CN109212322A - A kind of method of Multifunctional rectangular chamber perturbation method detection nano thin-film complex permittivity - Google Patents
A kind of method of Multifunctional rectangular chamber perturbation method detection nano thin-film complex permittivity Download PDFInfo
- Publication number
- CN109212322A CN109212322A CN201811289933.1A CN201811289933A CN109212322A CN 109212322 A CN109212322 A CN 109212322A CN 201811289933 A CN201811289933 A CN 201811289933A CN 109212322 A CN109212322 A CN 109212322A
- Authority
- CN
- China
- Prior art keywords
- sample
- nano thin
- slot
- film
- rectangular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
- G01R27/2688—Measuring quality factor or dielectric loss, e.g. loss angle, or power factor
- G01R27/2694—Measuring dielectric loss, e.g. loss angle, loss factor or power factor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
- G01R27/2617—Measuring dielectric properties, e.g. constants
- G01R27/2635—Sample holders, electrodes or excitation arrangements, e.g. sensors or measuring cells
- G01R27/2658—Cavities, resonators, free space arrangements, reflexion or interference arrangements
- G01R27/2664—Transmission line, wave guide (closed or open-ended) or strip - or microstrip line arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/12—Measuring magnetic properties of articles or specimens of solids or fluids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/12—Measuring magnetic properties of articles or specimens of solids or fluids
- G01R33/1223—Measuring permeability, i.e. permeameters
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Measurement Of Resistance Or Impedance (AREA)
Abstract
A kind of method of Multifunctional rectangular chamber perturbation method detection nano thin-film complex permittivity, is related to detecting the field of material property parameter.The nano thin-film plate material measuring device includes rectangle cavity sensor, microwave vector network analyzer, input coaxial cable, output coaxial cable, GPIB data collecting card and computer.The present invention can carry out pure dielectric material complex dielectric permittivity (dielectric constant, dielectric loss coefficient), pure magnetic material complex permeability (magnetic conductivity, electromagnetic loss factor) and blending agent material complex permittivity (dielectric constant, dielectric loss coefficient, magnetic conductivity, electromagnetic loss factor) detection, there is multi-functional and multi-mode, detection method accuracy is high, convenient experimental operation.
Description
Technical field
The present invention relates to the fields of detection material property parameter more particularly to a kind of detection of Multifunctional rectangular chamber perturbation method to receive
The method of rice film complex permittivity.
Background technique
With the rapid development of modern science and technology, nano thin-film plate material constitute device demand and research obtained it is huge
Promotion, the integrated development trend for having become current radio frequency, microwave device of the chip of microwave device, same nanometer thin membrane material
Material plate material also has been widely used for the every field of electronic industry.For microwave film plate material, composite dielectric is normal
Number (ε ', ε ", μ ', μ ") is the important parameter for characterizing material property, be determine nano thin-film plate material applicability it is important because
One of element.Therefore accurately measuring nano thin-film plate material complex permittivity has become even more important.
Since the thickness of nano thin-film plate material is thin, small in size, the accuracy of experiment is caused to substantially reduce, in measurement
Also huge difficulty is brought.Currently, the performance of domestic external pelivimetry nano film material plate material is all the survey of more low frequency
Test instrument and sensor.
Summary of the invention
It is an object of the invention to solve the above problem in the prior art, a kind of Multifunctional rectangular chamber perturbation method inspection is provided
The method for surveying nano thin-film complex permittivity, used apparatus structure is simple, and has multi-functional and multi-mode, detection side
Method accuracy height, convenient experimental operation can test pure dielectric, pure magnetic and complex media nano thin-film plate material, fit
For R&D institution and factory and enterprise.
In order to achieve the above objectives, the present invention adopts the following technical scheme:
A kind of device of Multifunctional rectangular chamber perturbation method detection nano thin-film complex permittivity, including rectangle cavity sensor,
Microwave vector network analyzer, input coaxial cable, output coaxial cable, GPIB data collecting card and computer；Input is coaxial
The microwave signal output port of one end connection microwave vector network analyzer of cable inputs the other end connection square of coaxial cable
The input terminal of shape cavity sensor；The output end for exporting one end connection rectangle cavity sensor of coaxial cable, exports coaxial cable
The microwave signal input port of other end connection microwave vector network analyzer；The input terminal and microwave of GPIB data collecting card are sweared
The data output end connection of Network Analyzer is measured, the output end of GPIB data collecting card is connected to a computer.
The rectangle cavity sensor includes rectangular waveguide, 2 coaxial waveguide converters and 2 rectangular coupling short circuit metals
Piece；Coaxial waveguide converter respectively symmetrically is secured to the both ends of rectangular waveguide；The both ends of rectangular waveguide also symmetrically offer vertical
Directly in rectangular waveguide long side and the first short slot of the cavity through rectangular waveguide, and the first short slot turns relative to coaxial waveguide
Inwardly, the rectangular coupling short circuit metal piece is pluggable in the first short slot for parallel operation；It is offered in the middle part of the rectangular waveguide
It is parallel to the cavity long side of rectangular waveguide and the core sample slot of through cavities.
