CN109187429A - Infrarefraction rate sensor in a kind of fast tunable based on Double-layered strip graphene periodic array structure - Google Patents
Infrarefraction rate sensor in a kind of fast tunable based on Double-layered strip graphene periodic array structure Download PDFInfo
- Publication number
- CN109187429A CN109187429A CN201811077579.6A CN201811077579A CN109187429A CN 109187429 A CN109187429 A CN 109187429A CN 201811077579 A CN201811077579 A CN 201811077579A CN 109187429 A CN109187429 A CN 109187429A
- Authority
- CN
- China
- Prior art keywords
- periodic array
- band
- array structure
- graphene
- graphene periodic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Infrarefraction rate sensor in a kind of fast tunable based on Double-layered strip graphene periodic array structure, belongs to sensor structure design field.The middle infrarefraction rate sensor includes metallic substrate layer, dielectric layer, band-like graphene periodic array structure and two strip metal electrodes；It is provided with dielectric layer above the metallic substrate layer, band-like graphene periodic array structure is provided with above the dielectric layer, the both ends of the band-like graphene periodic array structure are each provided with a strip metal electrode；The band-like graphene periodic array structure is the double-layer structure being formed by stacking by the band-like graphene periodic array of two single layers.The invention has the advantages that middle infrarefraction rate sensor of the invention have the advantages that structure it is simple, it is small in size, be easily integrated, the harmonious high sensitivity of service band fast tunable, bioengineering, environmental monitoring, by prohibit illicit drugs inspection and explosive material identification etc. fields have wide practical use.
Description
Technical field
The invention belongs to sensor structure design fields, and in particular to one kind is based on Double-layered strip graphene period battle array
Infrarefraction rate sensor in the fast tunable of array structure.
Background technique
It is usually that 0.760 μm ~ 1000 μm this wave spectrum sections call infrared spectrum wave-length coverage in electromagnetic spectrum
Area, wherein again be divided into near-infrared (0.76 μm ~ 2.5 μm), in infrared (2.5 μm ~ 25 μm) and far infrared (25 μm ~ 1000 μ
M).In it is infrared be otherwise known as thermal infrared or transmitting it is infrared, which is applied to biomolecule extensively, environmental monitoring, is banned taking addictive drugs
The detection and identification of the substance classes such as product and explosive material, therefore the sensing in middle infrared band designed for identification substance classes
Device is of great significance.Under normal circumstances, detected biochemical has the light refraction for being different from other substances
Rate, therefore can achieve the purpose that differentiate substance classes indirectly by the method for detecting material refractive index.Traditionally, refraction is utilized
Rate variation causes the rule of variation that can visit voltage, temperature, external force, the amplitude of electromagnetic wave, phase, the physical parameters such as polarization state
Material refractive index is surveyed, but since the transducer sensitivity of these mechanism is lower, is not able to satisfy the requirement of highly sensitive sensing.Closely
Several years, although being based on nanowire structure (nanowire), crystal waveguide structure (crystals waveguide), method promise resonance
The index sensor of (Fano resonance) Meta Materials improves the sensitivity of traditional sensors, but these static structures
Working sensor wave band fix, limit the type of detected object to a certain extent.In order to realize that service band dynamic can
The sensor of tune is published in entitled Compliant metamaterials on ACS nano magazine for 2011
The article of resonantly enhanced infrared absorption spectroscopy and RI sensing proposes
Meta Materials sensor based on stretchable substrate, the dynamic for realizing service band is adjustable, but this sensor structure is complicated,
It is longer to regulate and control the time.As that studies grapheme material deepens continuously, the index sensor based on automatically controlled single-layer graphene
Also it is devised, has the advantages that service band dynamic is adjustable, but the quality factor of single-layer graphene formant is lower, leads
Cause the sensitivity of sensor not high.In order to meet to biochemical, such as DNA, by prohibition of drug product and explosive material it is accurate,
Quickly detection and identification, we be badly in need of a kind of structure be simply easily integrated, service band fast tunable and with higher sensitivity folding
Penetrate rate sensor.
Summary of the invention
The purpose of the present invention is to solve existing index sensor, structure is complicated, service band is fixed and sensitivity
Low problem provides infrarefraction rate sensing in a kind of fast tunable based on Double-layered strip graphene periodic array structure
Device is judged the difference of detected object refractive index using the variation of its absorption spectrum, simplifies cellular construction, improve sensor
Sensitivity, realize the dynamic fast tunable of service band.
