CN109164050A - The super sensitive gas sensor of Fabry-perot optical fiber based on tungsten selenide thin film channel structure - Google Patents
The super sensitive gas sensor of Fabry-perot optical fiber based on tungsten selenide thin film channel structure Download PDFInfo
- Publication number
- CN109164050A CN109164050A CN201811131211.3A CN201811131211A CN109164050A CN 109164050 A CN109164050 A CN 109164050A CN 201811131211 A CN201811131211 A CN 201811131211A CN 109164050 A CN109164050 A CN 109164050A
- Authority
- CN
- China
- Prior art keywords
- optical fiber
- single mode
- tungsten selenide
- mode optical
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
- G01N2021/458—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods using interferential sensor, e.g. sensor fibre, possibly on optical waveguide
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention belongs to sensory fields, and in particular to the super sensitive gas sensor of Fabry-perot optical fiber based on tungsten selenide thin film channel structure.The present invention uses mature and stable sensing principle, in conjunction with the advanced technologies of optics, Meta Materials subject and micro-nano technology, tungsten selenide-gold conductive structures are integrated in single mode optical fiber end face, physical absorption and electric tunable characteristic by tungsten selenide, the absorption and release of gas molecule are realized by modulation tungsten selenide institute's making alive.The response speed and sensitivity of sensor are taken into account, the device size is small simultaneously, good thermal stability, it is smaller to sense power consumption: the response time of the sensor is only the one thousandth of electrochemical gas sensor, sensitivity senses power consumption down to 100 nanowatts up to 1000 times or more of traditional optical gas sensor.The sensor can be directly integrated in full photosystem, realize the high speed information sensing of all-optical network.
Description
Technical field
The invention belongs to sensory fields, and in particular to the super quick gas of Fabry-perot optical fiber based on tungsten selenide thin film channel structure passes
Sensor, can be by detecting the drift value of transmitted spectrum come the concentration of detection gas.
Background technique
With continuous improvement of people's living standards and to the pay attention to day by day of environmental protection, to various toxic, pernicious gas spies
It surveys, monitoring to atmosphere pollution, industrial waste gas and detection of food and habitation environment quality etc. all mentions gas sensor
Higher requirement is gone out.The successful application of the new material developments technology such as nanometer, thin film technique is that gas sensor is integrated and intelligence
Energyization provides good precondition.High performance gas sensor can greatly improve information collection, processing, deep processing water
It is flat, the accuracy of prediction accident in real time, constantly elimination accident potential are improved, the hair of accident especially major accident is greatly reduced
It is raw.The electronization that can effectively realize safety monitor and security production supervision and management becomes the passive disaster relief and takes precautions against natural calamities into active, makes to give birth to safely
It produces and is strided forward to scientific management.
Gas sensor mainly has electrochemical gas sensor and optical gas sensor at present.Traditional electrochemical gas
Sensor is typically all the sensing realized by the method for chemical electrolysis with electrolysis current strength to biochemical molecular, this gas
Although sensing mode comparative maturity is reliable, its disadvantage is also fairly obvious: dependent on chemical reaction, energy consumption is high, volume is big, system
Complexity, anti-electromagnetic interference capability is weak, has very strong gas-selectively, sensing sensitivity not high.And a collection of base developed in recent years
In the electric sensor of MEMOS technology, volume, energy consumption, in terms of although realize very big breakthrough, but still do not have
There is the problems such as solving its slow response speed, system complex, weak anti-electromagnetic interference capability.
Optical gas sensor based on optical fiber sensing technology can solve the disadvantage that above-mentioned electricity gas sensor substantially,
For traditional electrochemical gas sensor, with structure is simple, size is small, fast response time and anti-electromagnetism are dry
The advantages that disturbing.A kind of important means of the light sensing as acquisition of information, for miscellaneous information is converted into for extensive
The optical signal of transmission, quickly analysis and large scale processing, plays the part of emphatically in information system of the modern times using optical fiber as media transmission
The role wanted, a large amount of different principles, the optical sensor of different materials, different structure and different function be used for safety monitoring,
The all trades and professions such as environmental science, Precision Machining, aerospace and life science.However, current optical sensor is especially answered
For the optical sensor of gas analysis, structure is complicated, expensive mostly, it is difficult to realize the application of large-scale market.
