CN109115359A - A kind of temperature sensor based on hybrid plasma waveguide - Google Patents
A kind of temperature sensor based on hybrid plasma waveguide Download PDFInfo
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- CN109115359A CN109115359A CN201811101852.4A CN201811101852A CN109115359A CN 109115359 A CN109115359 A CN 109115359A CN 201811101852 A CN201811101852 A CN 201811101852A CN 109115359 A CN109115359 A CN 109115359A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
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Abstract
The invention discloses a kind of temperature sensors based on hybrid plasma waveguide, it is characterized in that, basal layer, low-refraction buffer layer, sulfurized layer and the metal layer to splice including sequence from low to uper part, the upper surface centre of the metal layer has hollow cylindric resonant cavity by upper certainly, the first recess straight wave guide and the second recess straight wave guide are symmetrically arranged on the basis of the central axes of resonant cavity, the inner diameter size of the resonant cavity is adjustable.This surface plasma sensor is not only small in size, response is fast, preparation process is simple, while can also improve sensitivity and Q value, realizes the nanoscale sensing of biology, medical science.
Description
Technical field
The present invention relates to optical communication technique and sensory field, specifically a kind of temperature based on hybrid plasma waveguide is passed
Sensor.
Background technique
Surface plasma excimer (Surface plasmon polaritons, abbreviation SPPs) is by changing metal watch
Electromagnet mode between a kind of light wave that the sub-wavelength structure in face is realized and transportable surface charge, can support metal and medium circle
The surface plasma-wave of face transmission.Device based on SPP is small with size, response is fast and is not limited by diffraction limit, this
Unique property makes it manipulate light energy, high sensor, high response and the fields such as diamagnetic interference in nanometer scale and plays
Vital effect.
" Proc Spie " has published " Overview of plasmonic sensors and their design
A methods " text, Sookyoung Roh team propose the sensor based on nano square pore array, and sensitivity is
300nmRIU-1；" nanometer flash report " published " Planar Metamaterial Analogue of in 2010
An Electromagnetically Induced Transparency for Plasmonic Sensing " text, proposes base
In plane Meta Materials transducer sensitivity up to 588nmRIU-1；The same year, in " Effects of Coherent
Interactions on the Sensing Characteristics of Near-Infrared Gold Nanorings”
In one text, the transducer sensitivity based on nano-rings is 637.3 nmRIU-1.However, currently, although researcher is to sensitivity
It is constantly promoted, but sensitivity is still lower, while the preparation method of sensor is excessively complicated, and fills sensing and be situated between
Matter is very difficult, it is difficult to meet the requirement of large-scale production.
Summary of the invention
The purpose of the present invention is in view of the deficiencies of the prior art, and provide a kind of temperature based on hybrid plasma waveguide
Sensor.This surface plasma sensor is not only small in size, response is fast, preparation process is simple, while can also improve sensitivity
With Q value, the nanoscale sensing of biology, medical science is realized.
Realizing the technical solution of the object of the invention is:
A kind of temperature sensor based on hybrid plasma waveguide, unlike the prior art, including sequence from low to uper part
Basal layer, low-refraction buffer layer, sulfurized layer and the metal layer to splice, the upper surface centre of the metal layer by it is upper from
Hollow cylindric resonant cavity is had, the first recess straight wave guide and second recessed is symmetrically arranged on the basis of the central axes of resonant cavity
Straight wave guide is fallen into, the inner diameter size of the resonant cavity is adjustable.
The basal layer is resin polymerization nitride layer.
The low-refraction buffer layer is polymethyl methacrylate film, i.e. PMMA film, the method that PMMA film uses electrophoresis
Deposition is on the base layer.
The sulfurized layer is single layer molybdenum disulfide, is prepared using chemical vapour deposition technique.
The metal layer is silver layer.
The first recess straight wave guide and the second recess straight wave guide are benzocyclobutene, i.e. BCB, near infrared band enters
It is incident by the first recess straight wave guide to penetrate light, by the second recess straight wave guide outgoing.
The metal layer is first etched resonant cavity and then is etched monosymmetric first recess again using the method for etching
Straight wave guide and the second recess straight wave guide.
The intra resonant cavity is equipped with temperature sensing medium.
The incident light of near infrared band by first recess straight wave guide side incidence when, due to first recess straight wave guide two sides
For metal Ag, so SPPs can be excited by typical metal-insulator-metastructure structure, SPPs along the first recess straight wave guide to
It is propagated at resonant cavity, when meeting resonator cavity resonance frequency, SPPs can be coupled in resonant cavity, thus further toward the second recess
Straight wave guide transmitting, still, when incident wavelength is unsatisfactory for resonance frequency, SPPs is not excited then, and cannot be coupled to resonance
Chamber, light wave end in incident side waveguide.
