CN109139433B - Valve free pump is driven using the bubble of continuous heat source - Google Patents
Valve free pump is driven using the bubble of continuous heat source Download PDFInfo
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- CN109139433B CN109139433B CN201810941901.9A CN201810941901A CN109139433B CN 109139433 B CN109139433 B CN 109139433B CN 201810941901 A CN201810941901 A CN 201810941901A CN 109139433 B CN109139433 B CN 109139433B
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- Prior art keywords
- bubble
- gas
- pump chamber
- micro
- fluid
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/06—Pumps having fluid drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/08—Cooling; Heating; Preventing freezing
Abstract
The invention discloses a kind of valve free pump can be driven using the bubble of continuous heat source, belong to pumping equipment technical field, including etching in pump chamber and fluid channel on silicon wafer, pump chamber arrival end and outlet end are respectively equipped with entrance Taper Pipe and exit cone, entrance Taper Pipe bigger diameter end is connected with pump chamber, exit cone miner diameter end is connected with pump chamber, and exit cone bigger diameter end is connected to fluid channel；Fluid is filled in pump chamber and fluid channel, the bubble being connected to external heater is equipped in pump chamber, is connected between pump chamber and fluid channel by micro- gas-guide tube, and micro- gas-guide tube and bubble interval are arranged；External heater continues to input gas into bubble.The present invention has simple and compact for structure, it is convenient for carrying, the processing is simple, be advantageously implemented micromation and it is integrated, the bubble inner part gas of expansion is exported by micro- gas-guide tube, in the case where external heater continuously inputs hot gas effect, bubble volume is shunk again by increasing to the cyclic process increased, it realizes the continuously adjustable of bubble driving, while the driving frequency of Micropump is greatly improved.
Description
Technical field
The invention belongs to pumping equipment technical field, more particularly to a kind of bubble driving valveless that can utilize continuous heat source are micro-
Pump.
Background technique
" heart " of the Micropump as microfluidic system is the power source and microfluidic system developing water of microfluid conveying
Flat important symbol.As a kind of important miniature execution unit, Micropump also can be widely used to drug conveying, blood transportation,
The fields such as DNA synthesis, Electronic Cooling System, micro-total analysis system, micro fuel cell, micro-satellite propulsion system have huge
Big market application prospect.
Micro fluid dynamcis and control technology are one of the key technologies of MEMS (MEMS), are related to microfluid various
The occasion transported is widely used.In electronic market field, usual chip since volume very little, working frequency are very high,
Heat production density is considerable, it is therefore desirable to small in size, high-efficient cooling system.Existing chip fluid channel cooling system is also wanted
It is driven dependent on independent water pump, water pump is not only bulky, not readily portable, can also generate biggish noise, unfavorable
In micromation and it is integrated.And using has valve Micropump equally to face the big problem of micromation difficulty.Though having valve Micropump in Micropump
Right principle is simple, easily controllable, but due to the presence of valve block, keeps micro-pump structure more complicated, and processing technology requires height, is also unfavorable for
It is miniaturized and integrated.
Summary of the invention
Technical problem to be solved by the invention is to provide a kind of valve free pump, purport can be driven using the bubble of continuous heat source
Solve in the prior art chip fluid channel cooling system volume it is big, it is not readily portable, be unfavorable for micromation and it is integrated；And have
Valve micro-pump structure is complicated, processing technology is high, is also unfavorable for micromation and integrated technical problem.
In order to solve the above technical problems, the technical solution used in the present invention is:
A kind of bubble driving valve free pump using continuous heat source, including etching in pump chamber and fluid channel on silicon wafer,
The arrival end of the pump chamber and outlet end are respectively equipped with entrance Taper Pipe and exit cone, the bigger diameter end and pump chamber of the entrance Taper Pipe
It is connected, the miner diameter end of the exit cone is connected with pump chamber, and the bigger diameter end of the exit cone is connected to fluid channel；The pump chamber and
Fluid is filled in fluid channel, is equipped with the bubble being connected to external heater in the pump chamber, is passed through between the pump chamber and fluid channel
Micro- gas-guide tube connection, micro- gas-guide tube and bubble interval are arranged；
The external heater continues to input gas into bubble.
Preferably, the inner wall of the pump chamber is coated with hydrophilic material, and the inner wall of the fluid channel and micro- gas-guide tube is coated with thin
Water-based material.
