CN109187726A - The femtosecond laser of light splitting afterwards pupil differential confocal Raman-LIBS- mass spectrometry detection processes monitoring method - Google Patents
The femtosecond laser of light splitting afterwards pupil differential confocal Raman-LIBS- mass spectrometry detection processes monitoring method Download PDFInfo
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Abstract
The present invention relates to a kind of femtosecond lasers of light splitting afterwards pupil differential confocal Raman-LIBS- mass spectrometry detection to process monitoring method, belongs to laser accurate detection technique, femtosecond laser processing monitoring technical field.It can be used for femtosecond laser processing and on-line monitoring and physical property comprehensive parameters on-line checking.The present invention organically blends postposition light splitting pupil laser differential confocal axial direction monitoring modular with femtosecond laser system of processing, carries out high accuracy in-situ on-line monitoring to sample axial position using postposition light splitting pupil differential confocal system and sample axial direction processing dimension measures；Analysis is monitored to information such as molecular structure, element and the ions of specimen material after femtosecond laser processing using Raman spectroscopic detection module, LIBS spectrographic detection module and mass spectrograph, and above- mentioned information are merged by computer, it realizes that the high-precision processing of fine structure femtosecond laser is integrated with the monitoring analysis of microcell form performance in-situ, improves controllability and processing quality of sample of fine structure femtosecond laser machining accuracy etc..
Description
Technical field
The present invention relates to a kind of femtosecond lasers of light splitting afterwards pupil differential confocal Raman-LIBS- mass spectrometry detection to process monitoring side
Method, in particular to light splitting afterwards pupil differential confocal Raman-LIBS- mass spectrometry detection femtosecond laser processing monitoring integration method with
Device, belongs to laser accurate detection technique, femtosecond laser processing monitoring technical field, and the femtosecond that can be used for complicated fine structure swashs
Light processing and form performance synthesis parameter original position on-line checking.
Background technique
Femtosecond laser is processed since wide with adaptability for materials, processing fineness is high, processing is not necessarily to the remarkable advantages such as mask,
And the century property technology for being considered as " may cause the new industrial revolution " is concerned, and by as macro-micro- across scale minute manufacturing
Preferred means obtain the worlds such as China, the U.S. and respectively manufacture first developing for big country.
Femtosecond laser processing is exactly the nonlinear effect using laser and material, in the nanometer ruler for surmounting optical diffraction limit
Make material that forming occur and become second nature on degree, change and regulation while essence is material shape and performance parameter, thus, we
The transient change state for only monitoring material shape in process, performance parameter simultaneously, it is non-could really to disclose femtosecond laser
The mechanism of action and its Evolution linearly processed.
There is also non-linear processing to make object lens axial feeding can not accurate counter sample axial direction for femtosecond laser processing at present
This significant bottleneck problem of removal amount, but it is existing based on the axially monitoring, backscattering coherent tomographic of triangle Optical displacement sensor
The methods of monitoring and optical coherence tomography monitoring, resolution capability are micron or sub-micrometer scale, such as Canadian Queens University
On-line monitoring technique research, but its direction x-y-z are carried out using interference imaging method (OCT) with German brother's Dettingen Laser Experiments room
Monitoring resolution capability only up to micron dimension.As it can be seen that femtosecond process unit due to being restricted by existing monitoring technology, still lacks high
The in-situ monitoring means of performance, this just makes generally existing based on processing, long time-consuming femtosecond laser process equipment: non-linear to go
It removes, axial remove is not allowed；Long time-consuming drift, keeps system of processing unstable；It is unstable point processing, make process scale less etc. general character
Problem.It is inaccurate that it has its source in system of processing axial direction fixed-focus, and then constrains femtosecond laser in across scale key element micro-nano system
Make the application of aspect.
In addition, Material Processing is different in femtosecond laser process, the mechanism of action of femtosecond pulse and substance is not
Together, the form that sample generates in process and performance change difference；Under the action of pulse laser, the molecular structure of sample,
Element ratio and charged ion etc. can change, and how carry out to the physical parameter and morphological parameters of sample after processing is completed
Accurate detection is not only to guarantee the key of machining accuracy and research femtosecond laser processing mechanism, promotes processing technology level
Important prerequisite.
It can be seen that there is an urgent need to study shape in femtosecond laser processing with the rapid development of femtosecond laser processing technology
The in-situ monitoring means of state performance parameter.
In the detection of form performance parameter, it is based on the confocal laser Raman spectroscopic detection skill of Raman (Raman) scattering effect
Art, since the information such as intensity, position, displacement, ratio, halfwidth of detection sample raman microspectroscopy spectrum spectral peak can be passed through, to survey
The parameters such as material domain component, stress, temperature are obtained, and by the important means as form performance parameter test in femtosecond laser
It is obtained into the off-line monitorings such as photoinduced strain, crystal crystalline state, variations in refractive index, carrier density, state of temperature, the ingredient of processing
Function application, but the processing of existing femtosecond laser still lacks the integrated in-situ monitoring hand of femtosecond laser processing form performance parameter
Section, while Raman spectrum form performance detection method cannot also reflect the form performance parameter of processed sample completely, it is necessary to it borrows
Other means are helped, as LIBS (Laser-induced breakdown spectroscopy) spectrum and mass spectrum are micro- to detect sample
The complete information of area's material composition.
