Number Priority Date Filing Date Title
CN201811275959.0A CN109225943B (en) 2018-10-30 2018-10-30 Automatic silicon wafer sorting and metering device

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CN109225943B true CN109225943B (en) 2024-05-24

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Citations (5)

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Publication number Priority date Publication date Assignee Title
CN102873035A (en) * 2012-10-19 2013-01-16 张家港市超声电气有限公司 On-line automatic detection device for silicon wafer
CN107093566A (en) * 2017-04-28 2017-08-25 苏州商信宝信息科技有限公司 A kind of silicon chip automatic detection sorting device and its control method
CN206951596U (en) * 2017-06-21 2018-02-02 诸暨越博企业管理咨询有限公司 A kind of electronic component sorting unit
CN207401780U (en) * 2017-09-26 2018-05-25 天津环鑫科技发展有限公司 Automatic silicon wafer sorting equipment
CN108554827A (en) * 2018-05-21 2018-09-21 江苏卓威智能科技有限公司 A kind of rotating disc type Intelligent sorting machine

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006016324A1 (en) * 2006-04-06 2007-10-25 Wacker Chemie Ag Apparatus and method for flexibly classifying polycrystalline silicon fragments

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102873035A (en) * 2012-10-19 2013-01-16 张家港市超声电气有限公司 On-line automatic detection device for silicon wafer
CN107093566A (en) * 2017-04-28 2017-08-25 苏州商信宝信息科技有限公司 A kind of silicon chip automatic detection sorting device and its control method
CN206951596U (en) * 2017-06-21 2018-02-02 诸暨越博企业管理咨询有限公司 A kind of electronic component sorting unit
CN207401780U (en) * 2017-09-26 2018-05-25 天津环鑫科技发展有限公司 Automatic silicon wafer sorting equipment
CN108554827A (en) * 2018-05-21 2018-09-21 江苏卓威智能科技有限公司 A kind of rotating disc type Intelligent sorting machine

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