Summary of the invention
For above-mentioned there are problem or deficiency, to solve, existing gas sensor is low in cost, structure is simple, size is micro-
It is small, controllability is good, high sensitivity and the problem of cannot getting both low in energy consumption, the present invention provides be based on tungsten selenide thin film channel structure
The super sensitive gas sensor of Fabry-perot optical fiber, by modulate selenizing W film voltage, realize the absorption and release of gas, Jin Ershi
Now the high sensitivity of extraneous minimum gas molecule is sensed.
Tungsten selenide is a kind of two-dimensional material similar to graphene, and there is superior surface-active and quick information to pass
Ability is passed, primary structure connects intermediate 1 layer of tungsten atom by each one layer of selenium atom up and down and formed.The chemical bond between atoms of tungsten selenide
Extremely sensitive to ambient enviroment with electron outside nucleus state, micro gas molecule absorption can effectively influence its dielectric constant, adjust
Effective refractive index is saved, realizes the optical gas sensing of unimolecule magnitude.Meanwhile Molecular Adsorption influences ten to the conductivity of tungsten selenide
Divide rapidly, can be realized the quick response of optical signalling, greatly improve response speed.
The present invention adopts the following technical scheme:
The super sensitive gas sensor of Fabry-perot optical fiber based on selenizing W film, including plated film single mode optical fiber, tungsten selenide-single-mode optics
Fine and quartz capillary.
The plated film single mode optical fiber has two, plates dielectric film for single mode optical fiber one end, is greater than in 1550 nano wavebands
The single mode optical fiber of 95% reflectivity；Dielectric film is silica, zirconium dioxide membrane is sequentially overlapped and deposits.
Tungsten selenide-the single mode optical fiber is coated with the single mode optical fiber of golden film for one end, is penetrated through with >=10 microns of channel width
The golden film of removal single mode optical fiber core segment is then inserted on selenizing W film so that golden film is divided into two sections, finally makes selenizing
After W film attaches to single mode optical fiber end face, tungsten selenide-gold conductive structures are formed with two sections of golden films.
Placed in the middle with tungsten selenide-single mode optical fiber, plated film single mode optical fiber is located at both ends, and mode of the plated film end face in is inserted into stone
In English capillary, quartz capillary had not only been used as Fa-Po cavity collimation, encapsulating structure, but also as gas microchannel.Wherein tungsten selenide-
The plated film end of single mode optical fiber is not contacted with corresponding dielectric film-single mode optical fiber plated film end, constitutes one 1~3 millimeter of air
The quartz capillary of gap, the air-gap part is equipped with airport, microchannel of the air-gap structure as gas molecule, two plated films
Single mode optical fiber mechanics amber microcavity.Beam path alignment between tungsten selenide-single mode optical fiber and two dielectric film-single mode optical fibers.
Further, the airport is two, and symmetrical is set on corresponding quartz capillary.
The course of work of the invention are as follows: scanning range is 1550 nanometers -1560 nanometers by general single mode fiber and is swept
It retouches in laser signal injection method amber microcavity, is formed and interfered in method amber resonant cavity interference region, it is 0 volt that extraneous bias voltage, which is arranged,
Spy, when ambient atmos molecule is intracavitary by microchannel on-flow method amber, when minimum gas molecule is attached on selenizing W film, selenium
The electron outside nucleus for changing tungsten is combined with gas molecule, is formed new " covalent bond ", this process change electricity on tungsten selenide surface
Son can be distributed (carrier concentration), and then change the conductivity of tungsten selenide, the final light refractive index for influencing tungsten selenide material.