In conclusion in existing femtosecond laser processing accurately fixed-focus and alignment can not be carried out to sample, it can not be to processing
In sample morphology performance parameter carry out high-precision in-situ monitoring, result limit femtosecond laser processing effect stability and
Across scale working ability also constrains the raising of femtosecond laser processing mechanism research and processing technology level.
For this purpose, present invention proposition creatively incorporates laser light splitting afterwards pupil differential confocal in femtosecond laser system of processing
Raman-LIBS- mass spectrometry detection technology, to realize femtosecond laser processing in form performance parameter integrated in-situ monitoring, be
Femtosecond laser process form performance parameter integration in-situ monitoring provide new tool, promoted femtosecond laser processing precision property and
Macro-micro- across scale working ability etc..
Summary of the invention
The purpose of the present invention is to solve samples in femtosecond laser processing to be also easy to produce axial drift and after processing is completed sample
The problems such as product complex shape state performance parameter in situ detection, the present invention propose that light splitting afterwards pupil differential confocal Raman-LIBS- mass spectrum is visited
The femtosecond laser processing monitoring method and device of survey realize the axial drift in sample processing procedure, inclined high spatial divides
Distinguish on-line monitoring and the nanoscale monitoring of sample structure axial dimension, it is ensured that the accurate real-time fixed-focus of sample in process,
And the comprehensive detection of sample micro-raman spectra structure after processing is completed and complicated physical parameter is realized, for the anti-of femtosecond laser processing
Feedback amendment, mechanism study and process modification provide technical foundation, improve the controllability of laser processing precision and adding for sample
Working medium amount.
The purpose of the present invention is what is be achieved through the following technical solutions.
Of the invention, fine structure processing is carried out to sample using femtosecond laser system of processing, is swashed using postposition light splitting pupil
Light differential confocal axial direction monitoring modular monitors sample surfaces axial position in sample surface morphology profile, processing in real time,
And the geometric parameter of sample surfaces after processing is detected, using Raman spectroscopic detection module to sample after femtosecond laser processing
The molecule structure change of material is tested and analyzed, using LIBS spectrographic detection module to the atom of material, small molecule and element
Information is tested and analyzed, and is tested and analyzed using ion information of the mass spectrograph to material, is carried out fusion to above- mentioned information and is obtained
Sample microcell form and physical property comprehensive parameters are obtained, and then realize the processing of fine structure femtosecond laser high-precision and microcell form performance
In-situ monitoring analysis integration, improves the controllability of fine structure femtosecond laser machining accuracy and the processing quality of sample；
The femtosecond laser processing monitoring method of light splitting afterwards pupil differential confocal Raman-LIBS- mass spectrometry detection includes following step
It is rapid:
Step 1: sample is placed on precision stage, sample is driven to be scanned movement by precision stage, after utilization
It sets light splitting pupil differential confocal axial direction monitoring modular and measurement is scanned to the surface profile of sample, and its measurement feedback is given
Computer, the adjustment for femtosecond laser system of processing to processing control parameter；
Wherein, postposition light splitting pupil differential confocal axial direction monitoring modular by laser, beam expander, reflecting mirror, detection object lens, point
Pupil differential detection module composition, the axial collimated light beam that monitors is after dichroscope A reflection, dichroscope B transmission, into object lens
And be focused on sample, after the reflection axial direction monitoring light beam of sample reflection is split mirror reflection, by postposition pupil, detection
Converged on dual-quadrant detector after object lens, hot spot enlarging objective, in dual-quadrant detector image planes first detection quadrant and
The signal progress of second detection quadrant detection is differential to subtract each other to obtain light splitting pupil differential confocal curve；
Zero crossing position according to light splitting pupil differential confocal curve carries out nanoscale monitoring to the axial defocusing position of sample；
Step 2: processing system using the femtosecond laser that femto-second laser, laser space-time Shaping Module, two-dimensional scanner are constituted
System carries out micro-nano structure processing to sample, utilizes postposition light splitting pupil differential confocal axial direction monitoring modular to processed in process
The axial position of sample surfaces is monitored in journey；According to axial direction of the zero crossing position to sample for being divided pupil differential confocal curve
Position carries out nanoscale monitoring；
Step 3: axial position of the computer according to measurement result adjustment sample, adjusts the position of precision stage in real time,
Realize the accurate fixed-focus of sample in process；
Step 4: after processing is completed, using postposition light splitting pupil differential confocal axial direction monitoring modular to sample after processing is completed
Product structure is scanned measurement, realizes the nano high-precision in situ detection of sample morphology parameter after processing；
Step 5: axial monitoring collimated light beam focuses on sample through object lens, raman scattering spectrum is inspired, spectrum warp
It is detected through dichroscope C by Raman spectroscopic detection module after dichroscope B reflection, to the molecular structural parameter of sample after processing
Carry out in situ detection analysis, wherein Raman detection module is made of Raman-Coupled mirror and Raman spectroscopy detector；
Step 6: pulsed light beam focuses on sample through object lens, inspire plasma plume, part plasma by from
Sub- suction pipe is detected by mass spectrograph, carries out in situ detection analysis to the charged ion of sample after processing；Plasma plume buries in oblivion sending
LIBS spectrum, which is reflected again by dichroscope C after dichroscope B reflection, is detected by LIBS spectrographic detection module, right
The atom of sample, small molecule and element information carry out in situ detection analysis after processing；
Step 7: detecting quadrant and the second detection quadrant, Raman spectroscopy detector, LIBS by the first of dual-quadrant detector
Spectral detector and mass spectrograph, which detect to obtain signal and be transmitted to computer, carries out information fusion, the microcell of the sample after being processed
Form and performance synthesis parameter, and according to the sample physical property in the microcell form of sample and performance synthesis Parameter analysis process
Effect after changing rule and processing is modulated processing laser beam to by laser space-time Shaping Module, improves micro-nano
Controllability and the processing quality of sample of structure femtosecond laser machining accuracy etc..
