CN110609014A - Refractive index sensor based on graphene metamaterial - Google Patents
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- CN110609014A CN110609014A CN201910849772.5A CN201910849772A CN110609014A CN 110609014 A CN110609014 A CN 110609014A CN 201910849772 A CN201910849772 A CN 201910849772A CN 110609014 A CN110609014 A CN 110609014A
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 107
- 229910021389 graphene Inorganic materials 0.000 title claims abstract description 107
- 239000002184 metal Substances 0.000 claims abstract description 21
- 229910052751 metal Inorganic materials 0.000 claims abstract description 21
- 239000002074 nanoribbon Substances 0.000 claims abstract description 21
- 239000000758 substrate Substances 0.000 claims abstract description 12
- 239000010410 layer Substances 0.000 claims description 39
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- 239000002356 single layer Substances 0.000 claims description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 3
- 239000002063 nanoring Substances 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 abstract description 9
- 239000000463 material Substances 0.000 description 11
- 238000000411 transmission spectrum Methods 0.000 description 7
- 230000008901 benefit Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 230000007547 defect Effects 0.000 description 4
- 230000010354 integration Effects 0.000 description 3
- 239000002127 nanobelt Substances 0.000 description 3
- 239000010970 precious metal Substances 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000012491 analyte Substances 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000012417 linear regression Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
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Abstract
The invention relates to a refractive index sensor based on a graphene metamaterial, which comprises a substrate layer, a graphene layer above the substrate layer, a metal electrode layer above the graphene layer and a surface electrode layer below the substrate layer; the graphene layer comprises a plurality of repeating units on a two-dimensional plane, and each repeating unit comprises a graphene nanoribbon and two graphene nanoopen rings; the metal electrode layer comprises a plurality of metal block electrodes, and each metal block electrode is arranged on one graphene nanoribbon or graphene nanoopen ring. The invention can be flexibly tuned and has high sensitivity.
Description
Technical Field
The invention relates to the technical field of micro-nano devices, in particular to a refractive index sensor based on a graphene metamaterial.
Background
The metamaterial structure is a periodic structure with sub-wavelength thickness, and realizing Fano resonance in the metamaterial structure is always an interested direction in the field of nano photonics. The metamaterial structure based on Fano resonance can remarkably improve the sensitivity of the traditional refractive index sensor. However, conventional metamaterial structures for realizing the fano resonance are mainly composed of metal. The conventional precious metal has large material absorption loss in a visible light wave band, the dielectric constant of the precious metal is difficult to regulate and control through external conditions, and researchers can only change the structural size of the metal to regulate the structural characteristics of the metal-based metamaterial, so that the development and potential application value of the precious metal are greatly limited. Therefore, finding suitable plasma materials for replacing noble metals has become one of the major problems for researchers.
Graphene is a novel two-dimensional material composed of a single layer of carbon atoms, and has unique properties such as high electron mobility, high optical transparency, high thermal conductivity, and the like, so that it has been widely used in high-performance optical device design. It is worth noting that under the condition that the Fermi level of the graphene is changed by applying an external bias voltage, the surface conductivity of the graphene has a wide adjustable characteristic, and therefore the graphene has great potential application value in the aspect of high-performance adjustable mid-infrared devices.
Based on the above, the introduction of graphene materials into the conventional metamaterial refractive index sensor has become a hot research point in recent years. The refractive index sensor based on the graphene metamaterial structure can realize flexible compatibility of devices by chemical doping and applying bias voltage without changing the geometrical structure of the metamaterial structure. However, the existing refractive index sensor with the graphene metamaterial structure has the defect of low sensitivity of refractive index sensing. Thus, there is a need for improvements and enhancements to the prior art.
Disclosure of Invention
In view of the above, there is a need to provide a refractive index sensor based on a graphene metamaterial, which has a nano-scale structure size, and has the advantages of miniaturization and easy integration. The tunable medium-infrared band can work in different bands according to needs, has the advantage of flexible tuning, works in a medium-infrared region and has higher sensitivity, and makes up the defects of the prior art in the medium-infrared band.
A graphene metamaterial-based refractive index sensor comprises a substrate layer, a graphene layer above the substrate layer, a metal electrode layer above the graphene layer, and a surface electrode layer below the substrate layer;
the graphene layer comprises a plurality of repeating units on a two-dimensional plane, and each repeating unit comprises a graphene nanoribbon and two graphene nanoopen rings;
the metal electrode layer comprises a plurality of metal block electrodes, and each metal block electrode is arranged on one graphene nanoribbon or graphene nanoopen ring.