To achieve the above object, the technical solution adopted by the present invention is as follows:
Infrarefraction rate sensor in a kind of fast tunable based on Double-layered strip graphene periodic array structure, it is described in it is red
Outer index sensor includes metallic substrate layer, dielectric layer, band-like graphene periodic array structure and two strip metal electrodes；
It is provided with dielectric layer above the metallic substrate layer, band-like graphene periodic array structure, institute are provided with above the dielectric layer
The both ends for stating band-like graphene periodic array structure are each provided with a strip metal electrode；The band-like graphene periodic array
Structure is the double-layer structure being formed by stacking by the band-like graphene periodic array of two single layers.
The beneficial effect of the present invention compared with the existing technology is: middle infrarefraction rate sensing of the invention has structure letter
It is single, small in size, be easily integrated, the harmonious high sensitivity of service band fast tunable (3.18 μm/RIU) the advantages of, solve certain
Chemical substance specific band there are problems that interfere absorption peak, the present invention bioengineering, environmental monitoring, by prohibit illicit drugs inspection
Have wide practical use with fields such as explosive material identifications.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of sensor of the present invention, wherein 1- metallic substrate layer, 2- dielectric layer, the band-like stone of 3-
Black alkene periodic array structure, 4- strip metal electrode；
Fig. 2 is in the embodiment of the present invention 1 there is different refractivity to be detected the corresponding absorption spectrum simulation result diagram of substance；
Fig. 3 is that peak position is absorbed in the embodiment of the present invention 1 with the variation simulation result diagram of detected material refractive index；
Fig. 4 is to realize the adjustable service band map of dynamic by additional different voltages in the embodiment of the present invention 1.
Specific embodiment
Further description of the technical solution of the present invention with reference to the accompanying drawings and examples, and however, it is not limited to this,
All to be modified to technical solution of the present invention or equivalent replacement, range without departing from the spirit of the technical scheme of the invention should all
Cover within the protection scope of the present invention.
The present invention passes through, and two layers of band-like graphene periodic array superposition, the geometric parameter for optimizing micro-structure and selection is suitable
Dielectric layer material, realize that structure is simple, is easily integrated, the middle infrarefraction rate of service band fast tunable, high sensitivity
The design of sensor.It is because it supports the plasmon resonance of higher quality using Double-layered strip graphene periodic array structure
Mode, can be in the peak value and biggish absorption peak of resonant position generation narrowband, these are characterized in what sensor realization precisely sensed
Essential condition.It needs detected object being spin-coated on Double-layered strip graphene periodic array knot when index sensor of the present invention works
Structure surface selects service band then to measure by regulation voltage, its working principle is that visiting when incident electromagnetic wave penetrates
When survey object is incident on sensor microstructure, positioned at graphene surface there is the detected substance of different refractivity will affect bilayer zone
Shape graphene periodic array body structure surface excites plasmon resonance, to influence the redistribution of electromagnetic field.Due to sensor
Bottom is lighttight metal layer material, therefore most of electromagnetic energy at resonant frequency can be absorbed, and pass through absorption in this way
Spectrum is to observe its resonant wavelength position, to judge the refractive index of detected substance, achievees the purpose that identify substance classes.According to
The spectral signature of the specific requirements of detection and detected object can select the operating wave of sensor by way of adjusting voltage
Section, the absorption peak to avoid interference are realized to the accurate sensor measuring of many kinds of substance.
Specific embodiment 1: present embodiment record is a kind of based on Double-layered strip graphene periodic array structure
Infrarefraction rate sensor in fast tunable, the middle infrarefraction rate sensor include metallic substrate layer 1, dielectric layer 2, band
Shape graphene periodic array structure 3 and two strip metal electrodes 4；The metallic substrate layer 1 is provided with dielectric layer 2, institute above
It states dielectric layer 2 and is provided with band-like graphene periodic array structure 3, the both ends of the band-like graphene periodic array structure 3 above
It is each provided with a strip metal electrode 4；The band-like graphene periodic array structure 3 is by two single layers band-like graphene week
The double-layer structure that phase array is formed by stacking.The present invention by control metallic substrate layer 1 and strip metal electrode 4 between voltage into
And regulate and control its operating wavelength range.