The both sides of the core sample slot are uniformly distributed symmetrically to be offered perpendicular to the second short of core sample slot and through cavities
Road slot, the length of the second short slot and the width edge length of inside cavities are consistent, and the adjacent second short-circuit separation is microwave operational
The 1/2 of wavelength；The second adjacent short slot be respectively equipped with it is parallel and be close to vertical short slot and the lateral sample cell of through cavities,
Longitudinal sample cell that is vertical and crossing at vertical short slot and through cavities, and longitudinal sample cell is collectively formed with the second short slot
Cross-shaped structure.
The rectangle cavity sensor further includes T shape coupling short circuit metal piece；The number of T shape coupling short circuit metal piece is
2, T shapes coupling short circuit metal piece can be symmetrically plugged in the second short slot.
The rectangle cavity sensor further includes sample test box, and sample test box can be placed in core sample slot, lateral sample
In product slot or longitudinal sample cell；Core sample slot, the length of lateral sample cell and longitudinal sample cell and width are cut with sample test box
Area is consistent；Sample test box includes the first T shape biochip, the 2nd T shape biochip and the 3rd T shape biochip；2nd T shape is organic
On piece offers sample cell, and the shape of the sample cell is rectangle, and the first T shape biochip and the 3rd T shape biochip are covered each by
In the upper and lower of the 2nd T shape biochip.
A kind of method of Multifunctional rectangular chamber perturbation method detection nano thin-film complex permittivity, comprising the following steps:
Nano material is used sputtering technology uniform sputter on rectangle substrate by step 1, and the substrate is low dielectric material
Expect that the substrate constituted, plate material equally can be fabricated to or be cut into rectangular sheet style product；
2 coaxial waveguide converters are separately connected input coaxial cable first and export coaxial cable by step 2, will be square
Shape couples short circuit metal piece or T shape coupling short circuit metal piece is inserted into corresponding slot, by the input terminal of GPIB data collecting card and
Output end is separately connected microwave vector network analyzer and computer, then starts the automatic testing software of computer, to microwave
Vector network analyzer is normalized；
Step 3 after completing normalization, starts the automatic testing software of computer, successively according to test under software prompt
Proceeding measurement cavity, empty sample test box, be put into substrate sample test box resonance frequency and quality factor information, from
It is dynamic to save surveyed parameter；
Step 4, when carry out nano thin-film plate material complex permittivity measurement when, first by the base in sample test box
Piece changes nano thin-film plate material into, then under the software prompt of computer, detects and saves surveyed parameter, finally calculate
The complex permittivity of nano thin-film plate material, and cavity after being switched on every time, the test value of empty sample test box and substrate
With practical theoretical value, correction factor is calculated, test result is modified, and enters Database Lists and saves.
In step 2, the nano thin-film plate material different according to perturbation quantity size parameter, selects suitable Working mould
Formula, the operating mode include two rectangular coupling short circuit metal pieces being plugged on respectively in the first short slot, by two T shape couplings
Alloy category short-circuit piece is plugged on respectively in the second symmetrical short slot of central channel two sides, rectangular coupling short circuit metal piece or T shape
Short circuit metal piece is coupled further away from core sample slot, operating mode is higher, and perturbation quantity is too small to select lower operating mode, perturbation quantity
Cross the higher operating mode of general election.
When testing pure dielectric substance, sample test box is placed in core sample slot；It can get strongest dielectric
Frequency shift (FS) perturbation quantity f-f after nano thin-film plate material perturbation0And quality factor perturbation quantity Q-Q0, because in all odd modes
The heart is all at electric field antinode, i.e. the area electric field Qiang.
When the pure magnetic medium nano thin-film plate material that test is required without excitation orientation, sample test box is placed in longitudinal direction
In sample cell；Longitudinal sample cell is all driveed to magnetic field anti-nodal region, equally can get stronger magnetic medium nano thin-film plate material
Frequency shift (FS) perturbation quantity f-f after perturbation0And quality factor perturbation quantity Q-Q0。
When test has the pure magnetic medium nano thin-film plate material of excitation orientation requirement, sample test box is placed in transverse direction
In sample cell, and test sample is detected respectively in the vertical direction and the horizontal direction to obtain difficult excitation and easily two groups of numbers of excitation
According to；Lateral sample cell is also all driveed to magnetic field anti-nodal region, equally can get stronger magnetic medium nano thin-film plate material perturbation
Frequency shift (FS) perturbation quantity f-f afterwards0And quality factor perturbation quantity Q-Q0。
Rectangle cavity sensor of the invention is provided simultaneously with core sample slot, lateral sample cell, longitudinal sample cell, the first short circuit
Slot and the second short slot, and under the same cavity, same frequency point, while possessing the antinode area in electric field antinode area and magnetic field
Under the testing conditions of detection slot, therefore can cope with measured material is the nanometer that dielectric mixes group with magnetic medium as blending agent
Film plate material.