The repeating unit is rectangular.
The rectangles of the repeating unit are 125nm in length and 66nm in width.
In each repeating unit, the structures of the graphene nanoribbon and the two graphene nanoopen rings are in an axisymmetric relationship with respect to the central axis of the rectangle.
The two graphene nanoopen rings are positioned on the same side of the graphene nanoribbon.
The length of the graphene nanoribbon is 85nm, and the width of the graphene nanoribbon is 6 nm; each graphene nano split ring is 29nm long, 25nm wide and 17nm wide; the distance between each graphene nano split ring and each graphene nano strip is 6 nm; the distance between the two graphene nano split rings is 5 nm.
The graphene nanoribbons and the graphene nanosplit rings are formed by stacking 5 layers of single-layer graphene.
The length and width of each metal block electrode are 3nm, and the thickness is 4 nm.
The basal layer is an alumina basal layer.
The surface electrode layer is a doped silicon layer with the doping concentration of 1018cm-3And the thickness is 10 nm.
The invention provides a novel tunable background refractive index sensor based on a graphene metamaterial structure. The background refractive index sensor has the structural size of nanometer magnitude, and has the characteristics of miniaturization and easy integration. Due to the use of the novel material graphene, the background refractive index can work in different wave bands according to requirements, and the novel material graphene has the advantage of being flexible and tunable. According to different measured objects, technicians can firstly apply external bias voltage to the graphene nanobelts and the graphene split rings to change the Fermi level of the graphene, select a proper resonance wavelength position of a resonance valley in a transmission spectrum, and then measure the refractive index of the measured objects. In addition, the background refractive index sensor works in a middle infrared region and has high sensitivity, and the defect of the prior art in a middle infrared band is overcome.
Drawings
FIG. 1 is a schematic structural diagram of a background refractive index sensor based on a graphene metamaterial structure;
FIG. 2 is a transmission spectrum of the background refractive index sensor at a background refractive index of 1 and a Fermi level of 0.9 eV;
FIG. 3 is a transmission spectrum of the background refractive index sensor at different background refractive indexes;
FIG. 4 is a graph of background refractive index versus the position of the background refractive index sensor resonant valleys 1 and 2;
fig. 5 is a transmission spectrum of the background refractive index sensor at different graphene fermi levels.
Detailed Description
The present invention will be described in further detail with reference to the following embodiments and accompanying drawings, but the invention is not limited thereto, and it should be noted that the specific embodiments described herein are only for explaining the present invention, and do not limit the present invention, and those skilled in the art can realize or understand the present invention with reference to the prior art unless specifically described below.
Example 1:
fig. 1 is a schematic structural diagram of a refractive index sensor based on a graphene metamaterial according to an embodiment of the present patent. The graphene nano-strip comprises metal electrodes 1,4 and 8, a graphene nano-strip 2, graphene nano open rings 3 and 7, an aluminum oxide layer 5 and a doped silicon layer 6.
The background refractive index sensor proposed by the patent is a periodic metamaterial structure with periods p in X and Y directionsx＝125nm,py66 nm. The refractive index sensor is composed of four layers, the uppermost layer is a metal block 1,4,8 used as an electrode, and the length and width L of the metal block3＝L43nm and 4nm thick. The second layer is composed of graphene nanorings 3 and 7 and graphene nanoribbons 2. In order to enhance the modulation depth, the graphene nano split ring and the graphene nano belt in the patent are stacked by 5 layers of single-layer grapheneAnd (4) stacking. The lengths of the graphene nanoribbons are respectively 85nm and 6nm, and the lengths and the widths of the graphene nanoopen rings are respectively L1＝29nm,L2The opening width of the split ring is G17 nm. The spacing of the graphene split rings is d15 nm. The distance between the graphene nanoribbon and the graphene split ring is d ═ 6 nm. The dashed line in the figure is the central axis of the metamaterial structural unit, about which the metamaterial structural unit is symmetrical. The material of the third layer is alumina, which serves as a substrate for the upper graphene material, and has a thickness of 40 nm. The fourth layer is a doped silicon layer with a doping concentration of 1018cm-3The thickness of the doped silicon layer was 10 nm. And the doped silicon and the uppermost metal block are used for providing an electrode of an external bias voltage for the graphene nanoribbon and the graphene open ring in the second layer.