Preferably, the center spacing of micro- gas-guide tube and bubble is 0.1mm.
Preferably, the external heater continues to input gas into bubble, and the bubble using continuous heat source drives
The work step of dynamic valve free pump is as follows:
When external heater persistently inputs gas into bubble, as bubble is expanded, transfer tube cavity fluid is through exporting
Taper Pipe enters in fluid channel；Until bubble is expanded to micro- gas-guide tube position, gas enters fluid channel along micro- gas-guide tube in bubble
It is interior, it liquefies after meeting fluid temperature reduction into the portion gas in fluid channel；As the gas entered in fluid channel increases, gas in pump chamber
Bubble reduces, and fluid is completed a circulation from entrance Taper Pipe suction pump chamber therewith；
After one cycle, there is portion gas to remain in micro- gas-guide tube, fluid can be prevented to escape from micro- gas-guide tube；
It repeats the above steps, external heater recycles and inputs hot gas in the bubble into pump chamber, the air bladder in pump chamber
Product constantly increases and reduces again, moves in circles, driving fluid flowing.
Further, the fluid is cooling medium.
The beneficial effects of adopting the technical scheme are that compared with prior art, it is provided by the invention can benefit
Valve free pump is driven to have with the bubble of continuous heat source simple and compact for structure, small in size to be convenient for carrying, processing technology is simple, favorably
In realize micromation and it is integrated.The present invention is exported the bubble inner part gas of expansion using micro- gas-guide tube, is heated in outside
Device continuously inputs under hot gas effect, and bubble volume can be realized and shunk again by increasing to the cyclic process increased, realize gas
Bubble drives continuously adjustable, while the driving frequency of Micropump is greatly improved.Present invention is particularly suitable for heat dissipation of electronic chip necks
Domain.
Detailed description of the invention
The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.
Fig. 1 is the structural schematic diagram of the bubble driving valve free pump provided in an embodiment of the present invention using continuous heat source；
Fig. 2 is that bubble starts to expand in the bubble driving valve free pump provided in an embodiment of the present invention using continuous heat source
Initial state diagram；
Fig. 3 be in the bubble driving valve free pump provided in an embodiment of the present invention using continuous heat source air bubble expansion to connecing
Touch state diagram when micro- gas-guide tube；
Fig. 4 is that gas passes through in the bubble provided in an embodiment of the present invention using the bubble driving valve free pump of continuous heat source
Micro- gas-guide tube enters the state diagram in fluid channel；
Fig. 5 is that gas exists in the bubble provided in an embodiment of the present invention using the bubble driving valve free pump of continuous heat source
The state diagram of fluid channel intramedullary expansion；
Fig. 6 is that gas exists in the bubble provided in an embodiment of the present invention using the bubble driving valve free pump of continuous heat source
The state diagram that fluid channel intramedullary expansion, bubble reduce；
Fig. 7 is the working principle diagram that the bubble provided by the invention using continuous heat source drives bubble in valve free pump
One；
Fig. 8 is the working principle diagram that the bubble provided by the invention using continuous heat source drives bubble in valve free pump
Two；
In figure: 1- pump chamber, 2- fluid channel, 3- entrance Taper Pipe, 4- exit cone, 5- bubble, the micro- gas-guide tube of 6-.