When testing the blending agent nano thin-film plate material that dielectric is mixed with magnetic medium, first by sample test box
It is placed in core sample slot, obtains the frequency shift (FS) perturbation quantity in electric field antinode area after the plate material perturbation of blending agent nano thin-film
f1-f0And quality factor perturbation quantity Q1-Q0, the blending agent nano thin-film plate material sample that then again requires no excitation orientation
Product testing cassete is placed in longitudinal sample cell, obtains the frequency in the antinode area of magnetic field after the plate material perturbation of blending agent nano thin-film
Deviate perturbation quantity f2-f0And quality factor perturbation quantity Q2-Q0, it is in same cavity and same that detection twice, which obtains four known quantities,
Acquired known quantity under resonance point can establish four equations, and simultaneous equations solve, and calculate blending agent nano thin-film
Four unknown quantity ε ', ε needed for plate material ", μ ', μ "；For there is the blending agent nano thin-film chip of excitation orientation requirement
Material sample testing cassete is placed in lateral sample cell, and samples vertical direction and horizontal direction detect once respectively, obtains f3-f0、
Q3-Q0、f4-f0And Q4-Q0, 6 equations are established, 6 unknown quantity ε ', ε ", μ ' are obtained3、μ′4、μ″3、μ″4:
Wherein ε=ε '-j ε ", μ=μ '-j μ ", ε and μ is respectively complex dielectric permittivity and complex permeability, ε0And μ0It is respectively true
Aerial dielectric constant and magnetic conductivity, ε ' and μ ' are respectively dielectric constant and magnetic conductivity, ε " and μ " be respectively dielectric loss coefficient and
Electromagnetic loss factor,WithRespectively complex conjugate electric and magnetic fields, E and H are respectively electric and magnetic fields, and V and Δ V are respectively square
The volume of shape waveguide and the volume of nano thin-film plate material, f0And Q0Respectively substrate is put into the resonance frequency that sample box measures
And quality factor.
Compared with the existing technology, the beneficial effect that technical solution of the present invention obtains is:
1, the present invention selects Multifunctional rectangular chamber perturbation method to measure the performance of nano thin-film plate material, is based on wheat
Ke Siwei equation inference has gone out the calculation formula of Multifunctional rectangular chamber perturbation method detection nano thin-film plate material complex permittivity,
Using rectangle cavity sensor and Agilent E8362B microwave vector network analyzer and computer, nanometer thin diaphragm is established
Then formula material property extracting system develops automatic testing software using virtual instrument technology VEE, and utilizes multi-functional square
Shape chamber automatic measurement system tests the complex permittivity of nano thin-film plate material sample.
2, the present invention can test pure dielectric material complex dielectric permittivity (dielectric constant, dielectric loss coefficient), pure magnetic material
Complex permeability (magnetic conductivity, electromagnetic loss factor) and blending agent material complex permittivity (dielectric constant, dielectric loss coefficient, magnetic
Conductance, electromagnetic loss factor) detection, detection range is wide, strong applicability, and accuracy is high.
Detailed description of the invention
Fig. 1 is the structural schematic diagram for the device that Multifunctional rectangular chamber perturbation method detects nano thin-film complex permittivity；
Fig. 2 is the schematic front view of rectangle cavity sensor；
Fig. 3 is the schematic top plan view of rectangle cavity sensor；
Fig. 4 is the structural schematic diagram of rectangular coupling short circuit metal piece；
Fig. 5 is the structural schematic diagram that T shape couples short circuit metal piece；
Fig. 6 is the decomposition diagram of sample test box.
Detailed description of the invention: microwave vector network analyzer 101, computer 102, rectangle cavity sensor 103 input coaxial cable
104, export coaxial cable 105, GPIB data collecting card 106, rectangular waveguide 1, coaxial waveguide converter 2, rectangular coupling metal
Short-circuit piece 3, the first short slot 4, sample test box 5, T shape coupling short circuit metal piece 6, core sample slot 17, the second short slot 7,
10,11,13,15,18,21,22,25,27, lateral sample cell 8,12,16,20,24, longitudinal sample cell 9,14,19,23,26, the
One T shape biochip 51, the 2nd T shape biochip 52, the trapezoidal biochip 53 of third, rectangle sample slot 521, coupling aperture 31,61.
Specific embodiment
In order to be clearer and more clear technical problems, technical solutions and advantages to be solved, tie below
Drawings and examples are closed, the present invention is described in further details.
As shown in Figure 1, a kind of device of Multifunctional rectangular chamber perturbation method detection nano thin-film complex permittivity, including rectangle
Cavity sensor 103, microwave vector network analyzer 101, input coaxial cable 104, output coaxial cable 105, GPIB data are adopted
Truck 106 and computer 102；The microwave signal for inputting one end connection microwave vector network analyzer 101 of coaxial cable 104 is defeated
Exit port, the input terminal of the other end connection rectangle cavity sensor 103 of input coaxial cable 104；Export the one of coaxial cable 105
The output end of end connection rectangle cavity sensor 103, the other end of output coaxial cable 105 connect microwave vector network analyzer
101 microwave signal input port；The input terminal of GPIB data collecting card 106 and the data of microwave vector network analyzer 101
Output end connection, the output end of GPIB data collecting card 106 are connected with computer 102.Microwave vector network analyzer 101 is adopted
With Agilent E8362B microwave vector network analyzer.
As shown in figures 2-3, the rectangle cavity sensor 103 includes rectangular waveguide 1, coaxial waveguide converter 2, rectangular coupling
Alloy category short-circuit piece 3, T shape coupling short circuit metal piece 6 and sample test box 5；Wherein coaxial waveguide converter 2, rectangular coupling gold
The number for belonging to short-circuit piece 3 and T shape coupling short circuit metal piece 6 distinguishes 2.