In the technical program, resonance wavelength and transmissivity can be carried out accordingly by adjusting the inner diameter size of resonant cavity
Quantitative to adjust, to reach the performance of optically filtering, the temperature sensing medium in resonant cavity, which can be, arbitrarily has high thermo-optical coeffecient
Liquid temperature sensing material, due to the refractive index and the linear relationship of temperature of liquid temperature sensing material, so working as the change of environment temperature
When, it will lead to the refraction index changing of temperature sensing material, to influence condition of resonance.
It is analyzed in conjunction with stringent mathematical theory and SPPs coupled wave theory, linear close is presented in available resonance wavelength and temperature
System, i.e., as the temperature increases, red shift can occur for resonance wavelength, and the amount of red shift can also be obtained according to the technical program structural parameters
To being accurately controlled.
So in turn, in practical applications, when the parameter of structure is fixed, due to the change of environment temperature, can make
The refractive index of sensing material changes, and then influences the variation of resonance wavelength, and the movement of resonance wavelength is measured by frequency spectrograph
Amount, then can accurately obtain the temperature variation of environment.
This sensor changes the resonance wavelength of sensor by changing the size of resonant cavity, to realize the sensor
Multi-wavelength work application.
This sensor accurately can be used to detect the minor change of environment temperature, and after coupling is set as needed
The wavelength and projection ratio of light.
SPPs, which has, responds characteristic fast, small in size, so the real time temperature that the device can be used for nanometer scale passes
The fields such as sense.
This surface plasma sensor is not only small in size, response is fast, preparation process is simple, while can also improve sensitivity
With Q value, the nanoscale sensing of biology, medical science is realized.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of embodiment.
In figure, 1. basal layer, 2. low-refraction buffer layer, 3. sulfurized layer, 4. metal layer 5-1. first recess straight wave guide
Recess 6. resonant cavity of straight wave guide of 5-2. second.
Specific embodiment
The content of present invention is further elaborated with reference to the accompanying drawings and examples, but is not limitation of the invention.
Embodiment:
Referring to Fig.1, a kind of temperature sensor based on hybrid plasma waveguide, the basal layer to splice including sequence from low to uper part
1, the upper surface centre of low-refraction buffer layer 2, sulfurized layer 3 and metal layer 4, the metal layer 4 is had certainly by upper
It is recessed to be symmetrically arranged with the first recess straight wave guide 5-1 and second on the basis of the central axes of resonant cavity 6 for hollow cylindric resonant cavity 6
Straight wave guide 5-2 is fallen into, the inner diameter size of the resonant cavity 6 is adjustable.
The basal layer 1 is resin polymerization nitride layer.
The low-refraction buffer layer 2 is polymethyl methacrylate film, i.e. PMMA film, and PMMA film is using electrophoresis
Method is deposited on basal layer 1.
The sulfurized layer 3 is single layer molybdenum disulfide, is prepared using chemical vapour deposition technique.
The metal layer 4 is silver layer.
The first recess straight wave guide 5-1 and the second recess straight wave guide 5-2 is benzocyclobutene, i.e. BCB, near-infrared wave
The incident light of section is incident by the first recess straight wave guide 5-1, by the second recess straight wave guide 5-2 outgoing.
The metal layer 4 first etches resonant cavity 6 using the method for etching, then etches monosymmetric first again
The recess of straight wave guide 5-1 and second that is recessed straight wave guide 5-2.
The inside of the resonant cavity 6 is equipped with temperature sensing medium.
The incident light of near infrared band by first recess straight wave guide 5-1 side incidence when, due to first recess straight wave guide
The two sides 5-1 are metal Ag, so SPPs can be excited by typical metal-insulator-metastructure structure, SPPs is straight along the first recess
Waveguide 5-1 is to propagation at resonant cavity 6, and when meeting 6 resonant frequency of resonant cavity, SPPs can be coupled in resonant cavity 6, thus into one
It walks toward the second recess straight wave guide 5-2 transmitting, still, when incident wavelength is unsatisfactory for resonance frequency, SPPs is not excited then, and
Resonant cavity 6 cannot be coupled to, light wave ends in incident side waveguide.
In this example, resonance wavelength and transmissivity can carry out corresponding quantitative tune by adjusting the inner diameter size of resonant cavity
Section, to reach the performance of optically filtering, the temperature sensing medium in resonant cavity 6 can be liquid sense arbitrarily with high thermo-optical coeffecient
Adiabator, due to the refractive index and the linear relationship of temperature of liquid temperature sensing material, so can be led when the change of environment temperature
The refraction index changing for causing temperature sensing material, to influence condition of resonance.
It is analyzed in conjunction with stringent mathematical theory and SPPs coupled wave theory, linear close is presented in available resonance wavelength and temperature
System, i.e., as the temperature increases, red shift can occur for resonance wavelength, and the amount of red shift can also obtain essence according to the structural parameters of this example
True control.
So in turn, in practical applications, when the parameter of structure is fixed, due to the change of environment temperature, can make
The refractive index of sensing material changes, and then influences the variation of resonance wavelength, and the movement of resonance wavelength is measured by frequency spectrograph
Amount, then can accurately obtain the temperature variation of environment.