The femtosecond laser of light splitting afterwards pupil differential confocal Raman-LIBS- mass spectrometry detection of the present invention processes monitoring side
Method can also carry out coarse alignment to sample using micro-imaging module；The light that white light source issues is divided through lighting system, illumination
After mirror, dichroscope B, object lens on uniform irradiation to sample, the light returned through sample is imaged saturating after illumination spectroscope reflection
Mirror is imaged on CCD, can determine whether inclination and the position of sample.
The femtosecond laser of light splitting afterwards pupil differential confocal Raman-LIBS- mass spectrometry detection of the present invention processes monitoring side
Method, the processing laser beam and axial monitoring collimated light beam that femtosecond laser system of processing issues coaxially are coupled to sample table through object lens
The processing and detection of micro-nano structure are realized in face respectively.
The femtosecond laser of light splitting afterwards pupil differential confocal Raman-LIBS- mass spectrometry detection of the invention processes monitoring device, packet
Femto-second laser, laser space-time Shaping Module and two-dimensional scanner positioned at femto-second laser exit direction are included, is swashed positioned at femtosecond
Dichroscope A, spectroscope A, object lens and the precision stage of light device outgoing beam vertical direction are located at dichroscope A and reflect
The postposition light splitting pupil differential confocal axial direction monitoring modular in direction and dichroscope C, Raman spectrum positioned at spectroscope A reflection direction
Detecting module, positioned at the LIBS spectrographic detection module of dichroscope C reflection direction, ion suction pipe and mass spectrum positioned at sample side
Instrument, object lens are driven by axial scan device；Being divided pupil differential confocal axial direction monitoring modular includes laser, is located at laser emitting side
To beam expander, spectroscope A and positioned at the light splitting pupil differential detection module of spectroscope A reflection direction；Wherein axial monitoring is parallel
Light beam and processing laser beam are coaxially incident on sample surfaces through dichroscope A, object lens.
The femtosecond laser processing monitoring dress of light splitting afterwards pupil differential confocal Raman-LIBS- mass spectrometry detection of the present invention
It sets, light splitting pupil differential detection module can be made of hot spot enlarging objective and dual-quadrant detector, and wherein dual-quadrant detector detects
The first detection quadrant and the second detection quadrant on face is symmetrical about optical axis；
The femtosecond laser processing monitoring dress of light splitting afterwards pupil differential confocal Raman-LIBS- mass spectrometry detection of the present invention
It sets, the dual-quadrant detector being divided in pupil differential detection module can be detected CCD replacement, wherein the first search coverage and second
Search coverage is located in the image planes of detection CCD, and symmetrical about optical axis.
The femtosecond laser processing monitoring dress of light splitting afterwards pupil differential confocal Raman-LIBS- mass spectrometry detection of the present invention
It sets, laser space-time Shaping Module can be made of spacing shaping device, temporal shaping device, be carried out to the laser beam that femto-second laser issues
The combined regulating of time domain and airspace parameter improves femtosecond femtosecond laser working ability.
The femtosecond laser processing monitoring dress of light splitting afterwards pupil differential confocal Raman-LIBS- mass spectrometry detection of the present invention
Set, sample can also be observed using micro-imaging module, wherein micro-imaging module by white light source, lighting system,
Illuminate spectroscope, image-forming objective lens, CCD composition.White light source issue light through lighting system, illumination spectroscope, dichroscope B,
After object lens on uniform irradiation to sample, the light returned through sample is imaged on CCD after illumination spectroscope reflection through imaging len.