Coaxial waveguide converter 2 respectively symmetrically is secured to the both ends of rectangular waveguide 1；The both ends of rectangular waveguide 1 are also symmetrical
The first short slot 4 of the cavity perpendicular to 1 long side of rectangular waveguide and through rectangular waveguide is offered, and the first short slot 4 is opposite
Inwardly in coaxial waveguide converter 2, the rectangular coupling short circuit metal piece 3 is pluggable in the first short slot 4.
As shown in figure 3, the middle part of the rectangular waveguide 1 opens up the cavity long side and through cavities for being parallel to rectangular waveguide
Core sample slot；The both sides of the core sample slot are uniformly distributed symmetrically offer perpendicular to core sample slot and through cavities the
Two short slots, the length of the second short slot and the width edge length of inside cavities are consistent, and the adjacent second short-circuit separation is microwave
The 1/2 of operation wavelength；The second adjacent short slot is respectively equipped with lateral sample that is parallel and being close to vertical short slot and through cavities
Product slot, longitudinal sample cell that is vertical and crossing at vertical short slot and through cavities, and longitudinal sample cell and the second short slot are total
Similar shape across structure.
In the present embodiment: the first short slot is 4；Core sample slot is 17；Second short slot include 7,10,11,13,15,
18,21,22,25 and 27；Lateral sample cell includes 8,12,16,20 and 24；Longitudinal sample cell includes 9,14,19,23 and 26.
The T shape coupling short circuit metal piece 6 can be symmetrically plugged in the second short slot.
As shown in Figures 4 and 5, the middle part of rectangular coupling short circuit metal piece 3 and T shape coupling short circuit metal piece 6 is respectively equipped with coupling
Close hole 31 and 61.
The sample test box 5 can be placed in core sample slot, lateral sample cell or longitudinal sample cell；Core sample
The length of slot, lateral sample cell and longitudinal sample cell with it is wide consistent with the sectional area of sample test box 5.
As shown in fig. 6, sample test box 5 includes that the first T shape biochip 51, the 2nd T shape biochip 52 and the 3rd T shape are organic
Piece 53；The centre of 2nd T shape biochip 52 offers rectangle sample slot 521, the first T shape biochip 51 and the 3rd T shape biochip
53 are covered each by the upper and lower of the 2nd T shape biochip 52, form sample test box 5 with superposition；Can be achieved different mode under into
Row repeatedly measurement, is conducive to improve measurement accuracy, experimental implementation is simple and convenient.
When rectangular coupling short circuit metal piece 3 is not inserted into the both ends of rectangular waveguide 1, rectangular waveguide 1 is transmission method biography at this time
Sensor, entire detection system enter frequency sweep detecting state, can obtain the nano thin-film for being inserted into lateral sample cell and longitudinal sample cell
The configured transmission of plate material.To reduce radiation, cavity Q value is improved, when detection can be by the institute on unused Multifunctional rectangular chamber
There is empty slot, is pasted with copper metal film covering.
A kind of method of Multifunctional rectangular chamber perturbation method detection nano thin-film complex permittivity, comprising the following steps:
Nano material is used sputtering technology uniform sputter on rectangle substrate by step 1, and the substrate is low dielectric material
Expect that the substrate constituted, plate material equally can be fabricated to or be cut into rectangular sheet style product；The substrate of the present embodiment uses
LaAlO3, polytetrafluoroethylene (PTFE) or polystyrene rectangle substrate；
2 coaxial waveguide converters 2 are separately connected input coaxial cable 104 first and export coaxial cable by step 2
105, rectangular coupling short circuit metal piece 3 or T shape coupling short circuit metal piece 6 are inserted into corresponding slot, by GPIB data collecting card
106 input terminal and output end is separately connected microwave vector network analyzer 101 and computer 102, then starts computer 102
Automatic testing software, microwave vector network analyzer 101 is normalized；
Step 3 after completing normalization, starts the VEE test software of computer 102 voluntarily worked out, under software prompt
Successively according to testing sequence measurement cavity, empty sample test box, be put into substrate sample test box resonance frequency and quality
The information of factor automatically saves surveyed parameter；
Step 4, when carry out nano thin-film plate material complex permittivity measurement when, first by the base in sample test box
Piece changes nano thin-film plate material into, then under the software prompt of computer 102, detects and saves surveyed parameter, finally count
The complex permittivity of nano thin-film plate material is calculated, and cavity after being switched on every time, the survey of empty sample test box and substrate
Examination value and practical theoretical value, calculate correction factor, are modified to test result, and enter Database Lists and save.
In step 2, the nano thin-film plate material different according to perturbation quantity size parameter, selects suitable Working mould
Formula, the operating mode include two rectangular coupling short circuit metal pieces 3 being plugged on respectively in the first short slot, by two T shapes
Coupling short circuit metal piece 6 be plugged in the second symmetrical short slot of central channel two sides respectively, rectangular coupling short circuit metal piece 3 or
T shape couples short circuit metal piece 6 further away from core sample slot, and operating mode is higher, and perturbation quantity is too small to select lower operating mode, micro-
The amount of disturbing crosses the higher operating mode of general election.It is rectangular coupling short circuit metal piece 3 every with a thickness of 1mm, rectangular coupling short circuit metal
Piece 3 is connected in first short slot 4 at cavity both ends, constitutes H1011 operating mode；T shape couple short circuit metal piece 6 with a thickness of
Every 1mm, T shape coupling short circuit metal piece 6 are plugged on the second short slot (7,10,11,13,15,18,21,22,25 and 27), structure
At the operating mode of H101~H109.