And then passing through the interference of the Fa-Po cavity, the sensing of gas concentration, sensitivity are realized in the relevant interference frequency displacement of testing gas concentration
Reach 0.1ppb.Then, extraneous bias voltage is modulated to 5 volts, due to fuel factor, the gas point of absorption and tungsten selenide surface
Son completes release, which shows good restorability.
The present invention uses mature and stable sensing principle, in conjunction with the advanced technologies of optics, Meta Materials subject and micro-nano technology,
Tungsten selenide-gold conductive structures are integrated in the single mode optical fiber end face that diameter is only 125 microns, the physical absorption and electricity by tungsten selenide
Tunable characteristic realizes the absorption and release of gas molecule by modulation tungsten selenide institute's making alive.The response speed of sensor is taken into account
Degree and sensitivity, while the device size is small, good thermal stability, sensing power consumption is smaller: the response time of the sensor is only
For the one thousandth of electrochemical gas sensor, sensitivity senses function up to 1000 times or more of traditional optical gas sensor
It consumes down to 100 nanowatts.The sensor can be directly integrated in full photosystem, realize the high speed information sensing of all-optical network.
Detailed description of the invention
Fig. 1 is three dimensional structure diagram of the invention；
Fig. 2 is tungsten selenide of the invention-gold conductive structures three dimensional structure diagram；
Fig. 3 is embodiment test device figure；
Fig. 4 is the interference frequency displacement schematic diagram for implementing ratio sensor under different ammonia concentrations；
Fig. 5 is to implement the sensing restorability schematic diagram of ratio sensor in the case where ammonia concentration is 1ppb.
Appended drawing reference: single mode optical fiber -1, tungsten selenide-gold conductive structures -2, fibre core -3, air-gap -4, dielectric film -5, gold
Film -6, selenizing W film -7, scanning laser laser -8, method amber microcavity sensors -10, power supply -9, spectrometer -11.
Specific embodiment
The present invention is described in further detail with reference to the accompanying drawings and examples.
A kind of super sensitive gas sensor of Fabry-perot optical fiber based on tungsten selenide thin film channel structure, structure are as shown in Figure 1.It adopts
With mature and stable method Fabry-Parot interferent sensing principle, single mode optical fiber is 6 millimeters, and Fa-Po cavity is 1 centimetre long, is integrated in 125 microns of internal diameter
Quartz capillary in, realize polar gas molecular concentration interference sensing.
As shown in Figure 1, Figure 2, its ends cutting, sanding and polishing are had mirror surface rank using common single mode optical fiber
After surface flatness, in the method that its end face uses vacuum evaporation, 16 layers of silica, zirconium dioxide dielectric film (5) are deposited,
So that it is reached 97.188% reflectivity in 1550 nano wavebands, forms the single mode optical fiber (1) with high reflectance deielectric-coating.
The gold of one layer of 30 nanometer thickness of ion sputtering instrument splash is utilized using the single mode optical fiber that one section 6 millimeters long, both ends are cut flat with
Film (6), core segment (3) remove 10 microns of channel width of golden film, then insert it into and utilize liquid phase deposition preparation
On 30 layers of selenizing W film of 30 nano thickness, due to Van der Waals force, selenizing W film (7) is attached on fiber end face, and upper
Lower two sections of gold electrodes form conductive structures (2).6 millimeters long of tungsten selenide-gold conductive structures and both ends are coated with respectively high anti-
The single mode optical fiber for penetrating rate deielectric-coating is inserted into the quartz capillary that internal diameter is 125 microns, the high reflection of the former and wherein side
There are 1 millimeter of long air-gap (4), the symmetrical quartz capillaries being set at air-gap of two airports among deielectric-coating
On.Collimation and the encapsulation for completing optical path, realize the super sensitive gas sensor of Fabry-perot optical fiber based on tungsten selenide thin film channel structure
Assembling.