Specific embodiment
With reference to the attached drawing in the embodiment of the present invention, technical solution in the embodiment of the present invention carries out clear, complete
Ground description, it is clear that described embodiment is only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
As shown in Figure 1, a kind of can drive valve free pump using the bubble of continuous heat source, including etching in the pump chamber on silicon wafer
1 and fluid channel 2, the arrival end of the pump chamber 1 and outlet end be respectively equipped with entrance Taper Pipe 3 and exit cone 4, the entrance Taper Pipe
3 bigger diameter end is connected with pump chamber 1, and the miner diameter end of the exit cone 4 is connected with pump chamber 1, and the bigger diameter end of the exit cone 4 connects
Logical fluid channel 2；Fluid is filled in the pump chamber 1 and fluid channel 2, is equipped with the bubble being connected to external heater in the pump chamber 1
5, the pump chamber 1 is connected to between fluid channel 2 by micro- gas-guide tube 6, and micro- gas-guide tube 6 is arranged with the interval of bubble 5；The outside
Heater continues to input gas into bubble 5.By the expansion of bubble in pump chamber and flexible, driving fluid flows in fluid channel
It is dynamic, and then realize rapid cooling.It is as follows by air bubble expansion and the flexible working principle for realizing Micropump pumping fluid:
The entrance Taper Pipe at pump chamber both ends and outlet play not exclusively unidirectional valve action.As shown in Figure 7,8, solid arrow indicates
The expansion of bubble and diminution direction, hollow arrow indicate the flow direction of fluid.When air bubble expansion (such as Fig. 7), fluid is from entering
It is flowed out in the entrance Taper Pipe 3 and exit cone 4 of mouthful end and outlet end, but the obstruction of entrance Taper Pipe and exit cone to fluid at this time
Degree is different, and fluid, which is less than from the resistance that the miner diameter end of exit cone flows to bigger diameter end from entrance Taper Pipe bigger diameter end, flows to miner diameter end
Resistance, therefore, although entrance Taper Pipe and exit cone have fluid outflow, the flow of outlet end is greater than entrance at this time
The flow at end.And when bubble shrinkage (such as Fig. 8), fluids through inlet ports Taper Pipe and exit cone flow into pump chamber simultaneously, at this point, due to
Fluid flow direction changes, and the fluid of arrival end, which becomes from the miner diameter end of entrance Taper Pipe, flows into bigger diameter end, so resistance is smaller,
And the fluid of outlet end is miner diameter end to be flowed to from the bigger diameter end of exit cone, thus resistance is larger at this time.The flowing of arrival end hinders
Power is less than the flow resistance of outlet end, therefore the flow of arrival end is greater than outlet end, is still from entering after total flow is cancelled out each other
Mouth end flows to outlet end.In this way, driving fluid gradually flows to outlet end from arrival end with the expansion repeatedly and contraction of bubble.
It is shunk using air bubble expansion and generates driving force, realize the conveying of fluid.
In one particular embodiment of the present invention, in order to guarantee that gas smoothly enters miniflow along micro- gas-guide tube in bubble
In road, it is coated with hydrophilic material in the inner wall of pump chamber 1, is coated with hydrophobic material in the inner wall of fluid channel 2 and micro- gas-guide tube 6.It is logical
The exit cone of Micropump can be bypassed by crossing micro- gas-guide tube, with the heat dissipation direct connection of fluid channel.In this way, when bubble gradually expand with
When micro- air guide tube opening contacts, due to the hydrophobicity of micro- air guide inside pipe wall, a part of bubble will be in the effect of surface tension
Under be inhaled into micro- gas-guide tube (such as Fig. 3-5).Why bubble can be inhaled into micro- gas-guide tube, be because of liquid-gas boundary surface
The effect of power, in the pump chamber that hydrophilic material is constituted, the contact angle of liquid-gas boundary and pump chamber wall is acute angle, and surface tension is constituted
Resultant force it is inside, be directed toward the center of bubble, reach balance.And when the inner wall face contact of liquid-gas boundary and micro- gas-guide tube, because
Micro- gas-guide tube inner wall be hydrophobic material, liquid-gas boundary and it contact angle be obtuse angle, therefore surface tension constitute resultant force to
On, it is directed toward the outside of bubble, and balanced therewith in the other side of bubble without corresponding power, so bubble is upward by one
Resultant force.In bubble after micro- gas-guide tube enters heat dissipation fluid channel, under the action of surface tension, bubble enters heat dissipation fluid channel
Part expansion, and remaining portion retracts in pump chamber, so that gas is squeezed into heat dissipation fluid channel.
As a preferred embodiment, as shown in Figure 1, the center spacing of micro- gas-guide tube 6 and bubble 5 is 0.1mm.It can also
With according to actual requirement adjust micro- gas-guide tube between bubble at a distance from.Micro- gas-guide tube is set near external heater, it can be with
The expansion of bubble move closer to micro- gas-guide tube, after gas is discharged into the fluid channel of heat transmission via micro- gas-guide tube, micro-
As cooling liquid under the fluid matasomatism of cooling medium in runner.And the small part bubble in pump chamber is stayed in, it is heated by outside
Device continues to input hot gas into bubble, then continues to be heated expansion.Subtract again in this way, the bubble volume in pump chamber constantly increases
It is small, it moves in circles, driving fluid flowing.