The present invention obtains the convenient selection mode of multimode cavity by the way of flexible grafting short-circuit piece.For perturbation quantity
The different nano thin-film plate material of size parameter, perturbation quantity is too small to select small chamber, such as selects lower Working mould H101 (T shape coupling
Short circuit metal piece 6 is flexibly plugged in 15 and 18 slots), H103 (13 and 21 slot), H105 (11 and 22 slot)；It is big that perturbation quantity crosses general election
Chamber such as selects higher operating mode H107 (10 and 25 slot), H109 (7 and 27 slot), H1011 (28 and 29 slot), and wherein H1011 is most
High operating mode, rectangular coupling short circuit metal piece 3 are plugged in the first short slot 4；The invention can ensure that different materials all may be used
Reasonable perturbation quantity (frequency offset) is obtained, best testing precision is obtained.
Pure dielectric nano material is sputtered on substrate respectively at 700 DEG C and 775 DEG C in the present embodiment and obtains sample 1
With sample 2, the thickness of sample 1 and sample 2 is 800nm, and table 1 is sample 1, sample 2 and organic with a thickness of the T shape of 0.932mm
The tables of data that piece measures under H109 cavity.
Table 1
As shown in table 1, loss angle tangent is directly proportional with the raising of resonance frequency, and sample 1, sample 2 and T shape biochip are more
Dielectric constant and loss angle tangent under secondary measurement is basicly stable, and relative error can illustrate to test substantially within 10%
Accuracy.
Claims (10)
1. a kind of device of Multifunctional rectangular chamber perturbation method detection nano thin-film complex permittivity, it is characterised in that: including rectangle
Cavity sensor, microwave vector network analyzer, input coaxial cable, output coaxial cable, GPIB data collecting card and computer；
The microwave signal output port for inputting one end connection microwave vector network analyzer of coaxial cable, inputs the another of coaxial cable
The input terminal of end connection rectangle cavity sensor；The output end of one end connection rectangle cavity sensor of coaxial cable is exported, output is same
The microwave signal input port of the other end connection microwave vector network analyzer of shaft cable；The input terminal of GPIB data collecting card
It is connect with the data output end of microwave vector network analyzer, the output end of GPIB data collecting card is connected to a computer.
2. a kind of device of Multifunctional rectangular chamber perturbation method detection nano thin-film complex permittivity as described in claim 1,
Be characterized in that: the rectangle cavity sensor includes rectangular waveguide, 2 coaxial waveguide converters and 2 rectangular coupling short circuit metals
Piece；Coaxial waveguide converter respectively symmetrically is secured to the both ends of rectangular waveguide；The both ends of rectangular waveguide also symmetrically offer vertical
Directly in rectangular waveguide long side and the first short slot of the cavity through rectangular waveguide, and the first short slot turns relative to coaxial waveguide
Inwardly, the rectangular coupling short circuit metal piece is pluggable in the first short slot for parallel operation；It is offered in the middle part of the rectangular waveguide
It is parallel to the cavity long side of rectangular waveguide and the core sample slot of through cavities.
3. a kind of device of Multifunctional rectangular chamber perturbation method detection nano thin-film complex permittivity as claimed in claim 2,
Be characterized in that: the both sides of the core sample slot are uniformly distributed symmetrically to be offered perpendicular to the second short of core sample slot and through cavities
Road slot, the length of the second short slot and the width edge length of inside cavities are consistent, and the adjacent second short-circuit separation is microwave operational
The 1/2 of wavelength；The second adjacent short slot be respectively equipped with it is parallel and be close to vertical short slot and the lateral sample cell of through cavities,
Longitudinal sample cell that is vertical and crossing at vertical short slot and through cavities, and longitudinal sample cell is collectively formed with the second short slot
Cross-shaped structure.
4. a kind of device of Multifunctional rectangular chamber perturbation method detection nano thin-film complex permittivity as claimed in claim 3,
Be characterized in that: the rectangle cavity sensor further includes T shape coupling short circuit metal piece；The number of the T shape coupling short circuit metal piece
Coupling short circuit metal piece for 2, T shape can symmetrically be plugged in the second short slot.
5. a kind of device of Multifunctional rectangular chamber perturbation method detection nano thin-film complex permittivity as claimed in claim 3,
Be characterized in that: the rectangle cavity sensor further includes sample test box, and sample test box can be placed in core sample slot, lateral sample
In product slot or longitudinal sample cell；Core sample slot, the length of lateral sample cell and longitudinal sample cell and width are cut with sample test box
Area is consistent；Sample test box includes the first T shape biochip, the 2nd T shape biochip and the 3rd T shape biochip；2nd T shape is organic
On piece offers sample cell, and the shape of the sample cell is rectangle, and the first T shape biochip and the 3rd T shape biochip are covered each by
In the upper and lower of the 2nd T shape biochip.