As shown in connection with fig. 3, it is swept what the scanning laser laser (8) that scanning range is 1550 nanometers -1560 nanometers exported
It retouches in laser signal injection method amber microcavity sensors (10), is formed and interfered in method amber resonant cavity interference region, set using power supply (9)
Setting extraneous bias voltage is 0 volt, and when ambient atmos molecule is intracavitary by microchannel on-flow method amber, minimum gas molecule is attached
When on selenizing W film, the electron outside nucleus of tungsten selenide is combined with gas molecule, forms new " covalent bond ", this process changes
The electronics for having become tungsten selenide surface can be distributed (carrier concentration), and then change the conductivity of tungsten selenide, finally influence selenizing
The light refractive index of tungsten material.And then pass through the interference of the Fa-Po cavity, it is relevant dry using spectrometer (11) testing gas concentration
Frequency displacement is related to, realizes the sensing of gas concentration, sensitivity reaches 0.1ppb.Then, extraneous bias voltage is modulated to 5 volts,
Due to fuel factor, the gas molecule on absorption and tungsten selenide surface is completed to discharge, which shows good restore
Property, single sensing is restorative to reach 99%.Fig. 4 has reacted under different ammonia concentrations, the interference frequency displacement of the present embodiment sensor
Variation characteristic.Fig. 5 has been reacted when ammonia concentration is 1ppb, and the sensing restorability of the present embodiment sensor is up to 99%.
To sum up, the present invention has taken into account the response speed and sensitivity of sensor, while size is small, and thermal stability is good
Good, sense small power consumption: its response time is only the one thousandth of electrochemical gas sensor, and sensitivity is up to traditional optical gas
1000 times or more of sensor sense power consumption down to 100 nanowatts；And it can be directly integrated in full photosystem, realize all-optical network
High speed information sensing.
Claims (3)
1. the super sensitive gas sensor of Fabry-perot optical fiber based on tungsten selenide thin film channel structure, including plated film single mode optical fiber, tungsten selenide-
Single mode optical fiber and quartz capillary, it is characterised in that:
The plated film single mode optical fiber has two, plates dielectric film for single mode optical fiber one end, and it is anti-to be greater than 95% in 1550 nano wavebands
Penetrate the single mode optical fiber of rate；
Tungsten selenide-the single mode optical fiber is coated with the single mode optical fiber of golden film for one end, penetrates through removal with >=10 microns of channel width
The golden film of single mode optical fiber core segment is then inserted on selenizing W film so that golden film is divided into two sections, finally makes tungsten selenide thin
After film attaches to single mode optical fiber end face, tungsten selenide-gold conductive structures are formed with two sections of golden films；
Placed in the middle with tungsten selenide-single mode optical fiber, plated film single mode optical fiber is located at both ends, and mode of the plated film end face in is inserted into quartz wool
In tubule, quartz capillary had not only been used as Fa-Po cavity collimation, encapsulating structure, but also as gas microchannel；Wherein tungsten selenide-single mode
The plated film end of optical fiber is not contacted with corresponding dielectric film-single mode optical fiber plated film end, constitutes one 1~3 millimeter of air-gap, should
The quartz capillary of air-gap part is equipped with airport, microchannel of the air-gap structure as gas molecule, two plated film single modes
Optical fiber mechanics amber microcavity；Beam path alignment between tungsten selenide-single mode optical fiber and two dielectric film-single mode optical fibers.
2. as described in claim 1 based on the super sensitive gas sensor of Fabry-perot optical fiber of tungsten selenide thin film channel structure, feature exists
In: the airport is two, and symmetrical is set on the quartz capillary of air-gap part.