As shown in figures 1 to 6, filled arrows indicate gas flow in figure, and hollow arrow indicates fluid flow direction, and the outside adds
Hot device continues to input gas into bubble 5, and the work step of the bubble driving valve free pump using continuous heat source is as follows:
When external heater persistently inputs gas into bubble 5, as bubble 5 is expanded, fluid is through going out in driving pump chamber 1
Prostomum pipe 4 enters in fluid channel 2；Until bubble 5 is expanded to micro- 6 position of gas-guide tube, in bubble 5 gas along micro- gas-guide tube 6 into
Enter in fluid channel 2, liquefies after meeting fluid temperature reduction into the portion gas in fluid channel 2；As the gas entered in fluid channel 2 increases
More, bubble reduces in pump chamber 1, and fluid is sucked pump chamber 1 from entrance Taper Pipe 3 therewith, completes a circulation；
After one cycle, there is portion gas to remain in micro- gas-guide tube 6, fluid can be prevented to escape from micro- gas-guide tube 6；
It repeats the above steps, external heater recycles and inputs hot gas in the bubble 5 into pump chamber 1, the bubble in pump chamber 1
5 volumes constantly increase to be reduced again, is moved in circles, driving fluid flowing.
In electronic market field, fluid selects cooling medium to realize the rapid cooling to chip.Utilize external Continuous Heat
The bubble driving of source work can drive valve free pump using the bubble of continuous heat source, and the design of micro- gas-guide tube solves continuous-stable
The circulatory problems of driving problems and the bubble driving of heat source.The present invention, which solves thermal driving, can utilize the bubble of continuous heat source
Driving valve free pump needs to control bubble expansion by continuous heat source and shrinks to realize micro fluid dynamcis, needs to additionally introduce driving
The technical issues of system.The present invention is exported the bubble inner part gas of expansion using micro- gas-guide tube, under continuous heat source
It realizes that bubble volume is shunk again by increasing to the cyclic process increased, realizes the continuously adjustable of bubble driving, while greatly
Improve the driving frequency of Micropump.
Many details are elaborated in the above description to facilitate a thorough understanding of the present invention, still the present invention can be with
Implemented using other than the one described here other way, those skilled in the art can be without prejudice to intension of the present invention
In the case of do similar popularization, therefore the present invention is not limited by particular embodiments disclosed above.
Claims (5)
1. one kind can drive valve free pump using the bubble of continuous heat source, which is characterized in that including etching in the pump chamber on silicon wafer
And fluid channel, the arrival end of the pump chamber and outlet end are respectively equipped with entrance Taper Pipe and exit cone, the entrance Taper Pipe it is big
Diameter end is connected with pump chamber, and the miner diameter end of the exit cone is connected with pump chamber, and the bigger diameter end of the exit cone is connected to fluid channel；
Fill fluid in the pump chamber and fluid channel, be equipped with the bubble being connected to external heater in the pump chamber, the pump chamber with it is micro-
It is connected between runner by micro- gas-guide tube, micro- gas-guide tube and bubble interval are arranged；The external heater continues into bubble
Input gas.
2. the bubble according to claim 1 using continuous heat source drives valve free pump, which is characterized in that the pump chamber
Inner wall be coated with hydrophilic material, the inner wall of the fluid channel and micro- gas-guide tube is coated with hydrophobic material.
3. the bubble according to claim 2 using continuous heat source drives valve free pump, which is characterized in that described micro- to lead
The center spacing of tracheae and bubble is 0.1mm.
4. the bubble according to claim 2 using continuous heat source drives valve free pump, which is characterized in that the outside
Heater continues to input gas into bubble, and the work step of the bubble driving valve free pump using continuous heat source is such as
Under:
When external heater persistently inputs gas into bubble, as bubble is expanded, transfer tube cavity fluid is through exit cone
Into in fluid channel；Until bubble is expanded to micro- gas-guide tube position, gas enters in fluid channel along micro- gas-guide tube in bubble, into
Enter after the portion gas in fluid channel meets fluid temperature reduction and liquefies；As the gas entered in fluid channel increases, bubble contracts in pump chamber
It is small, fluid is completed into a circulation from entrance Taper Pipe suction pump chamber therewith；
After one cycle, there is portion gas to remain in micro- gas-guide tube, fluid can be prevented to escape from micro- gas-guide tube；
It repeats the above steps, external heater, which is recycled, inputs hot gas in the bubble into pump chamber, the bubble volume in pump chamber is not
Disconnected increase reduces again, moves in circles, driving fluid flowing.