Fig. 2 is a transmission spectrum of the background refractive index sensor according to this embodiment, when a plane wave with a polarization direction X enters the background refractive index sensor based on the graphene metamaterial structure, a graphene nanoribbon can be directly excited by incident light to become a bright mode, and a graphene open ring cannot be directly excited by incident light to become a dark mode. Due to the hybrid coupling between the bright and dark modes, the structure exhibits a Fano resonance phenomenon. By adjusting the fermi level of graphene to 0.9eV by applying an external bias voltage, when the background refractive index is 1, it can be observed that two resonance valleys 1 and 2 appear at 5.713 μm and 6.156 μm when incident light. The resonance peak appeared at 5.92 μm.
The performance of a background refractive index sensor can be measured by the refractive index sensitivity S. It is represented by the formula S ═ dλAnd/dn. Wherein d isλIndicating the wavelength shift of the resonance valley 1 or the resonance valley 2. dn represents the amount of change in the background refractive index.
FIG. 3 shows the transmittance spectra corresponding to different background refractive indexes in the examples. As the background refractive index increases from 1 to 1.3, the wavelengths of the resonant valleys 1, 2 and the resonant peak are all red-shifted. The transmittance of the resonance valley is slightly reduced, and the transmittance of the resonance peak is almost unchanged. By observing the resonance peak, the resonance wavelength position of the two resonance valleys can judge the refractive index of the analyte. Further, the method can be used for preparing a novel materialThe relationship of the two resonance valley positions with the refractive index changes of different analytes is collated, and figure 4 is obtained through a linear regression model. The results show that the two resonance valley positions vary quasi-linearly with the background refractive index. The correlation coefficient and the sensitivity of the linear fitting curve of the resonance valley 1 are respectivelyS1034 nm/RIU. The correlation coefficient and the sensitivity of the linear fitting curve of the resonance valley 2 are respectivelyS＝1013nm/RIU。
Example 2
The present embodiments provide a method of tunable background refractive index sensors for different operating bands.
FIG. 5 shows the Fermi level E of different graphene materials in the background refractive index sensor of this embodimentfTransmittance spectrum of (c). It can be observed that the resonance wavelength of the two resonance valleys red-shifts as the fermi level of the graphene increases from 0.5eV to 0.9 eV. Therefore, the Fermi levels of the graphene nanoribbon and the graphene split ring can be adjusted simultaneously by applying external bias voltage, the resonance wavelength position of the resonance valley moves, and after the resonance wavelength position of the proper resonance valley is selected, the background refractive index sensor is used for measuring different measured objects. The technical personnel can conveniently design background refractive index sensors with different working wave bands according to different measured object refractive indexes.
The invention provides a novel tunable background refractive index sensor based on a graphene metamaterial structure. The background refractive index sensor has the structural size of nanometer magnitude, and has the characteristics of miniaturization and easy integration. Due to the use of the novel material graphene, the background refractive index can work in different wave bands according to requirements, and the novel material graphene has the advantage of being flexible and tunable. According to different measured objects, technicians can firstly apply external bias voltage to the graphene nanobelts and the graphene split rings to change the Fermi level of the graphene, select a proper resonance wavelength position of a resonance valley in a transmission spectrum, and then measure the refractive index of the measured objects. In addition, the background refractive index sensor works in a middle infrared region and has high sensitivity, and the defect of the prior art in a middle infrared band is overcome.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the present invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (10)
1. The graphene metamaterial-based refractive index sensor is characterized by comprising a substrate layer, a graphene layer above the substrate layer, a metal electrode layer above the graphene layer and a surface electrode layer below the substrate layer;
the graphene layer comprises a plurality of repeating units on a two-dimensional plane, and each repeating unit comprises a graphene nanoribbon and two graphene nanoopen rings;
the metal electrode layer comprises a plurality of metal block electrodes, and each metal block electrode is arranged on one graphene nanoribbon or graphene nanoopen ring.
2. The graphene metamaterial-based refractive index sensor as claimed in claim 1, wherein the repeating units are rectangular.
3. The graphene metamaterial-based refractive index sensor as claimed in claim 2, wherein the repeating units have a rectangular shape with a length of 125nm and a width of 66 nm.