6. a kind of method of Multifunctional rectangular chamber perturbation method detection nano thin-film complex permittivity, it is characterised in that: including following
Step:
Nano material is used sputtering technology uniform sputter on rectangle substrate by step 1, and plate material equally can be fabricated to or cut
It is cut into rectangular sheet style product；
2 coaxial waveguide converters are separately connected input coaxial cable first and export coaxial cable by step 2, by rectangular coupling
Alloy category short-circuit piece or T shape coupling short circuit metal piece are inserted into corresponding slot, by the input terminal of GPIB data collecting card and output
End is separately connected microwave vector network analyzer and computer, then starts the automatic testing software of computer, to microwave vector
Network Analyzer is normalized；
Step 3 after completing normalization, starts the automatic testing software of computer, successively according to testing sequence under software prompt
Measurement cavity, empty sample test box, be put into substrate sample test box resonance frequency f and quality factor q information, automatically
Save surveyed parameter；
Step 4, when carry out nano thin-film plate material complex permittivity measurement when, the substrate in sample test box is changed first
At nano thin-film plate material, then under the software prompt of computer, surveyed parameter is detected and saved, nanometer is finally calculated
The complex permittivity of film plate material, and will every time after booting cavity, empty sample test box and substrate test value and reality
Border theoretical value, calculates correction factor, is modified to test result, and enters Database Lists and save.
7. a kind of method of Multifunctional rectangular chamber perturbation method detection nano thin-film complex permittivity as claimed in claim 6,
Be characterized in that: the substrate is the substrate that lower dielectric material is constituted.
8. a kind of method of Multifunctional rectangular chamber perturbation method detection nano thin-film complex permittivity as claimed in claim 6,
It is characterized in that: in step 2, according to the different nano thin-film plate material of perturbation quantity size parameter, selecting suitable operating mode,
The operating mode includes that two rectangular coupling short circuit metal pieces are plugged on respectively in the first short slot, couple two T shapes
Short circuit metal piece is plugged on respectively in the second symmetrical short slot of central channel two sides, rectangular coupling short circuit metal piece or T shape coupling
For alloy category short-circuit piece further away from core sample slot, operating mode is higher, and perturbation quantity is too small to select lower operating mode, perturbation quantity mistake
The higher operating mode of general election.
9. a kind of method of Multifunctional rectangular chamber perturbation method detection nano thin-film complex permittivity as claimed in claim 6,
It is characterized in that: when testing pure dielectric substance, sample test box being placed in core sample slot；When test is wanted without excitation orientation
When the pure magnetic medium nano thin-film plate material asked, sample test box is placed in longitudinal sample cell；When test has excitation orientation
It is required that pure magnetic medium nano thin-film plate material when, sample test box is placed in lateral sample cell, and test sample is existed
It both vertically and horizontally detects respectively to obtain difficult excitation and easily two groups of data of excitation.
10. a kind of method of Multifunctional rectangular chamber perturbation method detection nano thin-film complex permittivity as claimed in claim 6,
It is characterized in that: when testing the blending agent nano thin-film plate material that dielectric is mixed with magnetic medium, first by sample test
Box is placed in core sample slot, obtains the frequency shift (FS) perturbation in electric field antinode area after the plate material perturbation of blending agent nano thin-film
Measure f1-f0And quality factor perturbation quantity Q1-Q0, the blending agent nano thin-film plate material that then again requires no excitation orientation
Sample test box is placed in longitudinal sample cell, obtains the frequency in the antinode area of magnetic field after the plate material perturbation of blending agent nano thin-film
Rate deviates perturbation quantity f2-f0And quality factor perturbation quantity Q2-Q0, four known quantities of detection acquisition twice is in same cavitys and together
Acquired known quantity under one resonance point can establish four equations, and simultaneous equations solve, and calculate blending agent nanometer thin
Four unknown quantity ε ', ε needed for diaphragm type material ", μ ', μ "；For there is the blending agent nanometer thin diaphragm of excitation orientation requirement
Formula material sample testing cassete is placed in lateral sample cell, and samples vertical direction and horizontal direction detect once respectively, obtains f3-f0、
Q3-Q0、f4-f0And Q4-Q0, 6 equations are established, 6 unknown quantity ε ', ε ", μ ' are obtained3、μ′4、μ"3、μ"4:
Wherein ε=ε '-j ε ", μ=μ '-j μ ", ε and μ are respectively complex dielectric permittivity and complex permeability, ε0And μ0Respectively in vacuum