5. the bubble according to claim 1 using continuous heat source drives valve free pump, which is characterized in that the fluid
For cooling medium.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810941901.9A CN109139433B (en) | 2018-08-17 | 2018-08-17 | Valve free pump is driven using the bubble of continuous heat source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810941901.9A CN109139433B (en) | 2018-08-17 | 2018-08-17 | Valve free pump is driven using the bubble of continuous heat source |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109139433A CN109139433A (en) | 2019-01-04 |
| CN109139433B true CN109139433B (en) | 2019-09-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810941901.9A Active CN109139433B (en) | 2018-08-17 | 2018-08-17 | Valve free pump is driven using the bubble of continuous heat source |
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Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0322733A1 (en) * | 1987-12-22 | 1989-07-05 | Kenji Okayasu | Heat conducting device |
| DE4239464A1 (en) * | 1992-11-24 | 1994-05-26 | Heinzl Joachim | Electrothermal static micro-pump with fluid-pressure-operated valve - drives liq. past resilient flap into outlet by expansion of vapour bubble generated by electric heating element |
| US6071081A (en) * | 1992-02-28 | 2000-06-06 | Seiko Instruments Inc. | Heat-powered liquid pump |
| TW504492B (en) * | 2002-02-22 | 2002-10-01 | Lightuning Tech Inc | Micro-pump of gas thermal expansion driven type and method of manufacturing the same |
| EP1439307A1 (en) * | 2003-01-15 | 2004-07-21 | Samsung Electronics Co., Ltd. | Bubble driven micropump |
| KR20050117810A (en) * | 2004-06-11 | 2005-12-15 | 에이엔디티 주식회사 | Microheater for bubble type micropump |
| CN1844681A (en) * | 2005-04-07 | 2006-10-11 | 北京大学 | Minisize diffusion pump and preparation method thereof |
| CN103967740A (en) * | 2014-04-12 | 2014-08-06 | 北京工业大学 | Steam-bubble-driven micro pump conducting heating through induction |
| CN105545711B (en) * | 2016-01-19 | 2017-07-28 | 北京理工大学 | A kind of continuous adjustable bubble drives valve free pump |
| CN107039370A (en) * | 2016-12-06 | 2017-08-11 | 北京理工大学 | A kind of fluid channel cooling system driven by bubble Micropump |
| CN108397373A (en) * | 2018-02-23 | 2018-08-14 | 清华大学深圳研究生院 | A kind of valveless electromagnetism Micropump and preparation method thereof |
-
2018
- 2018-08-17 CN CN201810941901.9A patent/CN109139433B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0322733A1 (en) * | 1987-12-22 | 1989-07-05 | Kenji Okayasu | Heat conducting device |
| US6071081A (en) * | 1992-02-28 | 2000-06-06 | Seiko Instruments Inc. | Heat-powered liquid pump |
| DE4239464A1 (en) * | 1992-11-24 | 1994-05-26 | Heinzl Joachim | Electrothermal static micro-pump with fluid-pressure-operated valve - drives liq. past resilient flap into outlet by expansion of vapour bubble generated by electric heating element |
| TW504492B (en) * | 2002-02-22 | 2002-10-01 | Lightuning Tech Inc | Micro-pump of gas thermal expansion driven type and method of manufacturing the same |
| EP1439307A1 (en) * | 2003-01-15 | 2004-07-21 | Samsung Electronics Co., Ltd. | Bubble driven micropump |
| KR20050117810A (en) * | 2004-06-11 | 2005-12-15 | 에이엔디티 주식회사 | Microheater for bubble type micropump |
| CN1844681A (en) * | 2005-04-07 | 2006-10-11 | 北京大学 | Minisize diffusion pump and preparation method thereof |
| CN103967740A (en) * | 2014-04-12 | 2014-08-06 | 北京工业大学 | Steam-bubble-driven micro pump conducting heating through induction |
| CN105545711B (en) * | 2016-01-19 | 2017-07-28 | 北京理工大学 | A kind of continuous adjustable bubble drives valve free pump |
| CN107039370A (en) * | 2016-12-06 | 2017-08-11 | 北京理工大学 | A kind of fluid channel cooling system driven by bubble Micropump |
| CN108397373A (en) * | 2018-02-23 | 2018-08-14 | 清华大学深圳研究生院 | A kind of valveless electromagnetism Micropump and preparation method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109139433A (en) | 2019-01-04 |
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