3. as described in claim 1 based on the super sensitive gas sensor of Fabry-perot optical fiber of tungsten selenide thin film channel structure, feature exists
In: the dielectric film is silica, zirconium dioxide membrane is sequentially overlapped and deposits.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811131211.3A CN109164050B (en) | 2018-09-27 | 2018-09-27 | Optical fiber Fabry-Perot hypersensitive gas sensor based on tungsten selenide film channel structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811131211.3A CN109164050B (en) | 2018-09-27 | 2018-09-27 | Optical fiber Fabry-Perot hypersensitive gas sensor based on tungsten selenide film channel structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109164050A true CN109164050A (en) | 2019-01-08 |
| CN109164050B CN109164050B (en) | 2021-02-09 |
Family
ID=64892591
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811131211.3A Active CN109164050B (en) | 2018-09-27 | 2018-09-27 | Optical fiber Fabry-Perot hypersensitive gas sensor based on tungsten selenide film channel structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109164050B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109738112A (en) * | 2019-01-30 | 2019-05-10 | 中山大学 | A kind of pressure detection means based on nano-sensor |
| CN109900667A (en) * | 2019-03-15 | 2019-06-18 | 电子科技大学 | A kind of selectively super quick biochemical sensor of full optical fiber laser type |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101387608A (en) * | 2008-05-27 | 2009-03-18 | 重庆大学 | Ultralong Fabry-Parot interferent gas sensor and gas tester based on the sensor |
| CN105186271A (en) * | 2015-10-16 | 2015-12-23 | 深圳大学 | Transition metal sulfide saturable absorption mirror and mode locking fiber laser |
| CN106248602A (en) * | 2016-09-19 | 2016-12-21 | 电子科技大学 | Hydrogen sulfide gas sensing device based on optical fiber F P interferometer |
| CN205941335U (en) * | 2016-08-24 | 2017-02-08 | 马鞍山市安工大工业技术研究院有限公司 | High sensitivity's optic fibre EFPI sensor |
| CN106908389A (en) * | 2017-03-17 | 2017-06-30 | 哈尔滨翰奥科技有限公司 | Gas sensor and the method for detecting hydrogen fluoride gas change in concentration |
| CN206710289U (en) * | 2017-05-24 | 2017-12-05 | 中国计量大学 | A kind of hydrogen gas sensor based on F P interferometers non-sensitive to temperature |
| CN207051192U (en) * | 2017-04-21 | 2018-02-27 | 中国计量大学 | A kind of self-calibration device based on the double F P verniers amplification hydrogen gas sensors of optical fiber microcavity |
-
2018
- 2018-09-27 CN CN201811131211.3A patent/CN109164050B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101387608A (en) * | 2008-05-27 | 2009-03-18 | 重庆大学 | Ultralong Fabry-Parot interferent gas sensor and gas tester based on the sensor |
| CN105186271A (en) * | 2015-10-16 | 2015-12-23 | 深圳大学 | Transition metal sulfide saturable absorption mirror and mode locking fiber laser |
| CN205941335U (en) * | 2016-08-24 | 2017-02-08 | 马鞍山市安工大工业技术研究院有限公司 | High sensitivity's optic fibre EFPI sensor |
| CN106248602A (en) * | 2016-09-19 | 2016-12-21 | 电子科技大学 | Hydrogen sulfide gas sensing device based on optical fiber F P interferometer |
| CN106908389A (en) * | 2017-03-17 | 2017-06-30 | 哈尔滨翰奥科技有限公司 | Gas sensor and the method for detecting hydrogen fluoride gas change in concentration |
| CN207051192U (en) * | 2017-04-21 | 2018-02-27 | 中国计量大学 | A kind of self-calibration device based on the double F P verniers amplification hydrogen gas sensors of optical fiber microcavity |
| CN206710289U (en) * | 2017-05-24 | 2017-12-05 | 中国计量大学 | A kind of hydrogen gas sensor based on F P interferometers non-sensitive to temperature |
Non-Patent Citations (5)
| Title |
|---|
| BAICHENG YAO ET AL: "All-optical Mach–Zehnder on graphene/microfiber hybrid waveguideinterferometric NH3 gas sensor based", 《SENSORS AND ACTUATORS》 * |
| JIN TAO ET AL: "A Microfluidic-Based Fabry-Pérot Gas Sensor", 《MDPI》 * |
| KIM ET AL: "High finesse interferometric hydrogen sensor based on fiber-optic Fabry-Perot cavity modulations", 《PROCEEDINGS OF SPIE》 * |