Beneficial effect
The method of the present invention, which compares prior art, has following innovative point:
1) pupil differential confocal axial direction monitoring technology is divided using postposition, improves the axial position monitoring energy in process
Power and axial dimension detectability solve the problems, such as fixed-focus when the drifting problem and high-precision real in femtosecond laser process,
This is one of innovative point of the invention；
2) pupil differential confocal axial direction nanoscale monitoring technology is divided using postposition, improves the Effective Numerical hole of illuminating bundle
Diameter ensure that detection imaging space resolving power, solve the high-space resolution problem on line detection of femtosecond laser processed sample, this
It is the two of innovative point of the invention；
3) postposition is divided pupil differential confocal system, the light beam of femtosecond laser system of processing is coupled to sample through same object lens
Product realize the online position monitoring of sample and axial dimension detection in micro-nano structure process, improve process
Controllability and processing quality, this is the three of innovative point of the invention；
The method of the present invention, which compares prior art, has following distinguishing feature:
1. processing skill using the postposition light splitting pupil differential confocal technology and femtosecond laser with long working distance and high resolution
Art combines, and realizes the on-line monitoring of the sample axial defocusing position in process, solves the sample in process
Drifting problem improves the controllability of process；
2. using light splitting pupil differential confocal curve zero crossing carry out sample axial position monitoring, make femtosecond laser beam with
Minimum focal beam spot focus on sample surfaces, it can be achieved that sample high-precision micro-nano technology；
3. the imaging transverse resolving power for having combined sample using postposition light splitting pupil differential confocal technology and monitoring are axially
Resolving power improves the high-space resolution imaging after the precision in process is axially monitored and processed.
4. being combined using confocal laser Raman spectrum, LIBS spectrum and mass spectrometry detection technology, realize to the sample after processing
The in-situ monitoring and analysis of product microcell form and the variation of physical property comprehensive parameters, improve processing technology level and processing quality can
Control property.
5. the group of specimen material after being processed using confocal Raman spectra, LIBS spectrum and mass spectrometry detection technology to femtosecond laser
Molecular structure, element information and ionic structure variation carry out in-situ monitoring, can improve existing femtosecond laser process；
6. sample is imaged the slant correction, it can be achieved that sample position using micro-imaging technique, improve processed
Position regulated efficiency in journey.
Detailed description of the invention
Fig. 1 is that the femtosecond laser of light splitting afterwards pupil differential confocal Raman-LIBS- mass spectrometry detection of the present invention processes monitoring method
Schematic diagram；
Fig. 2 is that the femtosecond laser of light splitting afterwards pupil differential confocal Raman-LIBS- mass spectrometry detection of the present invention processes monitoring method
With schematic device；
Fig. 3 is that the femtosecond laser of light splitting afterwards pupil differential confocal Raman-LIBS- mass spectrometry detection of the present invention processes monitoring method
With schematic device；
Fig. 4 is that the femtosecond laser of light splitting afterwards pupil differential confocal Raman-LIBS- mass spectrometry detection of the present invention processes monitoring method
Schematic diagram；
Fig. 5 is that the femtosecond laser of light splitting afterwards pupil differential confocal Raman-LIBS- mass spectrometry detection of the present invention processes monitoring method
With schematic device；
Fig. 6 is that the femtosecond laser of light splitting afterwards pupil differential confocal Raman-LIBS- mass spectrometry detection of the present invention processes monitoring method
With schematic device.
Wherein: 1- postposition is divided pupil differential confocal axial direction monitoring modular, 2- laser, 3- beam expander, 4-, and axially monitoring is flat
After row light beam, 5- dichroscope A, 6- dichroscope B, 7- object lens, 8- axial scan device, 9- sample, 10- precision stage, 11-
Set pupil, 12- spectroscope A, 13- detection object lens, 14- light splitting pupil differential detection module, 15- femto-second laser, 16- laser space-time
Shaping Module, 17- processing laser beam, 18- two-dimensional scanner, 19- hot spot enlarging objective, 20- dual-quadrant detector, 21- the
One detection quadrant, 22- second detect quadrant, 23- is divided pupil differential confocal curve, 24- Raman-Coupled lens, 25- Raman spectrum
Detector, 26- Raman spectroscopic detection module, 27-LIBS coupled lens, 28-LIBS spectral detector, 29-LIBS spectrographic detection
Module, 30- plasma plume, 31- ion suction pipe, 32- mass spectrograph, 33- computer, 34- dichroscope C, 35- detection CCD,
It is white that 36- detects hot spot, the first search coverage of 37-, the second search coverage of 38-, 39- spacing shaping device, 40- temporal shaping device, 41-
Radiant, 42- lighting system, 43- micro-imaging module, 44- illuminate spectroscope, 45- spectroscope B, 46- imaging len, 47-
CCD。
Specific embodiment
Present invention will be further explained below with reference to the attached drawings and examples.
