CN209470789U - A kind of temperature sensor based on Novel MIM Bragg grating - Google Patents
A kind of temperature sensor based on Novel MIM Bragg grating Download PDFInfo
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- CN209470789U CN209470789U CN201920247419.5U CN201920247419U CN209470789U CN 209470789 U CN209470789 U CN 209470789U CN 201920247419 U CN201920247419 U CN 201920247419U CN 209470789 U CN209470789 U CN 209470789U
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Abstract
The utility model discloses a kind of temperature sensors based on Novel MIM Bragg grating, it is characterized in that, the basal layer 1 and metal layer 2 to splice including sequence from low to uper part, the middle part of the metal layer 2 is equipped with nano-cavity 3, two long boundary lines of nano-cavity 3 are in symmetrical S shape, temperature sensing medium is equipped in nano-cavity 3, metal layer 2 and nano-cavity 3 constitute Novel MIM Bragg grating.This sensor is not only small in size, response is fast, preparation process is simple, but also can also improve sensitivity and Q value, reduce full width at half maximum, to realize the nanoscale sensing of biology, medical science.
Description
Technical field
It is specifically a kind of based on Novel MIM Bragg grating the utility model relates to optical communication technique and sensory field
Temperature sensor.
Background technique
Surface plasma excimer (SPPs) is the electromagnetic wave with electronic Coherent coupling, between dielectric and metal
Interface propagate, gradually decay to two sides.Present advanced processing technology allows to manufacture sub-wavelength photonic device, and SPPs's makes
Possibility is opened with the utilization for next-generation photonic integrated circuits.In optical sensing field, bragg grating (FBG) is
By largely studying and being widely used, as sensor, there are light weight, small in size, portable, electromagnetism interference, essence
The advantages that degree is not influenced by the intensity of light source, multiplexing easy to accomplish and distributed sensing, it can be applied to refractive index, temperature, answers
The measurement of power, distortion, pressure, chemical substance concentration etc..
" Journal of Applied Optics " has published " Temperature sensor based on surface
A Bragg grating of side-polished fiber " text, the Bragg grating temperature sensor that Zhang Yong et al. is proposed,
Obtained temperature sensitivity is." Applied Optics " has published " Temperature sensor based
on surface plasmon resonance within selectively coated photonic crystal
The text of fiber " one, proposition in air hole inwall coated with metal film, obtainTemperature sensitivity.However, currently,
Although researcher constantly promotes sensitivity, sensitivity is still lower, while the preparation method mistake of sensor
In complexity, and it is very difficult to fill sensor information, it is difficult to meet the requirement of large-scale production.
Utility model content
The purpose of this utility model is in view of the deficiencies of the prior art, and to provide a kind of based on Novel MIM Bragg grating
Temperature sensor.This sensor is not only small in size, response is fast, preparation process is simple, but also can also improve sensitivity and Q
Value reduces full width at half maximum, to realize the nanoscale sensing of biology, medical science.
Realizing the technical solution of the utility model aim is:
A kind of temperature sensor based on Novel MIM Bragg grating, unlike the prior art, including from bottom to top
The middle part of the basal layer and metal layer that sequence is spliced, the metal layer is equipped with nano-cavity, and two long boundary lines of nano-cavity are in
Symmetrical S shape is equipped with temperature sensing medium in nano-cavity, and metal layer and nano-cavity constitute Novel MIM Bragg grating.
The basal layer is silica.
The metal layer is silver.
The inner diameter size of the nano-cavity is adjustable.
The temperature sensing medium is the liquid temperature sensing material with high thermo-optical coeffecient, such as ethyl alcohol.
Above-mentioned temperature sensor is then passed through using vapour deposition process deposited metal layer on silicon oxide base layer
The method of etching etches nano-cavity in the metal layer.
Incident light is incident from the side of nano-cavity, is emitted from the other side, and incident light selects near infrared band light.
The incident light of near infrared band by nano-cavity side incidence when, due to nano-cavity two sides be metal Ag, so
SPPs can be excited by typical metal-insulator-metastructure structure, and SPPs is propagated along a side of nano-cavity to the other side, full
When the basic TM mode supported in sufficient MIM waveguide, SPPs will be transmitted further toward the other side of waveguide, still, work as incident wavelength
When being unsatisfactory for basic TM mode, SPPs is not excited then, and light wave ends in incident side waveguide.
In the technical program, resonance wavelength and transmissivity can be carried out accordingly by adjusting the inner diameter size of nano-cavity
Quantitative to adjust, to reach the performance of optically filtering, the temperature sensing medium in nano-cavity, which can be, arbitrarily has high thermo-optical coeffecient
Liquid temperature sensing material, due to the refractive index and the linear relationship of temperature of liquid temperature sensing material, so working as the change of environment temperature
When, it will lead to the refraction index changing of temperature sensing material, to influence condition of resonance.
Linear relationship is presented in the above-mentioned available resonance wavelength of temperature sensor and temperature, i.e., as the temperature increases, humorous
Red shift can occur for vibration wave length.