| PINGGANG JIA ET AL: "Temperature-compensated fiber-optic Fabry–Perot interferometric gas refractive-index sensor based on hollow silica tube for highforhigh-temperature application", 《SENSORS AND ACTUATORS》 * |
| 陈伟民等: "光纤法布里－珀罗传感器研究进展", 《光学学报》 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109738112A (en) * | 2019-01-30 | 2019-05-10 | 中山大学 | A kind of pressure detection means based on nano-sensor |
| CN109738112B (en) * | 2019-01-30 | 2021-04-16 | 中山大学 | Pressure intensity detection device based on nano sensor |
| CN109900667A (en) * | 2019-03-15 | 2019-06-18 | 电子科技大学 | A kind of selectively super quick biochemical sensor of full optical fiber laser type |
| CN109900667B (en) * | 2019-03-15 | 2021-08-06 | 电子科技大学 | All-fiber laser type selective hypersensitivity biochemical sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109164050B (en) | 2021-02-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Liu et al. | Fiber-optic sensors based on Vernier effect | |
| CN109358038B (en) | Microstructure optical fiber surface plasma resonance multifunctional sensor and preparation method thereof | |
| Cheng et al. | Highly sensitive refractive index sensing based on photonic spin Hall effect and its application on cancer detection | |
| CN103776790A (en) | Infrared spectrum enhancement and detection method and infrared spectrum enhancement and detection device based on graphene nano antenna | |
| CN109164050A (en) | The super sensitive gas sensor of Fabry-perot optical fiber based on tungsten selenide thin film channel structure | |
| CN107478607A (en) | A kind of integrated biochemical sensor based on ridge optical waveguide | |
| CN104483498A (en) | Sensing chip and preparation method thereof | |
| CN109164051A (en) | A kind of Echo Wall Microsphere Cavities monomolecular gases sensor that graphene is embedded | |
| Wang et al. | High-sensitivity fiber salinity sensor based on an exposed-core microstructured fiber interferometer | |
| CN101813622B (en) | Optical-waveguide two-channel interferometer array | |
| CN110186875A (en) | Surface plasmon resonance optical-fiber type pH value measurement method and sensor | |
| CN102062729A (en) | Integrated structure of micro-ring cavity structure-based two-channel sensors and microfluidic channels and manufacture method of integrated structure | |
| CN110208220A (en) | A kind of multicore less fundamental mode optical fibre local surface plasma resonance sensor | |
| Alfaro-Mozaz et al. | Hyperspectral nanoimaging of van der Waals polaritonic crystals | |
| CN111239052A (en) | Photoelastic modulation polarization imaging biosensing system of double-period nanopore chip | |
| Yu et al. | An optical humidity sensor: A compact photonic chip integrated with artificial opal | |
| CN107966422B (en) | Hydrogen sensing microstructure based on surface plasmon resonance effect | |
| Liu et al. | Two-dimensional transition metal dichalcogenides-based high sensitivity lossy mode refractive index sensor | |
| Zhang et al. | The nanophotonic machinal cavity and its hydrogen sensing application | |
| CN110926666B (en) | Pressure sensing device based on surface plasmon polariton lattice resonance | |
| Wehrspohn et al. | Macroporous silicon and its application in sensing | |
| Chauhan et al. | Hydrothermally grown ZnO nanorods based optical fiber sensor for salinity detection | |
| Liu et al. | High-sensitive gas-mixture detection using localized surface plasmon resonance behavior in an optimized MDM array | |
| CN105973841B (en) | The index sensor of two-dimensional columns array photonic crystal and single mode optical fiber integrated morphology | |
| JP6401667B2 (en) | Optical sensor element |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CB03 | Change of inventor or designer information | ||
| CB03 | Change of inventor or designer information |
Inventor after: Yao Baicheng Inventor after: Yuan Zhongye Inventor after: Cao Zhongxu Inventor after: Wu Yu Inventor after: Rao Yunjiang Inventor before: Cao Zhongxu Inventor before: Yuan Zhongye Inventor before: Yao Baicheng Inventor before: Wu Yu Inventor before: Rao Yunjiang |