Specific embodiment 2: one kind described in specific embodiment one is based on Double-layered strip graphene periodic array structure
Fast tunable in infrarefraction rate sensor, the width of the band-like graphene periodic array structure 3 is adjacent with two to be set
The spacing between band-like graphene periodic array structure 3 set is equal, is the half in structural unit period.One band-like graphene
Spacing between the band-like graphene periodic array structure 3 adjacent thereto of periodic array structure 3 is known as a structural unit.Specifically
A kind of embodiment three: fast tunable based on Double-layered strip graphene periodic array structure described in specific embodiment one
Middle infrarefraction rate sensor, the dielectric layer 2 are one of silica, magnesium fluoride, calcirm-fluoride or aluminum oxide,
The material of the metallic substrate layer 1 and strip metal electrode 4 is gold or silver.Index sensor of the present invention is visited when working
The surface that object is attached to Double-layered strip graphene periodic array structure 3 is surveyed, detected substance will affect graphene surface excitation
Plasmon resonance mode, to influence the redistribution of electromagnetic field；The variation of detected material refractive index causes sensor to be inhaled
It receives the mobile characteristic in peak and carrys out work, therefore peak position is absorbed to judge the type of detected object by observation graphene.In the folding
It penetrates in rate sensor, the adjustable Double-layered strip graphene of the voltage being applied between metallic substrate layer 1 and strip metal electrode 4
Fermi level, thus realize quickly adjust sensor service band.Embodiment 1:
Referring to Fig.1, metallic substrate layer 1 and strip metal electrode 4 select gold in the present invention, and the dielectric layer 2 selects 300 nm thick
Aluminum oxide, the width of Double-layered strip graphene periodic array structure 3 is 50 nm, and the period of structural unit is 100 nm,
Apply voltage between metallic substrate layer 1 and strip metal electrode 4, by the fermi level of graphene be transferred to respectively 0.25 eV and
0.4 eV realizes quick selection of the working sensor wave band between 5.6 μm ~ 7.8 μm and 7.4 μm ~ 9.9 μm.
Embodiment 2:
Referring to Fig.1, metallic substrate layer 1 and strip metal electrode 4 select gold in the present invention, and the dielectric layer 2 selects 349 nm thick
Magnesium fluoride, the width of Double-layered strip graphene periodic array structure 3 is 40 nm, and the period of structural unit is 80 nm, in gold
Belong to and apply voltage between basal layer 1 and strip metal electrode 4, to realize the quick regulation of working sensor wave band.
Embodiment 3:
Referring to Fig.1, metallic substrate layer 1 and strip metal structure 4 select silver in the present invention, and the dielectric layer 2 selects 330 nm
Thick calcirm-fluoride, the width of Double-layered strip graphene periodic array structure 3 are 60 nm, and the period of structural unit is 120 nm, in gold
Belong to and apply voltage between basal layer 1 and strip metal electrode 4, to realize the quick regulation of working sensor wave band.
Effect of the invention can be further illustrated by simulation result:
Fig. 2 is the present invention to the corresponding absorption simulation result diagram of different refractivity detecting material in embodiment 1.With detected object
The absorption peak of the increase of matter refractive index, the sensor is mobile to longer wave band.Position by observing absorption peak judges to be visited
Survey the refractive index of object.
Fig. 3 gives in the embodiment of the present invention 1 absorption peak spectral position with the curve graph of detecting material variations in refractive index.Spirit
Sensitivity refers to certain method to response quautity variation degree caused by unit concentration or the variation of unit quantity test substance, it can use instrument
Response quautity or the ratio between other indicatrixs and the concentration of corresponding test substance or amount describe.In order to measure inventive sensor
Sensitivity, Fig. 3 has been fitted absorption peak with the curve of variations in refractive index, obtained the i.e. unit variations in refractive index of the slope of curve and caused
Absorption peak position movement (λ/n), the high sensitivity of infrarefraction rate sensor is up to 3.18 μm/RIU in the present invention.
Fig. 4 gives in the embodiment of the present invention 1 through the service band for the fast tunable for adding external voltage mode to realize.The hair
It is bright by changing the fermi level of graphene to the alive mode of graphene in transistorlike structure, to adjust sensor
Service band.When the fermi level of graphene is adjusted to 0.25 eV, the sensor detecting material refractive index (n=1 ~ 2)
Service band be 5.6 μm ~ 7.8 μm.When the fermi level of graphene is adjusted to 0.4 eV, sensor detecting material folding
The service band for penetrating rate (n=1 ~ 2) is 7.4 μm ~ 9.9 μm.