Claims (7)
1. a kind of temperature sensor based on hybrid plasma waveguide, characterized in that the base to splice including sequence from low to uper part
Bottom, low-refraction buffer layer, sulfurized layer and metal layer, the upper surface centre of the metal layer is by upper from having
Empty cylindric resonant cavity is symmetrically arranged with the first recess straight wave guide and the second straight wave of recess on the basis of the central axes of resonant cavity
It leads, the inner diameter size of the resonant cavity is adjustable.
2. the temperature sensor according to claim 1 based on hybrid plasma waveguide, characterized in that the basal layer
For resin polymerization nitride layer.
3. the temperature sensor according to claim 1 based on hybrid plasma waveguide, characterized in that the low refraction
Rate buffer layer is polymethyl methacrylate film, i.e. PMMA film, and PMMA film is deposited on the base layer using the method for electrophoresis.
4. the temperature sensor according to claim 1 based on hybrid plasma waveguide, characterized in that the sulfide
Layer is single layer molybdenum disulfide, is prepared using chemical vapour deposition technique.
5. the temperature sensor according to claim 1 based on hybrid plasma waveguide, characterized in that the metal layer
For silver layer.
6. the temperature sensor according to claim 1 based on hybrid plasma waveguide, characterized in that described first is recessed
Falling into straight wave guide and the second recess straight wave guide is benzocyclobutene, i.e. BCB, and the incident light of near infrared band is by the first straight wave of recess
Importing is penetrated, by the second recess straight wave guide outgoing.
7. the temperature sensor according to claim 1 based on hybrid plasma waveguide, characterized in that the resonant cavity
Inside be equipped with temperature sensing medium.
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| CN201811101852.4A CN109115359A (en) | 2018-09-20 | 2018-09-20 | A kind of temperature sensor based on hybrid plasma waveguide |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110261000A (en) * | 2019-08-01 | 2019-09-20 | 广西师范大学 | A kind of temperature sensor based on Fano resonance |
| CN110763356A (en) * | 2019-11-18 | 2020-02-07 | 西安柯莱特信息科技有限公司 | Temperature detector and system based on optical fiber waveguide structure |
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| US5555255A (en) * | 1992-12-03 | 1996-09-10 | Siemens Aktiengesellschaft | Surface-emitting laser diode |
| CN103681837A (en) * | 2013-11-19 | 2014-03-26 | 浙江大学 | Molybdenum disulfide-cadmium selenide quantum dot hybrid field effect opto-transistor and manufacturing method thereof |
| CN105372853A (en) * | 2015-12-15 | 2016-03-02 | 电子科技大学 | Micro-ring resonant cavity electro-optical modulator based on graphene/molybdenum disulfide heterojunction |
| US20170253996A1 (en) * | 2016-03-04 | 2017-09-07 | Uchicago Argonne, Llc | Systems and methods for top-down fabrication of wafer scale tmdc monolayers |
| CN107478606A (en) * | 2017-08-01 | 2017-12-15 | 深圳大学 | The multi-wavelength adjustable type nano-sensor of Fano resonance can be achieved |
| CN108414115A (en) * | 2018-03-28 | 2018-08-17 | 广西师范大学 | A kind of tunable surface plasma waveguide having temperature sensing |
| CN208833397U (en) * | 2018-09-20 | 2019-05-07 | 广西师范大学 | A kind of temperature sensor based on hybrid plasma waveguide |
-
2018
- 2018-09-20 CN CN201811101852.4A patent/CN109115359A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5555255A (en) * | 1992-12-03 | 1996-09-10 | Siemens Aktiengesellschaft | Surface-emitting laser diode |
| CN103681837A (en) * | 2013-11-19 | 2014-03-26 | 浙江大学 | Molybdenum disulfide-cadmium selenide quantum dot hybrid field effect opto-transistor and manufacturing method thereof |
| CN105372853A (en) * | 2015-12-15 | 2016-03-02 | 电子科技大学 | Micro-ring resonant cavity electro-optical modulator based on graphene/molybdenum disulfide heterojunction |
| US20170253996A1 (en) * | 2016-03-04 | 2017-09-07 | Uchicago Argonne, Llc | Systems and methods for top-down fabrication of wafer scale tmdc monolayers |
| CN107478606A (en) * | 2017-08-01 | 2017-12-15 | 深圳大学 | The multi-wavelength adjustable type nano-sensor of Fano resonance can be achieved |
| CN108414115A (en) * | 2018-03-28 | 2018-08-17 | 广西师范大学 | A kind of tunable surface plasma waveguide having temperature sensing |
| CN208833397U (en) * | 2018-09-20 | 2019-05-07 | 广西师范大学 | A kind of temperature sensor based on hybrid plasma waveguide |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110261000A (en) * | 2019-08-01 | 2019-09-20 | 广西师范大学 | A kind of temperature sensor based on Fano resonance |
| CN110763356A (en) * | 2019-11-18 | 2020-02-07 | 西安柯莱特信息科技有限公司 | Temperature detector and system based on optical fiber waveguide structure |
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