In practical applications, when the structural parameters of nano-cavity are fixed, due to the change of environment temperature, can to sense material
The refractive index of material changes, and then influences the variation of resonance wavelength, the amount of movement of resonance wavelength is measured by frequency spectrograph, then
The temperature variation of environment can accurately be obtained.
This sensor changes the resonance wavelength of sensor by changing the structural parameters of nano-cavity, to realize the sensing
The application of the multi-wavelength work of device.
SPPs, which has, responds characteristic fast, small in size, so the sensor can be used for the real time temperature of nanometer scale
The fields such as sensing.
This sensor is not only small in size, response is fast, preparation process is simple, but also can also improve sensitivity and Q value, reduce
Full width at half maximum, to realize the nanoscale sensing of biology, medical science.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of embodiment.
In figure, 1. basal layer, 2. metal layer, 3. nano-cavity.
Specific embodiment
The content of the present invention is further elaborated with reference to the accompanying drawings and examples, but is not to the utility model
It limits.
Embodiment:
Referring to Fig.1,
A kind of temperature sensor based on Novel MIM Bragg grating, 1 He of basal layer spliced including sequence from low to uper part
Metal layer 2, the middle part of the metal layer 2 are equipped with nano-cavity 3, and two long boundary lines of nano-cavity 3 are in symmetrical S shape, nanometer
Temperature sensing medium is equipped in chamber 3, metal layer 2 and nano-cavity 3 constitute Novel MIM Bragg grating.
The basal layer 1 is silica.
The metal layer 2 is silver.
The inner diameter size of the nano-cavity 3 is adjustable.
The temperature sensing medium is the liquid temperature sensing material with high thermo-optical coeffecient, and this example is ethyl alcohol.
Above-mentioned temperature sensor then, is led to using vapour deposition process deposited metal layer 2 on silicon oxide base layer 1
The method of over etching etches nano-cavity 3 in metal layer 2.
Incident light is incident from the side of nano-cavity 3, is emitted from the other side, and incident light selects near infrared band light.
The incident light of near infrared band by nano-cavity 3 side incidence when, due to 3 two sides of nano-cavity be metal Ag, so
SPPs can be excited by typical metal-insulator-metastructure structure, and SPPs is propagated along a side of nano-cavity 3 to the other side, full
When the basic TM mode supported in sufficient MIM waveguide, SPPs will be transmitted further toward the other side of waveguide 3, still, work as incident wavelength
When being unsatisfactory for basic TM mode, SPPs is not excited then, and light wave ends in incident side waveguide.
In this example, resonance wavelength and transmissivity can be carried out accordingly quantitatively by adjusting the inner diameter size of nano-cavity 3
It adjusts, to reach the performance of optically filtering, the temperature sensing medium in nano-cavity 3 can be liquid arbitrarily with high thermo-optical coeffecient
Temperature sensing material, due to the refractive index and the linear relationship of temperature of liquid temperature sensing material, so when the change of environment temperature, meeting
Lead to the refraction index changing of temperature sensing material, to influence condition of resonance.
Linear relationship is presented in the available resonance wavelength of this example temperature sensor and temperature, i.e., as the temperature increases, humorous
Red shift can occur for vibration wave length.
In practical applications, when the structural parameters of nano-cavity 3 are fixed, due to the change of environment temperature, can to sense
The refractive index of material changes, and then influences the variation of resonance wavelength, the amount of movement of resonance wavelength is measured by frequency spectrograph, so
The temperature variation of environment can be accurately obtained afterwards.
Claims (2)
1. a kind of temperature sensor based on Novel MIM Bragg grating, characterized in that the base to splice including sequence from low to uper part
The middle part of bottom (1) and metal layer (2), the metal layer (2) is equipped with nano-cavity (3), two long boundary lines of nano-cavity (3)
In symmetrical S shape, temperature sensing medium is equipped in nano-cavity (3), metal layer (2) and nano-cavity (3) constitute Novel MIM Prague light
Grid.
2. the temperature sensor according to claim 1 based on Novel MIM Bragg grating, characterized in that the nanometer
The inner diameter size of chamber (3) is adjustable.
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| CN201920247419.5U CN209470789U (en) | 2019-02-27 | 2019-02-27 | A kind of temperature sensor based on Novel MIM Bragg grating |
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| CN201920247419.5U CN209470789U (en) | 2019-02-27 | 2019-02-27 | A kind of temperature sensor based on Novel MIM Bragg grating |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109799003A (en) * | 2019-02-27 | 2019-05-24 | 广西师范大学 | A kind of temperature sensor based on Novel MIM Bragg grating |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109799003A (en) * | 2019-02-27 | 2019-05-24 | 广西师范大学 | A kind of temperature sensor based on Novel MIM Bragg grating |
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| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191008 Termination date: 20200227 |
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| CF01 | Termination of patent right due to non-payment of annual fee |