Claims (3)
1. infrarefraction rate sensor in a kind of fast tunable based on Double-layered strip graphene periodic array structure, feature
Be: the middle infrarefraction rate sensor includes metallic substrate layer (1), dielectric layer (2), band-like graphene periodic array structure
(3) and two strip metal electrodes (4)；The metallic substrate layer (1) is provided with dielectric layer (2) above, on the dielectric layer (2)
Face is provided with band-like graphene periodic array structure (3), and the both ends of the band-like graphene periodic array structure (3) are each provided with
One strip metal electrode (4)；The band-like graphene periodic array structure (3) is by the band-like graphene period battle array of two single layers
Arrange the double-layer structure being formed by stacking.
2. red in a kind of fast tunable based on Double-layered strip graphene periodic array structure according to claim 1
Outer index sensor, it is characterised in that: what the width of the band-like graphene periodic array structure (3) was disposed adjacent with two
Spacing between band-like graphene periodic array structure (3) is equal, is the half in structural unit period.
3. red in a kind of fast tunable based on Double-layered strip graphene periodic array structure according to claim 1
Outer index sensor, it is characterised in that: the dielectric layer (2) is silica, magnesium fluoride, calcirm-fluoride or aluminum oxide
One of, the material of the metallic substrate layer (1) and strip metal electrode (4) is gold or silver.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811077579.6A CN109187429A (en) | 2018-09-15 | 2018-09-15 | Infrarefraction rate sensor in a kind of fast tunable based on Double-layered strip graphene periodic array structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811077579.6A CN109187429A (en) | 2018-09-15 | 2018-09-15 | Infrarefraction rate sensor in a kind of fast tunable based on Double-layered strip graphene periodic array structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109187429A true CN109187429A (en) | 2019-01-11 |
Family
ID=64911561
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811077579.6A Pending CN109187429A (en) | 2018-09-15 | 2018-09-15 | Infrarefraction rate sensor in a kind of fast tunable based on Double-layered strip graphene periodic array structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109187429A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110174374A (en) * | 2019-06-28 | 2019-08-27 | 湖南师范大学 | A kind of SPR index sensor of infrared band |
| CN110244391A (en) * | 2019-05-14 | 2019-09-17 | 郑州大学 | Meta Materials and its application of phasmon induction transparent window switching effect can be realized based on graphene strips band structure |
| CN110376162A (en) * | 2019-07-16 | 2019-10-25 | 湖北工程学院 | A kind of graphene index sensor based on PIT effect |
| CN110609014A (en) * | 2019-09-09 | 2019-12-24 | 华南师范大学 | Refractive index sensor based on graphene metamaterial |
| CN111214237A (en) * | 2020-01-10 | 2020-06-02 | 厦门大学 | Broadband terahertz molecule fingerprint trace detection grating based on angle multiplexing |
| CN111335019A (en) * | 2020-03-06 | 2020-06-26 | 杭州高烯科技有限公司 | Intermediate infrared emission method based on graphene fibers |
| CN111521307A (en) * | 2020-05-25 | 2020-08-11 | 天津中德应用技术大学 | Graphene stress optical sensor based on plasmon resonance |
| CN114112933A (en) * | 2021-11-12 | 2022-03-01 | 西安邮电大学 | Dynamic adjustable ultra-narrow band chiral composite nanometer device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108110433A (en) * | 2017-11-22 | 2018-06-01 | 桂林电子科技大学 | Surpass the multi-functional THz polarization converters on surface based on graphene-metal mixed |
| CN207610988U (en) * | 2017-10-26 | 2018-07-13 | 中国计量大学 | Based on infrared highly sensitive electric tunable sensors in graphene |
| CN207850922U (en) * | 2018-03-01 | 2018-09-11 | 华南师范大学 | Surpass the tunable index sensor of surface texture based on graphene |
-
2018
- 2018-09-15 CN CN201811077579.6A patent/CN109187429A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN207610988U (en) * | 2017-10-26 | 2018-07-13 | 中国计量大学 | Based on infrared highly sensitive electric tunable sensors in graphene |
| CN108110433A (en) * | 2017-11-22 | 2018-06-01 | 桂林电子科技大学 | Surpass the multi-functional THz polarization converters on surface based on graphene-metal mixed |
| CN207850922U (en) * | 2018-03-01 | 2018-09-11 | 华南师范大学 | Surpass the tunable index sensor of surface texture based on graphene |
Non-Patent Citations (1)
| Title |
|---|