4. The graphene metamaterial-based refractive index sensor as claimed in claim 2 or 3, wherein in each of the repeating units, the structure of the graphene nanoribbon and the two graphene nanoopen rings is in an axisymmetric relationship with respect to a central axis of the rectangle.
5. The graphene metamaterial-based refractive index sensor as claimed in claim 4, wherein the two graphene nanorings are located on the same side of the graphene nanoribbon.
6. The graphene metamaterial-based refractive index sensor as claimed in claim 5, wherein the graphene nanoribbons are 85nm long and 6nm wide; each graphene nano split ring is 29nm long, 25nm wide and 17nm wide; the distance between each graphene nano split ring and each graphene nano strip is 6 nm; the distance between the two graphene nano split rings is 5 nm.
7. The graphene metamaterial-based refractive index sensor as claimed in claim 6, wherein the graphene nanoribbons and the graphene nanorings are each stacked of 5 layers of single-layer graphene.
8. The graphene metamaterial-based refractive index sensor as claimed in claim 1, wherein each of the metal block electrodes has a length and width of 3nm and a thickness of 4 nm.
9. The graphene metamaterial-based refractive index sensor as claimed in claim 1, wherein the substrate layer is an alumina substrate layer.
10. The graphene metamaterial-based refractive index sensor as claimed in claim 1, wherein the planar electrode layer is a doped silicon layer with a doping concentration of 1018cm-3And the thickness is 10 nm.
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20120327502A1 (en) * | 2011-06-24 | 2012-12-27 | Nikolay Ivanovich Zheludev | Tunable metamaterials and related devices |
| CN108390156A (en) * | 2018-01-11 | 2018-08-10 | 北京邮电大学 | The insensitive electromagnetically induced transparent devices of the adjustable polarized wave of Terahertz based on Meta Materials |
| CN207850922U (en) * | 2018-03-01 | 2018-09-11 | 华南师范大学 | Surpass the tunable index sensor of surface texture based on graphene |
| CN109187429A (en) * | 2018-09-15 | 2019-01-11 | 哈尔滨工业大学 | Infrarefraction rate sensor in a kind of fast tunable based on Double-layered strip graphene periodic array structure |
| CN109387954A (en) * | 2018-11-08 | 2019-02-26 | 华南师范大学 | A kind of material and method for realizing the transparent effect of class electromagnetically induced |
| CN210834661U (en) * | 2019-09-09 | 2020-06-23 | 华南师范大学 | Refractive index sensor based on graphene metamaterial |
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- 2019-09-09 CN CN201910849772.5A patent/CN110609014A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20120327502A1 (en) * | 2011-06-24 | 2012-12-27 | Nikolay Ivanovich Zheludev | Tunable metamaterials and related devices |
| CN108390156A (en) * | 2018-01-11 | 2018-08-10 | 北京邮电大学 | The insensitive electromagnetically induced transparent devices of the adjustable polarized wave of Terahertz based on Meta Materials |
| CN207850922U (en) * | 2018-03-01 | 2018-09-11 | 华南师范大学 | Surpass the tunable index sensor of surface texture based on graphene |
| CN109187429A (en) * | 2018-09-15 | 2019-01-11 | 哈尔滨工业大学 | Infrarefraction rate sensor in a kind of fast tunable based on Double-layered strip graphene periodic array structure |
| CN109387954A (en) * | 2018-11-08 | 2019-02-26 | 华南师范大学 | A kind of material and method for realizing the transparent effect of class electromagnetically induced |
| CN210834661U (en) * | 2019-09-09 | 2020-06-23 | 华南师范大学 | Refractive index sensor based on graphene metamaterial |
Non-Patent Citations (3)
| Title |
|---|
| QICHANG MA ET AL.: "Numerical and Theoretical Study of Tunable Plasmonically Induced Transparency Effect Based on Bright–Dark Mode Coupling in Graphene Metasurface", 《NANOMATERIALS》, vol. 10, pages 1 - 11 * |
| SOMAYYEH ASGARI ET AL.: "High-efficiency tunable plasmonically induced transparency-like effect in metasurfaces composed of graphene nano-rings and ribbon arrays and its application", 《APPLIED OPTICS》, vol. 58, no. 13, pages 3664 - 3668 * |
| XIANJUN WANG ET AL.: "Hybrid Metal Graphene-Based Tunable Plasmon-Induced Transparency in Terahertz Metasurface", 《NANOMATERIALS》, vol. 9, no. 3, pages 2 - 3 * |
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