The basic idea of the invention is that: long working distance, the high postposition light splitting pupil laser differential confocal axially differentiated is axial
Monitoring modular organically blends with femtosecond laser system of processing, using light splitting pupil differential confocal curve zero point to sample axial defocusing position
It sets and carries out nanoscale monitoring, the axial fixed-focus in real time of sample and axial position monitoring solve the axis in femtosecond laser process
To drift and the problems such as on-line checking, and utilize the Raman spectrum progress sample molecule structure detection of continuous laser excitation, utilization
The plasma plume that pulse laser excites sample to generate carries out mass spectrometry detection and obtains sample charged particle and molecular weight information, and receives
The LIBS spectrum that collection detection plasma buries in oblivion generation obtains the small molecule and element information of sample, is obtained by the fusion of information
The microcell form and performance synthesis parameter of sample are realized comprehensive monitoring and the analysis of the effect processed to femtosecond laser, are improved
Controllability and the processing quality of sample of micro-nano structure femtosecond laser machining accuracy etc..It can also be merged in above system micro-
Image-forming module carries out coarse alignment to sample using micro-imaging module.
Embodiment 1
Such as Fig. 1, the surface location of the preceding sample 9 of 1 pair of pupil differential confocal axial direction monitoring modular processing is divided using postposition and is added
The axial position of sample 9 is monitored during work, and computer 33 is to two-dimensional scanner 18, precision stage 10, axial scan
Device 8 carries out feedback control, realizes and adjusts to the processing of sample 9 with the 3-D scanning and position monitored；Femtosecond laser system of processing by
Femto-second laser 15, laser space-time Shaping Module 16, two-dimensional scanner 18 are constituted.
Light splitting pupil differential detection device 14 is made of hot spot enlarging objective 19 and dual-quadrant detector 20.Light splitting afterwards pupil is differential total
The femtosecond laser processing monitoring method implementation steps of burnt Raman-LIBS- mass spectrometry detection are as follows:
1) sample 9 is placed on precision stage 10, drives sample 9 to be scanned movement by precision stage 10；
2) before processing, survey is scanned to the surface of sample 9 using postposition light splitting pupil differential confocal axial direction monitoring modular 1
Amount；Axial monitoring collimated light beam 4 is focused on sample 9 by object lens 7, is passed through after dichroscope A5 reflection, dichroscope B6 transmission
Axially monitoring light beam is received by postposition light splitting pupil differential confocal axial direction monitoring modular 1 for the reflection that sample 9 reflects；Wherein, postposition point
Pupil differential confocal axial direction monitoring modular 1 is by laser 2, beam expander 3, spectroscope 12, detection object lens 13, light splitting pupil differential detection
Device 14 forms；Axial monitoring collimated light beam 4 focuses on sample by object lens 7 after dichroscope A5 reflection, dichroscope B6 transmission
On 9, axially monitoring light beam is split after the reflection of mirror 12 for the reflection reflected through sample 9, by postposition pupil 11, detection object lens
13, it is converged on dual-quadrant detector 20 after hot spot enlarging objective 19, to the first detection on 20 test surface of dual-quadrant detector
Quadrant 21 and the second obtained signal of detection quadrant 22 are handled, any light splitting pupil differential confocal letter of 9 surface of sample is obtained
Number；
3) axial scanner 8 is controlled by computer 33 and axial scan is carried out to sample 9, obtain the difference with actual zero point
Dynamic confocal curves 23；
4) nanoscale prison is carried out to the axial position of sample 9 according to the zero crossing position of light splitting pupil differential confocal curve 23
It surveys, computer 33 is adjusted the processing control parameter of femtosecond laser system of processing according to measurement result；
5) the processing laser beam 17 modulated through laser space-time Shaping Module 16 is through dichroscope A5, dichroscope B6 and object
The surface that mirror 7 focuses on sample 9 laser machines sample 9, and the scanning machining of film micro area controls two dimension by computer 33 and sweeps
Retouch the completion of device 18；
6) in process, postposition is divided pupil differential confocal axial direction monitoring modular 1 to the axial position of sample 9 in process
It sets and is monitored；
7) computer 33 controls precision stage 10, according to the postposition light splitting feedback of pupil differential confocal axial direction monitoring modular 1
Monitoring result is adjusted 9 position of sample, realizes the accurate fixed-focus of sample in process, eliminates the shadow of sample drift
It rings；
8) axial scanner 18 is controlled by computer 33 and precision stage 10 is scanned sample 9, processed
Sample micro-nano structure axial dimension afterwards realizes the nanoscale detection of 9 axial dimension of sample；By Raman spectroscopic detection module 26,
The performances ginseng such as molecular structure, atom, small molecule and element of sample after LIBS spectral detector 28 and the acquisition processing of mass spectrograph 32
Number, and then realize the high accuracy in-situ detection of 9 form performance parameter of sample after processing；
9) according in the microcell form of sample and performance synthesis Parameter analysis process sample physical property changing rule and
Effect after detection processing, is modulated to by 16 pairs of processing laser beams 17 of laser space-time Shaping Module, improves micro-nano knot
The controllability of structure femtosecond laser machining accuracy and the processing quality of sample.