Dielectric constant and magnetic conductivity, ε ' and μ ' are respectively dielectric constant and magnetic conductivity, and ε " and μ " is respectively dielectric loss coefficient and magnetic loss
Coefficient is consumed,WithRespectively complex conjugate electric and magnetic fields, E and H are respectively electric and magnetic fields, and V and Δ V are respectively rectangular wave
The volume of the volume and nano thin-film plate material led, f0And Q0Respectively substrate is put into the resonance frequency and product that sample box measures
Prime factor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811289933.1A CN109212322B (en) | 2018-10-31 | 2018-10-31 | Method for detecting complex dielectric constant of nano film by multifunctional rectangular cavity perturbation method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811289933.1A CN109212322B (en) | 2018-10-31 | 2018-10-31 | Method for detecting complex dielectric constant of nano film by multifunctional rectangular cavity perturbation method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109212322A true CN109212322A (en) | 2019-01-15 |
| CN109212322B CN109212322B (en) | 2020-03-24 |
Family
ID=64998271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811289933.1A Expired - Fee Related CN109212322B (en) | 2018-10-31 | 2018-10-31 | Method for detecting complex dielectric constant of nano film by multifunctional rectangular cavity perturbation method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109212322B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110261684A (en) * | 2019-05-07 | 2019-09-20 | 电子科技大学 | A kind of double ridged waveguide method liquid crystal dielectric test device |
| CN111077377A (en) * | 2019-11-28 | 2020-04-28 | 电子科技大学 | Sample stage for inhibiting degenerate high-order mode of quasi-optical cavity, and testing method and application thereof |
| KR20210156411A (en) * | 2020-06-18 | 2021-12-27 | 울산과학기술원 | Method and apparatus to measure dielectric permittivity using te01 mode in circular waveguide |
| CN113945764A (en) * | 2021-10-15 | 2022-01-18 | 中国人民解放军国防科技大学 | System and method for measuring dielectric constant of substance under composite field condition |
Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1749767A (en) * | 2005-10-11 | 2006-03-22 | 中国科学院物理研究所 | A kind of method and apparatus that detects ferro-electric film microwave dielectric property |
| CN1801526A (en) * | 2005-12-06 | 2006-07-12 | 电子科技大学 | Stripline resonator and microwave thin film material electromagnetic parameter testing device |
| CN1834667A (en) * | 2006-03-01 | 2006-09-20 | 浙江大学 | Measurer of dielectric film microwave complex dielectric permittivity |
| JP2006258451A (en) * | 2005-03-15 | 2006-09-28 | Micro Denshi Kk | Measuring method of dielectric constant by utilizing microwave and measuring instrument therefor |
| CN201804992U (en) * | 2010-02-02 | 2011-04-20 | 东南大学 | Ultralow temperature drift U-shaped short circuiter rectangular waveguide resonant cavity |
| CN102707155A (en) * | 2012-06-04 | 2012-10-03 | 电子科技大学 | Test device for complex dielectric constant of dielectric material based on quasi-optical resonant cavity |
| CN102928718A (en) * | 2012-11-06 | 2013-02-13 | 华北电力大学 | Superconductivity insulation material electrical characteristic test device |
| CN103487666A (en) * | 2013-09-25 | 2014-01-01 | 长沙新图仪器有限公司 | Resonant cavity test device used for testing dielectric constant of materials |
| CN103941101A (en) * | 2014-04-09 | 2014-07-23 | 芜湖航飞科技股份有限公司 | High-frequency medium relative dielectric constant measuring circuit and method and discreteness measuring method |
| CN104237814A (en) * | 2013-06-24 | 2014-12-24 | 电子科技大学 | Novel spin wave resonance linewidth measurement method based on injection type adjustable rectangular resonant cavity |
| CN104849570A (en) * | 2015-05-26 | 2015-08-19 | 中国传媒大学 | Method for testing material electromagnetic parameter based on artificial magnetic conductor rectangular waveguide |
| CN205786867U (en) * | 2016-07-11 | 2016-12-07 | 厦门大学 | A kind of nano thin-film Micro-wave low-noise transistor test device |
| CN108594023A (en) * | 2018-05-29 | 2018-09-28 | 电子科技大学 | Material complex dielectric permittivity based on gradation type coaxial resonant cavity tests system and method |
-
2018
- 2018-10-31 CN CN201811289933.1A patent/CN109212322B/en not_active Expired - Fee Related
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006258451A (en) * | 2005-03-15 | 2006-09-28 | Micro Denshi Kk | Measuring method of dielectric constant by utilizing microwave and measuring instrument therefor |
| CN1749767A (en) * | 2005-10-11 | 2006-03-22 | 中国科学院物理研究所 | A kind of method and apparatus that detects ferro-electric film microwave dielectric property |
| CN1801526A (en) * | 2005-12-06 | 2006-07-12 | 电子科技大学 | Stripline resonator and microwave thin film material electromagnetic parameter testing device |
| CN1834667A (en) * | 2006-03-01 | 2006-09-20 | 浙江大学 | Measurer of dielectric film microwave complex dielectric permittivity |
| CN201804992U (en) * | 2010-02-02 | 2011-04-20 | 东南大学 | Ultralow temperature drift U-shaped short circuiter rectangular waveguide resonant cavity |
| CN102707155A (en) * | 2012-06-04 | 2012-10-03 | 电子科技大学 | Test device for complex dielectric constant of dielectric material based on quasi-optical resonant cavity |
| CN102928718A (en) * | 2012-11-06 | 2013-02-13 | 华北电力大学 | Superconductivity insulation material electrical characteristic test device |
| CN104237814A (en) * | 2013-06-24 | 2014-12-24 | 电子科技大学 | Novel spin wave resonance linewidth measurement method based on injection type adjustable rectangular resonant cavity |