| NARESH KUMAR EMANI, ET AL: "Plasmon Resonance in Multilayer Graphene Nanoribbons", 《LASER & PHOTONICS REVIEWS》 * |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110244391A (en) * | 2019-05-14 | 2019-09-17 | 郑州大学 | Meta Materials and its application of phasmon induction transparent window switching effect can be realized based on graphene strips band structure |
| CN110244391B (en) * | 2019-05-14 | 2021-06-25 | 郑州大学 | Metamaterial capable of realizing plasmon induced transparent window switching effect based on graphene strip structure and application thereof |
| CN110174374A (en) * | 2019-06-28 | 2019-08-27 | 湖南师范大学 | A kind of SPR index sensor of infrared band |
| CN110376162A (en) * | 2019-07-16 | 2019-10-25 | 湖北工程学院 | A kind of graphene index sensor based on PIT effect |
| CN110609014A (en) * | 2019-09-09 | 2019-12-24 | 华南师范大学 | Refractive index sensor based on graphene metamaterial |
| CN111214237A (en) * | 2020-01-10 | 2020-06-02 | 厦门大学 | Broadband terahertz molecule fingerprint trace detection grating based on angle multiplexing |
| CN111335019A (en) * | 2020-03-06 | 2020-06-26 | 杭州高烯科技有限公司 | Intermediate infrared emission method based on graphene fibers |
| CN111335019B (en) * | 2020-03-06 | 2022-09-09 | 杭州高烯科技有限公司 | Intermediate infrared emission method based on graphene fibers |
| CN111521307A (en) * | 2020-05-25 | 2020-08-11 | 天津中德应用技术大学 | Graphene stress optical sensor based on plasmon resonance |
| CN114112933A (en) * | 2021-11-12 | 2022-03-01 | 西安邮电大学 | Dynamic adjustable ultra-narrow band chiral composite nanometer device |
| CN114112933B (en) * | 2021-11-12 | 2023-10-10 | 西安邮电大学 | Dynamic adjustable ultra-narrow band chiral composite nano device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109187429A (en) | Infrarefraction rate sensor in a kind of fast tunable based on Double-layered strip graphene periodic array structure | |
| Patel et al. | Encoding and tuning of THz metasurface-based refractive index sensor with behavior prediction using XGBoost Regressor | |
| EP3137880B1 (en) | Sensing methods and apparatus | |
| JP4481967B2 (en) | Sensor device | |
| Di Meo et al. | Metasurface based on cross-shaped plasmonic nanoantennas as chemical sensor for surface-enhanced infrared absorption spectroscopy | |
| CN103776790A (en) | Infrared spectrum enhancement and detection method and infrared spectrum enhancement and detection device based on graphene nano antenna | |
| CN103649718A (en) | Method of generating a metamaterial, and a metamaterial generated thereof | |
| CN107064078B (en) | Optical sensor based on BSW and optical detection method | |
| Kullab et al. | Transverse magnetic peak type metal-clad optical waveguide sensor | |
| Zhang et al. | Design and analysis of surface plasmon resonance sensor based on high-birefringent microstructured optical fiber | |
| Pathak et al. | A highly sensitive SPR refractive index sensor based on microfluidic channel assisted with graphene-Ag composite nanowire | |
| Sadrolhosseini et al. | Application of surface plasmon resonance based on a metal nanoparticle | |
| Bousiakou et al. | Surface enhanced Raman spectroscopy for molecular identification-A review on surface plasmon resonance (SPR) and localised surface plasmon resonance (LSPR) in optical nanobiosensing | |
| CN109100308A (en) | A kind of porous silicon biosensor and its design method based on Bloch surface wave | |
| Mortazavi et al. | Nano-plasmonic biosensors: A review | |
| Mao et al. | Probing composite vibrational fingerprints in the terahertz range with graphene split ring resonator | |
| Zhu et al. | Advancements in biosensing detection based on terahertz metasurfaces | |
| Mansouri et al. | Design and Numerical Simulation of a MoS2 Plasmonic Pressure Sensor Based on Surface Plasmon Resonance and Fabry–Perot Interferometer | |
| Dong et al. | Improved polarization contrast method for surface plasmon resonance imaging sensors by inert background gold film extinction | |
| Tong et al. | Protein secondary structure detection based on surface plasmon resonance of graphene nanowires | |
| KR101083605B1 (en) | Surface plasmon resonance sensor | |
| Moussilli et al. | Overview of fiber optic surface plasmon resonance biosensors for medical applications | |
| KR101396823B1 (en) | Localized surface plasmon resonance sensor | |
| Wu et al. | Research on the thermo-characteristics of surface plasmon resonance spectrum | |
| M’Bouana et al. | Optimization of gold square-shaped nanopillars arrays for high-efficiency optronics |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190111 |
|
| RJ01 | Rejection of invention patent application after publication |