Embodiment 2
As shown in Fig. 2, light splitting pupil differential detection device 14 is by hot spot enlarging objective 19 and detection CCD35, the first search coverage
37 and second search coverage 38 constitute, wherein the first search coverage 37 and the second search coverage 38 are located at the image planes of detection CCD35
It is upper and symmetrical about optical axis；Using postposition light splitting pupil differential confocal axial direction monitoring modular 1 to the axial direction of sample 9 in process
When position and axial dimension are monitored, the axial collimated light beam 4 that monitors is reflected through dichroscope A5, after dichroscope B6 transmission,
It is focused on sample 9 by object lens 7, axially monitoring light beam is split after the reflection of mirror 12 for the reflection reflected through sample 9, by postposition light
It is converged on detection CCD35 after pupil 11, detection object lens 13, hot spot enlarging objective 19, to the first detection in detection CCD35 image planes
The signal that region 37 and the second search coverage 38 obtain is handled, obtain 9 surface of sample any light splitting pupil differential confocal letter
Number.
Remaining step is same as Example 1.
Embodiment 3
As shown in figure 3, laser space-time Shaping Module 16 is made of spacing shaping device 39 and temporal shaping device 40, femtosecond is swashed
The light beam that light device 15 issues carries out the adjustment of time domain and airspace parameter respectively, keeps femtosecond laser processing performance best.
Remaining is same as Example 1.
Embodiment 4
As shown in figure 4, before processing, after sample 9 is placed in precision stage 10, using micro-imaging module 43 to sample
9 carry out coarse alignment, and the light that white light source 41 issues is raw after lighting system 42, illumination spectroscope 44, dichroscope B6, object lens 7
At the illumination light that on collimated light beam uniform irradiation to sample 9, sample 9 is scattered through imaging len 46 after illumination spectroscope 44 reflects
It is imaged on CCD47, position and the imaging region of sample 9 can be obtained, and then can determine whether inclination and the position of sample 9.
Remaining is same as Example 1.
Embodiment 5
As shown in figure 5, before processing, after sample 9 is placed in precision stage 10, using micro-imaging module 43 to sample
9 carry out coarse alignment, and the light that white light source 41 issues is raw after lighting system 42, illumination spectroscope 44, dichroscope B6, object lens 7
At the illumination light that on collimated light beam uniform irradiation to sample 9, sample 9 is scattered through imaging len 46 after illumination spectroscope 44 reflects
It is imaged on CCD47, position and the imaging region of sample 9 can be obtained, and then can determine whether inclination and the position of sample 9.
Remaining is same as Example 2.
Embodiment 6
As shown in fig. 6, laser space-time Shaping Module 16 is made of spacing shaping device 39 and temporal shaping device 40, femtosecond is swashed
The light beam that light device 15 issues carries out the adjustment of time domain and airspace parameter respectively, keeps femtosecond laser processing performance best.
Before processing, after sample 9 being placed in precision stage 10, it is thick right to be carried out using micro-imaging module 43 to sample 9
Standard, the light that white light source 41 issues generate collimated light beam after lighting system 42, illumination spectroscope 44, dichroscope B6, object lens 7
On uniform irradiation to sample 9, the illumination light that sample 9 scatters is imaged onto after illumination spectroscope 44 reflects through imaging len 46
On CCD47, position and the imaging region of sample 9 can be obtained, and then can determine whether inclination and the position of sample 9.
Remaining is same as Example 2.
A specific embodiment of the invention is described in conjunction with attached drawing above, but these explanations cannot be understood to limit
The scope of the present invention, protection scope of the present invention are limited by appended claims, any in the claims in the present invention base
Change on plinth is all protection scope of the present invention.
Claims (8)
1. the femtosecond laser of light splitting afterwards pupil differential confocal Raman-LIBS- mass spectrometry detection processes monitoring method, it is characterised in that: benefit
Fine structure processing is carried out to sample with femtosecond laser system of processing, axially monitors mould using postposition light splitting pupil laser differential confocal
Block monitors sample surfaces axial position in sample surface morphology profile, processing in real time, and to sample surfaces after processing
Geometric parameter is detected, using Raman spectroscopic detection module to femtosecond laser processing after specimen material molecule structure change into
Row tests and analyzes, and is tested and analyzed using LIBS spectrographic detection module to the atom of material, small molecule and element information, utilizes
Mass spectrograph tests and analyzes the ion information of material, carries out fusion acquisition sample microcell form to above- mentioned information and physical property is comprehensive
Parameter is closed, and then realizes that the high-precision processing of fine structure femtosecond laser is integrated with the monitoring analysis of microcell form performance in-situ, is mentioned
The controllability of high fine structure femtosecond laser machining accuracy and the processing quality of sample；
The following steps are included:
Step 1: sample (9) is placed on precision stage (10), sample (9) are driven to be scanned by precision stage (10)
Movement is scanned measurement to the surface profile of sample (9) using postposition light splitting pupil differential confocal axial direction monitoring modular (1), and
Give its measurement feedback to computer (33), the adjustment for femtosecond laser system of processing to processing control parameter；
Wherein, postposition light splitting pupil differential confocal axial direction monitoring modular (1) by laser (2), beam expander (3), postposition pupil (11),
Spectroscope A (12), detection object lens (13) and light splitting pupil differential detection module (14) composition；Be divided pupil differential detection module (14) by
Hot spot enlarging objective (19) and dual-quadrant detector (20) composition；Axial monitoring collimated light beam (4) is reflected through dichroscope A (5),
Then it after dichroscope B (6) transmission, into object lens (7) and is focused on sample (9), the axis of reflection reflected through sample (9)
After being split mirror A (12) reflection to monitoring light beam, successively by postposition pupil (11), detection object lens (13) and hot spot enlarging objective
(19) it is converged to after on dual-quadrant detector (20), to the first detection quadrant (21) and the in dual-quadrant detector (20) image planes
The signal progress of two detection quadrant (22) detections is differential to subtract each other to obtain light splitting pupil differential confocal curve (23)；
Zero crossing position according to light splitting pupil differential confocal curve (23) carries out nanoscale prison to the axial defocusing position of sample (9)
It surveys；
Step 2: the femtosecond constituted using femto-second laser (15), laser space-time Shaping Module (16) and two-dimensional scanner (18)
Laser-processing system carries out micro-nano structure processing to sample (9), is axially supervised in process using postposition light splitting pupil differential confocal
Module (1) is surveyed to be monitored the axial position on sample in process (9) surface；According to light splitting pupil differential confocal curve (23)
Zero crossing position nanoscale monitoring is carried out to the axial position of sample (9)；
Step 3: axial position of the computer (33) according to measurement result adjustment sample (9) of step 2 nanoscale monitoring, in real time
The position of precision stage (10) is adjusted, realizes the accurate fixed-focus of sample in process；
Step 4: after processing is completed, using light splitting pupil differential confocal axial direction monitoring modular (1) to sample structure after processing is completed
It is scanned measurement, realizes the nano high-precision in situ detection of sample (9) morphological parameters after processing；
Step 5: axial monitoring collimated light beam (4) focuses on sample (9) through object lens (7), raman scattering spectrum is inspired, institute
Raman scattering spectrum is stated to be visited through dichroscope C (34) by Raman spectroscopic detection module (26) after dichroscope B (6) reflection
It surveys, Raman spectroscopic detection module (26) carries out in situ detection analysis to the molecular structural parameter of sample after processing；The Raman light
Spectrum detecting module (26) is made of Raman-Coupled lens (24) and Raman spectroscopy detector (25)；
Step 6: pulsed light beam focuses on sample (9) through object lens (7), plasma plume (30), part plasma are inspired
It is detected by ion suction pipe (31) by mass spectrograph (32), in situ detection analysis is carried out to the charged ion of sample after processing；Deng from
Daughter plumage (30), which is buried in oblivion, issues LIBS spectrum, and the LIBS spectrum is after dichroscope B (6) are reflected again by dichroscope C
(34) it reflects, is detected by LIBS spectrographic detection module (29), the atom of sample, small molecule and element information after processing are carried out former
Position tests and analyzes；LIBS spectrographic detection module (29) includes LIBS coupled lens (27) and LIBS spectral detector (28)；
Step 7: detecting quadrant (21) and the second detection quadrant (22), Raman spectrum spy by the first of dual-quadrant detector (20)
Survey device (25), LIBS spectral detector (28) and mass spectrograph (32) detection obtain signal be transmitted to computer (33) progress information melt
It closes, the microcell form and performance synthesis parameter of the sample after being processed, and is joined according to the microcell form and performance synthesis of sample
Sample physical property changing rule in number analysis process and the effect after processing；By laser space-time Shaping Module (16) to adding
Work laser beam (17) is modulated, and improves the controllability of micro-nano structure femtosecond laser machining accuracy and the processing quality of sample.
2. the femtosecond laser of light splitting afterwards pupil differential confocal Raman-LIBS- mass spectrometry detection according to claim 1 processes prison
Survey method, it is characterised in that: further include micro-imaging module (43), sample (9) are carried out using micro-imaging module (43) thick
Alignment；The light that white light source (41) issues successively passes through lighting system (42), illumination spectroscope (44), dichroscope B (6) and object
Mirror (7) is afterwards on uniform irradiation to sample (9), and the light that sample (9) returns is through illumination spectroscope (44) reflection and spectroscope B (45)
It is imaged on CCD (47) after transmission through imaging len (46), is capable of inclination and the position of judgement sample (9).
3. the femtosecond laser of light splitting afterwards pupil differential confocal Raman-LIBS- mass spectrometry detection according to claim 1 processes prison
Survey method, it is characterised in that: the processing laser beam (17) and axial monitoring collimated light beam (4) that femtosecond laser system of processing issues
Coaxially it is coupled to sample (9) surface through object lens (7), realizes the processing and detection of micro-nano structure respectively.
4. the femtosecond laser of light splitting afterwards pupil differential confocal Raman-LIBS- mass spectrometry detection processes monitoring device, it is characterised in that: packet
The laser space-time Shaping Module (16) and two-dimensional scanner for including femto-second laser (15), being located at femto-second laser (15) exit direction
(18), it is located at the dichroscope A (5), spectroscope A (12), object lens (7) and essence of femto-second laser (15) outgoing beam vertical direction
Close workbench (10) is located at postposition light splitting pupil differential confocal axial direction monitoring modular (1) and position of dichroscope A (5) reflection direction
It is anti-to be located at dichroscope C (34) by dichroscope C (34), Raman spectroscopic detection module (26) in spectroscope A (12) reflection direction
The LIBS spectrographic detection module (29) in direction is penetrated, the ion suction pipe (31) and mass spectrograph (32) of sample (9) side, object lens are located at
(7) it is driven by axial scan device (8)；Being divided pupil differential confocal axial direction monitoring modular (1) includes laser (2), is located at laser
(2) beam expander (3), spectroscope A (12) of exit direction and the light splitting pupil differential detection mould positioned at spectroscope A (12) reflection direction
Block (14)；Wherein, axial monitoring collimated light beam (4) and processing laser beam (17) coaxially enter through dichroscope A (5), object lens (7)
It is mapped to sample (9) surface.
5. the femtosecond laser of light splitting afterwards pupil differential confocal Raman-LIBS- mass spectrometry detection according to claim 4 processes prison
Survey device, it is characterised in that: light splitting pupil differential detection module (14) includes hot spot enlarging objective (19) and dual-quadrant detector
(20), wherein the first detection quadrant (21) on dual-quadrant detector (20) test surface and second detects quadrant (22) about optical axis
Symmetrically.
6. the femtosecond laser of light splitting afterwards pupil differential confocal Raman-LIBS- mass spectrometry detection according to claim 4 processes prison
Survey device, it is characterised in that: the dual-quadrant detector (20) in light splitting pupil differential detection module (14) can be detected CCD (35)
Instead of wherein the first search coverage (37) and the second search coverage (38) are located in the image planes of detection CCD (35), and about optical axis
Symmetrically.
7. the femtosecond laser of light splitting afterwards pupil differential confocal Raman-LIBS- mass spectrometry detection according to claim 4 processes prison
Survey device, it is characterised in that: laser space-time Shaping Module (16) may include spacing shaping device (39), temporal shaping device (40), right
The laser beam that femto-second laser (15) issues carries out the combined regulating of time domain and airspace parameter, improves femtosecond laser working ability.
8. the femtosecond laser of light splitting afterwards pupil differential confocal Raman-LIBS- mass spectrometry detection according to claim 4 processes prison
Survey device, it is characterised in that: can also observe using micro-imaging module (43) sample (9), wherein micro-imaging mould
Block (43) is made of white light source (41), lighting system (42), illumination spectroscope (44), image-forming objective lens (46), CCD (47)；It is white
The light that radiant (41) issues uniformly shines after lighting system (42), illumination spectroscope (44), dichroscope B (6), object lens (7)
It is mapped on sample (9), the light returned through sample (9) is imaged onto CCD through imaging len (46) after illumination spectroscope (44) reflection
(47) on.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022042166A1 (en) * | 2020-08-27 | 2022-03-03 | 伊诺福科光学技术有限公司 | Laser processing system having optical diffraction tomography function |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5804813A (en) * | 1996-06-06 | 1998-09-08 | National Science Council Of Republic Of China | Differential confocal microscopy |
| CN104677885A (en) * | 2015-03-17 | 2015-06-03 | 北京理工大学 | High-spatial-resolution laser differential confocal spectrum-mass spectrum microscopic imaging method and device |
| CN105136750A (en) * | 2015-07-17 | 2015-12-09 | 北京理工大学 | Laser differential confocal LIBS, Raman spectrum-mass spectrum imaging method and Raman spectrum-mass spectrum imaging device |
| CN108286936A (en) * | 2017-04-18 | 2018-07-17 | 北京理工大学 | Laser micro/nano processes differential confocal on-line monitoring integral method and device |
| CN108413867A (en) * | 2017-04-18 | 2018-08-17 | 北京理工大学 | Laser micro/nano processing light splitting pupil differential confocal on-line monitoring integral method and device |
-
2018
- 2018-11-13 CN CN201811344425.9A patent/CN109187726A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5804813A (en) * | 1996-06-06 | 1998-09-08 | National Science Council Of Republic Of China | Differential confocal microscopy |
| CN104677885A (en) * | 2015-03-17 | 2015-06-03 | 北京理工大学 | High-spatial-resolution laser differential confocal spectrum-mass spectrum microscopic imaging method and device |
| CN105136750A (en) * | 2015-07-17 | 2015-12-09 | 北京理工大学 | Laser differential confocal LIBS, Raman spectrum-mass spectrum imaging method and Raman spectrum-mass spectrum imaging device |
| CN108286936A (en) * | 2017-04-18 | 2018-07-17 | 北京理工大学 | Laser micro/nano processes differential confocal on-line monitoring integral method and device |
| CN108413867A (en) * | 2017-04-18 | 2018-08-17 | 北京理工大学 | Laser micro/nano processing light splitting pupil differential confocal on-line monitoring integral method and device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022042166A1 (en) * | 2020-08-27 | 2022-03-03 | 伊诺福科光学技术有限公司 | Laser processing system having optical diffraction tomography function |
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