CN109100828A - A kind of polarization beam splitting rotator - Google Patents
A kind of polarization beam splitting rotator Download PDFInfo
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- CN109100828A CN109100828A CN201710475582.2A CN201710475582A CN109100828A CN 109100828 A CN109100828 A CN 109100828A CN 201710475582 A CN201710475582 A CN 201710475582A CN 109100828 A CN109100828 A CN 109100828A
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- transmission line
- waveguide
- tapered transmission
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/126—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind using polarisation effects
Abstract
The application proposes a kind of polarization beam splitting rotator, it is related to the integrated polarization regulation devices field of planar optical waveguide, comprising: the first tapered transmission line, the second tapered transmission line, the first connection waveguide, the wide tapered transmission line in evolution area, the first output waveguide, front curve waveguide, the narrow tapered transmission line in evolution area, rear curved waveguide and the second output waveguide；First tapered transmission line is as input waveguide, first tapered transmission line successively connect waveguide with the second tapered transmission line, first, the wide tapered transmission line in evolution area, the first output waveguide are connected, and front curve waveguide is successively connected with the narrow tapered transmission line in evolution area, rear curved waveguide, the second output waveguide.Evolution Modes area specific to polarization beam splitting rotator provided by the invention uses twin-guide grading structure, can be realized biggish bandwidth and extinction ratio.And there is simple process, advantages of simple structure and simple, there are the excellent properties such as High Extinction Ratio, big bandwidth, low-loss.
Description
Technical field
The present invention relates to the polarizations that planar optical waveguide integrates to regulate and control devices field, and in particular to a kind of polarization beam splitting rotation
Device.
Background technique
Increasingly developed with planar optical waveguide integrated device technology, monolithic integrated device number rapidly increases, and integrates system
System complexity promptly improves, and the polarization state regulation of on piece has been can not be ignored the problem of.Due to most of planar lights
Waveguide device has very strong polarization correlated, therefore can realize on piece flexibly to the separation of different polarization and conversion
The polarizing transparent of device facilitates the workload for reducing device design, reduces the size and complexity of system.Meanwhile it is because flat
Face integrated light guide possesses extraordinary polarization conserving properties, so by the tune polarized in planar optical waveguide integrated system
Control, may be implemented communication and sensor-based system in double-channel signal transmission, can in the case where not increasing device complexity,
It realizes that message capacity is double, detects multiple variables simultaneously in sensor-based system.In related detection system, signal light and this are controlled
It is also particularly significant for improving detectivity that vibration light possesses same or similar polarization.
In terms of the performance requirement of device, polarization beam apparatus-rotator, general grade is associated in front of functional integrated device,
Regulate and control for the polarization state to incident optical signal, therefore it has very high requirement to performance.On the one hand, it is desirable that device is gathered around
There is bandwidth big as far as possible, in the system that big metering device integrates, the bottleneck of limitation whole system bandwidth will not be become；Another party
Face, it is desirable that device can have biggish extinction ratio, and crosstalk is minimized in high-speed communication system, also be the design of subsequent device
There are certain surpluses.
Polarization beam apparatus is realized in silicon-base plane optical waveguide at present, i.e., by the transverse electric mode (TE mode) and horizontal magnetic in waveguide
Mould (TM mode) separates, and there are mainly two types of methods.First is that using the birefringent characteristic of different materials, by by silicon nanowires and its
He combines material, stronger birefringent to the light generation of different polarization, and the separation of different polarization is realized with smaller size of device,
Itself the problem is that, device performance is lower, due to the introducing of other materials, increases the complexity of technique, it is also possible to draw
Enter biggish loss；Second is that using the birefringent characteristic of structure, by the structure of the waveguide of design to different polarization have difference compared with
The separation of different polarization light is realized in big response；Such as using device top covering is changed, realize the asymmetry of waveguide cross-section
Property, and then mode hydridization is generated, different polarised lights is separated by Evolution Modes.Itself the problem is that, most of device
Size it is larger, be not easy with other devices compatible, bandwidth of operation is smaller, and delustring is smaller smaller to the tolerance of technique, for one
Realize that the device of cross section asymmetry increases device due to increasing processing step by waveguide cross-section shape a bit
The difficulty of realization.
Summary of the invention
The present invention provides a kind of polarization beam splitting rotator, solves larger correlated polarizations beam splitter loss, bandwidth, extinction ratio not
The problem of meeting the requirements.
In order to achieve the above-mentioned object of the invention, the technical solution adopted by the present invention is as follows:
A kind of polarization beam splitting rotator, comprising: the first tapered transmission line, the second tapered transmission line, the first connection waveguide, evolution area
Wide tapered transmission line, the first output waveguide, front curve waveguide, the narrow tapered transmission line in evolution area, rear curved waveguide and the second output waveguide；
First tapered transmission line as input waveguide, the first tapered transmission line successively connect with the second tapered transmission line, first waveguide,
The wide tapered transmission line in evolution area, the first output waveguide are connected, front curve waveguide successively with the narrow tapered transmission line in evolution area, rear bending wave
It leads, the second output waveguide is connected.
Preferably, the shape of the front curve waveguide and rear curved waveguide is S type.
Preferably, first tapered transmission line, the second tapered transmission line, the wide tapered transmission line in evolution area, the narrow conical wave in evolution area
It leads to be insulated Waveguide With Slow-varied Cross Section structure.
Preferably, the width at the narrow tapered transmission line both ends in the evolution area respectively with front curve waveguide and rear curved waveguide width
It is equal.
Preferably, the first tapered transmission line, the second tapered transmission line, the first connection waveguide, the wide tapered transmission line in evolution area, first defeated
Waveguide, front curve waveguide, the narrow tapered transmission line in evolution area, rear curved waveguide and the second output waveguide have asymmetrical beam waveguide junction out
Structure.
Preferably, the first tapered transmission line and the insulation grading structure that the second tapered transmission line is same slope or be it is different tiltedly
The insulation grading structure of rate.
Preferably, the asymmetrical beam waveguiding structure is under being covered in the top covering on core area and being located under core area
Covering is unequal positioned at the left covering of core area two sides and at least one of of right covering:
Refractive index, thickness, width.
Preferably, the first tapered transmission line, the second tapered transmission line, the first connection waveguide, the wide tapered transmission line in evolution area, first defeated
The core area of waveguide, front curve waveguide, the narrow tapered transmission line in evolution area, rear curved waveguide and the second output waveguide is ridge out, described
The two sides of ridge are partially etched or all etching, the two sides etching depth of the ridge are equal or different.
Preferably, the core area is the double-deck ridge or multilayer ridge structure, with two layers or two layers or more of different height
Ridge.
Compared to the prior art the present invention, has the following beneficial effects:
Technical solution of the present invention, using the gradual pyramidal structure of insulation come the differentiation of implementation pattern, using ridge waveguide
Structure, crosstalk that can effectively between suppression mode do not consider inherently there is asymmetry in the case where top covering, can produce
Mode hydridization；Evolution Modes area specific to polarization beam splitting rotator provided by the invention uses twin-guide grading structure, can
Realize biggish bandwidth and extinction ratio.And there is simple process, advantages of simple structure and simple, there is High Extinction Ratio, big bandwidth, low
The excellent properties such as loss.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of polarization beam splitting rotator of the embodiment of the present invention；
Fig. 2 is the optical waveguide schematic diagram of asymmetrical cross-section at A-A ' in Fig. 1；
Fig. 3 is the optical waveguide schematic diagram of asymmetrical cross-section at B-B ' in Fig. 1；
Fig. 4 is embodiment 1 when TE basic mode passes through the light field Propagation Simulation distribution map of polarization beam splitting rotator；
Fig. 5 is embodiment 1 when TM basic mode passes through the light field Propagation Simulation distribution map of polarization beam splitting rotator.
Specific embodiment
To keep goal of the invention of the invention, technical scheme and beneficial effects more clear, with reference to the accompanying drawing to this
The embodiment of invention is illustrated, it should be noted that in the absence of conflict, in the embodiment and embodiment in the application
Feature can mutual any combination.
As shown in Figure 1, the embodiment of the present invention provides a kind of polarization beam splitting rotator, comprising: the first tapered transmission line 11, second
Tapered transmission line 12, first connects waveguide 21, the wide tapered transmission line 22 in evolution area, the first output waveguide 23, front curve waveguide 24, develops
The narrow tapered transmission line 25 in area, rear curved waveguide 26 and the second output waveguide 27；
First tapered transmission line 11 is used as input waveguide, and the first tapered transmission line 11 successively connects with the second tapered transmission line 12, first
Connect waveguide 21, the wide tapered transmission line 22 in evolution area, the first output waveguide 23 are connected, front curve waveguide 24 successively with the narrow cone in evolution area
Shape waveguide 25, rear curved waveguide 26, the second output waveguide 27 are connected.
Wherein, the shape of the front curve waveguide 24 and rear curved waveguide 26 is S type.
First tapered transmission line 11, the second tapered transmission line 12, the wide tapered transmission line 22 in evolution area, the narrow tapered transmission line in evolution area
25 be insulation Waveguide With Slow-varied Cross Section structure.
The gradual variation for referring to device size of insulation is slower, to can reach insulation (lossless or extremely low damage
Consumption) effect.
The width at narrow 25 both ends of tapered transmission line in evolution area respectively with 26 width of front curve waveguide 24 and rear curved waveguide
It is equal.
First tapered transmission line 11, the second tapered transmission line 12, first connection waveguide, the wide tapered transmission line 22, first in evolution area are defeated
Waveguide 23, front curve waveguide 24, the narrow tapered transmission line 25 in evolution area, rear curved waveguide 26 and the second output waveguide 27 have non-right out
Claim optical waveguide structure.
First tapered transmission line 11 and the second tapered transmission line 12 are the insulation grading structure of same slope or are Different Slope
Insulation grading structure.
The asymmetrical beam waveguiding structure be covered in the top covering on core area be located at core area under under-clad layer or
Person be located at core area two sides left covering and right covering at least one of it is unequal:
Refractive index, thickness, width.
Its unsymmetric structure can carry out a variety of variations.
The asymmetrical beam waveguiding structure can be the transmission structure of top covering and under-clad layer asymmetry in optical waveguide,
One or more of refractive index, thickness, width are unequal, that is, are covered in the top covering on core area and are located under core area
Under-clad layer the unequal width of the unequal thickness of refractive index it is unequal both unequal or three
Person is unequal, so that its cross section is asymmetric up and down.
The asymmetrical beam waveguiding structure can also be that the transmission structure of left side covering and right side covering is not in optical waveguide
Symmetrically, one or more of refractive index, thickness, width are unequal, i.e., left side covering and right side covering refractive index not
Equal width is unequal or both unequal.
First tapered transmission line 11, the second tapered transmission line 12, first connect waveguide 21, the wide tapered transmission line 22, first in evolution area
Output waveguide 23, front curve waveguide 24, the narrow tapered transmission line 25 in evolution area, rear curved waveguide 26 and the second output waveguide 27 core area
Two sides for ridge, the ridge are partially etched or all etching, the two sides etching depth of the ridge are equal or different.
The core area is the double-deck ridge or multilayer ridge structure, the ridge with two layers or two layers or more of different height.
The gradual pyramidal structure of the insulation, the taper of conical optical waveguide are all satisfied adiabatic condition, i.e. light field passes through taper
New mode is not excited after optical waveguide.
As depicted in figs. 1 and 2, mode hydridization area asymmetrical beam waveguiding structure is to be insulated gradual structure, optical waveguide structure
Left and right side is symmetrical or asymmetric, and section is the core area 100 of the double-deck ridge, and 100 liang of core area lateral ridge height is equal, top covering
101 is equal or different with 102 refractive index of under-clad layer.
As shown in figures 1 and 3, Evolution Modes area asymmetrical beam waveguiding structure is to be insulated gradual structure, is asymmetric light wave
Guide structure is the core area of single layer ridge equipped with section, and left and right side height in core area is equal and symmetrical, top covering 201 and lower packet
202 refractive index of layer are equal or different.
The specific course of work of the invention are as follows:
The light in banded wavelength ranges centered on device center operation wavelength inputs on the left of the first tapered transmission line 11.
A kind of operative scenario is that the input of the first tapered transmission line 11 is TE polarization basic mode:
When input is that TE polarizes basic mode, by the first tapered transmission line 11, since the effective refractive index of TE polarization basic mode exists
Be insulated in gradual ridge waveguide and be unsatisfactory for mode hybridization conditions, thus will not emergence pattern hydridization, gradual is the second tapered transmission line
TE in 12 polarizes basic mode；TE in second tapered transmission line 12 polarizes basic mode, and it is wide to enter evolution area by the first connection waveguide 21
Tapered transmission line 22 is propagated forward and from first due to being unsatisfactory for Evolution Modes condition along the wide tapered transmission line 22 in evolution area
Output waveguide 23 exports.
Another operative scenario is that the input of tapered transmission line 1 is TM polarization basic mode:
When the mode of input is that TM polarizes basic mode, by the first tapered transmission line 11, due to effective folding of TM polarization basic mode
It penetrates rate and meets mode hybridization conditions in being insulated gradual ridge waveguide, therefore gradual is that TE polarization in the second tapered transmission line 12 is high
Rank mould；TE in second tapered transmission line 12 polarizes high-order mode, enters the wide tapered transmission line 22 in evolution area by the first connection waveguide 21,
Since its mode effective refractive index meets super model development condition, energy of the mode major limitation in wide tapered transmission line 22 is main
It is evolved into the energy being limited in narrow tapered transmission line 25, and is eventually converted into TE polarization basic mode via rear S type curved waveguide 26, from
The output of second output waveguide 27.
Wherein the width x length and ridge of mode hydridization area tapered transmission line are high, and mould can be occurred by being designed to meet TM basic mode
Formula hydridization, and curved can be evolved into full TE high-order mode.Evolution Modes area, wherein wide conical optical waveguide 22 and narrow conical optical waveguide 25
Length it is consistent, and can make originally the TE high-order mode that is limited in wide conical optical waveguide 22 be gradually evolved into main energetic completely
The mode being limited in narrow conical optical waveguide 25, the length of rear S type curved waveguide 26 are designed to meet major limitation narrow
Super model in conical optical waveguide 25 gradates as TE basic mode.
Embodiment 1
A kind of specific embodiment of polarization beam splitting rotator is given below.
Select the silicon nanowires optical waveguide based on silicon-on-insulator SOI material: its core area 100 is silicon materials, with a thickness of
220nm, 1550nm wavelength refractive rate be 3.4744；Its 102 material of under-clad layer is silica, with a thickness of 2 μm, in 1550nm
Wavelength refractive rate is 1.4404；101 material of top covering is silica, is 1.4404 in 1550nm wavelength refractive rate.
For polarization beam splitting rotator dimensional drawing as shown in Figure 1, relevant parameter is embodied are as follows: the first tapered transmission line
11 both ends width are respectively 0.6 μm, 0.65 μm, and length is 120 μm, and 12 both ends width of the second tapered transmission line is 0.65 μm, 0.8 μ
M, length are 40 μm, and connection 21 width of waveguide is 0.8 μm, and length is 15 μm, the wide 22 both ends width of conical optical waveguide in evolution area point
Not Wei 0.8 μm, 0.5 μm, length is 40 μm, and 23 width of the first output waveguide is 0.5 μm, and preceding 24 width of S type curved waveguide is
0.13 μm, length is 15 μm, and the narrow 25 left and right ends width of conical optical waveguide in evolution area is 0.13 μm, 0.4 μm, and length is 40 μm,
26 length of S type curved waveguide is 35 μm afterwards, and 27 width of output waveguide is 0.4 μm.The wide tapered transmission line in evolution area and narrow tapered transmission line
Between 0.15 μm of interval holding it is constant, ridge is 0.13 μm high, and plate is 0.09 μm thick.
The present embodiment using the above structure transmit as shown in figure 4, practical by size, light field when practical transverse electric TE basic mode inputs
Light field transmission when horizontal magnetic TM basic mode inputs is as shown in Figure 5.It can be seen that in figure, when the mode of input is that TM polarizes basic mode, warp
The first tapered transmission line 11 and the second tapered transmission line are crossed, gradual is the TE polarization high-order mode TE in the second tapered transmission line1；Second taper
TE1 high-order mode in waveguide enters the wide tapered transmission line in evolution area by the first connection waveguide 21, due to meeting super model development condition
The main energetic of high-order mode is gradually evolved into main energetic in wide conical optical waveguide by major limitation and is limited in narrow tapered transmission line
Super model, super model S type curved waveguide 26 after, bending is converted to TE polarization basic mode, and exports from the second output waveguide 27；
And when the mode of input is that TM polarizes basic mode, when mode passes through mode hydridization area and Evolution Modes area, due to
The not hydridization and evolution of emergence pattern, TE polarization basic mode successively pass through the first tapered transmission line, the second tapered transmission line, connection wave
Lead, the wide tapered transmission line in evolution area and finally from the first output waveguide export.
The waveguiding structure of response it can be seen from the above that the present invention makes use of to(for) different polarization realizes the rotation of polarization and divides
Beam plays an important role on piece optical integrated device.
Although disclosed embodiment is as above, its content is only to facilitate understand technical side of the invention
Case and the embodiment used, are not intended to limit the present invention.Any those skilled in the art to which this invention pertains, not
Under the premise of being detached from disclosed core technology scheme, any modification and change can be made in form and details in implementation
Change, but protection scope defined by the present invention, the range that the appended claims that must still be subject to limits.
Claims (9)
1. a kind of polarization beam splitting rotator characterized by comprising the first tapered transmission line, the second tapered transmission line, the first connection wave
It leads, the wide tapered transmission line in evolution area, the first output waveguide, front curve waveguide, the narrow tapered transmission line in evolution area, rear curved waveguide and second
Output waveguide；
As input waveguide, the first tapered transmission line successively connect waveguide with the second tapered transmission line, first, develops first tapered transmission line
The wide tapered transmission line in area, the first output waveguide are connected, front curve waveguide successively with the narrow tapered transmission line in evolution area, rear curved waveguide,
Second output waveguide is connected.
2. polarization beam splitting rotator as described in claim 1, it is characterised in that: the front curve waveguide and rear curved waveguide
Shape is S type.
3. polarization beam splitting rotator as claimed in claim 2, it is characterised in that: first tapered transmission line, the second conical wave
It leads, the wide tapered transmission line in evolution area, the narrow tapered transmission line in evolution area are insulation Waveguide With Slow-varied Cross Section structure.
4. polarization beam splitting rotator as claimed in claim 2, it is characterised in that: the width at the narrow tapered transmission line both ends in evolution area
It spends equal with front curve waveguide and rear curved waveguide width respectively.
5. polarization beam splitting rotator as claimed in claim 2, it is characterised in that: the first tapered transmission line, the second tapered transmission line,
One connection waveguide, the wide tapered transmission line in evolution area, the first output waveguide, front curve waveguide, the narrow tapered transmission line in evolution area, rear bending wave
Leading has asymmetrical beam waveguiding structure with the second output waveguide.
6. polarization beam splitting rotator as claimed in claim 2, it is characterised in that: the first tapered transmission line is with the second tapered transmission line
The insulation grading structure of same slope or the insulation grading structure for Different Slope.
7. polarization beam splitting rotator as claimed in claim 5, it is characterised in that: the asymmetrical beam waveguiding structure is to be covered in
Top covering on core area and the under-clad layer being located under core area or positioned at core area two sides left covering and right covering it is following
At least one it is unequal:
Refractive index, thickness, width.
8. polarization beam splitting rotator as claimed in claim 2, it is characterised in that: the first tapered transmission line, the second tapered transmission line,
One connection waveguide, the wide tapered transmission line in evolution area, the first output waveguide, front curve waveguide, the narrow tapered transmission line in evolution area, rear bending wave
Leading with the core area of the second output waveguide is ridge, and the two sides of the ridge are partially etched or all etching, the two sides of the ridge are carved
Lose deep equality or difference.
9. polarization beam splitting rotator as claimed in claim 8, it is characterised in that: the core area is the double-deck ridge or multilayer ridge knot
Structure, the ridge with two layers or two layers or more of different height.
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| CN201710475582.2A CN109100828A (en) | 2017-06-21 | 2017-06-21 | A kind of polarization beam splitting rotator |
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| CN109633814A (en) * | 2019-01-15 | 2019-04-16 | 浙江大学 | A kind of true zero level integrated type optical waveguide half-wave plate |
| CN110412685A (en) * | 2019-06-26 | 2019-11-05 | 华南师范大学 | Circular polarisation mode based on integrated dielectric optical waveguide identifies and beam splitting device |
| CN112327410A (en) * | 2020-11-19 | 2021-02-05 | 西南交通大学 | Two-stage sub-wavelength grating silicon-based optical polarization beam splitting rotator based on asymmetric coupling |
| CN112394447A (en) * | 2020-11-10 | 2021-02-23 | 武汉光谷信息光电子创新中心有限公司 | Ultra-wideband beam splitting and combining device |
| CN112433295A (en) * | 2020-11-10 | 2021-03-02 | 武汉光谷信息光电子创新中心有限公司 | Ultra-wideband beam splitting and combining device |
| CN113009628A (en) * | 2019-12-18 | 2021-06-22 | 中兴光电子技术有限公司 | Polarization rotation high-order mode converter and beam splitter thereof |
| CN113391395A (en) * | 2021-06-01 | 2021-09-14 | 西安邮电大学 | Compact on-chip polarization beam splitting rotator based on Bezier curve graded waveguide |
| WO2021185179A1 (en) * | 2020-03-20 | 2021-09-23 | 青岛海信宽带多媒体技术有限公司 | Optical module |
| CN114624815A (en) * | 2022-03-08 | 2022-06-14 | 华中科技大学 | Passive waveguide type polarization rotation beam splitter with large manufacturing tolerance and high polarization extinction ratio |
| CN114859462A (en) * | 2022-05-26 | 2022-08-05 | 西安电子科技大学 | Silicon nanowire light polarization converter with high conversion efficiency and wide band and simple structure |
| WO2023025065A1 (en) * | 2021-08-25 | 2023-03-02 | 中兴光电子技术有限公司 | Polarization rotation beam splitter and photonic integrated chip |
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| CN110412685A (en) * | 2019-06-26 | 2019-11-05 | 华南师范大学 | Circular polarisation mode based on integrated dielectric optical waveguide identifies and beam splitting device |
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| CN112433295B (en) * | 2020-11-10 | 2022-08-16 | 武汉光谷信息光电子创新中心有限公司 | Ultra-wideband beam splitting and combining device |
| CN112327410B (en) * | 2020-11-19 | 2021-08-03 | 西南交通大学 | Two-stage sub-wavelength grating silicon-based optical polarization beam splitting rotator based on asymmetric coupling |
| CN112327410A (en) * | 2020-11-19 | 2021-02-05 | 西南交通大学 | Two-stage sub-wavelength grating silicon-based optical polarization beam splitting rotator based on asymmetric coupling |
| CN113391395A (en) * | 2021-06-01 | 2021-09-14 | 西安邮电大学 | Compact on-chip polarization beam splitting rotator based on Bezier curve graded waveguide |
| WO2023025065A1 (en) * | 2021-08-25 | 2023-03-02 | 中兴光电子技术有限公司 | Polarization rotation beam splitter and photonic integrated chip |
| CN114624815A (en) * | 2022-03-08 | 2022-06-14 | 华中科技大学 | Passive waveguide type polarization rotation beam splitter with large manufacturing tolerance and high polarization extinction ratio |
| CN114859462A (en) * | 2022-05-26 | 2022-08-05 | 西安电子科技大学 | Silicon nanowire light polarization converter with high conversion efficiency and wide band and simple structure |
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