| CN103487666A (en) * | 2013-09-25 | 2014-01-01 | 长沙新图仪器有限公司 | Resonant cavity test device used for testing dielectric constant of materials |
| CN103941101A (en) * | 2014-04-09 | 2014-07-23 | 芜湖航飞科技股份有限公司 | High-frequency medium relative dielectric constant measuring circuit and method and discreteness measuring method |
| CN104849570A (en) * | 2015-05-26 | 2015-08-19 | 中国传媒大学 | Method for testing material electromagnetic parameter based on artificial magnetic conductor rectangular waveguide |
| CN205786867U (en) * | 2016-07-11 | 2016-12-07 | 厦门大学 | A kind of nano thin-film Micro-wave low-noise transistor test device |
| CN108594023A (en) * | 2018-05-29 | 2018-09-28 | 电子科技大学 | Material complex dielectric permittivity based on gradation type coaxial resonant cavity tests system and method |
Non-Patent Citations (2)
| Title |
|---|
| 张秀成等: "《薄膜材料复介电常数与复磁导率测试研究》", 《华中科技大学学报(自然科学版)》 * |
| 胡作启等: "《改进的谐振腔微扰法测定电介质 X 波段介电常数》", 《华中科技大学学报(自然科学版)》 * |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110261684A (en) * | 2019-05-07 | 2019-09-20 | 电子科技大学 | A kind of double ridged waveguide method liquid crystal dielectric test device |
| CN110261684B (en) * | 2019-05-07 | 2022-04-05 | 电子科技大学 | Liquid crystal dielectric testing device adopting double-ridge waveguide method |
| CN111077377A (en) * | 2019-11-28 | 2020-04-28 | 电子科技大学 | Sample stage for inhibiting degenerate high-order mode of quasi-optical cavity, and testing method and application thereof |
| CN111077377B (en) * | 2019-11-28 | 2022-03-08 | 电子科技大学 | Sample stage for inhibiting degenerate high-order mode of quasi-optical cavity, and testing method and application thereof |
| KR20210156411A (en) * | 2020-06-18 | 2021-12-27 | 울산과학기술원 | Method and apparatus to measure dielectric permittivity using te01 mode in circular waveguide |
| KR102346239B1 (en) * | 2020-06-18 | 2022-01-04 | 울산과학기술원 | Method and apparatus to measure dielectric permittivity using te01 mode in circular waveguide |
| CN113945764A (en) * | 2021-10-15 | 2022-01-18 | 中国人民解放军国防科技大学 | System and method for measuring dielectric constant of substance under composite field condition |
| CN113945764B (en) * | 2021-10-15 | 2023-11-21 | 中国人民解放军国防科技大学 | System and method for measuring dielectric constant of substance under composite field condition |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109212322B (en) | 2020-03-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109212322A (en) | A kind of method of Multifunctional rectangular chamber perturbation method detection nano thin-film complex permittivity | |
| US6472885B1 (en) | Method and apparatus for measuring and characterizing the frequency dependent electrical properties of dielectric materials | |
| Wei et al. | Technique for measuring the frequency‐dependent complex dielectric constants of liquids up to 20 GHz | |
| Spengler et al. | Micro-fabricated Helmholtz coil featuring disposable microfluidic sample inserts for applications in nuclear magnetic resonance | |
| Sorocki et al. | Broadband microwave microfluidic coupled-line sensor with 3-D-printed channel for industrial applications | |
| CN112505429B (en) | Complex dielectric constant test system and test method based on coaxial strip line resonator | |
| Hasar | A new calibration-independent method for complex permittivity extraction of solid dielectric materials | |
| Cui et al. | The design and operation of ultra-sensitive and tunable radio-frequency interferometers | |
| US9464994B2 (en) | High sensitivity tunable radio frequency sensors | |
| CN109030955A (en) | A kind of portable fluid dielectric constant measurement system based on SIW | |
| CN106018973B (en) | A kind of micro-strip test nano thin-film Micro-wave low-noise transistor device | |
| CN110082605A (en) | A kind of liquid crystal dielectric constant measuring apparatus based on the resonance method | |
| WO2002065127A9 (en) | A system and method for characterizing the permittivity of molecular events | |
| CN108872266B (en) | Miniature three-layer magnetic coupling microwave sensor for measuring dielectric constant | |
| Liu et al. | Dual-band microwave sensor based on planar rectangular cavity loaded with pairs of improved resonator for differential sensing applications | |
| AU3642993A (en) | Apparatus for determining the physical and/or chemical properties of a sample, particularly of blood | |
| CN205786867U (en) | A kind of nano thin-film Micro-wave low-noise transistor test device | |
| CN110133377A (en) | For measuring the difference microwave remote sensor of magnetic media material dielectric constant and magnetic conductivity | |
| CN110398636A (en) | Liquid dielectric Sensors & Application based on miniaturization medium resonator antenna | |
| CN207908584U (en) | Microfluid dielectric property detection device based on coplanar waveguide transmission line | |
| CN110133376A (en) | For measuring the microwave remote sensor of magnetic media material dielectric constant and magnetic conductivity | |
| Ye et al. | An ultrahigh-sensitivity dual-mode microwave sensor for microfluidic applications | |
| Hasar | Permittivity measurement of thin dielectric materials from reflection-only measurements using one-port vector network analyzers | |
| Goldfarb et al. | Method for measuring complex permeability at radio frequencies | |
| CN108279332A (en) | Fluid dielectric constant microwave measuring device based on microchannel |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200324 Termination date: 20211031 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |